ADE MicrosenseTM II 5300 User manual

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05/25/00
MicrosenseTM II
Model 5300
Gaging System
with 5130 and 5210 Modules
User Manual
- Revision B -
Part Number 028653-R01
Information in this document is subject to change without notice. No part of this document
may be reproduced or transmitted in any form or by any means, electronic or mechanical, for
any purpose, without the express written permission of ADE Technologies (except for copies
made as working documents for use with ADE Technologies-supplied equipment).
© 2000-2002 ADE Technologies. All rights reserved.
The ADE Technologies logo is a registered trademark and Microsense is a trademark of
ADE Technologies in the United States and other countries.
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2 - Microsense II Model 5300 Gaging System
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Microsense II Model 5300 Gaging System - 3
Table of Contents
Revision History of this Manual ................................................................................................... 4
Model 5300 Gaging System
Functional Overview ...................................................................................................................... 7
Applications .................................................................................................................................... 7
System Specifications ................................................................................................................... 8
Selected Measurement Concepts ................................................................................................ 9
Displacement ..................................................................................................................... 9
Runout ............................................................................................................................. 10
Step Height ...................................................................................................................... 11
Velocity ............................................................................................................................ 11
Acceleration ..................................................................................................................... 11
Physical Description .................................................................................................................... 12
The Console .................................................................................................................... 12
The Display Module Selector Switch............................................................................ 12
The Analog Display ........................................................................................................ 13
The Rear Panel ................................................................................................................ 14
Setting Power Line Voltage ........................................................................................... 14
Changing Fuses .............................................................................................................. 15
Input-power Voltage Monitor ......................................................................................... 15
RS-232 Connector ........................................................................................................... 15
Remote Calibration Connector...................................................................................... 15
Analog Output Connector .............................................................................................. 16
Microsense Probes ...................................................................................................................... 17
Probe Theory of Operation ............................................................................................ 18
Probe Placement ............................................................................................................. 18
Probe Mounting .............................................................................................................. 19
Cleaning Probes ............................................................................................................. 19
Available Probe Styles ................................................................................................... 20
Axial Probes .............................................................................................................. 21
Blade Probes ............................................................................................................ 22
Environmental Considerations ................................................................................................... 23
Temperature Stability ..................................................................................................... 23
Humidity ........................................................................................................................... 23
Electrical Grounding ...................................................................................................... 23
Setting Up The Model 5300 Gaging System ............................................................................. 24
Setup Suggestions: Runout Measurements............................................................................ 25
Setup Suggestions: Mastering .................................................................................................. 26
Setup Suggestions: A+B ............................................................................................................ 28
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4 - Microsense II Model 5300 Gaging System
Model 5130 Gaging Module
Overview .................................................................................................................................... 29
Model 5130 Module Specifications ............................................................................................ 29
Probes .................................................................................................................................... 30
Nominal, Near and Far Standoffs .............................................................................................. 30
Gage Setup ................................................................................................................................... 32
Configuration ...................................................................................................................... 32
Power Requirements ......................................................................................................... 32
Probe Connection .............................................................................................................. 32
Tolerance Limits ................................................................................................................ 33
Default Limit Configuration .............................................................................................. 33
Outputs ............................................................................................................................... 33
Connections ................................................................................................................................. 34
Pinouts ................................................................................................................................ 34
User Adjustments ........................................................................................................................ 36
Front Panel Adjustments ........................................................................................................... 36
Configuration Adjustments......................................................................................................... 38
Scale-Factor Adjustment ............................................................................................................. 40
Range & Calibration Adjustment ............................................................................................... 41
Appendix A: Grounding ............................................................................................................. 42
Model 5210 Velocity & Acceleration Gaging Module
Velocity and Acceleration Functions ......................................................................................... 45
Velocity and Acceleration Outputs ............................................................................................ 45
Available Filters ........................................................................................................................... 46
Overrange Detector ..................................................................................................................... 46
Arithmetic Circuits ....................................................................................................................... 46
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Microsense II Model 5300 Gaging System - 5
List of Illustrations
Probe-Target Displacement .......................................................................................................... 9
Displacement On A Moving Surface ........................................................................................... 9
Radial Runout .............................................................................................................................. 10
Axial Runout ................................................................................................................................. 10
Flatness Runout ........................................................................................................................... 10
Step Height ................................................................................................................................... 11
Analyzing Displacement A & Displacement B.......................................................................... 11
Model 5300 Front Panel .............................................................................................................. 13
Model 5300 Rear Panel ............................................................................................................... 14
Usage Diagram for Series 5000 Probes .................................................................................... 17
Available Series 5000 Probe Styles ........................................................................................... 20
Models 5504, 5501, 5502 and 5503 Axial Probes ..................................................................... 21
Models 5601, 5602, 5603, 5604 and 5605 Blade Probes .......................................................... 22
Runout Measurements ................................................................................................................ 25
Zero Reading with Master ........................................................................................................... 26
Negative Reading with Sample .................................................................................................. 27
A+B Thickness Measurement Applications .............................................................................. 28
Probe Operating Range and Standoffs ..................................................................................... 30
Probe-to-Target Distances .......................................................................................................... 31
Model 5130 Gaging Module Front Panel ................................................................................... 37
Model 5130 Jumper Locations ................................................................................................... 43
Model 5210 Velocity and Acceleration Module Front Panel ................................................... 45
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6 - Microsense II Model 5300 Gaging System
Revision History of this Manual
Revision Date Description of change
Preliminary 07/31/98 First version
A 08/28/98 Illustrations added
I/O connector "-ANALOG OUT" incorrectly specified as Pin 24 -
changed to Pin 26.
B 04/20/00 Released per ECO 624
Manual rewritten to include sections on Model 5300 Console and
Model 5210 Velocity and Acceleration Module. Topics from the
Model 3401 Gaging System operation manual also included.
Formatting and font style of manual changed as well.
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Microsense II Model 5300 Gaging System - 7
MicrosenseTM II Model 5300 Gaging System
Functional Overview
The Model 5300 is a modular, configurable, benchtop gaging system that accepts up to four Model 5130
noncontact capacitive displacement-gaging modules, a single Model 5210 velocity and acceleration module
and a single display module. Rear-panel connectors provide differential analog outputs for all channels,
access to a simple serial digital interface for remote calibration of the 5130 modules and a power-entry
module configurable for all international power standards.
Each Model 5130 module connects to a single capacitive probe and offers high-bandwidth and superior
signal-to-noise ratio. The modules are especially suitable for dynamic measurements such as vibration and
high-speed spindle analysis.
The Model 5210 module connects to channels A & B and provides velocity, acceleration and displacement
of A, B, A+B, and A-B as selected by the operator.
Please refer to the individual sections on the Model 5130 and Model 5210 modules for details on their
operation.
Applications
The Model 5300 gaging system provides noncontact, one- to four-channel measurements suited to a wide
variety of applications. The system can be used to measure values including thickness, step height, dy-
namic diameter variation, concentricity, surface velocity and surface acceleration.
The gage is intended for general purpose industrial applications such as:
nInspection/Evaluation of High-Speed Ball, Hydrodynamic or Air Bearings
nMachine Tool Spindle Performance Evaluation/Monitoring
nHigh-Speed PCB Drilling Spindle Evaluation/Monitoring
nPrecision Optics Processing Equipment Evaluation/Monitoring
nRun-Out/NRRO Motor or Disk Analysis
nVibration Analysis
nVelocity, Acceleration, Flutter and Warp Analysis
nNon-Contact, Non-Destructive Measurement Applications
nComputer disk Edge Runout Applications
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8 - Microsense II Model 5300 Gaging System
Model 5300 Gaging System Specifications
Performance:
Ranges: ±25 microns to ±500 microns full scale, depending on probe selection.
Frequency Response: Jumper selectable filtering: 1 kHz, 5 kHz, 20 kHz, 100 kHz
Linearity: Typically 0.1% of full-scale (see note 1)
Resolution: 1 nanometer rms @ 100 kHz bandwidth (see note 1)
Functions: (Standard Unit)
Meter: Zero meter reading indicates probe is at nominal standoff from measured target.
Option for differential measurements
A+B: Sum of the A probe and the B probe displacement signals
A-B: Difference of the A probe and the B probe displacement signals
EMC Certification:
The Model 5300 Capacitance Gage has been tested and is in compliance with the requirements set forth
in EMC Directives EN 55022, EN 50082-1, 89/336/EC, IEC 801-2, IEC 801-3, and IEC 801-4.
Test Report Number: CE101195
Model 5120 Velocity/Acceleration Option:
A plug-in VA option is available for the Model 5300 system. When configured with this VA option, Velocity
and Acceleration measurements are derived for the probe selected on the channel switch. Filtering is
provided by three-pole Bessel or Butterworth low-pass plug-in filters. The user selects the upper roll-off
frequency (as defined by ANSI standards) over a range from 1-20 kHz.
Mechanical Parameters:
Dimensions: Width: 16.5 inches (42.31 cm)
Height: 5.75 inches (14.74 cm)
Depth: 13.0 inches (33.33 cm)
Shipping Weight: 23 pounds (10.35 kg)
Power Requirements:
The 5300 System utilizes a power supply that will accept virtually any standard input voltage in the world.
Please specify the proper IEC320 power cord for your region.
Input Voltages: 100-240 VAC, externally switched
Input Frequency: 50-60 Hz
Notes:
1. Parameters listed are typical when using a 2mm active sensor area and a range of ±50 microns.
Specifications will vary depending upon range, standoff distance, and probe active sensor area. Resolution
improves with larger sensor areas, reduced bandwidth and smaller ranges. Ideal Operating Temperature is
60-90°F (16-35°C). For specific resolution for your application, talk to your ADE Technologies’ sales repre-
sentative.
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Microsense II Model 5300 Gaging System - 9
Selected Measurement Concepts
Microsense probes measure displacement. Measurements which may be derived using the Model 5300
gaging system are described briefly in the pages which follow.
Displacement
"Displacement" is the distance change between the probe and a target surface.
Surface variations can be examined by measuring displacement values over the entire surface of a moving
object.
Target
Target
Probe Sensing Surface
Probe Sensing Surface
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10 - Microsense II Model 5300 Gaging System
Runout
"Runout" measurements examine the variation in displacement between the probe and a surface, typically
as it rotates around an axis.
"Radial runout" examines variations in the radius from the axis of rotation to all points on the rotating
surface examined by the probe.
"Axial runout" examines variations in displacement from the probe to a flat surface as it spins around an
axis.
"Flatness runout" examines variations in displacement from the probe to a flat surface as it moves parallel
to the probe sensing surface.
Radial Runout
Axial Runout
Flatness Runout
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Microsense II Model 5300 Gaging System - 11
Step Height
"Step height" is an example of a two-channel measurement, where one displacement value is subtracted
from another.
Two probes can be used independently (without adding or subtracting displacement values) to analyze
displacement in one direction with respect to displacement in another direction. This relationship may be
displayed on an oscilloscope.
Velocity
The "surface velocity" of a measured object describes the rate at which the displacement measurement is
changing. This value is equal to the first derivative of displacement with respect to time.
Acceleration
The "surface acceleration" of a measured object describes the rate at which the surface velocity is chang-
ing. This value is equal to the second derivative of displacement with respect to time.
Displacement A
Displacement B
Probe B Probe A
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12 - Microsense II Model 5300 Gaging System
Physical Description
The Model 5300 Gaging System consists of two major components, the main console (which includes the
analog display module) and the probes.
The Console
The Model 5300 console provides indicators, controls and connectors for the gaging system and includes a
large analog meter which monitors the output of each gaging channel. At the console's front panel, the
operator can select the type of measurement to be made and view the measurement results.
The rear panel connectors supply output signals to user-supplied equipment.
Hard, durable casing and modular electronic components make the Model 5300 a rugged instrument which
is well-suited for production environments.
The Display Module Selector Switch
The knob located on the bottom left of the display module is referred to as the "Display Module Selector
Switch". This switch controls what channel or channels will be connected to the analog meter and the Model
5210 module, if this module is installed in your system.
Channels "A", "B", "A+B" or "A-B" are available as inputs to the Model 5210 module; channels "C" and "D"
are not available for connection to the 5210. (For purposes of this discussion, channel "A" refers to the
module that is plugged into the left-most slot of the Model 5300 console. Channel "B" is the next module to
the right of channel "A", and so on.)
When using the Model 5210 module, after all probes have been set up, turn the Display Module Selector
Switch to the desired input channel. For example, if the switch is positioned on "A", channel A is connected
to the Model 5210 module and the displacement, velocity and acceleration signals for channel A will appear
on the front-panel connectors on the Model 5210.
Even if the velocity and acceleration signals of the Model 5210 are not used, its ability to provide "A+B" and
"A-B" signals will frequently be of interest. A+B is often used for making differential thickness measure-
ments. A-B is often used for making differential position or step-height measurements.
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Microsense II Model 5300 Gaging System - 13
The Analog Display
The analog display allows you to view the output of each gaging channel. The analog meter is most useful
for setting the probe-to-target distance. For example, to adjust the channel A probe in its fixture, set the
Display Module Selector Switch to "A" and carefully adjust the position of the probe. As the probe is pulled
away from its target, the meter will swing toward the "Far" position. As the probe is pushed toward its target,
the meter will swing toward the "Near" position. When the meter is centered, the probe is also centered in
its range, allowing symmetrical deviation of the target from its current position.
Analog Meter
Display Module Selector Switch
Microsense IIMicrosense II
5300
Analog Display Module
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14 - Microsense II Model 5300 Gaging System
The Rear Panel
An illustration of the rear panel of the Model 5300 console is shown below:
Setting Power Line Voltage
Although the Model 5300 system is configured by ADE Technologies before shipment, you should verify
that the power entry module is set for the correct line voltage before turning the unit on. Locate the power
entry module on the Model 5300 rear panel and note what voltage designation the white pin is near. If the
voltage is not set correctly for your facility's input power, you may easily change the setting. First, remove
the power entry module cover (by prying it off with a small screwdriver). Rotate the small circuit card inside
to the correct position for the available power line voltage and replace the cover.
Note that the 5300 can be set to accept four international voltages:
n100 VAC, 50 to 60 Hz
n120 VAC, 50 to 60 Hz
n220 VAC, 50 to 60 Hz
n240 VAC, 50 to 60 Hz
The Model 5300 has a built-in safety mechanism to protect the electronics against improper line voltages.
For example, if the power entry module was set for 100 or 120 VAC and plugged into 220 or 240 VAC, a
crowbar circuit would instantaneously cause the fuses to blow, thereby protecting the electronics. Constant
fuse outage, therefore, is normally a sign of an improperly-set power entry module.
RS-232
Connector
Input Power
Voltage Monitor
Remote Cal
Connector
Power Entry Module Analog
Output
Connector
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Microsense II Model 5300 Gaging System - 15
Changing Fuses
The Model 5300 uses two 5mm by 20mm metric fuses that meet all IEC standards. They are rated at 0.5
amp, 250 volt, slow-blow. Replace only with similar types, such as "Littelfuse" part 218.500. To change the
fuses, pry the cover off the power entry module and remove the plastic fuse holder. The fuses can then be
easily withdrawn from the holder and replaced with new ones.
Input-power Voltage Monitor
The rear panel has two yellow LEDs labeled “Line Voltage, High, Low.” When the unit is on, both lights
should be out. If the “Low” light is on, the power line voltage supplied to the Model 5300 is too low. This may
indicate that the power entry module has been set incorrectly, or that the line voltage is not to specification.
Analogously, when the “High” light is on, the power entry module is either not set correctly or the line voltage
is not to specification.
RS-232 Connector
This connector is provided for future enhancements and carries no signals at present.
Remote Calibration Connector
This connector provides access to a serial digital communications bus that can be used to control calibra-
tion of the Model 5130 module by means of an external computer. This function is intended for special
circumstances. Contact ADE Technologies for instructions on using this feature.
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16 - Microsense II Model 5300 Gaging System
Analog Output Connector
The analog output 25-pin "D" subminiature connector provides differential output signals from all channels.
Its pinout is as follows:
Pin Cable Wire Signal
Position
1 1 gnd
14 2 ch1+
2 3 ch1-
15 4 ch1 com
3 5 ch2+
16 6 ch2-
4 7 ch2 com
17 8 ch3+
5 9 ch3-
18 10 ch3 com
6 11 ch4+
19 12 ch4-
7 13 ch4 com
20 14 velacc/ch5+
8 15 velacc/ch5-
21 16 velacc/ch5 com
9 17 display module+
22 18 display module-
10 19 display module com
23 20 display module com
11 21 display module com
24 22 O/R com
12 23 O/R com
25 24 velacc O/R
13 25 display module O/R
NOTE:
Signals are listed by order
of their cable position and
not by order of their pin
number.
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Microsense II Model 5300 Gaging System - 17
Microsense Probes
Microsense noncontact probes allow precise positional measurement of stationary or moving surfaces.
Signals provided by the probe are processed by circuitry housed within the console to calculate surface
position and related parameters. Because the measurement is made without physical contact, probes are
prevented from damaging the examined surface or altering the parameter being measured.
Each probe consists of three distinct parts:
1) a tip which houses the sensor and associated circuitry
2) a driver circuit board mounted adjacent to the tip containing electronic circuitry
3) a 3-meter detachable cable which carries signals from the probe to the gaging console.
In order to accommodate a wide range of physical constraints, Microsense probes are available in a variety
of physical configurations (such as axial and blade).
The surface of the probe tip contains a sensor, insulated from the housing. During operation, the sensor is
mounted in close proximity to a target. This creates a capacitor, with the probe sensor and target surface
serving as its plates. The driver supplies a high-frequency voltage signal to the sensor. Circuitry in the
probe measures the capacitance and generates a current signal representing probe-to-target displace-
ment. The probe cable routes this signal from the probe to the console.
Probes are housed in stainless steel of sufficient strength to withstand forces inherent in proper fixturing.
Low profile probes have holes in their housing to accept mounting hardware. Careful probe handling is
required to avoid scratching the probe's sensing area.
Usage Diagram for Series 5000 Probes
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18 - Microsense II Model 5300 Gaging System
Probe Theory of Operation
Microsense noncontact probes measure displacement using a capacitive principle. A sensor in the probe
tip is driven with a voltage signal, forming a capacitor with the grounded target surface. Circuitry in the
probe tip measures the resulting capacitance and provides a current related to probe-to-target distance.
The measured capacitance is given by the following equation:
C = kA/d + Co
where: C is the capacitance measured between sensor and target surface,
k is the dielectric constant of free space,
A is the surface area of the probe sensor,
d is the probe-to-target distance, and
Co is the stray capacitance, arising primarily from electric field effect and characteristics
of probe construction.
The adverse effects of stray capacitance on measurements can be minimized by keeping the stray capaci-
tance constant over the temperature and measurement ranges to be used, or by constructing the probes in
such a way as to reduce stray values as much as possible. If probe components are selected with matching
coefficients of thermal expansion, measurement problems stemming from temperature-related stress and
distortion can be kept to insignificant levels over the specified range of operating temperature.
Probe Placement
The sensing area of the probe should be positioned parallel to the target surface, such that the probe-to-
target distance is within the probe's standoff range. Ideally, the sensor should also be positioned at least a
sensor diameter distance from the nearest edge of a flat target surface. Cylindrical target surfaces should
have diameters of at least four times the sensor diameter. Spherical target surfaces should have diameters
of at least five times the sensor diameter/dimension.
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Microsense II Model 5300 Gaging System - 19
Probe Mounting
Probes are mounted in one of two ways. Axial units are secured by clamping pressure evenly distributed
around the probe tip. Others are mounted with screws inserted into the probe (blade type). Probes have
a preferred clamping area, indicated on the probe outline drawing. Do not use screws to mount probes not
designed to be screw-mounted.
All system fixturing should be rigid and free from any stress that could cause flexing of the surfaces.
Stainless steel or cast-iron fixtures and granite surfaces work well.
The probe should be mounted in a stand that will prevent a collision with the sample. The fixturing stand
should be close enough to the console to allow cable connection. If the probe cable becomes damaged,
it may be easily replaced.
Cleaning Probes
In order to provide accurate measurements, the system probe(s) should be protected from excessive dirt
and dust. Remove foreign materials that may accumulate during normal operation by cleaning the probe's
sensing areas periodically:
nUse a cotton swab with denatured or isopropyl alcohol to clean the sensing area.
Let dry completely.
When not in use, it is recommended to keep the sensing areas covered with the provided caps.
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