Edwards SCU-XL800 User manual

MT-57E-101-A
Description Voltage
SCU-XL800 Control Unit 200 - 240 Va.c.
100 - 120 Va.c.
SCU-XL800 Control Unit
Instruction Manual (C)
STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A): STP pump generic Instruction Manual
Supplied with STP pump
Instruction Manual (B): STP pump specific information
Supplied with STP pump
Instruction Manual (C):
(This Instruction Manual)
STP control unit Instruction Manual
Supplied with STP control unit
Copyright 2008 Edwards Japan Limited. All rights reserved. Printed in Japan.

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The description of this product consists of the three-volumed Instruction Manuals. Read through each
Instruction Manual before operation.
The separate volume contents of each description are as follows:
Instruction Manual (A)
STP pump generic Instruction Manual:
• Introduction
• Installation of the STP pump
• Installation of the STP control unit
• Operation
• Safety functions
• Maintenance and inspection
• Storage and disposal
• Service, Spares and accessories
Instruction Manual (B)
STP pump specific information:
• Technical data
• How to Secure the STP pump
• Temperature Management System （TMS）
Instruction Manual (C)
STP control unit Instruction Manual:
• Introduction
• Technical data
• Installation
• Operation
• Serial communication protocol
• STP-Link (except for SCU-750)
• Maintenance
• Storage, transportation and disposal
• Service, spares, and accessories
Keep the manuals in an easily accessible location.

SCU-XL800 Control Unit for Turbomolecular Pump
July 08 i Issue 1-a
PAGE
i
CONTENTS
Section Title Page
1 INTRODUCTION 1
1.1 Scope and definitions 1
1.2 Applied standards 2
1.3 Limited warranty 2
1.3.1 Warranty period 2
1.3.2 Item warranted 2
1.3.3 Disclaimer 2
1.3.4 Spare parts 3
1.4 Labels 3
1.5 Label affixing positions 6
1.6 General description 7
1.6.1 Cable sets 8
2 TECHNICAL DATA 9
2.1 SCU-XL800 specifications 9
3 INSTALLATION 13
3.1 Unpacking 13
3.2 Front panel 13
3.3 Rear panel 16
3.4 Precautions before installation 17
3.4.1 Operating environment 17
3.4.2 Insulation test 17
3.4.3 Installation area 18
3.5 Attaching the SCU-XL800 to a rack 19
3.6 Cable connection 20
3.6.1 STP connection cable 21
3.6.2 TMS connection cable 22
3.6.3 Power cable 23
3.7 Connecting to semiconductor equipment 25
3.7.1 Connecting to power 25
3.7.2 Emergency off circuit (EMO circuit) 25
3.8 Remote communication 26
3.8.1 Parallel communication 26
3.8.2 Serial communication 26
3.9 Adjustment methods 27
3.9.1 Tuning 27
3.9.2 Tuning method 27
3.9.3 Change of data after tuning 29
3.10 Confirmation mode 30
3.10.1 Confirmation method 30
3.11 Parameter set mode 32
3.11.1 Remote operation setting 32
3.11.2 Rotational speed setting 32
3.11.3 TMS setting 32
3.11.4 Rotational inhibit signal setting 32

SCU-XL800 Control Unit for Turbomolecular Pump
July 08 ii Issue 1-a
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CONTENTS (CONTINUED)
Section Title Page
3.11.5 Emergency vent valve setting 32
3.11.6 Second Damage Limit setting 33
3.11.7 Pump air-cooling fan output setting 33
3.11.8 Warning function setting 34
3.11.9 Serial port COM1 setting 35
3.11.10 Serial port COM2 setting 35
3.11.11 Serial port COM3 setting 35
3.11.12 Date/Time setting 35
3.11.13 Factory setting 35
3.11.14 Parameter setting procedure 36
3.12 Manual operation mode 42
4 OPERATION 43
4.1 Before starting the STP pump 43
4.1.1 Confirmation before starting 43
4.1.2 Confirmation of vacuum system 43
4.2 Powering ON 44
4.2.1 Self test 44
4.2.2 "CAUTION" message in the self test state 44
4.3 How to start/stop the STP pump 45
4.4 Manual start/stop the STP pump 45
4.4.1 Starting the STP pump 45
4.4.2 Stopping the STP pump 45
4.4.3 Starting the STP pump after stopping 45
4.5 Remote operation 47
4.5.1 Input signal pins 47
4.5.2 Output signal pins 49
4.5.3 Remote setting 52
4.5.4 Starting/Stopping the STP pump 52
4.6 Rotation INHIBIT signal 53
4.6.1 Starting the STP pump after stopping 54
4.6.2 Starting the STP pump after a safety function operates 54
4.7 Powering OFF 54
4.8 Operating the TMS unit (for use with the TMS unit) 55
4.8.1 Before starting 55
4.8.2 Starting/Stopping 55
4.8.3 Setting the TMS unit function 55
4.8.4 Temperature control 55

SCU-XL800 Control Unit for Turbomolecular Pump
July 08 iii Issue 1-a
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iii
CONTENTS (CONTINUED)
Section Title Page
5 SERIAL COMMUNICATION PROTOCOL 57
5.1 Introduction 57
5.2 Connection and setting up 57
5.2.1 Signal connection 57
5.2.2 Connecting the RS485 60
5.2.3 Communication parameter setting 61
5.3 Protocol specifications 61
5.3.1 General description 61
5.3.2 Standard transmission frame
(in the RS232/RS485 single point connection) 62
5.3.3 Control command
(in the RS232/RS485 single point connection) 63
5.3.4 Query command
(in the RS232/RS485 single point connection) 64
5.3.5 Transmission data format 65
5.3.6 Frame control (checksum) 66
5.3.7 Error control 66
5.3.8 Transmission frame in the RS485 multi-point connection 66
5.3.9 Control command in the RS485 multi-point connection 68
5.3.10 Query command in the RS485 multi-point connection 69
5.3.11 Broadcasting command in the RS485 multi-point connection 70
5.4 Command specifications 71
5.4.1 Command list 71
5.4.2 ReadMeas 72
5.4.3 Command 72
5.4.4 ReadFailMess 73
5.4.5 ReadModFonct 76
5.4.6 ReadVersion 78
5.4.7 ReadCounters 79
5.4.8 ReadSetPoint 80
5.4.9 ReadMotorTemp 80
5.4.10 ReadStatus 81
5.4.11 ReadEvents 82
5.4.12 SetSpeedSetPoint 83
5.4.13 ReadSpeedSetPoint 84
5.4.14 ReadModFonctWithWarning 85
5.4.15 ReadMeasValue 88
6 STP-LINK 91

SCU-XL800 Control Unit for Turbomolecular Pump
July 08 iv Issue 1-a
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iv
CONTENTS (CONTINUED)
Section Title Page
7 MAINTENANCE 93
7.1 Safety functions 93
7.1.1 Power failure 93
7.1.2 Operation after a power recovery 94
7.1.3 Abnormal state of magnetic bearing 94
7.1.4 Excessive vibration 95
7.1.5 Motor driver overload 95
7.1.6 Overheating inside the STP pump 95
7.1.7 Overheating inside the SCU-XL800 95
7.1.8 Overspeed 95
7.1.9 Abnormality/Error in the TMS unit (for use with the TMS unit) 96
7.1.10 Failure of the air-cooling fan 96
7.2 "WARNING" message function 97
7.2.1 "WARNING" message display function 97
7.3 "WARNING" message description 98
7.3.1 Damage point function 98
7.3.2 First damage limit 98
7.3.3 Second damage limit 98
7.3.4 Imbalance X_H, X_B, Z 99
7.3.5 Pump run time over 99
7.3.6 Pump overload 99
7.3.7 Low RTC battery 99
7.4 "WARNING" function setting 100
7.5 Error at self test state 101
7.5.1 Error after self test 102
7.5.2 Error messages 102
7.5.3 Troubleshooting immediately after power failure occurs 102
7.5.4 Troubleshooting immediately
after other abnormality/errors occur 103
7.6 When error message is not displayed on LCD 111
7.6.1 Abnormalities when powering ON 111
7.6.2 Abnormalities when performing rotational operation 111
7.6.3 Other abnormalities 112
7.7 "Error Record" message display function 112
7.8 Maintenance and inspection 113
7.8.1 Replacing the fuses 113
7.8.2 Cleaning 114
7.8.3 Overhaul 114
8 STORAGE, TRANSPORTATION AND DISPOSAL 115
8.1 Storage of the SCU-XL800 115
8.1.1 Transporting for repair or overhaul 115
8.2 Disposal 116

SCU-XL800 Control Unit for Turbomolecular Pump
July 08 v Issue 1-a
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CONTENTS (CONTINUED)
Section Title Page
9 SERVICE, SPARES AND ACCESSORIES 117
9.1 Introduction 117
9.2 Service 117
9.3 Spares 117
9.4 Accessories 118

SCU-XL800 Control Unit for Turbomolecular Pump
July 08 vi Issue 1-a
PAGE
vi ILLUSTRATIONS
Figure Title Page
1 High voltage device caution label 3
2 Voltage caution label 4
3 Safety instruction label 4
4 Connector caution label 4
5 Voltage rating label 5
6 Label affixing positions 6
7 SCU-XL800 control unit 7
8 Configuration of the STP pump with the TMS 8
9 SCU-XL800 dimensions (mm) 11
10 SCU-XL800 front panel 13
11 SCU-XL800 rear panel 16
12 Installing the SCU-XL800 18
13 Example of securing the SCU-XL800 19
14 STP pump connection cable 21
15 TMS connection cable (standard) 22
16 Power cable 23
17 Connecting method of the power cable without plug 24
18 REMOTE X7 connector 26
19 Connector X3A, X3B, X6 (D-sub 9) 26
20 Tuning procedures 28
22 Parameter setting method 37
23 Parameter setting method (continued) 38
24 Parameter setting method (continued) 39
25 Parameter setting method (continued) 41
26 Manual operation method 42
27 Operational procedures 46
28 REMOTE X7 input signal pins 49
29 REMOTE X7 output signal pins 51
30 Serial communication 57
31 Connector X3A/X3B (D-sub 9) 58
32 Connector X6 (D-sub 9) 58
33 RS485 connections 60
34 PC to SIM communication 61

SCU-XL800 Control Unit for Turbomolecular Pump
July 08 vii Issue 1-a
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vii
TABLES
Table Title Page
1 Turbomolecular pumps 7
2 SCU-XL800 front panel functions 14
3 SCU-XL800 front panel functions (continued) 15
4 SCU-XL800 rear panel connection 16
5 Power cable 24
6 User setting data list 29
7 Causes of "CAUTION" at the self test state 44
8 REMOTE X7 input signal pins 48
9 REMOTE X7 output signal pins 50
10 Rated contacts for relays CR1 to CR10 52
11 Starting/Stopping the STP pump
during remote operation (REMOTE X7) 52
12 Rotation INHIBIT signal input 53
13 Reset operation during remote operation (REMOTE X7) 54
14 X3A/X3B pin position 57
15 X6 pin position 58
16 Communication parameters 61
17 Transmission control characters 62
18 Pump operation commands 70
19 Command list 71
20 Pump operation commands 73
21 Error message values 75
22 Error message values (continued) 76
23 Pump operation mode 77
24 Remote mode 82
25 Warning value bit assign 86
26 Functions of STP-Link 91
27 Backup rotational speed 93
28 States of LCD, LEDs and REMOTE output signals
at a power failure 94
29 Accumulated damage point and warning message 98
30 Default setting of "WARNING" function 100
31 Factory setting and variable range 100
32 Error messages at self test state 101
33 Error messages after self test 104
34 Error messages after self test (continued) 105
35 Error messages after self test (continued) 106
36 Error messages after self test (continued) 107
37 Error messages after self test (continued) 108
38 Error messages after self test (continued) 109
39 Error messages after self test (continued) 110
40 Troubleshooting when powering ON 111
41 Troubleshooting when performing the STP pump
start operation 111
42 Troubleshooting while the STP pump is rotating 112

SCU-XL800 Control Unit for Turbomolecular Pump
July 08 viii Issue 1-a
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SCU-XL800 Control Unit for Turbomolecular Pump
July 08 1 Issue 1-a
1
INTRODUCTION
1 INTRODUCTION
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the Edwards SCU-XL800
control unit (abbreviated to "SCU-XL800" throughout this manual) for the Turbomolecular pump (STP).
You must use the SCU-XL800 as specified in this manual.
The procedures in this manual must be followed before you install, operate and maintain the
SCU-XL800. Important safety information is highlighted as WARNING and CAUTION instructions;
these instructions are mandatory. The use of WARNINGS and CAUTIONS is defined below.
WARNING
Warnings are given where failure to observe the instruction could result in serious injury
or death to people.
CAUTION
Cautions are given where failure to observe the instruction could result minor personal injury in
damage to the equipment, associated equipment and/or process.
Note: Items you must follow during operation and maintenance.
Throughout this manual, page, figure and table numbers are sequential.
The units used throughout this manual conform to the SI international system of units of measurement;
US equivalent units of measurement are also given.
The following IEC warning labels/symbols appear on the SCU-XL800:
Warning - refer to accompanying documentation.
Warning - risk of electric shock.
Protective earth (ground).
Note: An alarm function is incorporated into this STP series. Alarm and cautionary messages are
displayed on the LCD of the SCU-XL800. Note that the words "WARNING" and "CAUTION"
displayed on the LCD indicate the need for overhaul of the pump or precautions during the
operation. They do not have the same meaning as the much more serious symbols for
"WARNING" and "CAUTION" used in the instruction manual.

SCU-XL800 Control Unit for Turbomolecular Pump
July 08 2 Issue 1-a
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INTRODUCTION
1.2 Applied standards
The SCU-XL800 conforms to the following directives and standards:
1. Applied Directives
• EC Low Voltage Directive
• EC Electromagnetic Compatibility Directive
2. Applied Standards
• EN61010-1
• EN61326（class A）
• UL61010-1 (Electrical Equipment for Measurement, Control, and Laboratory Use)
1.3 Limited warranty
This WARRANTY applies to the customer to whom Edwards has delivered this product.
1.3.1 Warranty period
Edwards warrants this product against defects for a period of two (2) years from the date of delivery or
during the period specified in the agreement made by and between the customer and Edwards.
1.3.2 Item warranted
1. This warranty applies only to the product delivered from Edwards to the customer.
2. If any defect is found during this period, Edwards will, at its option, repair or recondition the product
free of charge. The costs for repair or replacement of the product after the warranty period has
passed will be at your own charge.
1.3.3 Disclaimer
Edwards makes no warranty with respect to any damage occurred due to any of the following during
the warranty period:
1. Handling, operation or maintenance other than that specified herein.
2. Failure to follow any of the warnings or cautions enumerated in this manual.
3. Installation, operation or maintenance using parts which are not specified by Edwards.
4. Maintenance personnel other than those authorized by Edwards or Service office have
disassembled, reconditioned, or tampered the product.

SCU-XL800 Control Unit for Turbomolecular Pump
July 08 3 Issue 1-a
1
INTRODUCTION
5. Defect resulting from the not-specified use of the product.
6. When the product is used under special conditions without obtaining the written consent of
Edwards (strong magnetic field and the radiation are added to the product).
7. Defect resulting from the installation of the product (exclude the installation by authorized
personnel).
8. Deterioration in the external because of use (discoloration, scratches and so forth).
9. Product damage occurred during transport or other factors not attributable to Edwards.
10. Product breakage or damage due to natural disasters, fire or other external factors.
11. Deterioration in the basic performance due to the use of the product beyond limits of the use.
12. Any direct, incidental or consequential damage resulting from the use of the product.
13. When continuously operated without overhaul after the WARNING indication ("WARNING"
message) on the LCD.
14. Overhaul and replacement of maintenance parts.
1.3.4 Spare parts
• Air-cooling fan for SCU-XL800. (When exchanging, contact Service office).
1.4 Labels
The following labels are affixed or printed to the SCU-XL800. Read the contents of the labels before
operation.
1. High voltage device caution label
The SCU-XL800 is equipped with a high voltage device. This label warns operators to pay
attention to the high voltage device at the maintenance and inspection.
Figure 1 - High voltage device caution label

SCU-XL800 Control Unit for Turbomolecular Pump
July 08 4 Issue 1-a
1
INTRODUCTION
2. Voltage caution label
This label describes precautions for operating the TMS unit.
Use the specified heater and valve when connecting the TMS unit to the STP pump.
Figure 2 - Voltage caution label
3. Safety instruction label
This label describes instructions before operating the SCU-XL800.
Figure 3 - Safety instruction label
4. Connector caution label
This label describes lock of the connector.
The label instructs operators to prevent the connectors from being disconnected while the STP
pump is in operation.
Figure 4 - Connector caution label

SCU-XL800 Control Unit for Turbomolecular Pump
July 08 5 Issue 1-a
1
INTRODUCTION
5. Voltage rating label
This label describes the rated voltage of the SCU-XL800. Use voltage specified in this label.
Some pumps can be operated in the input voltage between 100 - 120V inclusive. Confirm the
specific pumps in Section 2, "TECHNICAL DATA".
AC100-120V /200-240V ～
5-a 5-b
Figure 5 - Voltage rating label

SCU-XL800 Control Unit for Turbomolecular Pump
July 08 6 Issue 1-a
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INTRODUCTION
1.5 Label affixing positions
Refer to Section 1.4 for the details of the labels 1 to 5.
Figure 6 - Label affixing positions
1 High voltage device caution label
2 Voltage caution label
3 Safety instruction label
4 Connector caution label
5-a Voltage rating label
5-b Voltage rating label
6 Name plate
7 Parts number
5-b
76
4
132
5-a

SCU-XL800 Control Unit for Turbomolecular Pump
July 08 7 Issue 1-a
1
INTRODUCTION
1.6 General description
The SCU-XL800 is the control unit required to drive the STP series of turbomolecular pumps. The
SCU-XL800 converts the single-phase line supply voltage into a 3-phase d.c. voltage to drive the pump
motor. It also evaluates measured signals and performs the following functions:
• It provides logic to control the pump functions.
• It operates the magnetic bearing system.
• It operates the optional Temperature Management System (TMS).
Figure 7 - SCU-XL800 control unit
The following series of turbomolecular pumps can be used in conjunction with the SCU-XL800.
Model Name Specification
STP-603/1003 series Ultra-high vacuum type
STP-A803/A1303 series Advanced high-throughput type
Table 1 - Turbomolecular pumps
X8 STP-LINK

SCU-XL800 Control Unit for Turbomolecular Pump
July 08 8 Issue 1-a
1
INTRODUCTION
1.6.1 Cable sets
The following cable sets (optional accessories) are used with the SCU-XL800 and STP pump:
• STP connection cable - STP pump to SCU-XL800.
• TMS cable - STP pump to built-in TMS unit in the SCU-XL800.
• Power cable - SCU-XL800 to power supply.
Note: Figure 8 shows a typical TMS system installation. System connections and cables differ
according to the type of pump connected to the SCU-XL800. Refer to the STP pump
Instruction Manual (A) and (B) for full details of connection cables and system connections.
1 SCU-XL800 control unit 5 TMS valve cable
2 STP connection cable 6 TMS connection cable
3 TMS sensor cable 7 Power cable
4 TMS heater cable
Figure 8 - Configuration of the STP pump with the TMS
1
2
3
4
5
6
7