Edwards SCU-801 User manual

MT-95E-001-A
SCU-801 Control Unit
Instruction Manual (C)
STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A):
STP pump generic Instruction Manual
Instruction Manual (B):
STP pump specific information
Instruction Manual (C):
(This Instruction Manual)
STP control unit Instruction Manual
Copyright 2023 Edwards Japan Limited. All rights reserved. Printed in Japan.
2023.06
Description Voltage
SCU-801 Control Unit 100 - 120 Va.c.
200 - 240 Va.c.

Declaration of Conformity
This product has been manufactured under a quality management system certified to ISO9001:2015.
This declaration is based on the requirements of ENISO17050-1 and the relevant directives.
VI-DOC-95-001
This declaration of conformity is issued under the sole responsibility of the manufacturer:
Edwards Japan Limited
1078-1,Yoshihashi,
Yachiyo-shi
Chiba, 276-8523
Japan
Documentation Officer
Jana Sigmunda 300
Lutín , 78349
Czech Republic
T: [phone]
[email protected]
Product Name:
Control unit for turbomolecular pump
Model Number:
SCU-801 series
Is in conformity with the relevant requirements of European CE legislation:
2014/35/EU
Low voltage directive (LVD)
2014/30/EU
Electromagnetic compatibility (EMC) directive
Class A Emissions, Industrial Immunity
2011/65/EU
Restriction of certain hazardous substances (RoHS) directive
as amended by Delegated Directive (EU) 2015/863
Based on the relevant requirements of harmonised standards:
EN 61010-1:2010 +A1:2019
Safety requirements for electrical equipment for measurement, control and
laboratory use. General requirements
EN 61326-1:2013
Electrical equipment for measurement, control and laboratory use. EMC
requirements
This declaration, based on the requirements of the listed Directives and EN ISO/IEC 17050-1, covers all product
serial numbers from this date on: 13th-Apr-2023
You must retain the signed legal declaration for future reference
This declaration becomes invalid if modifications are made to the product without prior agreement.
Signed for and on behalf of Edwards Ltd
Tanya Palmer
Vice President, Engineering, Semiconductor Chamber
Solutions
Chelmsford
Petr Tochacek
General Manager, PC Yachiyo
Yachiyo

Declaration of Conformity
This product has been manufactured under a quality management system certified to ISO9001:2015.
This declaration is based on the requirements of ENISO17050-1 and the relevant directives.
VI-DOC-95-001
Edwards Japan Limited
1078-1,Yoshihashi,
Yachiyo-shi
Chiba, 276-8523
Japan
Documentation Officer
Innovation Drive
Burgess Hill
West Sussex
RH15 9TW
UK
[email protected]
This declaration of conformity is issued under the sole responsibility of the manufacturer.
Product Name:
Control unit for turbomolecular pump
Model Number:
SCU-801 series
The object of the declaration described above is in conformity with relevant statutory requirements:
Electrical Equipment (Safety) Regulations 2016
Electromagnetic Compatibility Regulations 2016
Class A Emissions, Industrial Immunity
Restriction of the Use of Certain Hazardous Substances in Electrical and Electronic Equipment Regulations 2012
Relevant designated standards or technical specifications are as follows:
EN 61010-1:2010 +A1:2019
Safety requirements for electrical equipment for measurement, control and
laboratory use. General requirements
EN 61326-1:2013
Electrical equipment for measurement, control and laboratory use. EMC
requirements. General requirements. Class A Emissions, Industrial Immunity
This declaration, based on the requirements of the listed Directives and EN ISO/IEC 17050-1, covers all product
serial numbers from this date on: 13th-Apr-2023
You must retain the signed legal declaration for future reference
This declaration becomes invalid if modifications are made to the product without prior agreement.
Signed for and on behalf of Edwards Ltd
Tanya Palmer
Vice President, Engineering, Semiconductor Chamber
Solutions
Chelmsford
Petr Tochacek
General Manager, PC Yachiyo
Yachiyo

This product has been manufactured under a quality management system certified to ISO9001:2015.
This declaration is based on the requirements of ENISO17050-1 and the relevant directives.
VI-DOC-95-001
ADDITIONAL LEGISLATION AND COMPLIANCE INFORMATION
RoHS (EU, UK):Material Exemption Information
This product is compliant with the following Exemptions
Annex III:
•6(a)-I Lead as an alloying element in steel for machining purposes containing up to 0,35 % lead by weight and in
batch hot dip galvanised steel components containing up to 0,2 % lead by weight
•6(b)-I Lead as an alloying element in aluminium containing up to 0,4 % lead by weight, provided it stems from lead
bearing aluminium scrap recycling
•6(c) Copper alloy containing up to 4 % lead by weight
•7(a) Lead in in high melting temperature type solder (i.e. lead based alloys containing 85% by weight or more
lead)
•7(c)-I Electrical and electronic components containing lead in a glass or ceramic other than dielectric ceramic in
capacitors, e.g. piezoelectronic devices, or in a glass or ceramic matrix compound
REACH (EU, UK)
This product is a complex article which is not designed for intentional substance release. To the best of our knowledge
the materials used comply with the requirements of REACH. The product manual provides information and instruction
to ensure the safe storage, use, maintenance and disposal of the product including any substance based requirements.
Article 33.1 Declaration:
This product contains Candidate List Substances of Very High Concern above 0.1%ww by article as clarified under the
2015 European Court of Justice ruling in case C-106/14.
•Lead (Pb)
This substance is present in certain steel / aluminium / brass components.
•Imidazolidine-2-thione
This substance is present in certain rubber components.

This product has been manufactured under a quality management system certified to ISO9001:2015.
This declaration is based on the requirements of ENISO17050-1 and the relevant directives.
VI-DOC-95-001
材料成分声明
China Material Content Declaration
有害物质
Hazardous Substances
部件名称
Part name
铅
Lead
(Pb)
汞
Mercury
(Hg)
镉
Cadmium
(Cd)
六价铬
Hexavalent
Chromium
(Cr VI)
多溴联苯
Polybrominated
biphenyls
(PBB)
多溴二苯醚
Polybrominated
diphenyl ethers
(PBDE)
铸铝及铝合金制品
Aluminium alloys
×
〇
〇
〇
〇
〇
电缆/电线/连接器
Cable/wire/connector
×
〇
〇
〇
〇
〇
印刷电路组件 (PCA)
Printed Circuit Assembly (PCA)
×
〇
〇
〇
〇
〇
电子元件和控件
Electronics and
Controls
×
〇
〇
〇
〇
〇
O: 表示该有害物质在该部件的所有均质材料中的含量低于 GB/T 26572 标准规定的限量要求。
O: Indicates that the hazardous substance contained in all of the homogeneous materials for this part is below the limit
requirement in GB/T 26572.
X: 表示该有害物质在该部件的至少一种均质材料中的含量超出 GB/T26572 标准规定的限量要求。
X: Indicates that the hazardous substance contained in at least one of the homogeneous materials used for this part is
above the limit requirement of GB/T26572.

The description of this product consists of the three-volumed Instruction Manuals. Read through each
Instruction Manual before operation.
The separate volume contents of each description are as follows:
Instruction Manual (A)
STP pump generic Instruction Manual:
•Introduction
•Installation of the STP pump
•Installation of the STP control unit
•Operation
•Safety functions
•Maintenance and inspection
•Storage and disposal
•Service, Spares and accessories
Instruction Manual (B)
STP pump specific information:
•Technical data
•How to Secure the STP pump
•Temperature Management System （TMS）
Instruction Manual (C)
STP control unit Instruction Manual:
•Introduction
•Technical data
•Installation
•Operation
•Serial communication protocol
•STP-Link
•EdCentra
•Maintenance
•Storage, transportation and disposal
•Service, spares, and accessories
Keep the manuals in an easily accessible location.

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
Page i
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i
CONTENTS
Section Title Page
1INTRODUCTION 1
1.1 Scope and definitions 1
1.2 Electromagnetic compatibility 2
1.3 Limited warranty 3
1.3.1 Item warranted 3
1.3.2 Disclaimer 3
1.3.3 Spare parts 4
1.4 Labels 4
1.5 Label affixing positions 6
1.6 General description 7
1.6.1 Cable sets 8
2TECHNICAL DATA 9
2.1 SCU-801 specifications 9
3INSTALLATION 13
3.1 Unpacking 13
3.2 Front panel 13
3.3 Rear panel 16
3.4 Precautions before installation 17
3.4.1 Operating environment 17
3.4.2 Insulation test 17
3.4.3 Installation area 18
3.5 Attaching the SCU-801 to a rack 19
3.6 Cable connection 20
3.6.1 STP connection cable 21
3.6.2 TMS connection cable 22
3.6.3 Power cable 23
3.7 Connecting to semiconductor equipment 25
3.7.1 Connecting to power 25
3.7.2 Emergency off circuit (EMO circuit) 25
3.8 Remote communication 26
3.8.1 Parallel communication 26
3.8.2 Serial communication 26
3.9 Adjustment methods 27
3.9.1 Tuning 27
3.9.2 Tuning method 27
3.9.3 Change of data after tuning 29
3.10Confirmation mode 30
3.10.1 Confirmation method 30
3.11 Parameter set mode 33
3.11.1Remote operation setting 33
3.11.2 Rotational speed setting 33
3.11.3 TMS setting 33
3.11.4Rotational inhibit signal setting 33
3.11.5 Emergency vent valve setting 33

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
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PAGE
ii
CONTENTS (CONTINUED)
Section Title Page
3.11.6 Second Damage Limit setting 34
3.11.7 Pump air-cooling fan output setting 34
3.11.8 Warning function setting 35
3.11.9 Serial port COM1 setting 36
3.11.10 Serial port COM2 setting 36
3.11.11 Serial port COM3 setting 36
3.11.12 Date/Time setting 36
3.11.13 EdCentra setting 36
3.11.14 Factory setting 36
3.11.15 Parameter setting procedure 37
3.12 Manual operation mode 44
4OPERATION 47
4.1 Before starting the STP pump 47
4.1.1 Confirmation before starting 47
4.1.2 Confirmation of vacuum system 47
4.2 Powering ON 48
4.2.1 Self test 48
4.2.2 "CAUTION" message in the self test state 48
4.3 How to start/stop the STP pump 49
4.4 Manual start/stop the STP pump 49
4.4.1 Starting the STP pump 49
4.4.2 Stopping the STP pump 49
4.4.3 Starting the STP pump after stopping 49
4.5 Remote operation 51
4.5.1 Input signal pins 51
4.5.2 Output signal pins 53
4.5.3 Remote setting 56
4.5.4 Starting/Stopping the STP pump 56
4.5.5 Rotation INHIBIT signal 57
4.5.6 Starting the STP pump after stopping 58
4.5.7 Starting the STP pump after a safety function operates 58
4.6 Powering OFF 58
4.7 Operating the TMS unit (for use with the TMS unit) 59
4.7.1 Before starting 59
4.7.2 Starting/Stopping 59
4.7.3 Setting the TMS unit function 59
4.7.4 Temperature control 60
5SERIAL COMMUNICATION PROTOCOL 61
5.1 Introduction 61
5.2 Connection and setting up 62
5.2.1 Signal connection 62
5.2.2 Connecting the RS485 64
5.2.3 Communication parameter setting 66
5.2.4 Recommended items about communication cable installation 67
5.3 Protocol specifications 70
5.3.1 General description 70

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
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iii
CONTENTS (CONTINUED)
Section Title Page
5.3.2 Standard transmission frame
(in the RS232/RS485 single point connection) 71
5.3.3 Control command
(in the RS232/RS485 single point connection) 72
5.3.4 Query command
(in the RS232/RS485 single point connection) 73
5.3.5 Transmission data format 74
5.3.6 Frame control (checksum) 74
5.3.7 Error control 75
5.3.8 Transmission frame in the RS485 multi-point connection 76
5.3.9 Control command in the RS485 multi-point connection 77
5.3.10 Query command in the RS485 multi-point connection 79
5.3.11 Broadcasting command in the RS485 multi-point connection 80
5.3.12 Application note 81
5.4 Command specifications 85
5.4.1 Command list 85
5.4.2 ReadMeas 86
5.4.3 Command 86
5.4.4 ReadFailMess 87
5.4.5 ReadModFonct 90
5.4.6 ReadVersion 92
5.4.7 ReadCounters 93
5.4.8 ReadSetPoint 94
5.4.9 ReadMotorTemp 94
5.4.10 ReadStatus 95
5.4.11 ReadEvents 96
5.4.12 SetSpeedSetPoint 97
5.4.13 ReadSpeedSetPoint 98
5.4.14 ReadModFonctWithWarning 99
5.4.15 ReadMeasValue 102
6STP-LINK 105
7EDCENTRA 107
8MAINTENANCE 109
8.1 Safety functions 109
8.1.1 Power failure 109
8.1.2 Operation after a power recovery 110
8.1.3 Abnormal state of magnetic bearing 110
8.1.4 Excessive vibration 111
8.1.5 Motor driver overload 111
8.1.6 Overheating inside the STP pump 111
8.1.7 Overheating inside the SCU-801 111
8.1.8 Overspeed 111
8.1.9 Abnormality/Error in the TMS unit (for use with the TMS unit) 112
8.1.10 Failure of the air-cooling fan 112

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
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iv
CONTENTS (CONTINUED)
Section Title Page
8.2 "WARNING" message function 113
8.2.1 "WARNING" message display function 113
8.3 "WARNING" message description 114
8.3.1 Damage point function 114
8.3.2 First damage limit 114
8.3.3 Second damage limit 114
8.3.4 Imbalance X_H, X_B, Z 115
8.3.5 Pump run time over 115
8.3.6 Pump overload 115
8.3.7 Low RTC battery 115
8.4 "WARNING" function setting 116
8.5 Error at self test state 117
8.5.1 Error after self test 118
8.5.2 Error messages 118
8.5.3 Troubleshooting immediately after power failure occurs 118
8.5.4 Troubleshooting immediately
after other abnormality/errors occur 119
8.6 When error message is not displayed on LCD 128
8.6.1 Abnormalities when powering ON 128
8.6.2 Abnormalities when performing rotational operation 128
8.6.3 Other abnormalities 129
8.7 "Error Record" message display function 129
8.8 Maintenance and inspection 130
8.8.1 Cleaning 131
8.8.2 Maintenance 131
9STORAGE, TRANSPORTATION AND DISPOSAL 133
9.1 Storage of the SCU-801 133
9.2 Transporting for repair or overhaul 133
9.3 Disposal 134
10 SERVICE, SPARES AND ACCESSORIES 135
10.1 Introduction 135
10.2 Service 135
10.3 Spares 135
10.4 Accessories 136

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
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v
ILLUSTRATIONS
Figure Title Page
1 High voltage device caution label 4
2 Voltage caution label 4
3 Safety instruction label 5
4 Connector caution label 5
5 Voltage rating label 5
6 Label affixing positions 6
7 SCU-801 control unit 7
8 Configuration of the STP pump with the TMS 8
9 SCU-801 dimensions (mm) 11
10 SCU-801 front panel 13
11 SCU-801 rear panel 16
12 Installing the SCU-801 18
13 Example of securing the SCU-801 19
14 STP pump connection cable 21
15 TMS connection cable (standard) 22
16 TMS connection cable (STP-A1603 series) 22
17 Power cable 23
18 Connecting method of the power cable without plug 24
19 REMOTE X7 connector 26
20 Connector X3A, X3B, X6 (D-sub 9) 26
21 Tuning procedures 28
22 Confirmation mode 31
23 Error Detailed Information 32
24 Parameter setting method 38
25 Parameter setting method (continued) 39
26 Parameter setting method (continued) 40
27 Parameter setting method (continued) 41
28 Parameter setting method (continued) 42
29 Network address setting 43
30 Manual operation method 45
31 Operational procedures 50
32 REMOTE X7 input signal pins 53
33 REMOTE X7 output signal pins 55
34 Serial communication 61
35 Connector X3A/X3B (D-sub 9) 62
36 Connector X6 (D-sub 9) 63
37 RS485 connections 64
38 FAILSAFE bias resistance 65
39 Grounding example (Both ends grounding) 67
40 Grounding example (single point grounding) 68
41 Example of ring ferrite core installation 68
42 Example of cable installation in metallic duct 68
43 Example of differential signal waveform 69
44 PC to SIM communication 70
45 Block diagram of communication process example 81
46 Example of answer resending process 82
47 Example of response when the command is sent continuously 82
48 Example of command sending during answer data reply 82
49 Example of communication cycle process 83
50 Example of command sending process 84
51 Example of answer receiving process 84

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
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vi
TABLES
Table Title Page
1 Turbomolecular pumps 7
2 SCU-801 front panel functions 14
3 SCU-801 front panel functions (continued) 15
4 SCU-801 rear panel connection 16
5 STP connection cable specification 21
6 Power cable 24
7 User setting data list 29
8 Causes of "CAUTION" at the self test state 48
9 REMOTE X7 input signal pins 52
10 REMOTE X7 output signal pins 54
11 Rated contacts for relays CR1 to CR10 56
12 Starting/Stopping the STP pump during remote operation
(REMOTE X7) 56
13 Rotation INHIBIT signal input 57
14 Reset operation during remote operation (REMOTE X7) 58
15 TMS Function setting value and indication 60
16 X3A/X3B pin position 62
17 X6 pin position 63
18 Communication parameters 66
19 Transmission control characters 70
20 Pump operation commands 80
21 Command list 85
22 Pump operation commands 87
23 Error message values 89
24 Error message values (continued) 90
25 Pump operation mode 91
26 Remote mode 96
27 Warning value bit assign 100
28 Functions of STP-Link 105
29 Backup rotational speed 109
30 States of LCD, LEDs and REMOTE output signals
at a power failure 110
31 Accumulated damage point and warning message 114
32 Default setting of "WARNING" function 116
33 Factory setting and variable range 116
34 Error messages at self test state 117
35 Error messages after self test 120
36 Error messages after self test (continued) 121
37 Error messages after self test (continued) 122
38 Error messages after self test (continued) 123
39 Error messages after self test (continued) 124
40 Error messages after self test (continued) 125
41 Error messages after self test (continued) 126
42 Error messages after self test (continued) 127
43 Troubleshooting when powering ON 128
44 Troubleshooting when performing the STP pump
start operation 128
45 Troubleshooting while the STP pump is rotating 129

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
Page 1
1
INTRODUCTION
1 INTRODUCTION
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the Edwards SCU-801
control unit (abbreviated to "SCU-801" throughout this manual) for the Turbomolecular pump (STP).
You must use the SCU-801 as specified in this manual otherwise the protection provided by the
equipment may be impaired.
Important safety information is highlighted as WARNING and CAUTION instructions; these instructions
are mandatory. The use of WARNINGS and CAUTIONS is defined below:
WARNING
Warnings are given where failure to observe the instruction could result in serious injury
or death to people.
CAUTION
Cautions are given where failure to observe the instruction could result minor personal injury in
damage to the equipment, associated equipment and/or process.
Note: Items you must follow during operation and maintenance.
Throughout this manual, page, figure and table numbers are sequential.
The units used throughout this manual conform to the SI international system of units of measurement;
US equivalent units of measurement are also given.
The following IEC warning labels/symbols appear on the SCU-801 and the STP control unit Instruction
Manual:
Warning - This symbol denotes general warning
Refer to accompanying documentation and instruction manual.
Warning - Hot surface
This symbol denotes the risk of burns.
Warning - Hazardous Voltage
This symbol denotes the risk of electrical shock.
Protective earth (ground).
Connect the ground wire to this terminal to prevent electric shock.

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
Page 2
1
INTRODUCTION
Note: An alarm function is incorporated into this STP series. Alarm and cautionary messages are
displayed on the LCD of the SCU-801. Note that the words "WARNING" and "CAUTION"
displayed on the LCD indicate the need for overhaul of the pump or precautions during the
operation. They do not have the same meaning as the much more serious symbols for
"WARNING" and "CAUTION" used in the instruction manual.
1.2 Electromagnetic compatibility
•This product is a Class A product according to EN61326-1 (Group 1, Class A product according
to EN55011) and intended to be used in an industrial electromagnetic environment defined by
EN61326-1.
This means that this product does not generate and/or use intentionally radio-frequency energy,
in the form of electromagnetic radiation, inductive and/or capacitive coupling, for the treatment of
material or inspection / analysis purpose and that it is suitable for use in all establishments other
than domestic and those directly connected to a low voltage power supply network which
supplies buildings used for domestic purposes.
•This product may have potential difficulties in ensuring electromagnetic compatibility in other
than industrial environments, due to conducted as well as radiated disturbances.
•This product must not be used in residential areas because it may cause interference if used in
residential areas.
•List of cables used in electromagnetic compatibility test of SCU-801.
Cable Name
Length
Shielded
Pump connection
30m
Yes
TMS connection
30m
Yes
TMS heater
1.5m
No
TMS sensor
1.5m
Yes
TMS valve
1.5m
Yes
AC power
5m
No
I/O remote
20m
Yes
Communication (X3A)
3m
Yes
Communication (X8)
3m
Yes
Communication (X9)
3m
Yes
AC Power (Rotary pump)
2.7m
No
AC Power (I/O remote simulator)
3m
No
DC Power (RS232/RS485 converter)
1.8m
No

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
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INTRODUCTION
1.3 Limited warranty
This WARRANTY applies to the customer to whom Edwards has delivered this product.
The warranty period is stated in the Edwards Terms and Condition of Supply of Goods and Services, or
during the period specified in the agreement made by and between the customer and Edwards.
1.3.1 Item warranted
1. This warranty applies only to the product delivered from Edwards to the customer.
2. If any defect is found during this period, Edwards will, at its option, repair or recondition the product
free of charge. The costs for repair or replacement of the product after the warranty period has
passed will be at your own charge.
1.3.2 Disclaimer
Edwards makes no warranty with respect to any damage occurred due to any of the following during
the warranty period:
1. Handling, operation or maintenance other than that specified herein.
2. Failure to follow any of the warnings or cautions enumerated in this manual.
3. Installation, operation or maintenance using parts which are not specified by Edwards.
4. Maintenance personnel other than those authorized by Edwards or Service office have
disassembled, reconditioned, or tampered the product.
5. Defect resulting from the not-specified use of the product.
6. When the product is used under special conditions without obtaining the written consent of
Edwards (strong magnetic field and the radiation are added to the product).
7. Defect resulting from the installation of the product (exclude the installation by authorized
personnel).
8. Deterioration in the external because of use (discoloration, scratches and so forth).
9. Product damage occurred during transport or other factors not attributable to Edwards.
10. Product breakage or damage due to natural disasters, fire or other external factors.
11. Deterioration in the basic performance due to the use of the product beyond limits of the use.
12. Any direct, incidental or consequential damage resulting from the use of the product.
13. When continuously operated without overhaul after the WARNING indication ("WARNING"
message) on the LCD.
14. Overhaul and replacement of maintenance parts.

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
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INTRODUCTION
1.3.3 Spare parts
•Air-cooling fan for SCU-801. (When exchanging, contact Service office).
1.4 Labels
The following labels are affixed or printed to the SCU-801. Read the contents of the labels before
operation.
1. High voltage device caution label
The SCU-801 is equipped with a high voltage device. This label warns operators to pay attention
to the high voltage device at the maintenance and inspection.
Figure 1 - High voltage device caution label
2. Voltage caution label
This label describes precautions for operating the TMS unit.
Use the specified heater and valve when connecting the TMS unit to the STP pump.
Figure 2 - Voltage caution label

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
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INTRODUCTION
3. Safety instruction label
This label describes instructions before operating the SCU-801.
Figure 3 - Safety instruction label
4. Connector caution label
This label describes lock of the connector.
The label instructs operators to prevent the connectors from being disconnected while the STP
pump is in operation.
Figure 4 - Connector caution label
5. Voltage rating label
This label describes the rated voltage of the SCU-801. Use voltage specified in this label.
Some pumps can be operated in the input voltage between 100 - 120V inclusive. Confirm the
specific pumps in Section 2, "TECHNICAL DATA".
AC100-120V /200-240V ～
5-a
5-b
Figure 5 - Voltage rating label

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
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1
INTRODUCTION
1.5 Label affixing positions
Refer to Section 1.4 for the details of the labels 1 to 5.
Figure 6 - Label affixing positions
1
High voltage device caution label
2
Voltage caution label
3
Safety instruction label
4
Connector caution label
5-a
Voltage rating label
5-b
Voltage rating label
6
Name plate
7
Parts number
5-b
7
6
4
1
3
2
5-a

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
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INTRODUCTION
1.6 General description
The SCU-801 is the control unit required to drive the STP series of turbomolecular pumps. The
SCU-801 converts the single-phase line supply voltage into a 3-phase d.c. voltage to drive the pump
motor. It also evaluates measured signals and performs the following functions:
•It provides logic to control the pump functions.
•It operates the magnetic bearing system.
•It operates the optional Temperature Management System (TMS).
Figure 7 - SCU-801 control unit
The following series of turbomolecular pumps can be used in conjunction with the SCU-801.
Model Name
Specification
STP-603/1003 series
Ultra-high vacuum type
STP-H301/H451 series
High-throughput type
STP-H803/H1303 series
High-throughput type
STP-A803/A1303 series
Advanced high-throughput type
STP-A1603 series
Advanced high-throughput type
Table 1 - Turbomolecular pumps

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
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INTRODUCTION
1.6.1 Cable sets
The following cable sets (optional accessories) are used with the SCU-801 and STP pump:
•STP connection cable - STP pump to SCU-801.
•TMS cable - STP pump to built-in TMS unit in the SCU-801.
•Power cable - SCU-801 to power supply.
Note: Figure 8 shows a typical TMS system installation. System connections and cables differ
according to the type of pump connected to the SCU-801. Refer to the STP pump Instruction
Manual (A) and (B) for full details of connection cables and system connections.
1
SCU-801 control unit
5
TMS valve cable
2
STP connection cable
6
TMS connection cable
3
TMS sensor cable
7
Power cable
4
TMS heater cable
Figure 8 - Configuration of the STP pump with the TMS
1
2
3
4
5
6
7