Edwards SCU-1601 User manual

MT-96E-1B1-0
Description Voltage
SCU-1601 Control Unit 200 - 240 Va.c.
SCU-1601 Control Unit
for STP-XA2703BV155 / STP-XA3203BV155
Instruction Manual (C)
STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A):
STP pump generic Instruction Manual
Instruction Manual (B):
STP pump specific information
Instruction Manual (C):
(This Instruction Manual)
STP control unit Instruction Manual
Supplied with STP control unit
Instruction Manual (D):
STC-U e-TMS unit for Turbomolecular
Pump
Copyright 2023 Edwards Japan Limited. All rights reserved. Printed in Japan.
2022.06

Declaration of Conformity
This product has been manufactured under a quality management system certified to ISO9001:2015.
This declaration is based on the requirements of ENISO17050-1 and the relevant directives.
VI-DOC-96-001
This declaration of conformity is issued under the sole responsibility of the manufacturer:
Edwards Japan Limited
1078-1,Yoshihashi,
Yachiyo-shi
Chiba, 276-8523
Japan
Documentation Officer
Jana Sigmunda 300
Lutín , 78349
Czech Republic
T: [phone]
[email protected]
Product Name:
Control unit for turbomolecular pump
Model Number:
SCU-1601 series
Is in conformity with the relevant requirements of European CE legislation:
2014/35/EU
Low voltage directive (LVD)
2014/30/EU
Electromagnetic compatibility (EMC) directive
Class A Emissions, Industrial Immunity
2011/65/EU
Restriction of certain hazardous substances (RoHS) directive
as amended by Delegated Directive (EU) 2015/863
Based on the relevant requirements of harmonised standards:
EN 61010-1:2010 +A1:2019
Safety requirements for electrical equipment for measurement, control and
laboratory use. General requirements
EN 61326-1:2013
Electrical equipment for measurement, control and laboratory use. EMC
requirements
This declaration, based on the requirements of the listed Directives and EN ISO/IEC 17050-1, covers all product
serial numbers from this date on: 13th-Apr-2023
You must retain the signed legal declaration for future reference
This declaration becomes invalid if modifications are made to the product without prior agreement.
Signed for and on behalf of Edwards Ltd
Tanya Palmer
Vice President, Engineering, Semiconductor Chamber
Solutions
Chelmsford
Petr Tochacek
General Manager, PC Yachiyo
Yachiyo

Declaration of Conformity
This product has been manufactured under a quality management system certified to ISO9001:2015.
This declaration is based on the requirements of ENISO17050-1 and the relevant directives.
VI-DOC-96-001
Edwards Japan Limited
1078-1,Yoshihashi,
Yachiyo-shi
Chiba, 276-8523
Japan
Documentation Officer
Innovation Drive
Burgess Hill
West Sussex
RH15 9TW
UK
[email protected]
This declaration of conformity is issued under the sole responsibility of the manufacturer.
Product Name:
Control unit for turbomolecular pump
Model Number:
SCU-1601 series
The object of the declaration described above is in conformity with relevant statutory requirements:
Electrical Equipment (Safety) Regulations 2016
Electromagnetic Compatibility Regulations 2016
Class A Emissions, Industrial Immunity
Restriction of the Use of Certain Hazardous Substances in Electrical and Electronic Equipment Regulations 2012
Relevant designated standards or technical specifications are as follows:
EN 61010-1:2010 +A1:2019
Safety requirements for electrical equipment for measurement, control and
laboratory use. General requirements
EN 61326-1:2013
Electrical equipment for measurement, control and laboratory use. EMC
requirements. General requirements. Class A Emissions, Industrial Immunity
This declaration, based on the requirements of the listed Directives and EN ISO/IEC 17050-1, covers all product
serial numbers from this date on: 13th-Apr-2023
You must retain the signed legal declaration for future reference
This declaration becomes invalid if modifications are made to the product without prior agreement.
Signed for and on behalf of Edwards Ltd
Tanya Palmer
Vice President, Engineering, Semiconductor Chamber
Solutions
Chelmsford
Petr Tochacek
General Manager, PC Yachiyo
Yachiyo

This product has been manufactured under a quality management system certified to ISO9001:2015.
This declaration is based on the requirements of ENISO17050-1 and the relevant directives.
VI-DOC-96-001
ADDITIONAL LEGISLATION AND COMPLIANCE INFORMATION
RoHS (EU, UK):Material Exemption Information
This product is compliant with the following Exemptions
Annex III:
•6(a)-I Lead as an alloying element in steel for machining purposes containing up to 0,35 % lead by weight and in
batch hot dip galvanised steel components containing up to 0,2 % lead by weight
•6(b)-I Lead as an alloying element in aluminium containing up to 0,4 % lead by weight, provided it stems from lead
bearing aluminium scrap recycling
•6(c) Copper alloy containing up to 4 % lead by weight
•7(a) Lead in in high melting temperature type solder (i.e. lead based alloys containing 85% by weight or more
lead)
•7(c)-I Electrical and electronic components containing lead in a glass or ceramic other than dielectric ceramic in
capacitors, e.g. piezoelectronic devices, or in a glass or ceramic matrix compound
REACH (EU, UK)
This product is a complex article which is not designed for intentional substance release. To the best of our knowledge
the materials used comply with the requirements of REACH. The product manual provides information and instruction
to ensure the safe storage, use, maintenance and disposal of the product including any substance based requirements.
Article 33.1 Declaration:
This product contains Candidate List Substances of Very High Concern above 0.1%ww by article as clarified under the
2015 European Court of Justice ruling in case C-106/14.
•Lead (Pb)
This substance is present in certain steel / aluminium / brass components.
•Imidazolidine-2-thione
This substance is present in certain rubber components.

This product has been manufactured under a quality management system certified to ISO9001:2015.
This declaration is based on the requirements of ENISO17050-1 and the relevant directives.
VI-DOC-96-001
材料成分声明
China Material Content Declaration
有害物质
Hazardous Substances
部件名称
Part name
铅
Lead
(Pb)
汞
Mercury
(Hg)
镉
Cadmium
(Cd)
六价铬
Hexavalent
Chromium
(Cr VI)
多溴联苯
Polybrominated
biphenyls
(PBB)
多溴二苯醚
Polybrominated
diphenyl ethers
(PBDE)
铸铝及铝合金制品
Aluminium alloys
×
〇
〇
〇
〇
〇
电缆/电线/连接器
Cable/wire/connector
×
〇
〇
〇
〇
〇
印刷电路组件 (PCA)
Printed Circuit Assembly (PCA)
×
〇
〇
〇
〇
〇
电子元件和控件
Electronics and
Controls
×
〇
〇
〇
〇
〇
O: 表示该有害物质在该部件的所有均质材料中的含量低于 GB/T 26572 标准规定的限量要求。
O: Indicates that the hazardous substance contained in all of the homogeneous materials for this part is below the limit
requirement in GB/T 26572.
X: 表示该有害物质在该部件的至少一种均质材料中的含量超出 GB/T26572 标准规定的限量要求。
X: Indicates that the hazardous substance contained in at least one of the homogeneous materials used for this part is
above the limit requirement of GB/T26572.

The description of this product consists of the four-volumed Instruction Manuals. Read through each
Instruction Manual before operation.
The separate volume contents of each description are as follows:
Instruction Manual (A)
STP pump generic Instruction Manual:
•Introduction
•Installation of the STP pump
•Installation of the STP control unit
•Operation
•Safety functions
•Maintenance and inspection
•Storage and disposal
•Service, Spares and accessories
Instruction Manual (B)
STP pump specific information:
•Technical data
•How to Secure the STP pump
•Temperature Management System （TMS）
Instruction Manual (C)
STP control unit Instruction Manual:
•Introduction
•Technical data
•Installation
•Operation
•Serial communication protocol
•STP-Link
•EdCentra
•Maintenance
•Storage, transportation and disposal
•Service, spares, and accessories
Instruction Manual (D)
STC-U eTMS unit for Turbomolecular Pump:
•Introduction
•Technical data
•Installation
•Operation
•Maintenance and inspection
•Storage, transportation and disposal
•Service, spares, and accessories
Keep the manuals in an easily accessible location.

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
Page i
PAGE
i
CONTENTS
Section Title Page
1INTRODUCTION 1
1.1 Scope and definitions 1
1.2 Electromagnetic compatibility 2
1.3 Limited warranty 3
1.3.1 Item warranted 3
1.3.2 Disclaimer 3
1.3.3 Spare parts 4
1.4 Labels 4
1.5 Label affixing positions 6
1.6 General description 7
1.6.1 Cable sets 8
2TECHNICAL DATA 11
2.1 SCU-1601 specifications 11
3INSTALLATION 15
3.1 Unpacking 15
3.2 Front panel 15
3.3 Rear panel 18
3.4 Precautions before installation 19
3.4.1 Operating environment 19
3.4.2 Insulation test 19
3.4.3 Installation area 20
3.5 Attaching the SCU-1601 to a rack 21
3.6 Cable connection 22
3.6.1 STP connection cable 23
3.6.2 STC-U remote branch cable 24
3.6.3 STC-U remote cable 25
3.6.4 Power extension cable 26
3.6.5 Power cable 27
3.7 Connecting to semiconductor equipment 30
3.7.1 Connecting to power 30
3.7.2 Emergency off circuit (EMO circuit) 30
3.8 Remote communication 31
3.8.1 Parallel communication 31
3.8.2 Serial communication 31
3.9 Adjustment methods 32
3.9.1 Tuning 32
3.9.2 Tuning method 32
3.9.3 Change of data after tuning 35
3.10 Confirmation mode 36
3.10.1 Confirmation method 36
3.11 Parameter set mode 39
3.11.1 Remote operation setting 39
3.11.2 Rotational speed setting 39
3.11.3 TMS function setting 39

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
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PAGE
ii
CONTENTS (CONTINUED)
Section Title Page
3.11.4 Rotational inhibit signal setting 39
3.11.5 Second speed option setting 39
3.11.6 Second speed setting 39
3.11.7 Optional output signal setting
(Emergency vent valve setting) 40
3.11.8 Second Damage Limit setting 40
3.11.9 Warning function setting 41
3.11.10 Serial port COM1 setting 42
3.11.11 Serial port COM2 setting 42
3.11.12 Date/Time setting 42
3.11.13 EdCentra setting 42
3.11.14 Factory setting 42
3.11.15 Parameter setting procedure 43
3.12 Manual operation mode 50
4OPERATION 53
4.1 Before starting the STP pump 53
4.1.1 Confirmation before starting 53
4.1.2 Confirmation of vacuum system 53
4.2 Powering ON 54
4.2.1 Self test 54
4.2.2 "CAUTION" message in the self test state 54
4.3 How to start/stop the STP pump 55
4.4 Manual start/stop the STP pump 55
4.4.1 Starting the STP pump 55
4.4.2 Stopping the STP pump 55
4.4.3 Starting the STP pump after stopping 56
4.5 Remote operation 58
4.5.1 Input signal pins 58
4.5.2 Output signal pins 62
4.5.3 Remote setting 66
4.5.4 Starting/Stopping the STP pump 66
4.5.5 Rotation INHIBIT signal 67
4.5.6 Second speed option 68
4.5.7 Starting the STP pump after stopping 70
4.5.8 Starting the STP pump after a safety function operates 70
4.6 Powering OFF 70
4.7 Operating the TMS unit (for use with the TMS unit) 71
4.7.1 Before starting 71
4.7.2 Starting/Stopping 71
4.7.3 Setting the TMS unit function 71
4.7.4 Temperature control 71
5SERIAL COMMUNICATION PROTOCOL 73
5.1 Introduction 73
5.2 Connection and setting up 74
5.2.1 Signal connection 74
5.2.2 Connecting the RS485 76

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
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PAGE
iii
CONTENTS (CONTINUED)
Section Title Page
5.2.3 Communication parameter setting 78
5.2.4 Recommended items about communication cable installation 79
5.3 Protocol specifications 82
5.3.1 General description 82
5.3.2 Standard transmission frame
(in the RS232/RS485 single point connection) 83
5.3.3 Control command
(in the RS232/RS485 single point connection) 84
5.3.4 Query command
(in the RS232/RS485 single point connection) 85
5.3.5 Transmission data format 86
5.3.6 Frame control (checksum) 86
5.3.7 Error control 87
5.3.8 Transmission frame in the RS485 multi-point connection 87
5.3.9 Control command in the RS485 multi-point connection 88
5.3.10 Query command in the RS485 multi-point connection 90
5.3.11 Broadcasting command in the RS485 multi-point connection 91
5.3.12 Application note 92
5.4 Command specifications 96
5.4.1 Command list 96
5.4.2 ReadMeas 97
5.4.3 Command 97
5.4.4 ReadFailMess 98
5.4.5 ReadModFonct 101
5.4.6 ReadVersion 103
5.4.7 ReadCounters 104
5.4.8 ReadSetPoint 105
5.4.9 ReadMotorTemp 105
5.4.10 ReadStatus 106
5.4.11 ReadEvents 107
5.4.12 SetSpeedSetPoint 108
5.4.13 ReadSpeedSetPoint 109
5.4.14 ReadModFonctWithWarning 110
5.4.15 ReadMeasValue 113
5.4.16 SetOptions 115
5.4.16.1 Second speed option setting 116
5.4.16.2 Second speed selection 117
5.4.17 ReadOptions 118
5.4.17.1 Second speed function setting 119
5.4.17.2 Second speed select 120
5.4.17.3 External TMS unit setting 121
5.4.17.4 External TMS temperature 124
6STP-LINK 127
7EDCENTRA 129

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
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PAGE
iv
CONTENTS (CONTINUED)
Section Title Page
8MAINTENANCE 131
8.1 Safety functions 131
8.1.1 Power failure 131
8.1.2 Operation after a power recovery 132
8.1.3 Abnormal state of magnetic bearing 133
8.1.4 Excessive vibration 133
8.1.5 Motor driver overload 133
8.1.6 Overheating inside the STP pump 133
8.1.7 Overheating inside the SCU-1601 133
8.1.8 Overspeed 134
8.1.9 Abnormality/Error in the TMS unit (for use with the TMS unit) 134
8.2 "WARNING" message function 135
8.2.1 "WARNING" message display function 135
8.3 "WARNING" message description 136
8.3.1 Damage point function 136
8.3.2 First damage limit 136
8.3.3 Second damage limit 136
8.3.4 Imbalance X_H, X_B, Z 136
8.3.5 Pump run time over 137
8.3.6 Pump overload 137
8.3.7 Low RTC battery 138
8.3.8 Much MotorCurrent 138
8.4 "WARNING" function setting 139
8.5 Error at self test state 140
8.5.1 Error after self test 141
8.5.2 Error messages 141
8.5.3 Troubleshooting immediately after power failure occurs 141
8.5.4 Troubleshooting immediately
after other abnormality/errors occur 142
8.6 When error message is not displayed on LCD 151
8.6.1 Abnormalities when powering ON 151
8.6.2 Abnormalities when performing rotational operation 151
8.6.3 Other abnormalities 152
8.7 "Error Record" message display function 152
8.8 Maintenance and inspection 153
8.8.1 Cleaning 153
8.8.2 Maintenance 154
9STORAGE, TRANSPORTATION AND DISPOSAL 155
9.1 Storage of the SCU-1601 155
9.2 Transporting for repair or overhaul 155
9.3 Disposal 156
10 SERVICE, SPARES AND ACCESSORIES 157
10.1 Introduction 157
10.2 Service 157
10.3 Spares 157
10.4 Accessories 158

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
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PAGE
v
ILLUSTRATIONS
Figure Title Page
1 High voltage device caution label 4
2 Safety instruction label 4
3 Caution label 4
4 Connector caution label 5
5 Voltage rating label 5
6 Applicable pump model label 5
7 Label affixing positions 6
8 SCU-1601 control unit 7
9 Configuration of the STP pump with the TMS 8
10 System configuration (with outlet port heater) 9
11 SCU-1601 dimensions (mm) 13
12 SCU-1601 front panel 15
13 SCU-1601 rear panel 18
14 Installing the SCU-1601 20
15 Example of securing the SCU-1601 21
16 STP pump connection cable 23
17 STC-U remote branch cable 24
18 STC-U remote cable 25
19 Power extension cable 26
20 Power cable (without plug) 27
21 Power cable (with plug) 28
22 Connecting method of the power cable without plug 29
23 X7 REMOTE connector 31
24 Connector X3A, X3B (D-sub 9) 31
25 Tuning procedures 34
26 Confirmation mode 37
27 Error Detailed Information 38
28 Parameter setting method 44
29 Parameter setting method (continued) 45
30 Parameter setting method (continued) 46
31 Parameter setting method (continued) 47
32 Parameter setting method(continued) 48
33 Network parameter setting 49
34 Manual operation method 51
35 Operational procedures 57
36 X7 REMOTE input signal pins 61
37 X7 REMOTE output signal pins 65
38 Serial communication 73
39 Connector X3A/X3B (D-sub 9) 74
40 Connector X7 (D-sub 37) 75
41 RS485 connections 76
42 FAILSAFE bias resistance 77
43 Grounding example (Both ends grounding) 79
44 Grounding example (single point grounding) 79
45 Example of ring ferrite core installation 80
46 Example of cable installation in metallic duct 80
47 Example of differential signal waveform 81
48 PC to SIM communication 82
49 Block diagram of communication process example 92
50 Example of answer resending process 93

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
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vi
ILLUSTRATIONS (CONTINUED)
Figure Title Page
51 Example of response when the command is sent continuously 93
52 Example of command sending during answer data reply 93
53 Example of communication cycle process 94
54 Example of command sending process 95
55 Example of answer receiving process 95

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
Page vii
PAGE
vii
TABLES
Table Title Page
1 Turbomolecular pumps 7
2 SCU-1601 front panel functions 16
3 SCU-1601 front panel functions (continued) 17
4 SCU-1601 rear panel connection 18
5 Power cable 28
6 User setting data list 35
7 Causes of "CAUTION" at the self test state 54
8 X7 REMOTE input signal pins 59
9 X7 REMOTE input signal pins (continued) 60
10 X7 REMOTE output signal pins 63
11 X7 REMOTE output signal pins (continued) 64
12 Rated contacts for relays CR1 to CR9 66
13 Starting/Stopping the STP pump during remote operation
(X7 REMOTE) 66
14 Rotation INHIBIT signal input 67
15 Second speed function 69
16 Reset operation during remote operation (X7 REMOTE) 70
17 X3A/X3B pin position 74
18 X7 pin position 75
19 Communication parameters 78
20 Transmission control characters 82
21 Pump operation commands 91
22 Command list 96
23 Pump operation commands 98
24 Error message values 100
25 Error message values (continued) 101
26 Pump operation mode 102
27 Remote mode 107
28 Warning value bit assign 111
29 Option function number and parameter list 115
30 Option function number and parameter list 118
31 Functions of STP-Link 127
32 Backup rotational speed 131
33 States of LCD, LEDs and REMOTE output signals
at a power failure 132
34 Accumulated damage point and warning message 136
35 Default setting of "WARNING" function 139
36 Factory setting and variable range 139
37 Error messages at self test state 140
38 Error messages after self test 143
39 Error messages after self test (continued) 144
40 Error messages after self test (continued) 145
41 Error messages after self test (continued) 146
42 Error messages after self test (continued) 147
43 Error messages after self test (continued) 148
44 Error messages after self test (continued) 150
45 Troubleshooting when powering ON 151
46 Troubleshooting when performing the STP pump
start operation 151
47 Troubleshooting while the STP pump is rotating 152

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
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SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
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1
INTRODUCTION
1 INTRODUCTION
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the Edwards SCU-1601
control unit (abbreviated to "SCU-1601" throughout this manual) for the Turbomolecular pump (STP).
You must use the SCU-1601 as specified in this manual otherwise the protection provided by the
equipment may be impaired.
Important safety information is highlighted as WARNING and CAUTION instructions; these
instructions are mandatory. The use of WARNINGS and CAUTIONS is defined below:
WARNING
Warnings are given where failure to observe the instruction could result in serious injury
or death to people.
CAUTION
Cautions are given where failure to observe the instruction could result minor personal injury in
damage to the equipment, associated equipment and/or process.
Note: Items you must follow during operation and maintenance.
Throughout this manual, page, figure and table numbers are sequential.
The units used throughout this manual conform to the SI international system of units of
measurement; US equivalent units of measurement are also given.
The following IEC warning labels/symbols appear on the SCU-1601 and the STP control unit
Instruction Manual:
Warning - This symbol denotes general warning
Refer to accompanying documentation and instruction manual.
Warning - Hot surface
This symbol denotes the risk of burns.
Warning - Hazardous Voltage
This symbol denotes the risk of electrical shock.
Protective earth (ground).
Connect the ground wire to this terminal to prevent electric shock.

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
Page 2
1
INTRODUCTION
Note: An alarm function is incorporated into this STP series. Alarm and cautionary messages are
displayed on the LCD of the SCU-1601. Note that the words "WARNING" and "CAUTION"
displayed on the LCD indicate the need for overhaul of the pump or precautions during the
operation. They do not have the same meaning as the much more serious symbols for
"WARNING" and "CAUTION" used in the instruction manual.
1.2 Electromagnetic compatibility
•This product is a Class A product according to EN61326-1 (Group 1, Class A product according
to EN55011) and intended to be used in an industrial electromagnetic environment defined by
EN61326-1.
This means that this product does not generate and/or use intentionally radio-frequency energy,
in the form of electromagnetic radiation, inductive and/or capacitive coupling, for the treatment
of material or inspection / analysis purpose and that it is suitable for use in all establishments
other than domestic and those directly connected to a low voltage power supply network which
supplies buildings used for domestic purposes.
This product may have potential difficulties in ensuring electromagnetic compatibility in other
than industrial environments, due to conducted as well as radiated disturbances.
•This product must not be used in residential areas because it may cause interference if used in
residential areas.
•List of cables used in electromagnetic compatibility test of SCU-1601.
Cable Name
Length
Shielded
Pump connection
30m
Yes
TMS connection
30m
Yes
TMS heater
1.5m
No
TMS sensor
1.5m
Yes
TMS valve
1.5m
Yes
AC power
5m
No
I/O remote
20m
Yes
Communication (X3A)
3m
Yes
Communication (X8)
3m
Yes
Communication (X9)
3m
Yes
AC Power (Rotary pump)
2.7m
No
AC Power (I/O remote simulator)
3m
No

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
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1
INTRODUCTION
1.3 Limited warranty
This WARRANTY applies to the customer to whom Edwards has delivered this product.
The warranty period is stated in the Edwards Terms and Condition of Supply of Goods and Services,
or during the period specified in the agreement made by and between the customer and Edwards.
1.3.1 Item warranted
1. This warranty applies only to the product delivered from Edwards to the customer.
2. If any defect is found during this period, Edwards will, at its option, repair or recondition the
product free of charge. The costs for repair or replacement of the product after the warranty
period has passed will be at your own charge.
1.3.2 Disclaimer
Edwards makes no warranty with respect to any damage occurred due to any of the following during
the warranty period:
1. Handling, operation or maintenance other than that specified herein.
2. Failure to follow any of the warnings or cautions enumerated in this manual.
3. Installation, operation or maintenance using parts which are not specified by Edwards.
4. Maintenance personnel other than those authorized by Edwards or Service office have
disassembled, reconditioned, or tampered the product.
5. Defect resulting from the not-specified use of the product.
6. When the product is used under special conditions without obtaining the written consent of
Edwards (strong magnetic field and the radiation are added to the product).
7. Defect resulting from the installation of the product (exclude the installation by authorized
personnel).
8. Deterioration in the external because of use (discoloration, scratches and so forth).
9. Product damage occurred during transport or other factors not attributable to Edwards.
10. Product breakage or damage due to natural disasters, fire or other external factors.
11. Deterioration in the basic performance due to the use of the product beyond limits of the use.
12. Any direct, incidental or consequential damage resulting from the use of the product.
13. When continuously operated without overhaul after the WARNING indication ("WARNING"
message) on the LCD.
14. Overhaul and replacement of maintenance parts.

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
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1
INTRODUCTION
1.3.3 Spare parts
•Air-cooling fan for SCU-1601. (When exchanging, contact Service Office).
1.4 Labels
The following labels are affixed or printed to the SCU-1601. Read the contents of the labels before
operation.
1. High voltage device caution label
The SCU-1601 is equipped with a high voltage device. This label warns operators to pay
attention to the high voltage device at the maintenance and inspection.
Figure 1 - High voltage device caution label
2. Safety instruction label
This label describes instructions before operating the SCU-1601.
Figure 2 - Safety instruction label
3. Caution label
This label describes precautions for operating the SCU-1601. Follow these precautions.
Figure 3 - Caution label

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
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1
INTRODUCTION
4. Connector caution label
This label describes lock of the connector.
The label instructs operators to prevent the connectors from being disconnected while the STP
pump is in operation.
Figure 4 - Connector caution label
5. Voltage rating label
This label describes the rated voltage of the SCU-1601. Use voltage specified in this label.
Figure 5 - Voltage rating label
6. Applicable pump model label
This label describes an applicable pump model to STC-U. Use this model of STP pump when
using STC-U. (xxxxxxxxxxxx: is the model name of the pump)
Figure 6 - Applicable pump model label

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
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1
INTRODUCTION
1.5 Label affixing positions
Refer to Section 1.4 for the details of the labels 1 to 6.
Figure 7 - Label affixing positions
1
High voltage device caution label
2
Safety instruction label
3
Caution label
4
Connector caution label
5
Voltage rating label
6
Applicable pump model label
7
Name plate
8
Parts number
1
2
3
4
7
5
8
6