Edwards SCU-350 Series User manual

Instruction Manual (C)
MT-21E-201-E
Description Voltage
SCU-350 Series Control Unit 100 - 240 Va.c.
SCU-350 Series Control Unit
STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A): STP pump generic Instruction Manual
Instruction Manual (B): STP pump specific information
Instruction Manual (C):
(This Instruction Manual)
STP control unit Instruction Manual
Supplied with STP control unit
Copyright 2016 Edwards Japan Limited. All rights reserved. Printed in Japan.

This product has been manufactured under a quality management system certified to ISO 9001:2008
Declaration of Conformity
We,
Manufacture: Edwards Japan Limited
1078-1, Yoshihashi, Yachiyo-shi, Chiba, 276-8523, Japan
EU Representative: Edwards
Innovation Drive, Burgess Hill, West Sussex, RH15 9TW, UK
declare under our sole responsibility, as manufacturer and person within the EU authorised to
assemble the technical file, that the product(s)
Product Name: Control unit for turbomolecular pump
Model Number: SCU-350 series
to which this declaration relates is in conformity with the following standard(s) or other normative
document(s)
EN61010-1:2010 Safety Requirements for Electrical Equipment for Measurement,
Control and Laboratory Use. General Requirements
EN61326-1:2013 Electrical equipment for measurement, control and laboratory Use.
EMC requirements. General requirements
(Immunity: Industrial locations, Emission: Class A)
EN61000-6-2:2005 Electromagnetic compatibility (EMC). Generic standards.
Immunity for industrial environments
EN55011:2009, A1:2010 Industrial, scientific and medical equipment - Radio-frequency
disturbance characteristics (Group1, Class A)
EN50581:2012 Technical Documentation for the Assessment of Electrical and Electronic
Products with respect to the Restriction of Hazardous Substances
and fulfils all the relevant provisions of
2014/35/EU Low Voltage Directive
2014/30/EU Electromagnetic Compatibility (EMC) Directive
2011/65/EU* Restriction of Certain Hazardous Substances (RoHS) Directive
* i.e. The product(s) contain less than - 0.1wt% for hexavalent chromium, lead, mercury, PBB and PBDE; 0.01wt% for
cadmium - in homogeneous materials (subject to the exemptions allowed by the Directive). The RoHS Directive does not
legally apply to industrial vacuum equipment until July 2019 (July 2017 for instruments).
Note: This declaration covers all product serial numbers from the date this Declaration was
signed onwards.
VI-DOC-21-204
M
anufacture:
Y
uji Kato, TMP Technical
Senior Manager
,
Edwards Japan Limited
6
th
June
. 201
6
,
Yachiyo
Date and Place
EU representative:
Ian Stones
,
Vice President, Technology
, Edwards
7
th
June, 20
1
6,
Burgess Hill
Date and Place

The description of this product consists of the three-volumed Instruction Manuals. Read through each
Instruction Manual before operation.
The separate volume contents of each description are as follows:
Instruction Manual (A)
STP pump generic Instruction Manual:
Introduction
Installation of the STP pump
Installation of the STP control unit
Operation
Safety functions
Maintenance and inspection
Storage and disposal
Service, Spares and accessories
Instruction Manual (B)
STP pump specific information:
Technical data
How to Secure the STP pump
Instruction Manual (C)
STP control unit Instruction Manual:
Introduction
Technical data
Installation
Operation
Maintenance
Storage, transportation and disposal
Service, spares, and accessories
Keep the manuals in an easily accessible location.

This page intentionally blank

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
Page i
PAGE
i
CONTENTS
Section Title Page
1 INTRODUCTION 1
1.1 Scope and definitions 1
1.2 Applied standards 2
1.3 Limited warranty 3
1.3.1 Warranty period 3
1.3.2 Item warranted 3
1.3.3 Disclaimer 3
1.3.4 Spare parts 4
1.4 Labels 4
1.5 Label affixing positions 6
1.6 General description 7
1.6.1 Cable sets 8
2 TECHNICAL DATA 9
2.1 Control unit specifications 9
2.2 SCU-350 specifications 10
2.3 External appearance of SCU-350 12
3 INSTALLATION 13
3.1 Unpacking 13
3.2 Front panel 13
3.3 Rear panel 15
3.4 Top panel 16
3.5 Left side panel 17
3.6 Precautions before installation 18
3.6.1 Operating environment 18
3.6.2 Installation area 19
3.7 Attaching the SCU-350 to a rack 20
3.8 Cable connection 21
3.8.1 STP connection cable 22
3.8.2 Power cable 23
3.9 Connecting to semiconductor equipment 27
3.9.1 Connecting to power 27
3.9.2 Emergency off circuit (EMO circuit) 27
3.10 Remote communication 28
3.10.1 Parallel communication 28
3.10.2 Parallel communication
(STP-200/300/400 series compatible communication）28
3.10.3 Serial communication 29
3.11 Tuning 30
3.11.1 Tuning 30
3.11.2 Tuning method 30
3.12 Confirmation mode 32
3.12.1 Display items 32
3.12.2 Confirmation method 32
3.13 Setting the rated speed 33

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
Page ii
PAGE
ii CONTENTS (CONTINUED)
Section Title Page
3.13.1 When setting DSW-B No. 1 to ON under power-on state 33
3.13.2 When setting DSW-B No. 1 to ON before powering ON 34
4 OPERATION 37
4.1 Before starting the STP pump 37
4.1.1 Confirmation before starting 37
4.1.2 Confirmation of vacuum system 37
4.2 Powering ON 38
4.2.1 Self test 38
4.3 How to start/stop the STP pump 38
4.4 Manual start/stop the STP pump 38
4.4.1 Starting the STP pump 38
4.4.2 Stopping the STP pump 39
4.4.3 Starting the STP pump after stopping 39
4.4.4 Starting the STP pump after a safety function operates 39
4.5 Remote operation 41
4.5.1 I/O TB2 terminal block 41
4.5.2 I/O TB1 terminal block 44
4.5.3 CON4 connector (for SCU-350H/350HA only) 49
4.5.3.1 Remote input signals 49
4.5.3.2 Remote output signals 52
4.5.4 Remote cables for CON4 (for SCU-350H/350HA only) 55
4.5.5 Remote setting 56
4.5.6 Starting/Stopping the STP pump (I/O TB2) 56
4.5.7 Starting the STP pump after stopping (I/O TB2) 57
4.5.8 Starting the STP pump
after a safety function operates (I/O TB2) 57
4.5.9 Starting/Stopping the STP pump (CON4) 57
4.5.10 Starting the STP pump after stopping (CON4) 57
4.5.11 Starting the STP pump
after a safety function operates (CON4) 58
4.6 Powering OFF 58
5 SERIAL COMMUNICATION PROTOCOL 59
5.1 Introduction 59
5.2 Setting up 59
5.2.1 Hardware Connections 59
5.2.2 Pin Assignments 61
5.2.3 Serial settings 61
5.2.4 Communication mode 62
5.2.5 Recommended items about communication cable installation 63
5.3 Serial Protocol 65
5.3.1 Overview 65
5.3.2 Sending a command or query to the SIM 65
5.3.3 SIM replies to queries or commands 66
5.3.4 Queries 67
5.3.4.1 List of Queries 67
5.3.4.2 Description of individual queries 67

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
Page iii
PAGE
iii
CONTENTS (CONTINUED)
Section Title Page
5.4 Commands 69
5.4.1 List of commands 69
5.4.1.1 Description of individual commands 69
5.4.2 Error message 70
5.5 Data Formats 71
5.5.1 Pump state 71
5.5.2 Alarm state 71
5.5.3 Alarm type 72
5.5.4 SIM control state 73
5.5.5 Parameters 73
6 MAINTENANCE 75
6.1 Safety functions 75
6.1.1 Power failure 75
6.1.2 Operation after a power recovery 76
6.1.3 Abnormal state of magnetic bearing 77
6.1.4 Excessive vibration 77
6.1.5 Motor driver overload 77
6.1.6 Overheating inside the STP pump 77
6.1.7 Overheating inside the SCU-350 77
6.1.8 Overspeed 78
6.1.9 Error Messages 78
6.1.10 Troubleshooting immediately after power failure occurs 78
6.1.11 Troubleshooting immediately
after other abnormality/errors occur 79
6.2 When error message is not displayed on LCD 84
6.2.1 Abnormalities when powering ON 84
6.2.2 Abnormalities when performing rotational operation 84
6.3 Displaying past abnormalities/errors
and accumulated running-time 85
6.3.1 Display method 85
6.4 Maintenance and inspection 86
6.4.1 Cleaning 86
6.4.2 Maintenance 87
7 STORAGE, TRANSPORTATION AND DISPOSAL 89
7.1 Storage of the SCU-350 89
7.2 Transporting for repair or overhaul 89
7.3 Disposal 90
8 SERVICE, SPARES AND ACCESSORIES 91
8.1 Introduction 91
8.2 Service 91
8.3 Spares 91
8.4 Accessories 92

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
Page iv
PAGE
iv
ILLUSTRATIONS
Figure Title Page
1 High voltage device caution label 4
2 Safety instruction label 4
3 Caution label 4
4 Connector caution label 5
5 Label affixing positions 6
6 SCU-350 control unit 7
7 Configuration of the STP pump 8
8 SCU-350 dimensions (mm) 12
9 SCU-350 front panel 13
10 SCU-350 rear panel 15
11 SCU-350 top panel 16
12 SCU-350 left side panel 17
13 Installing the SCU-350 19
14 Example of securing the SCU-350 20
15 STP pump connection cable 22
16 Power cable (without plug) 23
17 Power cable (with plug) 24
18 Connecting method of the power cable without plug 25
19 How to secure the power cable 26
20 I/O TB1 terminal block 28
21 I/O TB2 terminal block 28
22 CON4 connector 28
23 CON3 connector (D-sub 25) 29
24 Tuning procedures 31
25 LCD display state 32
26 LCD message in rated speed setting mode 35
27 Operational procedures 40
28 I/O TB2 remote input signal terminal block 43
29 I/O TB1 remote output signal terminal block 47
30 CON4 remote input signal connector 51
31 CON4 remote output signal connector 54
32 Connection PC with SIM 59
33 STP Control Unit Rear Panel 60
34 Setting of DSW-B 62
35 Grounding example (Both ends grounding) 63
36 Grounding example (single point grounding) 63
37 Example of ring ferrite core installation 64
38 Example of cable installation in metallic duct 64
39 Serial protocol on the STP 65
40 Command syntax 66
41 Error records 85

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
Page v
PAGE
v
TABLES
Table Title Page
1 Turbomolecular pumps 7
2 SCU-350 front panel functions 14
3 SCU-350 rear panel function 15
4 SCU-350 top panel function 16
5 SCU-350 left side panel function 17
6 Power cable 24
7 I/O TB2 terminal block 42
8 I/O TB1 terminal block 45
9 Rated contacts for relays CR1, 3, 5, 7, 8 48
10 Rated contacts for relays CR4, 6 48
11 CON4 connector (Remote input signal) 50
12 Rated coils for relays CR1, 2 and 3 51
13 CON 4 connector (Remote output signal) 53
14 Rated contacts for relays CR4, 5, 6, 7, 8, 9 and 10 55
15 Remote cable connections (Single-side connector type) 55
16 Starting/Stopping the STP pump
during remote operation (I/O TB2) 56
17 Reset operation during remote operation (I/O TB2) 57
18 Starting/Stopping the STP pump
during remote operation (CON4) 57
19 Reset Operation during Remote Operation (CON4) 58
20 RS232 Port (CON3) 59
21 Pin Assignments of Serial Interface Cable (25pin-25pin) 61
22 Pin Assignments of Serial Interface Cable (25pin-9pin) 61
23 Serial Parameter 61
24 Remote Input / Output Signal 62
25 States of LCD, LEDs and REMOTE output signals
at a power failure 76
26 Error messages after self test 80
27 Error messages after self test (continued) 81
28 Error messages after self test (continued) 82
29 Error messages after self test (continued) 83
30 Troubleshooting when powering ON 84
31 Troubleshooting
when performing the STP pump start operation 84

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
Page vi
PAGE
vi
This page intentionally blank.

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
Page 1
1
INTRODUCTION
1 INTRODUCTION
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the Edwards SCU-350
control unit (abbreviated to "SCU-350" throughout this manual) for the Turbomolecular pump (STP).
You must use the SCU-350 as specified in this manual otherwise the protection provided by the
equipment may be impaired.
Important safety information is highlighted as WARNING and CAUTION instructions; these instructions
are mandatory. The use of WARNINGS and CAUTIONS is defined below.
WARNING
Warnings are given where failure to observe the instruction could result in serious injury
or death to people.
CAUTION
Cautions are given where failure to observe the instruction could result minor personal injury in
damage to the equipment, associated equipment and/or process.
Note: Items you must follow during operation and maintenance.
Throughout this manual, page, figure and table numbers are sequential.
The units used throughout this manual conform to the SI international system of units of measurement;
US equivalent units of measurement are also given.
The following IEC warning labels/symbols appear on the SCU-350 and Instruction Manual:
Warning - This symbol denotes general warning
Refer to accompanying documentation and instruction manual.
Warning - Hot surface
This symbol denotes the risk of burns.
Warning - Hazardous Voltage
This symbol denotes the risk of electrical shock.
Protective earth (ground).
Connect the ground wire to this terminal to prevent electric shock.

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
Page 2
1
INTRODUCTION
1.2 Applied standards
The SCU-350 conforms to the following directives and standards:
1. Applied Directives
EC Low Voltage Directive
EC Electromagnetic Compatibility Directive
RoHS Directive *
* i.e. The product(s) contain less than - 0.1wt% for hexavalent chromium, lead, mercury, PBB and PBDE; 0.01wt% for
cadmium - in homogeneous materials (subject to the exemptions allowed by the Directive). This information relates only to
products sold on or after the date of this certificate. Edwards has taken all reasonable steps to confirm this statement,
which is based mainly on information from our suppliers. Whilst the RoHS Directive does not legally apply to this vacuum
equipment, we recognize that component compliance is relevant to many of our customers.
2. Applied Standards
EN61010-1 / IEC61010-1
EN61326 (class A)
EN55011 (class A)
EN50581
UL61010-1 (Electrical Equipment for Measurement, Control, and Laboratory Use)
3. Information about electromagnetic compatibility
This product is a class A product according to EN61326, and a group 1, class A product
according to EN55011.
This means that this product does not generate and/or use intentionally radio-frequency energy,
in the form of electromagnetic radiation, inductive and/or capacitive coupling, for the treatment of
material or inspection / analysis purpose and that it is suitable for use in all establishments other
than domestic and those directly connected to a low voltage power supply network which
supplies buildings used for domestic purposes.
This product may have potential difficulties in ensuring electromagnetic compatibility in other
than industrial environments, due to conducted as well as radiated disturbances.
This product must not be used in residential areas because it may cause interference if used in
residential areas.
4. REACH Regulation
Some components in this product contain Lead (Pb) which is in the REACH SVHC Candidate
List.

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
Page 3
1
INTRODUCTION
1.3 Limited warranty
This WARRANTY applies to the customer to whom Edwards has delivered this product.
1.3.1 Warranty period
Edwards warrants this product against defects for a period of two (2) years from the date of delivery or
during the period specified in the agreement made by and between the customer and Edwards.
1.3.2 Item warranted
1. This warranty applies only to the product delivered from Edwards to the customer.
2. If any defect is found during this period, Edwards will, at its option, repair or recondition the product
free of charge. The costs for repair or replacement of the product after the warranty period has
passed will be at your own charge.
1.3.3 Disclaimer
Edwards makes no warranty with respect to any damage occurred due to any of the following during
the warranty period:
1. Handling, operation or maintenance other than that specified herein.
2. Failure to follow any of the warnings or cautions enumerated in this manual.
3. Installation, operation or maintenance using parts which are not specified by Edwards.
4. Maintenance personnel other than those authorized by Edwards or Service office have
disassembled, reconditioned, or tampered the product.
5. Defect resulting from the not-specified use of the product.
6. When the product is used under special conditions without obtaining the written consent of
Edwards (strong magnetic field and the radiation are added to the product).
7. Defect resulting from the installation of the product (exclude the installation by authorized
personnel).
8. Deterioration in the external because of use (discoloration, scratches and so forth).
9. Product damage occurred during transport or other factors not attributable to Edwards.
10. Product breakage or damage due to natural disasters, fire or other external factors.
11. Deterioration in the basic performance due to the use of the product beyond limits of the use.
12. Any direct, incidental or consequential damage resulting from the use of the product.
13. Overhaul and replacement of maintenance parts.

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
Page 4
1
INTRODUCTION
1.3.4 Spare parts
Air-cooling fan for SCU-350. (When exchanging, contact Service Office).
1.4 Labels
The following labels are affixed or printed to the SCU-350. Read the contents of the labels before
operation.
1. High voltage device caution label
The SCU-350 is equipped with a high voltage device. This label warns operators to pay attention
to the high voltage device at the maintenance and inspection.
Figure 1 - High voltage device caution label
2. Safety instruction label
This label describes instructions before operating the SCU-350.
Figure 2 - Safety instruction label
3. Caution label
This label describes precautions for operating the SCU-350. Follow these precautions.
◇ポンプとコントロールユニッ
トを異なるNoの組合せで使用
する場合、接続ケーブル長を
変更する場合は取扱説明書に
従い調整を行ってください。
◇必ず指定の型式のケーブルを
使用してください。
◇Adjust levitation according
to instruction manual,if pump
and control unit have different
serial number or you change
connection cable length.
◇Use only designated type of
cables.
注意
!CAUTION !
Figure 3 - Caution label

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
Page 5
1
INTRODUCTION
4. Connector caution label
This label describes lock of the connector.
The label instructs operators to prevent the connectors from being disconnected while the STP
pump is in operation.
Figure 4 - Connector caution label

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
Page 6
1
INTRODUCTION
1.5 Label affixing positions
Refer to Section 1.4 for the details of the labels 1 to 4.
Figure 5 - Label affixing positions
1 High voltage device caution label
2 Safety instruction label
3 Caution label
4 Connector caution label
5 Name plate
6 Parts number
7 Notice
3
5
1
2
7
4
6

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
Page 7
1
INTRODUCTION
1.6 General description
The SCU-350 is the control unit required to drive the STP series of turbomolecular pumps. The
SCU-350 converts the single-phase line supply voltage into a 3-phase d.c. voltage to drive the pump
motor. It also evaluates measured signals and performs the following functions:
It provides logic to control the pump functions.
It operates the magnetic bearing system.
Figure 6 - SCU-350 control unit
The following series of turbomolecular pumps can be used in conjunction with the SCU-350.
Model Name Specification
STP-301/451 series High-vacuum type
STP-L301/L451 series Low-vibration type, High-vacuum type
Table 1 - Turbomolecular pumps

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
Page 8
1
INTRODUCTION
1.6.1 Cable sets
The following cable sets (optional accessories) are used with the SCU-350 and STP pump:
STP connection cable - STP pump to SCU-350.
Power cable - SCU-350 to power supply.
Note: Figure 7 shows a typical TMS system installation. System connections and cables differ
according to the type of pump connected to the SCU-350. Refer to the STP pump Instruction
Manual (A) and (B) for full details of connection cables and system connections.
1 Vacuum equipment 8 Remote cable
2 Inlet port 9 To vacuum equipment control circuit
3 Inlet port flange 10 Outlet port flange
4 To power supply 11 Vacuum valve
5 Power cable 12 Dry pump, and other
6 SCU-350 control unit 13 Backing pump
7 STP connection cable
* STP pump can be installed through the damper (optional accessory)
Figure 7 - Configuration of the STP pump
11
10
7
8
5
1
3
*
4
12
13
6
2
9

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
Page 9
2
TECHNICAL DATA
2 TECHNICAL DATA
2.1 Control unit specifications
Model Applicable STP pump
SCU-350 series STP-301/451 series
STP-L301/L451 series
Type Specification
SCU-350 Standard
SCU-350A With ABS*1 function
SCU-350H With STP-200/300/400 series compatible remote input / output
connector (CON4)
SCU-350D Rated speed specification 44,000 rpm
SCU-350HA With STP-200/300/400 series compatible remote input / output
connector (CON4)
With ABS*1 function
SCU-350DA Rated speed specification 44,000 rpm
With ABS*1 function
*1 ABS: Automatic Balancing System. The vibration reduction function of the STP pump.

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
Page 10
2
TECHNICAL DATA
2.2 SCU-350 specifications
Applicable pump STP-301/451 series
STP-L301/L451 series
Input voltage: 100 to 240 Va.c
Input power: 350 VA maximum
Input frequency 50/60 ± 2 Hz
Leakage current 3.5 mA maximum
Input phase Single phase
Main breaker specification Rated current 5 A
Ampere Interrupting Capacity
(AIC)
1000 A (240 Va.c., 50/60 Hz)
Pollution degree 2
Installation category Ⅱ
Motor driving system 3-phase d.c. brushless motor driver
Output voltage under normal operation 80 Va.c. maximum
Output frequency under normal operation 1000 Hz maximum
Allowable ambient temperature 0 to 40 °C (32 to 104 °F)
Storage temperature -25 to 55 °C (-13 to 131 °F)
Mass (except the optional accessory) 8 kg (17.6 lb)
Dimensions Refer to Figure 8
Housing*1 Material SPCC
Surface treatment Trivalent chromate
*1 Irregular color or small scratches may appear on the housing in the metal plate processing of the manufacturing process. This
is no abnormality.