Edwards SCU-800 User manual

MT-49E-101-G
SCU-800 Control Unit
Instruction Manual (C)
STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A):
STP pump generic Instruction Manual
Instruction Manual (B):
STP pump specific information
Instruction Manual (C):
(This Instruction Manual)
STP control unit Instruction Manual
Copyright 2016 Edwards Japan Limited. All rights reserved. Printed in Japan.

This product has been manufactured under a quality management system certified to ISO 9001:2008
Declaration of Conformity
We,
Manufacture: Edwards Japan Limited
1078-1, Yoshihashi, Yachiyo-shi, Chiba, 276-8523, Japan
EU Representative: Edwards
Innovation Drive, Burgess Hill, West Sussex, RH15 9TW, UK
declare under our sole responsibility, as manufacturer and person within the EU authorised to
assemble the technical file, that the product(s)
Product Name: Control unit for turbomolecular pump
Model Number: SCU-800
Accessories Covered: TMS Unit,
Communication Interface (LonWorks, EtherCAT)
to which this declaration relates is in conformity with the following standard(s) or other normative
document(s)
EN61010-1:2010 Safety Requirements for Electrical Equipment for Measurement,
Control and Laboratory Use. General Requirements
EN61326-1:2013 Electrical equipment for measurement, control and laboratory Use.
EMC requirements. General requirements
(Immunity: Industrial locations, Emission: Class A)
EN61000-6-2:2005 Electromagnetic compatibility (EMC). Generic standards.
Immunity for industrial environments
EN55011:2009, A1:2010 Industrial, scientific and medical equipment - Radio-frequency
disturbance characteristics (Group1, Class A)
EN50581:2012 Technical Documentation for the Assessment of Electrical and Electronic
Products with respect to the Restriction of Hazardous Substances
and fulfils all the relevant provisions of
2014/35/EU Low Voltage Directive
2014/30/EU Electromagnetic Compatibility (EMC) Directive
2011/65/EU* Restriction of Certain Hazardous Substances (RoHS) Directive
* i.e. The product(s) contain less than - 0.1wt% for hexavalent chromium, lead, mercury, PBB and PBDE; 0.01wt% for
cadmium - in homogeneous materials (subject to the exemptions allowed by the Directive). The RoHS Directive does not
legally apply to industrial vacuum equipment until July 2019 (July 2017 for instruments).
Note: This declaration covers all product serial numbers from the date this Declaration was
signed onwards.
VI-DOC-49-008
M
anufacture:
Y
uji Kato, TMP Technical Senior Manager
,
Edwards Japan Limited
5
th
June
. 201
6
,
Yachiyo
Date and Place
EU representative:
Ian Stones
,
Vice President, Technology
, Edwards
6
th
June
. 201
6
,
Burgess Hill
Date and Place

The description of this product consists of the three-volumed Instruction Manuals. Read through each
Instruction Manual before operation.
The separate volume contents of each description are as follows:
Instruction Manual (A)
STP pump generic Instruction Manual:
Introduction
Installation of the STP pump
Installation of the STP control unit
Operation
Safety functions
Maintenance and inspection
Storage and disposal
Service, Spares and accessories
Instruction Manual (B)
STP pump specific information:
Technical data
How to Secure the STP pump
Temperature Management System （TMS）
Instruction Manual (C)
STP control unit Instruction Manual:
Introduction
Technical data
Installation
Operation
Serial communication protocol
STP-Link
Maintenance
Storage, transportation and disposal
Service, spares, and accessories
Keep the manuals in an easily accessible location.

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SCU-800 Control Unit for Turbomolecular Pump
MT-49E-101-G
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CONTENTS
Section Title Page
1 INTRODUCTION 1
1.1 Scope and definitions 1
1.2 Applied standards 2
1.3 Limited warranty 2
1.3.1 Warranty period 2
1.3.2 Item warranted 3
1.3.3 Disclaimer 3
1.3.4 Spare parts 3
1.4 Labels 4
1.5 Label affixing positions 6
1.6 General description 7
1.6.1 Cable sets 8
2 TECHNICAL DATA 9
2.1 SCU-800 specifications 9
3 INSTALLATION 13
3.1 Unpacking 13
3.2 Front panel 13
3.3 Rear panel 16
3.4 Precautions before installation 17
3.4.1 Operating environment 17
3.4.2 Insulation test 17
3.4.3 Installation area 18
3.5 Attaching the SCU-800 to a rack 19
3.6 Cable connection 20
3.6.1 STP connection cable 21
3.6.2 TMS connection cable 22
3.6.3 Power cable 23
3.7 Connecting to semiconductor equipment 25
3.7.1 Connecting to power 25
3.7.2 Emergency off circuit (EMO circuit) 25
3.8 Remote communication 26
3.8.1 Parallel communication 26
3.8.2 Serial communication 26
3.9 Adjustment methods 27
3.9.1 Tuning 27
3.9.2 Tuning method 27
3.9.3 Change of data after tuning 29
3.10 Confirmation mode 30
3.10.1 Confirmation method 30
3.11 Parameter set mode 32

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MT-49E-101-G
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CONTENTS (CONTINUED)
Section Title Page
3.11.1 Remote operation setting 32
3.11.2 Rotational speed setting 32
3.11.3 TMS setting 32
3.11.4 Rotational inhibit signal setting 32
3.11.5 Emergency vent valve setting 32
3.11.6 Second Damage Limit 33
3.11.7 Pump air-cooling fan output setting 33
3.11.8 Warning function setting 34
3.11.9 Serial port COM1 setting 35
3.11.10 Serial port COM2 setting 35
3.11.11 Serial port COM3 setting 35
3.11.12 Date/Time setting 35
3.11.13 Factory setting 35
3.11.14 Parameter setting procedure 36
3.12 Manual operation mode 42
4 OPERATION 43
4.1 Before starting the STP pump 43
4.1.1 Confirmation before starting 43
4.1.2 Confirmation of vacuum system 43
4.2 Powering ON 44
4.2.1 Self test 44
4.2.2 "CAUTION" message in the self test state 44
4.3 How to start/stop the STP pump 45
4.4 Manual start/stop the STP pump 45
4.4.1 Starting the STP pump 45
4.4.2 Stopping the STP pump 45
4.4.3 Starting the STP pump after stopping 45
4.5 Remote operation 47
4.5.1 Input signal pins 47
4.5.2 Output signal pins 49
4.5.3 Remote setting 52
4.5.4 Starting/Stopping the STP pump 52
4.6 Rotation INHIBIT signal 53
4.6.1 Starting the STP pump after stopping 54
4.6.2 Starting the STP pump after a safety function operates 54
4.7 Powering OFF 54
4.8 Operating the TMS unit (for use with the TMS unit) 55
4.8.1 Before starting 55
4.8.2 Starting/Stopping 55
4.8.3 Setting the TMS unit function 55
4.8.4 Temperature control 55

SCU-800 Control Unit for Turbomolecular Pump
MT-49E-101-G
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iii
CONTENTS (CONTINUED)
Section Title Page
5 SERIAL COMMUNICATION PROTOCOL 57
5.1 Introduction 57
5.2 Connection and setting up 58
5.2.1 Signal connection 58
5.2.2 Connecting the RS485 60
5.2.3 Communication parameter setting 62
5.2.4 Recommended items about communication cable installation 63
5.3 Protocol specifications 66
5.3.1 General description 66
5.3.2 Standard transmission frame
(in the RS232/RS485 single point connection) 67
5.3.3 Control command
(in the RS232/RS485 single point connection) 68
5.3.4 Query command (in the RS232/RS485 single point connection)69
5.3.5 Transmission data format 70
5.3.6 Frame control (checksum) 70
5.3.7 Error control 71
5.3.8 Transmission frame in the RS485 multi-point connection 72
5.3.9 Control command in the RS485 multi-point connection 73
5.3.10 Query command in the RS485 multi-point connection 75
5.3.11 Broadcasting command in the RS485 multi-point connection 76
5.3.12 Application note 77
5.4 Command specifications 81
5.4.1 Command list 81
5.4.2 ReadMeas 82
5.4.3 Command 82
5.4.4 ReadFailMess 83
5.4.5 ReadModFonct 86
5.4.6 ReadVersion 88
5.4.7 ReadCounters 89
5.4.8 ReadSetPoint 90
5.4.9 ReadMotorTemp 90
5.4.10 ReadStatus 91
5.4.11 ReadEvents 92
5.4.12 SetSpeedSetPoint 93
5.4.13 ReadSpeedSetPoint 94
5.4.14 ReadModFonctWithWarning 95
5.4.15 ReadMeasValue 98
6 STP-LINK 101

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CONTENTS (CONTINUED)
Section Title Page
7 MAINTENANCE 103
7.1 Safety functions 103
7.1.1 Power failure 103
7.1.2 Operation after a power recovery 104
7.1.3 Abnormal state of magnetic bearing 104
7.1.4 Excessive vibration 105
7.1.5 Motor driver overload 105
7.1.6 Overheating inside the STP pump 105
7.1.7 Overheating inside the SCU-800 105
7.1.8 Overspeed 105
7.1.9 Abnormality/Error in the TMS unit (for use with the TMS unit) 106
7.1.10 Failure of the air-cooling fan 106
7.2 "WARNING" message function 107
7.2.1 "WARNING" message display function 107
7.3 "WARNING" message description 108
7.3.1 Damage point function 108
7.3.2 First damage limit 108
7.3.3 Second damage limit 108
7.3.4 Imbalance X_H, X_B, Z 109
7.3.5 Pump run time over 109
7.3.6 Pump overload 109
7.3.7 Low RTC battery 109
7.4 "WARNING" function setting 110
7.5 Error at self test state 111
7.5.1 Error after self test 112
7.5.2 Error messages 112
7.5.3 Troubleshooting immediately after power failure occurs 112
7.5.4 Troubleshooting immediately
after other abnormality/errors occur 113
7.6 When error message is not displayed on LCD 121
7.6.1 Abnormalities when powering ON 121
7.6.2 Abnormalities when performing rotational operation 121
7.6.3 Other abnormalities 122
7.7 "Error Record" message display function 122
7.8 Maintenance and inspection 123
7.8.1 Replacing the fuses 123
7.8.2 Cleaning 124
7.8.3 Maintenance 124
8 STORAGE, TRANSPORTATION AND DISPOSAL 125
8.1 Storage of the SCU-800 125
8.1.1 Transporting for repair or overhaul 125
8.2 Disposal 126

SCU-800 Control Unit for Turbomolecular Pump
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CONTENTS (CONTINUED)
Section Title Page
9 SERVICE, SPARES AND ACCESSORIES 127
9.1 Introduction 127
9.2 Service 127
9.3 Spares 127
9.4 Accessories 128

SCU-800 Control Unit for Turbomolecular Pump
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ILLUSTRATIONS
Figure Title Page
1 High voltage device caution label 4
2 Voltage caution label 4
3 Safety instruction label 5
4 Connector caution label 5
5 Voltage rating label 5
6 Label affixing positions 6
7 SCU-800 control unit 7
8 Configuration of the STP pump with the TMS 8
9 SCU-800 dimensions (mm) 11
10 SCU-800 front panel 13
11 SCU-800 rear panel 16
12 Installing the SCU-800 18
13 Example of securing the SCU-800 19
14 STP pump connection cable 20
15 TMS connection cable (standard) 22
16 TMS connection cable (STP-A1603 series) 22
17 Power cable 23
18 Connecting method of the power cable without plug 24
19 REMOTE X7 connector 26
20 Connector X3A, X3B, X6 (D-sub 9) 26
21 Tuning procedures 28
23 Parameter setting method 37
24 Parameter setting method (continued) 38
25 Parameter setting method (continued) 39
26 Parameter setting method (continued) 41
27 Manual operation method 42
28 Operational procedures 46
29 REMOTE X7 input signal pins 49
30 REMOTE X7 output signal pins 51
31 Serial communication 57
32 Connector X3A/X3B (D-sub 9) 58
33 Connector X6 (D-sub 9) 59
34 RS485 connections 60
35 FAILSAFE bias resistance 61
36 Grounding example (Both ends grounding) 63
37 Grounding example (single point grounding) 63
38 Example of ring ferrite core installation 64
39 Example of cable installation in metallic duct 64
40 Example of differential signal waveform 65
41 PC to SIM communication 66
42 Block diagram of communication process example 77
43 Example of answer resending process 78
44 Example of response when the command is sent continuously 78
45 Example of command sending during answer data reply 78
46 Example of communication cycle process 79
47 Example of command sending process 80
48 Example of answer receiving process 80

SCU-800 Control Unit for Turbomolecular Pump
MT-49E-101-G
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TABLES
Table Title Page
1 Turbomolecular pumps 7
2 SCU-800 front panel functions 14
3 SCU-800 front panel functions (continued) 15
4 SCU-800 rear panel connection 16
5 STP connection cable specification 21
6 Power cable 24
7 User setting data list 29
8 Causes of "CAUTION" at the self test state 44
9 REMOTE X7 input signal pins 48
10 REMOTE X7 output signal pins 50
11 Rated contacts for relays CR1 to CR10 52
12 Starting/Stopping the STP pump
during remote operation (REMOTE X7) 52
13 Rotation INHIBIT signal input 53
14 Reset operation during remote operation (REMOTE X7) 54
15 X3A/X3B pin position 58
16 X6 pin position 59
17 Communication parameters 62
18 Transmission control characters 66
19 Pump operation commands 76
20 Command list 81
21 Pump operation commands 83
22 Error message values 85
23 Error message values (continued) 86
24 Pump operation mode 87
25 Remote mode 92
26 Warning value bit assign 96
27 Functions of STP-Link 101
28 Backup rotational speed 103
29 States of LCD, LEDs and REMOTE output signals
at a power failure 104
30 Accumulated damage point and warning message 108
31 Default setting of "WARNING" function 110
32 Factory setting and variable range 110
33 Error messages at self test state 111
34 Error messages after self test 114
35 Error messages after self test (continued) 115
36 Error messages after self test (continued) 116
37 Error messages after self test (continued) 117
38 Error messages after self test (continued) 118
39 Error messages after self test (continued) 119
40 Error messages after self test (continued) 120
41 Troubleshooting when powering ON 121
42 Troubleshooting
when performing the STP pump start operation 121
43 Troubleshooting while the STP pump is rotating 122

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SCU-800 Control Unit for Turbomolecular Pump
MT-49E-101-G
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INTRODUCTION
1 INTRODUCTION
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the Edwards SCU-800
control unit (abbreviated to "SCU-800" throughout this manual) for the Turbomolecular pump (STP).
You must use the SCU-800 as specified in this manual otherwise the protection provided by the
equipment may be impaired.
Important safety information is highlighted asWARNING and CAUTION instructions; these instructions
are mandatory. The use of WARNINGS and CAUTIONS is defined below:
WARNING
Warnings are given where failure to observe the instruction could result in serious injury
or death to people.
CAUTION
Cautions are given where failure to observe the instruction could result minor personal injury in
damage to the equipment, associated equipment and/or process.
Note: Items you must follow during operation and maintenance.
Throughout this manual, page, figure and table numbers are sequential.
The units used throughout this manual conform to the SI international system of units of measurement;
US equivalent units of measurement are also given.
The following IEC warning labels/symbols appear on the SCU-800 and the STP control unit Instruction
Manual:
Warning - This symbol denotes general warning
Refer to accompanying documentation and instruction manual.
Warning - Hot surface
This symbol denotes the risk of burns.
Warning - Hazardous Voltage
This symbol denotes the risk of electrical shock.
Protective earth (ground).
Connect the ground wire to this terminal to prevent electric shock.

SCU-800 Control Unit for Turbomolecular Pump
MT-49E-101-G
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INTRODUCTION
Note: An alarm function is incorporated into this STP series. Alarm and cautionary messages are
displayed on the LCD of the SCU-800. Note that the words "WARNING" and "CAUTION"
displayed on the LCD indicate the need for overhaul of the pump or precautions during the
operation. They do not have the same meaning as the much more serious symbols for
"WARNING" and "CAUTION" used in the instruction manual.
1.2 Applied standards
The SCU-800 conforms to the following directives and standards:
1. Applied Directives
EC Low Voltage Directive
EC Electromagnetic Compatibility Directive
2. Applied Standards
EN61010-1 / IEC61010-1
EN55011(class A)
EN61000-6-2
UL61010-1 (Electrical Equipment for Measurement, Control, and Laboratory Use)
3. Information about electromagnetic compatibility
This product is a class A product according to EN61326, and a group 1, class A product
according to EN55011.
This means that this product does not generate and/or use intentionally radio-frequency energy,
in the form of electromagnetic radiation, inductive and/or capacitive coupling, for the treatment of
material or inspection / analysis purpose and that it is suitable for use in all establishments other
than domestic and those directly connected to a low voltage power supply network which
supplies buildings used for domestic purposes.
This product may have potential difficulties in ensuring electromagnetic compatibility in other
than industrial environments, due to conducted as well as radiated disturbances.
This product must not be used in residential areas because it may cause interference if used in
residential areas.
1.3 Limited warranty
This WARRANTY applies to the customer to whom Edwards has delivered this product.
1.3.1 Warranty period
Edwards warrants this product against defects for a period of two (2) years from the date of delivery or
during the period specified in the agreement made by and between the customer and Edwards.

SCU-800 Control Unit for Turbomolecular Pump
MT-49E-101-G
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INTRODUCTION
1.3.2 Item warranted
1. This warranty applies only to the product delivered from Edwards to the customer.
2. If any defect is found during this period, Edwards will, at its option, repair or recondition the product
free of charge. The costs for repair or replacement of the product after the warranty period has
passed will be at your own charge.
1.3.3 Disclaimer
Edwards makes no warranty with respect to any damage occurred due to any of the following during
the warranty period:
1. Handling, operation or maintenance other than that specified herein.
2. Failure to follow any of the warnings or cautions enumerated in this manual.
3. Installation, operation or maintenance using parts which are not specified by Edwards.
4. Maintenance personnel other than those authorized by Edwards or Service office have
disassembled, reconditioned, or tampered the product.
5. Defect resulting from the not-specified use of the product.
6. When the product is used under special conditions without obtaining the written consent of
Edwards (strong magnetic field and the radiation are added to the product).
7. Defect resulting from the installation of the product (exclude the installation by authorized
personnel).
8. Deterioration in the external because of use (discoloration, scratches and so forth).
9. Product damage occurred during transport or other factors not attributable to Edwards.
10. Product breakage or damage due to natural disasters, fire or other external factors.
11. Deterioration in the basic performance due to the use of the product beyond limits of the use.
12. Any direct, incidental or consequential damage resulting from the use of the product.
13. When continuously operated without overhaul after the WARNING indication ("WARNING"
message) on the LCD.
14. Overhaul and replacement of maintenance parts.
1.3.4 Spare parts
Air-cooling fan for SCU-800. (When exchanging, contact Service office).

SCU-800 Control Unit for Turbomolecular Pump
MT-49E-101-G
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INTRODUCTION
1.4 Labels
The following labels are affixed or printed to the SCU-800. Read the contents of the labels before
operation.
1. High voltage device caution label
The SCU-800 is equipped with a high voltage device. This label warns operators to pay attention
to the high voltage device at the maintenance and inspection.
Figure 1 - High voltage device caution label
2. Voltage caution label
This label describes precautions for operating the TMS unit.
Use the specified heater and valve when connecting the TMS unit to the STP pump.
Figure 2 - Voltage caution label

SCU-800 Control Unit for Turbomolecular Pump
MT-49E-101-G
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INTRODUCTION
3. Safety instruction label
This label describes instructions before operating the SCU-800.
Figure 3 - Safety instruction label
4. Connector caution label
This label describes lock of the connector.
The label instructs operators to prevent the connectors from being disconnected while the STP
pump is in operation.
Figure 4 - Connector caution label
5. Voltage rating label
This label describes the rated voltage of the SCU-800. Use voltage specified in this label.
Some pumps can be operated in the input voltage between 100 - 120V inclusive. Confirm the
specific pumps in Section 2, "TECHNICAL DATA".
AC100-120V /200-240V ～
5-a
5-b
Figure 5 - Voltage rating label

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MT-49E-101-G
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INTRODUCTION
1.5 Label affixing positions
Refer to Section 1.4 for the details of the labels 1 to 5.
Figure 6 - Label affixing positions
1
High voltage device caution label
2
Voltage caution label
3
Safety instruction label
4
Connector caution label
5-a
Voltage rating label
5-b
Voltage rating label
6
Name plate
7
Parts number
5-b
7
6
4
1
3
2
5-a

SCU-800 Control Unit for Turbomolecular Pump
MT-49E-101-G
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INTRODUCTION
1.6 General description
The SCU-800 is the control unit required to drive the STP series of turbomolecular pumps. The
SCU-800 converts the single-phase line supply voltage into a 3-phase d.c. voltage to drive the pump
motor. It also evaluates measured signals and performs the following functions:
It provides logic to control the pump functions.
It operates the magnetic bearing system.
It operates the optional Temperature Management System (TMS).
Figure 7 - SCU-800 control unit
The following series of turbomolecular pumps can be used in conjunction with the SCU-800.
Model Name
Specification
STP-603/1003 series
Ultra-high vacuum type
STP-H301/H451 series
High-throughput type
STP-H803/H1303 series
High-throughput type
STP-A803/A1303 series
Advanced high-throughput type
STP-A1603 series
Advanced high-throughput type
Table 1 - Turbomolecular pumps
ON
RESET UP
SELECT
DOWN ENTER
START STOP
ACCEL BRAKE
POWER
TEMP CTRL
NORMAL
FAILURE
REMOTE
STP CONTROL UNIT
X8 STP-LINK

SCU-800 Control Unit for Turbomolecular Pump
MT-49E-101-G
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INTRODUCTION
1.6.1 Cable sets
The following cable sets (optional accessories) are used with the SCU-800 and STP pump:
STP connection cable - STP pump to SCU-800.
TMS cable - STP pump to built-in TMS unit in the SCU-800.
Power cable - SCU-800 to power supply.
Note: Figure 8 shows a typical TMS system installation. System connections and cables differ
according to the type of pump connected to the SCU-800. Refer to the STP pump Instruction
Manual (A) and (B) for full details of connection cables and system connections.
1
SCU-800 control unit
5
TMS valve cable
2
STP connection cable
6
TMS connection cable
3
TMS sensor cable
7
Power cable
4
TMS heater cable
Figure 8 - Configuration of the STP pump with the TMS
1
2
3
4
5
6
7