
b
5. Preparations for Measurement
5.1 Connecting Meter and Power Supply Unit············································ 22
5.1.1 Connecting dedicated power supply unit PSU8541 ····························· 22
5.1.2 Connecting power supply other than dedicated power supply unit ·········· 22
5.2 Setting Measuring Conditions ··························································· 25
5.2.1 Screen types ·············································································· 27
5.2.2 Setting measuring mode································································ 33
5.2.3 Setting measuring voltage ····························································· 34
5.2.4 Setting current limiter ··································································· 35
5.2.5 Setting measuring range ······························································· 36
5.2.6 Setting integral time (sampling time)················································ 37
5.2.7 Setting averaging function ····························································· 38
5.2.8 Setting trigger mode····································································· 38
5.2.9 Creating a program ······································································ 39
5.2.10 Setting measured data buffer function ············································ 41
5.2.11 Setting operating environment ······················································ 43
5.2.12 Executing self-diagnostic function ([SETUP], SELF) ·························· 43
5.2.13 Self-calibration setting································································· 44
5.2.14 Setting measuring voltage source ([SETUP], POWR)························· 45
5.2.15 Setting high-speed measuring mode ([SETUP], FAST)······················· 47
5.2.16 Setting interface conditions ·························································· 47
5.3 Display and Processing of Measured Value ········································· 50
5.3.1 Displaying measured value ···························································· 50
5.3.2 Comparison measurement····························································· 51
5.3.3 Deviation display ········································································· 52
5.3.4 Creating histogram······································································· 53
6. Measurement
6.1 Functions of and Connecting Measuring Terminals································ 56
6.1.1 Functions of measuring terminals···················································· 56
6.1.2 Connecting measuring terminals····················································· 57
6.2 Measuring Parts, Circuits and Other Items··········································· 57
6.2.1 Using measuring jigs···································································· 57
6.2.2 Auto measurement······································································· 59
6.2.3 When measuring jig is not used ······················································ 61
6.2.4 Measurement of circuits ································································ 62
6.3 Measuring Planar Sample································································ 62
6.3.1 Measurement by pin terminal ························································· 62
6.3.2 Measurement by electrode for surface resistance measurement ············ 63
6.3.3 Measurement by electrode for planar sample····································· 63
6.3.4 Use of shielding box····································································· 65
6.4 Measuring Liquid Sample································································· 67
6.4.1 Measurement by electrode for liquid sample······································ 67
6.5 Current Measurement ····································································· 69