Inficon Pernicka 700H CHLD Quick guide

Translation of the original operating instructions
Pernicka 700H CHLD
Leak detector
jin76aen1-04-(1911)
Catalog No.
550-700, 550-701
From software version
7.01.04

INFICON GmbH
Bonner Strasse 498
50968 Cologne, Germany

INFICON Table of Contents
Pernicka-700H-CHLD-Operating-instructions-jin76aen1-04-(1911) iii
Table of Contents
1 About these instructions ...................................................................................................................................7
1.1 Target groups ...........................................................................................................................................7
1.2 Other associated documents ....................................................................................................................7
1.3 Warnings...................................................................................................................................................7
1.4 Definition of terms.....................................................................................................................................8
2 Safety .............................................................................................................................................................10
2.1 Intended use ...........................................................................................................................................10
2.2 Owner requirements ...............................................................................................................................10
2.3 Duties of the operator .............................................................................................................................11
2.4 Dangers ..................................................................................................................................................12
3 Shipment, Transport, Storage ........................................................................................................................13
3.1 Unpacking the device and compressor...................................................................................................14
3.1.1 Unpack the device ...................................................................................................................... 15
3.1.2 Unpack the compressor .............................................................................................................. 17
4 Description......................................................................................................................................................18
4.1 Function ..................................................................................................................................................18
4.2 Operation modes ....................................................................................................................................19
4.2.1 Operating mode Standby ............................................................................................................ 19
4.2.2 Operating mode measurement ................................................................................................... 19
4.2.3 Operating mode regeneration ..................................................................................................... 19
4.3 Construction............................................................................................................................................20
4.3.1 Device and compressor .............................................................................................................. 20
4.3.2 Control unit.................................................................................................................................. 21
4.3.2.1 Display ...............................................................................................................................22
4.3.3 Vacuum connections................................................................................................................... 23
4.3.3.1 Exhaust ..............................................................................................................................23
4.3.3.2 Purge gas connection ........................................................................................................24
4.3.4 Connections for accessories and control signals........................................................................ 24
4.3.4.1 Adjust the filtering of the measuring signals.......................................................................25
4.3.5 Markings on the device ............................................................................................................... 25
4.3.6 Technical data............................................................................................................................. 26
4.3.6.1 Mechanical data .................................................................................................................26

Table of Contents INFICON
iv Pernicka-700H-CHLD-Operating-instructions-jin76aen1-04-(1911)
4.3.6.2 Electrical data.....................................................................................................................26
4.3.6.3 Physical data......................................................................................................................26
4.3.6.4 Ambient conditions.............................................................................................................27
5 Installation ......................................................................................................................................................28
5.1 Prerequisites for the installation..............................................................................................................28
5.2 Setup ......................................................................................................................................................29
5.3 Connecting the compressor....................................................................................................................31
5.4 Connecting the compressed air ..............................................................................................................34
5.5 Connecting the purge gas.......................................................................................................................35
5.6 Connect the device to the mains power..................................................................................................36
5.7 Connecting the device to an exhaust system (optional) .........................................................................37
5.8 Mounting the test chamber .....................................................................................................................38
6 Operation........................................................................................................................................................41
6.1 Switching the device on ..........................................................................................................................41
6.2 Basic settings..........................................................................................................................................42
6.2.1 Setting the measurement window............................................................................................... 42
6.2.1.1 Set the "Mini" window.........................................................................................................42
6.2.1.2 Setting the "Measure" window ...........................................................................................44
6.2.2 Configuring the measurement process ....................................................................................... 47
6.3 Select method.........................................................................................................................................49
6.3.1 Select an existing method........................................................................................................... 49
6.3.2 Create new method..................................................................................................................... 50
6.3.3 Select existing recipe .................................................................................................................. 52
6.3.4 Create new recipe....................................................................................................................... 53
6.3.5 Set the setpoint for gross leak test.............................................................................................. 55
6.3.6 Select single or multi-gas............................................................................................................ 57
6.3.6.1 Select single-gas................................................................................................................57
6.3.6.2 Select multi-gas..................................................................................................................57
6.4 Calibrating...............................................................................................................................................58
6.4.1 Perform calibration...................................................................................................................... 58
6.4.2 Connect external calibration leak................................................................................................ 59
6.5 Measuring ...............................................................................................................................................60
6.5.1 Preparing the measurement ....................................................................................................... 60
6.5.2 Prepare for manual start ............................................................................................................. 61
6.5.3 Start and perform the measurement ........................................................................................... 62

INFICON Table of Contents
Pernicka-700H-CHLD-Operating-instructions-jin76aen1-04-(1911) v
6.5.3.1 Select the "Mini" window and start the measurement ........................................................62
6.5.3.2 Select the "Measure" window and start the measurement.................................................63
6.5.3.3 Perform gross leak test ......................................................................................................64
6.5.3.4 Terminate the measurement process after gross leak test ................................................64
6.5.3.5 Carry out a fine leak test ....................................................................................................65
6.5.3.6 Complete the measurement process according to the gross leak and fine leak test .........66
6.5.4 Display information about the measurement .............................................................................. 67
6.5.4.1 Display state time diagrams ...............................................................................................67
6.5.4.2 Display measurement parameters .....................................................................................67
6.5.4.3 Display current settings......................................................................................................68
6.5.4.4 Display general information................................................................................................68
6.5.4.5 Display events....................................................................................................................69
6.6 Measurement data..................................................................................................................................70
6.7 Determine mass spectrometer................................................................................................................70
6.8 Perform regeneration..............................................................................................................................72
6.9 Switching off the device. .........................................................................................................................73
7 Warning and error messages .........................................................................................................................74
7.1 Display warning and error messages .....................................................................................................74
8 Cleaning and maintenance.............................................................................................................................78
8.1 General information ................................................................................................................................78
8.2 Device maintenance ...............................................................................................................................78
8.2.1 Change O-rings of the test chamber........................................................................................... 78
8.3 Maintenance of the CHLD sensor...........................................................................................................79
8.3.1 Check the fan function ................................................................................................................ 79
8.3.2 Check or change the filter mat .................................................................................................... 81
8.4 Maintenance of the internal calibration leak ...........................................................................................84
8.4.1 Perform calibration...................................................................................................................... 84
8.4.2 Recalibration of the calibration leak by VTI................................................................................. 84
8.5 Maintenance of the backing pump..........................................................................................................85
8.5.1 Check the oil level....................................................................................................................... 85
8.6 Set CHLD-Sensor ...................................................................................................................................86
8.6.1 Select cathode in the CHLD-Sensor ........................................................................................... 87
8.7 Maintenance plan ...................................................................................................................................87
8.7.1 Maintenance table....................................................................................................................... 87

Table of Contents INFICON
vi Pernicka-700H-CHLD-Operating-instructions-jin76aen1-04-(1911)
9 Decommissioning the device..........................................................................................................................88
9.1 Deinstallation ..........................................................................................................................................88
9.1.1 Disconnect the device from the power supply ............................................................................ 88
9.1.2 Separate the purge gas .............................................................................................................. 89
9.1.3 Separate the compressed air...................................................................................................... 90
9.1.4 Disconnect the compressor ........................................................................................................ 90
9.2 Sending in the device .............................................................................................................................92
9.3 Disposing of the device...........................................................................................................................94
10 Accessories and spare parts ..........................................................................................................................95
10.1 Accessories ............................................................................................................................................95
10.2 Spare parts .............................................................................................................................................95
11 CE Declaration of Conformity .........................................................................................................................96
Index...............................................................................................................................................................97

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1 About these instructions
This document applies to the software version stated on the title page.
Product names may occur in the document, which are added for identification
purposes only and belong to the respective owner of the rights.
1.1 Target groups
This instruction manual is aimed at the operator of the device, at technically qualified
specialists, and trained personnel.
1.2 Other associated documents
Operating instructions CHLD-Sensor: Operation Manual CHLD Sensor QME
220
Operating Instructions Turbo Molecular
Pump:
Operating Instructions HiPace300
Turbopump
Operating Instructions Backing Pump: Operating Instructions GA01601_002_A1
Operating Instructions Compressor: 8200 Compressor Installation, Operation
and Service Instructions
Operating Instructions cryogenic pump: Cryo-Torr Pump Installation, Operation
and Maintenance Instructions
Granville-Phillips-Sensor: Instruction Manual
Spare parts CHLD700H accumulation
leak detector:
Spare Parts CHLD700H Accumulation
Leak Detector
1.3 Warnings
DANGER
Imminent hazard resulting in death or serious injuries
WARNING
Hazardous situation resulting in potential death or serious injuries
CAUTION
Hazardous situation resulting in minor injuries

1 | About these instructions INFICON
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NOTICE
Hazardous situation resulting in damage to property or the environment
1.4 Definition of terms
Use of gas types in the device
The device is a helium leak detector. If you want to use a forming gas instead of
helium to detect the hydrogen contained therein, the information for helium also
applies to hydrogen.
Automatic tuning / mass setting
This function adjusts the mass spectrometer so that a maximum leak rate indicator is
achieved. In order to detect a maximum ion current with the ion detector, the control
computer adjusts the voltage for accelerating the ions within the selected mass range
accordingly.
During each calibration, the mass is adjusted automatically.
Operating mode
The leak detector distinguishes between the operating modes "Standby",
"Measurement" and "Regeneration".
The device must be in the operating mode "Standby", before a measurement can
begin. If the measurement process is aborted, the device is also in the operating mode
"Standby".
With the operating mode "Measurement" tracer gas, which escapes from the test
object is measured using a mass spectrometer (CHLD-Sensor). The result is shown
as a helium raw signal (current in [A] unit) with the gross leak test and with the fine
leak test as a leak rate in the unit [mbar l/s] or [atm cc/s].
In the operating mode "Regeneration", all gases except helium and hydrogen, are
frozen out with the cryogenic pump. The frozen gases are separated in the ice state
on the inner surface of the cryogenic pump. At regular intervals, these separated
gases must be evaporated and removed from the system.
Forming gas
Forming gas is a collective term for gas mixtures of nitrogen and hydrogen.
Gross leak test
Gross leak test refers to a phase of the measuring procedure, in which the device
checks the test object for gross leaks.

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Accumulation
Accumulation is a phase during the measuring procedure. Tracer gas escaping from
the test object is accumulated in the closed measuring system. The change in the
tracer gas quantity over time serves to determine the leak rate.
Internal helium background
The measurement system of the leak detector also contains a residual amount of
helium. This generates an internal measurement signal component (background
signal), which superimposes on the leak display.
So that this background signal can be suppressed, an internal "background
suppression" can be activated with the factory settings.
Minimum detectable leak rate
The minimum detectable leak rate which can be detected by the leak detector under
ideal conditions (> 4 x 10-14 mbar l/s).
Background signal
Helium or hydrogen (as part of water) are natural components of air.
Before any leak detection, an amount of the adjusted tracer gas is already in the
volume on the surfaces of the test chamber, supply lines, and even in the leak
detector itself. This certain amount of tracer gas generates a measurement signal
which is called the "Background signal". The ongoing evacuation of the test chamber
continuously reduces this background signal.
Foreline pressure
Pressure of the backing pressure between the turbo molecular pump and the backing
pump.

2 | Safety INFICON
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2 Safety
2.1 Intended use
The Pernicka 700H CHLD (Cumulative Helium Leak Detector) is a cumulative helium
leak detector for measuring very small leak rates.
Improper use Avoid the following, non-intended uses:
• Place the unit so that power switches / connections for power supply are not easily
accessible
• Operation of the device with impermissible pressures for the pneumatic valves and
the purge gas
• Using the compressor as a storage facility
• Using the compressor as a seat
• Using the compressor as a ladder
• Operating the device with untrained personnel
• Operating the device without connected protective conductor cable at the
electronics box
• Operating the device with a test chamber into which no grid has been inserted
2.2 Owner requirements
The following notes are for companies or any person who is responsible for the safety
and effective use of the product by the user, employee or third party.
Safety conscious operation
• Operate the device only if it is in perfect technical condition and has no damage.
• Only operate the device in accordance with this instruction manual, in a safety and
risk conscious manner.
• Adhere to the following regulations and observe their compliance:
– Intended use
– General applicable safety and accident prevention regulations
– International, national and local standards and guidelines
– Additional device-related provisions and regulations
• Only use original parts or parts approved by the manufacturer.
• Keep this instruction manual available on site.

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Personnel qualifications
• Only instructed personnel should be permitted to work with and on the device. The
instructed personnel must have received training on the device.
• Make sure that authorized personnel have read and understood the operating
instructions and all other applicable documents.
2.3 Duties of the operator
• Read, observe, and follow the information in this manual and in the work
instructions provided by the owner. This concerns in particular the safety and
warning instructions.
• Always observe the complete operating instructions for all work.
• If you have any questions about operation or maintenance that are not answered
in this manual, please contact Customer Service.

2 | Safety INFICON
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2.4 Dangers
The measuring instrument was built according to the state-of-the-art and the
recognized safety regulations. Nevertheless, improper use may result in risk to life and
limb on the part of the user or third parties, or damage to the measuring instrument or
other property may occur.
Dangers from electric
power
There is a danger to life from the contact of conductive parts inside the device.
• Disconnect the device from the power supply prior to any installation and
maintenance work. Make sure that the electric power supply cannot reconnected
without authorization.
The device contains electric components that can be damaged from high electric
voltage.
• Before connecting the device to the power supply, make sure that the supply
voltage specified on the device is the same as the local power supply.
Mechanical energy
hazards
Jerky movements of the device during operation can lead to blockage of the turbo
molecular pump. There is a risk of injury due to the release of rotating energy or by
parts moving around.
• Do not jerk the unit during operation.
Hazards due to loss of
stability
If the transport rollers of the device are not locked, there is a risk of injury due to loss
of the stability.
• Lock the transport rollers of the device.
Hazards due to
materials and
substances
If the exhaust filter on the backing pump is not checked regularly, there is a danger of
poisoning by oil fumes.
• Periodically check the exhaust filter on the backing pump of the unit or connect the
unit to an exhaust system.
• Only use the device away from areas with a risk of explosions.
Hazards due to
breakage during
operation
In the thawing cryogenic pump, a high pressure can develop when the turbo molecular
pump stops. There is a risk of injury due to breakage of an unsuitable rupture disk on
the cryogenic pump during operation.
• Only use a rupture disk suitable for the cryogenic pump.

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3 Shipment, Transport, Storage
Scope of delivery Item Quantity
Pernicka 700H CHLD 1
Cryogenic pump compressor 1
Power supply cable 3
Helium-Supply-line 1
Helium-Return-line 1
Toolkit (tool) 1
Protective conductor electronic box 1
Wrist strap, light blue 1
Spiral cable for wrist band 1
Allen wrench, modified 9/64 inch 1
PE bags 100mm x 150mm x 0.05mm 1
PE bags 180mm x 250mm x 0.05mm 1
Transport box for Pernicka 700H CHLD 1
Tilt sensor 4
Shock sensor 4
Double label 110 x 60 mm 1
Original instruction manual 1
Supplier documentation (see Chapter "Other applicable
documents")
1
►Check the delivery contents after receiving the product to ensure it is complete.
Transport
WARNING
Falling loads
The device does not have any crane eyelets. The handle is for only for sliding the
device.
► Do not transport the device using lifting tackle.
CAUTION
Danger of crushing extremities
Feet can be rolled over and crushed.
► Keep feet away from the rollers.
► Do not pull on the device, but push the device.

3 | Shipment, Transport, Storage INFICON
14 / 100 Pernicka-700H-CHLD-Operating-instructions-jin76aen1-04-(1911)
NOTICE
Damage caused by transport
The unit and the cryogenic pump compressor can be damaged during transport. The
delivery consists of a box with the Pernicka 700H CHLD and a cardboard box with the
cryogenic pump compressor. The transport box is secured with tilt and shock sensors.
► If one of the indicators of the shock or tilt sensors is red, proceed as follows: Do not
refuse to accept the delivery. Note the red indicator on the delivery note and
immediately check the delivery for transport damage. If you notice any transport
damage, do not open the package. Contact your transport company immediately.
Storage Store the device and the cryogenic pump compressor observing the technical data,
see "Technical data [}26]".
See also
2Other associated documents [}7]
3.1 Unpacking the device and compressor
The delivery consists of the transport box containing the Pernicka 700H CHLD and a
carton with the components as supplied, as well as a cardboard box with the
cryogenic pump compressor.
Transport box with
Carton with cryogenic pump
compressor
and components
Pernicka 700H CHLD
Fig.1: Components of the delivery

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3.1.1 Unpack the device
1
Remove the screws from the front panel of the transport box.
2
Remove the front panel from the transport box.
Carton with components
Packing material
Transport box
Front plate
3
Remove the packing material from the transport box.
4
Remove the carton from the transport box.
5
Open the carton, remove the packaging material and remove the components.
Cross beams
Wedge with loop
Transport strap
Pernicka 700H CHLD

3 | Shipment, Transport, Storage INFICON
16 / 100 Pernicka-700H-CHLD-Operating-instructions-jin76aen1-04-(1911)
6
Loosen the 2 transport straps.
7
To loosen the 2 wedges, pull on the loops.
8
Remove the cross beam from the transport box.
9
Place the 2 wedges in front of the transport box on the floor.
10
Place the front plate on the wedges, creating a ramp.
11
Loosen the brakes on the transport rollers and carefully pull the device out of
the transport box.
CAUTION
Danger of crushing extremities
Feet can be rolled over and crushed.
► Keep feet away from the rollers.
12
Remove the protective film from the device.
13
Remove the foam sheet from the vacuum components and from the monitor.
Foam block
under the test leak
Foam block under
the
Adhesive tape on hand
valve test leak CHLD-Sensor
14
Remove the 2 foam blocks from under the CHLD-Sensor and from under
calibration leak.
15
Remove the adhesive tape from the hand valve of the test leak.
16
Ensure that the hand valve of the test leak is open.
17
Remove all cable ties that secure the cables to the housing.
18
Slide the device to its destination.

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3.1.2 Unpack the compressor
CAUTION
Danger of injury when lifting the heavy cryogenic pump compressor
The cryogenic pump compressor weighs approx. 68 kg and can slip out of your hands.
► Lift and transport the cryogenic pump compressor only with two people.
► To lift get hold below the floor panel.
Carton with cryogenic pump
compressor
Cryogenic pump
compressor
Foam
profile
1
Open the carton and remove the packaging material.
2
Carefully lift the compressor out of the carton.
3
Remove the foam profiles from the compressor.
4
Move the compressor to its destination.

4 | Description INFICON
18 / 100 Pernicka-700H-CHLD-Operating-instructions-jin76aen1-04-(1911)
4 Description
4.1 Function
The device is a leak detector for detecting and measuring leaks in sealed test objects.
Description of the measurement process
The device is in the "Standby" operating mode at the start of the measurement
process.
The test chamber for receiving the test object filled with the tracer gas, e.g. helium, is
located centrally in front of the device. Insert the test object and close the test
chamber lid. Start the measurement process
Test
chamber
Lid
Fig.2: Test chamber: Lid open (left) and lid closed (right)
During the automatically running measurement process, first the internal volume of the
test chamber and the volume between the two sealing rings on the upper side of the
test chamber are purged with purge gas, preferably with argon 5.0. After the
completed purging process, the purge gas is pumped out of the test chamber, from
the volume between the 2 sealing rings as well as from the valve block.
After checking the permissible pressure for the operation of the mass spectrometer
(CHLD-Sensor) the valve block is then evacuated. Finally the CHLD-Sensor is
switched on. The CHLD-Sensor is switched off before the valve is opened to the test
chamber. If the pressure is sufficiently low (in particular, the lid of the test chamber
must be closed), the CHLD-Sensor is switched on.
The gross leak test is started. With the gross leak test the current of the helium raw
signal is indicated in amps [A]. A setpoint set before the start of measurement is used
as the abort criterion for this measurement process (see "Set the setpoint for gross
leak test [}55]"). If the helium signal exceeds this setpoint, a fine leak test is not
carried out after the gross leak test and the measurement process is terminated. If the

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helium signal falls below this setpoint, the helium is removed from the system with the
turbo molecular pump and then the measurement process is continued with the fine
leak test.
In the fine leak test, the gases escaping from the test object, except for helium, are
pumped out with the cryogenic pump. During the accumulation measurement, the
quantity of helium escaping from the test object is determined. As a result of the fine
leak test, the leak rate is calculated in the unit of measurement
[mbar l/s] or [atm cc/s] and displayed on the monitor. The test chamber is purged and
the measurement process is terminated.
The measurement process is terminated and the device is again in "Standby"
operating mode.
4.2 Operation modes
4.2.1 Operating mode Standby
Before a measurement can be started, the device must be in "Standby" operating
mode.
The device is in "Standby" operating mode:
• when the measurement process has been terminated normally after the fine leak
test;
• when the measurement process was terminated after the gross leak test;
• after a completed regeneration;
• when the device is switched on.
In the "Standby" operating mode the valves V1, V3, V4, V5, and V6 are closed. The
valve V2 is open.
During the "Standby" the test objects can be changed.
4.2.2 Operating mode measurement
If there is a leak, the tracer gas escaping from the test object is measured with the
help of a CHLD-Sensor and the leak rate is displayed as a result with the
unit [mbar l/s] or [atm cc/s].
4.2.3 Operating mode regeneration
The device has a cryogenic pump, which freezes all gases except helium and
hydrogen. The frozen gases are separated in the ice state on the inner surface of the
cryogenic pump. At regular intervals these separated gases must be evaporated in the
"regeneration" operating mode and removed from the system.

4 | Description INFICON
20 / 100 Pernicka-700H-CHLD-Operating-instructions-jin76aen1-04-(1911)
4.3 Construction
4.3.1 Device and compressor
Display with
measurement program
Test chamber
for test object
Keyboard
Storage
Valve
groups
Connection for
customer
calibration leak (optional)
Valve
groups
Mains switch
Interfaces
Device
Device
Cryogenic pump compressor
Selector switch for mains supply
Trackball
USB
Selector switch for main frequency
Fig.3: Device (top) and cryogenic pump compressor (bottom): Front view