MKS HPQ3 User manual

HPQ3 (S)
Hardware Manual
HPQ3 Hardware Manual –SP101019.101
October2012

MKS Instruments UK Ltd
HPQ3 Hardware Manual –SP101019.101 October 2012
2
As part of our continuous product improvement policy, we are always pleased to receive your comments
and suggestions about how we should develop our product range. We believe that the manual is an
important part of the product and would welcome your feedback, particularly relating to any omissions or
inaccuracies you may discover.
You can send your comments to:-
MKS Instruments UK Ltd - Spectra Products
Cowley Way
Weston Road
Crewe
Cheshire
CW1 6AG
U.K.
[phone] Tel. International
[phone] Fax. International
Email: [e-mail]
MKS Products provided subject to the US Export Regulations.
Diversion or transfer contrary to U.S. law is prohibited.
HPQ3 is a registered trademark of MKS Instruments UK Limited.
Conflat® is a registered trademark of Varian Associates.
Viton® is a registered trademark of E.I. DuPont de Nemours & Co., Inc.
Windows® is a trademark of the Microsoft Corporation.
All other brand or product names are trademarks or registered trademarks of their respective companies and as such are fully
recognised.

MKS Instruments UK Ltd
HPQ3 Hardware Manual –SP101019.101 October 2012
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Table of Contents
Overview 7
1. Specifications 9
1.1 Mechanical 9
HPQ3 9
24VDC Power Supply 9
Analyser 9
1.2 Electrical 10
Power Supply 11
1.3 Environmental 11
Temperature range 11
1.4 Safety 11
1.5 Connectors 11
1.6 Warning labels 12
1.7 Ventilation 12
2. Rear Panel Connections 17
2.1 X-Trip 18
2.2 Audio Socket 18
2.3 Emission Indicator 19
2.4 Multiplier Indicator –N/A 19
2.5 Power Indicator 19
2.6 Gauge Connector 20
2.7 Power 20
2.8 Analogue I/O Connector 21
2.9 Digital I/O Connector 22
2.10 Ethernet 24
3. Analyser Installation 25
3.1 Unpacking 25
3.2 Inspecting the analyser 25
3.3 Installing the analyser 27
3.4 Checking the system pressure 27
3.5 Mounting the analyser 29
4. HPQ3 Installation 30
4.1 Installation 30
4.2 Electrical connections 30
5. Connecting to the Ethernet Port 32
5.1 Adding the HPQ3 33
5.2 Directly connecting to the HPQ3 35
5.3 Assigning a static IP Address 39
6. Baking 42
7. Analyser Maintenance 43
7.1 Overview 43
7.2 Ohmmeter analyser checks 44
7.3 Checking filaments 45
7.4.1 Removing the filaments 47
7.4.2 Fitting filaments 51
51
7.5 Ion Source cleaning 52
7.5.1 Cleaning while fitted to the analyser
52
7.5.2 Removing the ion-source to clean or
replace 53

MKS Instruments UK Ltd
HPQ3 Hardware Manual –SP101019.101 October 2012
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8. Exploded Views 56
Analyser pin-outs 56
9. Spare Parts 58
Filaments 58
Complete Ion-source 58
10. Returning Your Unit for Service 59
Support Contact Numbers 59

MKS Instruments UK Ltd
HPQ3 Hardware Manual –SP101019.101 October 2012
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MKS Instruments UK Ltd
3 –4 Cowley Way
Crewe
Cheshire
CW16AG
United Kingdom
EC Declaration of Conformity
MKS Instruments UK Ltd declares that the:
HPQ3 RGA (MKS114) control electronics package
Is in accordance with the following directives:
I hereby declare that the equipment named above has been designed to comply with the relevant
sections of the above referenced specifications. The unit complies with all essential requirements
of the Directives.
2004/108/EEC Electromagnetic Compatibility Directive
EN 61326-1:2006 Electrical equipment for measurement, control & laboratory use.
2006/95/EC Low Voltage Directive
EN 61010-1:2006 Safety requirements for electrical equipment for measurement, control &
laboratory use.

MKS Instruments UK Ltd
HPQ3 Hardware Manual –SP101019.101 October 2012
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Signed:
J.M.Higgins
General Manager
10th October 2009

MKS Instruments UK Ltd
HPQ3 Hardware Manual –SP101019.101 October 2012
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Overview
The HPQ3 is the latest innovation in RGA technology from MKS Instruments allowing operation far
beyond the 1e-4mbar of conventional RGA’s without the need for differential pumping.
The field proven analyser technology of the HPQ analyser coupled with the latest innovative
electronics technology derived from the Microvision2 family give data quality not previously seen in
this class of instrument. The resulting system is less complex, with reduced installation
requirements, offering a higher level of reliability at a substantially lower cost.
In addition, the HPQ3S uses application validated correction algorithms to compensate for the
sensitivity variation arising from ion-molecule interactions in the ion source at higher pressures.
This allows reliable data to be obtained for specific gas species including water, oxygen, nitrogen,
methane, helium and hydrogen in argon and other gas mixtures.
Features
Data acquisition through solid state, wide dynamic range, fast settling detector electronics.
Temperature stabilized critical components offering improved signal stability and drift.
Calibrations and configurations stored locally within the RGA.
Flexible I/O capability including a dedicated gauge port.
Further expandability of the I/O capabilities using add-in cards.
TCP/IP and ASCII protocol support
Operation
The HPQ3 is designed to be operated in several ways:
From a host computer –an IBM compatible PC or MAC running the MKS Process Eye
Professional or EasyView software package.
PC or MAC using a web browser such as Internet Explorer or Safari.
Integration into existing systems controlling through the use of the ASCII protocol command set.

MKS Instruments UK Ltd
HPQ3 Hardware Manual –SP101019.101 October 2012
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This manual focuses on HPQ3hardware and should be used in conjunction with the relevant user
interface manual during installation.
Any required network communications cards should be installed and configured prior to installing
the HPQ3, or RGA software if supplied.

MKS Instruments UK Ltd
HPQ3 Hardware Manual –SP101019.101 October 2012
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1. Specifications
1.1 Mechanical
HPQ3
Dimensions:
127mm wide x 127mm x 179mm deep, plus 46mm over analyser connector to face of CF flange.
Weight:
1.7 kg
24VDC Power Supply
Dimensions:
75mm wide x 45mm high x 146mm deep plus 30mm over strain relief.
Weight:
0.6 kg
Analyser
Max. Operating pressure
HPQ3 1e-3 Torr (1.3e-3 mbar)
HPQ3S 8e-3 Torr (1e-2 mbar) –Application
dependant
Maximum transient burst pressure
4e-2 Torr (5e-2 mbar) –gas dependant

MKS Instruments UK Ltd
HPQ3 Hardware Manual –SP101019.101 October 2012
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