MKS 146C User manual

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120598-P1
Rev B, 3/99
Instruction Manual
MKS Type 146C Cluster Gauge
Vacuum Gauge Measurement
and Control System
Six Shattuck Road
Andover, MA 01810-2449
[phone] or [phone]
Fax: [phone]
E-mail: [e-mail]
Web site: http://www.mksinst.com
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WARRANTY
Type 146C Equipment
MKS Instruments, Inc. (MKS) warrants that the equipment described above (th
e
“equipment”) manufactured by MKS shall be free from defects in materials and
workmanship for a period of one year from date of shipment and will for a period of tw
o
years from the date of shipment, correctly perform all date-related operations, including
without limitation accepting data entry, sequencing, sorting, comparing, and reporting,
regardless of the date the operation is performed or the date involved in the operation,
provided that, if the equipment exchanges data or is otherwise used with equipment,
software, or other products of others, such products of others themselves correctl
y
perform all date-related operations and store and transmit dates and date-related dat
a
in a format compatible with MKS equipment. THIS WARRANTY IS MKS’ SOLE
WARRANTY CONCERNING DATE-RELATED OPERATIONS.
For the period commencing with the date of shipment of this equipment and ending one
year later in the case of defects in materials and workmanship, but two years later in the
case of failure to comply with the date-related operations warranty, MKS will, at its
option, either repair or replace any part which is defective in materials or workmanship
or with respect to the date-related operations warranty without charge to the purchaser.
The foregoing shall constitute the exclusive and sole remedy of the purchaser for an
y
breach by MKS of this warranty.
The purchaser, before returning any equipment covered by this warranty, which is
asserted to be defective by the purchaser, shall make specific written arrangements
with respect to the responsibility for shipping the equipment and handling any othe
r
incidental charges with the MKS sales representative or distributor from which the
equipment was purchased or, in the case of a direct purchase from MKS, with the MKS
home office in Andover, Massachusetts, USA.
This warranty does not apply to any equipment which has not been installed and used
in accordance with the specifications recommended by MKS for the proper and normal
use of the equipment. MKS shall not be liable under any circumstances for indirect,
special, consequential, or incidental damages in connection with, or arising out of, th
e
sale, performance, or use of the equipment covered by this warranty.
MKS recommends that all MKS pressure and flow products be calibrated periodicall
y
(typically every 6 to 12 months) to ensure accurate readings. When a product is
returned to MKS for this periodic re-calibration it is considered normal preventativ
e
maintenance not covered by any warranty.
THIS WARRANTY IS IN LIEU OF ALL OTHER RELEVANT WARRANTIES,
EXPRESSED OR IMPLIED, INCLUDING THE IMPLIED WARRANTY OF
MERCHANTABILITY AND THE IMPLIED WARRANTY OF FITNESS FOR
A
PARTICULAR PURPOSE, AND ANY WARRANTY AGAINST INFRINGEMENT O
F
ANY PATENT.
11-98 120598-P1
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120598-P1
Rev B, 3/99
MKS Type 146C Cluster Gauge
Vacuum Gauge Measurement
and Control System
0
1
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Copyright © 1999 by MKS Instruments, Inc.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by
any means, electronic or mechanical, including photocopying and recording, or by any
information storage or retrieval system, except as may be expressly permitted in writing by MKS
Instruments, Inc.
Printed in the United States of America
Baratronis a registered trademark and Cluster Gaugeis a trademark of MKS Instruments,
Inc., Andover, MA
Swagelok, VCR®, and VCO®are registered trademarks of Swagelok Marketing Co., Solon,
OH
Convectronis a registered trademark of Granville-Phillips Company, Boulder, CO
IBM, XT, and ATare registered trademarks of International Business Machines Corp.,
Armonk, NY
Firmware version 4.0x
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Table of Contents
iii
Table of Contents
Safety Information.................................................................................................................. 1
Symbols Used in This Instruction Manual.................................................................. 1
Symbols Found on the Unit ....................................................................................... 2
Safety Procedures and Precautions............................................................................. 3
Sicherheitshinweise................................................................................................................ 5
In dieser Betriebsanleitung vorkommende Symbole................................................... 5
Am Gerät angebrachte Symbole................................................................................. 6
Sicherheitsvorschriften und Vorsichtsmaßnahmen...................................................... 7
Informations relatives à la sécurité.......................................................................................... 9
Symboles utilisés dans ce manuel d'utilisation ........................................................... 9
Symboles apparaissant sur l'appareil .......................................................................... 10
Mesures de sécurité et mises en garde........................................................................ 11
Información sobre seguridad................................................................................................... 13
Símbolos usados en el manual de instrucciones.......................................................... 13
Símbolos que aparecen en la unidad........................................................................... 14
Procedimientos y precauciones de seguridad.............................................................. 15
Chapter One: General Information......................................................................................... 17
Introduction............................................................................................................... 17
How this Manual is Organized................................................................................... 18
Format of Instructions................................................................................... 19
Conventions Used in this Manual.................................................................. 19
Terminology Used in this Manual ................................................................. 20
Customer Support...................................................................................................... 22
Chapter Two: Installation......................................................................................................23
How To Unpack the 146 Instrument........................................................................... 23
Unpacking Checklist ..................................................................................... 23
Boards........................................................................................................... 24
Optional Accessories..................................................................................... 24
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Table of Contents
iv
Interface Cables .............................................................................................25
Generic Shielded Cable Description...............................................................25
Model Code Explanation ...............................................................................28
Product Location and Requirements...........................................................................29
Operating Environmental Requirements.........................................................29
Safety Conditions ..........................................................................................29
Mounting Instructions....................................................................................29
Electrical Requirements.................................................................................29
System Requirements.................................................................................................30
Pressure Transducer Selection........................................................................30
Valve Selection..............................................................................................30
Mass Flow Controller Selection.....................................................................30
Dimensions................................................................................................................31
146 Set Up.................................................................................................................32
General..........................................................................................................32
Checking the Fuses and AC line Voltage Select Switch.................................33
Transducer/Mass Flow Controller Connections..............................................33
Communication and Power Connections........................................................33
Installing Boards in the 146 Unit ...................................................................34
New Configuration Warning Code (C11).......................................................37
146 Start Up...............................................................................................................38
Chapter Three: Overview.......................................................................................................39
The Front Panel..........................................................................................................39
The Power Switch..........................................................................................39
Overview of Keys and Their Functions.......................................................................40
What Happens when a Key is Pressed............................................................40
Specific Keys and Their Functions.................................................................41
The Front Panel Window............................................................................................43
Initial View Upon Power Up..........................................................................43
What to Look For ..........................................................................................44
Labels on the 146 Unit ...............................................................................................46
Inside the Type 146 Unit............................................................................................47
General Information.......................................................................................47
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Table of Contents
v
Capacitance Manometer Board...................................................................... 48
Pirani/Convection.......................................................................................... 50
Configuring the Dual Channel Pirani/Convection Board as Single
Channel Board .............................................................................................. 51
Cold Cathode ................................................................................................ 54
Hot Cathode.................................................................................................. 55
Thermocouple Board..................................................................................... 59
Configuring the Dual Thermocouple Board as Single Channel Board............ 60
Mass Flow Controller Board ......................................................................... 63
General I/O Connector................................................................................... 65
Auxiliary Output Board................................................................................. 67
Auxiliary Output Board - Fail-Safe Feature................................................... 68
Control Board ............................................................................................... 69
How To Configure the Control Board to Drive Different Valves ...................72
The Displayless Front Panel Connector Pinout.............................................. 74
The Binary Coded Decimal (BCD) Board...................................................... 76
The RS-232 Connector.................................................................................. 77
Overview of Modes ................................................................................................... 79
How To Tell which Mode You Are In........................................................... 79
How To Change from One Mode to Another................................................. 79
Overview of the Five Modes ......................................................................... 80
Operational Diagram.................................................................................................. 82
Effects of Channel Changes....................................................................................... 84
When a Channel’s Condition Changes from Measuring To . . ....................... 84
When a Channel’s Condition Changes to Measuring/Initializing From . ....... 85
Overview of Alarms................................................................................................... 86
Alarm Conditions.......................................................................................... 88
System Design Elements............................................................................................ 90
General Control Theory................................................................................. 90
Pressure Control............................................................................................ 92
Mass Flow Control........................................................................................ 93
Memory Storage in the 146 Instrument.......................................................... 95
Ion Gauge High Pressure Protection/Disconnect Detection............................ 97
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Table of Contents
vi
Displayless 146 Unit..................................................................................................98
Connecting to the Displayless 146 Unit .........................................................98
The LED........................................................................................................99
How To Establish RS-232 Communications ..................................................100
Chapter Four: Operation in Normal Mode..............................................................................101
General Information ...................................................................................................101
Normal Mode is Used when Performing the Following Procedures................102
How To Display the Software Version .......................................................................103
How To Switch Channels in the Main Display...........................................................104
How To Turn a Channel ON or OFF ..........................................................................106
How To Turn an Alarm ON or OFF ...........................................................................107
How To Zero a Sensor/MFC ......................................................................................108
How To Toggle the Zero On and Off..........................................................................112
How To Span a Pirani Type Sensor to Atmosphere ....................................................113
How To Span a Sensor with a Reference....................................................................115
How To Toggle the Span On and Off .........................................................................117
How To Calculate the Analog Set Point .....................................................................118
How To Command an MFC Open Override ...............................................................120
How To Command an MFC Close Override...............................................................121
How To Cancel an MFC Open/Close Override...........................................................121
How To Start Hot Cathode Low Power Degassing .....................................................122
How To Start Hot Cathode High Power Degassing.....................................................123
How To Stop Hot Cathode Degassing ........................................................................124
Chapter Five: Operation in Leakage Mode.............................................................................125
General Information ...................................................................................................125
Leakage Mode is Used when Performing the Following Procedures...............127
How To Display the Software Version .......................................................................128
How To Switch Channels in the Main Display...........................................................129
How To Turn a Channel ON or OFF ..........................................................................131
How To Turn an Alarm ON or OFF ...........................................................................132
How To Zero a Sensor/MFC ......................................................................................133
How To Toggle the Zero On and Off..........................................................................137
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Table of Contents
vii
How To Span a Pirani Type Sensor to Atmosphere.................................................... 138
How To Span a Sensor with a Reference.................................................................... 140
How To Toggle the Span On and Off......................................................................... 142
How To Calculate the Analog Set Point..................................................................... 143
How To Command an MFC Open Override............................................................... 146
How To Command an MFC Close Override .............................................................. 146
How To Cancel an MFC Open/Close Override .......................................................... 147
How To Start Hot Cathode Low Power Degassing..................................................... 148
How To Start Hot Cathode High Power Degassing .................................................... 149
How To Stop Hot Cathode Degassing........................................................................ 150
Chapter Six: Operation in Tuning Mode................................................................................ 151
General Information................................................................................................... 151
The Front Panel Window............................................................................... 152
The Various Displays in Tuning Mode.......................................................... 154
Tuning Mode is Used when Performing the Following Procedures................ 156
The Two Levels within Tuning Mode............................................................ 157
Keys.............................................................................................................. 159
The Deviation Indicator................................................................................. 160
How To Change the Valve Position ........................................................................... 162
How To Adjust Base.................................................................................................. 164
How To Adjust Start.................................................................................................. 166
How To Adjust Integral ............................................................................................. 168
How To Adjust Preset................................................................................................ 170
How To Edit Recipes (Gain, Lead, and Set Point)...................................................... 172
How To Adjust Gain.................................................................................................. 174
How To Adjust Lead.................................................................................................. 176
How To Adjust Set Point........................................................................................... 178
Chapter Seven: Operation in Setup Mode.............................................................................. 181
General Information................................................................................................... 181
The Various Displays in Setup Mode ............................................................ 182
How To Set Alarm Trip Points .................................................................................. 188
How To Perform Sensor Calibration/MFC Setup....................................................... 190
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Table of Contents
viii
Capacitance Manometer.................................................................................192
Pirani and Convection Gauges .......................................................................194
Cold Cathode.................................................................................................196
Hot Cathode...................................................................................................198
Mass Flow Controller....................................................................................200
Thermocouple................................................................................................202
How To Set Up a Dual Channel Display.....................................................................204
Two Types of Dual Channel Operation - Continuous and Discontinuous .......206
How To Configure an Analog Output.........................................................................208
Linear Scaling................................................................................................209
Logarithmic Scaling.......................................................................................209
Set Point........................................................................................................209
How To Adjust Miscellaneous Codes.........................................................................211
Code 1: How To Select Pressure/Volt/Current...........................................................212
Code 2: How To Select Pressure Units......................................................................215
Code 3: How To Adjust Audio Alarms......................................................................216
Code 4: How To Adjust Alpha (PID Control)............................................................218
Code 5: How To Configure the RS-232 Port .............................................................220
Code 7: How To Set the Display for Leakage Mode..................................................222
Code 8: How To Edit the Data Logger Interval..........................................................224
Code 10x: How To Adjust the Display Lag...............................................................226
Code 11x: How To Turn Auto Zeroing ON or OFF...................................................228
Code 12x: How To Adjust the Auto Power Control...................................................230
Code 13x: How To Adjust Softstart for Control.........................................................232
Code 14x: How To Select Control Settings ...............................................................234
Code 15x: How To Set Up the Analog Set Point .......................................................236
Code 16x: How To Set the HC Shutoff Features........................................................239
Code 17x: How To Set Up the MFC..........................................................................241
Set Point Mode of Operation..........................................................................242
Totaling Mode of Operation...........................................................................242
Ratio Mode of Operation ...............................................................................242
Code 18x: How To Select the Convection Gauge ......................................................245
Chapter Eight: Operation in Control Mode.............................................................................247
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Table of Contents
ix
General Information................................................................................................... 247
Control Mode is Used when Performing the Following Procedures ............... 247
The Deviation Indicator................................................................................. 249
The Rear Panel Override Indicator................................................................. 250
How To Select the Active Recipe...............................................................................251
How To Set the Valve to OPEN Position................................................................... 251
How To Set the Valve to AUTO Position ..................................................................252
How To Set the Valve to CLOSE Position................................................................. 252
How To Set the Valve to HOLD Position ..................................................................253
How To Set the Valve to MANUAL Position ............................................................ 253
Chapter Nine: RS-232 Communications................................................................................ 255
General Information................................................................................................... 255
How To Establish RS-232 Communications.................................................. 255
MKS RS-232 Protocol .................................................................................. 256
Channel Numbering ...................................................................................... 256
General Guidelines for RS-232 Messages...................................................... 258
Command Messages.................................................................................................. 259
Power Control Messages............................................................................... 260
Calibration Messages .................................................................................... 261
Sensor Configuration Messages..................................................................... 263
Mass Flow Controller Messages.................................................................... 265
Dual Channel Setup Messages....................................................................... 266
Alarm Trip Point Messages........................................................................... 267
Analog Output Messages............................................................................... 269
Control Messages.......................................................................................... 270
Miscellaneous Messages................................................................................ 273
Read Only Messages..................................................................................... 276
Error Messages.......................................................................................................... 287
Chapter Ten: Maintenance..................................................................................................... 289
General Information................................................................................................... 289
How To Clean the Front Panel................................................................................... 289
How To Replace the Fuses......................................................................................... 290
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Table of Contents
x
Chapter Eleven: Troubleshooting...........................................................................................291
The Diagnostics Feature.............................................................................................291
Starting the Diagnostics Feature.....................................................................291
Performing 146 Instrument Self Tests............................................................291
Code 1: RAM Test........................................................................................292
Code 2: PROM Test .....................................................................................293
Code 3: Display Test ....................................................................................293
Code 4: Check all Keys.................................................................................294
Code 5: Beeper Test......................................................................................295
Code 5x: Relay Test......................................................................................296
Code 6: Rear Panel Status.............................................................................297
Code 6x: Analog Outputs Check...................................................................298
Code 7x: Response Time for Fail-Safe Feature .............................................299
Code 9999: Factory Calibration ....................................................................300
Appendix A: Product Specifications.......................................................................................301
Physical Specifications...............................................................................................301
Electrical Specifications .............................................................................................302
Appendix B: Parts List/Accessories .......................................................................................303
Appendix C: RS-232 Error Codes..........................................................................................305
Error Code Summary..................................................................................................305
Appendix D: Front Panel Error/Status Messages....................................................................307
Appendix E: Instrument Default Values.................................................................................309
Appendix F: Underrange and Overrange Values.....................................................................313
Appendix G: Board Specific Commands................................................................................315
General Information ...................................................................................................315
Capacitance Manometer Messages..............................................................................316
Pirani/Convection Messages.......................................................................................318
Cold Cathode Messages .............................................................................................320
Hot Cathode Messages...............................................................................................322
Mass Flow Controller Messages.................................................................................324
Thermocouple Messages ............................................................................................326
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Table of Contents
xi
Auxiliary Output Messages........................................................................................ 327
Control Messages ...................................................................................................... 329
Index...................................................................................................................................... 331
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Table of Contents
xii
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List of Figures
xiii
List of Figures
Figure 1: The Front Panel of the 146 Instrument.................................................................... 21
Figure 2: Preferred Method.................................................................................................... 26
Figure 3: Alternate Method To Use When Cable Clamp is Not Available.............................. 26
Figure 4: Rear Panel of the 146 Unit ..................................................................................... 27
Figure 5: Model Code ...........................................................................................................28
Figure 6: Front Panel Dimensions ......................................................................................... 31
Figure 7: Top Dimensions..................................................................................................... 31
Figure 8: Side Dimensions .................................................................................................... 32
Figure 9: Opening the Type 146 Unit .................................................................................... 34
Figure 10: Fastening Screw Positions.................................................................................... 35
Figure 11: Front Panel of the Type 146 Instrument................................................................ 39
Figure 12: Full LCD Display................................................................................................. 43
Figure 13: Explanation of the Front Panel Display................................................................. 44
Figure 14: Labels on the 146 Unit ......................................................................................... 46
Figure 15: Dual Pirani Board Connectors .............................................................................. 52
Figure 16: Jumper Placement on the Pirani/Convection Board............................................... 52
Figure 17: Jumper Placement on the Hot Cathode Board....................................................... 58
Figure 18: Top Fastening Screw on the Dual Thermocouple Board........................................ 61
Figure 19: Jumper Placement on the Thermocouple Board .................................................... 61
Figure 20: Jumper Placement on the Control Board............................................................... 72
Figure 21: Sample Display for Each Mode............................................................................ 78
Figure 22: Relay B during an Alarm Condition, when configured as a Deactuated Relay....... 86
Figure 23: Relay B during an Alarm Condition, when configured as an Actuated Relay........ 87
Figure 24: The Front of a Displayless 146 Unit ..................................................................... 98
Figure 25: Normal Mode Display.......................................................................................... 101
Figure 26: Software Version Number in Normal Mode.......................................................... 103
Figure 27: Dual Channel Display in Normal Mode................................................................ 105
Figure 28: Zeroing a Sensor ..................................................................................................108
Figure 29: Spanning a Pirani-Type Sensor............................................................................. 113
Figure 30: Spanning a Sensor with a Reference..................................................................... 115
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List of Figures
xiv
Figure 31: Graph Showing Analog Set Point Defaults............................................................118
Figure 32: Adjusting Lower and Upper Points for Analog Set Point Calculations ..................119
Figure 33: Leakage Mode ......................................................................................................125
Figure 34: Software Version Number in Leakage Mode.........................................................128
Figure 35: Dual Channel Display in Leakage Mode ...............................................................130
Figure 36: Zeroing a Sensor...................................................................................................133
Figure 37: Spanning a Sensor.................................................................................................138
Figure 38: Spanning a Sensor with a Reference......................................................................140
Figure 39: Graph Showing Analog Set Point Defaults............................................................143
Figure 40: Adjusting the Lower and Upper Points for the Analog Set Point Calculations.......144
Figure 41: Tuning Mode - Original Display...........................................................................152
Figure 42: The SET POINT legend displayed in Tuning Mode..............................................153
Figure 43: The Two Levels within Tuning Mode...................................................................158
Figure 44: Deviation Indicator...............................................................................................160
Figure 45: Tuning Mode Display when Adjusting the Valve Position ....................................162
Figure 46: Adjusting the Base Valve Position........................................................................164
Figure 47: Adjusting the Start Valve Position........................................................................166
Figure 48: Adjusting the Integral Value .................................................................................168
Figure 49: Adjusting the Preset Valve Position......................................................................170
Figure 50: Adjusting the Gain Value......................................................................................174
Figure 51: Adjusting the Lead Value......................................................................................176
Figure 52: Adjusting the Set Point Value...............................................................................178
Figure 53: Setup Mode ..........................................................................................................181
Figure 54: Display for Setting Alarm Trip Points...................................................................188
Figure 55: Sensor Codes for Sensor Calibration.....................................................................191
Figure 56: Sensor Calibration for Capacitance Manometers ...................................................192
Figure 57: Calibration for Pirani and Convection Gauges.......................................................194
Figure 58: Sensor Calibration for Cold Cathode Gauges ........................................................196
Figure 59: Sensor Calibration for Hot Cathode Gauges..........................................................198
Figure 60: Sensor Calibration for Mass Flow Controllers.......................................................200
Figure 61: Sensor Calibration for Thermocouples ..................................................................202
Figure 62: Setting Up Dual Channel Displays........................................................................204
Figure 63: Display for Configuring an Analog Output............................................................208
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List of Figures
xv
Figure 64: Linear: Voltage versus Pressure............................................................................ 209
Figure 65: Linear and Logarithmic: Voltage versus Pressure ................................................. 209
Figure 66: Code 1 Display..................................................................................................... 212
Figure 67: Code 2 Display..................................................................................................... 215
Figure 68: Code 3 Display..................................................................................................... 216
Figure 69: Code 4 Display..................................................................................................... 218
Figure 70: Code 5 Display..................................................................................................... 220
Figure 71: Code 7 Display..................................................................................................... 222
Figure 72: Code 8 Display..................................................................................................... 224
Figure 73: Code 10x Display................................................................................................. 226
Figure 74: Code 11x Display................................................................................................. 228
Figure 75: Code 12x Display................................................................................................. 230
Figure 76: Code 13x Display................................................................................................. 232
Figure 77: Code 14x Display................................................................................................. 234
Figure 78: Code 15x Display................................................................................................. 236
Figure 79: Graph Showing Analog Set Point Defaults........................................................... 237
Figure 80: Code 16x Display................................................................................................. 239
Figure 81: Code 17x Display................................................................................................. 241
Figure 82: Code 18x Display................................................................................................. 245
Figure 83: Control Mode Screen............................................................................................ 248
Figure 84: Deviation Indicator............................................................................................... 249
Figure 85: Initial Diagnostics Screen Display........................................................................ 291
Figure 86: PASS Test Result Display from RAM Self-Test................................................... 292
Figure 87: The Keypad Test Result for the [+/-] Key......................................................... 295
Figure 88: The Keypad Test Result for the [QUIET/CANCEL] Key....................................... 295
Figure 89: Rear Panel Output Test Display When all Bits are High ....................................... 296
Figure 90: Analog Output Test Display................................................................................. 298
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List of Figures
xvi
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List of Tables
xvii
List of Tables
Table 1: Definition of Symbols Found on the Unit .....................................................................2
Tabelle 2: Definitionen der am Gerät angebrachten Symbole......................................................6
Tableau 3: Définition des symboles apparaissant sur l'appareil .................................................10
Tabla 4: Definición de los símbolos que aparecen en la unidad.................................................14
Table 5: Key Color Codes........................................................................................................40
Table 6: Description of the Front Panel Keys............................................................................41
Table 7: Standard Front Panel Messages...................................................................................45
Table 8: Capacitance Manometer Pinout...................................................................................48
Table 9: MKS Capacitance Manometers and Cables.................................................................49
Table 10: Pirani/Convection Connector Pinout.........................................................................50
Table 11: Pirani Sensors and Cables.........................................................................................50
Table 12: Cold Cathode Connector Pinout................................................................................54
Table 13: Cold Cathode Sensors and Cables.............................................................................54
Table 14: Hot Cathode Coaxial Connector Pinout.....................................................................55
Table 15: Hot Cathode Sensors and Cables...............................................................................55
Table 16: Hot Cathode Type “D”Connector Pinout..................................................................56
Table 17: Thermocouple Connector Pinout...............................................................................59
Table 18: Cabling Information for the Thermocouple Board.....................................................59
Table 19: Mass Flow Controller Connector Pinout...................................................................63
Table 20: Mass Flow Controllers and Cables............................................................................64
Table 21: General I/O Connector Pinout...................................................................................65
Table 22: Relay Output (Top) Connector Pinout.......................................................................67
Table 23: Status/Analog Output (Bottom) Connector Pinout ....................................................67
Table 24: Control Valve (Top) Connector Pinout .....................................................................69
Table 25: Control Interface (Bottom) Connector Pinout............................................................70
Table 26: Control Board Pin Jumpers.......................................................................................70
Table 27: Control Valves and Cables........................................................................................71
Table 28: Flow Controllers and Cables.....................................................................................71
Table 29: Remote Front Panel Cables.......................................................................................74
Table 30: Front Panel Connector Pinout on the Displayless 146 Unit .......................................75
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