
©Newport Corporation MKS Spectra-Physics Confidential 2of 29
Table of Contents
Introduction...................................................................................................................................................3
When Your System Arrives..........................................................................................................................4
Pre-Installation Considerations.....................................................................................................................5
Environmental Specifications...................................................................................................................5
Utility Requirements.................................................................................................................................5
Utility Requirements (Cont’d)..................................................................................................................6
Outline Drawings..........................................................................................................................................7
Laser Head................................................................................................................................................7
Outline Drawings (Cont’d)...........................................................................................................................8
Laser Head (Cont’d) .................................................................................................................................8
Outline Drawings (Cont’d)...........................................................................................................................9
Power Supply............................................................................................................................................9
Outline Drawings (Cont’d) .........................................................................................................................10
Chiller Drawings.....................................................................................................................................10
Heat Dissipation Requirements...................................................................................................................11
Air Flow Requirements...............................................................................................................................11
Computer Requirements .............................................................................................................................12
Interface Requirements...............................................................................................................................12
Computer Requirements (Cont’d)...............................................................................................................13
Baud Rate Default.......................................................................................................................................14
Inspecting and Unpacking...........................................................................................................................14
Accessory Kit Parts List..............................................................................................................................15
Tooling Requirements.................................................................................................................................15
Lifting and Moving the Laser .....................................................................................................................16
Unpacking the Laser System.......................................................................................................................17
Unpacking the Power Supply/Accessory Kit Crate....................................................................................17
Unpacking the Power Supply/Accessory Kit Crate (Cont’d) .....................................................................18
Unpacking the Power Supply......................................................................................................................19
Unpacking the Power Supply (Cont’d).......................................................................................................20
Unpacking the Laser Head..........................................................................................................................21
Unpacking the Laser Head (Cont’d)...........................................................................................................22
Unpacking the Laser Head (Cont’d)...........................................................................................................23
Unpacking the Optional Chiller..................................................................................................................24
Packing the Laser System for Transportation or Return to Spectra-Physics ..............................................25
Indexing and Multiple Mounting Schemes.................................................................................................25
Primary (Recommended) Installation Options for Bench Testing..............................................................25
Additional Installation Options...................................................................................................................26
Possible Minor Modification (can easily be implemented) ....................................................................26
Mounting Requirements for the Power Supply...........................................................................................26
Installation Requirements for the Chiller....................................................................................................27
General Information................................................................................................................................27
Interconnect Diagram..................................................................................................................................28
Required Maintenance:...............................................................................................................................29