MKS Spectra Vision 2000-P User manual

MKS Instruments UK Ltd
V2000-P Hardware Manual –SP102006.103 March 2013
1
Vision 2000-P
Manual
SP102006.103
March 2013

MKS Instruments UK Ltd
V2000-P Hardware Manual –SP102006.103 March 2013
2
As part of our continuous product improvement policy, we are always pleased to receive your comments and
suggestions about how we should develop our product range. We believe that the manual is an important part of
the product and would welcome your feedback particularly relating to any omissions or inaccuracies you may
discover.
This equipment is manufactured by:
MKS Instruments UK Ltd. –Spectra Products
3 –4 Cowley Way
Crewe
Cheshire
CW1 6AG
United Kingdom
Tel: [phone]
You can obtain UK support for this product from the following location:
MKS Instruments UK Ltd. –Spectra Products
3 –4 Cowley Way
Crewe
Cheshire
CW1 6AG
United Kingdom
Tel: [phone]
In the USA:
MKS Instruments, Spectra™ Products
70 Rio Robles Drive
San Jose
CA 95134
Toll Free: 800-428-9401
Tel: [phone]
Or to find a local agent, please visit:
http://www.mksinst.com/service/servicehome.aspx
MKS Products provided subject to the US Export Regulations.
Diversion or transfer contrary to U.S. law is prohibited.
Windows is a registered trademark of the Microsoft Corporation and is fully recognised.
Swagelok is a registered trademark of the Swagelok Company and is fully recognised.

MKS Instruments UK Ltd
V2000-P Hardware Manual –SP102006.103 March 2013
3

MKS Instruments UK Ltd
V2000-P Hardware Manual –SP102006.103 March 2013
4
AdditionalInstallationMaintenanceandOperatingInstructions
In order to comply with European regulations, the following procedures must be followed:
Installation
The installation procedures given in the operating and technical manuals must be followed, in addition to these
instructions:
The mains power cable must conform to local regulations and must have a protective earth (PE)
conductor securely connected to the power plug protective earth contact.
Only cables supplied with the equipment may be used for interconnections. If extension cables are
required to obtain a greater separation between control unit and RF head, or if longer serial
communications cables are required, they must be supplied by MKS Instruments UK Ltd.
Cables attached to all other ancillary signal and control ports must have a length of less than 3 metres. If
greater length is required, MKS Instruments UK Ltd must be contacted for technical guidance on
possible EMC and safety issues.
The vacuum system on which the analyser/RF head is mounted must be earthed, to a protective earth,
preferably to the same protective earth as the control unit.
Operation
The equipment is not authorised for use as a critical component in a life support or safety critical system without
the express written approval of MKS Instruments UK Ltd.
All instructions given in the operating manual must be followed.
Adjustments are strictly limited to those accessible from the control panel and computer keyboard and only when
running software supplied by MKS Instruments UK Ltd.
Maintenance
WARNING-DANGEROUS VOLTAGES EXIST INSIDE THE
EQUIPMENT
Maintenance functions must only be carried out by competent persons.
During the warranty period, faulty equipment must be returned to MKS Instruments UK Ltd., unless special
arrangements are made.
There are no user replaceable parts in the electronic equipment. Certain components are EMC and safety critical
and must not be substituted. Replacement parts are available from MKS Instruments UK Ltd.
Equipment enclosures embody certain special fastening and bonding devices that affect EMC and safety
performance. These must be correctly re-fitted after servicing.

MKS Instruments UK Ltd
V2000-P Hardware Manual –SP102006.103 March 2013
5
Table of Contents
AdditionalInstallationMaintenanceandOperatingInstructions..................................................................3
Installation....................................................................................................................4
Operation................................................................................................................... 4
Maintenance..............................................................................................................4
Table of Contents.........................................................................................................5
Health & Safety............................................................................................................6
Warning Symbols .......................................................................................................7
Fuses ..........................................................................................................................7
Electrical Connections................................................................................................7
Installation...................................................................................................................8
Initial checks ..............................................................................................................8
Dimensions ................................................................................................................9
System Components ................................................................................................10
Vacuum system installation .....................................................................................11
RGA vacuum chamber overview ......................................................................11
Main chamber installation ...............................................................................12
Connecting the backing pump .........................................................................12
Heater jacket....................................................................................................12
Microvision 2 installation................................................................................. 12
Electrical installation................................................................................................ 13
Electrical specification .....................................................................................13
Equipment rack................................................................................................13
Interconnecting cables.....................................................................................13
Mains power ....................................................................................................13
RCV Connections.............................................................................................. 14
System Box Connections..................................................................................14
Connecting to the process tool (VacOK) ..................................................................15
PC Connection.......................................................................................................... 15
Operation................................................................................................................. 16
Overview..........................................................................................................16
Start up ............................................................................................................ 17
Leak checking...................................................................................................18
Heating and Baking ..........................................................................................19
System shut down procedure ..........................................................................20
Maintenance..............................................................................................................21
Operating pressure ..........................................................................................21
Accessing the orifice disk .................................................................................21
Refitting the inlet flange ..................................................................................21
Replacing the orifice ................................................................................................ 22
Orifice Disk Tools ............................................................................................. 22
Fitting the Tool Guide ......................................................................................23
Removing the Orifice Disk................................................................................ 23
Fitting a new Orifice Disk .................................................................................24
Re-assembling the Inlet Flange ........................................................................25
Vision 2000-P electronics.................................................................................26
Diaphragm pump maintenance .......................................................................27
Turbo pump maintenance ...............................................................................27
Mass spec maintenance...........................................................................................28
Removing the analyser..................................................................................... 28
Re-fitting the analyser...................................................................................... 28
Returning Your Equipment ......................................................................................29
Support Contact Numbers ............................................................................... 29
Health and safety clearance form ....................................................................29

MKS Instruments UK Ltd
V2000-P Hardware Manual –SP102006.103 March 2013
6
Health & Safety
WARNING
This section of the manual contains important safety information.
Please read it carefully.
Important safety information is highlighted by the use of WARNING and CAUTION boxes. The use of these
boxes is described below:
WARNING
WARNING boxes are used where failure to observe the instructions
could result in personal injury or death.
CAUTION
CAUTION boxes are used where failure to observe the instructions
could result in damage to the equipment or associated equipment.
Instructions in CAUTION and WARNING boxes MUST be observed.
MKS Instruments accepts no liability for any injury or damage resulting from a failure to observe instructions in
CAUTION or WARNING boxes.

MKS Instruments UK Ltd
V2000-P Hardware Manual –SP102006.103 March 2013
7
Warning Symbols
Various warning labels and symbols may be attached to the instrument their general use is explained below.
Warning!
Danger of an electric shock.
Warning!
Danger of personal injury or damage to the unit. Refer
to manual for instruction
Warning!
Hot surface.
PE (Protective Earth)
All equipment external to the RVC must be earthed at
this point.
Fuses
The Vision 2000-P systems must be powered down and disconnected from the mains supply before changing
any fuses.
See the RVC2 User Manual for the fuse locations and values.
Electrical Connections
The Vision 2000-P must be powered down and isolated from the mains power supply before any electrical
connections are made.
On the rear panel of the Microvision2 there are no hazardous voltages on any of the ports (electrical connectors).
Connections must not be made that may place hazardous voltages or currents on these ports. MKS Instruments
must be consulted before any non-MKS Instruments cables or accessories are connected to these ports. Consult
the relevant manual for detailed descriptions of these connectors.
If you are unclear about any of the safety information contained in this section of the manual please contact your
local MKS Instruments facility before proceeding.

MKS Instruments UK Ltd
V2000-P Hardware Manual –SP102006.103 March 2013
8
Installation
The Vision 2000-P is a self contained RGA system for sampling directly from PVD process chambers. It consists
of four main parts:
The RGA vacuum chamber that bolts directly on to the process chamber.
The equipment sub-rack housing an RVC2 Vacuum Controller
The interconnecting cables.
The operating PC.
The RGA vacuum chamber contains the quadrupole residual gas analyser with a differentially pumped PVD
source, a high conductance isolating valve, a turbomolecular pump, and the sampling orifice interface with
optional pressure reduction. This assembly is surrounded by an electrical heating jacket. A bracket fitted to the
turbo pump acts as a securing point for the cable trunking.
The backing pump is a dry diaphragm pump and a stainless steel foreline connects it to the turbo pump.
A 19inch sub rack houses the Remote Vacuum Controller (RVC2) and cables running between the sub rack and
the RGA vacuum chamber are fitted into trunking to give additional protection.
CAUTION
There may be minor differences between one Vision 2000-P
system and another.
There are small differences between Vision 2000-P systems, these variations are usually due to the type of
process tool to which the Vision 2000-P is to be fitted, the type of process to be monitored and the pressure
regime from which the system will be sampling.
The design variations are purely to give the user the best possible system to meet the needs of the application.
This manual covers all variations of Vision 2000-P. The shipment report will detail your particular system and you
should refer to this when the manual gives details of options.
Initial checks
When you receive the equipment carefully check each item before removing the packaging to ensure that no
physical damage has occurred during shipment. Also check that all the boxes have been received by checking
against the packing slip.
If there has been obvious damage during shipment or if there are items listed on the packing slip as shipped
which have not arrived, immediately contact your local MKS Spectra facility or sales/service representative.
Carefully unpack the various parts of your Vision 2000-P system. Again, check for any signs of damage.
Find the shipment report and check for any missing items. Keep the shipment report safe, this is an important
document and you will need to refer to it later.
We suggest you keep the packaging material until the system is up and running as this seems to dramatically
reduce the chances of something needing to be returned!
Most insurance claims for shipment damage must be placed within 7 days from the date of delivery - in
WRITING. So, don’t delay Check It Out!
You are now ready to assembly the Vision 2000-P system.

MKS Instruments UK Ltd
V2000-P Hardware Manual –SP102006.103 March 2013
9
Dimensions
562mm
225mm
290mm
179mm

MKS Instruments UK Ltd
V2000-P Hardware Manual –SP102006.103 March 2013
10
System Components
Item Ref
Description
1
RGA Chamber
2
Chamber Mounting Flange
3
Isolation Valve
4
System Interface Module (LM108)
5
Turbo Molecular Pump
6
Foreline Port
1
2
3
4
5
6

MKS Instruments UK Ltd
V2000-P Hardware Manual –SP102006.103 March 2013
11
Vacuum system installation
CAUTION
The vacuum system interface components are of high precision
and should only be fitted by competent personnel.
RGA vacuum chamber overview
The Vision 2000-P is supplied with the RGA vacuum chamber already assembled; the quadrupole analyser is
fitted into the chamber, the turbomolecular pump is also fitted as is the Electro pneumatic isolation valve. This
isolation valve we refer to as the process valve and is controlled by the RVC2.
The flange of the right-angled valve contains the orifice disk holder which provides a relatively high degree of
pressure reduction between the process chamber and the RGA sampling chamber along with the fixing for the
PVD ceramic source coupling.
Please refer to the shipment report for details of the inlet pressure reduction.
It is possible to change the orifice disk which may be desirable if at a future time the Vision 2000-P is moved to
another process tool or the process being monitored changes. Changing the orifice is detailed later in this
manual but it is important to consult your local MKS Spectra facility before making any changes.
Warning, exposed metal surfaces reach high temperatures during bake-out. Allow an adequate
cooling down period before handling

MKS Instruments UK Ltd
V2000-P Hardware Manual –SP102006.103 March 2013
12
Main chamber installation
This is a job that requires two people; one to support the Vision 2000-P system while the other fits the bolts to
the flange.
Fit the assembly to the process chamber using a clean CF35 copper gasket. The Vision 2000-P can be mounted
with the RGA sampling chamber horizontal, and the turbo pump hanging down vertically, or mounted with the
sampling chamber vertical. In this orientation, the foreline port of the turbo pump MUST be vertical and facing
down.
Tighten the six M6 nuts making sure that the gasket has not moved out of place.
Connecting the backing pump
Position the diaphragm pump close to the Vision 2000-P RGA vacuum chamber and connect the stainless steel
foreline to the turbo pump using a KF16 centring O-ring and clamp.
Connect the other end of the foreline to the diaphragm pump by using a KF16 centring O-ring and clamp.
Heater jacket
The Vision 2000-P is supplied with the heater jacket fitted. There is no need to remove the heater jacket during
the installation and testing procedure. The heater jacket enables the quadrupole chamber to be baked which
should be done before you start to acquire good data.
Microvision 2 installation
Rotate the locking ring on the RF/analyser connector so that the slot lines up with the keyway on the connector
tube. Hold the Microvision 2 unit so that the keyway lines up with the locating key on the analyser flange.
Gently slide the Microvision 2 unit on to the analyser. TAKE GREAT CARE the pins on the vacuum feedthrough
are easily damaged. DO NOT force the Microvision 2 unit on to the analyser.
When all of the pins are engaged, push the Microvision 2 firmly onto the analyser to ensure electrical continuity.
The last 3mm (1/8”) is important. When correctly fitted the front face of the RF/analyser connector should butt up
against the analyser flange.
Finally, pinch up the cap head bolt on the locking ring to secure the Microvision 2 in place.

MKS Instruments UK Ltd
V2000-P Hardware Manual –SP102006.103 March 2013
13
Electrical installation
WARNING
The electrical installation must be carried out by qualified
personnel in accordance with local standards and regulations.
The electrical installation should be carried out after the vacuum system installation. Please follow the next
sections, in sequence.
Electrical specification
See the RVC2 and Microvision2 User Manuals for specifications
WARNING
This appliance must be earthed
Equipment rack
The Remote Vacuum Controller (RVC2) is fitted into a 19 inch sub-rack. The sub-rack should be fitted into a 19
inch equipment rack using four M6 screws, plastic cup washers and cage nuts.
Interconnecting cables
All the cables which run between the equipment rack and the RGA vacuum chamber are fitted into plastic
trunking which provides a good degree of protection. The trunking complete with cables will be supplied
completely disconnected. All the cables have been marked at both ends and have been chosen to minimise the
risk of making a wrong connection. The table below gives cable functions and cable destination.
Mains power
There is a single mains power connection to the Vision 2000-P which is made to the RVC2. Connect the mains
power cable to a suitable single-phase supply:
See the RVC2 User Manual for specifications

MKS Instruments UK Ltd
V2000-P Hardware Manual –SP102006.103 March 2013
14
RCV Connections
Interface Module Connections
RVC (Rack) End
Destination / Notes
System 1
Main wiring loom
System 2
Main wiring loom to Interface Module (System Box)
System 3
Main wiring loom to Interface Module (System Box)
Turbo Pump
Turbo pump control module
ECU Power
Microvision2 - Power
Digital IO
Microvision2 –Digital IO
Backing Pump
Backing pump power connection
IEC Mains Connector
Local mains supply (see Specifications)
System Box
Destination / Notes
System 1
VacOK Connection
System 2
RVC
System 3
RVC
Diagnostics
Not used

MKS Instruments UK Ltd
V2000-P Hardware Manual –SP102006.103 March 2013
15
Connecting to the process tool (VacOK)
There is one connection to be made between the Vision 2000-P system and the process tool. This is a 3 meter
cable labelled “VacOK” fitted at one end with a 15-way Male D-type connector and terminated with a 2-pin
connection block labelled “VacOK”.
When supplied, the connection block is fitted with a shorting link between the two pins. This must be removed
and an appropriate termination made, see below:
Failure to utilise this interlock may result in the RGA being exposed to tool pressures outside its working
range which could severely damage the RGA.
This is a control signal which must come from the process tool to indicate that the pressure is low enough to
open the process valve on the Vision 2000-P. The precise value will depend on the configuration of the Vision
2000-P inlet, please refer to the shipment report for the maximum process pressure.
The Vision 2000-P has been configured to connect to a no-volts relay contact, when the contact is closed the
pressure is OK.
PC Connection
Vision 2000-P systems are used in conjunction with MKS Instruments Process Eye Professional software
running on a PC. If a PC has been supplied as part of the system, the software will have been installed onto the
hard drive and will have been fully tested as part of the complete system.
There is one Ethernet connector at the rack-end of the loom into which you should connect, via an STP patch
lead to the Ethernet Port of the host PC.
The PC, its monitor and any accessories (e.g., printer) will need their own mains power supply connection.
These are not provided directly from the Vision P system.
If you are supplying your own PC, install Process Eye Professional by following the instructions in the relevant
manual(s).
You are now ready to power up the system. Please read the next section of this manual before you do.

MKS Instruments UK Ltd
V2000-P Hardware Manual –SP102006.103 March 2013
16
Operation
Overview
This section gives an overview of the Vision 2000-P system operation.
The Microvision2 control unit receives power from the RVC2. The power switch on the RVC2 must be ON to
operate the system. When it is started, the Microvision2 senses the presence of the vacuum system controller
(RVC2) and interlocks its operation to it.
Process Eye Professional is started from the PC by an icon on the desktop. The vacuum system must be
started-up using this application program before the RGA filament can be turned on. However, to facilitate
bringing-up an installation quickly, the turbopump may be started and Bakeout initiated, directly from the RVC2
panel, without use of the computer software.
The operation of the vacuum system controller is fully described in the Remote Vacuum Controller manual.
The pumps are switched on from the Remote Vacuum Controller window or from the RVC2 and the sequence of
events is as follows:
The turbopump will start and begin to accelerate.
When the turbo reaches 95% of full speed, the RVC2 indicates Pump Up to Speed.
At this point the RGA filament may be switched on and the background spectra in the RGA chamber
may be observed.
Before a process sampling valve can be opened, the corresponding “VacOK” signal from the tool must be met.
A process valve can be opened either manually or automatically from the Process Eye Professional software
interface to the RVC2.

MKS Instruments UK Ltd
V2000-P Hardware Manual –SP102006.103 March 2013
17
CAUTION
Check the complete installation thoroughly before proceeding.
Start up
Set the Remote Vacuum Controller (RVC) “Interlocks” key switch to ON and the power switch to On (I)
On your PC, start Process Eye Professional. The software will detect that the RVC2 is fitted and the Remote
Vacuum Controller status and control panel will be available at the bottom of the Process Eye Professional
window.
To start the Vision 2000 P vacuum system, click on the turbopump button.
The colour of the button indicates the status:
Red = off
Yellow = starting
Green = running at full speed
More information about the RVC operating software can be found in the manuals for the RVC2 and Process Eye
Professional.
The Vision 2000 P may also be started from the RVC2 directly. This is useful if the PC is disconnected or the
Process Eye software is not running. To start the system from the RVC2, briefly press the PUMPS switch on the
front panel. Note that this control can also be used to turn the turbopump OFF.
The turbo pump controller will indicate when the pump is up to speed and the Turbopump indicator in the RVC
window will change from yellow to green. Note that the turbopump controller will be programmed to a set-point
of 95% of rated speed.
After the turbopump has reached full speed, you may switch the RGA filament on, but we recommend waiting at
least 10 minutes after the adsorbed gas load in the RGA vacuum chamber to reduce before switching a filament
on.
Switch the RGA filament on and look at the RGA chamber background spectrum using a Process Eye
Professional Bar-Chart recipe (refer to the Process Eye Professional documentation for further details).
The pressure is likely to be quite high but should be falling. If the pressure is very high switch the filament off and
wait a little while for the pressure to fall.
Now, check that the process valves function correctly. Ensure that there is a good vacuum in the process
chamber. The pressure in the process chamber must be below the corresponding sample-valve pressure set-
point to permit you to open a sampling valve.
With the Remote Vacuum Controller in the manual mode and a filament on, open the process valve. The process
valve will open and you will be able to see a spectrum of the process chamber.
Once you have established that the process valve is working correctly, close the valve. Minimizing exposure to
corrosive process gases when not actively monitoring them will protect RGA system operating life.

MKS Instruments UK Ltd
V2000-P Hardware Manual –SP102006.103 March 2013
18
Leak checking
At this point you will have assembled the system, checked that it is working and you that you can see a
background spectrum. The next thing to do is to leak check the Vision 2000-P.
The vacuum system used in the Vision 2000-P was fully leak checked as part of the assembly and test
procedure before it left the factory. You need to leak check in case any leaks have occurred due to shipping
damage and to check the one seal you have made between the Vision 2000-P and the process chamber.
Ensure that the process valve is closed.
To leak check you will need a cylinder of helium fitted with a regulator and a length of flexible hose to spray
helium around the Vision 2000-P. You can use a different tracer gas (other than oxygen and nitrogen) as long as
it is safe and you modify the mass being monitored in the leak-hunting recipe accordingly. Helium is preferred,
and any grade will do.
Run a Leak Hunt recipe in Process Eye and check that the probe gas is set to mass 4 for helium (or the
appropriate mass, if you are using another gas).
As the Vision 2000-P uses a Microvision2 there can be an audio tone available via headphones or powered
speaker if enabled in the recipe. Alternatively, position the monitor so that you can see the screen while you are
leak-checking. Please consult the Microvision2 manual for details of the audio output.
Starting at the top of the Vision 2000-P vacuum system slowly and carefully spray helium over the entire system
paying particular attention to the vacuum seals. Watch the monitor or listen to the audio tone for a signal
indicating a leak.
Once the RGA vacuum chamber is leak-tight, check the part of the Vision 2000-P between the process valve
and the process chamber.
Open the process valve and spray helium over the valve, the seal to the process chamber and the connecting
pipe work.
If you do find a leak shut down the system, fix the leak and start again.
Remember you may need to break the seal between the Vision 2000-P and the process chamber in which case
you will also have to shut down the process chamber.

MKS Instruments UK Ltd
V2000-P Hardware Manual –SP102006.103 March 2013
19
Heating and Baking
Warning, exposed metal surfaces reach high
temperatures during bake-out.
Allow an adequate cooling down period before
handling
The heater circuit maintains normal running temperatures of 25°C on the RGA sampling chamber and 50°C at
the inlet, in Bake mode, these temperatures rise to 180°C and 150°C respectively.
Preset, limited power is applied to these heater jackets any time the turbopump is on. This improves gas
response time by reducing the residence time of gases on the walls, especially polar species. From the time of
starting the turbopump, allow at least 2 hours for temperature equilibration. During this time, background gas
levels will vary, significantly.
Before you can start to use the system to its full potential, you will need to run it for sufficient time to allow the
background in the RGA vacuum chamber to drop.
Baking the system will significantly reduce this time. This should be done after the system has run for at least an
hour to allow the pressure in the system to drop below 1x10-5 mBar. We recommend baking the RGA vacuum
chamber for at least 20 hours.
Optimum bake-out is achieved by having the inlet valve open with the process chamber at the normal operating
pressure of very clean and dry inert gas, or by having all inlet valves closed.
The quadrupole should be running with the filament on, but MUST be using the faraday detector.
DO NOT use the multiplier detector during baking!
DO NOT use the electron multiplier detector within the first two hours after terminating baking!
CAUTION
The Electron Multiplier (SEM) MUST NOT be operated at
temperatures above 90oC. Do NOT bake with the SEM selected.
After baking ends, wait at least 2 hours before using the SEM!
The electron multiplier will be seriously damaged if it is operated at temperatures above 900C!
No damage is caused to the multiplier by high temperatures provided it is not switched on.
The only remedy when a multiplier has been damaged due to being operated at higher temperatures is to
replace it.
Baking can be started (and stopped) directly at the RVC2 with the BAKE button. It can also be controlled
through the RVC status and control panel of Process Eye Professional.
The total pressure should gradually start to rise and you should bake the system at least until that pressure starts
to drop.
It is useful to create timed bakeout recipes to run with the Faraday detector and turn the bake Off after a preset
time so the system can cool down unattended. The default Bake period is 8 hours.
To improve the background further it is recommended that you run and degas both filaments. The amount of
time spent in reducing the background peaks depends entirely on the application and is left to the discretion of
the customer. If you switch the system off it will vent to atmosphere introducing water vapour and you will have to
bake again. Venting to clean dry nitrogen or argon is strongly recommended.

MKS Instruments UK Ltd
V2000-P Hardware Manual –SP102006.103 March 2013
20
System shut down procedure
It is important to follow the procedure outlined below to shut down and switch off the Vision 2000-P system.
1. Switch off the RGA filament and wait for 15 minutes for the filament to cool down.
2. Switch off the turbo pump from the RVC2 Window within Process Eye Professional, or by pressing the
PUMPS switch on the RVC2.
3. Switch off the RVC2.
4. Allow the turbopump to come to a complete stop