Pfeiffer Vacuum TC 400 PB User manual

Translation of the original instructions
Operating Instructions
EN
PT 0244 BEN/I (1106)
TC 400 PB
PM C01 840
D-35614 Asslar
00
22
4
66
88
10
B
A
Profibus
address
remote
accessory
PV.can
x10 x1
4
12
TC 400 PB
Electronic Drive Unit

2
Table of contents
Table of contents
1 About this manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1 Validity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2 Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
2.1 Safety precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
2.2 Proper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.3 Improper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.4 Functional safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
3 Product description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3.1 Product identification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3.2 Range of application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3.3 Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3.4 General connection description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
4 Connections diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
5 Connection "remote" . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
5.1 Pin assignment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
5.2 Operation via "remote" connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
6 Connection "Profibus" . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
6.1 Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .13
6.2 Configuring the connection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .13
6.3 Modules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .13
6.4 Expanded diagnostics data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .16
7 The Pfeiffer Vacuum parameter set . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
7.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .17
7.2 Parameter overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .17
7.3 Configuring the connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
7.4 Operation with the Pfeiffer Vacuum parameter set . . . . . . . . . . . . . . . . . 23
7.5 Switching on/off the pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
8 Pfeiffer Vacuum Protocol for "RS485" . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
8.1 Telegram frame . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
8.2 Telegrams . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
8.3 Applied data types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
9 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
9.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
9.2 Operating mode display via LED. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
9.3 Error codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
10 Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
Declaration of conformity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34

3
About this manual
1 About this manual
1.1 Validity
This operating manual is for customers of Pfeiffer Vacuum. It describes the func-
tioning of the designated product and provides the most important information for
safe use of the unit. The description follows applicable EU guidelines. All informa-
tion provided in this operating manual refer to the current state of the product's de-
velopment. The documentation remains valid as long as the customer does not
make any changes to the product.
Up-to-date operating instructions can also be downloaded from www.pfeiffer-vac-
uum.com.
1.2 Conventions
Safety instructions The safety instructions in Pfeiffer Vacuum operating manuals are the result of risk
evaluations and hazard analyses and are oriented on international certification
standards as specified by UL, CSA, ANSI Z-535, SEMI S1, ISO 3864 and DIN 4844.
In this document, the following hazard levels and information are considered:
Pictograph
definitions
Instructions in the
text
Work instruction: here you have to do something.
Abbreviations used DCU: Display and operating unit
HPU: Handheld programming unit
TC: Electronic drive unit for turbopump
TPS: Mains pack
DI / DO: Digital input / digital output
AI / AO: Analog input / analog output
f: Rotation speed (derivated from frequency in Hz)
[P:000]: Parameter of the electronic drive unit with number
CAUTION
Possible danger
Injuries or property damages can occur.
NOTE
Command or note
Command to perform an action or information about properties, the disregarding of
which may result in damage to the product.
Warning of a displayed source of danger in connection
with operation of the unit or equipment.
Command to perform an action or task associated with a
source of danger, the disregarding of which may result in
serious accidents.

4
Safety
2Safety
2.1 Safety precautions
•Power supply: The turbopump power supply must apply to the requirements of
double insulation between mains input voltage and operating voltage according
to the regulations of IEC 61010 and IEC 60950. Therefore Pfeiffer Vacuum recom-
mends to use exclusively original-power packs and -accessories. Only in this
case Pfeiffer Vacuum is able to guarantee the compliance of the European and
North American guidelines.
• Observe all safety and accident prevention regulations.
• A safe connection to the protective earthing conductor (PE) is recommended
(protection class III).
• Regularly check the proper observance off all safety measures.
• Before carrying out any work disconnect the unit and all associated installations
safely from the mains.
• Do not loosen any plug connection during operations.
• The unit has been accredited with protection class IP 54. When installing into
ambient conditions, which afford other protection classes, the necessary mea-
sures must be taken.
• The protection class IP 54 is only attained by correctly placed rubber stoppers
on the address selection switches.
• Keep leads and cables well away from hot surfaces (> 70 °C).
• Only separate the pump and the electronic drive unit from each other after dis-
connecting the supply voltage and the complete standstill of the pump.
NOTE
Duty to inform
Each person involved in the installation or operation of the unit must read and observe
the safety-related parts of these operating instuctions.
The operator is obligated to make operating personnel aware of dangers originating
from the unit or the entire system.
WARNING
Danger - Electrical installation
Safe operation after installation is the responsibility of the operator.
Do not independently modify or change the pump and electrical equipment.
Make sure that the system is integrated in an emergency off safety circuit.
Consult Pfeiffer Vacuum for special requirements.
WARNING
Danger of electric shock
In case of defect, the parts connected to the mains supply are under voltage.
Always keep the mains connection freely accessible so you can disconnect it at any
time.

5
Safety
2.2 Proper use
• The electronic drive unit TC 400 PB operates designated Pfeiffer Vacuum turbo-
pumps and their accessories in a bus system Profibus-DP.
2.3 Improper use
Improper use will cause all claims for liability and warranties to be forfeited. Im-
proper use is deemed to be all use for purposes deviating from those mentioned
above, especially:
• The use of accessories or spare parts, which are not named in this manual.
• The operation of the devices in potentially radioactive areas.
2.4 Functional safety
The drive unit (electronic drive unit) TC 400 PB performs the safety function "Safe
Limited Speed" according to EN 61800-5-2. In case of excess rotation speed the
commutation of the pump motor is switched off and the drive transferred into the
safe condition.
Summary of characteristic data for use in safety-relevant applications:
• During the expected device life span of up to 20 years no proof test is required.
• If the user calculates his safety application with the specified values for 20 years,
the safety control system must be taken out of operation after 20 years and re-
turned to the manufacturer. A proof test cannot be accomplished by the user.
NOTE
CE conformity
The manufacturer's declaration becomes invalid if the operator modifies the original
product or installs additional components!
Following installation into a plant and before commissioning, the operator must
check the entire system for compliance with the valid EU directives and reassess it
accordingly.
warranty seal
NOTE
Closure seal
The product is sealed at the factory. Damaging or removal of a closure seal leads to the
loss of liability and warranty entitlements.
Do not open the product within its warranty period!
For process-related shorter maintenance intervals please contact the Pfeiffer Vacu-
um Service.
Characteristics according to IEC 61508 and IEC 62061
Characteristic Safety Integrity Level PFH PFDav Proof Test Interval T
Value SIL CL 2 1.1 * 10-8 / h 1 * 10-3 20 a
Characteristics according to EN ISO 13849-1
Characteristic Performance Level Category MTTFdAverage Diagnostic Coverage DC
Value PL d Cat. 3 high (135 a) medium (90 % - <99 %)

6
Product description
3 Product description
3.1 Product identification
Product features The electronic drive unit TC 400 PB is an integrated component of the turbopump.
It's purpose is to drive, monitor and control the entire pump.
To correctly identify the product when communicating with Pfeiffer Vacuum, al-
ways have the information from the rating plate available.
Scope of delivery • CD-ROM for Profibus connection with GSD file
3.2 Range of application
Pfeiffer Vacuum electronic drive units TC 400 PB must be installed and operated in
the following ambient conditions.
3.3 Function
Characteristics TC 400 PB
Connection voltage TC 24 V DC ± 5 % 48 V DC ± 5 %
Connection panel Profibus Profibus
Turbopump HiPace 300, 400, 700, 800 300, 400, 700, 800
Installation location weather protected (indoors)
Protection category IP 54
Protection class III
Temperature +5 °C to +40 °C (up to +35 °C with air cooling)
Relative humidity max. 80 %, at T ≤31 °C, up to max. 50% at T ≤40 °C
Atmospheric pressure: 75 kPa - 106 kPa
Installation altitude 2000 m max.
Degree of pollution 2
Overvoltage category II
Fig. 1: Profibus panel for the TC 400 PB
a Mains connection "DC in"
b Connection "accessory A+B"
c Connection "remote"
d Service connection "PV.can"
f Connection "Profibus"
f1 Status LED
f2 Address selection switches
02
4
6
8
10
12
02
4
6
8
accessory
A
B
PV.can
remote
Profibus
DC in
address
x10 x1
b
d
b
cf2
f
f1a

7
Product description
3.4 General connection description
DC in
1
Casing plug with bayonet locking for the voltage supply between Pfeiffer Vac-
uum mains packs and the electronic drive unit TC.
1. "DC in" and "accessory" are already described in the operating instructions of the
turbopump.
Accessory
M12 socket with screw coupling for the connection of Pfeiffer Vacuum acces-
sories. The use of a Y-connector enables double assignment of one connec-
tion.
PV.can2
M12 casing socket with screw coupling and LED for Pfeiffer Vacuum Service
purposes.
2. The connection "PV.can" serves to service purposes exclusively.
remote
High Density D-sub 26 pole female socket for the connection of a remote con-
trol.
Profibus
M12 socket (B-coded) with screw coupling and LED for the connection of a
Profibus DP bus system.
Casing socket on the rear side of the electronic drive unit for the connection
to the turbopump.

8
Connections diagram
4 Connections diagram
Fig. 2: Connections diagram and assignment of the TC 400 PB
41
5
23
32
5
14
31
2
4
AC
B
19
10 18
1926
1
2
3
4
5
1
2
3
4
5
1
2
3
4
5
A
B
C
1
2
3
4
5
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
accessory A
accessory B
remote
DC inPV.canProfibus
+5VDC** out
RxD/TxD-N
RxD/TxD-P
n.c.
GND**
Potential free contacts
n.c.
24 VDC
Accessory B1
FE
Accessory B2
+ UB(+24 / +48 VDC ± 5 %)
FE
GND
n.c.
24 VDC
Accessory A1
FE
Accessory A2
+ 24 VDC* out
DI Motor pump
DI Pumping station
DI Standby
DI1
DI2
DO1
DO2
DI3
AI+ 0-10 VDC
AI- GND
DI Error acknowledgement
DI Remote priority
Relay 1
Relay 1
Relay 1
Relay 2
Relay 2
Relay 2
Relay 3
Relay 3
AO1 / 0-10 V
DO Remote priority active
RS485 D-
RS485 D+
GND*
All inputs and outputs
in this areaare
galvanically seperated
from +UB
Contact load for accessories:
-200 mA max., each connection
-450 mA max., all connections in sum

9
Connection "remote"
5 Connection "remote"
Remote control options are provided via the 26-pole D-Sub connector with the des-
ignation ”remote“ on the electronic drive unit.
Remove the remote plug from the TC 400 PB and connect a remote control unit.
Pin assignment of the connector according to table.
Shielded connectors and cables must be used.
The following information display the factory setting. Configuration is possible us-
ing the Pfeiffer Vacuum parameter set.
5.1 Pin assignment
5.2 Operation via "remote" connection
+24 V DC* Output /
Pin 1
Inputs 2 - 6 and the connections to Pins 10, 13, 14 are activated by connecting them
with +24 V DC to Pin 1 (active high). They can also be activated via an external PLC.
The functions are deactivated by "PLC high level" and by "PLC low level".
• PLC high level: +13 V to +33 V
• PLC low level: -33 V to +7 V
• Ri: 7 kΩ
•I
max
< 210 mA (with RS 485, if existing)
19
1018
1926
Pin Function Designation factory settings
1 +24 V DC output (V+) Reference voltage for all digital in- and outputs
2 DI1 Enable venting; open: no; V+: yes
3 DI Motor pump Drive motor; open: off; V+: on
4 DI Pumping station Open: off; V+: on and error acknowledgement
5 DI Standby Standby rotation speed; open: off; V+: on
6 DI2 Heating; open: off; V+: on
7 AI+ Rotation speed setting
mode
Set value in rotation speed setting mode;
2-10 V DC = 20-100% of the nominal rotation speed
8 DO1 Rotation speed switch point attained; GND:no;
V+: yes (Imax =50mA/24V)
9 DO2 GND: error; V+: no error (Imax = 50 mA/24 V)
10 DI3 Sealing gas; open: off; V+: on
11 AI- Rotation speed setting
mode GND
Set value in rotation speed setting mode; GND
12 AO1 Actual rotation speed; 0-10 V DC is equivalent to 0-100%;
RL> 10 kΩ
13 DI Error acknowledgement Error acknowledgement: V+ pulse (min 500 ms)
14 DI Remote priority Control via interface "remote"; open: off
V+: set and priority over other digital inputs
15 Relais 1 Connection to Pin 16 if relay 1 is inactive
16 Relais 1 Rotation speed switchpoint attained;
relay contact 1 (Umax = 50 V DC; Imax = 1 A)
17 Relais 1 Connection to Pin 16 if relay 1 is active
18 Relais 2 Connection to Pin 19 if relay 2 is inactive
19 Relais 2 No error; relay contact 2 (Umax = 50 V DC; Imax = 1 A)
20 Relais 2 Connection to Pin 19 if relay 2 is active
21 Relais 3 Connection to Pin 22 if relay 3 is inactive
22 Relais 3 Warning; relay contact 3 (Umax = 50 V DC; Imax = 1 A)
23 DO Remote priority GND: off; V+: remote priority active
24 RS485 D+ according to specifications and Pfeiffer Vacuum protocol
25 RS485 D- according to specifications and Pfeiffer Vacuum protocol
26 Ground (GND) Reference ground for all digital inputs and all outputs

10
Connection "remote"
Inputs The digital inputs at connection "remote" are used to connect various functions of
the electronic drive unit. Functions are assigned to the inputs DI1 - DI2 ex factory.
These are configurable by the Pfeiffer Vacuum parameter set via Profibus or the in-
terface RS485.
DI1 (Enable venting) / Pin 2
V+ : Venting is enabled (venting according to venting mode)
open: Venting locked (no venting is performed)
DI Motor pump / Pin 3
After Pin 4 (pumping station) is activated and the electronic drive unit successfully
completes the self-test (duration approx. 8 seconds), the turbopump is placed into
operation. During operation, the turbopump can be switched off and on again,
while the pumping station remains switched on. The turbopump is not vented
thereby.
V+ : Turbopump motor on
open: Turbopump motor off
DI Pumping station / Pin 4
Connected pumping station components (e.g. backing pump, venting valve, air
cooling unit) are triggered and, with Pin 3 (motor) simultaneously activated, the
turbopump is placed in operation. Any ongoing error messages are reset when
their cause has been eliminated.
V+ : Malfunction acknowledgement and pumping station on
open: Pumping station off
DI Standby / Pin 5
In standby mode, the turbopump operates at a specified rotor speed < nominal ro-
tation speed. Factory setting and recommended operation are 66.7 % of the nomi-
nal rotation speed.
V+ : Standby activated
open: Standby off, operation at nominal rotation speed
DI2 (Heating) / Pin 6
V+ : Heating on
open: Heating off
DI3 (Sealing gas) / Pin 10
V+ : Sealing gas valve open
open: Sealing gas valve closed
DI Error acknowledgement / Pin 13
V+ : Reset ongoing error messages when cause has been eliminated with a pulse
of min. 500 ms duration.
open: Inactive
DI Remote priority / Pin 14
V+ : The connection "remote" has operation priority over all other digital inputs.
open: Remote priority inactive

11
Connection "remote"
AI Rotation speed setting mode / Pin 7 and Pin 11
The analog input at the TC 400 PB defines the set rotation speed of the turbopump.
An input signal of 2 - 10 V between AI+ (Pin 7) and AI- (Pin 11) corresponds to a ro-
tation speed within the range of 20 - 100% of the nominal rotation speed. If the in-
put is open or signals fall below 2 V, the pump is accelerated up to nominal rotation
speed.
Outputs The digital outputs at the connection "remote" can be loaded with a maximum of
24 V / 50 mA per output. All outputs listed below are configurable by the Pfeiffer
Vacuum parameter set via Profibus or interface RS485 (description related to fac-
tory settings).
DO1 (Rotation speed switch point attained) / Pin 8
Active high after the rotation speed switch point is attained. Rotation speed switch
point 1 is factory-set to 80% of the nominal rotation speed. It can, for example, be
used for a "pump operational" message.
DO2 (No errors) / Pin 9
When the supply voltage has been established, digital output DO2 permanently
outputs 24 V DC which means "no errors". Active low in case of error (collective er-
ror message).
DO Remote priority active / Pin 23
Active high: The connection "remote" takes priority over any other connected con-
trol panels (e.g. RS485). With active low, the connection "remote" is ignored.
AO1 Analog output 0-10 V DC / Pin 12
A rotation-speed-proportional voltage (0-10 V DC equals 0 - 100 % x f
Nominal
) can
be picked up via the analog output (load R ≥10 kΩ). Additional functions (option-
ally current/power) can be assigned to the analog output via DCU, HPU or PC.
Relay contacts (in-
vertible)
Relay 1 / Pin 15, Pin 16 and Pin 17
The contact between Pin 16 and Pin 15 is closed when the rotation speed switch
point is underrun; relay 1 is inactive. The contact between Pin 16 and Pin 17 is
closed when the rotation speed switch point is attained; relay 1 is active.
Relay 2 / Pin 18, Pin 19 and Pin 20
The contact between Pin 19 and Pin 18 is closed when a malfunction is present; re-
lay 2 is inactive. The contact between Pin 19 and Pin 20 is closed when operation
is malfunction free; relay 2 is active.
Relay 3 / Pin 21 and Pin 22
The contact between Pin 21 and Pin 22 is closed when no warning messages are
active; relay 3 is inactive. The contact between Pin 21 and Pin 22 is open when a
warning message is present; relay 3 is active.
f(%)
100
20
210
U(V)

12
Connection "remote"
RS485 One Pfeiffer Vacuum display and control panel (DCU or HPU) or an external PC can
be connected respectively to the electronic drive unit via Pin 24 and Pin 25 of the
connection "remote" on the electronic drive unit.
• The group address of the electronic drive unit is 962.
• All units connected to the bus must have differing RS485 device addresses
[P:797].
Establish the connections according to the specification of the interface RS485.
Connect all units with RS485 D+ and RS485 D- to the bus.
Connecting Pfeiffer Vacuum display and control units or PC
The connection of respectively one external operating unit is possible on the in-
terface RS 485.
A USB interface (PC) can be connected via the USB/RS485-converter.
CAUTION
Danger of electric shock
The insulation measures of the bus system are designed only for use with safety extra-
low voltage.
Connect only suitable devices to the bus system.
Designation Value
Serial interface RS485
Baud rate 9600 bauds
Data word length 8 bits
Parity none (no parity)
Start bits 1
Stop bits 1..2

13
Connection "Profibus"
6 Connection "Profibus"
6.1 Connections
The connection of the turbopump in a Profibus-DP system is possible via the con-
nection designated "Profibus" (M12, B-coded) on the electronic drive unit. The in-
terface is electrically isolated from the maximum supply voltage of the electronic
drive unit.
Make Profibus connection using suitable Pfeiffer Vacuum accessories and ca-
bling in compliance with the valid regulations.
6.2 Configuring the connection
To start Profibus communication, the TC 400 PB must be configured by a Profibus
master using the enclosed GSD file.
Set valid and unique Profibus interface address in decimal coding (1-125) using
the address selector switches.
– New address is adopted only after a restart (mains "Off/On").
Fit rubber plugs at the address selector switches evenly and as deep as possible
to achieve the stated protection class.
Profibus status LED
6.3 Modules
Precisely one of the following modules can be used:
• Data format is always "high word/byte first" (Motorola)
• All Pfeiffer Vacuum parameters of data type 0, 1, 2 and 7 can be used for the pa-
rameter channel (PPO1) and the parameterization data.
– Avoid conflicts with existing functions!
• Access to the functions in the modules can be influenced by connecting the elec-
tronic drive unit externally (e.g. remotely).
1
2
3
4
5
Pin Assignment
1+5VDC**
2 RxD/TxD-N
3 GND** (for Pin 1)
4 RxD/TxD-P
5notconnected
State within 1s Meaning
Off Profibus on device side not active
Green flashing Baud rate detected, no user data exchange
2 x green flashing Fail-safe
Illuminated green User data exchange
Red flashing No Baud rate detected
2 x red flashing Parameterization/configuration data incorrect
Illuminated red Profibus not possible (invalid address, initialisation error)
Module Description I data
(byte)
O data
(byte)
PPO1 Control/status bits, rotation speed set and actual val-
ue, noncyclical parameter access
12 12
PPO3 Control/status bits, rotation speed set and actual val-
ue
44
control-/status word Control/status bits 2 2
control-/status byte Control/status bits 1 1

14
Connection "Profibus"
• Output data describe the data communication from the master (e.g. PLC) to the
electronic drive unit.
• Input data describe the data communication from the electronic drive unit to the
master (e.g. PLC).
PPO1
Parameter channel
Request (output data)
Response (input data)
Control word/status word
Byte Output data (12 bytes) Input data (12 bytes)
0-7 Parameter channel with request Parameter channel with response
8-9 Control word Status word
10-11 Target value in rotation speed setting mode (Hz) Actual rotation speed (Hz)
Byte 0 1 2-3 4-7
Bit76543210
Request/re-
sponse
0 Parameter number, bit 0 Parameter
value
109876543210
Value Description Corresponding response
0 No request 0
1 Read parameter value 2 or 7 (for data type 0, 1 or 7)
7 or 11 (for data type 2)
3 Write parameter value as integer 2, 7 or 8
10 Write parameter value (only data type 2) as a
round to nearest number value to IEEE 754
7, 8 o r 11
Value Description
0 No response
2 Transfer parameter value as integer
7 Request not executable, value contains error number*
8 No operation possible via Profibus
11 Transfer parameter value as a round to nearest number to IEEE 754
*Error number Description
0 Invalid parameter number
Function already used in control word
1 Parameter value not changeable
2 Below/above value range
5 Incorrect data type
101 Invalid request
102 Parameter value not readable
103 Invalid format
Bit Output data Input data
15 - Reserved (do not evaluate)
14 - Reserved (do not evaluate)
13 - 0
12 Enable venting 0
11 Heating Pump rotates
10 Enable process data (control word and pa-
rameter channel):
0 = ignore
1 = accept
Set rotation speed attained
9 - Process data enabled
8 Standby Rotation speed switch point attained
7 Error acknowledgement; -> automatic trip
switch
Warning

15
Connection "Profibus"
PPO3
control-/status word
control-/status byte
Parameterization
data
To set a configuration that deviates from the delivery state (="start-up configura-
tion") or to define actions in the Profibus "fail-safe" state and/or when response
monitoring lapses (e.g. master fails) (="fail-safe action"), up to six parameters, de-
scribed with predefined values on a case-by-case basis, can be defined for all mod-
ules. Eight-byte parameterization data are added per parameter in the following
format (undefined points to be assigned 0):
6 Rotation speed setting mode Automatic trip switch (switching back on
only by pumping station off and back on)
5- 1
4- 1
3 - Errors
2 - Operation (no error, pumping station and
motor pumps are on, no automatic trip
switch)
1- 0
0 Pumping station Standby (no error, no automatic trip switch,
enable process data)
Bit Output data Input data
Byte Output data (4 byte) Input data (4 byte)
0-1 Control word (see PPO1) Status word (see PPO1)
2-3 Target value in rotation speed setting mode
(Hz)
Actual rotation speed (Hz)
Byte Output data (2 byte) Input data (2 byte)
0-1 Control word (see PPO1) Status word (see PPO1)
Bit Output data (1 byte) Input data (1 byte)
7 Error acknowledgement, -> automatic trip
switch (switching back on only by pumping
station off and back on)
Warning, general
6 Standby Warning, temperature
5 Enable venting Operation: No error, pumping station and
motor pump are on, no automatic trip switch
4 Heating Rotation speed switch point attained
3 - Errors
2 Enable process data (control byte):
0 = ignore
1 = accept
0
1 - Pump rotates
0 Pumping station Set rotation speed attained
Byte Description
0, bit 7 0: Parameter for "start-up configuration"
1: Parameter for "fail-safe action"
0, bit 6 0: Parameter value is integer
1: Parameter value rounded to nearest number to IEEE 754
2-3 Parameter number
4-7 Parameter value
Designation Example of module designation
Module without additional parameter PPO1, PPO3, control-/status word, control-/status byte
Module with one to six additional pa-
rameters
PPO1 (1 prm) ... (6prm)
PPO1 (1 prm) ... (6prm)
control-/status word (1 prm) ... (6prm)
control-/status byte (1 prm) ... (6prm)

16
Connection "Profibus"
6.4 Expanded diagnostics data
*Device errors and warnings are anchored in the electronic drive unit (see p. 31,
chap. 9.3).
** see PPO1
Byte Designation Description
1-6 Standard diagnostics Profibus Defined by Profibus specification
7 Length of the external diagnostics data
8-36 Reserved
37-38 Current error code 0: No error
1-999: Device error*
1001-1999: Device warning 1-999*
2000: Unrecognised module
3xxx: Parameterization data incorrect in ac-
cordance with error number in the parame-
ter channel**
39-69 Internal state

17
The Pfeiffer Vacuum parameter set
7 The Pfeiffer Vacuum parameter set
7.1 General
All function-relevant variables of a turbopump are anchored in the electronic drive
unit as parameters. Each parameter has a three-digit number and a designation.
Parameters can be used via Pfeiffer Vacuum display and control panels or via
RS485 with the Pfeiffer Vacuum protocol.
Conventions Parameters are displayed in square brackets as a three-digit number in bold font.
The designation may also be stated if necessary.
Example: [P:002] Standby
7.2 Parameter overview
Annotation
Operation with DCU
NOTE
Profibus and Pfeiffer Vacuum parameters
All Pfeiffer Vacuum parameters of data type 0, 1, 2 and 7 can be used for the parameter
channel (PPO1) and the parameterization data.
Avoid conflicts with existing functions in the modules.
#Three figure number of the parameter
Display Notification of the parameter in a Pfeiffer Vacuum display and control unit
Designation Short description of the parameter
Functions Functional description of the parameter
Data type Type of formatting of the parameter for the use within the Pfeiffer Vacuum
protocol
Access method R: read access; W: write access
Unit Physical unit of the described characteristic
min / max permissible limits for value input
default factory settings (partially specific of the pump type)
Parameter can be stored non volatile in the electronic drive unit and may
be reused after resetting of the mains supply.
NOTE
Parameter set and Pfeiffer Vacuum display and control unit
Pfeiffer Vacuum display and control units DCU show the basic parameter set by default.
Furthermore the DCU contains parameters, which are not positioned in the electronic
drive unit.
Parameter [P:794] = 1 (Display of all available parameters).
# Display Designation Functions
Data type Access
Unit min max default 
340 Pressure Active pressure value 7 R mbar 1E-10 1E3
350 Ctr Name Type of display and control unit 4 R
351 Ctr Software Software of display and control unit 4 R
738 Gaugetype Type of pressure gauge 4 RW
794 Param set Parameterset 0 = basic parameter set
1 = extended parameter set
7RW 0 1 0
795 Servicelin Insert service line 7 RW 795

18
The Pfeiffer Vacuum parameter set
Only for Profibus
Control commands
# Display Designation Functions
Data type Access
Unit min max default 
918 Profibus device address 1 R 1 125
947 Error number 1 R 0 65535
967 Control word 1 R 0 65535
968 Status word 1 R 0 65535
# Display Designation Functions
Data type Access
Unit min max default 
001 Heating Heating 0 = off
1 = on
0RW 0 1 0 x
002 Standby Standby 0 = off
1 = on
0RW 0 1 0 x
004 RUTimeCtrl Run-up time control 0 = off
1 = on
0RW 0 1 1 x
009 ErrorAckn Error acknowledgement 1 = Error acknowledgement 0 W 1 1
010 PumpgStatn Pumping station 0 = off
1 = on and error acknowledgement
0RW 0 1 0 x
012 EnableVent Enable venting 0 = no
1 = yes
0RW 0 1 0 x
017 CfgSpdSwPt Configuration rotation speed switch point 0 = Rotation speed switch point 1
1 = Rotation speed switch point 1&2
7RW 0 1 0 x
019 Cfg DO2 Configuration output DO2 0 = Rot. speed switch point attained
1 = No error
2 = Error
3 = Warning
4 = Error and/or warning
5 = Set speed attained
6 = Pump on
7 = Pump accelerates
8 = Pump decelerates
9 = always 0
10 = always 1
11 = Remote priority active
12 = Heating
13 = Backing pump
14 = Sealing gas
15 = Pumping station
16 = Pump rotates
17 = Pump does not rotate
7RW 0 17 1 x
023 MotorPump Motor pump 0 = off
1 = on
0RW 0 1 0 x
024 Cfg DO1 Configuration output DO1 0 = Rot. speed switch point attained
1 = No error
2 = Error
3 = Warning
4 = Error and/or warning
5 = Set speed attained
6 = Pump on
7 = Pump accelerates
8 = Pump decelerates
9 = always 0
10 = always 1
11 = Remote priority active
12 = Heating
13 = Backing pump
14 = Sealing gas
15 = Pumping station
16 = Pump rotates
17 = Pump does not rotate
7RW 0 17 0 x
025 OpMode BKP Operation mode backing pump 0 = Continous operating
1 = Intermittend mode
2 = Delayed switch-on
7RW 0 2 0 x
026 SpdSetMode Rotation speed setting mode 0 = off
1 = on
7RW 0 1 0 x
027 GasMode Gas mode 0 = Heavy gases
1 = Light gases
2 = Helium
7RW 0 2 0 x
028 Cfg Remote Configuration remote 0 = Standard
4 = Relais inverted
7RW 0 4 0 x
030 VentMode Venting mode 0 = Delayed venting
1 = No venting
2 = Direct venting
7RW 0 2 0 x

19
The Pfeiffer Vacuum parameter set
035 Cfg Acc A1 Configuration accessory connection A1 0 = Fan (continous operation)
1 = Venting valve, normally closed
2 = Heating
3 = Backing pump
4 = Fan (temperature controlled)
5 = Sealing gas
6 = always 0
7 = always 1
8 = Power failure venting unit
7RW 0 8 0 x
036 Cfg Acc B1 Configuration accessory connection B1 0 = Fan (continous operation)
1 = Venting valve, normally closed
2 = Heating
3 = Backing pump
4 = Fan (temperature controlled)
5 = Sealing gas
6 = always 0
7 = always 1
8 = Power failure venting unit
7RW 0 8 1 x
037 Cfg Acc A2 Configuration accessory connection A2 0 = Fan (continous operation)
1 = Venting valve, normally closed
2 = Heating
3 = Backing pump
4 = Fan (temperature controlled)
5 = Sealing gas
6 = always 0
7 = always 1
8 = Power failure venting unit
7RW 0 8 3 x
038 Cfg Acc B2 Configuration accessory connection B2 0 = Fan (continous operation)
1 = Venting valve, normally closed
2 = Heating
3 = Backing pump
4 = Fan (temperature controlled)
5 = Sealing gas
6 = always 0
7 = always 1
8 = Power failure venting unit
7RW 0 8 2 x
045 Cfg Rel R1 Configuration Relay 1 0 = Rot. speed switch point attained
1 = No error
2 = Error
3 = Warning
4 = Error and/or warning
5 = Set speed attained
6 = Pump on
7 = Pump accelerates
8 = Pump decelerates
9 = always 0
10 = always 1
11 = Remote priority active
12 = Heating
13 = Backing pump
14 = Sealing gas
15 = Pumping station
16 = Pump rotates
17 = Pump does not rotate
7RW 0 17 0 x
046 Cfg Rel R2 Configuration Relay 2 0 = Rot. speed switch point attained
1 = No error
2 = Error
3 = Warning
4 = Error and/or warning
5 = Set speed attained
6 = Pump on
7 = Pump accelerates
8 = Pump decelerates
9 = always 0
10 = always 1
11 = Remote priority active
12 = Heating
13 = Backing pump
14 = Sealing gas
15 = Pumping station
16 = Pump rotates
17 = Pump does not rotate
7RW 0 17 1 x
# Display Designation Functions
Data type Access
Unit min max default 

20
The Pfeiffer Vacuum parameter set
Status requests
047 Cfg Rel R3 Configuration Relay 3 0 = Rot. speed switch point attained
1 = No error
2 = Error
3 = Warning
4 = Error and/or warning
5 = Set speed attained
6 = Pump on
7 = Pump accelerates
8 = Pump decelerates
9 = always 0
10 = always 1
11 = Remote priority active
12 = Heating
13 = Backing pump
14 = Sealing gas
15 = Pumping station
16 = Pump rotates
17 = Pump does not rotate
7RW 0 17 3 x
050 SealingGas Sealing gas 0 = off
1 = on
0RW 0 1 0 x
055 Cfg AO1 Configuration output AO1 0 = Actual rotation speed
1 = Power
2 = Current
3 = always 0 V
4 = always 10 V
5 = follows AI1
7RW 0 5 0 x
057 Cfg AI1 Configuration input AI1 0 = Disconnected
1 = Set value rot. speed setting mode
7RW 0 1 0 x
060 CtrlViaInt Control via interface 1 = Remote
2 = RS485
4 = PV.can
8 = Field bus
16 = E74
255 = Unlock interface selection
7RW 1 255 1 x
061 IntSelLckd Interface selection locked 0 = off
1 = on
0RW 0 1 0 x
062 Cfg DI1 Configuration input DI1 0 = Deactivated
1 = Enable venting
2 = Heating
3 = Sealing gas
4 = Run-up time control
5 = Rotation speed setting mode
Setting ≠[P:063/064]
7RW 0 5 1 x
063 Cfg DI2 Configuration input DI2 0 = Deactivated
1 = Enable venting
2 = Heating
3 = Sealing gas
4 = Run-up time control
5 = Rotation speed setting mode
Setting ≠[P:062/064]
7RW 0 5 2 x
064 Cfg DI3 Konfiguration input DI3 0 = Deactivated
1 = Enable venting
2 = Heating
3 = Sealing gas
4 = Run-up time control
5 = Rotation speed setting mode
Setting ≠[P:062/063]
7RW 0 5 3 x
# Display Designation Functions
Data type Access
Unit min max default 
# Display Designation Functions
Data type Access
Unit min max default 
300 RemotePrio Remote priority 0 = no
1 = yes
0R 0 1
302 SpdSwPtAtt Rotation speed switch point attained 0 = no
1 = yes
0R 0 1
303 Error code Error code 4R
304 OvTempElec Excess temperature electronic drive unit 0 = no
1 = yes
0R 0 1
305 OvTempPump Excess temperature pump 0 = no
1 = yes
0R 0 1
306 SetSpdAtt Set rotation speed attained 0 = no
1 = yes
0R 0 1