Pfeiffer Vacuum ASM 390 Technical specifications

MAINTENANCE INSTRUCTIONS
EN
Translation of the original instructions
ASM 390 - ASM 392
Leak detector

Table of contents
2
Table of contents
1 About this manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.1 Validity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.1.1 Applicable documents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.2 Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.2.1 Safety instructions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.2.2 Pictographs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
1.2.3 Instructions/Abbreviations used . . . . . . . . . . . . . . . . . . . . . . . . . . .
1.2.4 Labels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
2 Safety and maintenance information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2.1 Safety precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2.2 Protective equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2.3 Maintenance preparation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2.4 Tools and spare parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3 Maintenance intervals and responsibilities . . . . . . . . . . . . . . . . . . . . . . . . . . 9
3.1 Maintenance time monitoring . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
4 Maintenance replacement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
4.1 Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
4.2 Leak test of an internal component of the detector. . . . . . . . . . . . . . . . . . 10
4.3 Dismantling/reassembling the work surface and front cover . . . . . . . . . . 10
4.3.1 Work surface. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
4.3.2 Front cover . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
4.4 Maintenance of the internal calibrated leak . . . . . . . . . . . . . . . . . . . . . . . 13
4.4.1 Setting. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
4. Analyzer cell maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
4. .1 Dismantling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
4. .2 Seals replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
4. .3 Filament replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
4.6 Maintenance fans . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
4.6.1 Localization . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
4.6.2 Replacement of the air inlet fan (V1). . . . . . . . . . . . . . . . . . . . . . . 17
4.6.3 Replacement of the exhaust fan (V2) . . . . . . . . . . . . . . . . . . . . . . 17
4.7 Filter maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
4.7.1 Replacement of the vacuum block air filter . . . . . . . . . . . . . . . . . . 18
4.7.2 Replacement of the inlet vent filter . . . . . . . . . . . . . . . . . . . . . . . . 19
4.8 Pirani gauge replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
5 Decommissioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
.1 Shutting down for longer periods . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
.2 Disposal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
.2.1 Restriction of Hazardous Substances (R.O.H.S.) . . . . . . . . . . . . . 21
.2.2 Electric and electronic equipments (EEE). . . . . . . . . . . . . . . . . . . 21
6 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
6.1 What happens in the event of a defect . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
6.1.1 Warning fault display. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
6.1.2 Warning / fault window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
6.1.3 List of warnings / faults . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
6.2 Troubleshooting guide . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
6.2.1 Installation of the application. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
6.2.2 Consultation of the application . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
7 Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
8 Spare parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
8.1 Tool . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
8.2 Monitoring and display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
8.3 Ventilation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
8.4 Power and electrical supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
8. Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

Table of contents
3
8.6 Vacuum block . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
8.7 Pump exhaust . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
8.8 Pipes - Connections - Seals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
8.9 Cover . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
8.10 Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31

4
About this manual
1 About this manual
1.1 Validity
This maintenance manual is intended for the customers of the Pfeiffer Vacuum Compa-
ny. It describes the product maintenance operations which can be performed by the user
on the product concerned. This documentation must be used with the operating
manual of the product of the same name.
The current maintenance manuals are also available on the Internet at www.pfeiffer-vac-
uum.com.
This manual covers products with the following part numbers:
1.1.1 Applicable documents
The document to be used in reference to this maintenance manual is:
*also available at www.pfeiffer-vacuum.com
1.2 Conventions
1.2.1 Safety instructions
Operating manual safety instructions Pfeiffer Vacuum are based on the UL, CSA, ANSI
Z- 3 , SEMI S2, ISO 3864 and DIN 4844 certification standards. This document de-
scribes the following information and danger levels:
Part number Description
CSGB01GxMM9x ASM 390
ESGB02GxMM9x ASM 392
200479 ASM 392 EUV
Operating instructions
ASM 390/392 leak detector Ref. 126348*
DANGER
Imminent danger
Indicates an imminent hazardous situation that will result in death or serious injury.
WARNING
Possibly imminent danger
Indicates an imminent hazardous situation that can result in death or serious injury.
CAUTION
Possibly imminent danger
Indicates an imminent hazardous situation that can result in minor or moderate injury.
NOTICE
Command or note
Command to perform an action or information about properties, the disregarding of
which may result in damage to the product.

About this manual
1.2.2 Pictographs
1.2.3 Instructions Abbreviations used
1.2.4 Labels
Prohibition of an action to avoid any risk of accidents, the disregarding
of which may result in serious accidents
Warning of a displayed source of danger in connection with operation of
the unit or equipment
Command to perform an action or task associated with a source of dan-
ger, the disregarding of which may result in serious accidents
Important information about the product or this document
 or Work instruction: you must perform an operation here.
[XXXX] You must press the XXXX key on the control panel.
I/O Inputs/Outputs
4
He Helium 4
3
He Helium 3
H
2
Hydrogen
Indicates an electrical shock hazard in case of contact:
disconnect the electrical power supply before removing the cover
and working on the product.
Locate a grounding point on the product.
Product subject to the treatment of waste electronic and electrical
equipment in accordance with directive 2002/9 /EC.
Other labels: see Operating Instructions.

6
Safety and maintenance information
2 Safety and maintenance information
2.1 Safety precautions
● Wait minutes after switch-off before working on the product.
● When you order spare parts, you must mention everything featured on the product
nameplate.
● Comply with all safety and risk prevention instructions in accordance with local safety
standards.
● Regularly check compliance with all precautionary measures.
● Do not switch on the product if the covers are not in place.
● To return the product to one of our Pfeiffer Vacuum service centers, read the after-
sales Service procedure and complete the declaration of contamination available on
our website.
Duty to inform
Every person who is involved in maintenance and servicing work on the pump must read
and follow the safety-relevant parts of all associated documents.
NOTICE
Exclusion of liability
Pfeiffer Vacuum accepts no responsibility concerning equipment damage, disrupted
service or physical injury resulting from maintenance carried out by technicians who
have not been trained in safety rules (EMC, electrical hazards, chemical pollution). Lia-
bility and warranty claims shall be inadmissible in this case.
WARNING
Risk of electric shock
Voltage and current can cause electric shock. Only skilled, authorized people may carry
out maintenance work.
Isolate and lock the power supply circuit by positioning the circuit breaker on O.
Disconnect the power cable from all power sources before doing any work on the
product and/or removing the covers.
WARNING
Other localized hazardous energies
Electrical circuit and other pressurized circuits as nitrogen are potential hazards:
Always lock out these energy sources before working on the product.
NOTICE
Work Handling the detector
The operator must not work on the product to move it or carry out maintenance until it
has come to a complete shutdown! When the circuit breaker is set at O, you must:
Unplug the power cable.
Wait for the control panel screen to turn off completely before working on the product
and/or removing the covers.
WARNING
Risk linked to installation tightness
The products are factory tested to ensure they will not leak in normal operating condi-
tions.
Perform a tightness test after all maintenance operations.

Safety and maintenance information
7
● Use the original packaging to return the product to a Pfeiffer Vacuum service center:
the manufacturer shall not be held liable for any damage resulting from transport in
unsuitable packaging.
2.2 Protective equipment
In some situations, personal protective equipment must be worn when handling the de-
tector and its components. Customers must provide operators with the necessary equip-
ment. This equipment must be checked regularly and used in accordance with the sup-
plier's recommendations.
2.3 Maintenance preparation
Disconnect the detector from the part/installation to be tested: install the blanked-off
flange on the detector's inlet (accessory supplied with the product or available upon
request (see Accessories chapter of the Operating instructions).
Handle the detector so it can be moved in the maintenance area (see Handling chap-
ter of the Operating instructions).
● clean, dust-free and ventilated room,
● appropriate protective equipment.
2.4 Tools and spare parts
The tools necessary for the maintenance of the detector are available in the maintenance
kit supplied with the product. Depending on the maintenance operation, other tools may
be needed, at the customer’s expense.
kg
WARNING
Risk of injury due to falling objects
When transporting parts/components and during maintenance there is a danger of loads
slipping and falling down.
Carry small and medium-size parts/components with both hands.
Carry parts/components > 20 kg with a suitable lifting device.
Wear safety shoes with a steel toe in accordance with directive EN 347.
WARNING
Risk of injury through hot surfaces
The products are designed so as not to present a thermal risk for the operator's safety.
However, specific operating conditions may exist that require extra caution from users
due to the high temperatures (surfaces > 70 °C for parts inside the covers).
Leave the part to cool before working on the product.
If necessary wear protective gloves according to directive EN 420.
CAUTION
Risk of pinching
When handling the storage tank cover, there is a risk of fingers becoming pinched.
NOTICE
Work Handling the detector
The operator must not work on the product to move it or carry out maintenance until it
has come to a complete shutdown! When the circuit breaker is set at O, you must:
Unplug the power cable.
Wait for the control panel screen to turn off completely before working on the product
and/or removing the covers.

8
Safety and maintenance information
Spare parts
Replacing defective components with parts that are not genuine jeopardizes the prod-
uct's initial safety conditions.
Use only spare parts available for order from Pfeiffer Vacuum Service.
Parts numbers are available in the Spare Parts chapter.
To identify the product and communicate with Pfeiffer Vacuum look at the product's
nameplate.

Maintenance intervals and responsibilities
9
3 Maintenance intervals and responsibilities
Level 1 and 2 maintenance operations of the service frequency table are described in
this manual.
Level 3 overhaul operations require the intervention of a technician from the Pfeiffer Vac-
uum Service networkPfeiffer Vacuum.
Pump maintenance is carried out during leak detector overhaul.
3.1 Maintenance time monitoring
The cycle counters on the primary pump and the turbomolecular pump alert the operator
that a maintenance operation must be performed (see Maintenance Menu of the Oper-
ating Instructions).
Description Number of hours in use Level
(1)
Site
(2)
Analyser cell
Filament replacement If necessary I OS
Inlet vent filter
Replacement of the inlet vent filter According to usage conditions II OS
Pirani gauge
Setting According to usage conditions
Every 4,300 hours (recommended)
I OS
Replacement If necessary II OS
Fans
Replacement of fans If necessary II OS
Calibrated leak
Recalibration or exchange Every 2 years II WS
Leak detector
Service According to usage conditions
Every 4 years (recommended)
III OS/WS
(1) Level:
I = Operator
II = Technical or trained operator
III = In service centre
(2) Site:
OS = On site
WS = En centre de service Pfeiffer Vacuum.

10
Maintenance / replacement
4 Maintenance replacement
4.1 Cleaning
Clean the cover(s) with a soft, lint-free cloth and a product that will not damage the
painting, silk-screened surfaces or the labels.
4.2 Leak test of an internal component of the detector
Perform a leak test on the internal component to be checked (see Operating Instruc-
tions).
4.3 Dismantling reassembling the work surface and front cover
4.3.1 Work surface
Dismantling Immobilise the leak detector by setting the brakes on the rear wheels.
Shut down the leak detector (see chapter Shutdown the detector of the operating
instructions).
Remove the flange around the inlet port.
Lift the cover of the storage tank.
Operate each latch (1) to unlock the work surface.
Slightly lift the work surface (2). Push it towards the back of the detector (3) then re-
move it (4).
CAUTION
Risk of pinching
The front wheels are equipped with brakes.
Always engage the brakes with your foot; never use your hands.
1

Maintenance / replacement
11
The work surface can be removed without disconnecting the control panel as the cable
is sufficiently long.
Control panel disconnection (Optional)
When the work surface has been removed from the detector, the operator must never
perform mechanical actions on the calibrated leak or any other of the detector’s internal
sub-assemblies
Reassembly Shut down the leak detector (see chapter Shutdown the detector of the operating
instructions).
Place the work surface vertically on the frame (4).
Check that the control panel cable is clear: the control panel must be able to move at
least 1 m from its support.
Pull the work surface towards the front of the detector (3) then clip it on (2).

4
3
2
4
2
2
3

12
Maintenance / replacement
Refit the flange around the inlet port.
4.3.2 Front cover
Dismantling Dismantle the work surface beforehand (see 4.3.1).
Operate each latch (1) to unlock the cover.
Pull the cover forwards (2).
Reassembly Shut down the leak detector (see chapter Shutdown the detector of the operating
instructions).
Position the front cover on the frame and push it towards the front (1) of the detector
to clip it into the housing (2) of each latch.
1
2
1
2

Maintenance / replacement
13
Refit the work surface (see 4.3.1).
4.4 Maintenance of the internal calibrated leak
Handle the calibrated leak with care.
Shut down the leak detector (see chapter Shutdown the detector of the operating
instructions).
Remove the work plan (see 4.3.1) and the front cover (see 4.3.2).
Disconnect the temperature sensor (3) from the calibrated leak. Never separate the
temperature sensor from the calibrated leak.
Unscrew the 2 fixing screws (2) without removing them.
Turn the calibrated leak (1) 90° to remove it.
Replace the calibrated leak.
Rotate the calibrated leak by 90° so that the temperature sensor (3) is positioned
above the valve (4) as shown in the illustration.
Connect the temperature sensor (3).
Update the settings of the calibrated leak (see Spectro Menu in the Operating In-
structions) (see 4.4.1).
Perform a detector autocalibration.
4.4.1 Setting
The setting of the calibrated leak must be updated every time a calibrated leak is re-
placed (see Spectro Menu in the Operating Instructions).
This operation can be carried out with the information featured on the calibrated leak
identification label or the certificate supplied with the calibrated leak.
Fig. 1: Example of identification label
NOTICE
Change the internal calibrated leak if it has significant impact marks.
1
2
2
4
3
F-74000 ANNECY
S/N:FC15000123
P/N:119678
Calibration date...: 15-Jan-2015
Lost per year........: 2 %
Temperature........: 23°C
Temperature coeff: 3 %
Value..: 1,3E-7 mbar.l/s ± 10 %
1,3E-8 Pa.m3/s ± 10 %
HELIUM CALIBRATED LEAK

14
Maintenance / replacement
4.5 Analyzer cell maintenance
4.5.1 Dismantling
Create an air inlet in the cell via the Maintenance menu (see Operating Instructions).
Shut down the leak detector (see chapter Shutdown the detector of the operating
instructions).
Remove the work surface (see 4.3.1) and the front cover (see 4.3.2).
Disconnect the harness (1) from the cell.
Loosen the cell's 6 fixing screws (2).
Free the analyser cell manually and vertically (3)
Fig. 2: Analyser cell dismantling
4.5.2 Seals replacement
Check the condition of the seals every time you work on the analyzer cell (filament re-
placement for example): change them if necessary.
NOTICE
Cleanliness guarantee
During vacuum component maintenance operations, avoid any contamination which
could subsequently result in the degassing of the parts. To avoid this:
perform the maintenance in an appropriate area (clear, dust-free and ventilated)
use non-woven materials
dust the parts with filtered dry air
wear unpowdered vinyl gloves (clean room gloves)
WARNING
Risk of burning associated with hot surfaces
When in operation, certain mechanical parts can reach high temperatures. If the detec-
tor was used recently:
Let it cool down for at least 1 minutes before working on the analyzer cell.
When relevant, use protective gloves in accordance with the EN 420 standard.
13
2

Maintenance / replacement
1
Fig. 3: Replacement of the seals
Remove the analyzer cell from the detector (see 4.5.1).
Replace the 2 seals (3). Never lubricate the seals.
4.5.3 Filament replacement
Remove the analyzer cell from the detector (see 4.5.1).
Remove the fixing screw (4) and the washer of the defective filament.
Remove the 2 fastening clips ( ) using flat pliers (2 new clips are supplied with the
spare filament).
Replace the filament.
Reset the counter of the new filament (see Maintenance Menu in the Operating in-
structions).
Fig. 4: Dismantling the filament
Make sure that the filament connectors (6) are perpendicular to the supporting surface
and parallel to each other.
3
The oxidation of the iridium filament is normal: do not touch the filament with
your fingers.
F1 Filament 1 in the menu
F2 Filament 2 in the menu
F2 F1 4
A
A
F1
5

16
Maintenance / replacement
Fig. 5: Positioning the filament
Fit the new filament in its housing against the 2 centring stops (7). Attach it with the
screw (4) and washer supplied with the filament, using the Torx
®
screwdriver.
Take a fastening clip ( ) with the flat pliers: this clip will ensure electrical contact be-
tween the filament and the cell (see figure: Fitting the fastening clip, index A).
Fit the clip on the connector (6) and the strip of the filament (8) (see figure: Fitting the
fastening clip, index B).
Push in the clip ( ) with the pliers until it stops (see figure: Fitting the fastening clip,
index C).
Repeat the last 3 operations for the second connector.
Reset the counter of the new filament (see Maintenance Menu in the Operating in-
structions).
Fig. 6: Fitting of the fastening clip
6
F1
8
4
7
A B
D C
5

Maintenance / replacement
17
4.6 Maintenance fans
4.6.1 Localization
Fig. 7: Fan location
4.6.2 Replacement of the air inlet fan (V1)
Shut down the leak detector (see chapter Shutdown the detector of the operating
instructions).
Remove the work plan (see 4.3.1) and the front cover (see 4.3.2).
Disconnect the harness (1) from the fan (V1) and pass it through the bulkhead adapter
(2).
Remove the fan (V1).
Position the new fan, ensuring it is the correct way around (3).
– The arrow (4) shows the air flow direction.
Pass the fan harness through the bulkhead adapter (2).
Clip on the fan.
Connect the harness (1).
4.6.3 Replacement of the exhaust fan (V2)
Shut down the leak detector (see chapter Shutdown the detector of the operating
instructions).
Remove the work plan (see 4.3.1) and the front cover (see 4.3.2).
Disconnect the harness (1) of the fan (V2).
Remove the fan.
V1 Air inlet fan
V2 Air exhaust fan
V1
V2
V1 2 1
3
4
3

18
Maintenance / replacement
Position the new fan, ensuring it is the correct way around (2).
– Place a protective grill (3) on each side of the fan.
– The arrow (4) shows the air flow direction.
Attach the fan.
Connect the fan harness (1), respecting the (+) and (-) polarities.
4.7 Filter maintenance
4.7.1 Replacement of the vacuum block air filter
Shut down the leak detector (see chapter Shutdown the detector of the operating
instructions).
Remove the work plan (see 4.3.1) and the front cover (see 4.3.2).
Loosen the filter connector (3) to free the tube (4).
Loosen the connector (2) and the connector (1).
Install the new filter in reverse dismantling order and tighten the connectors.
V1
3
2
4
V2
3
1
3
4
2
1

Maintenance / replacement
19
4.7.2 Replacement of the inlet vent filter
Loosen the inlet vent filter (1) and replace it.
4.8 Pirani gauge replacement
Shut down the leak detector (see chapter Shutdown the detector of the operating
instructions).
Remove the work plan (see 4.3.1) and the front cover (see 4.3.2).
Disconnect the wiring harness (1) from the gauge.
Loosen the retainer screw (2).
Screw the CHc screw (3) in the centre of the gauge (CHc screw in the maintenance
kit supplied with the detector).
Pull on the CHc screw (3) to free the gauge.
Position the new gauge (4).
– When inserting the new gauge (4), do not bring the gauge filaments ( ) into contact
with the vacuum block (6).
Tighten the retainer screw (2).
Connect the gauge wiring harness (1).
Perform a leak test (see 4.2).
1
NOTICE
Risk of pollution
The inlet vent must never remain open to the air. Ensure the filter is on the connector at
all times.
1
2
3
4
4
5
6
6

20
Maintenance / replacement
Set the gauge: see chapter Calibration of the internal Pirani gauge of the Operating
Instructions.