Pfeiffer Vacuum QualyTest HLT 260 Technical specifications

Maintenance Instructions
BG 805 457 BE / C (0204) HLT 2xx 1
QualyTest™
HLT 2xx
VACUUM
VACUUM

2BG 805 457 BE / C (0204) HLT 2xx
Table of contents Page
1 Important information...............................................................................................4
1.1 Validity.........................................................................................................................4
1.2 Content of these maintenance instructions.................................................................4
1.3 Safety information.......................................................................................................4
1.4 General information ....................................................................................................5
1.5 List of documents........................................................................................................5
2 Design and functional description ..........................................................................6
2.1 System overview.........................................................................................................6
2.1.1 Block diagram .............................................................................................................7
2.1.2 Power inlet and ground connection.............................................................................8
2.2 Pump system ..............................................................................................................9
2.2.1 Roughing pump.........................................................................................................10
2.2.2 TMH 071 turbopump TC 600 drive electronics .........................................................11
2.2.3 Vacuum measurement..............................................................................................12
2.2.4 Valve block................................................................................................................13
2.3 Sniffer line LP 5xx.....................................................................................................14
2.4 Analytical system ......................................................................................................15
2.4.1 Detection system.......................................................................................................15
2.4.2 Mass spectrometer supply MSV ...............................................................................16
2.4.3 Electrometer pre-amplifier EVV.................................................................................17
2.5 Electronics.................................................................................................................18
2.5.1 MC 68 Control board.................................................................................................18
2.5.2 I/O board...................................................................................................................19
2.5.3 Wiring board..............................................................................................................20
2.5.4 Fuses........................................................................................................................21
3 HLT 2xx Maintenance and Service ........................................................................22
3.1 Maintenance and service schedule...........................................................................22
3.2 Maintenance kits.......................................................................................................25
4 Maintenance Work ..................................................................................................27
4.1 General.....................................................................................................................27
4.2 UNO 005A.................................................................................................................28
4.2.1 Check oil level and replenish ....................................................................................28
4.2.2 UNO 005A, oil change ..............................................................................................28
4.3 Oil mist filter ..............................................................................................................30
4.3.1 Check the oil mist filter, drain it and clean the oil pan...............................................30
4.3.2 Replace filter to oil mist filter.....................................................................................30
4.4 MVP 035...................................................................................................................32
4.4.1 MVP 035, replace the diaphragm..............................................................................32
4.5 Scroll pump...............................................................................................................33
4.5.1 Varian Triscroll TS600...............................................................................................33

BG 805 457 BE / C (0204) HLT 2xx 3
Page
4.6 TMH 071................................................................................................................... 34
4.6.1 Replace the lubricant reservoir................................................................................. 34
4.6.2 TMH 071, exchange for bearing change................................................................... 35
4.7 Valve block ............................................................................................................... 36
4.7.1 Clean or replace the screwed fitting with filter on the vent connection .....................36
4.7.2 Clean the Pirani measuring elements P1 and/or P2................................................. 37
4.7.3 Clean the valve block, replace the seals and revise the valves................................ 37
4.8 Ventilator 1................................................................................................................ 37
4.8.1 Clean / replace the filter mat..................................................................................... 37
4.9 LP 5xx.......................................................................................................................37
4.9.1 Replace capillary filter............................................................................................... 37
4.9.2 Replace the sinter filter............................................................................................. 37
4.10 Checking the Maintenance Work.............................................................................. 38
4.10.1 Weekly Maintenance Work....................................................................................... 38
4.10.2 Quarterly Maintenance Work.................................................................................... 38
4.10.3 Semiannual Maintenance Work................................................................................ 38
4.10.4 Annual Maintenance Work........................................................................................ 39
4.10.5 Biannual Maintenance Work..................................................................................... 39
Contamination Declaration................................................................................................. 40

4BG 805 457 BE / C (0204) HLT 2xx
1 IMPORTANT INFORMATION
Maintenance on the HLT 2xx may only be performed by persons who have been
authorized by PFEIFFER VACUUM for this purpose.
Authorized persons:
Repair level I1) Customer
Repair level II1) Customer with technical education or PFEIFFER VACUUM
Service Engineer
Repair level III1) Customer with PFEIFFER VACUUM Service training2) or
PFEIFFER VACUUM Service Engineer
1) →see maintenance schedule (page 22 - 23)
2) →PFEIFFER VACUUM offers courses to rapair level II and III.
1.1 Validity
This document applies to products with part numbers:
Type Part number Voltage Roughing pump
HLT 260, QualyTestTM BG Z08 000 230 V~ UNO 005A
HLT 260, QualyTestTM BG Z08 001 120 V~ UNO 005A
HLT 260, QualyTestTM BG Z08 002 100 V~ UNO 005A
HLT 260, QualyTestTM BG Z08 050 230 V~ UNO 005A; without RC
HLT 260, QualyTestTM BG Z08 060 120 V~ UNO 005A; without RC
HLT 265, QualyTestTM Select BG Z08 020 100 – 230 V~ extern
HLT 270, QualyTestTM Dry BG Z08 010 230 V~ MVP 035
HLT 270, QualyTestTM Dry BG Z08 011 120 V~ MVP 035
HLT 270, QualyTestTM Dry BG Z08 012 100 V~ MVP 035
HLT 275, QualyTestTM Dry+ BG Z08 015 230 V~ Scroll pump
HLT 275, QualyTestTM Dry+ BG Z08 016 100 - 120 V~ Scroll pump
The part number can be taken from the product name plate.
The described functions, illustrations and data are given with the understanding that they are
subject to change without notice.
1.2 Content of these maintenance instructions
The present maintenance instructions describe the periodic maintenance to be performed on
the HLT 2xx.
For information on the operation of the equipment, a description of the equipment and the
technical specifications please refer to the separate user’s guide.
1.3 Safety information
Basic safety information
•When handling process gases please follow the applicable regulations and protective
measures.
•Although helium is an inert gas it can cause asphyxiation in high concentrations.

BG 805 457 BE / C (0204) HLT 2xx 5
•The test object and the gas fittings must be able to withstand the applied pressure
gradient.
•Products returned to PFEIFFER VACUUM for service or repair should, if possible, be
free of harmful substances (e.g. radioactive, toxic, caustic or microbiological). Otherwise,
the type of contamination must be declared.
(A copy of the "Declaration of Contamination" can be found on page 39. Additional forms
can be obtained from your nearest PFEIFFER VACUUM service center.)
•The line filter, the power supply unit, the wiring board and the roughing pump have parts
that are on voltages higher than 50 V. For this reason the power plug must always be
disconnected before the HLT 2xx is opened for service work.
Explanations of pictograms
NOTE:
Information on correct handling or use.
CAUTION:
Information on preventing extensive equipment and environmental damage.
DANGER:
Information on preventing bodily injury or extensive property damage.
Vacuum area:
Always wear clean, lint-free gloves and use clean tools when working in this area.
1.4 General information
•Electrical components (circuit boards, EPROMs, electrical connections) are sensitive to
electrostatic discharge and appropriate precautions must be taken. In particular the
circuit boards and EPROMs must be stored in antistatic packing material.
•Failure to take appropriate precautions can void the warranty.
•PFEIFFER VACUUM declines any liability and the warranty becomes null and void if the
product is modified or operated with accessories that are not listed in the corresponding
product documentation.
1.5 List of documents
BG 805 263 BE User’s guide HLT 2xx
BG 805 457 BE Maintenance instructions HLT 2xx
PK 800 152 BN User’s guide UNO 005A
PJ 11400 User’s guide MVP 035
PM 800 504 BN User’s guide TMH 071
BG 805 268 BD User’s guide LP 5xx
6999-04-250 User’s guide, Scroll pump Triscroll TS600

6BG 805 457 BE / C (0204) HLT 2xx
2 DESIGN AND FUNCTIONAL DESCRIPTION
The HLT 2xx is a microprocessor controlled leak detector that is equipped with the most
advanced electronic and electromechanical components. All processes within the instrument
are controlled automatically.
2.1 System overview
RC 260
UNO 005A
or / oder
MVP 035
Test leak
Testleck
V4
V5
V2
V1
TMH 071
Ventilator 1
Lüfter 1
Test port
Testanschluss
Ventilator 2
Lüfter 2
Oil mist filter (only HLT 260)
Ölnebelfilter (nur HLT 260)
Valve block
Ventilblock
Mass spectrometer
Massenspektrometer
I/O Board
MC 68
MSV
EVV Wiring board
Verdrahtungsebene
Fig. 2 HLT 2xx

BG 805 457 BE / C (0204) HLT 2xx 7
2.1.1 Block diagram
Fig. 3 HLT 2xx Block diagram

8BG 805 457 BE / C (0204) HLT 2xx
2.1.2 Power inlet and ground connection
(on the wiring board)
Fig. 4 Power inlet and ground connection

BG 805 457 BE / C (0204) HLT 2xx 9
2.2 Pump system
The pump system consists of a roughing pump, a turbo pump, a helium detector and a valve
block that established most connections between the helium detector and the test port. The
layout of the pump system is schematically shown in Fig. 5.
P2
Pressure test connection
Druck Testanschluss
V3
P1
Pressure fore vacuum
Druck Vorvakuum
Helium-
Sensor
Turbo pump
Turbopumpe
Backing pump
Vorvakuumpumpe
Test leak
Testleck
Vent or LP connection
Belüftungs oder LP Anschluss
Backing pump optional
Vorvakuumpumpe optional
V4
V6
V2
V1
V5
Test port
Testanschluss
Fig. 5 Pump system HLT 2xx
The test object can be connected to the test port with a KF 25 flange. Valves V1, V2, V3 and
V4 establish the vacuum connection between the test object and the helium detector in such
a way that no operating state is created that is detrimental to the helium detector.
For calibrating the HLT 2xx a calibrated leak can be connected via valve V5.
Valve V6 is normally used for venting so that the test object can be removed from the test
port after the test has been completed. However, it can also be used as a sniffer probe
connection.

10 BG 805 457 BE / C (0204) HLT 2xx
2.2.1 Roughing pump
a) HLT 260: UNO 005A (→Fig. 6)
Single-stage, oil-immersed rotary vane vacuum pump with a nominal volume flow rate of
4 m3/h at 50 Hz and 5 m3/h at 60 Hz.
Oil filler
Öleinlass
Oil drain
Ölablass
Oil level sight glas
Ölstandsschauglas
Gas ballast valve
Gasballastventil
Fig. 6 UNO 005A
b) HLT 270: MVP 035 (→Fig. 7)
Two-stage diaphragm vacuum pump for absolutely oil-free pumping of gases with a volume
flow rate of 1.3 m3/h at 50 Hz and 1.5 m3/h at 60 Hz.
Fig. 7 MVP 035

BG 805 457 BE / C (0204) HLT 2xx 11
c) HLT 265: External roughing pump
An external roughing pump can be connected to the HLT 265 via the KF 16 flange. If objects
with a large volume need to be tested an additional roughing pump to the HLT 260 and
HLT 270 can also be connected to the flange.
d) HLT 275: External scroll pump
Oil-free, 2-stage scroll pump with a nominal volume flow rate of 25 m3/h at 50 Hz and
30 m3/h at 60 Hz,
2.2.2 TMH 071 turbopump TC 600 drive electronics
RS485
REMOTE
HEAT/TMS
VENT
FOREPUMP
FAN
TC600
to the sensor
zum Sensor
to the valve block
zum Ventilblock
Fig. 8 TMH 071 with TC 600

12 BG 805 457 BE / C (0204) HLT 2xx
2.2.3 Vacuum measurement
Pirani measuring elements P1 and P2
P1 measures the fore vacuum pressure in the turbomolecular pump.
P2 measures the pressure on the test port.
Pirani measuring elements
Pirani-Messelemente
Holder
Halter
P2
P1
to the valve block
zum Ventilblock
Fig. 9 Vacuum measurement

BG 805 457 BE / C (0204) HLT 2xx 13
2.2.4 Valve block
V4
Testport
Testanschluss
V2
V1
V3
V6
to fore vacuum pump
zur Vorvakuumpumpe
Vent connection Belüftungsanschluss
Test leak
Testleck
Srewing flange (ordering No. PM 043 687) to optionally fore vacuum pump
Einschraubflansch (Bestell Nr. PM 043 687) zur optionalen Vorvakuumpumpe
P1P2
V4
V6
V3 V2
V1
V5
Fig.10 Valve block
Solenoid valves V1 to V6.
Depending on their function the valves have different nominal diameters and opening forces.
V2 and V6 are concepted for 0.0 to 1.1 bar (open against atmosphere).
V1, V3, V4, V5 are conceted for 0.0 to 0.5 bar.
All valves open electromagnetically and close by spring force. They are controlled with
24 V=.
The tightness of the valves toward the atmospheric side is < 10-9 mbar l/s. The tightness at
the valve piston is normally < 10-6 mbar l/s, but can be impaired by contamination without
affecting normal operation of the HLT 2xx.

14 BG 805 457 BE / C (0204) HLT 2xx
2.3 Sniffer line LP 5xx
(→User’s guide BG 805 268 BN)
(218) (120 / 385)
(3 m / 5 m / 10 m)
Sniffer line
Schnüffelsonde Handle Handgriff Sniffer tip
Schnüffelspitze
Capillary filter
standard: plastic
option: metal
Kapillarfilter
Standard: Kunststoff
Option: Metall
(120)
TP 385 Tip 385 mm stiff BG 449 216 -T
(385)
Sinter filter
Sinterfilter
TP 312 Tip 120 mm stiff BG 449 215 -T
TP 312 Spitze 120 mm steif BG 449 215 -T TP 385 Spitze 385 mm steif BG 449 216 -T
Sinter filter
Sinterfilter
TF 385 Tip 385 mm flexible BG 449 218 -T
(385)
TF 312 Tip 120 mm flexible BG 449 217 -T
(120) TF 385 Spitze 385 mm flex BG 449 218 -T
TF 312 Spitze 120 mm flex BG 449 217 -T
Sinter filter
Sinterfilter Sinter filter Sinterfilter
Fig. 2–11 Sniffer line with sniffer probe
Type Ordering No. Sniffer line length Sniffer probe TP 312
LP 503 BG 449 207 -T 3 meters 120 mm stiff / BG 449 215 -T
LP 505 BG 449 208 -T 5 meters 120 mm stiff / BG 449 215 -T
LP 510 BG 449 209 -T 10 meters 120 mm stiff / BG 449 215 -T
Other sniffer probes (optional)
Type Length/Characteristic Ordering No.
TF 312 120 mm / flexible BG 449 217 -T
TP 385 385 mm / stiff BG 449 216 -T
TF 385 385 mm / flexible BG 449 218 -T
Spare parts sets for LP 5xx: BN 845 979 -T (5 x sinter filter)
BN 846 392 -T (5 x capillary filter assembly)
Option: BG 449 140 -T (Capillary filter: metallic version for rough
duty)

BG 805 457 BE / C (0204) HLT 2xx 15
2.4 Analytical system
2.4.1 Detection system
The detection system essential comprises the ion source, the magnetic separation system,
and the ion collector.
The ion source ionizes neutral gas particles from which it generates an ion beam. The
positively charged ions are accelerated out of the ion source and subsequently enter the
magnetic field. There they are deflected into a circular path, the radius of which depends on
the mass/charge ratio of the ions. Only the helium ions fulfill the separation conditions and
reach the ion collector where they can be measured by the electrometer amplifier.
M > 4
M < 4
M = 4
123 4
5
6
7
8
9
10
11
Legende:
1 Katode 1
2 Anode
3 Katode 2
4 Verstärker
5 Ionenfänger
6 Abschirmung zu Ionenfänger
7 Suppressor
8 Magnetfeld
9 Zwischenblende
10 Extraktorblende
11 Abschirmring
Legend:
1 Cathode 1
2 Anode
3 Cathode 2
4 Amplifier
5 Ion collector
6 Ion collector screen
7 Suppressor
8 Magnetic field
9 Intermediate orifice
10 Extractor orifice
11 Screening ring
Fig. 12a Principle of detection system
Magnetic system
Magnetsystem Mass spectrometer housing Massenspektrometergehäuse
Pre-amplifier unit EVV
Vorverstärkereinheit EVV
Connetion flange
Anschlussflansch
Connection Ion soure
Anschluss Ionenquelle
Fig. 12b Design of detection system

16 BG 805 457 BE / C (0204) HLT 2xx
2.4.2 Mass spectrometer supply MSV
This module produces all voltages and currents required for operating the mass
spectrometer:
–Anode heating voltage
–Cathode heating voltage
–Anode potential
–Suppressor potential
Faults in the mass spectrometer are detected and signaled to the MC 68. The mass
spectrometer supply is monitored in MC 68.
XP1 XP2
K2 K1 Anode preheating
Anode vorheizen
A
Cathode error
Katode Fehler
e-
Cathode potential
Katodenpotential
IKP ISP +15V
-15V+24Vn.c.
IAP
Suppressor potential
Suppressor Potential
Anode potential
Anodenpotential
Anode on/ein
Emission on/ein F3=T1A
F1=T2A F4=M0,032A
F2=T3,15A
Fig. 13 Mass spectrometer supply MSV

BG 805 457 BE / C (0204) HLT 2xx 17
2.4.3 Electrometer pre-amplifier EVV
The electrometer pre-amplifier converts the current flowing from the ion collector of the mass
spectrometer into a voltage signal. It has four amplification stages. The MC 68 control board
selects the required amplification stage and processes the analog output signal. The
detection limit in the most sensitive range is approximately 1x10-15 A.
Fig. 14 Ion collector pre-amplifier unit
NOTE:
The ion collector pre-amplifier unit (→Fig. 14) cannot be opened and repaired. The
complete unit has to be replaced in the event of a fault.

18 BG 805 457 BE / C (0204) HLT 2xx
2.5 Electronics
2.5.1 MC 68 Control board
XP3
J2 J1
XP7_MC68 XP6_MC68
DIP switch S1
DIP-Schalter S1
1=PROCESSOR RESET
2=GLOBAL RESET
3=UNITS / SUPER GLOBAL RESET
4=not evaluated
wird nicht ausgewertet
Flash PROM
L H
Lithium
Accumulator
Jumper XJ1
DIP switch S2
DIP-Schalter S2
1=PERMANENT "Burn in"
2=
3=
4=
not evaluated
wird nicht ausgeführt
Fig. 15 MC 68, components side

BG 805 457 BE / C (0204) HLT 2xx 19
2.5.2 I/O board
J2J1
XP5_IO
XP1_IO XP2_IO
F2=T0,8A
F1=T0,8A
F3=T0,315A
Fig. 16 I/O board

20 BG 805 457 BE / C (0204) HLT 2xx
2.5.3 Wiring board
XS2_MSV
XS1_MSV
XS2_I/O
XS6_MSV XS7_MC68
XS1_I/O
XP12
XS10
XP22
XP9
XP21
XP20 XP11
XS14
XS24
XP32
XS8
XS31
XP23
XS30 XS29 XS16 XS15 XS3 XS4 XP17 XP18
XP13
XS5
F3=T4A
F2=T0,315A
F1=Gas fuse 350V
Gasableiter 350V
Fig.17 Wiring board