SMC Networks LVD Series User manual

High Purity Chemical Valve
Compact Type
Space saving, compact type is available.
Compact type is introduced as a new series to complement
conventional Series LVC with integral fittings.
Select a series according to the flow rate and
installation requirements.
Mounting base dimensions conform to SEMI
Standard, F65-1101. (Except for LVD10)
Body:
New
PFA
Diaphragm:
PTFE
Actuator section:
PPS
Body:
New
PFA
Diaphragm:
PTFE
Actuator section:
PPS
Body:
New
PFA
Diaphragm:
PTFE
Actuator section:
PPS
Space saving, compact type is available.
Class2
LVC20
54.5
79
LVD20
54.5
67
Class3
79
106
LVD30
79.5
83
Class4
96
131
LVC40 LVD40
82
93
Class5
LVC50
129
154
LVD50
105.5
114
A
B
(mm)
Dimension across inlet/
outlet ports: Reduced by up to
29 %
Dimension across inlet/
outlet ports: Reduced by up to
29 %
A
LVC
B
LV D
qe
w
r
Body
Actuator section
Integral clean one-touch fitting construction
(Series KP is used.)
Can select female thread (M5 x 0.8).
Piping from 4 directions are possible.
(Made to Order)
Integral fittings construction
HYPER FITTING®‚
Series LQ1 is used.
Series LVD
Integral tubing (construction)
CAT.ES70-24 -UK
A
LVC30

2
4
8
10
16
LVD10
LVD20
LVD30
LVD40
LVD50
2.1
(0.09)
8.4
(0.35)
346810 12 19 25 1/8 3/16 1/4 3/8 1/2 3/4 1
31.2
(1.3)
45.6
(1.9)
120
(5)
Applicable tubing size
Metric size Inch size
Flow
characteristics
Av x 10
-6
m
2
(Cv)
Series
Orifice
diameter
Variations
With flow rate adjustment With by-pass With flow rate adjustment & by-pass
Diaphragm (PTFE)
Special diaphragm construction ensures
gentle opening and closing that prevents
the formation of micro-bubbles.
Piston damper
Absorbs piston momentum to minimize
impact-induced particle generation.
Buffer
Protects diaphragm from deformation
and damage due to back pressure.
Integral fittings construction
Offers quadruple seal construction. Nut lock
mechanism. High flexural strength. Different
tubing sizes can be selected.
Pilot port
Integral clean one-touch fittings construction
Can select female thread (M5).
Body (New PFA)
Compatible with chemicals such as acids,
bases and ultra de-ionized water.
Guide ring
Eliminates lateral motion of the poppet
which reduces internal leakage.
Minimal residual liquid
Residual liquid is minimized by the tapered
shape and integral fitting construction,
allowing liquid to flow smoothly, achieving
improved swept flow characteristics.
Features 1
With reducer Basic size
4
8
10
16
LVD20
LVD30
LVD40
LVD50
8.4
(0.35)
31.2
(1.3)
681012 19 1/4 3/8 1/2 3/4
45.6
(1.9)
120
(5)
Applicable tubing size
Metric size Inch size
Flow
characteristics
Av x 10
-6
m
2
(Cv)
Series
Orifice
diameter
Option
Integral fittings
Integral tubing (construction)

1
How to Order
Integral Fitting Type (Hyper Fittings)
Series LVD
Connecting tubing
outside diameter
ø3
ø4
ø6
ø8
ø10
ø12
ø19
Body class
21
Basic size With reducer
345
03
04
06
08
10
12
19
03
05
07
11
13
19
Symbol
Metric sizes
Inch sizes
Applicable tubing size
Application
Ports A & B same size
Refer to the
applicable tubing
table to the left
Different diameter tubings can be selected within
the same body class.
Different diameter tubing can not be selected for the
body size 1.
Symbol
Nil
Port B (OUT) different dia. size
None
With flow rate adjustment
With by-pass
With flow rate adjustment & by-pass
Note) Refer to “Variations” in the table
below for option combinations.
Options can not be combined each
other.
Nil
1
2
3
Option
Body class
1
2, 3, 4, 5
1, 2, 3, 4, 5
Thread type
ø4 one-touch fitting
ø6 one-touch fitting
M5
Symbol
Nil
2
Pilot port thread type
Body class
LVD 1 0 03S
Symbol
1
2
3
4
5
Body class
1
2
3
4
5
Orifice dia.
ø2
ø4
ø8
ø10
ø16
Valve type
0
1
2
N.C.
N.O.
Double acting
Variations
N.C.
N.O.
N.C.
N.C.
N.C.
PA
BA
PA
BA
PA
BA
PB
PB
BA
N.C.
Double
acting
N.C.
Double
acting
N.C.
Double
acting
N.C. N.O.
Double
acting
Inch
Valve type
Model
Orifice diameter
Metric
Tubing O.D.
Symbol
Type
Basic type
With flow
rate
adjust-
ment
With
by-pass
With flow
rate
adjust-
ment &
by-pass
LVD10
ø2
4
ø3, 1/8
LVD20
ø4
4, 6
1/8, 3/16, 1/4
LVD30
ø8
6, 8, 10
1/4, 3/8
LVD50
ø16
12, 19
1/2, 3/4
LVD40
ø10
10, 12
3/8, 1/2
PA
PB
BA
PA
BA
PA
PB
BA
PA
BA
PA
PB
BA
Body Diaphragm Note
Actuator section
End plate
Symbol
PFA
PFA
PPS
PPS
PTFE
PTFE
—
Ammonium hydroxide
compatible
Nil
N
Material
Note) Refer to “Variations”
in the table below
for valve type
combinations.
1/8
3/16
1/4
3/8
1/2
3/4
Double
acting
Double
acting
Double
acting
Double
acting

2
Series LVD
Standard Specifications
Model LVD10
3, 4
1/8
ø2
2.1
0.09
ø4 x ø3 tubing ø6 x ø4 tubing
LVD20
4, 6
1/8, 3/16, 1/4
ø4
8.4
0.35
0 to 0.5
0.3 or less
0 to 0.3
0.2 or less
1
0 (with water pressure)
0.3 to 0.5
M5
0 to 100
0 to 60
LVD30
6, 8, 10
1/4, 3/8
ø8
31.2
1.3
LVD50
12, 19
1/2, 3/4
ø16
120
5
LVD40
10, 12
3/8, 1/2
ø10
45.6
1.9
0.04 0.09 0.16 0.400.19
Orifice diameter
Withstand pressure (MPa)
Operating pressure (MPa) <A씮B flow>
Valve leakage (cm3/min)
Pilot air pressure (MPa)
Fluid temperature (°C)
Ambient temperature (°C)
Weight (kg)
Metric
Inch
Av x 10-6m2
Cv
Tubing O.D.
Back pressure (MPa)
Specific Product Precautions
1. Connect tubing with special tools.
Refer to pages 9 through 11 regarding tubing connection and special tools.
2. Tighten the nut to the end surface of the body. As a guide, refer to the
proper tightening torques shown below.
Piping
Caution
Tightening torque for piping
Body class Torque (Nm)
0.3 to 0.4
0.8 to 1.0
1.0 to 1.2
2.5 to 3.0
2
3
4
5
Different Diameter Tubing Applicable with Reducer
Different diameter tubing can be selected (within a body class) by using a nut and
insert bushing (reducer).
Different diameter tubing can not be selected for the body size 1.
Note) Refer to page 9 for information on changing tubing sizes.
Body class
1
2
3
4
5
Tubing O.D.
Metric sizes Inch sizes
With reducer
Be sure to read before handling. Refer to pages15 through 18 for safety
instructions and high purity chemical valve precautions.
Flow
characteristics
Pilot port
size
One-touch fitting
Threaded
3 1/8 3/164 1/48 3/810 12 19 1/2 3/46

3
Integral Fitting Type (Hyper Fittings) Series LVD
Construction
No.
1
2
3
4
5
6
7
8
Description Material
Parts list
Actuator section
Body
Diaphragm
End plate
Insert bushing
Nut
Collar
Flow rate adjuster section
PPS
PFA
PTFE
PPS
PFA
PFA
PFA
PPS
Standard type
N.C. type N.O. type Double acting type
With flow rate adjustment With by-pass
With reducer
A
B
A
B
A
B
q
ee
tyrw
q
e
q
i
i
u
ty
PB
PA
A
B
PB
PA
AB
PB
PA
ABAB
PA
PB

4
Series LVD
Dimensions
Model
LVD1-S
LVD2-S
LVD3-S
LVD4-S
LVD5-S
A
20
30
35
35
45
B
20
30
35
35
45
F
46
67
83
93
114
D
39
56
62
62
76
H
11.5
13
14.5
14.5
17.5
J
4.5
4
6
6
8
K
11
20
22
22
32
L
30
44
50
50
64
M
5
7
7
7
7
P
ø6
ø6
ø6
ø6
Q
28
31.5
36
36
38.5
R
22.5
17
21
21
25
V
M5
M5
M5
M5
M5
N
21
23
37
39
52
C
45
54.4
79.5
82
105.5
E
9.5
11
17.5
20
25
G
23
28.5
45.5
48
65
(mm)
Dimensions
ø4
(5/32")
Basic type
(Q)
C
(F)
N
D A L
K
HG
E
J
B
PA
PB
A
B
2-Pone-touch fitting
4-øM
Sensor (Breathing port)
R
A
B
2-V
PA
PB
Pilot port threaded type

5
Integral Fitting Type (Hyper Fittings) Series LVD
With flow rate adjustment
With by-pass
With flow rate adjustment & by-pass
Model
LVD1-S
LVD2-S
LVD3-S
LVD4-S
LVD5-S
S
14
11.5
26
26
29.5
(mm)
Dimensions
Model
LVD2-S
LVD3-S
LVD4-S
LVD5-S
T
28
34
35
57
U
9.6
17.5
20
25
(mm)
Dimensions
Model
LVD2-S
LVD3-S
LVD4-S
LVD5-S
S
11.5
26
26
29.5
T
28
34
35
57
U
9.6
17.5
20
25
(mm)
Dimensions
U
U
(Max. S)
(Max. T)
(Max. T)
(Max. S)
A
B
PA
PB
A
B
PA
PB
PA
PB
A
B

6
Tube Extensions
Series LVD
Note) Refer to “Variations” in the table
below for option combinations.
N.C.
N.O.
N.C.
Type
Basic type
With flow
rate
adjust-
ment
Variations
Inch
Model
Orifice diameter
Metric
Tubing O.D.
Symbol
LVD20-T
ø4
6
1/4
LVD30-T
ø8
10
3/8
LVD50-T
ø16
19
3/4
LVD40-T
ø10
12
1/2
Valve type
None
With flow rate adjustment
Nil
1
Option
Body class
ø6 one-touch fitting
M5
Symbol
Nil
2
Pilot port thread type
Body class
LVD 2 0 06T
Symbol
2
3
4
5
Body class
2
3
4
5
Orifice dia.
ø4
ø8
ø10
ø16
Valve type
0
1
2
N.C
N.O
Double acting
Tubing O.D.
ø6
ø10
ø12
ø19
1/4
3/8
1/2
3/4
Body class
2345
06
10
12
19
07
11
13
19
Symbol
Metric sizes
Inch sizes
Tubing O.D.
PA
BA
PB
BA
PA
PB
BA
BA
PA
PB
PA
BA
N.C.
Double
acting
N.C. N.O.
Double
acting
Body
Symbol
PFA
PFA
Nil
N
Diaphragm Note
Actuator section
End plate
PPS
PPS
PTFE
PTFE
—
Ammonium hydroxide
compatible
Material
How to Order
Note) Refer to “Variations”
in the table below
for valve type
combinations.
Double
acting
Double
acting

7
High Purity Chemical Valve (Compact Type) Series LVD
AB
AB
AB
Specific Product Precautions
Be sure to read before handling.
Refer to pages 15 through 18 for
safety instructions and high purity
chemical valve precautions.
Standard Specifications
ø6 x ø4 tube
LVD20
6
1/4
ø4
8.4
0.35
0 to 0.5
0.3 or less
0 to 0.3
0.2 or less
1
0 (with water pressure)
0.3 to 0.5
M5
0 to 100
0 to 60
LVD30
10
3/8
ø8
31.2
1.3
LVD50
19
3/4
ø16
120
5
LVD40
12
1/2
ø10
45.6
1.9
0.09 0.15 0.360.17
Construction
Standard type
N.C. type N.O. type Double acting type
No.
1
2
3
4
5
Description Material
Parts list
Actuator section
Body
Diaphragm
End plate
Flow rate adjuster section
PPS
PFA
PTFE
PPS
PPS
q
e
q
e
q
e
rw
t
With flow rate adjustment
PB
PA
A
B
PB
PA
A
B
PB
PA
A
B
AB
PA
PB
Orifice diameter
Withstand pressure (MPa)
Operating pressure (MPa)
<A씮B flow>
Valve leakage (cm3/min)
Pilot air pressure (MPa)
Fluid temperature (°C)
Ambient temperature (°C)
Weight (kg)
Metric
Inch
Av x 10-6m2
Cv
Tubing O.D.
Back pressure (MPa)
Flow
characteristics
Pilot port
size
One-touch fitting
Threaded
Model

8
Series LVD
PA
PB
AB
AB
PA
PB
PA
PB
AB
Dimensions
Dimensions
Model
LVD2-T
LVD3-T
LVD4-T
LVD5-T
A
30
35
35
45
B
30
35
35
45
F
104
136
137
169.5
D
56
62
62
76
H
13
17.5
17.5
17.5
J
4
6
6
8
K
20
22
22
32
L
44
50
50
64
M
7
7
7
7
P
ø6
ø6
ø6
ø6
Q
31.5
36
36
38.5
T
17
21
21
25
U
M5
M5
M5
M5
N
30
37
39
52
C
61
79.5
82
105.5
E
14.5
17.5
20
25
G
35
42.5
45
65
(mm)
(Max. S)
Model
LVD2-T
LVD3-T
LVD4-T
LVD5-T
S
13
26
26
29.5
(mm)
Dimensions
Breathing port
C
(F)
(Q)
B
J
E
G
H
2-Pone-touch fitting
D A
K4-øM
Basic type
With flow rate adjustment
N
L
Pilot port threaded type
2-U
T

9
Fittings and Special Tools
Series LVD
Fittings
How to order fitting parts
Tubing O.D.
1/8", ø3
ø4
1/8"
ø4
3/16"
ø6
1/4"
ø6
ø8
ø10
1/4"
3/8"
ø10
ø12
3/8"
1/2"
ø12
1/2"
3/4", ø19
Body class
1
2
3
4
5
Symbol
03
04
03
04
05
06
07
06
08
10
07
11
10
12
11
13
12
13
19
Tubing size
Body class
1LQ1 U 03
Symbol
1
2
3
4
5
Body class
1
2
3
4
5
Type of part
Symbol
U
B
N
Type of part
Nut & Insert bushing
Insert bushing
Nut
∗Type U is recommended when changing tubing sizes.
Insert bushing
LQ-2B07 Nut
LQ-2N07
Tubing
Changing the tubing size
Example) Changing the tubing from an outside diameter of 1/4" to 1/8" in body class 2.
Prepare an insert bushing and nut for 1/8" O.D. tubing (LQ-2U03) and change the tubing size.
(Refer to the section on how to order fitting parts.)
Note) Tubing is sold separately.
Tubing O.D. 1/4"
LQ-2U07
(Basic size)
Body
class
1
2
3
4
5
34681012191/83/16 1/4 3/8 1/2 3/4
Tubing O.D.
Metric sizes Inch sizes Nut
Yes
Yes
Insert
Yes
Yes
Collar (Insert assembly)
No
Yes
Component parts
Part composition
Changing tubing sizes
The tubing size can be changed within the same body class (body size) by replacing the nut and insert bushing.
Insert bushing
LQ-2B03
Nut
LQ-2N03
Tubing
Collar
Tubing O.D. 1/8"
LQ-2U03
(Reducer type)
Basic size
Reducer type

10
Series LVD
How to order fitting jigs
LQ G J
Type
Insert pin/Holder type
Body
class
Symbol
J, K
L, M
1, 2
Insert pin
(Single)
Part No.Description
Replacement parts
Holder
(Single)
Special Tools
Symbol
Nil
B
Nil
NMetric size Inch size
Option
None
With
bracket
Option (L/M type only)
LQ-GP 2 J -
Body class
(Refer to Table 1)
Type
07
Tubing size symbol
(Refer to Table 1)
LQ-GH J - 07
Type
Tubing size symbol
(Refer to Table 1)
Insert pin
holder
assembly
(with the
parts case)
LQ-GP J-
Type
Nil
NMetric size
Inch size
Insert pin/
Holder type
Nil
SResin
Stainless steel
Insert pin material
(J/K type only)
Nil
SResin
Stainless steel
Insert pin material
(J/K type only)
1, 2, 3,
4, 5, 6
Body
class
Type
J
L
1
2
1
2
3
4
5
6
ø3
03
—
03
—
—
—
—
—
1/8"
03
03
03
03
—
—
—
—
3/16"
—
05
—
05
—
—
—
—
ø6
—
06
—
06
06
—
—
—
ø4
04
04
04
04
—
—
—
—
1/4"
—
07
—
07
07
—
—
—
ø10
—
—
—
—
10
10
—
—
3/8"
—
—
—
—
11
11
—
—
ø12
—
—
—
—
—
12
12
—
ø19
—
—
—
—
—
—
19
19
ø25
—
—
—
—
—
—
—
25
1/2"
—
—
—
—
—
13
13
—
3/4"
—
—
—
—
—
—
19
19
1"
—
—
—
—
—
—
—
25
ø8
—
—
—
—
08
—
—
—
Tubing O.D.
Metric sizes Inch sizes
Table 1 Tubing size symbols
Note1) Replacement part type J shows the parts for LQ-GJ and LQ-GK.
Replacement part type L shows the parts for LQ-GL and LQ-GM.
Resin
Stainless steel
(J/K type ony)
Nil
S
Insert pin material
Option
LQ-GBL
Part No.
Description
Bracket
assembly
L type
J type K type
M type (for short piping)
Note 1) Compatible pins and holders
are included with all sizes.
(with the parts case)

11
High Purity Chemical Valve (Compact Type) Series LVD
ø36
76
53127
63
43
117
LQ-GJ
Special Tools
LQ-GJ LQ-GK
LQ-GM LQ-GL
(Max. 50)114
30
24
45 (adjustable)
ø36
53
63
43
SET POS.
LQ-GK
Dimensions
6
6
112
87
60
191
207
85
50
(Max. 91)
4-R3
40 28
4-R3
LQ-GL
SET POS.
6
6
(Max. 91)
112
87
60
325
342
85
50
4-R3
40 28
4-R3
SET POS.
LQ-GM

12
Series LVD
Insert
bushing
Tubing
SET POS.
Holder assembly replacement screw
Holding
screw
Lever
Insert pin assembly replacement screw
J type
K type
End face
End face
Standard size
Reducer type
Assemble fittings following the procedure shown below.
Fitting Assembly Procedure
Sectional view
Body
• Be careful not to scratch or
dent the seal of the insert bus-
hing. (Refer to the illustration
on the left.)
• When the insert bushing inser-
ted, its tubing end should be
closer to seal side than the mi-
nimum position. (Refer to the
illustration on the left.)
Precautions on installation
Optimum
position
Minimum
position Seal
Insert
bushing
Tubing
J type fitting assembly procedure
K type fitting assembly procedure
Pull out the lever pin q. Rotate the lever assembly
wto align the holes on the lever assembly wand
the base e. Insert the lever pin qinto the holes to
fix the lever assembly w.
Place the insert bushing ton the insert pin
assembly r.
Cut the end of the tubing yat a right angle and pass
it through the fitting nut
u . After placing the tubing y
in the holder assembly i, push it onto the insert
bushing tuntil it stops and clamp it with the hook o.
Press the insert bushing tinto the tubing yby
turning the lever assembly w.
To replace the insert pin assembly rand holder
assembly i, use the insert pin assembly
replacement screw !0 and the holder assembly
replacement screws !1, respectively.
Tighten the fitting nut uuntil it reaches the prescribed
position on the body (end face). As a guide, refer to the
proper tightening torques shown below.

For procedure to set and press fit the insert pin
assembly, refer to L, M type fitting assembly
procedures.

For procedure to set the tubing, refer to J type
procedure.
Refer to J type assembly procedure.
Note 1) In case of body class 1, the nut
should be tightened manually.
Nut tightening torque for piping
Body class LQ1
0.3 to 0.4 LQ2 1.5 to 2.0
2
Torque (Nm)
1
1
2
3
4
5
5
6

When the tubing yis curved, straighten it out
before using it.

The tubing ymay slip if there is oil or dust, etc.,
on the holder assembly i. Remove the contami-
nation using alcohol or another suitable cleaner.
Caution
iHolder assembly
tInsert bushing
qLever pin
eBase
oHook
tInsert
bushing
yTubing
rInsert pin assembly
u Fitting nut
yTubing
wLever assembly
!0 Insert pin assembly
replacement screw
!1 Holder assembly replacement screw
Packed state

13
High Purity Chemical Valve (Compact Type) Series LVD
Assemble fittings following the procedure shown below.
Fitting Assembly Procedure
End face
End face
Standard size
Reducer type
L type
M type
SETPOS.
Space
Sectional view
Body
• Be careful not to scratch or dent the seal of the insert
bushing. (Refer to the illustration on the left.)
• When the insert bushing inserted, its tubing end should
be closer to seal side than the minimum position.
(Refer to the illustration on the left.)
Precautions on installation
Optimum position
Minimum position Seal
Insert bushing
Tubing
L/M type fitting assembly procedure
Turn the lever qand move to SET POS.
Place the insert bushing eon the insert pin
assembly w.
Cut the end of the tubing rat a right angle and pass
it through the fitting nut
t .
After placing the tubing rin the holder assembly y,
push it onto the insert bushing euntil it stops and
clamp it with the knob u.
As a guide when tightening the tubing rwith the
knob u, maintain a uniform gap on both sides of the
holder.
Press the insert bushing einto the tubing rby
turning the lever q. (Pressing in can be accomplished
with 2 or 3 turns of the lever
q .)
To replace the insert pin assembly wand holder
assembly y, use the insert pin assembly
replacement screw oand the holder assembly
replacement screws !0, respectively.
In case of M type for short piping, remove the handle
!1 , slide the clamp assembly !2 to attain the specified
length, then secure it again with the handle
!1 .
Tighten the fitting nut
t to the prescribed position
on the body (end face).
As a guide, refer to the proper tightening torques
shown below.
Nut tightening torque for piping
Body class LQ1
0.3 to 0.4
0.8 to 1.0
1.0 to 1.2
2.5 to 3.0
5.5 to 6.0
LQ2
1.5 to 2.0
3.0 to 3.5
7.5 to 9
11 to 13
—
2
3
4
5
6

When the tubing ris curved, straighten it out
before using it.

The tubing rmay slip if there is oil or dust, etc. on
the holder assembly y. Remove the contamination
using alcohol or another suitable cleaner.
Caution
Torque (Nm)
1
2
3
4
5
6
7
Note 1) In case of body class 1, the
nut should be tightened
manually.
qLever
u Knob wInsert pin assembly
eInsert bushing
yHolder assembly
eInsert
bushing
rTubing
tFitting nut
rTubing
!2 Clamp assembly
!1 Handle
(M type only)
qLever
oInsert pin assembly
replacement screw
!0 Holder assembly replacement screw
(2 places)

14
Applicable Fluids
Material and fluid compatibility check list
for High Purity Chemical Valves
Acetone
Ammonium hydroxide
Isobutyl alcohol
Isopropyl alcohol
Hydrochloric acid
Ozone (dry)
Hydrogen peroxide Concentration 5% or less, 50°C or less
Ethyl acetate
Butyl acetate
Nitric acid (except fuming nitric acid) Concentration 10% or less
DI water
Sodium hydroxide Concentration 50% or less
Nitrogen gas
Super pure water
Toluene
Hydrofluoric acid
Sulfuric acid (except fuming sulfuric acid)
Phosphoric acid Concentration 80% or less
Chemical
The material and fluid compatibility check list provides reference values as a guide only.
Note 1) Since static electricity may be generated, implement suitable countermeasures.
Note 2) Use caution as permeation may occur. The permeated fluid may effect the parts of other materials.
• Compatibility is indicated for fluid temperatures of 100°C or less.
• The material and fluid compatibility check list provides reference values as a guide only, therefore we do not guarantee the application to our product.
• The data above is based on the information presented by the material manufacturers.
• SMC is not responsible for its accuracy and any damage happened because of this data.
Note 1, 2)
Note 2)
Note 1, 2)
Note 1, 2)
Note 1, 2)
Note 1, 2)
Note 2)
Note 1, 2)
Note 2)
Compatibility
Table symbols : Can be used
: Can be used in certain conditions
: Cannot be used

15
Safety Instructions
Series LVD
These safety instructions are intended to prevent a hazardous situation and/or
equipment damage. These instructions indicate the level of potential hazard by
labels of "Caution", "Warning" or "Danger". To ensure safety, be sure to
observe ISO 4414Note 1), JIS B 8370Note 2) and other safety practices.
1. The compatibility of equipment is the responsibility of the person who designs
the system or decides its specifications.
Since the products specified here are used in various operating conditions, their compatibility for the
specific system must be based on specifications or after analysis and/or tests to meet your specific
requirements. The expected performance and safety assurance will be the responsibility of the
person who has determined the compatibility of the system. This person should continuously review
the suitability of all items specified. Referring to the latest catalogue information with a view to giving
due consideration to any possibility of equipment failure when configuring a system.
2. Only trained personnel should operate machinery and equipment.
Assembly, handling or maintenance of machinery and equipment should be performed by trained and
experienced operators.
3. Do not service machinery/equipment or attempt to remove components
until safety is confirmed.
4. To promote safe operation, be sure to observe company standards and
legal regulations, etc.
Refer to ISO4414, JIS B 8370 (pneumatic system axiom), labour health and safety laws and other
safety regulations.
Note 1) ISO 4414: Pneumaticfluid power --General rules relating to systems
Note 2) JIS B 8370 : Pneumatic system axiom.
Caution : Operator error could result in injury or equipment damage.
Warning : Operator error could result in serious injury or loss of life.
Danger : In extreme conditions, there is a possible result of serious injury or loss of life.
Warning

16
1. Confirm the specifications.
Give careful consideration to operating conditions such as the
application, fluid and environment, and use within the opera-
ting ranges specified in this catalogue.
2. Fluids
Operate after confirming the compatibility of the product's com-
ponent materials with fluids, using the check list on page 14.
Contact SMC regarding fluids other than those in the check
list.
Operate within the indicated fluid temperature range.
3. Maintenance space
Ensure the necessary space for maintenance and inspections.
4. Fluid pressure range
Keep the supplied fluid pressure within the operating pressure
range shown in the catalog.
5. Ambient environment
Operate within the ambient operating temperature range. After
confirming the compatibility of the product's component mate-
rials with the ambient environment, operate so that fluid does
not adhere to the product's exterior surfaces.
6. Liquid seals
When circulating fluid
Provide a relief valve in the system so that fluid does not get
into the liquid seal circuit.
7. Countermeasures for static electricity
Since static electricity may be generated depending on the
fluid being used, implement suitable countermeasures.
Warning
1. If air leakage increases or equipment does
not operate properly, stop operation.
After mounting, perform suitable function and leak tests to con-
firm that the mounting is correct.
2. Instruction manual
Mount and operate the product after reading the manual care-
fully and understanding its contents. Also keep the manual
where it can be referred to as necessary.
MountingMounting
Design & SelectionDesign & Selection
Warning
1. Preparation before piping
Before piping is connected, it should be thoroughly blown out
with air (flushing) or washed to remove chips, cutting oil and
other debris from inside the pipe.
Install piping so that it does not apply pulling, pressing, ben-
ding or other forces on the valve body.
2. Use the tightening torques shown below for
the threaded pilot port.
3. Use pilot ports and sensor (breathing) ports
as indicated below.
In the case of N.C. and N.O. types, the port which does not re-
ceive operating pressure is released to atmosphere. When in-
take and exhaust directly from the valve is not desired due to
problems with the ambient environment or scattering of dust,
etc., install piping and perform intake and exhaust at a location
which does not present a problem.
4. See page 12 regarding tubing connections.
Caution
1. Use clean air.
Do not use compressed air which includes chemicals, synthe-
tic oils containing organic solvents, salt, or corrosive gases,
etc., as this may cause damage or malfunction.
Operating Air SupplyOperating Air Supply
Piping
Warning
Operating port
M5
Operating port tightening torque
Torque (Nm)
1/6 turn with a tightening tool after first tightening by hand
High Purity Chemical Valve, Compact Type Precautions 1
Be sure to read before handling.
Series LVD
N.C.
N.O.
Double acting
PA Port
Pressure
Breathing
Pressure
PB Port
Breathing
Pressure
Pressure
Sensor (breathing) port
Breathing
Breathing
Breathing

17
High Purity Chemical Valve, Compact Type Precautions 2
Be sure to read before handling.
Series LVD
1. Maintenance should be performed in accor-
dance with the procedures in the instruction
manual.
Incorrect handling can cause damage or malfunction of machi-
nery and equipment, etc.
2. Before removing equipment or compressed
air supply/exhaust devices, shut off the air
and power supplies, and exhaust compres-
sed air from the system.
Further, when restarting equipment after re-
mounting or replacement, first confirm sa-
fety and then check the equipment for nor-
mal operation.
3. Perform work after removing residual chemi-
cals and carefully replacing them with DI
water or air, etc.
4. Do not disassemble the product. Products
which have been disassembled cannot be
guaranteed.
If disassembly is necessary, contact SMC.
5. In order to obtain optimum performance from
valves, perform periodic inspections to con-
firm that there are no leaks from valves or fit-
tings, etc.
MaintenanceMaintenance
Warning
1. Removal of drainage
Flush drainage from filters regularly.
Caution
1. Do not use in a location having an explosive
atmosphere.
2. Do not operate in locations where vibration
or impact occurs.
3. Do not use in locations where radiated heat
will be received from nearby heat sources.
Operating EnvironmentOperating Environment
Warning
1. Installation of tubing
1) Using tube cutters TK-1, 2 or 3, take a tube having no flaws
on its periphery and cut it off at a right angle. Do not use
pinchers, nippers or scissors, etc. The tubing might be cut
diagonally or flattened, making installation impossible or
causing problems such as disconnection and leakage.
2) Hold the tube and push it in slowly, inserting it securely all
the way into the fitting.
3) After inserting the tubing, pull on it tightly to confirm that it
will not come out. If it is not installed securely all the way in-
to the fitting, problems such as leakage or disconnection of
the tubing can occur.
4)Grease is not used due to the series KP oil-free specifica-
tions. For this reason, greater insertion force is required
when tubing is installed. In particular, polyurethane tubing
may fold when inserted due to its softness. Hold the end of
the tubing, and insert it all the way in slowly and securely.
Refer to dimension “M” in the dimension drawings for gui-
dance on the insertion depth of tubing.
2.Removal of tubing
1) Push in the release button sufficiently, pressing the collar
evenly around its circumference.
2) Pull out the tubing while holding down the release button so
that it does not pop out. If the release button is not pressed
down sufficiently, there will be increased bite on the tubing
and it will become more difficult to pull it out.
3) When the removed tubing is to be used again, first cut off
the section of the tubing which has been chewed.
Using the chewed portion of the tube as it is can cause pro-
blems such as leakage or difficulty in removing the tubing.
Caution
Installation and Removal of Tubing for Pilot Port SectionInstallation and Removal of Tubing for Pilot Port Section
1. When using tubing brands other than SMC, confirm that the
tubing outside diameter tolerances satisfy the following
specifications.
1) Polyolefin tubing ±0.1 mm
2) Polyurethane tubing +0.15 mm
–0.2 mm
3) Nylon tubing ±0.1 mm
4) Soft nylon tubing ±0.1 mm
Do not use tubing if the outside diameter tolerance is not satis-
fied. It may not be possible to connect the tubing, or leakage
or disconnection may occur after connection.
Polyolefin tubing is recommended for use with clean room fit-
tings. Note that while other types of tubing will satisfy perfor-
mance standards for leakage and tubing pull-out strength, etc.,
the degree of cleanliness will deteriorate.
Caution
Precautions on Use of Other Tubing BrandsPrecautions on Use of Other Tubing Brands

1. Operate within the ranges of the maximum
operating pressure and back pressure.
Warning
1. Please note that when the product is
shipped from the factory, gases such as N2
and air may leak from the valve at a rate of 1
cm3/min (when pressurized).
2.
When operated at a very low flow rate, the series
LVD with flow rate adjustment may vibrate, etc.
depending on the operating conditions.
Therefore, operate it after careful examination of
the flow rate, pressure and piping conditions.
3. In the series LVD, water hammering may occur
depending on the fluid pressure conditions. In
most cases, improvement is possible by
adjusting the pilot pressure with a speed
controller, etc., but the flow rate, pressure and
piping conditions should be reviewed.
Caution
Precautions on UsagePrecautions on Usage
4. To adjust the flow rate for the series LVD
with flow rate adjustment, open gradually
starting from the fully closed condition.
Opening is accomplished by turning the
adjustment knob counter clockwise.
Additionally, do not apply any unreasonable
force to the adjustment handle when nearing
a fully opened or closed state. This may
result in deformation of the orifice sheet
surface or damage to the threaded part of
the adjustment handle.
It is in the fully closed condition when the
product is shipped from the factory.
5. After a long period of nonuse, perform a test
run before beginning regular operation.
6. Since the LVD is packaged in a clean room
use sufficient care in handling when opened.
7.
In the case of the integral tubing type, be certain
that the fittings are not applicable by heating up
the tubing with a heat gun, for example.
Caution
High Purity Chemical Valve, Compact Type Precautions 3
Be sure to read before handling.
Series LVD
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Specifications are subject to change without prior notice
and any obligation on the part of the manufacturer.
Produced and printed by SMC European Marketing Centre 11/03