SMC Networks CYV Series User manual

(Conceptual drawing)
Vacuum chamber
(Transfer unit)
Series CYV
CAT.ES20-158 A
Simplifies and reduces
the size of equipment
Since the cylinder can be installed inside a vacuum
chamber, it contributes to simplifying
and reducing the size of a transfer system.
Air cylinder for transfer
in vacuum environments (1.3 x 10
- 4Pa)
Rodless Cylinder for Vacuum
Series CYV
ø15, ø32

0.1
Stainless steel
linear guide &
low particulate generation
vacuum grease
Operation cycles
Particulate generation [particles/cycle]
5.0
0.0 1000000 200000 1000000
There is no particulate generation due
to friction, since the construction does
not allow contact between the cylinder
tube's exterior surface and the slide
table's internal surface.
Non-contact construction
No contact
Cylinder tube
Slide table
Note 1) This data indicates deterioration with age of the average number
of particles per operation under the following test conditions.
<Test conditions>
• Cylinder: CYV32-100 •Work piece weight: 5kg
• Average speed: 100mm/s
• Measurement environment: Operation in the atmosphere after
baking at 150°C for 48 hours.
Note 2) This data is considered typical but not guaranteed.
Note 3) A particulate generation test has been conducted in a vacuum
environment of 10-⁵Pa.
A special cylinder tube using extruded
aluminum material is employed.
No deflection or contact occurs even
for long strokes, since the cylinder is
rigidly attached to the base and the
slide table is independently supported
by a linear guide.
Special cylinder tube
Long strokes
(Max. 700mm)
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Air cylinder for transfer
Low particulate generation
Speed [mm/s]
Relationship between speed and impact acceleration
Impact acceleration [m/s²]
50 100 150 200 250 300
5
0
Low particulate generation at the stroke ends
Particulate generation
has been reduced at
the stroke ends by
reducing impact using
a sine cushion and by
stopping the stroke
using an internal
stopper.
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Rodless Cylinder for Vacuum
Series CYV
ø15, ø32
Particulate generation from the linear
guide unit has been reduced with the use
of a stainless steel linear guide and low
particulate generating vacuum grease.
Reduced initial
particulate
generation
Cleaned, assembled,
inspected and first-stage
packaged in a clean
environment.
Average particle generation (particles >0.1 µ)
is 0.1 particles/cycle. (Atmospheric conditions)
Features 1

in vacuum environments (1.3 x 10-⁴Pa)
1.3 x 10
-
⁷Pa⋅m³/sec
Leakage:1.3 x 10
-
⁷Pa⋅m³/sec or less
(at normal temperatures, excluding gas permeation)
O-ring seals separate vacuum and atmosphere.
Static O-ring seals are used for
all the seals between vacuum
and atmosphere.
Laser marking
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Note 1) The chart above shows the leakage test results
based on a test conducted using this cylinder
construction.
Note 2) To allow fine stroke adjustments, O-ring seals
are installed to separate vacuum and atmos-
phere. Consult SMC if the sealing method
needs to be altered.
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Reduction of outgassing
due to surface treatment
All the external parts (made of
aluminum alloy) such as the body
and slide table are electroless nickel
plated.
Furthermore, external magnets are
coated with titanium nitride.
Note 1) Consult SMC if other specifications
for surface treatment are required.
2
Resin materials
eliminated
Laser marking is employed for
the model designation.
Note 1) The data indicates the leakage
measured in a vacuum environment
of 10-⁵Pa.
Note 2) The leakage test result shown is
based on a test conducted for 10
minutes after the cylinder was
pressurized with helium at 0.1 MPa.
Note 3) This data is considered typical but
not guaranteed.
O-ring seal
Employs a
magnetically
coupled rodless
cylinder with no
air leakage from
moving parts.
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Fine adjustments
at the end of the stroke
Fine adjustments between –2to 0mm
can be made on one side (–4to 0mm
for both sides).
Reduced outgassing
Leakage [Pa⋅m3/sec]
Time [min]
10-⁷
10-⁸
10-⁹
10-¹⁰
0510
Standard value
Leakage test result
Low leakage
Hexagon wrench
Carefully designed for low particulate generation, low leakage,
and low outgassing.
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Features 2

How to Order
CYV 15
Rodless cylinder
for vacuum
15
32 15mm
32mm
Standard stroke
Bore size
200
Bore size (mm)
15, 32
Standard stroke (mm)
100, 150, 200, 250
300, 350, 400, 450
500, 600, 700
Specifications
Magnet Holding Force
Bore size (mm)
Operating environment pressure
Operating atmosphere
Fluid
Action
Proof pressure
Operating pressure range
Leakage
Maximum baking temperature
Ambient and fluid temperature
Piston speed
Stroke adjustment
Cushion
Port size
Lubrication
Atmosphere to 1.3 x 10-⁴ Pa (ABS)
Air and inert gases
Air and inert gases
Double acting
0.5MPa
0.05 to 0.3MPa
1.3 x 10
-
⁷Pa⋅m³/sec or less
(at normal temperatures, excluding gas permeation)
150°C
- 10 to 60°C
50 to 300mm/s
- 2 to 0mm on each side ( - 4 to 0mm total)
Sine cushion (Air cushion)
Vacuum grease for linear guide unit
and inside the cylinder tube
5/16-24UNF 7/16-20UNF
15 32
Bore size (mm)
15
32
Magnet holding
force (N)
59
268
Theoretical Output
15
32
Bore size
(mm)
176
804
0.1
18
80
0.2
35
161
0.3
53
241
Piston area
(mm²)
Operating pressure
(MPa)
(N)
(kg)
Weights
Model
CYV15
CYV32
Standard stroke (mm)
100
1.2
4.2
150
1.4
4.6
200
1.6
5.0
250
1.7
5.5
300
1.9
5.9
350
2.0
6.3
400
2.2
6.7
450
2.4
7.1
500
2.5
7.5
600
2.8
8.3
700
3.2
9.1
1
Rodless Cylinder for Vacuum
Series CYV

Construction
No.
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
Description Material Note
Parts list
Magnet A
Piston side yoke
Piston
Piston seal
Wear ring
Shaft
Cushion ring
Magnet B
External slider side yoke
Hold spacer
Slide table
Insertion guide plate
Round head Phillips screw
Side plate A
Side plate B
Hexagon socket head
cap screw
Spring washer
Flat washer
Plate A
Plate B
Cushion seal
Rare earth magnet
Rolled steel plate
Brass/
Aluminum alloy
Fluoro rubber
Special bearing
Stainless steel
Stainless steel/Brass
Rare earth magnet
Rolled steel
Aluminum alloy
Aluminum alloy
Stainless steel
Stainless steel
Aluminum alloy
Aluminum alloy
Stainless steel
Stainless steel
Stainless steel
Aluminum alloy
Aluminum alloy
Fluoro rubber
Aluminum chromated
Zinc chromated
Electroless nickel
plated/Chromated
—/Electroless nickel plated
Titanium nitride coating
Electroless nickel plated
Electroless nickel plated
Electroless nickel plated
Electroless nickel plated
Electroless nickel plated
Electroless nickel plated
Electroless nickel plated
No.
22
23
24
25
26
27
28
29
30
31
32
33
34
35
36
37
38
39
40
41
42
Description Material Note
Inner cover
Cylinder tube gasket
O-ring
O-ring
Hexagon socket head
set screw
Hexagon socket head
cap screw
Flat washer
Round head Phillips screw
Hexagon socket head
cap screw
Base
Cylinder tube
Tube attaching bracket
Hexagon socket head
cap screw
Flat washer
Hexagon socket head
cap screw
Flat washer
Top cover
Cushion seal holder
O-ring
O-ring
Linear guide
Aluminum alloy
Fluoro rubber
Fluoro rubber
Fluoro rubber
Stainless steel
Stainless steel
Stainless steel
Stainless steel
Stainless steel
Aluminum alloy
Aluminum alloy
Aluminum alloy
Stainless steel
Stainless steel
Stainless steel
Stainless steel
Aluminum alloy
Aluminum alloy
Fluoro rubber
Fluoro rubber
Stainless steel
Electroless nickel plated
Electroless nickel plated
Electroless nickel plated
Electroless nickel plated
Electroless nickel plated
Chromated
CYV15
CYV32
Note) In the material and note columns of the parts list above, the first description is for CYV15 and the second description is for CYV32.
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Rodless Cylinder forVacuum Series CYV

Dimensions
+0.030
H9 0
+0.030
H9 0
(mm)
Model
CYV15
CYV32
A
8
12
B
10.5
16
C
6.4
10.2
ED
9.5
13
EK
4
6
F
12.5
25
G
10
9
H
45
75
HA
23
39
HI
23
39
HL
37.6
63.3
HP
44
73.5
JK
10
12
K
21
20
L
67
90
LD
5.6
9.2
J
M6 x 1
M10 x 1.5
E
4
6
Model
CYV15
CYV32
LW
69
115
MM
M4 x 0.7
M6 x 1
M
6
8
N
4.5
7.5
P
5/16-24UNF
7/16-20UNF
PA
25
50
PB
60
100
PC
10
12
Q
112
147
QW
48
83
R
45
79.5
T
30
34
TA
20
22.5
TB
15
22
TC
0.5
0.5
W
69
115
Y
2.5
3.5
Z
132
165
2-P
2-Counter bore dia. øTB
Counter bore depth TC
4-J
Depth JK
Thread depth PC
(from counter bore surface)
HA
TA TA
HA
HL
Stroke adjustment screw
(inner cover)
Inner cover holding screw Note)
HP
H
AA
LW
R
HI
W
4-MM
øE4-Counter
bore dia.øB
Counter bore
depth C
4-øLD
Thread depth M
A
Depth ED
PB
F
PAK
T
Q + Stroke
Z + Stroke
QW
T
Y L
E depth EK
G
N
Note) Refer to "Cushion Effect (Sine Cushion) and Stroke Adjustment" under Specific Product Precautions on page 11.
Series CYV
3

The allowable load mass moment differs depending on the work piece mounting method, cylinder mounting orientation and piston speed.
To determine whether or not the cylinder can be operated, do not allow the sum (Σαn) of the load factors (αn ) for each mass and moment to exceed "1".
Load mass
Max. load mass
(Static moment/Dynamic moment)
Allowable moment
Model
CYV15
CYV32
mmax
1
5
(kg)
Model
CYV15
CYV32
 Pitch moment
M1 = m x g x (L + B) x 10–3
 Yaw moment
M3 = m x g x (L + A) x 10–3
 Roll moment
M2 = m x g x (L + B) x 10–3
 Pitch moment
Me1 = 1/3 ⋅ We(L + B) ⋅ 10-³∗ Yaw moment
Me3 =1/3 ⋅ We(L + A) ⋅ 10-³∗
We: Load equivalent to impact [N]
m: Load mass [kg] U: Max. speed [mm/s]
g: Gravitational acceleration [9.8m/s³]
M1, 2, 3: Moment [N⋅m]
m:
Load mass [kg]
L:
Distance to load center of gravity [mm]
A, B: Distance to guide shaft [mm]
g:
Gravitational acceleration [9.8m/s2]
Moment generated by the load equivalent to impact at the stroke end
We = 5 x 10–3x m x g x U
∗Average load coefficient
Me1
Moment
Moment generated by the work piece weight even when the cylinder is stopped
(N⋅m)
Model
CYV15
CYV32
A
16.5
27.0
B
25.5
48.0
Static Moment
Dynamic Moment
M1
0.3
3
M2
0.6
4
M3
0.3
3
Me3
Design Parameters 1
(mm)
Model
CYV15
CYV32
A
16.5
27.0
B
25.5
48.0
(mm)
M3
M1M2
m
mm
We We
mx g
M3
m x g
M1
LB
mx g
M2
LB
LA
Guide shaft
mounting surface
Guide shaft
mounting surface
Central axis of guide
Central axis of cylinder
LA
LB
Central axis of guide
Central axis of cylinder
Σαn = Load mass (m)
Max. load mass (mmax) + Static moment (M)
Allowable static moment (M max) + Dynamic moment (Me)
Allowable dynamic moment (Me max) ≤1
∗Average load coefficient
Series CYV
Model Selection 1
4

1. Maximum
load mass
2. Static moment
3. Dynamic moment
m
L1
L2
Selection Calculation
Item
1. Max. load mass
2. Static moment
3. Dynamic moment
Load factor αn
α1 = m/m max
α2 = M/M max
α3 = Me/Me max
Note
Review m.
m max is the maximum load mass.
Review M1, M2, M3.
Mmax is the allowable moment.
Review Me1, Me3.
Me max is the allowable moment.
The selection calculation finds the load factors (αn) of the items below, where the total (Σαn) does not exceed "1".
Σαn = α1 + α2 + α3 ≤1
Operating conditions
Cylinder: CYV32
Mounting: Horizontal wall mounting
Maximum speed: U = 300 [mm/s]
Load mass: m = 1 [kg] (excluding mass of the arm section)
L1 = 50 [mm]
L2 = 50 [mm]
Item Load factor αnNote
α1 = m/m max
= 1/5
= 0.20
Review m.
Σαn = α1+ α2+ (α3a + α3b)
= 0.20 + 0.24 + (0.13 + 0.16)
= 0.73
The result Σαn = 0.73 ≤1 allows operation.
L1B
mx g
M
Me3
We W
L1B
Me1
W
We
L2
A
Central axis
of guide
Guide shaft
mounting surface
M2 = m ⋅ g ⋅ (L1+ B) ⋅ 10–3
= 1 ⋅ 9.8 ⋅ (50 + 48) ⋅ 10–3
= 0.96 [N⋅m]
α2 = M2/M2 max
= 0.96/4
= 0.24
Review M2.
Since M1 andM3are not generated,
review is unnecessary.
We = 5 x 10–3⋅m ⋅ g ⋅ U
= 5 x 10–3 ⋅ 1 ⋅ 9.8 ⋅ 300
= 14.7 [N]
Me3 = 1/3 ⋅ We(L2+ A) ⋅ 10–3
= 1/3 ⋅ 14.7 ⋅ (50 + 27) ⋅ 10–3
= 0.38 [N⋅m]
α3a = Me3/Me3 max
= 0.38/3
= 0.13
Review Me3.
Me1 = 1/3 ⋅ We⋅(L1 + B) ⋅ 10–3
= 1/3 ⋅ 14.7 ⋅ (50 + 48) ⋅ 10–3
= 0.48 [N⋅m]
α3b = Me1/Me1max
= 0.48/3
= 0.16
Review Me1.
Calculation Example
L1
L2
Va
m
Guide shaft mounting surface
Series CYV
Model Selection 2
5

Vertical Operation
When using in vertical operation, prevention of
work piece dropping due to breaking of the
magnetic coupling should be considered. The
allowable load mass and maximum operating
pressure should be as shown in the table below.
Model
CYV15
CYV32
Allowable load mass
mv (kg)
Intermediate Stops
Table deflection due to pitch moment load Table deflection due to yaw moment load
Table deflection due to roll moment load
Moment (N⋅m)
Table Deflection
Note)
Deflection (mm)
Maximum
operating pressure
Pv (MPa)
1
50.3 Model
CYV15
CYV32
Stroke
(mm)
25
30
CYV15 (M1 ) CYV15 (M2) CYV15 (M3 )
CYV32 (M1 )
CYV32 (M2 )
CYV32 (M3 )
0.1 0.2 0.300.1 0.2 0.300.1 0.2 0.30
Moment (N⋅m)
0.02
0.01
0.04
0.05
0.03
0.5 1 1.5 20
0.02
0.01
0.04
0.05
0.03
0.5 1 1.5 20
0.02
0.01
0.04
0.05
0.03
0.5 1 1.5 20
0.02
0.01
0.04
0.05
0.03
0.02
0.01
0.04
0.05
0.03
0.02
0.01
0.04
0.05
0.03
Deflection (mm)
F
L
Central axis of guide
F
A
A
Central axis of guide
L
M2 = F x L M3 = F x L
Moment (N⋅m)
Deflection (mm)
Moment (N⋅m)
Deflection (mm)
Moment (N⋅m)
Deflection (mm)
Moment (N⋅m)
Deflection (mm)
Design Parameters 2
Cushion stroke
Note) Deflection: Displacement of point A when
force acts on point F
Point A: Indicates a measurement point
The cushion effect (smooth start-up, soft stop) is applied only before the stroke end in the stroke ranges
indicated in the table below.
The cushion effect (smooth start-up, soft stop) is not available an intermediate stop or return from an
intermediate stop using an external stopper, etc.
When using an intermediate stop with the above information taken into account, implement measures to
prevent particulate generation and set the operating pressure to no more than 0.3MPa.
M1 = F x L
L
F
A
Series CYV
Model Selection 3
6

Series CYV
Safety Instructions
Note 1) ISO 4414: Pneumatic fluid power -- Recommendations for the application of equipment to transmission and
control systems
Note 2) JIS B 8370: General Rules for Pneumatic Equipment
Warning
Caution : Operator error could result in injury or equipment damage.
Warning : Operator error could result in serious injury or loss of life.
Danger : In extreme conditions, there is a possible result of serious injury or loss of life.
These safety instructions are intended to prevent a hazardous situation and/or
equipment damage. These instructions indicate the level of potential hazard by a
label of "Caution", "Warning" or "Danger". To ensure safety, be sure to
observe ISO 4414
Note 1),JIS B 8370 Note 2) and other safety practices.
1. The compatibility of pneumatic equipment is the responsibility of the person
who designs the pneumatic system or decides its specifications.
Since the products specified here are used in various operating conditions, their compatibility for the
specific pneumatic system must be based on specifications or after analysis and/or tests to meet your
specific requirements.
2. Only trained personnel should operate pneumatically operated machinery and
equipment.
Compressed air can be dangerous if handled incorrectly. Assembly, handling or repair of pneumatic
systems should be performed by trained and experienced operators.
3. Do not service machinery/equipment or attempt to remove components until
safety is confirmed.
1. Inspection and maintenance of machinery/equipment should only be performed after confirmation of
safe locked-out control positions.
2. When equipment is to be removed, confirm the safety process as mentioned above. Cut the supply
pressure for this equipment and exhaust all residual compressed air in the system.
3. Before machinery/equipment is restarted, take measures to prevent shooting-out of cylinder piston
rod, etc. (Bleed air into the system gradually to create back pressure.)
4. Contact SMC if the product is to be used in any of the following conditions:
1. Conditions and environments beyond the given specifications, or if product is used outdoors.
2. Installation on equipment in conjunction with atomic energy, railway, air navigation, vehicles, medical
equipment, food and beverages, recreation equipment, emergency stop circuits, press applications, or
safety equipment.
3. An application which has the possibility of having negative effects on people, property, or animals,
requiring special safety analysis.
7

Series CYV
Actuator Precautions 1
Be sure to read before handling.
1. Confirm the specifications.
The products advertised in this catalog are designed only for
use in industrial compressed air systems. If the products are
used in conditions where pressure, temperature, etc., are
outside the specifications, this may cause damage and/or
malfunction. Do not use in these conditions. (Refer to
specifications.)
Consult SMC if you use a fluid other than compressed air.
2. Intermediate stops
When intermediate stop of a cylinder piston is performed with a
3 position closed center type directional control valve, it is
difficult to achieve stop positions as accurate and precise as with
hydraulic pressure due to the compressibility of air.
Furthermore, since zero air leakages is not guaranteed, it may
not be possible to hold a stop position for an extended period of
time. Contact SMC if it is necessary to hold a stopped position
for an extended period.
1. Operate within the limits of the maximum operating
stroke.
Refer to the standard strokes for the maximum operating stroke.
2. Use a speed controller to adjust the cylinder speed,
gradually increasing from a low speed to the desired
speed setting.
Design Selection
Caution
1. There is a danger of sudden action by air cylinders
if sliding parts of machinery are twisted, etc., and
changes in forces occur.
In such cases, human injury may occur, e.g., by catching hands
or feet in the machinery, or damage to the machinery itself may
occur.Therefore, the machine should be designed to avoid such
dangers.
2. Install a protective cover when there is a risk of
human injury.
If a driven object and moving parts of a cylinder pose a
danger of human injury, design the structure to avoid contact
with the human body.
3. Securely tighten all stationary parts and connected
parts so that they will not become loose.
Especially when a cylinder operates with high frequency or is
installed where there is a lot of vibration, ensure that all parts
remain secure.
4. A deceleration circuit may be required.
When a driven object is operated at high speed or the load is
heavy, a cylinder’s cushion will not be sufficient to absorb the
impact. Install a deceleration circuit to reduce the speed
before cushioning to relieve the impact. In this case, the
rigidity of the machinery should also be examined.
5. Consider a possible drop in operating pressure due
to a power outage, etc.
When a cylinder is used in a clamping mechanism, there is a
danger of work pieces dropping if there is a decrease in
clamping force due to a drop in circuit pressure caused by a
power outage, etc. Therefore, safety equipment should be
installed to prevent damage to machinery and/or human
injury. Suspension mechanisms and lifting devices also
require consideration for drop prevention.
6. Consider a possible loss of power supply.
Measures should be taken to protect against human injury
and equipment damage in the event that there is a loss of
power to equipment controlled by pneumatics, electricity or
hydraulics, etc.
7. Design circuitry to prevent sudden lurching of
driven objects.
When a cylinder is driven by an exhaust center type
directional control valve or when starting up after residual
pressure is exhausted from the circuit, etc., the piston and its
driven object will lurch at high speed if pressure is applied to
one side of the cylinder because of the absence of air
pressure inside the cylinder. Therefore, equipment should be
selected and circuits designed to prevent sudden lurching,
because there is a danger of human injury and/or damage to
equipment when this occurs.
8. Consider emergency stops.
Design so that human injury and/or damage to machinery and
equipment will not be caused when machinery is stopped by
a safety device under abnormal conditions, such as a power
outage or a manual emergency stop.
9. Consider the action when operation is restarted
after an emergency stop or abnormal stop.
Design the machinery so that human injury or equipment
damage will not occur upon restart of operation. When the
cylinder has to be reset at the starting position, install safe
manual control equipment.
8
Warning
Warning

9
Series CYV
Actuator Precautions 2
Be sure to read before handling.
Operating Environment
Maintenance
Air Supply
1. Use clean air.
Do not use compressed air including chemicals, synthetic oils
containing organic solvents, salt or corrosive gases, etc., as it
can cause damage or malfunction.
1. Install air filters.
Install air filters at the upstream side of valves. The filtration
degree should be 5µm or finer.
2. Install an after-cooler, air dryer or water separator,
etc.
Air that includes excessive drainage may cause malfunction
of valves and other pneumatic equipment. To prevent this,
install an after-cooler, air dryer or water separator, etc.
3. Use the product within the specified range of fluid
and ambient temperatures.
Take measures to prevent freezing, since moisture in circuits
will be frozen under 5°C, and this can cause damage to seals
and malfunction.
1. Do not use in environments where there is a danger
of corrosion.
Refer to the construction drawings regarding cylinder
materials and surface treatment.
2. Use an operating environment pressure within the
specified range.
1. Perform maintenance according to the procedure
indicated in the instruction manual.
Improper handling can cause malfunction and damage of
machinery or equipment.
2. Removal of equipment and supply/exhaust of
compressed air.
When machinery is serviced, first check measures to prevent
dropping of driven objects and run-away of equipment, etc.
Then cut off the supply pressure and electric power, and
exhaust all compressed air from the system.
When machinery is restarted, proceed with caution after
confirming measures to prevent lurching of actuators.
1. Drain flushing
Remove drainage from air filters regularly.
Warning
Warning
Warning
Caution
Caution
Refer to SMC’s clean pneumatic series “Air Cleaning Equipment”
catalog for further details on compressed air quality.

Mounting
Caution
1.Take care to avoid striking the cylinder tube with
other objects or handling it in a way that could cause
deformation.
The cylinder tube and slider units have a non-contact
construction. For this reason, even a slight deformation or
slippage of position can cause malfunction and loss of durability,
as well as a danger of degrading particulate generation
characteristics.
2. Do not scratch or gouge the linear guide by striking it
with other objects.
3. Since the slide table is supported by precision
bearings, do not apply strong impacts or excessive
moment when mounting work pieces.
4. The cylinder can be operated by directly applying a
load within the allowable range. However, careful
alignment is necessary when connecting to a load
with an external guide mechanism.
Since displacement of the alignment increases as the stroke
becomes longer, consider a connection method that can absorb
the displacement and does not cause interference at any point
within the stroke. Also, operate with due consideration of
measures against particulate generation.
5. Be sure to operate the cylinder with the plates on
both sides secured.
Avoid applications in which the slide table or only one plate is
secured.
6. Do not use until you verify that the equipment can be
operated properly.
After mounting or repair, connect the air supply and electric
power, and then confirm proper mounting by performing
appropriate function and leakage tests.
7. Instruction manual
Mount and operate the product after thoroughly reading the
manual and understanding its contents. Also, store it where it
can be referred at any time.
Handling
Caution
1 . Open the inner package of the double packaged
clean series product inside a clean room or other
clean environment.
2
. Do not install a cylinder with bare hands. Outgassing
characteristics can be degraded.
3
. Perform parts replacement and disassembly work
inside the chamber after
exhausting compressed air
in the piping to the outside of the clean room.
Operation
Caution
2. When used for vertical operation, take precautions
against possible dropping due to separation of the
magnetic coupling.
When used for vertical operation, use caution as there is a pos-
sibility of dropping due to separation of the magnetic coupling if
a load (pressure) greater than the allowable value is applied.
3. Do not operate with the magnetic coupling out of
position.
If the magnetic coupling is out of position, push the external
slider (or the piston slider by using air pressure) back to the
proper position at the stroke end. (When pushing the external
slider, do not push it with bare hands.)
4. Do not apply lubricant, as this is a non-lube product.
The interior of the cylinder is lubricated at the factory, and lubri-
cation with turbine oil, etc., will not satisfy the product's specifi-
cations.
5. Never reapply lubricant.
Never reapply lubricant, as this may cause a degradation of
particulate generation or operation characteristics.
6. Use the cylinder in inert gas environments.
Corrosive gases may cause corrosion of a cylinder and loss of
durability.
7. Be sure to use the cylinder in pressure environ-
ments from atmosphere to 1.3 x 10
-4
Pa (ABS).
If used in pressure environments below these conditions,
grease applied to the guide unit will evaporate excessively and
may cause environmental contamination and loss of durability.
8. Be sure to set the baking temperature to 150°C or
less.
If a higher temperature is used, the grease will evaporate ex-
cessively and may cause environmental contamination and loss
of durability.
9. Positioning of a cylinder should be performed using
an optical sensor from outside the chamber.
A positioning sensor cannot be mounted on the cylinder.
Operation
Caution
1. The maximum operating pressure for the vacuum
rodless cylinder is 0.3MPa
If the maximum operating pressure of 0.3MPa for the vacuum
rodless cylinder is exceeded, the magnetic coupling can be
broken, causing a danger of malfunction or degradation of
particulate generation characteristics, etc.
Fitting
Caution
1. A fitting with an O-ring is used for a high vacuum
rodless cylinder.
Use a fitting that conforms to the dimensions below, and install
it so that there is no air leakage.
2. Air blow and clean fittings and piping materials
completely with clean air to remove oil and impuri-
ties, etc., before piping.
Model
CYV15
CYV32
P (
Port size)
5/16-24 UNF
7/16-20 UNF
P (Port size)
Series CYV
Specific Product Precautions 1
Be sure to read before handling.
10

Maintenance
Caution
1. Never disassemble the cylinder tube or linear guide,
etc.
If disassembled, the slide table may touch the outside surface
of the cylinder tube resulting in a degradation of particulate
generation characteristics.
2. Consult SMC when replacing seals and bearings
(wear rings).
3. For repair of a cylinder inadvertently exposed to a
corrosive gas, consult SMC after clarifying the name
of the corrosive gas.
Cushion Effect (Sine Cushion) and Stroke Adjustment
Caution
Particulate Generation Characteristics
Caution
1. A sine cushion (smooth start-up, soft stop) function
is included in the standard specifications.
Due to the nature of a sine cushion, adjustment of the cushion
effect is not possible.There is no cushion needle adjustment as
in the case of conventional cushion mechanisms.
2. The stroke adjustment is a mechanism to adapt the
slide table's stroke end position to a mechanical
stopper on other equipment, etc.
(Adjustment range:Total of both sides –4 to 0mm)
To ensure safety, perform adjustment after shutting
off the drive air, releasing the residual pressure and
implementing drop prevention measures, etc.
1) Loosen the inner cover holding screw with a hexagon wrench,
etc.
2) To match the position with a mechanical stopper on other
equipment, etc., rotate the stroke adjustment screw (inner
cover) to the left or right with a hexagon wrench to move the
inner cover back and forth.
3) The maximum adjustment on one side is –2 to 0mm. A total
adjustment of approximately –4 to 0mm is possible using
both sides.
4) After completing the stroke adjustment, tighten the inner
cover holding screw with a hexagon wrench, etc.
1. In order to maintain the particulate generation grade,
use operation of 1 million cycles or travel distance
of about 200km as a guide. (Table 1 below)
If operation is continued beyond the recommended values,
lubrication failure of the linear guide and a degradation of
particulate generation characteristics may occur.
Stroke (mm)
Total operation cycles (10,000)
10
20
30
40
50
100
100 200 300 400 500 700 1000
Table 1
Model
CYV15
CYV32
Screw size
M3 x 0.5
M6 x 1
Tightening torque
0.3
2.45
Inner cover holding screw tightening torques [N⋅m]
Stroke adjustment screw
(inner cover)
Inner cover
holding screw
–direction
+ direction
Plate
Hexagon
wrench
Speed Adjustment
Caution
1. A speed controller for clean room use is recommend-
ed for speed adjustment.
2. Install the speed controller outside the chamber.
3. In case of vertical mounting, a system with a
regulated supply circuit installed on the down side is
recommended. (This is effective against delays at the
start of upward movement and for conservation of
air.)
11
Series CYV
Specific Product Precautions 2
Be sure to read before handling.

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© 2000 SMC CORPORATION All Rights Reserved
Specifications are subject to change without prior notice
and any obligation on the part of the manufacturer. Printed in Japan.
1st printing January, 2001 D-SMC.L.A. P-80 (D)
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