Zeiss MultiSEM 505 Series User manual

Instruction Manual
Carl Zeiss Microscopy - Electron and Ion Beam Microscopy
Plasma Cleaner Add On
Integration Pack for MultiSEM
Enabling the Nano-Age World®

Plasma Cleaner Add On
Integration Pack for MultiSEM
Original instructions
Carl Zeiss Microscopy GmbH
Carl-Zeiss-Promenade 10
07745 Jena, Germany
[email protected]
www.zeiss.com/microscopy
Carl Zeiss Microscopy GmbH
Carl-Zeiss-Straße 22
73447 Oberkochen, Germany
© by Carl Zeiss Microscopy GmbH
Document name: Instruction Manual Plasma Cleaner Add On for MultiSEM
Revision: en00
Effective from: February 2015
3XXXXX-XXXX-000
This document or any part of it must not be translated, reproduced or transmitted in any form or by any means, electronic or
mechanical, including photocopying, recording, or by any information or retrieval system. Violations will be prosecuted.
The use of general descriptive names, registered names, trademarks, etc. in this document does not imply, even in the
absence of a specic statement, that such names are exempt from the relevant protective laws and regulations and therefore
free for general use.
Software programs will fully remain the property of Carl Zeiss Microscopy. No program, documentation or subsequent
upgrade thereof may be disclosed to any third party, unless prior written consent of Carl Zeiss Microscopy has been procured
to do so, nor may they be copied or otherwise duplicated, even for the customer’s internal needs apart from a single back-
up copy for safety purposes. Due to an ongoing process of improvement Carl Zeiss Microscopy reserves the right to make
modications of this document without notice.

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1. About this manual................................................................................................. 5
1.1. Definition of terms...................................................................................................... 7
2. Safety summary..................................................................................................... 8
2.1. Intended use............................................................................................................... 8
2.2. Prevention of accidents and of improper use......................................................... 9
3. Description........................................................................................................... 10
3.1. Overview ................................................................................................................... 10
3.2. Principle of operation .............................................................................................. 11
3.3. Technical data .......................................................................................................... 12
3.4. Customer service..................................................................................................... 13
4. Installation............................................................................................................ 13
5. Operation.............................................................................................................. 14
5.1. Switching on the Plasma Cleaner Add On............................................................. 14
5.2. Switching off the Plasma Cleaner Add On............................................................. 16
6. Maintenance and repair ...................................................................................... 17
6.1. Repair........................................................................................................................ 17
6.2. Troubleshooting....................................................................................................... 17
7. De-installation and disposal............................................................................... 18
8. Abbreviations....................................................................................................... 18

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1. About this manual
This instruction manual is considered to be part of the Plasma Cleaner Add On.
Read the instructions carefully. Keep the instruction manual nearby the Plasma Cleaner Add On
and hand it over to future owners of the instrument.
This instruction manual is designed for users who have been trained by an authorised 
Carl Zeiss Microscopy expert to operate the workstation, the Plasma Cleaner Add On is built in. 
Operators of the Plasma Cleaner Add On must not deviate from the instructions provided in this
document.
IMPORTANT
It is assumed that the operator is already familiar with general functions of the ZEN mSEM
Software and the operation of the MultiSEM workstation.
Reference to
related 
documents
For detailed information regarding the MultiSEM workstation and the operating software refer to
the Zeiss MultiSEM Instruction Manual.
Safety 
instructions The safety instructions in this manual are classified as follows:
DANGER
This safety symbol and signal word indicates an imminently hazardous situation. 
Disregarding this warning WILL result in death or serious injury.
CAUTION
This safety symbol and signal word indicates a potentially hazardous situation. 
Disregarding this warning MAY result in minor or moderate injury.
CAUTION
This signal word used without a safety symbol indicates a potentially hazardous situation. 
Disregarding this warning MAY result in property damage.
Moreover you will find the following type of information:
IMPORTANT
This symbol and signal word draws your attention to important and useful 
information.

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Typographical
conventions For the description of software, the following typographical conventions are used:
Typography Meaning
Push <ENTER>.Push the ENTER key on the keyboard.
Type <key1, key2> Type key 1 first, then type key 2 on the keyboard.
Type <Ctrl + Alt + Del>.Simultaneously type CTRL key, ALT key and DEL
key on the keyboard.
Click on the tab Plasma Cleaner Control.
Select Object Chamber from the drop-down list.
Icons, buttons and menus are printed in bold.
Select Plasma time 00:10:00 minutes.

Set Plasma powet to 20 Watt.
Values to be selected are printed in italics.
Text Meaning
Click... Press the left mouse button.
Right-click... Press the right mouse button.
Double-click.... Press the left mouse button twice.

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1.1. Definition of terms
The following terms are used in this manual:
Plasma Cleaner Add On An optional component to clean the specimen chamber or the speci-
men.
ZEN mSEM Operating software for ZEISS MultiSEM
Operator A trained person, who is assigned to operate the workstation.
Basic operator: 
Person who has been trained to perform fundamental operation
sequences.
Specially trained operator: 
Electrically skilled person who has been trained to perform basic main-
tenance tasks.
User A person or organisation that uses products of Carl Zeiss Microscopy.
Carl Zeiss service engineer,
Carl Zeiss service staff Specially trained service expert, either Carl Zeiss staff or authorised service partner of Carl Zeiss Microscopy.

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2. Safety summary
2.1. Intended use
The Plasma Cleaner Add On is used to generate reactive gas-phase radicals in a plasma. This
plasma is fully contained in the Plasma Cleaner unit. The radicals migrate into the specimen
chamber and chemically react with unwanted hydrocarbons.
This is useful for:
•Fast specimen decontamination 
Decontamination time can be adjusted to fit the customer needs. Typically, 2-5 minutes to
clean the sample, or 10-30 minutes runs for in-depth decontamination of stage and chamber.
•Safe decontamination
It is completely safe for the equipment.
•Improved image quality
Contamination compromises achievable image resolution.
•Improved measurement accuracy
Sample features can be measured accurately.

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2.1.1 Recommended cleaning processes
Different plasma cleaning processes can be selected. For detailed information regarding the con-
troller of the Plasma Cleaner refer to the XEI Manual.
The corresponding parameters for some selected process can be found in the table below.
IMPORTANT
If Plasma Cleaner Add On is used continuously over several hours the grease of the stage
can get affected by loosing its lubricious properties.
Cleaning type /
Conditions Turbo Plasma pressure / power
(„T-pump“ is ~0.02 mbar)
Ignition
pressure
[mbar]
Time
[min]
Specimen cleaning in
object chamber 
(MultiSEM)
yes T-pump/20W 0.270 2
Specimen cleaning in
loadlock no
(deactivated) 0.270mbar/15W 0.270 2
Loadlock chamber
cleaning (MultiSEM) no
(deactivated) 0.270mbar/20W 0.270 10
Object chamber clean-
ing (MultiSEM) yes T-pump 0.270 30
Table 1.1: Plasma cleaning processes

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2.2. Prevention of accidents and of improper use
CAUTION
Risk of injury or damage due to improper operation of the option. 

Read the user documentation carefully. 
Do not operate the option until you have completely read and understood this instruction
manual and the entire user documentation delivered with the workstation.

You will find the user documentation in the document folder.
CAUTION
Risk of property damage due to improper maintenance, service or repair. 
The warranty might be voided. 
Follow the instructions given in this instruction manual.
IMPORTANT
All pursuing tasks of maintenance, service, and repair not described in this instruction
manual have to be performed by authorised Carl Zeiss service staff only.

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3. Description
3.1. Overview
Fig. 1.1: Operation principles of the Plasma Cleaner Add On
1 Electron column 5 Specimen stage
2 Vacuum exhaust 6 Plasma
3 High vacuum pump 7 Plasma radical source (PRS)
4 Reactive gas radicals
32
1
7
6
5
4

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3.2. Principle of operation
When starting the Plasma Cleaner via the Plasma Cleaner menue the chamber to whichthe Plas-
ma Cleaner is attached is vented above at least 3mbar. Then the corresponding chamer is
pumped again. When the pressure approaches the preset ignition pressure of the plasma clean-
er, a valve (connected to air) in the plasma cleaner (PRS) is opened, stabilizing the pressure
close to the PRS in the chamber to the preset ignition pressure. After ignition the PRS stabilizes
the pressure to the preset plasma pressure value. When the preset plasma time is over, pump
down continues.
Ignition pressure, plasma pressure, plasma power and plasma time must be set by the user (see
also the plasma cleaner manual from XEI, the table on page 9 and the note below).
IMPORTANT
Depending on the specimen material, it is possible that the Plasma Cleaner Add On might
damage the specimen. It is recommended to test this before cleaning important speci-
mens.

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3.3. Technical data
The Plasma Cleaner Add On consists of two major components:
•Plasma Radical Source (PRS)
•Controller
These components are connected by a cable bundle.
Environmental requirements
Pollution degree 2
Installation category II
Electrical supplies
Connected to power supply
Specifications of the Plasma Cleaner Add On electronics
Rise time < 50 ns (10% to 90%)
Decay time < 50 ns (90% to 10%)
Delay time 250 ns ± 50 ns
Repetition rate Nominal frequency 200 kHz; maximum 1 MHz for 30 s
Control
ZEN mSEM V1.02 or higher Fully integrated starting from ZEN mSEM
.NET Framework 4.5 Client Pro-
file Precondition to work with the Plasma Cleaner Add On

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3.4. Customer service
For customer service, contact your local Carl Zeiss service engineer.
A list of Carl Zeiss Microscopy locations and authorised service partners can be found at:
http://www.zeiss.com/microscopy
4. Installation
The Plasma Cleaner Add On is either factory-installed or retrofitted by authorised Carl Zeiss serv-
ice staff.

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5. Operation
IMPORTANT
For detailed information about the Plasma Cleaner, refer to the XEI Manual.
Procedure
1If there are several plasma cleaners
attached to the MultiSEM (object chamber
and/or load lock), the plasma cleaner for the
desired cleaning process can be chosen in
the first line of the ZEN menu Plasma
Cleaner Control.
Note
It is only possible to run one plasma cleaner
at a time.
Before starting the plasma cleaning process
choose Ignition pressure, Plasma pres-
sure, Plasma time and Plasma power
according to your desired cleaning process
(see table on page 9).
Important
Depending on the specimen material, it is
possible that the Plasma Cleaner Add On
mightdamage the specimen.
It is recommended to test this before clean-
ing important specimens.
2To start the plasma cleaning process press
Start cleaning.
By starting the cleaning process the Plasma
Cleaner Control is enabled, the correspond-
ing chamber is vented and pumped down
again.
When reaching the selected Ignition pres-
sure, the pressure is stabilized by the
plasma cleaner, the radio frequency (RF) is
switched on automatically and, after some
seconds normally, the plasma ignites.
When reaching the selected Plasma time
the plasma switches off and pump down for
the corresponding chamber is continued.
4With Stop cleaning the cleaning process
can be stopped in advance.

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5.1. Possible Errors
Note
If the plasma cleaner was not in use for a longer time period, the PRS may be oxidized and the
first ignition of the plasma may take several minutes.
If the Plasma Cleaner in the Plasma Cleaner Control menu is not connected, check if the power
supply of the plasma cleaner control unit is on. If not, switch power on and press the Reconnect
button.
The LEDs in the Plasma Cleaner Control
menu reflect the state of the LEDs on the
Plasma cleaner control front panel

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6. Maintenance and repair
6.1. Repair
CAUTION
Risk of property damage due to improper maintenance, service or repair. 
The warranty might be voided. 
Strictly follow the instructions given in this instruction manual.
The Plasma Cleaner Add On is not user-serviceable.
In case of a defect contact your local Carl Zeiss Microscopy service engineer for assistance.
6.2. Troubleshooting
For detailed information, refer to the XEI Manual.
If you cannot solve the problem, contact your local Carl Zeiss service engineer.
DANGER
Danger to life: Hazardous voltage inside the workstation. 
Only service engineers trained and authorised by Carl Zeiss Microscopy are allowed to
service the Plasma Cleaner Add On and the workstation and to perform work on the elec-
trical system.

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7. De-installation and disposal
De-installation and disposal for Plasma Cleaner Add On can be looked up in the original manual
from XEI Evactron 25Z/40Z/45Z De-Contaminator RF Plasma Cleaning System.
8. Abbreviations
PRS Plasma Radical Source
mSEM Multibeam scanning electron microscope
RF Radio frequency

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AAbbreviations 18
About this manual 5
CCustomer service 13
DDefinition of terms 7
De-installation and disposal 18
Description 10
IInstallation 13
instruction 5
Intended use 8
MMaintenance and repair 17
OOperation 14
Operator 7
Operator, basic 7
Operator, specially trained 7
PPrevention of accidents 9
Principle of operation 11
RRepair 17
Ssafety instructions 5
Safety summary 8
Switching off the Beam Blanker 16
Switching on the Beam Blanker 14
TTechnical data 12
Troubleshooting 17
Typography 6
UUser 7
Numerics
75026
Z3.3_headline_3
2.1.1 Recommended cleaning processes 9
A
Abbreviations 18
About this manual 5
C
Customer service 14
D
Definition of terms 7
De-installation and disposal 18
Description 11
I
Installation 14
instruction 5
Intended use 8
M
Maintenance and repair 17
O
Operation 15
Operator 7
Operator, basic 7
Operator, specially trained 7
P
Prevention of accidents 10
Principle of operation 12
R
Repair 17
S
safety instructions 5
Safety summary 8
Switching on the Beam Blanker 15
T
Technical data 13
Troubleshooting 17
Typography 6
U
User 7

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