Agilent Technologies HS-16 User manual

HS-16 - HS-20 - HS-32 - NHS-35
High Throughput Diffusion Pumps
User Manual

2 High Throughput Diffusion Pumps User Manual
Notices
Manual Part Number
699901140
Edition G.00, April 2021
Copyright
© Agilent Technologies, Inc. 2021
No part of this manual may be
reproduced in any form or by any
means (including electronic storage
and retrieval or translation into a
foreign language) without prior
agreement and written consent from
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by United States and international
copyright laws.
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Vacuum Products Division
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www.agilent.com
Instrument Manufacturing
Agilent Technologies LDA Malaysia
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Free Industrial Zone 11900 Bayan Lepas,
Penang Malaysia
Printed in Italy
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subject to being changed, without
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with regard to this manual and any
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Safety Notices
A CAUTION notice denotes a hazard. It
calls attention to an operating
procedure, practice, or the like that, if
not correctly performed or adhered to,
could result in damage to the product
or loss of important data. Do not
proceed beyond a CAUTION notice
until the indicated conditions are fully
understood and met.
A WARNING notice denotes a hazard.
It calls attention to an operating
procedure, practice, or the like that, if
not correctly performed or adhered to,
could result in personal injury or death.
Do not proceed beyond a WARNING
notice until the indicated conditions
are fully understood and met.
WARNING
CAUTION

Contents
High Throughput Diffusion Pumps User Manual 3
Contents
About this manual 9
Validity 9
Definitions and terminology 10
Definition of Caution, Warning and Note 10
Warning Symbols 11
Safety 13
Proper use 13
Improper use 14
Disposal 15
Service 16
Diffusion Pump Hazards 17
Explosion 18
Pressurization Hazards 20
Dangerous Substances 21
High Temperatures 22
High Voltages 22
Large Equipment and Heavy Weights 22
Diffusion Pump Description 23
Pump Operation 24
Technical Specifications 24
Pump Air Speed and Throughput 27
Physical Specifications 29

Contents
4 High Throughput Diffusion Pumps User Manual
Unpacking 33
Setup 33
Assembly 33
Cleaning a New Pump 34
Cleaning Safety 34
Disassembly for Initial Cleaning 35
Reassembly After Initial Cleaning 35
System and Utility Connections 36
Vacuum Connections 36
Cooling Water 37
Quick Cool Coil Connection 38
Obtaining High Vacuum on the NHS-35 39
Electrical Connections 39
Overheating: Detection by Thermal Switches 42
Initial Vacuum Test 53
Adding or Changing Pump Fluid 54
Information on Fluid and DP Performance 54
Operation 56
Startup Procedure 57
Humid Environments 57
Shutdown Procedure 58
Maintenance 59
Periodic Inspections 59
Cleaning 60
Cleaning Safety 60

Contents
High Throughput Diffusion Pumps User Manual 5
Disassembly and Reassembly Procedures 62
Cold Cap 62
Jet Assemblies 64
HS-16 Jet Assembly 64
HS-20 Jet Assembly 66
HS-32 Jet Assembly 69
NHS-35 Jet Assembly 71
Heater Replacement Procedure 73
Troubleshooting 76
Leakage 76
Outgassing 76
Poor Pump or System Performance 77
Accessories and Spare Parts 79

Contents
6 High Throughput Diffusion Pumps User Manual

Technical Information
High Throughput Diffusion Pumps User Manual 7
1Technical Information
About this manual 9
Validity 9
Definitions and terminology 10
Definition of Caution, Warning and Note 10
Warning Symbols 11
Safety 13
Proper use 13
Improper use 14
Disposal 15
Service 16
Diffusion Pump Hazards 17
Explosion 18
Description of the High Throughput Diffusion Pumps 23
Pump Operation 24
Pump Air Speed and Throughput 27
Physical Specifications 29
Unpacking 33
Setup 33
Assembly 33
Cleaning a New Pump 34
Cleaning Safety 34
Disassembly for Initial Cleaning 35
Reassembly After Initial Cleaning 35
System and Utility Connections 36
Vacuum Connections 36
Cooling Water 37
Quick Cool Coil Connection 38
Obtaining High Vacuum on the NHS-35 39

Technical Information
8 High Throughput Diffusion Pumps User Manual
Electrical Connections 39
Overheating: Detection by Thermal Switches 42
Initial Vacuum Test 53
Adding or Changing Pump Fluid 54
Operation 56
Startup Procedure 57
Humid Environments 57
Shutdown Procedure 58
Maintenance 59
Periodic Inspections 59
Cleaning 60
Cleaning Safety 60
Disassembly and Reassembly Procedures 62
Cold Cap 62
Jet Assemblies 64
Heater Replacement Procedure 73
Troubleshooting 76
Leakage 76
Outgassing 76
Poor Pump or System Performance 77
Accessories and Spare Parts 79

Technical Information
High Throughput Diffusion Pumps User Manual 9
About this manual
Validity
This manual lists the instructions for the users of the High Throughput Diffusion
Pumps, with particular reference to the notions relating to safety, operation and first
level maintenance, limited to maintenance operations for which the user is
responsible.
The maintenance operations, illustrated in the specific sections, with specific
provisions relating to the higher level of maintenance (personnel specifically trained
for maintenance operations) must not be carried out by the user.
NOTE
1This manual contains useful information so that all personnel using the
High Throughput Diffusion Pumps can operate it safely and guarantee perfect
efficiency, for its entire life span.
2Keep this manual, together with all the related publications, in an accessible
place known to all operators/maintenance personnel.

Technical Information
10 High Throughput Diffusion Pumps User Manual
Definitions and terminology
Definition of Caution, Warning and Note
Some important references of this manual are highlighted and framed in
contrasting color.
WARNING
Warning messages draw the operator's attention to a specific procedure or
practice which, if not performed correctly, could result in serious personal
injury.
CAUTION
Caution messages are displayed before procedures which, if not observed, could
cause damage to the equipment.
NOTE
Notes are intended to call attention to important information and provide more
detail regarding specific steps.