Agilent Technologies HS-16 User manual

HS-16 - HS-20 - HS-32 - NHS-35
High Throughput Diffusion Pumps
User Manual

2 High Throughput Diffusion Pumps User Manual
Notices
Manual Part Number
699901140
Edition G.00, April 2021
Copyright
© Agilent Technologies, Inc. 2021
No part of this manual may be
reproduced in any form or by any
means (including electronic storage
and retrieval or translation into a
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by United States and international
copyright laws.
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Printed in Italy
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The material contained in this
document is provided “as is,” and is
subject to being changed, without
notice, in future editions. Further, to the
maximum extent permitted by
applicable law, Agilent disclaims all
warranties, either express or implied,
with regard to this manual and any
information contained herein, including
but not limited to the implied
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fitness for a particular purpose. Agilent
shall not be liable for errors or for
incidental or consequential damages in
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separate written agreement with
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in this document that conflict with
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The hardware and/or software
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Safety Notices
A CAUTION notice denotes a hazard. It
calls attention to an operating
procedure, practice, or the like that, if
not correctly performed or adhered to,
could result in damage to the product
or loss of important data. Do not
proceed beyond a CAUTION notice
until the indicated conditions are fully
understood and met.
A WARNING notice denotes a hazard.
It calls attention to an operating
procedure, practice, or the like that, if
not correctly performed or adhered to,
could result in personal injury or death.
Do not proceed beyond a WARNING
notice until the indicated conditions
are fully understood and met.
WARNING
CAUTION

Contents
High Throughput Diffusion Pumps User Manual 3
Contents
About this manual 9
Validity 9
Definitions and terminology 10
Definition of Caution, Warning and Note 10
Warning Symbols 11
Safety 13
Proper use 13
Improper use 14
Disposal 15
Service 16
Diffusion Pump Hazards 17
Explosion 18
Pressurization Hazards 20
Dangerous Substances 21
High Temperatures 22
High Voltages 22
Large Equipment and Heavy Weights 22
Diffusion Pump Description 23
Pump Operation 24
Technical Specifications 24
Pump Air Speed and Throughput 27
Physical Specifications 29

Contents
4 High Throughput Diffusion Pumps User Manual
Unpacking 33
Setup 33
Assembly 33
Cleaning a New Pump 34
Cleaning Safety 34
Disassembly for Initial Cleaning 35
Reassembly After Initial Cleaning 35
System and Utility Connections 36
Vacuum Connections 36
Cooling Water 37
Quick Cool Coil Connection 38
Obtaining High Vacuum on the NHS-35 39
Electrical Connections 39
Overheating: Detection by Thermal Switches 42
Initial Vacuum Test 53
Adding or Changing Pump Fluid 54
Information on Fluid and DP Performance 54
Operation 56
Startup Procedure 57
Humid Environments 57
Shutdown Procedure 58
Maintenance 59
Periodic Inspections 59
Cleaning 60
Cleaning Safety 60

Contents
High Throughput Diffusion Pumps User Manual 5
Disassembly and Reassembly Procedures 62
Cold Cap 62
Jet Assemblies 64
HS-16 Jet Assembly 64
HS-20 Jet Assembly 66
HS-32 Jet Assembly 69
NHS-35 Jet Assembly 71
Heater Replacement Procedure 73
Troubleshooting 76
Leakage 76
Outgassing 76
Poor Pump or System Performance 77
Accessories and Spare Parts 79

Contents
6 High Throughput Diffusion Pumps User Manual

Technical Information
High Throughput Diffusion Pumps User Manual 7
1Technical Information
About this manual 9
Validity 9
Definitions and terminology 10
Definition of Caution, Warning and Note 10
Warning Symbols 11
Safety 13
Proper use 13
Improper use 14
Disposal 15
Service 16
Diffusion Pump Hazards 17
Explosion 18
Description of the High Throughput Diffusion Pumps 23
Pump Operation 24
Pump Air Speed and Throughput 27
Physical Specifications 29
Unpacking 33
Setup 33
Assembly 33
Cleaning a New Pump 34
Cleaning Safety 34
Disassembly for Initial Cleaning 35
Reassembly After Initial Cleaning 35
System and Utility Connections 36
Vacuum Connections 36
Cooling Water 37
Quick Cool Coil Connection 38
Obtaining High Vacuum on the NHS-35 39

Technical Information
8 High Throughput Diffusion Pumps User Manual
Electrical Connections 39
Overheating: Detection by Thermal Switches 42
Initial Vacuum Test 53
Adding or Changing Pump Fluid 54
Operation 56
Startup Procedure 57
Humid Environments 57
Shutdown Procedure 58
Maintenance 59
Periodic Inspections 59
Cleaning 60
Cleaning Safety 60
Disassembly and Reassembly Procedures 62
Cold Cap 62
Jet Assemblies 64
Heater Replacement Procedure 73
Troubleshooting 76
Leakage 76
Outgassing 76
Poor Pump or System Performance 77
Accessories and Spare Parts 79

Technical Information
High Throughput Diffusion Pumps User Manual 9
About this manual
Validity
This manual lists the instructions for the users of the High Throughput Diffusion
Pumps, with particular reference to the notions relating to safety, operation and first
level maintenance, limited to maintenance operations for which the user is
responsible.
The maintenance operations, illustrated in the specific sections, with specific
provisions relating to the higher level of maintenance (personnel specifically trained
for maintenance operations) must not be carried out by the user.
NOTE
1This manual contains useful information so that all personnel using the
High Throughput Diffusion Pumps can operate it safely and guarantee perfect
efficiency, for its entire life span.
2Keep this manual, together with all the related publications, in an accessible
place known to all operators/maintenance personnel.

Technical Information
10 High Throughput Diffusion Pumps User Manual
Definitions and terminology
Definition of Caution, Warning and Note
Some important references of this manual are highlighted and framed in
contrasting color.
WARNING
Warning messages draw the operator's attention to a specific procedure or
practice which, if not performed correctly, could result in serious personal
injury.
CAUTION
Caution messages are displayed before procedures which, if not observed, could
cause damage to the equipment.
NOTE
Notes are intended to call attention to important information and provide more
detail regarding specific steps.

Technical Information
High Throughput Diffusion Pumps User Manual 11
Warning Symbols
The following is a list of symbols that appear in conjunction with warnings on the
HS High Throughput Diffusion Pump. The hazard they describe is also shown.
A triangular symbol indicates a warning. The meanings of the symbols that may
appear alongside warnings in the documentation are as follows:
Dangerous voltages Hot surface Generic hazard
Presence of dangerous
substances Crushing hazard Cutting hazard
Wear protective gloves Wear personal protective
equipment
Wear accident-
prevention shoes
European Declaration of
Conformity Waste Electrical and Electronic Equipment

Technical Information
12 High Throughput Diffusion Pumps User Manual
The following symbol may be used on warning labels attached to the instrument.
When you see this symbol, refer to the relevant operation or service manual for the
correct procedure referred to by that warning label.
The following symbols appear on the instrument for your information.
Corrosive substances
Explosive Material
Toxic Gases Asphyxiation
Wear face shield
Production date
Dangerous voltages
Hot surfaces
Generic hazard
CE certification
Wear safety helmet
RoHS China certification
Waste Electrical and Electronic Equipment

Technical Information
High Throughput Diffusion Pumps User Manual 13
Safety
This section contains the information, prescribed by the Low Voltage Directive
2014/35/EU, which is essential for the compliance and observance of the safety
regulations both generally and in relation to the specific use of the product.
Failure to comply with these instructions and the other instructions contained in
this manual may render the safety conditions envisaged in the design phase
inefficient and cause accidents to those operating the product.
Agilent Technologies declines all responsibility for damage to the product or for
the physical safety of the operator or third parties deriving from the non-observance
of the safety rules indicated in the technical documentation.
Proper use
This manual contains important warnings and safety instructions to be observed in
order for the unit to work safely.
The product described in this manual is intended exclusively for the area of
application specified in the instructions. The manual also provides indications
regarding the essential requirements for the application and operation of the
product as well as the safety measures that can be adopted to guarantee regular
operation. Agilent Technologies does not provide any guarantee or assume any
responsibility for applications other than those described in this manual or in which
the essential requirements and safety measures are not respected.
The product must only be used by qualified personnel who are able to take the
necessary safety measures under conditions that do not cause damage or injury.
Any accessories and equipment used with the product must be supplied or
approved by Agilent Technologies.
Any adjustment or maintenance operation must be performed by a professional
technician informed about the risks.
Repairs on the product must be carried out exclusively by Agilent authorized
personnel.

Technical Information
14 High Throughput Diffusion Pumps User Manual
Improper use
Agilent Technologies declines all responsibility, deriving from the improper use of
the High Throughput Diffusion Pumps.
Improper use will cause all claims for liability and warranties to be forfeited.
Personnel responsible for pump operation and maintenance must be well-trained
and must be aware of the accident prevention rules. The accident prevention
precautions contained in this section must be continuously respected during
operation and maintenance of the pump to avoid damage to operators and to the
pump. These precautions are provided in the form of WARNING and CAUTION
notes.
WARNING
Operating procedures, technical information and precautions which, if not
respected and/or implemented correctly may cause body harm to
operators.
CAUTION
Operating procedures, technical information and precautions, which, if not
respected and/or implemented correctly, may cause damage to the pump.

Technical Information
High Throughput Diffusion Pumps User Manual 15
Disposal
Meaning of the "WEEE" logo found in labels.
The following symbol is applied in accordance with the EC WEEE (Waste Electrical
and Electronic Equipment) Directive.
This symbol (valid only in countries of the European Community) indicates that the
product it applies to must NOT be disposed of together with ordinary domestic or
industrial waste but must be sent to a differentiated waste collection system. The
end user is therefore invited to contact the supplier of the device, whether the
Parent Company or a retailer, to initiate the collection and disposal process after
checking the contractual terms and conditions of sale.
Figure 1 Logo "WEEE"
For more information refer to:
http://www.agilent.com/environment/product/index.shtml

Technical Information
16 High Throughput Diffusion Pumps User Manual
Service
Should a customer need an advanced exchange or repair service, please contact
local distributor or directly mail to
[e-mail]
[e-mail]
Completion of the “Request for Return” form is required to return your pump to
Agilent for service (provided at the end of this manual).

Technical Information
High Throughput Diffusion Pumps User Manual 17
Diffusion Pump Hazards
Designers of systems utilizing diffusion pumps must design out hazards wherever
possible. For hazards that cannot be designed out, warnings, procedures, and
instructions on proper use and servicing are provided. Please use guards, safety
features, and interlocks as recommended.
Refer to Table 1 for a list of general hazards and recommended actions, Table 2 for a
list of prohibited actions that can result in explosions, and Table 3 for a list of
pressurization hazards that can result in damage to equipment.
The end user must ensure the pump is properly protectively bonded to the end
product's protective earthing system as determined in the end product standard for the
End Product Design. End Product Design provides a compliant fire enclosure as defined
in the End Product's standard.
THE INSTALLATION, OPERATION, AND SERVICING OF DIFFUSION PUMPS INVOLVES
ONE OR MORE OF THE FOLLOWING HAZARDS, ANY ONE OF WHICH IN THE
ABSENCE OF SAFE OPERATING PRACTICES AND PRECAUTIONS, COULD
POTENTIALLY RESULT IN DEATH OR SERIOUS HARM TO PERSONNEL.
Table 1 General Hazards
Hazard
Suggested Corrective Action
Loss of utility: water and/or electricity
Provide sufficient backup water and power supply as
necessary to effect a safe shutdown under worst
case conditions
Overpressure in foreline
Provide an interlock to ensure that the power supply
to the pump heater cannot be activated if the foreline
pump is not running and/or the pressure in foreline is
above 0.5 Torr (0.67 mbar)
Overtemperature
Fit temperature sensors and pump fluid level sensors
with a feedback to an interlock on the heater power
supply
Insufficient water flow through the main cooling
coils
Use water flow sensor and feedback to interlock the
heater power supply
Water trapped between inlet and outlet of Quick
Cool coil, or liquid nitrogen trapped between inlet
and outlet of liquid nitrogen trap
Provide vent or pressure relief valves for both Quick
Cool coil and liquid nitrogen trap
Loss of electrical ground integrity
Incorporate ground fault interrupt circuit into heater
power supply
Positive pressure in pumping system
Integrate pressure relief valve in vacuum system
High voltage
Prevent personnel contact with high voltages; design
and attach warnings
Toxicity and Corrosivity
Vent toxic and/or corrosive gases to a safe location;
ensure adequate dilution or scrubbing to safe levels;
take all actions required to meet air quality standards
Explosion
Integrate pressure relief valves
Do not use hydrocarbon-based pumping fluids

Technical Information
18 High Throughput Diffusion Pumps User Manual
Explosion
Operation of the diffusion pump without continuous evacuation below 0.5 Torr
(0.67 mbar), or without coolant and introducing a strong oxidizer (such as air)
or explosive vapors or powders or materials which may react with pumping
fluids in a hot pump (above 300 °F or 150 °C) can cause an explosion. Such an
explosion can violently expel valves and other hardware, slam open doors that
are not designed for appropriate pressure relief, or burst other components of
the vacuum system. Serious injury or death may result from expelled parts,
doors, shrapnel, and shock waves.
Three elements are required for explosion: fuel, oxidizer, and an ignition. A
combination of temperature and pressure can be a source of ignition. Most
diffusion pump fluids are fuels. Hydrocarbon fluids are more prone to oxidize
and explode than synthetic silicone-based fluid. The oxidizer can be air, which
can be introduced by a leak, deliberately brought in via a process, or
inadvertently admitted by operator error.
Oxygen and other strong oxidizers are even more dangerous than air. Certain
conditions of temperature and pressure can cause a combustible mixture to
explode. The larger the diffusion pump, the greater the risk of explosion and the
greater the risk of damage and injury. Never operate large diffusion pumps
utilizing hydrocarbon oils without a complete safety analysis for the entire
system and for the application.
Explosion and Fire from Acetone and Alcohol: Diffusion pumps are typically
cleaned with acetone and alcohol. When combined with air, oxygen, and other
oxides, alcohol and most other solvents are very flammable and explosive.
Never permit any trace of these cleaners to remain in or on the pump. Always
remove all traces of alcohol and acetone and other cleaners with clean, dry, oil-
free compressed air

Technical Information
High Throughput Diffusion Pumps User Manual 19
Never operate a large diffusion pump under the conditions listed in the following
table. Any of these situations increases the probability of an explosion.
Table 2 Explosive Conditions
Hazard
Suggested Corrective Action
Do not run pump without cooling water
Overtemperature
Do not run pump with low level of pump fluid
Overtemperature
Do not run pump without proper backing or
holding pump
Overpressure
Do not run pump when not evacuated below
0.5 Torr (0.67 mbar)
Overpressure
Do not admit air to, or rough through, a pump
with hot boiler
Overpressure plus strong oxidizer
Do not open drain or fill plug while pump is
under vacuum, especially when it is hot
Overpressure plus strong oxidizer
Do not contaminate pump with explosive vapors
Lower explosive threshold of gas mixtures
Do not remove, defeat, or override safety
counter-
measures such as pressure and thermal
switches and valve sequencer interlocks
Overtemperature, overpressure, more
combustible mixtures
Do not machine or weld any part of the pump
without removing all fluid or solvent residue in
pump
Source of ignition
Do not use unsuitable pumping fluid
Lower explosive threshold of gas mixture

Technical Information
20 High Throughput Diffusion Pumps User Manual
Pressurization Hazards
Large vacuum pumps and their components are designed for vacuum service. They
are not designed for pressurization, which could cause them to burst possibly
expelling shrapnel at lethal velocities. Serious accidents have been caused by
intentional pressurization of vacuum systems and their components.
Never pressurize any part of a vacuum system for test or any other purpose.
Always provide pressure relief when designing diffusion pumps into systems
and ensure that pressure relief motion is limited to safe envelopes.
Never permit the hazards in the following table to develop.
Table 3 Pressurization Hazards
Hazard
Suggested Corrective Action
Do not block inlet or vent of liquid nitrogen trap
and lines
LN
2
trap and/or lines burst
Do not close isolation valves at inlet and
discharge of main water cooling coils when
pump is heated
Water turns to steam and bursts coils
Do not pressurize the pump body (above 1 atm.)
Body of pump bursts
Do not make a hole through the vacuum wall
Loss of structural integrity of wall
Pressure Relief Devices: Systems must be designed with pressure relief
devices to provide safe pressure relief from internal explosions. Always
recognize that safety devices can fail or malfunction. Provide redundant
protection by installing devices having different failure modes, failure
mechanisms, and failure causes. Be certain that exhaust duct materials are
capable of withstanding the corrosiveness, temperature, and pressure of
exhausted products.