Agilent Technologies 5110 ICP-OES User manual

Agilent Restricted
Agilent 5110/5100 ICP-OES
Service Manual

Notices
Manual Part Number
G8010-90050 Revision A
August 2018
Copyright
© Agilent Technologies, Inc. 2018
No part of this manual may be reproduced in
any form or by any means (including electronic
storage and retrieval or translation into a foreign
language) without prior agreement and written
consent from Agilent Technologies, Inc. as
governed by United States and international
copyright laws.
Agilent Technologies
679 Springvale Road
MULGRAVE Victoria 3170, Australia
5110/ 5100 Applicability
This Service Manual is for use with both 5100
and 5110 instrument models. Reference to
5110 also applies to 5100 unless otherwise
stated.
Errata Statement
NOTICE: This document may contain
references to Varian. Please note that Varian,
Inc. is now part of Agilent Technologies. For
more information, go to
www.agilent.com/chem.
Warranty
The material contained in this document is
provided “as is,” and is subject to being changed,
without notice, in future editions. Further, to the
maximum extent permitted by applicable law,
Agilent disclaims all warranties, either express
or implied, with regard to this manual and any
information contained herein, including but not
limited to the implied warranties of
merchantability and fitness for a particular
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for incidental or consequential damages in
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and technical data rights granted to the federal
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- Commercial Items) and DFARS 227.7202-3
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Safety Notices
NOTE
A NOTE contains helpful information on
usage - it does not denote a hazard.
CAUTION
A CAUTION notice denotes a hazard. It
calls attention to an operating
procedure, practice, or the like that, if
not correctly performed or adhered to,
could result in damage to the product or
loss of important data. Do not proceed
beyond a CAUTION notice until the
indicated conditions are fully
understood and met.
WARNING
A WARNING notice denotes a hazard.
It calls attention to an operating
procedure, practice, or the like that, if
not correctly performed or adhered to,
could result in personal injury or death.
Do not proceed beyond a WARNING
notice until the indicated conditions
are fully understood and met.
Agilent Restricted

Content
Agilent 5110/5100 ICP-OES Service Manual Agilent Restricted 3
1 Safety Information
Precautions 12
General 13
Handling of Gas 15
2 Call Qualification
Customer Help Guide 18
Functional Issues 18
Performance Issues 20
Spare Parts 20
3 General Information
Specifications 24
Environmental Conditions and Utility Requirements 24
Agilent 5110/5100 ICP-OES system description 26
System overview 26
Instrument layout 28
Instrument configurations 30
Power distribution 31
Instrument control 33
Power On/Off switch indicator 35
Mains Power Module (MPM) Self Check 36
Initial 36
Stable 36
Off 36
Instrument Relay 36
RF Power Supply Relay 37
Heater 37
Blower 37
On 38
Shutdown 38
Instrument status indicator 39
Advanced Valve System (AVS) indicator 40
Plasma RF 41
RF Interlocks 43
Sample introduction 44
Description 44
Nebulizers 45
Glass Concentric Nebulizer 46
Seaspray Nebulizer 46
Ultrasonic 46
Spraychambers 47
Double-pass glass cyclonic (Twister) 47

Content
4Agilent Restricted Agilent 5110/5100 ICP-OES Service Manual
Optics 49
Description 49
Pre optics assembly 51
Polychromator assembly 52
Shutter 53
Pilot mirror 53
Entrance slit 53
Collimating mirror 53
Prism 53
Grating 53
Camera mirror 54
Full illumination LED Fiber Optic Source 54
Camera assembly 54
CCD layout 55
Gas Control 56
Water Control 58
Air Cooling 60
4 Removal/ Installation, Replacement and Adjustment
Tools and Supplies for 5110 instrument 62
Removal hierarchy 65
Instrument covers 67
Left hand side cover 67
Left hand top cover 68
Chimney 69
Right hand side cover 70
Top right hand cover 71
Front left lower cover 73
Torch compartment door 73
Sample introduction 74
Torch 74
Torch loader micro switch 75
Torch loader 77
Axial Cone Cooling interface 80
Peristaltic Pump 81
Advanced Valve System (AVS) 82
Switching Valve Head 83
Changing Valve Head Type 84
Instrument Electronics 85
Instrument Control module 86
Mains Power Module 87
Standby power switch 87
Mains Filter 88

Content
Agilent 5110/5100 ICP-OES Service Manual Agilent Restricted 5
Circuit breaker and power socket 88
RF System 89
RF Oscillator 89
RF Current Sensor 95
Igniter 96
SSRF Filter board 97
SSRF Control board 98
RF Power Supply (RFPS) 98
SSRF PSU interface board 99
RFPS cradle 99
Air Cooling 101
Air cooling filter 101
Cooling fan 101
Air cooling flow sensor 102
Plasma interlocks and sensors 103
RF Door interlock switches 103
Plasma sensor 104
RF1 (SSRF exhaust) temperature sensor 105
RF2 (Plasma exhaust) temperature sensor 105
Gas System 106
Gas control module 106
Gas Option 108
Gas Filter 109
Water system 111
Water control module 111
SSRF water inlet temperature sensor 112
Water filter 113
Optics System 114
Pre Optics System 114
Axial window 115
Radial window 116
Mirror axial M1 117
Mirror axial M2 118
Mirror axial M3 119
Mirror radial M1 120
Viewing height motor 120
Mirror radial M2 121
Beam combiner and PCA board 122
Thermal stabilizer 123
Polychromator 126
Polychromator access 127
Collimator and Focus mirror access 129
Pilot mirror M5 129

Content
6Agilent Restricted Agilent 5110/5100 ICP-OES Service Manual
Entrance slit 130
Grating Prism assembly 132
Camera access and removal 132
Optical alignment 137
Pre optics alignment 137
Polychromator and camera alignment 139
Camera image location adjustments 140
Focus Adjustments 142
Camera rotation 145
Argon ratio adjustment 149
5 Troubleshooting
Low Analytical Sensitivity 156
Perform an Instrument test 156
Sensitivity Failure - Analysis Table 157
Low Sensitivity Fault Finding Diagnostics 158
Blocked Nebulizer 160
Blocked Injector Tube 161
Pump Tubing 161
Organic Samples 161
Incorrectly Prepared Standards 161
Conditions not optimized 161
Camera Condensation 161
Failing Precision (Relative Standard Deviation) 164
Identifying the Problem 164
Precision Failure Analysis Table 165
Precision - Fault Finding Diagnostics 165
V-Groove Nebulizer 167
Concentric Glass Nebulizer 167
Torch 167
Contamination in Spraychamber 167
Pump/Pump Tubing 168
Instrument Calibration 168
Running Aqueous Analysis after Non-Aqueous Analysis 168
Partially Soluble Salts 168
High Salt Content 169
6 Customer Diagnostics and Problem Solving
Testing Nebulizer Back Pressure 172
Selecting Diagnostic Gauge Suites 174
Custom Gauges 175
Gas Supply Gauges 175
Plasma Gas Flow 175
Auxiliary Gas Flow 175
O2 Injection Gas Flow 175

Content
Agilent 5110/5100 ICP-OES Service Manual Agilent Restricted 7
Option Inlet Pressure 175
N2 Inlet Pressure 176
Water Cooling Gauges 176
RF Water Flow 176
Camera Water Flow 176
Water Inlet (°C) 176
Instrument (°C) 176
Air Flow 176
Optics Gauges 177
Polychromator (°C) 177
Polychromator Purge 177
Peltier (°C) Camera 177
Thermal Stabilizer (°C) 177
Camera Water Flow 177
Plasma Gauges 178
RF Water Flow 178
RF Power (kW) 178
Plasma Exhaust (°C) 178
Plasma Gas Flow 178
Auxiliary Gas Flow 178
General Gauges 178
Instrument (°C) 178
Mains Frequency 178
Mains Voltage 179
Atmospheric Pressure 179
Camera Water Flow 179
Other Gauges 179
Argon Inlet Pressure 179
Plotting Gauge Data on a Graph 179
Testing RF Water Flow 181
Purge Gas Flows Test 181
Selecting Instrument Tests 183
Instrument Tests: Functions and Failure modes 185
Subsystem Communication Test 185
Air Flow Test 185
Water Flow Test 185
Gas Flows Test 186
RF Generator Test 186
Camera Test 186
Optics Test 187
Instrument Performance Test 187
Advanced Valve System Test 187
Reports 188
7 Service Diagnostics and Fault Finding
Internet Protocol (IP) Address Configuration 190
Configure Controlling Computer IP Address 190

Content
8Agilent Restricted Agilent 5110/5100 ICP-OES Service Manual
Configure Instrument IP Address 191
Discover a lost IP Address 193
Status diagnostic codes 194
Software error messages 195
Instrument startup constraints 196
Engineer Service Diagnostic screens 197
ICP Expert Diagnostics 197
Typical Event logs (Plasma) 205
Plasma Start up Typical Event log 205
Plasma Extinguished Typical Event log 205
Instrument Error Logs 205
Poly Align Diagnostics 206
Developing a Manganese (Mn) Method 208
Flow chart diagnostics 210
Failure analysis 210
Failure analysis of instrument 211
Failure analysis of software (SW1) 213
Failure analysis of Plasma (PL1) 214
Failure analysis of RF (RF1) 215
Failure analysis of Torch loader (TL1) 216
Failure analysis of Torch compartment (TD1) 217
Failure analysis of Gas Control system (GC1) 218
Failure analysis of Peristaltic pump (PC1) 219
Failure analysis of Water Control system (WC1) 220
Failure analysis of Pre Optics system (PT1) 221
Failure analysis of Optics system (OP1) 222
Failure analysis of Camera system (CS1) 223
Failure analysis of Wavelength Calibration routine (WA1) 224
Failure analysis of Thermal Stabilizer (TS1) 225
Failure analysis of SSRF water cooling (SWC1) 226
Inter-Wiring diagrams 227
8 Support Parts
Instrument Covers 234
Instrument control module 236
Mains Module – Power Supplies 237
Axial/ Radial pre optics assembly 238
Left side RF box/ pre optics 240
Plasma compartment 242
RF box lower 243
Gas Control 244
Polychromator 246

Content
Agilent 5110/5100 ICP-OES Service Manual Agilent Restricted 9
Water module 247
Peristaltic Pump 248
Wiring Harness/ Looms 249
Air cooling 253
Advanced Valve System (AVS) 254
Parts Index 255
9 iTroubleshoot/Parts Predict
Problem Solving Table 258
10 Installation Guide (5110 ICP-OES)
Introduction 266
Standard installation times 267
Install ICP-OES System 268
Hardware installation 268
Mains connection 270
Gas connection 270
Water chiller connection 271
Water chiller connection to the spectrometer 272
Software installation 273
PC Hardware requirements 274
Installing the ICP Expert software 274
Software registration 274
Polychromator software (PolyAlign.exe) 276
Printer configuration 276
ICP Expert Help system 276
Sample introduction setup 277
Confirm system performance for 5110/5100 278
Start a plasma 278
From Shutdown mode (or for the first time) 278
From Standby mode 279
Instrument Calibration 281
Wavelength calibration and Detector calibration 281
If the calibration fails: 282
Instrument performance tests 283
Sample Introduction 283
Sample/standard solution 283
Blank 284
Rinse 284
Performance tests 284
Instrument conditions 284
Performance Test Procedure: 285

Content
10 Agilent Restricted Agilent 5110/5100 ICP-OES Service Manual
Performance test specifications and typical values 286
Analytical Tests 286
Resolution 286
Signal to Background Ratio (SBR/SRBR) 287
Precision 289
11 Preventative Maintenance
Maintenance overview 291
Initial performance test 292
Inspect and clean the system 293
Accessories 294
Sample introduction system 294
Cooling water system 295
Status results table 296
Performance tests 297
Service Engineer comments 297
Preventative Maintenance requirements 298
Resources required 298
12 Peripherals
Water cooling system 300
System description and specifications 300
Cooling requirements 300
Important information 301
Water cooling system location 301
Anti-algae requirements 301
Installation hints 302
Assembling and commissioning 302
Connection to the spectrometer 303
Pre-conditioning the water cooling system 303
Leak testing 304
Routine maintenance 304
Cleaning 304
Pump strainer 304
Preventative Maintenance visit: 305
13 Appendix
Water Hose Fitting 308
Amendments 310

Agilent 5110/5100 ICP-OES Service Manual Agilent Restricted 11
1SafetyInformation
Precautions 12
General 13
Handling of Gas 15

12 Agilent Restricted Agilent 5110/5100 ICP-OES Service Manual
1 Safety Information
Precautions
Precautions
Before servicing the various components of the Agilent 5110/5100 ICP- OES, observe the
following safety precautions.
WARNING
A WARNING notice denotes a hazard. It calls attention to an operating procedure, practice, or
the like that, if not correctly performed or adhered to, could result in personal injury or death.
Do not proceed beyond a WARNING notice until the indicated conditions are fully understood
and met.
CAUTION
This is a caution statement. A CAUTION notice denotes a hazard. It calls attention to an
operating procedure, practice, or the like that, if not correctly performed or adhered to, could
result in damage to the product or loss of important data. Do not proceed beyond a CAUTION
notice until the indicated conditions are fully understood and met.
NOTE
A NOTE contains helpful information on the usage - it does not denote a hazard.

Agilent 5110/5100 ICP-OES Service Manual Agilent Restricted 13
1 Safety Information
General
General
WARNING
Warning – High Voltage. To prevent Electric Shock always turn the power off at the main
switch before accessing the interior of the instrument. This is for your own safety as well as
to avoid damage to the electronics.
NOTE
When disassembling and reassembling the instrument and parts, be sure to reinstall all screws.
The screws serve the additional purpose of holding the many RF shielding panels and parts
firmly in place. Failure to install and tighten all screws can allow RF interference leading to
degradation in performance.
CAUTION
The following precautions should always be taken during operation or maintenance of the
Agilent 5110:
• Check acid concentration. Continuous aspiration of a highly concentrated acid might
attack the inside of the instrument.
• Close the instrument door and panels before operation.
• Check the exhaust system for a positive extraction at the exhaust duct.
• Handle solvents correctly.
•Checkthedrainvessel frequently.
•Storeargonsafely.
• Wait for the instrument to cool before performing any maintenance operations.
• Check the condition of the pipes, replace as needed.
• Pay close attention to the cautions and warnings within this manual and the Agilent 5110
ICP-OES Users Manuals.
CAUTION
• Always turn OFF the main power switch and disconnect the power cable to avoid any
electric shock when accessing the electronics components in the instrument.
• When storing or handling PCAs (Printed Circuit Assemblies), always place them in static
control envelopes or enclosures.
• Always make sure you are properly grounded (e.g., wearing an ESD strap) before handling
electro-static sensitive components such as Printed Circuit Assemblies.
• When disconnecting plugs, pull on the plug, not the wires.
WARNING
Warning – UV Radiation. The plasma emits UV radiation. This is harmful to the eye if one
views the plasma directly. To prevent such an occurrence, the instrument interlocks must not
be disabled. If it is necessary to observe the plasma visually, this must be done with approved
safety spectacles or through an inspection glass. Care and attention must also be exercised
with regard to exposure of the face or hands to UV radiation.

14 Agilent Restricted Agilent 5110/5100 ICP-OES Service Manual
1 Safety Information
General
WARNING
Warning – High Radio Frequency Radiation
• The coil around the torch emits high frequency radiation. Even at low power it can cause
damage to living tissue, therefore the torch must be shielded in a grounded cage. Never
disable the safety features which prevent leakage of High Radio Frequency Radiation via
an open door. High Radio Frequency Radiation can cause interference to medical
electronics such as pacemakers.
• Touching the coil during ignition or operation will cause burns.
WARNING
Warning – Exhaust System
• Because there can be health hazards, the exhaust gases from the plasma must be
eliminated through the laboratory's ventilation duct. If inadequate ventilation occurs,
ozone, and other toxic products of combustion can accumulate in the laboratory and cause
bodily harm.
• Hydrofluoric acid (HF) fumes, if inhaled, can extensively damage lung tissue. Ensure that
the exhaust system established at installation continues to operate effectively. You can
connect a warning light to the extraction system or use an air-flow measurement device to
alert the operator to a malfunction. Prior to operating the instrument, check the
laboratory's ventilation duct.
• If the extraction system has an inoperable exhaust fan or insufficient draw, do not start the
plasma. Contact site maintenance personnel.

Agilent 5110/5100 ICP-OES Service Manual Agilent Restricted 15
1 Safety Information
Handling of Gas
Handling of Gas
WARNING
Warning – Storing Argon Safely
Argon, which is used to create the plasma, is a dangerous gas only if it displaces the air you
are breathing or is mishandled in its storage cylinder. Take the following precautions to
prevent an explosion or suffocation hazard:
• Secure the cylinder valve caps and move the cylinder with an approved handcart.
• Label the gas cylinder clearly and store it vertically away from all ignition and heat sources.
• The Argon cylinder will release argon through a pressure-relief device if the temperature
exceeds 52°C.
• Protect cylinders that are stored outside from the sun and extreme temperatures. Place
the cylinder on a level surface above ground.
• Attach the argon hoses tightly to both the instrument and gas source. Route the hoses so
they cannot be damaged or crimped. Check for leaks using an electronic leak detector or
by pressurized test.
• Provide adequate ventilation around the gas cylinders, especially if they are placed in a
small storeroom.
WARNING
Warning – Other Gases
Gases must be handled with care.
• Refer to the MSDS (Material Safety Data Sheet) for safe handling information.
• Check for gas leaks periodically using the appropriate tools (leak detector, pressure test,
etc.)

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16 Agilent Restricted Agilent 5110/5100 ICP-OES Service Manual

Agilent 5110/5100 ICP-OES Service Manual Agilent Restricted 17
2 Call Qualification
Customer Help Guide 18

18 Agilent Restricted Agilent 5110/5100 ICP-OES Service Manual
2 Call Qualification
Customer Help Guide
Customer Help Guide
The following help guide is designed to support Call Qualification when a Customer phones the
Call Centre for help. The guide provides a step by step approach to assist in resolving Customer
issues over the phone where possible (Call deflected).
If a service visit is required, the guide should assist in better understanding the nature of the
problem and providing accurate parts prediction to resolve the issue with a single visit.
Follow the steps below to maximize the probability of solving the problem without escalation to
the next level.
1Document the failure mode as described by the customer.
2Probe the customer for answers with regard to the following:
•For Instrument Power on check On Off Switch Indicator
•For Instrument Startup Communication and Interlock feedback check the Status
Indicator
•Application being run?
•Symptoms?
aSoftware Errors?
bFor PC Communications Related issues refer to the IP Protocol Section
•Frequency of occurrence
aIntermittent or continuous?
bWhen Cold or Hot, First turned On, Time of Day?
•Environmental Conditions?
aUtilities setup correctly, (Gas, Power, Exhaust)?
3The problem can usually be categorised into either Functional or Performance or If not sure
continue with next step.
4Open a Demo version of the MP Software interface and ask the Customer to do the following:
Functional Issues
5Check the Status Diagnostic codes .
•Analyse accordingly
6For Software version 7.3 and higher, go to the Dash Board Tab.
7Check all Gauge Suites (Gauge Select). Are all parameters in the Green?

Agilent 5110/5100 ICP-OES Service Manual Agilent Restricted 19
2 Call Qualification
Customer Help Guide
8Ask Customer to light a plasma and check for conditional parameters not in the Red zone. If
in the Red zone ask the customer to adjust the relevant input pressure etc. Go to the
following sections to assist in diagnosis.
•Dashboard descriptions
•Instrument Specifications
If no gauges in the Red zone progress to next steps.
9For Software versions 7.3 and higher, Run Tests on “Tests” Tab. (For S/W versions below 7.3
only the “Instrument Performance” Test will be available).
Functional issues are outlined in red above. If any of these tests are failing this suggests an
instrument fault. Go to the following section for diagnosis.
•Instrument Test Descriptions
10 Go to step 17 otherwise continue to next step.

20 Agilent Restricted Agilent 5110/5100 ICP-OES Service Manual
2 Call Qualification
Customer Help Guide
Performance Issues
•Instrument Test Descriptions
Performance issues (Marked in Red outline above) can be attributed to Sample Introduction
Setup including cleanliness, Wavelength Calibration, Method setup and Applications. Take
the following steps to identify the issue.
11 Check tubing for correct installation including pump tube tension and check spraychamber is
draining correctly.
12 Check Nebulizer back pressure. On the Dashboard tab to ensure it’s clear of blockages.
13 For Performance related failures refer to the following:
•Analytical Sensitivity failures
•Precision Failures
14 Recalibrate instrument Wavelengths and Detector Dark Current offsets.
•Instrument Calibration
15 Verify Method Parameters are suitable.
16 If problem still can’t be resolved ask for Error Log to be sent through for analysis before
escalating to next level.
•Instrument Error Log location
17 If Parts Prediction is required go to itroubleshoot Parts Predict for more accurate prediction
of parts required or go to:
Spare Parts
•Instrument Covers