Agilent Technologies 9698205M016 User manual

IPS - Integrated
Pumping System
Model
9698205M016
Instruction Manual
87-901-012-01
10/2017

IPS - Integrated Pumping System / 887-901-012-01
Notices
© Agilent Technologies, Inc. 2016
No part of this manual may be
reproduced in any form or by any
means (including electronic storage
and retrieval or translation into a
foreign language) without prior
agreement and written consent from
Agilent Technologies, Inc. as governed
by United States and international
copyright laws.
Manual Part Number
Publication Number: 87-901-012-01
Edition
Edition 10/2017
Printed in ITALY
Agilent Technologies Italia S.p.A.
Vacuum Products Division
Via F.lli Varian, 54
10040 Leinì (TO)
ITALY
Warranty
The material contained in this
document is provided “as is,” and is
subject to being changed, without
notice, in future editions. Further, to
the maximum extent permitted by
applicable law, Agilent disclaims all
warranties, either express or implied,
with regard to this manual and any
information contained herein,
including but not limited to the
implied warranties of merchantability
and fitness for a particular purpose.
Agilent shall not be liable for errors
or for incidental or consequential
damages in connection with the
furnishing, use, or performance of
this document or of any information
contained herein. Should Agilent and
the user have a separate written
agreement with warranty terms
covering the material in this
document that conflict with these
terms, the warranty terms in the
separate agreement shall control.
Technology Licenses
The hardware and/or software
described in this document are
furnished under a license and may be
used or copied only in accordance
with the terms of such license.
Restricted Rights Legend
If software is for use in the
performance of a U.S. Government
prime contract or subcontract,
Software is delivered and licensed as
“Commercial computer software” as
defined in DFAR 252.227-7014 (June
1995), or as a “commercial item” as
defined in FAR 2.101(a) or as
“Restricted computer software” as
defined in FAR 52.227-19 (June 1987)
or any equivalent agency regulation or
contract clause. Use, duplication or
disclosure of Software is subject to
Agilent Technologies’ standard
commercial license terms, and non-
DOD Departments and Agencies of the
U.S. Government will receive no
greater than Restricted Rights as
defined in FAR 52.227-19(c)(1-2) (June
1987). U.S. Government users will
receive no greater than Limited Rights
as defined in FAR 52.227-14 (June
1987) or DFAR 252.227-7015 (b)(2)
(November 1995), as applicable in any
technical data.
Trademarks
Windows and MS Windows are U.S.
registered trademarks of Microsoft
Corporation.
Safety Notices
A CAUTION notice denotes a hazard.
It calls attention to an operating
procedure, practice, or the like that, if
not correctly performed or adhered to,
could result in damage to the product
or loss of important data. Do not
proceed beyond a CAUTION notice
until the indicated conditions are fully
understood and met.
A WARNING notice denotes a
hazard. It calls attention to an
operating procedure, practice, or the
like that, if not correctly performed
or adhered to, could result in
personal injury or death. Do not
proceed beyond a WARNING notice
until the indicated conditions are
fully understood and met.
WARNING
CAUTION

IPS - Integrated Pumping System
IPS - Integrated Pumping System / 887-901-012-01 3/64
IPS - Integrated Pumping System

IPS - Integrated Pumping System
4/64 IPS - Integrated Pumping System / 887-901-012-01

Contents
IPS - Integrated Pumping System / 887-901-012-01 5/64
Contents
1
Installation Procedure 7
Safety Guideline for Turbomolecular Pumps 8
General Information 9
Storage 11
Preparation for Installation 12
Installation 14
Use 15
Operating Procedure 18
Maintenance 20
Disposal 21
2
Technical Information 23
Description of the Elekta Pumping System 25
Turbopump Description 27
System Venting Port 28
Controller Description 29
Analog I/O & RS232 Ports and Status LED 30
Turbomolecular Pump Speed Bar-Graph 31
Main Switch 32
Input Power Connector 33

Contents
6/64 IPS - Integrated Pumping System / 887-901-012-01
Rotary Vane Forepump Description 34
Oil Level Check Window 35
Oil Drain Port 36
Exhaust Filtered Port37
Inlet Screen Installation 38
Technical Specification 39
Elekta Pumping System Outline 40
Interconnections 41
RS 232 Communication Description 43
Window Protocol 45
Maintenance 55
Troubleshooting 57
Accessories Kit 58

IPS - Integrated Pumping System
7/64
1
Installation Procedure
Safety Guideline for Turbomolecular Pumps 8
General Information 9
Safety Symbols 10
Storage 11
Preparation for Installation 12
Installation 14
Use 15
Operating Procedure 18
Switching on and Use of Elekta Pumping System 18
Elekta Pumping System Switching off18
Emergency Stop 19
Maintenance 20
Disposal 21
Original Instructions

1 Installation Procedure
Safety Guideline for Turbomolecular Pumps
8/64 IPS - Integrated Pumping System / 887-901-012-01
Safety Guideline for Turbomolecular Pumps
Turbomolecular pumps as described in the following operating
manual contain a large amount of kinetic energy due to the high
rotational speed in combination with the specific mass of their
rotors.
In case of a malfunction of the system for example rotor/stator
contact or even a rotor crash the rotational energy may be released.
WARNING!
To avoid damage to equipment and to prevent injuries to operating personnel
the installation instructions as given in this manual should be strictly
followed!

Installation Procedure
General Information
1
IPS - Integrated Pumping System / 887-901-012-01 9/64
General Information
This equipment is destined for use by professionals. The user should
read this instruction manual and any other additional information
supplied by Agilent before operating the equipment. Agilent will not
be held responsible for any events occurring due to non-compliance,
even partial, with these instructions, improper use by untrained
persons, non-authorized interference with the equipment or any
action contrary to that provided for by specific national standards.
This manual uses the following standard protocol:
WARNING!
The warning messages are for attracting the attention of the operator to a
particular procedure or practice which, if not followed correctly, could lead
to serious injury.
CAUTION! The caution messages are displayed before procedures which, if not followed,
could cause damage to the equipment.
NOTE The notes contain important information taken from the text.

1 Installation Procedure
General Information
10/64 IPS - Integrated Pumping System / 887-901-012-01
Safety Symbols
SYMBOLS SYMBOLS DESCRIPTIONS
Access denied to active pacemaker’s holders.
The device is marked with this symbol t to
indicate that pacemaker holders must not come
in contact with the device itself.
Electric hazard.
The device is marked with this symbol when the
operator, due to the presence of an high voltage,
must refer to the user manual in order to protect
himself from electrical shock risks.
Magnetic field hazard.
The device is marked with this symbol to inform
the operator about the presence of a magnetic
field.
Hot surface hazard.
The device is marked with this symbol when the
operator must avoid the contact with potentially
hot surfaces which may cause burns.

Installation Procedure
Storage
1
IPS - Integrated Pumping System / 887-901-012-01 11/64
Storage
In order to guarantee the maximum level of performance and
reliability of Agilent pumping systems, the following guidelines must
be followed:
when shipping, moving and storing pumps, the following
environmental specifications should not be exceeded;
temperature range: -40F to +158F (-40 °C to 70 °C);
relative humidity range: 0 to 90% (non-condensing);
the shelf life of a turbomolecular pump is 12 months from the
shipping date, the shipping date can be found on the external
packaging.
CAUTION! If for any reason the shelf life time is exceeded, the pump has to be returned to
the factory. Please contact the local Elekta Service representative for
information.

1 Installation Procedure
Preparation for Installation
12/64 IPS - Integrated Pumping System / 887-901-012-01
Preparation for Installation
The Elekta Pumping System is supplied in a special protective
packing. If this shows signs of damage which may have occurred
during transport, contact your local Elekta office.
When unpacking the system, be sure not to drop it and avoid any
kind of sudden impact or shock vibration to it.
Do not dispose of the packing materials in an unauthorized manner.
The material is 100% recyclable and complies with EEC Directive
94/62 and subsequent amendments.
CAUTION! In order to prevent outgassing problems, do not use bare hands to handle
components which will be exposed to vacuum. Always use gloves or other
appropriate protection.
NOTE Normal exposure to the environment cannot damage the Elekta Pumping
System. Nevertheless, it is advisable to keep it closed until it is installed in the
system, thus preventing any form of pollution by dust.

Installation Procedure
Preparation for Installation
1
IPS - Integrated Pumping System / 887-901-012-01 13/64
Figure 1 Packaging of the IPS - Integrated Pumping System.

1 Installation Procedure
Installation
14/64 IPS - Integrated Pumping System / 887-901-012-01
Installation
CAUTION! Do not remove the stainless steel protective flange until you are ready to
connect the turbomolecular pump to the system.
Install this device indoors only, and in any case, do not use the pump
in an environment exposed to atmospheric agents (rain, snow, ice),
dust, aggressive gases, or in explosive environments or those with a
high fire risk. During operation, the following environmental
conditions must be respected:
maximum pressure: 2 bar above atmospheric pressure
temperature: from 54F to 95F (+12 °C to +35 °C)
relative humidity: 0 - 90% (non-condensing)
In the presence of magnetic fields the pump must be protected using
a ferromagnetic shield.
The Elekta Pumping System must be installed in the horizontal
position. Fix the Elekta Pumping System in a stable position.
For installation of optional accessories, see "Technical Information".

Installation Procedure
Use
1
IPS - Integrated Pumping System / 887-901-012-01 15/64
Use
This paragraph details the fundamental operating procedures.
Make all electrical and pneumatic connections before the use of the
system.
While heating the vacuum chamber, the temperature of the inlet
flange must not exceed 176F (80 °C).
WARNING!
Never use the turbopump when the inlet flange is not connected to the
vacuum chamber or is not blanked.
WARNING!
Never switch the system on before removing the exhaust blanked adapter.
WARNING!
Do not touch the turbopump or any of its accessories during the heating
process. The high temperatures may cause burns.

1 Installation Procedure
Use
16/64 IPS - Integrated Pumping System / 887-901-012-01
WARNING!
Avoid impacts or harsh movements of the pump when in operation, which
could result in equipment damage or operator injury.
CAUTION! Use inert gas free from dust, particles or humidity (like dry air) for venting the
pump. The pressure at the vent port must be less than 2 bar (above at
mospheric
pressure).
WARNING!
When employing the pump for pumping toxic, flammable, or radioactive
gases, please follow the required procedures for each gas disposal.
Do not use the pump in presence of explosive gases.
The pump is designed to pump high throughput of N2, Ar and lighter gas.
Should you need to pump gases heavier than Ar, please contact Agilent
technical support for information.
NOTE When the Elekta pumping system has been stored at a temperature le
ss than 12
°C, wait until the Elekta pumping system has reached the above mentioned
temperature. Do not operate the Elekta Pumping System at temperatures below
54F (12 °C).
NOTE To optimize the Elekta Pumping System ramp-up is recommended to start the
system at least 68F (20 °C).

Installation Procedure
Use
1
IPS - Integrated Pumping System / 887-901-012-01 17/64
CAUTION! The bearings of the turbomolecular pump are lubricated by a solid grease which
is maintenance free provided the pump is used regularly.
Avoid long term storage if possible.
When long term storage is necessary the pump should be run for at least 1
hours every 6 months to re-distribute the grease within the turbomolecular
pump bearing.
Failure to observe this maintenance may lead to premature wear and could
result in failure of the bearings.

1 Installation Procedure
Operating Procedure
18/64 IPS - Integrated Pumping System / 887-901-012-01
Operating Procedure
Switching on and Use of Elekta Pumping System
To switch on the Elekta Pumping System it is sufficient to supply the
mains and then move the external switch to ON position.
Immediately after the switch ON the system perform a short auto
test, in this phase all the LEDs will lighted and will ring a short
acoustic signal.
The integrated controller automatically recognizes the mains
presence and starts-up the pump.
The blue LED “STATUS” located on the Elekta Pumping System base
front panel indicates with its flashing frequency the system operating
modes:
ON steadily: standalone mode (no serial communication);
slowly flashing (period of about 50 ms): interface mode, active
serial communication.
See the appendix "Technical Information" for a detailed description
of the Elekta Pumping System control panel and specific parts.
Elekta Pumping System Switching off
To switch off the Elekta Pumping System it is sufficient to move the
external switch to the OFF position. The integrated controller
immediately switches off the pumps (the rotary vane pump stops
immediately, and the turbomolecular pump begins to slow down).
After switching off the system wait 15 to 20 seconds for the
turbomolecular pump to slow down then turn the vent valve 1/4 turn
anti-clockwise to vent the system.

Installation Procedure
Operating Procedure
1
IPS - Integrated Pumping System / 887-901-012-01 19/64
Emergency Stop
To immediately stop the Elekta Pumping System in an emergency
condition it is possible to remove the supply cable from the mains
plug or move the external switch to the OFF position.

1 Installation Procedure
Maintenance
20/64 IPS - Integrated Pumping System / 887-901-012-01
Maintenance
The Elekta Pumping System does not require any particular
maintenance (except the oil change made on a yearly basis and filling
up). Any work performed on the system must be carried out by
authorized personnel.
WARNING!
Before carrying out any work on the system, disconnect it from the mains,
vent the pump by opening the appropriate valve, wait until the rotor has
stopped turning and wait until the surface temperature of the pump falls
below 122F (50 °C).
In the case of breakdown, contact your local Elekta Service
organization.
NOTE Before returning the system to the constructor for repairs, the "Request for
Return" sheet attached to this instruction manual must be filled-in and sent to
the local sales office. A copy of the sheet must be inserted in the system
package before shipping.
If a system is to be scrapped, it must be disposed of in accordance
with the specific national standards.