Agilent Technologies TriScroll 300 User manual

INSTALLATION AND
OPERATION MANUAL
Vacuum Products Division
TriScroll
TM
300
Inverter
Dry Scroll
Vacuum Pump
Manual No. 699904355
Revision C
October 2009

Copyright 2009
Agilent, Inc.
TriScroll
™
300 Inverter
Dry Scroll Vacuum Pump
TriScroll is a trademark of Agilent, Inc.

iii
TriScroll 300 Inverter Vacuum Pump
Table of Contents
Declaration of Conformity
Warranty ...................................................................viii
Warranty Replacement and Adjustment..............viii
Instructions for Use ..................................................... 1
General Information ................................................. 1
Storage ................................................................. 1
Unpacking and Inspection........................................ 1
Installation Requirements ......................................... 2
Safety ................................................................... 2
Operation................................................................. 4
Startup Procedure ................................................. 4
Shutdown Procedure ............................................ 4
Maintenance ............................................................ 4
Technical Information ................................................. 5
Pump Electrical Controller........................................ 8
Technical Specifications....................................... 9
Serial Interface Specification RS485 and RS232.. 10
Gas Ballast ............................................................. 12
Bearing Purge......................................................... 12
Purge Kit ................................................................ 12
Isolation Valve Kit .................................................. 12
CT-100 Speed Control Kit....................................... 14
VPI and CT100 Speed Control Kit........................... 15
Exhaust Silencer Kit ................................................ 16
Vibration Isolation Kit............................................. 16
HEPA Inlet filter...................................................... 16
Troubleshooting ..................................................... 17
Maintenance .......................................................... 18
General Information ........................................... 18
Related TriScroll Manuals................................... 18
Maintenance and Tooling Kits ............................ 19
Factory Service Options...................................... 20
Accessories......................................................... 20
Contacting Agilent.............................................. 20

TriScroll 300 Inverter Vacuum Pump
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v
TriScroll 300 Inverter Vacuum Pump
List of Figures
Figure Caption Page
1 Interface Drawing with Dimensions . . . . . . . 6
2 Pumping Speed Curves . . . . . . . . . . . . . . . . . 6
3 TriScroll 300 Inverter Vacuum Pump . . . . . . . 7
4 Inverter Interface . . . . . . . . . . . . . . . . . . . . . . 7
5 Driving Frequency vs. Analog Input . . . . . . . . 9
6 T+ Pumps List . . . . . . . . . . . . . . . . . . . . . . . 11
7 T-Unknown Pump . . . . . . . . . . . . . . . . . . . . 12
8 Isolation Valve Position . . . . . . . . . . . . . . . . 13
9 Pumping Speed Percentage Drop . . . . . . . . . 14
10 VPI and CT100 Kit . . . . . . . . . . . . . . . . . . . 15
11 Serial Number Location . . . . . . . . . . . . . . . 15
List of Tables
Table Title Page
1 Power Cord Selection .................................... 3
2 Circuit Breaker Requirements......................... 3
3 Specifications ................................................ 5
4 P1 Interlock ................................................... 8
5 J2-Serial Port.................................................. 8
6 T-Plus Software Variables .............................. 8
7 Status LEDs .................................................... 9
8 Troubleshooting Chart ................................. 11
9 Other Related Manuals ................................ 12
10 Maintenance and Tooling Kits ..................... 13
11 Factory Service Options............................... 14
12 Accessories .................................................. 14

TriScroll 300 Inverter Vacuum Pump
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declare under our sole responsibility that the product,
erklären, in alleniniger Verantwortung, daß dieses Produkt,
déclarons sous notre seule responsabilité que le produit,
declaramos, bajo nuestra sola responsabilidad, que el producto,
verklaren onder onze verantwoordelijkheid, dat het product,
dichiariamo sotto nostra unica responsabilità, che il prodotto,
Declaration of Conformity
Konformitätserklärung
Déclaration de Conformité
Declaración de Conformidad
Verklaring de Overeenstemming
Dichiarazione di Conformità
to which this declaration relates is in conformity with the following standard(s) or other normative documents.
auf das sich diese Erklärung bezieht, mit der/den flogenden Norm(en) oder Richtlinie(n) übereinstimmt.
auquel se réfère cette déclaration est conforme à la (auz) norme(s) ou au(x) document(s) normatif(s).
al que se refiere esta declaración es conforme a la(s) norma(s) u otro(s) documento(s) normativo(s).
waamaar deze verklaring verwijst, aan de volende norm(en) of richtlijn(en) beantwoodt.
a cui se rifersce questa dichiarazione è conforme alla/e sequente/I norma/o documento/I normativo/i.
We
Wir
Nous
Nosotros
Wij
Noi
Agilent, Inc.
John Ehmam
Operations Manager
March 2003
121 Hartwell Avenue
Lexington, MA, 02421-3133 USA
Agilent, Inc.
Vacuum Products Division
Lexington, Massachusetts, USA
TriScroll Inverter Vacuum Pumps (PTS03001INV, PSS06001INV)
98/37/EEC, Machinery Directive
EN 1012-2:1996 Compressors and vacuum pumps safety reqmts; Part 2 vacuum pumps
EN 1050:1996 Safety of machinery - principles for risk assessment
EN 60204-1 Electrical equipment of industrial machines; general requirements
73/023/EEC, Low Voltage Directive
EN 60034 part 1 Rotating electrical machines - Part 1: Rating and performance
EN 61010-1:2001 Safety requirements for electrical equipment for measurement, control and
laboratory use
89/336/EEC, Electromagnetic Compatibility Directive
EN 61000-4-2 Testing and measurement techniques - Electrostatic discharge immunity test
EN 61326:1997/A3:2003 Electrical equipment for measurement, control and laboratory use
Declaration of Conformity

TriScroll 300 Inverter Vacuum Pump
viii
Warranty
Products manufactured by Seller are warranted against
defects in materials and workmanship for twelve (12)
months from date of shipment thereof to Customer, and
Seller’s liability under valid warranty claims is limited, at
the option of Seller, to repair, to replace, or refund of an
equitable portion of the purchase price of the Product.
Items expendable in normal use are not covered by this
warranty. All warranty replacement or repair of parts shall
be limited to equipment malfunctions which, in the sole
opinion of Seller, are due or traceable to defects in
original materials or workmanship. All obligations of
Seller under this warranty shall cease in the event of
abuse, accident, alteration, misuse, or neglect of the
equipment. In-warranty repaired or replaced parts are
warranted only for the remaining unexpired portion of the
original warranty period applicable to the repaired or
replaced parts. After expiration of the applicable warranty
period, Customer shall be charged at the then current
prices for parts, labor, and transportation.
Reasonable care must be used to avoid hazards. Seller
expressly disclaims responsibility for loss or damage
caused by use of its Products other than in accordance
with proper operating procedures.
Except as stated herein, Seller makes no warranty, express
or implied (either in fact or by operation of law), statutory
or otherwise; and, except as stated herein, Seller shall
have no liability under any warranty, express or implied
(either in fact or by operation of law), statutory or
otherwise. Statements made by any person, including
representatives of Seller, which are inconsistent or in
conflict with the terms of this warranty shall not be
binding upon Seller unless reduced to writing and
approved by an officer of Seller.
Warranty Replacement and Adjustment
All claims under warranty must be made promptly after
occurrence of circumstances giving rise thereto, and must
be received within the applicable warranty period by
Seller or its authorized representative. Such claims should
include the Product serial number, the date of shipment,
and a full description of the circumstances giving rise to
the claim. Before any Products are returned for repair
and/or adjustment, written authorization from Seller or its
authorized representative for the return and instructions
as to how and where these Products should be returned
must be obtained. Any Product returned to Seller for
examination shall be prepaid via the means of
transportation indicated as acceptable by Seller. Seller
reserves the right to reject any warranty claim not
promptly reported and any warranty claim on any item
that has been altered or has been returned by
non-acceptable means of transportation. When any
Product is returned for examination and inspection, or for
any other reason, Customer shall be responsible for all
damage resulting from improper packing or handling, and
for loss in transit, notwithstanding any defect or
non-conformity in the Product. In all cases, Seller has the
sole responsibility for determining the cause and nature of
failure, and Seller’s determination with regard thereto
shall be final.
If it is found that Seller’s Product has been returned
without cause and is still serviceable, Customer will be
notified and the Product returned at its expense; in
addition, a charge for testing and examination may be
made on Products so returned.
3/1/00

1
TriScroll 300 Inverter Vacuum Pump
DRAFT 6/5/11
Instructions for Use
General Information
This equipment is designed for use by professionals. The
user should read this instruction manual and any other
additional information supplied by Agilent before
operating the equipment. Agilent will not be held
responsible for any events that occur due to
non-compliance with these instructions, improper use by
untrained persons, non-authorized interference with the
equipment, or any action contrary to that provided for by
specific national standards.
The TriScroll™ 300 is a dry, scroll vacuum pump. This
pump is suitable for pumping air or inert gases. The pump
is not intended to pump toxic, corrosive, explosive, or
particulate-forming gases.
The following paragraphs contain all the information
necessary to guarantee the safety of the operator when
using the equipment. Detailed information is supplied in
“Technical Information” on page 5.
This manual uses the following standard safety protocol:
Storage
When transporting and storing the pump, the following
environmental requirements should not be exceeded:
Unpacking and Inspection
The shipping container is a double carton.
1. After opening the outer box, remove the foam packing.
2. Slit open the inner box.
3. Lift the pump with the plywood base out of the inner
box.
4. Remove the four bolts securing the pump frame to
the plywood base.
5. Locate the NW16 exhaust fitting and set it aside.
6. Inspect the pump for damage.
If there is shipping damage, contact the freight carrier
and your local Agilent sales office immediately.
7. Save the carton and packing materials.
Total weight of the package, including the pump, is
approximately 33.6 kg (74 lbs).
WARNING The warning messages are for
attracting the attention of the opera-
tor to a particular procedure or prac-
tice which, if not followed correctly,
could lead to serious injury.
CAUTION The caution messages are displayed
before procedures, which if not fol-
lowed, could cause damage to the
equipment.
NOTE The notes contain important
information taken from the text.
Temperature: –20 °C to 60 °C (–4 °F to 140 °F)
Relative humidity: 0 to 95% (non-condensing)
WARNING When unpacking the pump, be sure
not to drop it, and avoid any kind of
sudden impact or shock vibration
to it.
WARNING The TriScroll 300 weighs 26 kg
(57 lbs). To avoid injury, use proper
lifting techniques when moving the
pump.
NOTE Normal exposure to the environ-
ment cannot damage the pump.
Nevertheless, it is advisable to keep
the pump inlet closed until the
pump is installed in the system.

DRAFT 6/5/11
TriScroll 300 Inverter Vacuum Pump
2
Installation Requirements
Safety
Do not remove or modify any safety or insulating
equipment from the pump. To do so may create a serious
safety hazard and may void the warranty.
During operation, the following environmental
conditions should not be exceeded:
WARNING ❑ This pump is designed to pump
air and inert gases only; it is not
designed to pump explosive, flam-
mable, toxic, or corrosive gases.
They can cause bodily injury,
explosion, or fire.
❑ Install in an area that is not
exposed to rain, steam, or excessive
humidity. They can cause electric
shock, short circuits, and severe
bodily injury.
❑ Before inspecting or servicing the
pump, be sure the electrical supply
is disconnected.
❑ Consult a qualified electrician
whenever wiring the pump.
CAUTION Although the pump can pump trace
particulates normally found in the
atmosphere, it is not designed for
process solids, chemicals, powders,
solvents, condensates, or other par-
ticulates. They can damage the
equipment, degrade its performance,
or shorten its useful life.
Single and three phase pumps oper-
ate in a clockwise direction when
viewed from the motor end. (Note
the arrow on the pump frame.)
Improper rotation can cause perma-
nent damage to the pump.
Temperature: +5 °C to +40 °C (+41 °F to +104 °F)
Relative humidity: 0 to 95% (non-condensing)
CAUTION Do not block the fan ducts because
the pump can become overheated.
A pump surface temperature in
excess of 55 °C (131 ° F) is poten-
tially damaging. If such conditions
are observed, turn pump off and
allow to cool. Disassemble, inspect
for damage, and repair if necessary.
CAUTION To reduce the risk of electric shock,
do not expose to rain; store indoors.