Agilent Technologies HS-2 User manual

HS-2 Diffusion Pump
User Manual

2 HS-2 Diffusion Pump User Manual
Notices
Manual Part Number
699901150
Edition H.00, April 2021
Copyright
© Agilent Technologies, Inc. 2021
No part of this manual may be
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Safety Notices
A CAUTION notice denotes a hazard. It
calls attention to an operating
procedure, practice, or the like that, if
not correctly performed or adhered to,
could result in damage to the product
or loss of important data. Do not
proceed beyond a CAUTION notice
until the indicated conditions are fully
understood and met.
A WARNING notice denotes a hazard.
It calls attention to an operating
procedure, practice, or the like that, if
not correctly performed or adhered to,
could result in personal injury or death.
Do not proceed beyond a WARNING
notice until the indicated conditions
are fully understood and met.
WARNING
CAUTION

Contents
HS-2 Diffusion Pump User Manual 3
Contents
About this manual 6
Validity 6
Definitions and terminology 7
Definition of Caution, Warning and Note 7
Warning Symbols 8
Safety 10
Proper use 10
Improper use 11
Disposal 12
Service 13
Diffusion Pump Hazards 14
Explosion 15
Pressurization Hazards 17
Dangerous Substances 18
High Temperatures 19
Cold Surfaces 19
Cold Coolant 19
High Voltages 20
Asphyxiation 20

Contents
4 HS-2 Diffusion Pump User Manual
Description of the HS-2 Diffusion Pump 21
Pump Operation 22
Installation 23
Pump Fluid Installation 25
Power Plug Installation 25
Maintenance 26
Changing Heater Element 26
Cleaning 26
Technical Specifications 27
Operating Specifications 30
Physical Specifications 31
Optional Components 32
Accessories and Spare Parts 33

Technical Information
HS-2 Diffusion Pump User Manual 5
1Technical Information
About this manual 6
Validity 6
Definitions and terminology 7
Definition of Caution, Warning and Note 7
Warning Symbols 8
Safety 10
Proper use 10
Improper use 11
Disposal 12
Service 13
Diffusion Pump Hazards 14
Explosion 15
Description of the HS-2 Diffusion Pump 19
Pump Operation 20
Installation 21
Pump Fluid Installation 23
Power Plug Installation 23
Maintenance 24
Changing Heater Element 24
Cleaning 24
Technical Specifications 25
Operating Specifications 28
Physical Specifications 29
Optional Components 30
Accessories and Spare Parts 31

Technical Information
6 HS-2 Diffusion Pump User Manual
About this manual
Validity
This manual lists the instructions for the users of the HS-2, with particular reference
to the notions relating to safety, operation and first level maintenance, limited to
maintenance operations for which the user is responsible.
The maintenance operations, illustrated in the specific sections, with specific
provisions relating to the higher level of maintenance (personnel specifically trained
for maintenance operations) must not be carried out by the user.
NOTE
1This manual contains useful information so that all personnel using the
HS-2 can operate it safely and guarantee perfect efficiency, for its entire life
span.
2Keep this manual, together with all the related publications, in an accessible
place known to all operators/maintenance personnel.

Technical Information
HS-2 Diffusion Pump User Manual 7
Definitions and terminology
Definition of Caution, Warning and Note
Some important references of this manual are highlighted and framed in
contrasting color.
WARNING
Warning messages draw the operator's attention to a specific procedure or
practice which, if not performed correctly, could result in serious personal
injury.
CAUTION
Caution messages are displayed before procedures which, if not observed, could
cause damage to the equipment.
NOTE
Notes are intended to call attention to important information and provide more
detail regarding specific steps.

Technical Information
8 HS-2 Diffusion Pump User Manual
Warning Symbols
The following is a list of symbols that appear in conjunction with warnings on the
HS-2. The hazard they describe is also shown.
A triangular symbol indicates a warning. The meanings of the symbols that may
appear alongside warnings in the documentation are as follows:
Dangerous voltages Hot surface Generic hazard
Presence of dangerous
substances Crushing hazard Cutting hazard
Wear protective gloves Wear personal protective
equipment
Wear accident-
prevention shoes
European Declaration of
Conformity Waste Electrical and Electronic Equipment

Technical Information
HS-2 Diffusion Pump User Manual 9
The following symbol may be used on warning labels attached to the instrument.
When you see this symbol, refer to the relevant operation or service manual for the
correct procedure referred to by that warning label.
The following symbols appear on the instrument for your information.
Corrosive substances
Explosive Material
Toxic Gases Asphyxiation
Wear face shield
Production date
Dangerous voltages
Hot surfaces
Generic hazard
CE certification
Wear safety helmet
RoHS China certification
Waste Electrical and Electronic Equipment

Technical Information
10 HS-2 Diffusion Pump User Manual
Safety
This section contains the information, prescribed by the Low Voltage Directive
2014/35/EU, which is essential for the compliance and observance of the safety
regulations both generally and in relation to the specific use of the product.
Failure to comply with these instructions and the other instructions contained in
this manual may render the safety conditions envisaged in the design phase
inefficient and cause accidents to those operating the product.
Agilent Technologies declines all responsibility for damage to the product or for the
physical safety of the operator or third parties deriving from the non-observance of
the safety rules indicated in the technical documentation.
Proper use
This manual contains important warnings and safety instructions to be observed in
order for the unit to work safely.
The product described in this manual is intended exclusively for the area of
application specified in the instructions. The manual also provides indications
regarding the essential requirements for the application and operation of the
product as well as the safety measures that can be adopted to guarantee regular
operation. Agilent Technologies does not provide any guarantee or assume any
responsibility for applications other than those described in this manual or in which
the essential requirements and safety measures are not respected.
The product must only be used by qualified personnel who are able to take the
necessary safety measures under conditions that do not cause damage or injury.
Any accessories and equipment used with the product must be supplied or
approved by Agilent Technologies.
Any adjustment or maintenance operation must be performed by a professional
technician informed about the risks.
Repairs on the product must be carried out exclusively by Agilent authorized
personnel.

Technical Information
HS-2 Diffusion Pump User Manual 11
Improper use
Agilent Technologies declines all responsibility, deriving from the improper use of
the HS-2.
Improper use will cause all claims for liability and warranties to be forfeited.
Personnel responsible for pump operation and maintenance must be well-trained
and must be aware of the accident prevention rules. The accident prevention
precautions contained in this section must be continuously respected during
operation and maintenance of the pump to avoid damage to operators and to the
pump. These precautions are provided in the form of WARNING and CAUTION
notes.
WARNING
Operating procedures, technical information and precautions which, if not
respected and/or implemented correctly may cause body harm to
operators.
CAUTION
Operating procedures, technical information and precautions, which, if not
respected and/or implemented correctly, may cause damage to the pump.

Technical Information
12 HS-2 Diffusion Pump User Manual
Disposal
Meaning of the "WEEE" logo found in labels.
The following symbol is applied in accordance with the EC WEEE (Waste Electrical
and Electronic Equipment) Directive.
This symbol (valid only in countries of the European Community) indicates that the
product it applies to must NOT be disposed of together with ordinary domestic or
industrial waste but must be sent to a differentiated waste collection system. The
end user is therefore invited to contact the supplier of the device, whether the
Parent Company or a retailer, to initiate the collection and disposal process after
checking the contractual terms and conditions of sale.
Figure 1 Logo "WEEE"
For more information refer to:
http://www.agilent.com/environment/product/index.shtml

Technical Information
HS-2 Diffusion Pump User Manual 13
Service
Should a customer need an advanced exchange or repair service, please contact
local distributor or directly mail to
[e-mail]
[e-mail]
Completion of the “Request for Return” form is required to return your pump to
Agilent for service (provided at the end of this manual).

Technical Information
14 HS-2 Diffusion Pump User Manual
Diffusion Pump Hazards
Designers of systems utilizing diffusion pumps must design out hazards wherever
possible. For hazards that cannot be designed out, warnings, procedures, and
instructions on proper use and servicing are provided. Please use guards, safety
features, and interlocks as recommended.
The end user must ensure the pump is properly protectively bonded to the end
product's protective earthing system as determined in the end product standard for the
End Product Design. End Product Design provides a compliant fire enclosure as defined
in the End Product's standard.
Refer to Table 1 for a list of general hazards and recommended actions, Table 2 for a
list of prohibited actions that can result in explosions, and Table 3 for a list of
pressurization hazards that can result in damage to equipment.
The installation, operation, and servicing of diffusion pumps involves one or more of the
hazards in 1, any one of which in the absence of safe operating practices and
precautions, could potentially result in death or serious harm to personnel.
Table 1 General Hazards
Hazard
Suggested Corrective Action
Loss of utility: water and/or electricity
Provide sufficient backup water and power supply as
necessary to effect a safe shutdown under worst
case conditions
Overpressure in foreline
Provide an interlock to ensure that the power supply
to the pump heater cannot be activated if the foreline
pump is not running and/or the pressure in foreline is
above 0.5 Torr (0.38 mbar)
Overtemperature
Fit temperature sensors and pump fluid level sensors
with a feedback to an interlock on the heater power
supply
Insufficient water flow through the main cooling
coils
Use water flow sensor and feedback to interlock the
heater power supply
Water trapped between inlet and outlet of Quick
Cool coil, or liquid nitrogen trapped between inlet
and outlet of liquid nitrogen trap
Provide vent or pressure relief valves for both Quick
Cool coil and liquid nitrogen trap
Loss of electrical ground integrity
Incorporate ground fault interrupt circuit into heater
power supply
Positive pressure in pumping system
Integrate pressure relief valve in vacuum system
High voltage
Prevent personnel contact with high voltages; design
and attach warnings
Toxicity and Corrosivity
Vent toxic and/or corrosive gases to a safe location;
ensure adequate dilution or scrubbing to safe levels;
take all actions required to meet air quality standards
Explosion
Integrate pressure relief valves
Do not use hydrocarbon-based pumping fluids

Technical Information
HS-2 Diffusion Pump User Manual 15
Explosion
Operation of the diffusion pump without continuous evacuation below 0.5 Torr
(0.67 mbar), or without coolant and introducing a strong oxidizer (such as air)
or explosive vapors or powders or materials which may react with pumping
fluids in a hot pump (above 300 °F or 150 °C) can cause an explosion. Such an
explosion can violently expel valves and other hardware, slam open doors that
are not designed for appropriate pressure relief, or burst other components of
the vacuum system. Serious injury or death may result from expelled parts,
doors, shrapnel, and shock waves.
Three elements are required for explosion: fuel, oxidizer, and an ignition. A
combination of temperature and pressure can be a source of ignition. Most
diffusion pump fluids are fuels. Hydrocarbon fluids are more prone to oxidize
and explode than synthetic silicone-based fluid. The oxidizer can be air, which
can be introduced by a leak, deliberately brought in via a process, or
inadvertently admitted by operator error.
Oxygen and other strong oxidizers are even more dangerous than air. Certain
conditions of temperature and pressure can cause a combustible mixture to
explode. The larger the diffusion pump, the greater the risk of explosion and the
greater the risk of damage and injury. Never operate large diffusion pumps
utilizing hydrocarbon oils without a complete safety analysis for the entire
system and for the application.
Explosion and Fire from Acetone and Alcohol: Diffusion pumps are typically
cleaned with acetone and alcohol. When combined with air, oxygen, and other
oxides, alcohol and most other solvents are very flammable and explosive.
Never permit any trace of these cleaners to remain in or on the pump. Always
remove all traces of alcohol and acetone and other cleaners with clean, dry, oil-
free compressed air

Technical Information
16 HS-2 Diffusion Pump User Manual
Never operate a large diffusion pump under the conditions listed in the following
table. Any of these situations increases the probability of an explosion.
Table 2 Explosive Conditions
Hazard
Suggested Corrective Action
Do not run pump without cooling water
Overtemperature
Do not run pump with low level of pump fluid
Overtemperature
Do not run pump without proper backing or
holding pump
Overpressure
Do not run pump when not evacuated below 0.5
Torr (0.66 mbar)
Overpressure
Do not admit air to, or rough through, a pump
with hot boiler
Overpressure plus strong oxidizer
Do not open drain or fill plug while pump is
under vacuum, especially when it is hot
Overpressure plus strong oxidizer
Do not contaminate pump with explosive vapors
Lower explosive threshold of gas mixtures
Do not remove, defeat, or override safety
counter-
measures such as pressure and thermal
switches and valve sequencer interlocks
Overtemperature, overpressure, more
combustible mixtures
Do not machine or weld any part of the pump
without removing all fluid or solvent residue in
pump
Source of ignition
Do not use unsuitable pumping fluid
Lower explosive threshold of gas mixture

Technical Information
HS-2 Diffusion Pump User Manual 17
Pressurization Hazards
Large vacuum pumps and their components are designed for vacuum service. They
are not designed for pressurization, which could cause them to burst possibly
expelling shrapnel at lethal velocities. Serious accidents have been caused by
intentional pressurization of vacuum systems and their components.
Never pressurize any part of a vacuum system for test or any other purpose.
Always provide pressure relief when designing diffusion pumps into systems
and ensure that pressure relief motion is limited to safe envelopes.
Never permit the hazards in the following table to develop.
Table 3 Pressurization Hazards
Hazard
Suggested Corrective Action
Do not block inlet or vent of liquid nitrogen trap
and lines
LN2 trap and/or lines burst
Do not close isolation valves at inlet and
discharge of main water cooling coils when
pump is heated
Water turns to steam and bursts coils
Do not pressurize the pump body (above 1 atm.)
Body of pump bursts
Do not make a hole through the vacuum wall
Loss of structural integrity of wall
Pressure Relief Devices: Systems must be designed with pressure relief
devices to provide safe pressure relief from internal explosions. Always
recognize that safety devices can fail or malfunction. Provide redundant
protection by installing devices having different failure modes, failure
mechanisms, and failure causes. Be certain that exhaust duct materials are
capable of withstanding the corrosiveness, temperature, and pressure of
exhausted products.

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18 HS-2 Diffusion Pump User Manual
Dangerous Substances
Chemical Dangers of Acetone and Alcohol: Diffusion pumps are typically
cleaned with acetone or alcohol. Acetone, alcohol, and most other solvents are
irritants, narcotics, and depressants, and/or carcinogenic. Their inhalation and
ingestion may produce serious effects. Even absorption through the skin can
result in moderate toxicity. Always ensure that cleaning operations are
performed in large, well-ventilated rooms. Use of self-contained breathing
apparatus may be necessary, depending upon the solvent type and vapor
concentration in surrounding air.
Poisonous and Corrosive Compounds: When pumping poisonous, reactive,
and/or corrosive gas, vapors, or chemicals, proper operation and regeneration
do not always ensure that all hazardous materials have been totally removed. If
hazardous gas, vapors, chemicals, or combustible mixtures are pumped,
sufficient quantities may exist during operation or remain after regeneration to
cause severe injury or death.
Pump Fluids: Overheating the pump fluid, exposing it to air or reactive
materials, or over-pressurizing it above the normal operating range,
approximately 1x10-3 Torr (1.3x10-3 mbar) decomposes the fluid and possibly
makes it toxic. This is especially true of backstreamed mechanical pump fluids
which are more volatile (unstable). Overheating of accidentally introduced or
backstreamed mechanical pump fluids cannot be protected against by thermal
switches which are set for diffusion pump fluid.
Process Gases: Process gases are frequently toxic, flammable, corrosive,
explosive, or otherwise reactive. Agilent has no control over the types of gasses
passing through the user’s diffusion pump as these are entirely under the
control of the process user and/or the hardware systems integrator. Since
these gasses can cause serious injury or death, it is very important to plumb
the exhaust of the pump to the facility’s hazardous gas exhaust system which
incorporates appropriate filters, scrubbers and similar components to ensure
that the exhaust meets all air and water pollution control regulations.

Technical Information
HS-2 Diffusion Pump User Manual 19
High Temperatures
Hot Surfaces: Boiler temperatures reach 530 °F (275 °C) which can cause
serious burns. Always ensure that surfaces have cooled to near room
temperature before touching them.
Hot Cooling Water and Steam: The water used to cool the pump can reach
scalding temperatures. Touching or rupture of the cooling surface can cause
serious burns. Water left inside Quick Cool coils from previous use turns to
steam when the pump is reheated. This steam must be allowed to escape
without contacting personnel. Whenever possible, design the water system
with interlock valves so that power cannot be applied to the pump unless water
is flowing in the main cooling coils (not Quick Cool coils).
Cold Surfaces
Liquid nitrogen cooled traps are commonly used in diffusion pumps. Metal surfaces
at liquid nitrogen temperature can cause severe frostbite. These surfaces remain
cold in excess of 30 minutes after liquid nitrogen evaporation.
Cold Coolant
Liquid nitrogen. a cryogenic liquid, is used in traps. If it is splashed on body
tissues or eyes, it can cause severe frostbite or blindness. The extremely low
temperature of liquefied nitrogen can cause skin damage similar to high
temperature burns. Contact with the cold gas evolving from the liquid can produce
the same effect. Delicate tissues, such as the eye tissues, are most easily damaged
by exposure to cold gas or liquid. To minimize the risk of hazardous contact of cold
gaseous nitrogen
with any part of the body, wear personal safety equipment
recommended for use with cryogenic materials, including:
 Face shield
 Full-sleeved lab coat
 Clean, dry gloves which fit loosely so they can be thrown off quickly if
frozen by
contact with the gas.

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20 HS-2 Diffusion Pump User Manual
High Voltages
Diffusion pump heaters operate at voltages (up to 480 V) high enough to kill.
Design
systems to prevent personnel contact with high voltages. Securely
attach prominent hazard
warnings. Personnel should always break the primary
circuit to the power supply when
direct access to the heater or wiring is
required.
Asphyxiation
Death from suffocation can result if a large amount of liquid nitrogen is spilled
in a small,
poorly ventilated room or equipment. All diffusion pumps are
typically cleaned with
acetone or alcohol. Acetone. alcohol, and most other
solvents are very volatile (unstable).
During cleaning. the volatility of these
cleaners may permit their gases to displace air and its
life-supporting oxygen
which could cause death or serious injury by asphyxiation. Always
ensure that
cleaning operations are performed in large, well-ventilated areas.