Agilent Technologies G6696A User manual

Agilent Technologies
Agilent G6696A
Oil Free IDP-3 Scroll
Pump for Turbo 597X
Installation Guide

Notices
© Agilent Technologies, Inc. 2016
No part of this manual may be reproduced
in any form or by any means (including
electronic storage and retrieval or transla-
tion into a foreign language) without prior
agreement and written consent from 
Agilent Technologies, Inc. as governed by
United States and international copyright
laws.
Manual Part Number
G6696-90010
Edition
First edition, July 2016
Printed in USA
Agilent Technologies, Inc.
2850 Centerville Road 
Wilmington, DE 19808-1610 USA
Warranty
The material contained in this docu-
ment is provided “as is,” and is sub-
ject to being changed, without notice,
in future editions. Further, to the max-
imum extent permitted by applicable
law, Agilent disclaims all warranties,
either express or implied, with regard
to this manual and any information
contained herein, including but not
limited to the implied warranties of
merchantability and fitness for a par-
ticular purpose. Agilent shall not be
liable for errors or for incidental or
consequential damages in connection
with the furnishing, use, or perfor-
mance of this document or of any
information contained herein. Should
Agilent and the user have a separate
written agreement with warranty
terms covering the material in this
document that conflict with these
terms, the warranty terms in the sep-
arate agreement shall control.
Safety Notices
CAUTION
A CAUTION notice denotes a hazard. It
calls attention to an operating
procedure, practice, or the like that, if
not correctly performed or adhered to,
could result in damage to the product
or loss of important data. Do not
proceed beyond a CAUTION notice
until the indicated conditions are fully
understood and met.
WARNING
A WARNING notice denotes a hazard.
It calls attention to an operating
procedure, practice, or the like that, if
not correctly performed or adhered to,
could result in personal injury or
death. Do not proceed beyond a
WARNING notice until the indicated
conditions are fully understood and
met.

Oil Free IDP-3 Scroll Pump for Turbo 597X Installation Guide 3
Contents
1 Introduction
General Information 6
Important Safety Warnings 7
General Safety Precautions 8
Cleaning 9
Recycling the Product 9
Parts Identification 9
Site Preparation 10
2 Installation
Unpacking the IDP-3 Pump 12
Assembling the Foreline Hose 13
Removing the Existing Foreline Pump from the MSD 16
Installing the IDP-3 Pump 18

4 Oil Free IDP-3 Scroll Pump for Turbo 597X Installation Guide

5
Agilent G6696A Oil Free IDP-3 Scroll Pump for Turbo 597X
Installation Guide
Agilent Technologies
1
Introduction
General Information 6
Important Safety Warnings 7
General Safety Precautions 8
Cleaning 9
Recycling the Product 9
Parts Identification 9
Site Preparation 10
This guide describes how to replace an Edwards, Pfeiffer, or
Agilent Rotary Vane Pump, or Pfeiffer Diaphragm pump, with
the Agilent G6696A Oil Free IDP-3 Scroll Pump for Turbo 597X
on Agilent Technologies Series 5973/75/77 MSD instruments.

6 Oil Free IDP-3 Scroll Pump for Turbo 597X Installation Guide
1Introduction
General Information
Model 597X MSD instruments with the Oil Free IDP-3 Scroll
Pump for Turbo 597X upgrade installed meet all safety and
compliance standards specified for the original instruments.
Refer to the original instrument instruction manuals for details.
Information
Oil Free IDP-3 Scroll Pump for Turbo 597X has been designed
and tested in accordance with recognized safety standards, and
is designed for use indoors. If it is used in a manner not
specified by the manufacturer, the protection provided by the
instrument may be impaired. Whenever the safety protection of
the Oil Free IDP-3 Scroll Pump for Turbo 597X has been
compromised, disconnect it from all power sources and secure it
against unintended operation.
Refer servicing to qualified service personnel. Substituting
parts or performing any unauthorized modification to the pump
may result in a safety hazard.
Safety symbols
Warnings and cautions in this guide or on the instrument must
be observed during all phases of operation, service, and repair
of this instrument. Failure to comply with these precautions
violates safety standards of design and the intended use of the
instrument. Agilent Technologies assumes no liability for the
customer’s failure to comply with these requirements.

WARNING:
Burn hazard

Indicates parts that may cause burns when
touched.

Introduction 1
Oil Free IDP-3 Scroll Pump for Turbo 597X Installation Guide 7
Important Safety Warnings
Safety cautions and warnings must be observed during all
phases of operation, service, and repair of an Oil Free IDP-3
Scroll Pump for Turbo 597X. Failure to comply with these
precautions violates safety standards of design, and may
compromise the intended use of the Oil Free IDP-3 Scroll Pump
for Turbo 597X. Agilent Technologies assumes no liability for
the customer’s failure to comply with these requirements.
WARNING
The pump is designed for operation with neutral or noncorrosive
gases. It is not designed to pump corrosive, or particulate forming
gases. Failure to adhere to this warning could result in personal
injury or death.
WARNING
Install the pump in an area that is not exposed to liquids, steam, or
excessive humidity. Failure to adhere to this warning may result in
electric shock, short circuits, and severe bodily injury.

8 Oil Free IDP-3 Scroll Pump for Turbo 597X Installation Guide
1Introduction
General Safety Precautions
•While running Oil Free IDP-3 Scroll Pump for Turbo 597X:
•Do not block air flow to the fan. Air flows into the front of
the pump (Figure 1).
•Do not set items on top of Oil Free IDP-3 Scroll Pump for
Turbo 597X.
•It is important that the Oil Free IDP-3 Scroll Pump for
Turbo 597X does not recirculate hot air. Always position
the front end of the Oil Free IDP-3 Scroll Pump for Turbo
597X where it can draw cool air.
•A pump exhibiting high surface temperature should be
turned off and allowed to cool.
•Although the pump can pump trace particulates normally
found in the atmosphere, it is not designed to process solids,
chemicals, powders, liquid solvents, condensates, or other
particulates. They can damage the equipment, degrade its
performance, or shorten its useful life.
•Do not place the pump near any equipment that is sensitive
to vibration.
•Never disturb the hex head bolts on either side of the pump.
Disturbing these bolts will cause loss of performance or
pump damage (Figure 1).
Figure 1 IDP-3 pump
Hex head bolt
Front of pump

Introduction 1
Oil Free IDP-3 Scroll Pump for Turbo 597X Installation Guide 9
Cleaning
To clean the Oil Free IDP-3 Scroll Pump for Turbo 597X:
•Clean the exterior surfaces of the IDP-3 with alcohol or mild
detergents only.
Recycling the Product
For recycling, contact your local Agilent sales office.
Parts Identification
Table 1 lists the contents of the Oil Free IDP-3 Scroll Pump for
Turbo 597X kit.
Table 1 Agilent G6696A Oil Free IDP-3 Scroll Pump for Turbo 597X
contents list
Part Quantity Part number
IDP-3 24V Dry scroll vacuum pump
with Isolation valve
1 G3870-80057
IDP-3 24V Power supply 1 G3870-60600
Foreline hose 1 05971-60119
KF16 Hose adapter 2 G1099-20531
KF25 Flange × 5/8 in. ID
Hose barb adapter
1 G1099-20532
KF16 Elbow - 45 degree 1 G2589-20141
KF16 Flange × 5/8 in. ID
Hose barb elbow
1 G2589-20041
Clamp, Hose .437 in. DIA .56 in.
WD SST
2 1400-3241
NW25 Centering ring with O-ring 1 0100-1551
Seal, CNTR RING, NW16, ALUM, Viton 2 KC16AV
NW 10/16 Hinged Clamp with
Wing nut, Al
2KQ16AWP
Exhaust filter cartridge 1 G7077-67017
Breather vent and Adapter 1 G7077-67016
IDP-3 Installation Guide 1 G6696-90010

10 Oil Free IDP-3 Scroll Pump for Turbo 597X Installation Guide
1Introduction
Site Preparation
Prepare the installation site in accordance with the site
preparation specifications associated with the MSD.
Additionally, ensure that the site also supports the criteria
specific to the Oil Free IDP-3 Scroll Pump for Turbo 597X, as
listed in Table 2.
NOTE
Where conflicts exist between these criteria and those of any co-located
equipment, the equipment with the tighter tolerances takes precedence.
Table 2 Site prep information
Criteria Description
Physical dimensions
Weight 9.5 kg (21 lbs)
Dimensions 358 × 140 × 181 cm (14.09 × 5.5 × 7.13 inches) 
(L × W × H)
Temperature and humidity ranges
Operating ambient
temperature
5 to 40 °C (41 to 108 °F)
Relative humidity 0 to 95 % (non-condensing)

11
Agilent G6696A Oil Free IDP-3 Scroll Pump for Turbo 597X
Installation Guide
Agilent Technologies
2
Installation
Unpacking the IDP-3 Pump 12
Assembling the Foreline Hose 13
Removing the Existing Foreline Pump from the MSD 16
Installing the IDP-3 Pump 18
This chapter describes how to replace an Edwards, Pfeiffer, or
Agilent Rotary Vane Pump, or Pfeiffer Diaphragm pump, with
the Agilent G6696A Oil Free IDP-3 Scroll Pump for Turbo 597X
on Agilent Technologies Series 5973/75/77 MSD instruments.

12 Oil Free IDP-3 Scroll Pump for Turbo 597X Installation Guide
2Installation
Unpacking the IDP-3 Pump
To unpack the Agilent G6696A Oil Free IDP-3 Scroll Pump for
Turbo 597X:
1Orient the shipping container with This End Up on top.
2Open the shipping container. All supplied components are in
smaller boxes or bags within the shipping container.
3Remove the boxed and bagged items from the shipping
container.
4Open boxes and bags, and then remove all of the supplied
components. When removing the pump from its box, do the
following:
aHave a helper hold the box containing the pump.
bLifting the pump by the pump handle, carefully remove
the pump from the box along with the foam packaging
surrounding the pump (Figure 2).
cUncoil the pump power cable.
dRemove the foam packaging from the pump. The pump
power cable passes through a slot in the bottom of the
foam packaging.
5Retain the shipping container and all packing materials.
6Inspect the pump, power supply, and other components for
damage. If there is shipping damage, contact the freight
carrier and your local Agilent sales office immediately.
Figure 2 IDP-3 pump with packing material
Pump
handle
Pump
power
cable

Installation 2
Oil Free IDP-3 Scroll Pump for Turbo 597X Installation Guide 13
Assembling the Foreline Hose
To assemble the foreline hose:
1Use Table 3 to determine which fittings are required for your
installation.
CAUTION
Do Not use any existing vacuum hoses or fittings. Any retained oil or
contamination from previously used hoses or fittings will damage
the pump, and result in permanent pump failure.
Table 3 Turbo pump outlet foreline vacuum hose fittings
Configuration Part number Part description Quantity
5973 with Edwards
Standard Turbo
G1099-20531 KF16 Hose adapter 1
G2589-20041 KF16 Flange × 5/8 in ID
Hose barb elbow
1
1400-3241 Clamp-Hose .437 in DIA .56
in WD SST
2
5973 with Edwards
Performance Turbo
G1099-20531 KF16 Hose adapter 1
G1099-20532 KF25 Flange × 5/8 in. ID
Hose barb adapter
1
1400-3241 Clamp-Hose .437 in DIA .56
in WD SST
2
5975 with Pfeiffer
TMH 071
G1099-20531 KF16 Hose adapter 1
G2589-20041 KF16 Flange × 5/8 in ID
Hose barb elbow
1
1400-3241 Clamp-Hose .437 in DIA .56
in WD SST
2
5975 with Pfeiffer
TMH 262
G1099-20531 KF16 Hose adapter 1
G1099-20532 KF25 Flange × 5/8 in. ID
Hose barb adapter
1
1400-3241 Clamp-Hose .437 in DIA .56
in WD SST
2
5973 or 5975 with
Pfeiffer HiPace 80
G1099-20531 KF16 Hose adapter 2
1400-3241 Clamp-Hose .437 in DIA .56
in WD SST
2

14 Oil Free IDP-3 Scroll Pump for Turbo 597X Installation Guide
2Installation
2Place a clean cloth on your work surface.
3Assemble the IDP-3 pump side of the foreline hose as follows
(Figure 3):
.
5973 or 5975 with
Pfeiffer HiPace 300
G1099-20531 KF16 Hose adapter 1
G2589-20141 KF16 Elbow - 45 degree 1
1400-3241 Clamp-Hose .437 in DIA .56
in WD SST
2
5977A with Agilent
V304
G1099-20531 KF16 Hose adapter 2
1400-3241 Clamp-Hose .437 in DIA .56
in WD SST
2
5977A or 5977B
with Pfeiffer HiPace
300
G1099-20531 KF16 Hose adapter 1
G2589-20141 KF16 Elbow - 45 degree 1
1400-3241 Clamp-Hose .437 in DIA .56
in WD SST
2
Figure 3 Foreline hose (IDP-3 pump side)
Table 3 Turbo pump outlet foreline vacuum hose fittings
Configuration Part number Part description Quantity
Foreline hose
Hose clamp
KF16 hose adapter

Installation 2
Oil Free IDP-3 Scroll Pump for Turbo 597X Installation Guide 15
aSlide the hose clamp (p/n 1400-3241) over the foreline
hose (p/n 05971-60119).
bSpray the KF16 hose adapter (p/n G1099-20531) with
isopropyl alcohol (IPA) solvent.
cPlace the KF16 hose adapter connector face on the cloth
on your work surface.
dSlide the end of the foreline hose over the KF16 hose
adapter.
eSecure the KF16 hose adapter in the foreline hose by
positioning the hose clamp over the inserted portion of
the adapter, and then using a hand tool to tighten hand
tight.
4Assemble the turbomolecular pump side of the foreline hose
as follows:
aSlide the hose clamp (p/n 1400-3241) over the foreline
hose (p/n 05971-60119).
bLocate the correct hose adapter or elbow flange (per
Table 3) for use with the foreline hose.
cSpray the hose adapter or elbow flange with IPA solvent.
dPlace the hose adapter or elbow flange connector face on
the cloth on your work surface.
eSlide the end of the foreline hose over the hose adapter or
elbow flange.
fSecure the hose adapter or elbow flange in the foreline
hose by positioning the hose clamp over the inserted
portion of the adapter or flange, and then using a hand
tool to tighten hand tight.
CAUTION
Be careful not to scratch the face of the hose adapter. Deep grooves
or scratches may prevent a leak-free installation.

16 Oil Free IDP-3 Scroll Pump for Turbo 597X Installation Guide
2Installation
Removing the Existing Foreline Pump from the MSD
To remove the existing foreline pump from the MSD:
1Vent and shut down the MSD. Venting begins the automated
shut down of the MSD. Refer to the 5973, 5975, 5977A or
5977B Operation Manual for details, as applicable.
2Turn off the MSD.
3Disconnect the MSD from its power outlet.
4On the MSD turbomolecular pump, loosen and remove the
hinged clamp securing the hose to the pump (Figure 4).
5Retain the removed clamp for use when installing the IDP-3.
6Remove the hose and the Viton centering ring seal from the
pump.
7Disconnect the power cord for the existing foreline pump
from the MSD electronics module (Figure 5).
WARNING
The existing foreline pump may be hot. The foreline pump can
cause burns if touched when operating. It has a safety shield to
prevent the user from touching it.
Figure 4 Foreline hose removal, existing pump (typical)
Foreline
vacuum
hose
(existing)
Hinged
clamp

Installation 2
Oil Free IDP-3 Scroll Pump for Turbo 597X Installation Guide 17
8Remove the existing foreline pump and foreline hose from
the MSD.
9Dispose of the existing pump, foreline hose, and fittings in
accordance with all local regulations. Contact your local
recycler for specific instructions.
Figure 5 MSD electronics module, foreline pump power cord
Foreline
pump power
cord
WARNING
The old pump oil may contain toxic chemicals. Treat it as
hazardous waste.

18 Oil Free IDP-3 Scroll Pump for Turbo 597X Installation Guide
2Installation
Installing the IDP-3 Pump
To install the Agilent G6696A Oil Free IDP-3 Scroll Pump for
Turbo 597X:
1The vacuum isolation valve is shipped installed on the pump
(Figure 6). If necessary, orient the vacuum isolation valve as
follows:
aLoosen the hinged clamp.
bRotate the vacuum isolation valve so that it is oriented as
shown.
cTighten the hinged clamp securing the valve to the pump
hand tight.
2Ensure that the connector from the vacuum isolation valve
solenoid is securely inserted into the socket on the side of
the pump (Figure 6).
3Install the exhaust filter cartridge on the threaded stem at
the front of the pump and tighten hand tight (Figure 7).
Figure 6 Vacuum isolation valve orientation
Vacuum
isolation
valve
Hinged
clamp
Solenoid
connection
WARNING
Do not use the exhaust filter cartridge if the application requires
capture or containment of gases being pumped. Instead, route the
pump exhaust to an appropriate collection system.

Installation 2
Oil Free IDP-3 Scroll Pump for Turbo 597X Installation Guide 19
4Open the gas ballast by removing the seal screw (Phillips
head screw on the top of the pump) (Figure 8).
Figure 7 Exhaust filter cartridge installation
Exhaust filter
cartridge
CAUTION
The gas ballast of the IDP-3 pump should be left open for
approximately 2 hours as a part of system conditioning, to help
remove any appreciable amounts of water from the system. Failure
to do so can result in a high vacuum pump failure rate.
Figure 8 Seal screw
Seal screw

20 Oil Free IDP-3 Scroll Pump for Turbo 597X Installation Guide
2Installation
5Retain the seal screw for re-installation later in this
procedure.
6Insert breather vent and adapter (p/n G7077-67016) where
the seal screw was installed (Figure 9).
7On the MSD turbomolecular pump, do the following:
aInsert the appropriate centering ring seal at the pump KF
seal connection (Figure 10). For 5973 with Edwards
Performance Turbo or 5975 with Pfeiffer TMH 262 use an
NW25 Centering Ring with O-ring (0100-1551). For all
other 597X pump configurations, use Seal, CNTR RING,
NW16, ALUM, Viton (KC16AV).
CAUTION
Do not use excessive torque when installing the breather vent and
adapter into the gas ballast as this could cause damage to the
threads. Install the breather vent and adapter finger tight.
Figure 9 Breather vent and adapter
Breather vent
and adapter
CAUTION
Do Not use any existing vacuum hoses or fittings. Doing so will
damage the pump.