Agilent Technologies Varian TriScroll 620 Series User manual

INSTALLATION AND
OPERATION MANUAL
vacuum technologies
DRAFT 4/2/07
TriScrollTM 620 Series
Dry Scroll
Vacuum Pump
Manual No. 699904343
Revision E
April 2007
NOTICE: This document contains references to Varian.
Please note that Varian, Inc. is now part of Agilent
Technologies. For more information, go to
www.agilent.com/chem.

TriScroll 620 Series Vacuum Pump
Copyright 2007
Varian, Inc.
DRAFT 4/2/07
TriScroll™620
Dry Scroll Vacuum Pump
TriScroll is a trademark of Varian, Inc.

iii
TriScroll 620 Series Vacuum Pump
Contents
Declaration of Conformity
Warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .vi
Warranty Replacement and Adjustment . . . . . . . .vi
Instructions for Use . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
General Information . . . . . . . . . . . . . . . . . . . . . . . . . 1
Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Installation Requirements . . . . . . . . . . . . . . . . . . . . . 2
Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
Start up Procedure . . . . . . . . . . . . . . . . . . . . . . . . 2
Shutdown Procedure . . . . . . . . . . . . . . . . . . . . . . 2
Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
Technical Information . . . . . . . . . . . . . . . . . . . . . . . . . 3
Unpacking and Inspection . . . . . . . . . . . . . . . . . . . . 5
Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
Startup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
Electrical Connections . . . . . . . . . . . . . . . . . . . . . . . 7
Single Phase Motor Connection . . . . . . . . . . . . . . 7
Mechanical Connections . . . . . . . . . . . . . . . . . . . . . 7
Pump Location . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Rotation of the Pump Inlet
with Respect to the Motor Frame . . . . . . . . . . . . . 8
Pump Inlet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Pump Exhaust. . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Optional Isolation Valve. . . . . . . . . . . . . . . . . . . . . . 8
Gas Ballast . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Bearing Purge. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Purge Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
General Information . . . . . . . . . . . . . . . . . . . . . . 11
Related TriScroll Manuals. . . . . . . . . . . . . . . . . . 11
Maintenance and Tooling Kits . . . . . . . . . . . . . . 11
Factory Service Options . . . . . . . . . . . . . . . . . . . 12
Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Contacting Varian. . . . . . . . . . . . . . . . . . . . . . . . 12
Request for Return Health and Safety Certification
List of Figures
Figure Caption Page
1 Interface Drawing with Dimensions . . . . . . . 4
2 Pumping Speed Curves . . . . . . . . . . . . . . . . 4
3 TriScroll 620 Vacuum Pump . . . . . . . . . . . . . 5
4 Single Phase Motor Electrical Connections . . 7
5 Isolation Valve Location . . . . . . . . . . . . . . . . 8
List of Tables
Table Title Page
1 Specifications . . . . . . . . . . . . . . . . . . . . . . . . 3
2 Full Load Motor Currents, Amps . . . . . . . . . . 7
3 VPI Valve Installation Data . . . . . . . . . . . . . . 9
4 Troubleshooting Chart. . . . . . . . . . . . . . . . . 10
5 Other Related Manuals . . . . . . . . . . . . . . . . 11
6 Maintenance and Tooling Kits. . . . . . . . . . . 11
7 Factory Service Options . . . . . . . . . . . . . . . 12
8 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . 12

TriScroll 620 Series Vacuum Pump
This page intentionally left blank.

declare under our sole responsibility that the product,
erklären, in alleniniger Verantwortung, daß dieses Produkt,
déclarons sous notre seule responsabilité que le produit,
declaramos, bajo nuestra sola responsabilidad, que el producto,
verklaren onder onze verantwoordelijkheid, dat het product,
dichiariamo sotto nostra unica responsabilità, che il prodotto,
Declaration of Conformity
Konformitätserklärung
Déclaration de Conformité
Declaración de Conformidad
Verklaring de Overeenstemming
Dichiarazione di Conformità
to which this declaration relates is in conformity with the following standard(s) or other normative documents.
auf das sich diese Erklärung bezieht, mit der/den flogenden Norm(en) oder Richtlinie(n) übereinstimmt.
auquel se réfère cette déclaration est conforme à la (auz) norme(s) ou au(x) document(s) normatif(s).
al que se refiere esta declaración es conforme a la(s) norma(s) u otro(s) documento(s) normativo(s).
waamaar deze verklaring verwijst, aan de volende norm(en) of richtlijn(en) beantwoodt.
a cui se rifersce questa dichiarazione è conforme alla/e sequente/I norma/o documento/I normativo/i.
We
Wir
Nous
Nosotros
Wij
Noi
Varian, Inc.
Lexington, MA, 02421-3133 USA
121 Hartwell Avenue
Frederick C. Campbell
Operations Manager
March 2003
Lexington, Massachusetts, USA
Varian, Inc.
TriScroll Series Vacuum Pump
98/37/EEC, Machinery Directive
EN 1012-2:1996 Compressors and Vacuum pumps Safety Reqmts; Part 2 Vacuum Pumps
EN 1050:1996 Safety of machinery - principles for risk assessment
EN 60204-1 Electrical equipment of industrial machines; general requirements
73/023/EEC, Low Voltage Directive
EN 60034 part 1 Rotating electrical machines - Part 1: Rating and performance
89/336/EEC, Electromagnetic Compatibility Directive
EN 61000-4-2 Testing and Measurement Techniques - Electrostatic Discharge Immunity Test
Declaration of Conformity

TriScroll 620 Series Vacuum Pump
vi
Warranty
Products manufactured by Seller are warranted against defects in materials and workmanship for twelve
(12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty
claims is limited, at the option of Seller, to repair, to replace, or refund of an equitable portion of the
purchase price of the Product. Items expendable in normal use are not covered by this warranty. All
warranty replacement or repair of parts shall be limited to equipment malfunctions which, in the sole
opinion of Seller, are due or traceable to defects in original materials or workmanship. All obligations of
Seller under this warranty shall cease in the event of abuse, accident, alteration, misuse, or neglect of
the equipment. In-warranty repaired or replaced parts are warranted only for the remaining unexpired
portion of the original warranty period applicable to the repaired or replaced parts. After expiration of
the applicable warranty period, Customer shall be charged at the then current prices for parts, labor,
and transportation.
Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or
damage caused by use of its Products other than in accordance with proper operating procedures.
Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation of
law), statutory or otherwise; and, except as stated herein, Seller shall have no liability under any
warranty, express or implied (either in fact or by operation of law), statutory or otherwise. Statements
made by any person, including representatives of Seller, which are inconsistent or in conflict with the
terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an
officer of Seller.
Warranty Replacement and Adjustment
All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto,
and must be received within the applicable warranty period by Seller or its authorized representative.
Such claims should include the Product serial number, the date of shipment, and a full description of
the circumstances giving rise to the claim. Before any Products are returned for repair and/or
adjustment, written authorization from Seller or its authorized representative for the return and
instructions as to how and where these Products should be returned must be obtained. Any Product
returned to Seller for examination shall be prepaid via the means of transportation indicated as
acceptable by Seller. Seller reserves the right to reject any warranty claim not promptly reported and
any warranty claim on any item that has been altered or has been returned by non-acceptable means of
transportation. When any Product is returned for examination and inspection, or for any other reason,
Customer shall be responsible for all damage resulting from improper packing or handling, and for loss
in transit, notwithstanding any defect or non-conformity in the Product. In all cases, Seller has the sole
responsibility for determining the cause and nature of failure, and Seller’s determination with regard
thereto shall be final.
If it is found that Seller’s Product has been returned without cause and is still serviceable, Customer will
be notified and the Product returned at its expense; in addition, a charge for testing and examination
may be made on Products so returned.
3/1/00

1
TriScroll 620 Series Vacuum Pump
DRAFT 4/2/07
Instructions for Use
General Information
This equipment is designed for use by professionals. The
user should read this instruction manual and any other
additional information supplied by Varian before operating
the equipment. Varian will not be held responsible for any
events that occur due to non-compliance with these
instructions, improper use by untrained persons,
non-authorized interference with the equipment, or any
action contrary to that provided for by specific national
standards.
The TriScroll™ 620 is a dry scroll vacuum pump
specifically optimized for helium leak detection
equipment. This pump is suitable for pumping air or inert
gases. The pump is not intended to pump toxic, corrosive,
explosive, or particulate-forming gases.
The following paragraphs contain all the information
necessary to guarantee the safety of the operator when
using the equipment. Detailed information is supplied in
“Technical Information” on page 3.
This manual uses the following standard safety protocol:
Storage
When transporting and storing the pump, the following
environmental requirements should not be exceeded:
Preparation for Installation
The pump is supplied in a special protective packing. If
this shows signs of damage, which may have occurred
during transport, contact your local sales office.
Total weight of the packing, including the pump, is
approximately 40 kg (87 lbs).
WARNING The warning messages are for attracting
the attention of the operator to a partic-
ular procedure or practice which, if not
followed correctly, could lead to serious
injury.
CAUTION The caution messages are displayed
before procedures, which if not fol-
lowed, could cause damage to the
equipment.
NOTE The notes contain important informa-
tion taken from the text.
Temperature: –20 °C to 60 °C (–4 °F to 140 °F)
Relative humidity: 0 to 95% (non-condensing)
WARNING When unpacking the pump, be sure not
to drop it, and avoid any kind of sudden
impact or shock vibration to it.
WARNING The TriScroll 620 weighs 32 kg (70 lbs).
To avoid injury, use proper lifting tech-
niques when moving the pump.
NOTE Normal exposure to the environment
cannot damage the pump. Neverthe-
less, it is advisable to keep the pump
inlet closed until the pump is installed
in the system.

DRAFT 4/2/07
TriScroll 620 Series Vacuum Pump
2
Installation Requirements
Do not install or use the pump in an environment
exposed to atmospheric agents (rain, snow, ice), dust,
aggressive gases, or in explosive environments or those
with a high fire risk.
During operation, the following environmental
conditions must be respected:
Operation
In order to reach ultimate vacuum, the pump must be left
running for about an hour with the inlet sealed.
Unlike conventional oil-sealed pumps, Varian’s dry scroll
pumps do not have fluid to cleanse them of accumulated
dust and debris. Run the pump periodically at atmosphere
for a minute or two to flush out the pump. Flush the pump
regularly and adjust this schedule according to your
specific conditions.
Start up Procedure
1. Be sure that the vacuum system isolation valve is
closed.
2. Turn on power to the pump.
3. Open the isolation valve.
Shutdown Procedure
1. Close the vacuum system isolation valve. This
prevents debris in pump from being transported into
the vacuum system.
2. Turn off power to the pump.
Maintenance
Personnel responsible for pump operation and
maintenance must be well-trained and aware of the
accident prevention rules.
If a pump is to be discarded, it must be disposed of in
accordance with specific national and local standards.
Temperature: +5 °C to +40 °C (41 °F to 104 °F)
Relative humidity: 0 to 95% (non-condensing)
CAUTION As supplied from the factory, the pump
is configured for low voltage. Verify that
the configuration matches the supply
voltage.
If voltage changeover is required,
configure the voltage as described in
“Electrical Connections” on page 7.
WARNING During operation the outer surface of
the motor housing can become hot.
Avoid touching the motor housing dur-
ing pump operaion.
WARNING The pump is designed for operation
with neutral or noncorrosive fluids. It
is absolutely forbidden to use it with
potentially explosive, inflammable or
poisonous substances.
WARNING ❑Death may result from contact with
high voltages. Always take extreme care
and observe the accident prevention
regulations in force.
❑When the machine is powered up,
be careful of moving parts and high
voltages.
❑If you have to perform maintenance
on the pump after a considerable time
in operation, allow the pump to cool as
the temperature of the outer surface
may be in excess of 55 °C (131 °F).
❑Always disconnect your power
supply to the pump before beginning
maintenance work.
NOTE Before returning the pump to the factory
for repair, the “Health and Safety” sheet
attached to this instruction manual must
be completed and sent to the local sales
office. A copy of the sheet must be
inserted in the pump package before
shipping.

3
TriScroll 620 Series Vacuum Pump
DRAFT 4/2/07
Technical Information
Table 1 Specifications
Model TriScroll™ 620 Dry Scroll Vacuum Pump
Interface dimensions See Figure 1
Peak pumping speed 50 Hz: 420 l/m, 25.2 m3/hr (14.8 cfm)
60 Hz: 500 l/m, 30 m3/hr (17.7 cfm)
Media Clean air. No toxic, corrosive, explosive or particulate forming gases
Ultimate pressure (Torr) 7.0 x 10-3 Torr (9.3 x 10-3 mbar)
Maximum inlet pressure 1.0 atmosphere (0 psig)
Maximum outlet pressure 1.1 atmosphere (1.5 psig)
Inlet connection NW40
Exhaust connection Female 3/8" National Pipe Thread (NW25 adapter provided)
Gas ballast Female 1/4" National Pipe Thread (40 Micron sintered filter provided)
Ambient operating temperature 5 °C to 40 °C (41 °F to 104 °F)
Storage temperature –20 °C to 60 °C (–4 °F to 140 °F)
Motor rating 1.0 HP (0.76 kW)
Operating voltages Single phase models:
❑50-60 Hz/100-115:200-230 VAC
Motor full load currents See Table 2 on page 7
Motor thermal protection Type U automatic
Operating speed 60 Hz: 1725 RPM, 50 Hz: 1425 RPM
Cooling system Air-cooled
Weight Pump only: 32 kg (70 lbs)
Shipping weight: 40 kg (87 lbs)
Noise level (per ISO 11201) 68 dB(A)
Vibration level at inlet (per ISO 10816-1) 6.3 mm/sec

DRAFT 4/2/07
TriScroll 620 Series Vacuum Pump
4
Figure 1 Interface Drawing with Dimensions
Figure 2 Pumping Speed Curves
355
(13.98)
13
(.50)
22
(.85)
Intake (NW25)
NW25 Exhaust extension
included but
not installed
Exhaust (3/8NPT)
port swivels 360
ø300
(ø11.80)
472 (18.57) Single Phase
184
(7.25)
38
(1.48)
105
(4.13)
82
(3.22)
145 (5.69)
102
(4.02)
176
(6.94)
4 x ø11(ø.43) Thru