CKD FLUEREX PF Series User manual

Flow sensor for compressed air PF Series
Strongly supports energy-saving activitiesStrongly supports energy-saving activities
Integrating flow and instantaneous flow rate displays can be
switched with a single operation
.
Correction of pressure/temperature is not required.
·
No need for pressure correction = Due to the mass detection
method used, there is no effect due to pressure change.
Hence, pressure correction is not required.
Displays the flow rate converted to atmospheric pressure (1 atm).
·
No need for temperature correction = Fluid temperature
is detected by the platinum thin film temperature sensor,
and is always displayed after being converted to flow
rate at 0°C.
·Maintenance and measurement of air quality
available in one unit.
·Piping space/piping processes
can be reduced.
3/8
(10)
1/2
(15)
3/4
(20)
1
(25)
11/2
(40)
Port size Rc
Module
Standard
PFU1000F
PFU2000F
PFU500F
PF16000F
PF8000F
PF4000F
PF2000F
PF1000F
PF500F
2
(50)
0 10 100 1000 10000 100000
25 500
50 1000
100 2000
200 4000
400 8000
800 16000
25 500
50 1000
100 2000
Flow rate range L/min(normal)
Model
Series
●
Secure design that is hard to break even with drain (water drops)
(double the environment-resistance compared to conventional products)
·Improved water resistance by applying
a special coating to the platinum thin-film sensor.
·Overheating of the sensor element is prevented
by a protection circuit.
Reliable
Easy to use
Easily visible LED is used. Integrating flow 5-digit display.
High performance
Digital direct-reading, correction not needed
The display and sensor are housed in one compact body.
A wide range of output variations
Filter and regulator are integrated
into a unit by modular design
(PFU500F,PFU1000F,PFU2000F)
Unrestricted installation
Heavy duty design
Degree of protection IP64 equivalent
Flow distribution is constant
Flow rate distribution leans towards the outer circumferential direction
due to the elbow.
Rectifier Sensor
Air
High precision of practical precision ±3% F.S.
Pressure loss 0.005 MPa (primary pressure: 0.7 MPa)
is realized
*1
By laminating the rectification filter,
pressure loss is reduced to 0.005 MPa.
(*1: Applicable models only)
Straight piping section not required *2
Thanks to the rectifier, there is no impact even if the elbow and
T-shaped socket are piped just before the sensor.
(*2: Excluding PF8000/PF16000F)
With no need for correction, practical precision ±3% F.S. is realized at
temperature 0 to 40°C and pressure 0.1 to 1.0 MPa.
■Pipes can be installed in any orientation, vertical,
horizontal, etc.
·
The display unit can be rotated up to 270° as desired.
·Connector wires can be drawn out along the piping
and do not occupy space.
·Connector wires can be drawn from either IN or OUT
side by rotating the connector case 180°.
OUT
TOTAL
H
L
FLOW SENSOR PF SERIES
FLUEREX
L/min(normal)
Connector case
FLUEREX
L/min
PF SERIES
FLOWSENSOR
TOTAL
OUT
H
L
Analog output
Pulse output
4 to 20 mADC
0 to 5 VDC
1 to 5 VDC
0 to 10 VDC
Switch output Standard
Standard
Option
Option
Option
Option
●
Measure the status of flow rate
●
Consider countermeasures
Plan
Grasp the current situation
Do
Implement measures
Action
Correction/continuation
Check
Effect confirmation
●
Measurement with flow rate sensor
●
Cost conversion is possible using integrating function
●
Standardization of equipment/line consumption
●
Application in other lines
●
Stop the air pressure supply during non-operation
●Blow time reduction
●
Application of energy saving nozzle
●Lower pressure
Very useful in grasping the current situation and confirming the effect of energy
It can be safely used even in harsh environments
such as dust and water splashing from all directions.
F.R.L
F(Filtr)
R(Reg)
L(Lub)
PresSW
Shutoff
SlowStart
FlmResistFR
Oil-ProhR
MedPresFR
No Cu/
PTFE FRL
Outdrs FR
F.R.L
(Related)
CompFRL
LgFRL
PrecsR
VacF/R
Clean FR
ElecPneuR
AirBoost
SpdContr
Silncr
CheckV/
other
Jnt/tube
AirUnt
PrecsCompn
Mech/
ElecPresSw
ContactSW
AirSens
PresSW
Cool
AirFloSens/
Contr
WaterRtSens
TotAirSys
(Total Air)
TotAirSys
(Gamma)
RefrDry
DesicDry
HiPolymDry
MainFiltr
Dischrg
etc
Ending
1368
Discontinue

* Be careful not to catch the lead wires during operation.
Flow sensor for compressed air PF Series
Strongly supports energy-saving activitiesStrongly supports energy-saving activities
Integrating flow and instantaneous flow rate displays can be
switched with a single operation
.
Correction of pressure/temperature is not required.
·
No need for pressure correction = Due to the mass detection
method used, there is no effect due to pressure change.
Hence, pressure correction is not required.
Displays the flow rate converted to atmospheric pressure (1 atm).
·
No need for temperature correction = Fluid temperature
is detected by the platinum thin film temperature sensor,
and is always displayed after being converted to flow
rate at 0°C.
·Maintenance and measurement of air quality
available in one unit.
·Piping space/piping processes
can be reduced.
3/8
(10)
1/2
(15)
3/4
(20)
1
(25)
11/2
(40)
Port size Rc
Module
Standard
PFU1000F
PFU2000F
PFU500F
PF16000F
PF8000F
PF4000F
PF2000F
PF1000F
PF500F
2
(50)
0 10 100 1000 10000 100000
25 500
50 1000
100 2000
200 4000
400 8000
800 16000
25 500
50 1000
100 2000
Flow rate range L/min(normal)
Model
Series
●
Secure design that is hard to break even with drain (water drops)
(double the environment-resistance compared to conventional products)
·Improved water resistance by applying
a special coating to the platinum thin-film sensor.
·Overheating of the sensor element is prevented
by a protection circuit.
Reliable
Easy to use
Easily visible LED is used. Integrating flow 5-digit display.
High performance
Digital direct-reading, correction not needed
The display and sensor are housed in one compact body.
A wide range of output variations
Filter and regulator are integrated
into a unit by modular design
(PFU500F,PFU1000F,PFU2000F)
Unrestricted installation
Heavy duty design
Degree of protection IP64 equivalent
Flow distribution is constant
Flow rate distribution leans towards the outer circumferential direction
due to the elbow.
Rectifier Sensor
Air
High precision of practical precision ±3% F.S.
Pressure loss 0.005 MPa (primary pressure: 0.7 MPa)
is realized
*1
By laminating the rectification filter,
pressure loss is reduced to 0.005 MPa.
(*1: Applicable models only)
Straight piping section not required *2
Thanks to the rectifier, there is no impact even if the elbow and
T-shaped socket are piped just before the sensor.
(*2: Excluding PF8000/PF16000F)
With no need for correction, practical precision ±3% F.S. is realized at
temperature 0 to 40°C and pressure 0.1 to 1.0 MPa.
■Pipes can be installed in any orientation, vertical,
horizontal, etc.
·
The display unit can be rotated up to 270° as desired.
·Connector wires can be drawn out along the piping
and do not occupy space.
·Connector wires can be drawn from either IN or OUT
side by rotating the connector case 180°.
OUT
TOTAL
H
L
FLOW SENSOR PF SERIES
FLUEREX
L/min(normal)
Connector case
FLUEREX
L/min
PF
SERIES
FLOWSENSOR
TOTAL
OUT
H
L
Analog output
Pulse output
4 to 20 mADC
0 to 5 VDC
1 to 5 VDC
0 to 10 VDC
Switch output Standard
Standard
Option
Option
Option
Option
●
Measure the status of flow rate
●
Consider countermeasures
Plan
Grasp the current situation
Do
Implement measures
Action
Correction/continuation
Check
Effect confirmation
●
Measurement with flow rate sensor
●
Cost conversion is possible using integrating function
●
Standardization of equipment/line consumption
●
Application in other lines
●
Stop the air pressure supply during non-operation
●Blow time reduction
●
Application of energy saving nozzle
●Lower pressure
Very useful in grasping the current situation and confirming the effect of energy
It can be safely used even in harsh environments
such as dust and water splashing from all directions.
F.R.L
F(Filtr)
R(Reg)
L(Lub)
PresSW
Shutoff
SlowStart
FlmResistFR
Oil-ProhR
MedPresFR
No Cu/
PTFE FRL
Outdrs FR
F.R.L
(Related)
CompFRL
LgFRL
PrecsR
VacF/R
Clean FR
ElecPneuR
AirBoost
SpdContr
Silncr
CheckV/
other
Jnt/tube
AirUnt
PrecsCompn
Mech/
ElecPresSw
ContactSW
AirSens
PresSW
Cool
AirFloSens/
Contr
WaterRtSens
TotAirSys
(Total Air)
TotAirSys
(Gamma)
RefrDry
DesicDry
HiPolymDry
MainFiltr
Dischrg
etc
Ending
1369
Discontinue

Applications
The sensor of FLUEREX consists of a rectier that converts the
compressed air to a uniform ow and a platinum thin lm resistor that
detects the ow rate. The rectier works to make the ow uniform
when a bent pipe such as an elbow is installed immediately before the
sensor. Through the use of multiple rectication plates, the pressure
loss is suppressed and an adequate rectication effect is realized.
When the compressed air does not ow, the platinum thin lm
sensor that detects the ow rate is heated from the uid temperature
to a certain constant temperature. When the compressed air ows,
the amount of heat proportional to the weight of air is detracted and
the current that intends to maintain the constant temperature ows
in the circuit inside the platinum thin lm sensor that detects the ow
rate. By receiving this current as a ow rate signal, the display
section displays a practical atmospheric pressure, instantaneous
ow rate or integrating ow of the air converted to 0°C.
In addition, by the platinum thin film sensor that detects the
fluid temperature, the temperature of the compressed air is
measured and the temperature correction is performed.
Functions
For ow rate management of paint line
For ow rate management of line of an auto plant
● For ow rate management of each line!
●Cost conversion is possible using integrating ow display
For semiconductor manufacturing equipment
● For ow rate management of expensive low dew-point air!
Also for early detection of trouble such as "excessive ow
rate"!
For ow rate management of weaving machine plant
For low pressure casting
machine
●
For mold cooling temperature
management!
PF-F Series
Molten metal
Compressed air
Punch-out cylinder
Mold
Stoke
Crucible
Flow path
Fluid direction
Rectier
Platinum thin lm sensor
Pipe adaptor
F.R.L
F(Filtr)
R(Reg)
L(Lub)
PresSW
Shutoff
SlowStart
FlmResistFR
Oil-ProhR
MedPresFR
No Cu/
PTFE FRL
Outdrs FR
F.R.L
(Related)
CompFRL
LgFRL
PrecsR
VacF/R
Clean FR
ElecPneuR
AirBoost
SpdContr
Silncr
CheckV/
other
Jnt/tube
AirUnt
PrecsCompn
Mech/
ElecPresSw
ContactSW
AirSens
PresSW
Cool
AirFloSens/
Contr
WaterRtSens
TotAirSys
(Total Air)
TotAirSys
(Gamma)
RefrDry
DesicDry
HiPolymDry
MainFiltr
Dischrg
etc
Ending
1370
Discontinue

Flow sensor for compressed air (FLUEREX)
Medium ow rate
PF500F to PF4000F Series
● Flow rate range: 25 to 500, 50 to 1000,
100 to 2000, 200 to 4000 L/min(normal)
*1 :
If the compressed air contains foreign substances, water or oil, the ow rate cannot be detected and this causes "sensor error".
Install a lter, refrigeration air dryer, and oil mist lter on the upstream side of the ow rate sensor.
*2 :
When the ow rate is below the min. ow rate range, the display becomes 0. The display value out of the ow rate range is outside the guaranteed precision.
*3 : Note that the switch output is not available if option "A1" (4 to 20 mADC) or "A6" (integrated pulse) is selected.
*4: Refer to descriptions of integrated pulse output on page 1383 for details of pulse output.
*5 : Note that the integrating ow value is reset when the power supply is turned OFF.
Specications
Descriptions PF500F-
10
PF500F-
15
PF1000F-
10
PF1000F-
15
PF2000F-
15
PF2000F-
20
PF4000F-
20
PF4000F-
25
Specs
Flow rate range L/min(normal)
25 to 500 50 to 1000 100 to 2000 200 to 4000
Port size Rc3/8 Rc1/2 Rc3/8 Rc1/2 Rc1/2 Rc3/4 Rc3/4 Rc1
Working conditions
Applicable uid Compressed air, nitrogen
Air quality JIS B8392-1: 2012 (ISO 8573-1: 2010) [1:1:1 - 1:6:1] (*1)
Max. working pressure MPa
1.0 (≈150 psi, 10 bar)
Min. working pressure MPa
0.1 (≈15 psi, 1 bar)
Proof pressure MPa 1.5 (≈220 psi, 15 bar)
Ambient temperature °C
0 (32°F) to 50 (122°F)
Ambient humidity 85% RH or less
Fluid temperature °C 0 (32°F) to 40 (104°F)
Accuracy
Linearity ±1.5% FS (0.7 MPa (≈100 psi, 7 bar), 20°C (68°F))
Pressure characteristics
±1.5% F.S. (0.1 (≈15 psi, 1 bar) to 1.0 MPa (≈150 psi, 10 bar), 0.7 MPa (≈100 psi, 7 bar) reference)
Temperature characteristics
±2.0% F.S. (0 (32°F) to 40°C (104°F), 20°C (68°F) reference)
Pressure loss MPa 0.005 (≈0.73 psi, 0.05 bar) or less (max. ow rate, 0.7 MPa (≈100 psi, 7 bar))
Response time sec 2.5
Display 5-digit LED display Display unit: ℓ/min (normal)
Min. displayed ow rate (*2)
10 20 30 50
Display resolution 1 10
Integrating ow Max. 9 digits (however, H and L are split displayed).
Output
Analog output Standard: 0 to 5 VDC Option: 4 to 20 mADC, 1 to 5 V, 0 to 10 V
Switch output (*3) 1 piece (transistor open collector) Green LED turns ON when switch is ON
Pulse output (option) (*4)
10 L(normal)/pulse
Power supply voltage V
24 DC (8 W or less)
Cable Included (with 3 m connector/0.5 mm2conductor)
Set value hold function (*5)
Semi-permanent due to EEPROM
Mounting
Mounting orientation Unrestricted in vertical/horizontal direction
Straight piping section
Not required
Degree of protection IP64 or equivalent
Weight kg 0.85 1.4
Bracket weight g 60 g (including screws) 84 g (including screws)
F.R.L
F(Filtr)
R(Reg)
L(Lub)
PresSW
Shutoff
SlowStart
FlmResistFR
Oil-ProhR
MedPresFR
No Cu/
PTFE FRL
Outdrs FR
F.R.L
(Related)
CompFRL
LgFRL
PrecsR
VacF/R
Clean FR
ElecPneuR
AirBoost
SpdContr
Silncr
CheckV/
other
Jnt/tube
AirUnt
PrecsCompn
Mech/
ElecPresSw
ContactSW
AirSens
PresSW
Cool
AirFloSens/
Contr
WaterRtSens
TotAirSys
(Total Air)
TotAirSys
(Gamma)
RefrDry
DesicDry
HiPolymDry
MainFiltr
Dischrg
etc
Ending
1372
Discontinue

PF500F to PF4000F Series
How to order
PF
Bracket
Output
*1
Port size
Flow rate range
How to order
Model No.
PF500F
PF1000F
PF2000F
PF4000F
Code Content
A Flow rate range
500F 25 to 500 L/min(normal) ●
1000F 50 to 1000 L/min(normal) ●
2000F 100 to 2000 L/min(normal) ●
4000F 200 to 4000 L/min(normal) ●
BPort size
10 Rc3/8 ● ●
15 Rc1/2 ● ● ●
20 Rc3/4 ● ●
25 Rc1 ●
C Output
Blank
Analog output 0 to 5 VDC (standard)
● ● ● ●
A1 Analog output 4 to 20 mADC ● ● ● ●
A2 Analog output 1 to 5 VDC ● ● ● ●
A3 Analog output 0 to 10 VDC ● ● ● ●
A6 Integrated pulse output ● ● ● ●
DBracket
Blank No bracket ● ● ● ●
BWith bracket (with thread) ● ● ● ●
Model No. of single bracket
Model No. Bracket model No.
PF500F/PF1000F/PF2000F PF-FL307499
PF4000F PF-FL307500
*1
* For combinations not listed in the table, contact your CKD branch or dealer.
[Example of model No.]
PF2000F-15-A1B
Model : PF2000F
●
AFlow rate range : 100 to 2000 L/min (normal)
●
BPort size : Rc1/2
●
COutput : Analog output 4 to 20 mADC
●
DBracket : Supplied (with M4 thread)
Code Std. (Option)
A1 A2 A3 A6
Analog output
Blank (0 to 5V) ● ●
A1 (4 to 20 mA) ●
A2 (1 to 5 V) ●
A3 (0 to 10 V) ●
A6 (Pulse output) ●
Switch output ● ● ●
A
B
C
D
Precautions for model No. selection
A1 B152000F
F.R.L
F(Filtr)
R(Reg)
L(Lub)
PresSW
Shutoff
SlowStart
FlmResistFR
Oil-ProhR
MedPresFR
No Cu/
PTFE FRL
Outdrs FR
F.R.L
(Related)
CompFRL
LgFRL
PrecsR
VacF/R
Clean FR
ElecPneuR
AirBoost
SpdContr
Silncr
CheckV/
other
Jnt/tube
AirUnt
PrecsCompn
Mech/
ElecPresSw
ContactSW
AirSens
PresSW
Cool
AirFloSens/
Contr
WaterRtSens
TotAirSys
(Total Air)
TotAirSys
(Gamma)
RefrDry
DesicDry
HiPolymDry
MainFiltr
Dischrg
etc
Ending
1373
Discontinue

PF500F to PF4000F Series
Internal structure and parts list
●PF500F to PF4000F
No. Part name Material
1 Pipe adaptor A6063 Aluminum alloy
2 Body A6063 Aluminum alloy
3 Collar A5056 Aluminum alloy
4 Mesh SUS304 Stainless steel
5 Packing NBR Nitrile rubber
6Case A ABS ABS resin
7 Display board
8 CPU board
9 O-ring NBR Nitrile rubber
10 O-ring NBR Nitrile rubber
11 Sensor board
12 Connector case 2 ABS ABS resin
13 Sensor assembly PPS Polyphenylene sulde
14 Gasket NBR Nitrile rubber
15 O-ring NBR Nitrile rubber
16
Platinum thermo sensor
17
Platinum ow sensor
●PF2000F ●PF4000F
●PF1000F
●PF500F
Pressure loss
Cannot be disassembled
1 2 4 5 11 12 13 1410 15
1716
67893
IN OUT
PF500F-10(at 0.7 MPa)
PF500F-10(at 0.3 MPa)
PF500F-15(at 0.7 MPa)
PF500F-15(at 0.3 MPa)
Flow rate [L/min (normal)]
500400300
Pressure loss [MPa]
2001000
0.000
0.001
0.004
0.003
0.002
0.005
PF1000F-10(at 0.7 MPa)
PF1000F-10(at 0.3 MPa)
PF1000F-15(at 0.7 MPa)
PF1000F-15(at 0.3 MPa)
Flow rate [L/min (normal)]
1000800600
Pressure loss [MPa]
4002000
0.000
0.002
0.008
0.006
0.004
0.010
PF4000F-20(at 0.7 MPa)
PF4000F-20(at 0.3 MPa)
PF4000F-25(at 0.7 MPa)
PF4000F-25(at 0.3 MPa)
Flow rate [L/min (normal)]
40003000
Pressure loss [MPa]
200010000
0.000
0.005
0.020
0.015
0.010
0.025
PF2000F-15(at 0.7 MPa)
PF2000F-15(at 0.3 MPa)
PF2000F-20(at 0.7 MPa)
PF2000F-20(at 0.3 MPa)
Flow rate [L/min (normal)]
20001500
Pressure loss [MPa]
10005000
0.000
0.005
0.020
0.015
0.010
0.025
F.R.L
F(Filtr)
R(Reg)
L(Lub)
PresSW
Shutoff
SlowStart
FlmResistFR
Oil-ProhR
MedPresFR
No Cu/
PTFE FRL
Outdrs FR
F.R.L
(Related)
CompFRL
LgFRL
PrecsR
VacF/R
Clean FR
ElecPneuR
AirBoost
SpdContr
Silncr
CheckV/
other
Jnt/tube
AirUnt
PrecsCompn
Mech/
ElecPresSw
ContactSW
AirSens
PresSW
Cool
AirFloSens/
Contr
WaterRtSens
TotAirSys
(Total Air)
TotAirSys
(Gamma)
RefrDry
DesicDry
HiPolymDry
MainFiltr
Dischrg
etc
Ending
1374
Discontinue

PF500F to PF4000F Series
Dimensions
Dimensions
●PF500F to PF4000F
Model No. Port size
PF*00F-10 Rc3/8
PF*00F-15 Rc1/2
PF*00F-20 Rc3/4
PF*00F-25 Rc1
Model No. A B C D E F G H I J K L
PF500F/PF1000F 135 52 85 22 67.5 26 26 36 33 64 72
M4 depth 4.5
PF2000F 135 55 96 27.5 67.5 26 26 36 33 64 72
M4 depth 4.5
PF4000F 176 65 109 34 88 46.5 28 40 42 74 84
M5 depth 5.5
H
G
Outlet
Cable 3 m (attached part)
Bracket (option)
Inlet
φ6
F
6.5
4.5
E
A
60
8
2-Port size
I
J
K
3
C
41
47
D
B
4-L 24
F.R.L
F(Filtr)
R(Reg)
L(Lub)
PresSW
Shutoff
SlowStart
FlmResistFR
Oil-ProhR
MedPresFR
No Cu/
PTFE FRL
Outdrs FR
F.R.L
(Related)
CompFRL
LgFRL
PrecsR
VacF/R
Clean FR
ElecPneuR
AirBoost
SpdContr
Silncr
CheckV/
other
Jnt/tube
AirUnt
PrecsCompn
Mech/
ElecPresSw
ContactSW
AirSens
PresSW
Cool
AirFloSens/
Contr
WaterRtSens
TotAirSys
(Total Air)
TotAirSys
(Gamma)
RefrDry
DesicDry
HiPolymDry
MainFiltr
Dischrg
etc
Ending
1375
Discontinue

Flow sensor for compressed air (FLUEREX)
Large ow rate
PF8000F/PF16000F Series
●Flow rate range: 0.40 to 8.00, 0.80 to 16.00 m³/min (normal)
*1 : If the compressed air contains foreign substances, water or oil, the ow rate cannot be detected and this causes "sensor error".
Install a lter, refrigeration air dryer, and oil mist lter on the upstream side of the ow rate sensor.
*2 :
When the ow rate is below the min. ow rate range, the display becomes 0. The display value out of the ow rate range is outside the guaranteed precision.
*3 : Note that the switch output is not available if option "A1" (4 to 20 mADC) or "A6" (integrated pulse) is selected.
*4: Refer to descriptions of integrated pulse output on page 1383 for details of pulse output.
*5 : Note that the integrating ow value is reset when the power supply is turned OFF.
Specications
Descriptions PF8000F-40 PF16000F-50
Specs
Flow rate range m³/min (normal)
0.40 to 8.00 0.80 to 16.00
Port size Rc1 1/2 Rc2
Working conditions
Applicable uid Compressed air, nitrogen
Air quality JIS B8392-1: 2012 (ISO 8573-1: 2010) [1:1:1 - 1:6:1] (*1)
Max. working pressure MPa
1.0 (≈150 psi, 10 bar)
Min. working pressure MPa
0.1 (≈15 psi, 1 bar)
Proof pressure MPa 1.5 (≈220 psi, 15 bar)
Ambient temperature °C
0 (32°F) to 50 (122°F)
Ambient humidity 85% RH or less
Fluid temperature °C 0 (32°F) to 40 (104°F)
Accuracy
Linearity ±2.5% FS (0.7 MPa (≈100 psi, 7 bar), 20 °C (68°F))
Pressure characteristics
±1.5% F.S. (0.1 (≈15 psi, 1 bar) to 1.0 MPa (≈150 psi, 10 bar), 0.7 MPa (≈100 psi, 7 bar) reference)
Temperature characteristics
±2.0% F.S. (0 (32°F) to 40°C (104°F), 20°C (68°F) reference)
Pressure loss MPa 0.005 (≈0.73 psi, 0.05 bar) or less (max. ow rate, 0.7 MPa (≈100 psi, 7 bar))
Response time sec 2.5
Display 5-digit LED display Display unit: m3/min (normal)
Min. displayed ow (*2) m
3
/min (normal)
0.1 0.2
Display resolution 0.01 0.10
Integrating ow Max. 9 digits (however, H and L are split displayed).
Output
Analog output Standard: 0 to 5 VDC Option: 4 to 20 mADC, 1 to 5 V, 0 to 10 V
Switch output (*3) 1 piece (transistor open collector) Green LED turns ON when switch is ON
Pulse output (option) (*4)
0.10 m³ (normal)/pulse
Power supply voltage V
24 DC (8 W or less)
Cable Included (with 3 m connector/0.5 mm2conductor)
Set value hold function (*5)
Semi-permanent due to EEPROM
Mounting
Mounting orientation Unrestricted in vertical/horizontal direction
Straight piping section
Upstream side 10D/downstream side 5D
Degree of protection IP64 or equivalent
Weight kg 3.8 4.0
F.R.L
F(Filtr)
R(Reg)
L(Lub)
PresSW
Shutoff
SlowStart
FlmResistFR
Oil-ProhR
MedPresFR
No Cu/
PTFE FRL
Outdrs FR
F.R.L
(Related)
CompFRL
LgFRL
PrecsR
VacF/R
Clean FR
ElecPneuR
AirBoost
SpdContr
Silncr
CheckV/
other
Jnt/tube
AirUnt
PrecsCompn
Mech/
ElecPresSw
ContactSW
AirSens
PresSW
Cool
AirFloSens/
Contr
WaterRtSens
TotAirSys
(Total Air)
TotAirSys
(Gamma)
RefrDry
DesicDry
HiPolymDry
MainFiltr
Dischrg
etc
Ending
1376
Discontinue

PF8000F/PF16000F Series
How to order
A140
8000F
PF
Output
*1
Port size
Flow rate range
How to order
Model No.
PF8000F
PF16000F
Code Content
A Flow rate range
8000F 0.40 to 8.00 m³/min (normal) ●
16000F 0.80 to 16.00 m³/min (normal) ●
BPort size
40 Rc1 1/2 ●
50 Rc2 ●
C Output
Blank Analog output 0 to 5 VDC (standard) ● ●
A1 Analog output 4 to 20 mADC ● ●
A2 Analog output 1 to 5 VDC ● ●
A3 Analog output 0 to 10 VDC ● ●
A6 Integrated pulse output ● ●
* For combinations not listed in the table, contact your CKD branch or dealer.
●PF16000F-50
●PF8000F-40
Pressure loss
A
B
C
*1
[Example of model No.]
PF8000F-40-A1
Model : PF8000F
●
AFlow rate range : 0.40 to 8.00 m³/min (normal)
●
BPort size : Rc1 1/2
●
COutput : Analog output 4 to 20 mADC
Code Std. (Option)
A1 A2 A3 A6
Analog output
Blank (0 to 5V) ● ●
A1 (4 to 20 mA) ●
A2 (1 to 5 V) ●
A3 (0 to 10 V) ●
A6 (Pulse output) ●
Switch output ● ● ●
Precautions for model No. selection
0.00 16.0012.008.00 14.0010.006.002.00 4.00
Flow rate [m³/min (normal)]
(0.7 MPa)
(0.4 MPa)
Pressure loss [MPa]
0.000
0.001
0.004
0.003
0.002
0.005
0.00 8.006.004.00 7.005.003.001.00 2.00
(0.7 MPa)
(0.4 MPa)
Flow rate [m³/min (normal)]
Pressure loss [MPa]
0.000
0.008
0.006
0.004
0.002
0.010
F.R.L
F(Filtr)
R(Reg)
L(Lub)
PresSW
Shutoff
SlowStart
FlmResistFR
Oil-ProhR
MedPresFR
No Cu/
PTFE FRL
Outdrs FR
F.R.L
(Related)
CompFRL
LgFRL
PrecsR
VacF/R
Clean FR
ElecPneuR
AirBoost
SpdContr
Silncr
CheckV/
other
Jnt/tube
AirUnt
PrecsCompn
Mech/
ElecPresSw
ContactSW
AirSens
PresSW
Cool
AirFloSens/
Contr
WaterRtSens
TotAirSys
(Total Air)
TotAirSys
(Gamma)
RefrDry
DesicDry
HiPolymDry
MainFiltr
Dischrg
etc
Ending
1377
Discontinue

PF8000F/PF16000F Series
Internal structure and parts list
●PF8000F/PF16000F
No. Part name Material No. Part name Material
1 Attachment A6063 Aluminum alloy 14 Gasket NBR Nitrile rubber
2 Body A6063 Aluminum alloy 15 O-ring NBR Nitrile rubber
3 Collar A5056 Aluminum alloy 16
Platinum thin lm thermo sensor
4 Mesh SUS304 Stainless steel 17
Platinum thin lm ow rate sensor
5 Packing NBR Nitrile rubber 18 Sub-attachment SCS13 Stainless steel
6Case A ABS ABS resin 19 O-ring NBR Nitrile rubber
7 Display board 20 Aspirator C3604
Free cutting copper alloy
8 CPU board 21 Main body 2 A6063 Aluminum alloy
9 O-ring NBR Nitrile rubber 22 Orice C3604
Free cutting copper alloy
10 O-ring NBR Nitrile rubber 23 O-ring NBR Nitrile rubber
11 Sensor board 24 Main body 1 A6063 Aluminum alloy
12 Connector case 2 ABS ABS resin 25 O-ring NBR Nitrile rubber
13 Sensor assembly PPS Polyphenylene sulde
Cannot be disassembled
23
22
21
20
19
18
17
24
25 16
151413121110987654321
OUT
IN
F.R.L
F(Filtr)
R(Reg)
L(Lub)
PresSW
Shutoff
SlowStart
FlmResistFR
Oil-ProhR
MedPresFR
No Cu/
PTFE FRL
Outdrs FR
F.R.L
(Related)
CompFRL
LgFRL
PrecsR
VacF/R
Clean FR
ElecPneuR
AirBoost
SpdContr
Silncr
CheckV/
other
Jnt/tube
AirUnt
PrecsCompn
Mech/
ElecPresSw
ContactSW
AirSens
PresSW
Cool
AirFloSens/
Contr
WaterRtSens
TotAirSys
(Total Air)
TotAirSys
(Gamma)
RefrDry
DesicDry
HiPolymDry
MainFiltr
Dischrg
etc
Ending
1378
Discontinue

PF8000F/PF16000F Series
Dimensions
Dimensions
Model No. A B C D Port size
PF8000F-40 74 148 65 32.5 Rc1 1/2
PF16000F-50 79 158 75 37.5 Rc2
300
******
MADE IN JAPAN
PF16000F-50
0-40 °C
800-16000 NL/min
MAX. 1.0 MPa
FLUID TEMP.
PRESSURE SERIAL
RANGE
WIRING
GND
WHITE
BLUE
24 VDC
ANALOG 0-5V(0-16000 NL/min)
OUT NPN MAX. 30 VDC 50 mA
BROWN
BLACK
A
B
C
D
F.R.L
F(Filtr)
R(Reg)
L(Lub)
PresSW
Shutoff
SlowStart
FlmResistFR
Oil-ProhR
MedPresFR
No Cu/
PTFE FRL
Outdrs FR
F.R.L
(Related)
CompFRL
LgFRL
PrecsR
VacF/R
Clean FR
ElecPneuR
AirBoost
SpdContr
Silncr
CheckV/
other
Jnt/tube
AirUnt
PrecsCompn
Mech/
ElecPresSw
ContactSW
AirSens
PresSW
Cool
AirFloSens/
Contr
WaterRtSens
TotAirSys
(Total Air)
TotAirSys
(Gamma)
RefrDry
DesicDry
HiPolymDry
MainFiltr
Dischrg
etc
Ending
1379
Discontinue

Flow sensor for compressed air (FLUEREX)
modular connection
PFU500F to PFU2000F Series
●
Flow rate range: 25 to 500, 50 to 1000, 100 to 2000
L
/min (normal)
*1 : If the compressed air contains foreign substances, water or oil, the ow rate cannot be detected and this causes "sensor error".
Install a lter, refrigeration air dryer, and oil mist lter on the upstream side of the ow rate sensor.
*2 :
When the ow rate is below the min. ow rate range, the display becomes 0. The display value out of the ow rate range is outside the guaranteed precision.
*3 : Note that the switch output is not available if option "A1" (4 to 20 mADC) or "A6" (integrated pulse) is selected.
*4: Refer to descriptions of integrated pulse output on page 1383 for details of pulse output.
*5 : Note that the integrating ow value is reset when the power supply is turned OFF.
Specications
Descriptions PFU500F-10 PFU1000F-10 PFU2000F-15
Specs
Flow rate range L/min(normal)
25 to 500 50 to 1000 100 to 2000
Port size Rc3/8 Rc1/2
Working conditions
Applicable uid Compressed air, nitrogen
Air quality JIS B8392-1: 2012 (ISO 8573-1: 2010) [1:1:1 - 1:6:1] (*1)
Max. working pressure MPa
1.0 (≈150 psi, 10 bar)
Min. working pressure MPa
0.1 (≈15 psi, 1 bar)
Proof pressure MPa 1.5 (≈220 psi, 15 bar)
Ambient temperature°C
0 (32°F) to 50 (122°F)
Ambient humidity 85% RH or less
Fluid temperature °C 0 (32°F) to 40 (104°F)
Accuracy
Linearity ±1.5% FS (0.7 MPa (≈100 psi, 7 bar), 20 °C (68°F))
Pressure characteristics
±1.5% F.S. (0.1 (≈15 psi, 1 bar) to 1.0 MPa (≈150 psi, 10 bar), 0.7 MPa (≈100 psi, 7 bar) reference)
Temperature characteristics
±2.0% F.S. (0 (32°F) to 40°C (104°F), 20°C (68°F) reference)
Pressure loss MPa 0.005 (≈0.73 psi, 0.05 bar) or less (max. ow rate, 0.7 MPa (≈100 psi, 7 bar))
Response time sec 2.5
Display 5-digit LED display Display unit: L/min (normal)
Min. displayed ow rate (*2)
10 20 30
Display resolution 1 10
Integrating ow Max. 9 digits (however, H and L are split displayed).
Output
Analog output Standard: 0 to 5 VDC Option: 4 to 20 mADC, 1 to 5 V, 0 to 10 V
Switch output (*3) 1 piece (transistor open collector) Green LED turns ON when switch is ON
Pulse output (option) (*4)
10 L(normal)/pulse
Power supply voltage V
24 DC (8 W or less)
Cable Included (with 3 m connector/0.5 mm2conductor)
Set value hold function (*5)
Semi-permanent due to EEPROM
Mounting
Mounting orientation Unrestricted in vertical/horizontal direction
Straight piping section
Not required
Connection module W3000-10 W4000-15
Degree of protection IP64 or equivalent
Weight kg 1.5 1.8
F.R.L
F(Filtr)
R(Reg)
L(Lub)
PresSW
Shutoff
SlowStart
FlmResistFR
Oil-ProhR
MedPresFR
No Cu/
PTFE FRL
Outdrs FR
F.R.L
(Related)
CompFRL
LgFRL
PrecsR
VacF/R
Clean FR
ElecPneuR
AirBoost
SpdContr
Silncr
CheckV/
other
Jnt/tube
AirUnt
PrecsCompn
Mech/
ElecPresSw
ContactSW
AirSens
PresSW
Cool
AirFloSens/
Contr
WaterRtSens
TotAirSys
(Total Air)
TotAirSys
(Gamma)
RefrDry
DesicDry
HiPolymDry
MainFiltr
Dischrg
etc
Ending
1380
Discontinue

PFU Series
How to order
XA14W152000F
PFU
Option
*1
Output
*2
Port size
How to order
Model No.
PFU500F
PFU1000F
PFU2000F
Code Content
A Flow rate range
500F 25 to 500 L/min(normal) ●
1000F 50 to 1000 L/min(normal) ●
2000F 100 to 2000 L/min(normal) ●
BPort size
10 Rc3/8 ● ●
15 Rc1/2 ●
C Connection module
3W W3000-10 ● ●
4W W4000-15 ●
D Output
Blank Analog output 0 to 5 VDC (standard) ● ● ●
A1 Analog output 4 to 20 mADC ● ● ●
A2 Analog output 1 to 5 VDC ● ● ●
A3 Analog output 0 to 10 VDC ● ● ●
A6 Integrated pulse output ● ● ●
EOption
Blank No option
X
IN/OUT ow direction reversed (right to left)
● ● ●
NNon-relief ● ● ●
Internal structure and parts list
Refer to page 1374.
A
B
C
D
E
[Example of model No.]
PFU2000F-15-4W-A1X
Model : PFU2000F modular connection
●
AFlow rate range : 100 to 2000 L/min (normal)
●
BPort size : Rc1/2
●
CConnection module: W4000-15
●
DOutput : Analog output 4 to 20 mADC
●
EOption :IN/OUT ow direction reversed (right to left)
* For combinations not listed in the table, contact your CKD branch or dealer.
*1: For combinations with CKD F.R.L. unit module of the
lter/regulator W*000 Series. For the combinations
with other F.R.L. unit, contact your CKD branch or
dealer.
*2
Code Std. (Option)
A1 A2 A3 A6
Analog output
Blank (0 to 5V) ● ●
A1 (4 to 20 mA) ●
A2 (1 to 5 V) ●
A3 (0 to 10 V) ●
A6 (Pulse output) ●
Switch output ● ● ●
Precautions for model No. selection
Connection module
*1
Flow rate range
F.R.L
F(Filtr)
R(Reg)
L(Lub)
PresSW
Shutoff
SlowStart
FlmResistFR
Oil-ProhR
MedPresFR
No Cu/
PTFE FRL
Outdrs FR
F.R.L
(Related)
CompFRL
LgFRL
PrecsR
VacF/R
Clean FR
ElecPneuR
AirBoost
SpdContr
Silncr
CheckV/
other
Jnt/tube
AirUnt
PrecsCompn
Mech/
ElecPresSw
ContactSW
AirSens
PresSW
Cool
AirFloSens/
Contr
WaterRtSens
TotAirSys
(Total Air)
TotAirSys
(Gamma)
RefrDry
DesicDry
HiPolymDry
MainFiltr
Dischrg
etc
Ending
1381
Discontinue

PFU500F to PFU2000F Series
Dimensions
●PFU500F to PFU2000F
No. Part name Remarks
1 Filter/regulator W3000-10/W4000-15
2 T type bracket set B310/B410
3Flow rate meter
PFU500F/PFU1000F/PFU2000F
Model No. A B C D E F G H
PFU500F/PFU1000F 189 113.5 104 148 63 45 34.5 Rc3/8
PFU2000F 206 123.5 110 171 80 55 42.5 Rc1/2
Orientation of the display
can be changed
22
A
7
7
Drain outlet
Cable 3 m (attached part)
φ7
φ6
D
E
C
PRESS
TURN
2-H
F
5570
4560
G
68.5
B
1
23
F.R.L
F(Filtr)
R(Reg)
L(Lub)
PresSW
Shutoff
SlowStart
FlmResistFR
Oil-ProhR
MedPresFR
No Cu/
PTFE FRL
Outdrs FR
F.R.L
(Related)
CompFRL
LgFRL
PrecsR
VacF/R
Clean FR
ElecPneuR
AirBoost
SpdContr
Silncr
CheckV/
other
Jnt/tube
AirUnt
PrecsCompn
Mech/
ElecPresSw
ContactSW
AirSens
PresSW
Cool
AirFloSens/
Contr
WaterRtSens
TotAirSys
(Total Air)
TotAirSys
(Gamma)
RefrDry
DesicDry
HiPolymDry
MainFiltr
Dischrg
etc
Ending
1382
Discontinue

PF Series
Electric wiring
Load resistance of analog output
Model No.
Min.
ℓ
/min (normal)
FS L/min(normal)
PF500F/
PFU500F
25 500
PF1000F/
PFU1000F
50 1000
PF2000F/
PFU2000F
100 2000
PF4000F 200 4000
PF8000F
400 (0.40 m³/min)
8000 (80.00 m³/min)
PF16000F
800 (0.80 m³/min)
16000 (16.00 m³/min)
L(normal)
(Example) When using PF8000F, the pulse wave shape is as below.
Model No. PF500F PF1000F PF2000F PF4000F PF8000F PF16000F
Integrating ow
per pulse 10 100 (0.10m³)
PF series electric wiring
Analog output (option code: blank, -A1, -A2, -A3)
1
●
The relation between the ow rate and the analog
output is as in the gure on the left. Note that the
analog output is not output normally at the min.
value or less. However, the ow rate display in the
monitor is displayed even at the min. value or less.
●
Never make a short circuit between the
analog output terminal (ANO) and
another terminal. This may lead to failure.
●
Make the cable short so as not to be affected
by noise and keep it away from all noise
sources such as power distribution wires.
●When extending the cable,
Product name: Extension cable
Model No. : PF-FL-280775
Use (length of 3 m).
Use the cable with total length of 10 m or less.
2Integrated pulse output (option code: -A6)
●
For the integrated pulse output, a pulse is output per the integrated value below.
● Electrical specication
◆Output circuit
The integration display is updated at intervals of approx. 1 sec.
Descriptions
Analog output Load resistance
0 to 5 VDC 50 kΩ or more
4 to 20 mADC 500 Ω or less
1 to 5 VDC 50 kΩ or more
0 to 10 VDC 50 kΩ or more
Analog output (V)
Analog output (V)
Analog output (V) Analog output (mA)
Min. value
Min. value Min. value
Min. value
Time
OFF
ON 25
msec
25 msec25 msec
Time
OFF
ON
25 msec
When the integration display is increased by 0.20 m³ (normal)
When the integration display is increased by 0.10 m³ (normal)
Internal circuit
Transistor
output
GND common
GND
PULSE OUT
Rating of transistor output
Max. rated voltage 30 VDC
Max. rated current 50 mA
0 to 5 VDC [blank] 4 to 20 mADC [-A1]
1 to 5 VDC [-A2] 0 to 10 VDC [-A3]
Flow rate L/min (normal)
Flow rate L/min (normal) Flow rate L/min (normal)
Flow rate L/min (normal)
F.R.L
F(Filtr)
R(Reg)
L(Lub)
PresSW
Shutoff
SlowStart
FlmResistFR
Oil-ProhR
MedPresFR
No Cu/
PTFE FRL
Outdrs FR
F.R.L
(Related)
CompFRL
LgFRL
PrecsR
VacF/R
Clean FR
ElecPneuR
AirBoost
SpdContr
Silncr
CheckV/
other
Jnt/tube
AirUnt
PrecsCompn
Mech/
ElecPresSw
ContactSW
AirSens
PresSW
Cool
AirFloSens/
Contr
WaterRtSens
TotAirSys
(Total Air)
TotAirSys
(Gamma)
RefrDry
DesicDry
HiPolymDry
MainFiltr
Dischrg
etc
Ending
1383
Discontinue

PF500F to PF16000F Series
Wiring method
Electric wiring
·Middle ow rate PF500F/PF1000F/PF2000F/PF4000F
·Large ow rate PF8000F/PF16000F
●Standard/option A2 A3 A6
1) Example of connection with relay/resistance load/recorder
2) Example of connection with programmable controller
●Option A1 4 to 20 mA output
4
3
2
1
Plug (male)
Connector pin No.
Connector No.
Accessory cable (3 m)
--- Connect to (-) of DC power supply: 0 VDC
Pulse for A6 : MAX 30 VDC/50 mA
--- Switch output
--- Analog output: Voltage in proportion to ow rate is output.
GND (blue)
ALARM (black)
ANO (white)
+V (brown)
Main circuit
--- Connect to (+) of DC power supply: 24 VDC ± 10%
+
Recorder
DC power supply
+
+
Load
GND (blue)
ALARM (black)
ANO (white)
+V (brown)
Main circuit
Internal circuit
PC
24+
Input
DC power supply
+
GND (blue)
ALARM (black)
ANO (white)
+V (brown)
Main circuit
· Switch output is not available if 4 to 20 mA output is selected.
+
Receiver
--- Connect to (-) of DC power supply: 0 VDC
--- Connect to 4 to 20 mA input unit
GND (blue)
ANO - (black)
ANO + (white)
+V (brown)
Main circuit
--- Connect to (+) of DC power supply: 24 VDC ± 10%
1
2
4
3
F.R.L
F(Filtr)
R(Reg)
L(Lub)
PresSW
Shutoff
SlowStart
FlmResistFR
Oil-ProhR
MedPresFR
No Cu/
PTFE FRL
Outdrs FR
F.R.L
(Related)
CompFRL
LgFRL
PrecsR
VacF/R
Clean FR
ElecPneuR
AirBoost
SpdContr
Silncr
CheckV/
other
Jnt/tube
AirUnt
PrecsCompn
Mech/
ElecPresSw
ContactSW
AirSens
PresSW
Cool
AirFloSens/
Contr
WaterRtSens
TotAirSys
(Total Air)
TotAirSys
(Gamma)
RefrDry
DesicDry
HiPolymDry
MainFiltr
Dischrg
etc
Ending
1384
Discontinue

PF-F/PFU Series
Operations
· Three types of setting are available according to the application.
● Switch output parameters
●0 < L < H
● 0 < (L-h) ≤ L < (H-h)
Note)
1) Switch output ON indicates that the transistor is energized.
2) For safety, set the output only when the upper level equipment is in
stop state.
3) The settings of parameters 0 and 1 should satisfy the following
conditions. Otherwise operation cannot be guaranteed.
Note that the output is always OFF if L=H=h=0 (factory default).
1) In the write mode described on the right, clear
with key operation.
2) Clear by turning the power OFF.
●To clear the integrating ow
· Set when the ow rate pulsates, causing the
switch output to chatter.
●Hysteresis
Note:
Between PF500F to PF4000F/PFU500F to PFU2000F and PF8000F/PF16000F, the unit is different. In the explanation above, the explanation
is made for the model No. of PF500F to PF4000F as a representative. For PF8000F/PF16000F, change the reading way of the unit.
PF500F to PF4000F/PFU500F to PFU2000F: L/min (normal)
PF8000F/PF16000F: m3/min (normal) (the value becomes 1000 times of (L/min normal) and a decimal point is added.)
[Measurement mode]
· Switches H and L of the
integrating ow display.
[In write mode]
· Increases the blinking digits.
●Up key
[L]
· Displays the lower digits of
integrating ow. (Unit: L liter)
[H]
· Displays the higher digits of
integrating ow. (Unit: L liter)
●Unit lamp Integrating ow
[Measurement mode]
· Switches the display to the write
mode when held down for 2 seconds.
[In write mode]
· Moves the blinking digit to the right.
●Shift key
[Measurement mode]
·
Switches the display between the
instantaneous ow rate and integrating ow.
[In write mode]
· Use to conrm the setting.
●Change key
· Displays the instantaneous ow rate/
integrating ow.
[In write mode]
· Displays the output setting value, etc.
●5-digit digital display
· When the lamp is ON, the 5-digit
digital display displays the
instantaneous ow rate.
●
Unit lamp Instantaneous ow rate
Indicates the switch output status.
[L] Lower digits: 99999[H] Higher digits: 09999
Max. 9 digits of integrating ow
●Output lamp
H(High)
h (Hysteresis)h (Hysteresis)
L(Low)
OFF
ON
Switch output
Instantaneous ow rate L/min (normal)
H(High)L(Low)
OFF
ON
Output
(alarm)
Instantaneous ow rate L/min (normal)
Parameter 1
Set value
OFF
ON
Output
(alarm)
Integrating ow L (normal)
· Output occurs when the integrating owreaches the set value.
Parameter 2
H(High)L(Low)
OFF
ON
Output
(alarm)
Instantaneous ow rate L/min (normal)
· Use to detect a ow rate error, etc.· Use to detect a disconnection error, etc
Parameter 0 (zero)
L
PF SERIESAIR FLOW SENSOR
TOTAL
H
L/min (nor)
OUT
FLUEREX
CKD
F.R.L
F(Filtr)
R(Reg)
L(Lub)
PresSW
Shutoff
SlowStart
FlmResistFR
Oil-ProhR
MedPresFR
No Cu/
PTFE FRL
Outdrs FR
F.R.L
(Related)
CompFRL
LgFRL
PrecsR
VacF/R
Clean FR
ElecPneuR
AirBoost
SpdContr
Silncr
CheckV/
other
Jnt/tube
AirUnt
PrecsCompn
Mech/
ElecPresSw
ContactSW
AirSens
PresSW
Cool
AirFloSens/
Contr
WaterRtSens
TotAirSys
(Total Air)
TotAirSys
(Gamma)
RefrDry
DesicDry
HiPolymDry
MainFiltr
Dischrg
etc
Ending
1386
Discontinue

PF-F/PFU Series
Functions and operations for monitor
Measurement mode
Note) Integrating ow is displayed in integers.
In 10 seconds, the light goes from blinking to
steady and the display automatically returns to
the instantaneous ow rate display.
Holding down for 2 seconds conrms the setting: the blinking light will
change to a steady light and the display will constantly show an
integrated value. As the measurement setting is retained even if the
power is turned OFF, resetting is not necessary.
To return to the instantaneous ow rate display, hold down for 2 seconds again.
Temporary integrating ow display
Instantaneous ow rate display
●Measures the instantaneous ow rate/integrating ow. (when powered on)
Hold down for 2 seconds
Write mode
To measurement mode
· Hold down the Shift/Up keys together for 10
seconds to clear the integrating value.
· Set the h (hysteresis) value with the Shift/Up keys.
· Set the H (High) value with the Shift/Up keys.
· Set the L (LOW) value with the Shift/Up keys.
· Set the parameter with the Up key.
Note) L, H and h are not displayed if parameter 2 is
selected. Refer to the instruction manual for
details.
Note) In the example below, P (parameter) is set to 0,
L (Low) to 100, H (High) to 200, and h
(hysteresis) to 10 L/min (normal).
●Set the switch output.
Clearing integrating value
Hysteresis setting
H (High) setting
L (Low) setting
Parameter setting
LTOTAL
H
OUT2
OUT1
L/min (nor)
L/min (nor)
L/min (nor)
L/min (nor)
L/min (nor)
LTOTAL
H
OUT2
OUT1
LTOTAL
H
OUT2
OUT1
LTOTAL
H
OUT2
OUT1
LTOTAL
H
OUT2
OUT1
L
PF SERIESAIR FLOW SENSOR
TOTAL
H
OUT
L/min (nor)
FLUEREX
CKD
Flashing
L
PF SERIESAIR FLOW SENSOR
TOTAL
H
L/min (nor)
FLUEREX
CKD
OUT
F.R.L
F(Filtr)
R(Reg)
L(Lub)
PresSW
Shutoff
SlowStart
FlmResistFR
Oil-ProhR
MedPresFR
No Cu/
PTFE FRL
Outdrs FR
F.R.L
(Related)
CompFRL
LgFRL
PrecsR
VacF/R
Clean FR
ElecPneuR
AirBoost
SpdContr
Silncr
CheckV/
other
Jnt/tube
AirUnt
PrecsCompn
Mech/
ElecPresSw
ContactSW
AirSens
PresSW
Cool
AirFloSens/
Contr
WaterRtSens
TotAirSys
(Total Air)
TotAirSys
(Gamma)
RefrDry
DesicDry
HiPolymDry
MainFiltr
Dischrg
etc
Ending
1387
Discontinue

DANGER
DANGER
WARNING
WARNING
CAUTION
CAUTION
Product-specic cautions: Flow sensor for compressed air PF-F/PFU series
Pneumatic components (sensors)
Safety Precautions
Be sure to read this section before use.
Refer to Intro Page 63 for general precautions regarding pneumatic components
and refer to " Safety precautions" for detailed precautions for individual series.
Design/selection
1. Checking the specications
■Never use with a ammable uid.
■Use the product in the range of conditions specied
for the product.
The product in this catalog is designed for use only in a compressed
air system. Use with pressures or temperatures outside the
specications range may result in damage or operation failure.
■This product cannot be used as a billing meter.
Do not use this product for commercial transactions
as it is not compliant with the Measurement Act.
Intended applications include industrial sensors.
■Because compressed air or nitrogen gas is used as
an applicable uid, do not use uids other than
these, because accuracy cannot be guaranteed.
2. Safety design
■
Take measures to prevent physical harm or property
damage in the event of failure of this product
.
■Understand the characteristics of compressed air
before designing a pneumatic circuit.
●Pop-out, air discharge, or leakage due to air compression
and expansion may occur.
●Design the circuit so that compressed air in the system is
exhausted.
■Check for leakage current to avoid malfunction
caused by the leakage current.
●When using a programmable controller, leakage current
may cause malfunction.
■Although there is no movable section in the ow
rate sensor, when repeating ON/OFF of the
solenoid valve, the mesh section or xed section of
the rectier may move slightly and this may result
in the generation of particles. When the generation
of particles must be eliminated, be sure to install a
lter on the secondary side (downstream side) of
the ow rate sensor.
■Exerts no inuence on performance as it uses
compressed air and a small amount of leakage is
tolerable. Contact CKD if no leakage is required.
■
The monitor of the display separated PFD Series
cannot be connected to PF-F/PFU Series. When
making the connection, this product could break.
■Precautions for analog output "A1"
Connecting multiple analog output 4 to 20 mA sensors
to the same common input circuit (host computer, PLC,
etc.) as shown above causes interference between the
signals, preventing correct operation. In this case, use
the voltage output (standard, A2, A3).
* The voltage at point A and that at point B are
connected inside the input circuit, which gives
them the same electrical potential, creating an
error in the respective analog outputs.
If the power supply (24 VDC) of the host input circuit is not isolated,
install separate power supplies for the input circuit and the sensor.
3. Design by application
■Never use this product in an explosive gas
atmosphere. The structure is not explosion-proof,
and explosions or res could occur.
■When using nitrogen gas as an applicable uid,
oxygen deciency could be caused. Observe the
following instructions.
(1) Use in well ventilated locations.
(2) Ventilate the work area when nitrogen gas is being used.
(3) Inspect nitrogen gas piping regularly to avoid leaks.
4. Working environment
B
A
24-
24+
V2+
I2+
COM2
V1+
I1+
COM1
-4 to 20 mA
+4 to 20 mA
-4 to 20 mA
+4 to 20 mA
DC +
Power supply
Certain requirements
apply to connection.
Insulated type
-15 V
AG
+15 V
DC/DC
Upper level input circuit
ch2
ch1
250 Ω
250 Ω
Internal
circuit
240 Ω
DC -
DC +
Sensor 2
DC -
DC +
Sensor 1
24 VDC
Internal
circuit
240 Ω
AG
F.R.L
F(Filtr)
R(Reg)
L(Lub)
PresSW
Shutoff
SlowStart
FlmResistFR
Oil-ProhR
MedPresFR
No Cu/
PTFE FRL
Outdrs FR
F.R.L
(Related)
CompFRL
LgFRL
PrecsR
VacF/R
Clean FR
ElecPneuR
AirBoost
SpdContr
Silncr
CheckV/
other
Jnt/tube
AirUnt
PrecsCompn
Mech/
ElecPresSw
ContactSW
AirSens
PresSW
Cool
AirFloSens/
Contr
WaterRtSens
TotAirSys
(Total Air)
TotAirSys
(Gamma)
RefrDry
DesicDry
HiPolymDry
MainFiltr
Dischrg
etc
Ending
1388
Discontinue

PF-F/PFU Series
Product-specic cautions
WARNING CAUTION
■Install the product where it will not be exposed to
rain, water or direct sunlight.
■Do not use this product in a corrosive environment.
Use in such an environment could lead to damage
or operation failure.
■
Consult with CKD if ozone is generated in the supplied air.
■Avoid using this product in environments where
ozone is generated.
■
Fluid temperature should be in the range of 0 to 40°C.
Even if the ambient temperature is within the specied range,
do not use this product in a location where the temperature
could suddenly change and cause dew to condense.
■
Do not use at a pressure exceeding the max. working
pressure, as excessive pressure can cause product failure.
■
The sensor section employs a dust-proof, drip-proof structure
that provides reliability during maintenance and cleaning,
during which it may be exposed to water splashing. However,
avoid using this product in a location where it may be constantly
exposed to water or intense splattering of water and/or oil.
■
Conrm before use that the product will withstand the working environment.
●
Cannot be used in environments where its functions will be impeded.
Such environments include high temperatures, chemical atmospheres,
or those where chemical liquids, vibration, moisture, dripping water,
coolant or gas are present. Environments where ozone is generated.
■
Be sure to use within ambient temperature range of 0 to 50°C.
■
Do not use this product in an environment exposed to vibration
resistance of 49 m/s2and over or shock resistance of 294 m/s2and over.
■Working conditions for CE compliance
This product is CE-marked, indicating conformity with the EMC
Directives. The standard for the immunity for industrial
environments applied to this product is EN61000-6-2; the following
requirements must be satised in order to conform to this standard:
Conditions
●
The assessment of this product is performed by using a cable pairing a
power supply line and a signal line, assessing this cable as a signal line.
●
This product is not equipped with surge immunity. Implement
surge protection measures on the system side.
■Around the pneumatic component, keep space for
installation, removal, wiring, and piping work.
CAUTION
5. Securing of space
Mounting, installation and adjustment
DANGER
WARNING
CAUTION
1. Installation
■Use power supply voltage and output within the
specied voltage.
If voltage exceeding the specied voltage is applied, the
sensor could malfunction or be damaged, or electrical shock
or re could occur. Do not use any load that exceeds the
rated output. Otherwise, output damage or re may result.
■
Check the line color and terminal number when connecting
wires. Incorrect wiring could result in sensor damage and
malfunctions, so check wire color and terminal number
against the instruction manual before wiring.
Install a noise lter if required.
■
Ensure that wires are properly insulated.
Check that wires do not come into contact with other
circuits, that no ground faults occur, and that the
insulator between terminals is not defective. Otherwise,
overcurrent may ow into the sensor, causing damage.
■
Keep the product away from high voltage cables, high
voltage equipment and power equipment such as motors.
■Check that there are no cutting chips and wire dust
on the connector of the sensor before wiring.
CAUTION
2. Pre-operation conrmation
■
After connecting piping, always check all pipe connections
for air leaks before supplying compressed air.
●
Apply a leakage detection agent to pipe connections with a
brush and check for air leaks. Make sure that the leak
detection agent does not adhere to the resin parts. Otherwise
resin parts could be damaged, which is dangerous.
■
Keep the cable away from all noise sources, including
power distribution wires. Noise can cause malfunctions.
■Do not short-circuit the output transistor.
When a load is short-circuited, overcurrent protection circuit is
triggered to prevent damage to the output transistor; however, if
this state persists, the output transistor could be damaged.
Overcurrent protection...Approx.70 mA
■
Do not remove the pneumatic component packaging and the
piping port dust-proof cap until just before starting piping.
●Removing the piping port cap before piping work may
cause foreign matter to enter the pneumatic components
from the piping port, resulting in failure or malfunction.
■
When mounting pneumatic components, do not use a
mounting method that relies on support from the piping.
F.R.L
F(Filtr)
R(Reg)
L(Lub)
PresSW
Shutoff
SlowStart
FlmResistFR
Oil-ProhR
MedPresFR
No Cu/
PTFE FRL
Outdrs FR
F.R.L
(Related)
CompFRL
LgFRL
PrecsR
VacF/R
Clean FR
ElecPneuR
AirBoost
SpdContr
Silncr
CheckV/
other
Jnt/tube
AirUnt
PrecsCompn
Mech/
ElecPresSw
ContactSW
AirSens
PresSW
Cool
AirFloSens/
Contr
WaterRtSens
TotAirSys
(Total Air)
TotAirSys
(Gamma)
RefrDry
DesicDry
HiPolymDry
MainFiltr
Dischrg
etc
Ending
1389
Discontinue
This manual suits for next models
8
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