CKD RAPIFLOW FSM3 Series User manual

Compact Flow Rate
Sensor
RAPIFLOW®FSM3 Series
Resin Body Type
CC-1235A 1
Diversified
High Performance
User-friendly
Diversified
High performance
User-friendly
Compatible

Diversified
High performance
Five types of gases can be measured with just one unit
Gas change function (Model with full scale ow rate of up to 200 L/min)
Air, nitrogen, argon, carbon dioxide, mixed gas (mixture of Ar:CO2 (8:2)) supported with this single ow rate sensor.
Gas types can be changed with gases button operations.
In the IO-Link specications, changing gases can be done remotely using the host controller.
* Contact a CKD representative if you have any requests for the mixed gases.
Mixed gases
(Argon + Carbon dioxide)
Carbon
dioxide
With the device's operation button
Argon
NitrogenAir
Change
gas
types
Bi-directional uid measurement
Contributes to reducing tact time
Flow direction can be measured voluntarily.
Forward direction Bi-direction Reverse direction
Clean-room specications
Anti-dust generation (P70) and oil-prohibited
specications (P80) available in the standard
lineup
Use according to the device grade is possible.
High precision/high-speed response
Repeatability: within ±1% F.S.
Display accuracy: within ±3% F.S.
Response time: 50 msec
Reduction of pressure loss
Up to 50% reduction with ow path redesign
MEMS
MEMS is short for Micro Electro Mechanical Systems, a compact device that applies
the ne processing technology used in manufacturing semiconductor integrated
circuits.

Diversified
User-friendly
IO-Link features
Digital signal Constant monitoring with digital data is
possible.
Parameter
remote control Parameters can be set and changed via the
network, enabling remote operation of the
device.
Case identification
Model Nos. and serial Nos. can be checked
via the network.
Plug & Play Settings can be copied from the master side,
making troublesome parameter resetting
during maintenance unnecessary.
Malfunction
notification Device damage and disconnection can be
checked.
Connect to Fieldbus
The network can also be changed to Ethernet
connection, making the device a part of IoT.
Introducing IO-Link model
IO-Link complies with digital communication standards for factory sensors and actuators. (IEC61131-9)
Transmits parameters and event data that cannot be transmitted by analog communication.
Wide variation of ttings
Push-in and screw-in lineup available
Push-in
Elbow
Push-in
Straight
Screw-in
Elbow
Screw-in
Straight
Rotatable LCD display
Display can be vertically inverted
Easy mounting (option)
DIN rail mount Panel mount Mounting bracket
Space saving
2-port valve connection
possible
Case identification
Parameter change
Constant monitoring
Alarm
Cloud
Plant
PLC
Ethernet
PLC
Production site
I/O

COMPACT FLOW SENSOR RAPIFLOW®FSM3 SERIES
3
Leakage inspection
Maintenance of air consumption
Painting air ow rate control
Solution examples
Fill a water container with gas and
inspect whether it leaks.
Monitor the air consumption of facilities
using air devices.
Change the air pressure and controls
ow rate used during coating with the
electro-pneumatic regulator.
Filter unit
Digital pressure sensor
Compact ow rate
sensor
FSM3
2-port solenoid valve
Filter unit
Compact ow rate sensor
FSM3
Digital pressure sensor
Filter unit
Filter unit
Filter unit
2-port solenoid valve
Digital pressure sensor
Digital pressure sensor
Electro pneumatic regulator
Compact ow rate sensor
Compact ow rate sensor
Compact ow rate sensor
Filter unit
Electro-pneumatic
regulator
Compact ow rate
sensor
FSM3

COMPACT FLOW SENSOR RAPIFLOW®FSM3 SERIES
4
Conrm suction of electronic parts
Arc welding
Electronic part installation
Solution examples
Detect whether electronic parts have
been suctioned or not using ow rate.
Maintain the ow rate of argon, mixed
gas (argon + carbon dioxide), and other
shielding gases.
Control the tension of gold wire for
installing electronic parts.
Filter unit
Rotary clamp cylinder
Inline clean lter
Vacuum ejector unit Digital pressure sensor
Guided cylinder
Compact ow rate sensor Inline lter
Compact ow rate sensorCylinder switch with connector
Digital pressure sensor
Compact ow rate sensor
Compact ow rate
sensor
FSM3
Filter unit
Vacuum ejector unit
Digital pressure sensor
Inline lter
Compact ow rate sensor
FSM3
Compact ow rate
sensor
FSM3
Digital pressure sensor
Inline clean lter

Intro1
Series
variation
For compact ow rate sensor RAPIFLOW
FSM3 Series
Appearance Applicable
uids
Flow rate
adjusting bar
EXA
Connection
tting
Clean-room specications
Port size Max. ow rate (L/min)
Description
page
P70 P80 0.5 1 2 5 10 20 50 100 200 500 1000
LCD display
Air
Nitrogen
φ4
1
φ6
φ8
φ10
φ1/4"
φ3/8"
Rc1/8
Rc1/4
Rc1/2
NPT1/8
NPT1/4
NPT1/2
G1/8
G1/4
G1/2
Bar display φ4
7
φ6
φ8
φ10
φ1/4"
φ3/8"
Rc1/8
Rc1/4
Rc1/2
NPT1/8
NPT1/4
NPT1/2
G1/8
G1/4
G1/2
IO-Link φ4
13
φ6
φ8
φ10
φ1/4"
φ3/8"
Rc1/8
Rc1/4
Rc1/2
NPT1/8
NPT1/4
NPT1/2
G1/8
G1/4
G1/2

Intro2
Appearance Applicable
uids
Flow rate
adjusting bar
EXA
Connection
tting
Clean-room specications
Port size Max. ow rate (L/min)
Description
page
P70 P80 0.5 1 2 5 10 20 50 100 200 500 1000
LCD display
Air
Nitrogen
φ4
1
φ6
φ8
φ10
φ1/4"
φ3/8"
Rc1/8
Rc1/4
Rc1/2
NPT1/8
NPT1/4
NPT1/2
G1/8
G1/4
G1/2
Bar display φ4
7
φ6
φ8
φ10
φ1/4"
φ3/8"
Rc1/8
Rc1/4
Rc1/2
NPT1/8
NPT1/4
NPT1/2
G1/8
G1/4
G1/2
IO-Link φ4
13
φ6
φ8
φ10
φ1/4"
φ3/8"
Rc1/8
Rc1/4
Rc1/2
NPT1/8
NPT1/4
NPT1/2
G1/8
G1/4
G1/2
LCD display Bar display
IO
-
Link
Internal
structure
Separate
display
Technical
data
Operating
method
Optional
products
Safety
precautions
Related
products

1
Compact ow rate sensor RAPIFLOW
FSM3 Series
LCD display
Resin body (ow rate range: 500 mL/min to 1000 L/min)
LCD display specications
Descriptions
FSM3-[A][B][C][D][E][F][G][H][I]-[ ]
[B]
005 010 020 050 100 200 500 101 201 501 102
Flow
direction [C] UUni-direction
BBi-direction
Measured
ow rate
range
(/min) *1
[C]
U15 to
500 mL
30 to
1000 mL
0.06 to
2.00 L
0.15 to
5.00 L
0.30 to
10.00 L
0.6 to
20.0 L
1.5 to
50.0 L
3.0 to
100.0 L
6 to
200 L
15 to
500 L
30 to
1000 L
B
−500 to −15,
15 to 500 mL
−1000 to −30,
30 to 1000 mL
−2.00 to −0.06,
0.06 to 2.00 L
−5.00 to −0.15,
0.15 to 5.00 L
−10.00 to −0.30,
0.30 to 10.00 L
−20.0 to −0.6,
0.6 to 20.0 L
−50.0 to −1.5,
1.5 to 50.0 L
−100.0 to −3.0,
3.0 to 100.0 L
−200 to −6,
6 to 200 L
−500 to −15,
15 to 500 L
−1000 to −30,
30 to 1000 L
Display 4-digit + 4-digit 2-color LCD
Flow rate
display
range
(/min) *2
[C]
U−49 to
549 mL
−99 to
1099 mL
−0.19 to
2.19 L
−0.49 to
5.49 L
−0.99 to
10.99 L
−1.9 to
21.9 L
−4.9 to
54.9 L
−9.9 to
109.9 L
−19 to
219 L
−49 to
549 L
−99 to
1099 L
B−549 to
549 mL
−1099 to
1099 mL
−2.19 to
2.19 L
−5.49 to
5.49 L
−10.99 to
10.99 L
−21.9 to
21.9 L
−54.9 to
54.9 L
−109.9 to
109.9 L
−219 to
219 L
−549 to
549 L
−1099 to
1099 L
Integration
display *3
Display range 0 to ±9999999 mL 0.00 to ±99999.99 L 0.0 to ±999999.9 L 0 to ±9999999 L
Pulse
output rate 5 mL 10 mL 0.02 L 0.05 L 0.1 L 0.2 L 0.5 L 1 L 2 L 5 L 10 L
Working
conditions
Applicable
uids *4 Clean air (JIS B 8392-1:2012 1.1.1 to 5.6.2), compressed air (JIS B 8392-1:2012 1.1.1 to 1.6.2), nitrogen gas
Temperature range 0 to 50°C (no condensation)
Pressure range −0.07 to 0.75 MPa 0 to 0.75 MPa
Proof pressure 1 MPa
Operating ambient temperature/humidity 0 to 50°C, 90% RH or less
Storage temperature −10 to 60°C
Accuracy *5
(Fluid: in dry air)
Accuracy *6 Within ±3% F.S. (Secondary side released to atmosphere) (Scope of warranty depends on the "Measured ow rate range")
Repeatability
*7 Within ±1% F.S. (Secondary side released to atmosphere)
Temperature
characteristics
Within ±0.2% F.S./°C (15 to 35°C, base temperature 25°C)
Pressure
characteristics
Within ±5% F.S. (−0.07 to 0.75 MPa, where secondary side is released to
atmosphere)
Within ±5% F.S.
(0 to 0.75 MPa, base pressure 0.35 MPa)
Response time *8 50 msec or below (Response time set to OFF)
Switch
output
[G]
A, B, E, F NPN open collector output (50 mA or less, voltage drop 2.4 V or less)
C, D, G, H PNP open collector output (50 mA or less, voltage drop 2.4 V or less)
Analog
output *9
A, B, C, D 1 to 5 V voltage output (connecting load impedance 50 kΩ and over)
E, F, G, H 4 to 20 mA current output (connecting load impedance 0 to 300 Ω)
Power supply
voltage *10
A, B, C, D 12 to 24 VDC (10.8 to 26.4 V) ripple rate 1% or less
E, F, G, H 24 VDC (21.6 to 26.4 V) ripple rate 1% or less
Current consumption *11 45 mA or less
Lead wire φ3.7, AWG26 or equivalent × 5-conductor (connector), insulator outer diameter φ1.0
Functions *12 1 Gas change, 2 setting detail copy, 3 ow rate adjustment, 4 peak hold, etc.
Degree of protection IP40-equivalent (IEC standards)
Protection circuit *13
Power reverse connection protection, switch output reverse connection protection, switch output load short-circuit protection
Vibration resistance 10 to 150 Hz, max. 100 m/s2, X, Y, Z direction, every 2 hours
EMC Directive EN55011, EN61000-6-2, EN61000-4-2/3/4/6/8
Mounting
Mounting orientation *14 Unrestricted in vertical/horizontal direction
Straight piping
installation section *15
Not required
LCD displayBar display
IO
-
Link
Internal
structure
Separate
display
Technical
data
Operating
method
Optional
products
Safety
precautions
Related
products

2
Specifications
FSM3 Series
*1:Thevalueconvertedtovolumetricowrateatstandardcondition(20°C1barometricpressure(101kPa)relativehumidity65%RH)
(Forgasesotherthanair,20°C,1atmosphericpressure(101kPa),relativehumidity0%RH.)
*2:Thedisplaysofvariousowratesareasshownbelow.
*3:Theintegratingowisacalculated(reference)value.Whenusingtheintegrationmaintainingfunction,becarefulthatthenumberoftimes
maintaineddoesnotexceedthenumberofaccesstimesofthestorageelement(thelimitis1milliontimes).(Changestothesettingsare
countedinnumberofaccesses.)
Wheninstantaneousowrateisbelow1%itisnotcountedasintegratingow.
*4:Usedrygaswhichdoesnotcontaincorrosiveelementssuchaschlorine,sulfuroracids,andwhichiscleananddoesnotcontaindustor
oilmist.Whenusingcompressedair,usecleanairthatcomplieswithJISB8392-1:2012Class1.1.1to1.6.2.Compressedairfromthe
compressorcontainsdrain(water,oiloxide,foreignsubstances,etc.).Tomaintainthefunctionofthisproduct,installalter,airdryer(min.
pressuredewpoint10°Corless),andoilmistlter(max.oilcontent0.1mg/m3)ontheprimaryside(upstreamside)ofthisproduct.(Refer
totherecommendedvaluesonpage42.)
*5:Compressedairisusedforadjustingandinspectingthisproduct.Accuracyforgastypesotherthanairisaguideline.
*6:TheaccuracyisbasedonCKD'sbasicowratemeter.Itdoesnotshowabsoluteaccuracy.
*7:Repeatabilityoverashortperiodoftime.Changeovertimeisnotincluded.(Refertotheproductspecicationssheetfordetails.)
*8:Actualresponsetimemaydifferdependingonpipingconditions.Settingresponsetimecanbeselectedfrombetween50msecto1.5sec.
*9:Theoutputimpedanceoftheanalogoutputsectionisapprox.1kΩ.Iftheimpedanceoftheconnectingloadissmall,outputanderror
increase.Checkerrorwiththeimpedanceoftheconnectingloadbeforeusing.
*10: Thepowersupplyvoltagespecicationsdifferforthevoltageoutputandcurrentoutput.
*11: Currentforwhen24VDCisconnectedandnoloadisapplied.Thecurrentconsumptionwillvarydependingonhowtheloadisconnected.
*12:Gascanbechangedtoargon,carbondioxide,andargon80%+carbondioxide20%withthegaschangefunction.Fullscaleowrate
andanalogoutputafterchanginggasisasfollows.(Notethatthe500L/minand1,000L/minmodelsdonothaveagaschangefunction.)
Gas Flow direction Full scale ow rate Analog output
Voltage Current
Air
Nitrogen
Argon
Argon80%+
Carbondioxide20%
Uni-direction 0to100%
1to5V 4to20mA
Bi-direction −100to100%
Carbondioxide Uni-direction 0to50% 1to3V 4to12mA
Bi-direction −50to50% 2to4V 8to16mA
The"Copyfunction”settingisselectedat" GOutputspecications".
Notethatthe"Externalinput"functionisnotavailableonmodelsonwhichthe"Copyfunction"isenabled.
*13:Thisproduct'sprotectioncircuitiseffectiveonlyforspecicmisconnectionsandloadshort-circuits.Itdoesnotprovideprotectionforall
misconnections.
*14:Thisproductmeasuresthechangeinheatdistributioncausedbyow.
 Whensettohorizontaldirection,theconvectionowcaninuenceachangeinheatdistribution,causingthezeropointtoshift.
*15:Pipingconditionsmayaffectaccuracy.Formoreaccuratemeasurements,useastraightpipewithaninternaldiametertentimesgreater.
Withthe500L/minand1,000L/minmodels,usepipingwithaninternaldiameterof9mmormore.Ifitislessthan9mm,accuracymay
benegativelyaffected.
*16:Refertopage32forweight.
Times maintained = < 1 million
Usagetime
5min
Uni-direction
[Lo]display [Hi]display[0]display
01 3 100%
− 10 − 1110%
Measuredowraterange
[Lo]display [Hi]display[0]display
01 3 100%
− 100% − 110% − 3 − 1110%
MeasuredowraterangeMeasuredowraterange
Bi-directional
LCD display Bar display
IO
-
Link
Internal
structure
Separate
display
Technical
data
Operating
method
Optional
products
Safety
precautions
Related
products

3
FSM3 Series
How to order
C Flow direction
D Body material/compatible uids
A Display
Model No.
E Port size
H Unit specications
L Attachments
F Piping direction
G Output specications
J Cable
M Clean-room
specications
FSM3 BH P80
UL 1 1 A N1 B M R Code Content
ADisplay
LLiquid crystal display
BFlow rate range (full scale ow rate)
005 500 mL/min 500 50 L/min
010 1 L/min 101 100 L/min
020 2 L/min 201 200 L/min
050 5 L/min 501 500 L/min
100 10 L/min 102 1000 L/min
200 20 L/min
CFlow direction
UUni-direction
BBi-direction
DBody material/compatible uids
Body material Compatible uids
1Resin
Air (Gas can be changed)
EPort size
BH Push-in (for φ4 mm tube) AB G1/8 *2
CH Push-in (for φ6 mm tube) BB G1/4 *2
DH Push-in (for φ8 mm tube) CB G1/2 *2
EH Push-in (for φ10 mm tube) AC NPT1/8
HH Push-in (for φ1/4" tube) BC NPT1/4
JH Push-in (for φ3/8" tube) CC NPT1/2
AA Rc1/8
BA Rc1/4
CA Rc1/2
FPiping direction
1Straight
2Elbow *3
GOutput specications
Analog output Switch output Copy function
A1-point
(Voltage
output)
1-5 V
1-point (NPN) With
B2-point (NPN) -
C1-point (PNP) With
D2-point (PNP) -
E1-point
(Current
output)
4-20 mA
1-point (NPN) With
F2-point (NPN) -
G1-point (PNP) With
H2-point (PNP) -
HUnit specications
1SI units only
2
With unit change function (only for overseas) *4
IValve option
NNone
T
With needle valve (only for models 200 L or less)
E
EXA connecting tting (EXA sold separately) *5, *6
JCable
Blank None
A5 conductor 1 m
B5 conductor 3 m
KMounting attachments *7, *8
Blank None
HBracket 1 (for models 200 L or less)
JBracket 2 (for models 500 or 1000 L)
K
Panel mounting (for sensor products of models 200 L or less)
L
Panel mounting (for needle valves of models 200 L or less)
MDIN rail mounting (for models 200 L or less)
LAttachments
Blank None
RCompany certication
SCompany certication + traceability certicate
MClean-room specications
Blank None
P70 Anti-dust generation *9
P80 Oil prohibited *10
Precautions for model No. selection
*1: During selection, always check the compatibility table on the
next page.
*2: Note that if you mount the elbow fitting in a downward position,
it will interfere with the DIN rail mounting.
*3: Check using the connection shape and dimensions (page 5) of
the G screw when selecting.
*4: The model with unit change cannot be sold in Japan.
*5: Connection to solenoid valves (EXA Series) is possible with the
dedicated fitting. Refer to page 41.
*6: Be sure to set EXA to the OUT side of the product. Use a lead
wire for the EXA coil option. The DIN terminal box cannot be
mounted because it will cause interference. After making sure it
is connected firmly, confirm that there is no external leakage.
*7: Note that the bracket mounting position may interfere with the
elbow fitting.
*8: Optional parts will come with the product. They are not pre-
assembled.
*9: Product surface is degreased before packaging and heat sealed
into an antistatic bag on the clean bench (Class 1000 and over).
*10: The wetted section is degreased in addition to the
specifications on P70.
I Valve
option
K Mounting
attachments
[Example of model No.]
FSM3-L005U1BH1A1N-BMR-P80
Model: RAPIFLOW FSM3 Series
ADisplay L :
Liquid crystal display
BFlow rate range
005 :500 mL/min
CFlow direction U:Uni-direction
D
Body material/compatible fluids 1:Resin/air
EPort size BH :Push-in
(φ4 mm for tube)
FPiping direction 1:Straight
GOutput
specifications
A : Analog voltage output ×1,
NPN Switch output ×1,
with copy function
HUnit specifications 1:SI units only
IValve option N:None
JCable B:5 conductor 3m
K
Mounting attachments M:DIN rail mount
LAttachments R : Company certification
M
Clean-room specifications P80 :Oil prohibited
B Flow rate range
(full scale ow rate)
005
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How to order
FSM3 Series
Compatibility table of ow rate range and port size, needle valve option, and EXA connection
tting
EPort size FPiping direction
BH1 CH1 DH1 EH1 HH1 JH1 BH2 CH2 DH2 EH2 HH2 JH2 AA1 BA1
BFlow rate
005
010
020
050
100
200
500
101
201
501
102
CA1 AA2 BA2 AB1 BB1 CB1 AB2 BB2 AC1 BC1 CC1 AC2 BC2
005
010
020
050
100
200
500
101
201
501
102
: Port compatibility : Needle valve option compatibility : EXA connection tting compatibility
Compatibility table of port size and clean-room specications
EPort size FPiping direction
BH1 CH1 DH1 EH1 HH1 JH1 BH2 CH2 DH2 EH2 HH2 JH2 AA1 BA1
M
Clean-room specications
Blank
P70
P80
CA1 AA2 BA2 AB1 BB1 CB1 AB2 BB2 AC1 BC1 CC1 AC2 BC2
Blank
P70
P80
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FSM3 Series
Dimensions (LCD display)
Port size: straight φ4 mm, φ6 mm, φ1/4", Rc1/8, G1/8, NPT1/8
FSM3-L B C 1/BH1/CH1/HH1/AA1/AB1/AC1 (Full scale ow rate: 500 mL/min,1, 2, 5, 10, 20, 50 L/min)
Port size: straight φ8 mm, φ10 mm, φ3/8", Rc1/4, G1/4, NPT1/4
FSM3-L B C 1/DH1/EH1/JH1/BA1/BB1/BC1 (Full scale ow rate: 50, 100, 200 L/min)
* The dedicated adaptor for the EXA connection type is the secondary side (to the right in the gure below).
Port size: straight Rc1/2, G1/2, NPT1/2
FSM3-L B C 1/CA1/CB1/CC1 (Full scale ow rate: 500, 1000 L/min)
Model No. Fitting Dimension (A)
FSM3-L 1BH1 Push-in φ4 mm (65)
FSM3-L 1CH1 Push-in φ6 mm (67.2)
FSM3-L 1HH1 Push-in 1/4" (70.4)
FSM3-L 1AA1 Rc1/8 (75)
FSM3-L 1AB1 G1/8 (87)
FSM3-L 1AC1 NPT1/8 (75)
Model No. Fitting Dimension (A)
FSM3-L 1DH1 Push-in φ8 mm (70.6)
FSM3-L 1EH1 Push-in φ10 mm (82.1)
FSM3-L 1JH1 Push-in 3/8" (83.4)
FSM3-L 1BA1 Rc1/4 (75)
FSM3-L 1BB1 G1/4 (89)
FSM3-L 1BC1 NPT1/4 (75)
Model No. Fitting Dimension (A)
FSM3-L 1CA1 Rc1/2 (80)
FSM3-L 1CB1 G1/2 (95.4)
FSM3-L 1CC1 NPTG1/2 (80)
17
17
17
30
15 55
15 55
55
Rc1/8, NPT1/8, G1/8
Rc1/4, NPT1/4, G1/4
27
27
(A)
15.5
15.5
30
2-M3 depth 3
(A)
(A)
2-φ3.4 penetration
2-φ3.4 penetration
2-M3 depth 5
2-M3 depth 5
(24.2)
(30.2)
(37.2)
8.5
13
15
1.5
1.5
1.5
9.5
9.5
13
37
43
50
3.6
3.6
30
G screw shape
G screw shape
15° of the surface is the seal surface.
Note that it is not the end surface seal. Also, be sure
to conrm that the screw depth of the tting matches
before use.
15° of the surface is the seal surface.
Note that it is not the end surface seal. Also, be sure to
conrm that the screw depth of the tting matches before
use.
14
(10)
End surface
45˚
G1/8
φ8.7
2+0.4
0
φ11.6 +0.1
0
15˚
17
(14)
45˚
G1/4
φ11.7
2.5 +0.4
0
φ15.6 +0.1
0
15˚
End surface
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Dimensions
FSM3 Series
Dimensions (LCD display)
Port size: elbow φ4 mm, φ6 mm, φ1/4", Rc1/8, G1/8, NPT1/8
FSM3-L B C 1/BH2/CH2/HH2/AA2/AB2/AC2 (Full scale ow rate: 500 mL/min, 1, 2, 5, 10, 20, 50 L/min)
With needle valve dimensions
Port size: φ4 mm, φ6 mm, φ1/4", Rc1/8, G1/8, NPT1/8
FSM3-L B C 1/BH1/CH1/HH1/AA1/AB1/AC1/ G H T (Full scale ow rate: 500 mL/min, 1, 2, 5, 10, 20, 50 L/min)
Port size: elbow φ8 mm, φ10 mm, φ3/8", Rc1/4, G1/4, NPT1/4
FSM3-L B C 1/DH2/EH2/JH2/BA2/BB2/BC2(Full scale ow rate: 50, 100, 200 L/min)
Port size: φ8 mm, φ10 mm, φ3/8", Rc1/4, G1/4, NPT1/4
FSM3-L B C 1/DH1/EH1/JH1/BA1/BB1/BC1/ G H T (Full scale ow rate: 50, 100, 200 L/min)
Model No. Fitting Dimension (A)
FSM3-L 1BH2 Push-in φ4 mm (9.5)
FSM3-L 1CH2 Push-in φ6 mm (10.6)
FSM3-L 1HH2 Push-in 1/4" (12.2)
FSM3-L 1AA2 Rc1/8 (14.5)
FSM3-L 1AB2 G1/8 (20.5)
FSM3-L 1AC2 NPT1/8 (14.5)
Model No. Fitting Dimension (A)
FSM3-L 1BH1 Push-in φ4 mm (90)
FSM3-L 1CH1 Push-in φ6 mm (92.2)
FSM3-L 1HH1 Push-in 1/4" (95.4)
FSM3-L 1AA1 Rc1/8 (100)
FSM3-L 1AB1 G1/8 (112)
FSM3-L 1AC1 NPT1/8 (100)
Model No. Fitting Dimension (A)
FSM3-L 1DH2 Push-in φ8 mm (13.6)
FSM3-L 1EH2 Push-in φ10 mm (19.3)
FSM3-L 1JH2 Push-in 3/8" (20.0)
FSM3-L 1BA2 Rc1/4 (15.8)
FSM3-L 1BB2 G1/4 (22.8)
FSM3-L 1BC2 NPT1/4 (15.8)
Model No. Fitting Dimension (A)
FSM3-L 1DH1 Push-in φ8 mm (101.6)
FSM3-L 1EH1 Push-in φ10 mm (113.1)
FSM3-L 1JH1 Push-in 3/8" (114.4)
FSM3-L 1BA1 Rc1/4 (106)
FSM3-L 1BB1 G1/4 (120)
FSM3-L 1BC1 NPT1/4 (106)
17
17
17
17
15
15
55
55
55
55
27
27
27
27
87.3
95.3
(A)
(A)
(24.2)
(A)
(30.2)(A)
(24.2)
30.2
8.5
13
1.5
1.5
1.5
37
(10.5 to 19)
43
(10.5 to 19)
1.5
37
43
2-φ3.4 penetration
2-φ3.4 penetration
2-φ3.4 penetration
2-φ3.4 penetration
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Compact ow rate sensor RAPIFLOW
FSM3 Series
Bar display
Resin body (ow rate range: 500 mL/min to 1000 L/min)
Bar display specications
Descriptions
FSM3-[A][B][C][D][E][F][G][H][I]-[ ]
[B]
005 010 020 050 100 200 500 101 201 501 102
Flow
direction [C] UUni-direction
BBi-direction
Measured
ow rate
range
(/min) *1
[B]
U
15 to
500 mL
30 to
1000 mL
0.06 to
2.00 L
0.15 to
5.00 L
0.30 to
10.00 L
0.6 to
20.0 L
1.5 to
50.0 L
3.0 to
100.0 L
6 to
200 L
15 to
500 L
30 to
1000 L
B
−500 to −15,
15 to 500 mL
−1000 to −30,
30 to 1000 mL
−2.00 to −0.06,
0.06 to 2.00 L
−5.00 to −0.15,
0.15 to 5.00 L
−10.00 to −0.30,
0.30 to 10.00 L
−20.0 to −0.6,
0.6 to 20.0 L
−50.0 to −1.5,
1.5 to 50.0 L
−100.0 to −3.0,
3.0 to 100.0 L
−200 to −6,
6 to 200 L
−500 to −15,
15 to 500 L
−1000 to −30,
30 to 1000 L
Display LED bar display
Working uid
Applicable
uids *2
Clean air (JIS B 8392-1:2012 1.1.1 to 5.6.2), compressed air (JIS B 8392-1:2012 1.1.1 to 1.6.2), nitrogen gas
Temperature range 0 to 50°C (no condensation)
Pressure range −0.07 to 0.75 MPa 0 to 0.75 MPa
Proof pressure 1 MPa
Operating ambient temperature/humidity 0 to 50°C, 90% RH or less
Storage temperature −10 to 60°C
Accuracy
Accuracy *3 Within ±3% F.S. (Secondary side released to atmosphere) (Scope of warranty depends on the "Measured ow rate range")
Repeatability
*4 Within ±1% F.S. (Secondary side released to atmosphere)
Temperature
characteristics
Within ±0.2% F.S./°C (15 to 35°C, base temperature 25°C)
Pressure
characteristics
Within ±5% F.S. (−0.07 to 0.75 MPa, secondary side is released to atmosphere)
Within ±5% F.S.
(0 to 0.75 MPa, base pressure 0.35 MPa)
Response time *5 50 msec or less
Analog
output *6
[G]
J 1 to 5 V voltage output (connecting load impedance = 50 kΩ and over)
K4 to 20 mA current output (connecting load impedance 0 to 300 Ω)
Power supply
voltage *7
J 12 to 24 VDC (10.8 to 26.4 V) ripple rate 1% or less
K24 VDC (21.6 to 26.4 V) ripple rate 1% or less
Current consumption *8 45 mA or less
Lead wire φ3.7, AWG26 or equivalent × 4-conductor (connector), insulator outer diameter φ1.0
Degree of protection IP40-equivalent (IEC standards)
Protection circuit *9 Power supply reverse connection protection
Vibration resistance 10 to 150 Hz, max. 100 m/s2, X, Y, Z direction, every 2 hours
EMC Directive EN55011, EN61000-6-2, EN61000-4-2/3/4/6/8
Mounting
Mounting orientation *10 Unrestricted in vertical/horizontal direction
Straight piping
installation section *11
Not required
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Specifications
FSM3 Series
*1: The value converted to volumetric ow rate at standard condition (20°C 1 barometric pressure (101 kPa) relative humidity 65%)
*2: Use dry gas which does not contain corrosive elements such as chlorine, sulfur or acids, and which is clean and does not contain dust or
oil mist. When using compressed air, use clean air that complies with JIS B 8392-1:2012 Class 1.1.1 to 1.6.2. Compressed air from the
compressor contains drain (water, oil oxide, foreign substances, etc.) To maintain the function of this product, install a lter, air dryer (min.
pressure dew point 10°C or less), and oil mist lter (max. oil content 0.1 mg/m3) on the primary side (upstream side) of this product. (Refer
to the recommended values on page 42.)
*3: The accuracy is based on CKD's basic ow rate meter. It does not show absolute accuracy.
*4: Repeatability over a short period of time. Change over time is not included. (Refer to the product specications sheet for details.)
*5: Actual response time may differ depending on piping conditions.
*6: The output impedance of the analog output section is approx. 1 kΩ. If the impedance of the connecting load is small, output and error
increase. Check error with the impedance of the connecting load before using.
*7: The power supply voltage specications differ for the voltage output and current output.
*8: Current for when 24 VDC is connected and no load is applied. The current consumption will vary depending on how the load is connected.
*9: This product's protection circuit is effective only for specic misconnections and load short-circuits. It does not provide protection for all
misconnections.
*10: This product measures the change in heat distribution caused by ow.
When set to horizontal direction, the convection ow can inuence a change in heat distribution, causing the zero point to shift.
*11: Piping conditions may affect accuracy. For more accurate measurements, use a straight pipe with an internal diameter ten times greater.
With the 500 L/min and 1,000 L/min models, use piping with an internal diameter of 9 mm or more. If it is less than 9 mm, accuracy may
be negatively affected.
*12: Refer to page 32 for weight.
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[Example of model No.]
FSM3-B005U1BH1J1N-DHS-P70
Model: RAPIFLOW FSM3 Series
ADisplay B:Bar display
BFlow rate range
005 :500 mL/min
CFlow direction U:Uni-direction
D
Body material/compatible fluids 1 : Resin/air
EPort size BH :Push-in
(φ4 mm for tube)
FPiping direction 1 : Straight
G
Output specifications J : Analog voltage output × 1
HUnit specifications 1 : SI units only
IValve option N : None
JCable D:4 conductor 3 m
K
Mounting attachments H : Bracket
LAttachments S :
Company certification + traceability certificate
M
Clean-room specifications P70 :Anti-dust generation
C Flow direction
D Body material/compatible uids
A Display
B Flow rate range
(full scale ow rate)
Model No.
E Port size
H Unit specications
L Attachments
F Piping direction
G Output specications
J Cable
M Clean-room
specications
I Valve
option
K Mounting
attachments
FSM3 Series
How to order
Precautions for model No. selection
*1: During selection, always check the compatibility table on the
next page.
*2: When using in combination with the separate display (FSM2-D),
select ["J": Analog voltage output × 1].
*3: Check using the connection shape and dimensions (page 11) of
the G screw when selecting.
*4: Note that if you mount the elbow fitting in a downward position,
it will interfere with the DIN rail mounting.
*5: Connection to solenoid valves (EXA series) is possible with the
dedicated fitting. Refer to page 41.
*6: Be sure to set EXA to the OUT side of the product.
Use a lead wire for the EXA coil option. The DIN terminal box
cannot be mounted because it will cause interference. After
making sure it is connected firmly, confirm that there is no
external leakage.
*7: "Panel mount" option cannot be selected.
Note that the bracket mounting position may interfere with the
elbow fitting.
*8: Optional parts will come with the product. They are not pre-
assembled.
*9: Product surface is degreased before packaging and heat sealed
into an antistatic bag on the clean bench (Class 1000 and over).
*10: The wetted section is degreased in addition to the
specifications on P70.
Code Content
ADisplay
BBar display
BFlow rate range (full scale ow rate)
005 500 mL/min 500 50 L/min
010 1 L/min 101 100 L/min
020 2 L/min 201 200 L/min
050 5 L/min 501 500 L/min
100 10 L/min 102 1000 L/min
200 20 L/min
CFlow direction
UUni-direction
BBi-direction
DBody material/compatible uids
Body material Compatible uids
1Resin Air
EPort size
BH Push-in (for φ4 mm tube) AB G1/8 *3
CH Push-in (for φ6 mm tube) BB G1/4 *3
DH Push-in (for φ8 mm tube) CB G1/2 *3
EH Push-in (for φ10 mm tube) AC NPT1/8
HH Push-in (for φ1/4" tube) BC NPT1/4
JH Push-in (for φ3/8" tube) CC NPT1/2
AA Rc1/8
BA Rc1/4
CA Rc1/2
FPiping direction
1Straight
2Elbow *4
GOutput specications
JAnalog voltage output × 1-point
KAnalog current output × 1-point
HUnit specications
1SI units only
IValve option
NNone
E
EXA connecting tting (EXA sold separately) *5, *6
JCable
Blank None
C4 conductor 1 m
D4 conductor 3 m
KMounting attachments *7, *8
Blank None
HBracket 1 (for models 200 L or less)
JBracket 2 (for models 500 or 1000 L)
MDIN rail mounting (for models 200 L or less)
LAttachments
Blank None
RCompany certication
SCompany certication + traceability certicate
MClean-room specications
Blank None
P70 Anti-dust generation *9
P80 Oil prohibited *10
FSM3 005 BH P70
UB 1 1 J N1 D H S
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How to order
FSM3 Series
Compatibility table of ow rate range and port size, and EXA connection tting
EPort size FPiping direction
BH1 CH1 DH1 EH1 HH1 JH1 BH2 CH2 DH2 EH2 HH2 JH2 AA1 BA1
BFlow rate
005
010
020
050
100
200
500
101
201
501
102
CA1 AA2 BA2 AB1 BB1 CB1 AB2 BB2 AC1 BC1 CC1 AC2 BC2
005
010
020
050
100
200
500
101
201
501
102
: Port compatibility : EXA connection tting compatibility
Compatibility table of port size and clean-room specications
EPort size FPiping direction
BH1 CH1 DH1 EH1 HH1 JH1 BH2 CH2 DH2 EH2 HH2 JH2 AA1 BA1
M
Clean-room specications
Blank
P70
P80
CA1 AA2 BA2 AB1 BB1 CB1 AB2 BB2 AC1 BC1 CC1 AC2 BC2
Blank
P70
P80
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FSM3 Series
Dimensions (bar display)
Port size: straight φ4 mm, φ6 mm, φ1/4", Rc1/8, G1/8, NPT1/8
FSM3-B B C 1/BH1/CH1/HH1/AA1/AB1/AC1 (Full scale ow rate: 500 mL/min, 1, 2, 5, 10, 20, 50 L/min)
Port size: straight φ8 mm, φ10 mm, φ3/8", Rc1/4, G1/4, NPT1/4
FSM3-B B C 1/DH1/EH1/JH1/BA1/BB1/BC1 (Full scale ow rate: 50, 100, 200 L/min)
* The dedicated adaptor for the EXA connection type is the secondary side (to the right in the gure below).
Port size: straight Rc1/2, G1/2, NPT1/2
FSM3-B B C 1/CA1/CB1/CC1(Full scale ow rate: 500, 1000 L/min)
Model No. Fitting Dimension (A)
FSM3-B 1BH1 Push-in φ4 mm (65)
FSM3-B 1CH1 Push-in φ6 mm (67.2)
FSM3-B 1HH1 Push-in 1/4" (70.4)
FSM3-B 1AA1 Rc1/8 (75)
FSM3-B 1AB1 G1/8 (87)
FSM3-B 1AC1 NPT1/8 (75)
Model No. Fitting Dimension (A)
FSM3-B 1DH1 Push-in φ8 mm (70.6)
FSM3-B 1EH1 Push-in φ10 mm (82.1)
FSM3-B 1JH1 Push-in 3/8" (83.4)
FSM3-B 1BA1 Rc1/4 (75)
FSM3-B 1BB1 G1/4 (89)
FSM3-B 1BC1 NPT1/4 (75)
Model No. Fitting Dimension (A)
FSM3-B 1CA1 Rc1/2 (80)
FSM3-B 1CB1 G1/2 (95.4)
FSM3-B 1CC1 NPT1/2 (80)
17
17
17
30
15 55
Rc1/8, NPT1/8, G1/8
Rc1/4, NPT1/4, G1/4
27
27
15.5
15.5
30
(A)
(A)
2-φ3.4 penetration
2-φ3.4 penetration
2-M3 depth 5
2-M3 depth 5
(24.2)
(30.2)
(37.2)
8.5
13
15
9.5
9.5
13
29
35
42
3.6
3.6
30
15 55
(A)
2-M3 depth 3
G screw shape
G screw shape
15° of the surface is the seal surface.
Note that it is not the end surface seal. Also, be sure to
conrm that the screw depth of the tting matches before
use.
15° of the surface is the seal surface.
Note that it is not the end surface seal. Also, be sure to
conrm that the screw depth of the tting matches before
use.
14
(10)
45˚
G1/8
φ8.7
2+0.4
0
φ11.6 +0.1
0
15˚
17
(14)
45˚
G1/4
φ11.7
2.5 +0.4
0
φ15.6 +0.1
0
15˚
End surface
End surface
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Dimensions
FSM3 Series
Dimensions (bar display)
Port size: elbow φ4 mm, φ6 mm, φ1/4", Rc1/8, G1/8, NPT1/8
FSM3-B B C 1/BH2/CH2/HH2/AA2/AB2/AC2 (Full scale ow rate: 500 mL/min, 1, 2, 5, 10, 20, 50 L/min)
Port size: elbow φ8 mm, φ10 mm, φ3/8", Rc1/4, G1/4, NPT1/4
FSM3-B B C 1/DH2/EH2/JH2/BA2/BB2/BC2 (Full scale ow rate: 50, 100, 200 L/min)
Model No. Fitting Dimension (A)
FSM3-B 1BH2 Push-in φ4 mm (9.5)
FSM3-B 1CH2 Push-in φ6 mm (10.6)
FSM3-B 1HH2 Push-in 1/4" (12.2)
FSM3-B 1AA2 Rc1/8 (14.5)
FSM3-B 1AB2 G1/8 (20.5)
FSM3-B 1AC2 NPT1/8 (14.5)
Model No. Fitting Dimension (A)
FSM3-B 1DH2 Push-in φ8 mm (13.6)
FSM3-B 1EH2 Push-in φ10 mm (19.3)
FSM3-B 1JH2 Push-in 3/8" (20.0)
FSM3-B 1BA2 Rc1/4 (15.8)
FSM3-B 1BB2 G1/4 (22.8)
FSM3-B 1BC2 NPT1/4 (15.8)
17
17
15
15
55
55
27
27
87.3
95.3
(24.2)
(A)
(30.2)
3.6
13 29
35
(A)
2-φ3.4 penetration
2-φ3.4 penetration
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13
Compact ow rate sensor RAPIFLOW
FSM3 Series
IO-Link
Resin body (ow rate range: 500 mL/min to 1000 L/min)
IO-Link specications
Descriptions
FSM3-[A][B][C][D][E][F][G][H][I]-[ ]
[B]
005 010 020 050 100 200 500 101 201 501 102
Flow
direction [C] UUni-direction
BBi-direction
Measured
ow rate
range
(/min) *1
[C]
U
15 to
500 mL
30 to
1000 mL
0.06 to
2.00 L
0.15 to
5.00 L
0.30 to
10.00 L
0.6 to
20.0 L
1.5 to
50.0 L
3.0 to
100.0 L
6 to
200 L
15 to
500 L
30 to
1000 L
B
−500 to −15,
15 to 500 mL
−1000 to −30,
30 to 1000 mL
−2.00 to −0.06,
0.06 to 2.00 L
−5.00 to −0.15,
0.15 to 5.00 L
−10.00 to −0.30,
0.30 to 10.00 L
−20.0 to −0.6,
0.6 to 20.0 L
−50.0 to −1.5,
1.5 to 50.0 L
−100.0 to −3.0,
3.0 to 100.0 L
−200 to −6,
6 to 200 L
−500 to −15,
15 to 500 L
−1000 to −30,
30 to 1000 L
Display LED display (power lamp, status lamp)
Working uid
Applicable
uids *2
Clean air (JIS B 8392-1:2012 1.1.1 to 5.6.2), compressed air (JIS B 8392-1:2012 1.1.1 to 1.6.2), nitrogen gas
Temperature range 0 to 50°C (no condensation)
Pressure range −0.07 to 0.75 MPa 0 to 0.75 MPa
Proof pressure 1 MPa
Operating ambient temperature/humidity 0 to 50 °C, 90% RH or less
Storage temperature −10 to 60°C
Accuracy
*3
(Fluid: in dry air)
Accuracy *4
Within ±3% F.S. (Secondary side released to atmosphere) (Scope of warranty depends on the "Measured ow rate range")
Repeatability
*5 Within ±1%F.S. (Secondary side released to atmosphere)
Temperature
characteristics
Within ±0.2% F.S./°C (15 to 35°C, base temperature 25°C)
Pressure
characteristics
Within ±5% F.S. (−0.07 to 0.75 MPa, secondary side is released to atmosphere)
Within ±5% F.S.
(0 to 0.75 MPa, base pressure 0.35 MPa)
Response time *6 50 msec or less
Power supply voltage 18 to 30 VDC ripple rate 1% or less
Current consumption *7 45 mA or less
Lead wire *8 M12 both ends connector cable (3 m) AWG #23 or equivalent 4 conductor
Functions *9 1 Change gas type, 2 ow rate adjustment, 3 peak hold, etc.
Degree of protection IP40-equivalent (IEC standards)
Protection circuit *10 Power supply reverse connection protection
Vibration resistance *11 10 to 150 Hz, max. 100 m/s2, X, Y, Z direction, every 2 hours
EMC Directive EN55011, EN61000-6-2, EN61000-4-2/3/4/6/8
Mounting
Mounting orientation *12 Unrestricted in vertical/horizontal direction
Straight piping
installation section *13
Not required
* Refer to page 37 for communication specications.
LCD displayBar display
IO
-
Link
Internal
structure
Separate
display
Technical
data
Operating
method
Optional
products
Safety
precautions
Related
products