CKD RAPIFLOW FSM2-D Series User manual

- 1 -
D 2 - 1 8 0 1 6 6 - A
INSTRUCTION MANUAL
SMALL SIZE FLOW SENSOR
RAPIFLOW®
FSM２
２２
２-D series
(Separation indicator)
● Read this instruction manual carefully before usin this
product, particularly the section describin safety.
● Retain this instruction manual with the product for further
consultation whenever necessary.
3
r d
E D I T I O N

- 2 -
Warning / cautions to secure safety
●Safety cautions are ranked by the safety cautions as
[dan er] [warnin ] [caution] in this section.
●Workin fluid, Workin environment
●Installation
●Wirin
e-con SUMITOMO 3M Wire Mount plu 37104-3122-000FL
●Usa e & maintenance
●The input si nal of the separation indicator is only for (1 to 5V).
When the sensor of other output specifications is connected,
there is a possibility of dama in it.
●For wirin , stop control unit/machinery and equipment, and turn
off the power supply.
●This product and wirin must be installed as far away as possible
from noise source such as stron electric line, etc. Take other
countermeasures for a sur e on the power supply line.
●Do not short-circuit a load, or causin dama e or burn.
●Line color must be checked when wirin . Check the wirin color
with handlin precaution, since improper wire connection may
result in dama e, failure or malfunction of the sensor.
●The flow rate of this product is measured by mass flow not
depended with temperature and pressure. Unit is L/min where
mass flow is converted to volumetric flow at 20 °C and 1
atmospheric pressure (101kPa).
●Please confirm the specification of the sensor used.
●The product can not be used as a business mater. Not
conformed to the Measurement Law, do not use the product for
the commercial purpose. Use the product as an industrial
sensor.
●Do not use the product in an environment containin corrosive
as such as salphur dioxide, etc.
●Use the product within the ambient and fluid temperature ran es
0 to 50 °C. Even in the specified temperature ran e, do not use
the product where ambient and fluid temperatures will chan e
suddenly, and form dew condensations.
●The protective structure of this product is equivalent to IP40. Do
not install the product where moisture, salt, dust or swarf is
contained, or where pressurized, or depressurized, neither.
When a dan erous situation may occur, or when there is hi h
ur ency to a warnin leadin to fatal or serious injuries, if handlin
is mistaken.
When a dan erous situation may occur if handlin is mistaken,
leadin to fatal or serious injuries.
When a dan erous situation may occur if handlin is mistaken,
leadin to minor injuries or physical dama es.
Danger
!
●A flammable fluid must not be used.
●Do not use the product in flammable as environment. Since
explosion-protection is not taken, explosion or fire may be
caused.
●The display part uses the LCD. The display becomes difficult to
see for the view an le.
●This product can be installed with any attitude; vertical,
horizontal, ri ht or left.
●When you install the panel mountin please fix by the ti htenin
torque of 0.06N･m when you fix the panel bessel suppression.
●Power supply volta e and outputs must be used with the
specified volta e. Applyin the volta e more than specified
volta e may cause malfunction, dama e of sensor, electric
shock or fire.
Do not apply load more than the rated output. Dama e or fire of
the output may be caused.
●Output accuracy is affected by self exoer ics caused by
ener izin other than temperature characteristics. When usin ,
stand-by time (5 minutes and over after ener izin ) must be
provided.
●For self-dia nosis, this product does not conduct flow rate
detectin switch operation for proximate 2 seconds immediately
after ener ized. Make a control circuit and pro rams to i nore
si nals for approximate 2 seconds after ener ized.
●When the FSM2 separation display type is connected, and the
power supply is turned on, the model is automatically
reco nized. However, please set the model by the manual
operation when mis-reco nizin it by the noise etc. When other
sensors are connected, the automatic reco nition cannot be
done. In this case, please set it by the manual operation.
●When chan in set-points of the output, stop the equip-ment,
then chan e the set-points, or an accident may occur.
●Disassembly and modification must not be done or causin a
failure.
●When an error occurs durin operation, turn off power supply
immediately, and terminate the operation, and contact to the
sales office.
●The material of case is resin. Solvent/alcohol/cleaner, etc., must
not be used to remove contamination, etc., or causin a resin to
be corroded. Wipe weakened neutral deter ent with ti htly
squeezed waste cloth, etc.
●When out of flow rate ran e, analo output will be provided. [Hi]
or [Lo] will be displayed. However, accuracy is not uaranteed.
●The display part use the liquid crystal. Do not push the display
part., or causin dama e.
Warning
!
Caution
!
Danger
!
Warning
!
Caution
!
Caution
!
Danger
!
●After the connectors are inserted, lay the connector covers over
the connectors.
●Make sure that stress by forcible bend of pullin is not applies
directly to the sensor cable joint.
●Please connect it by E-CON connector appended to this
product.
●Please use connectin the e-CON connector after cuttin the
half strip part. Please insert the electric wire in the interior of the
connector when you connect the e-CON connector, and please
clamp surely with a tool such as pliers. The removal of the
cover of the electric wire is unnecessary. Please confirm the
color and the number when you connect it, and please do not
make a mistake. The faulty wirin destroys the sensor and the
separation indicator, and causes the breakdown and the
malfunction.
●This product can be connected with the FSM series and the
WFK3000 series of the frow sensor of our company. However,
in this case, the automatic model settin function cannot be
used. Please set the model with the manual. [Please refer to
pa e 8.]
Caution
!
Warning
!
Caution
!
Half strip
Cable
[1]
Brown
Black
White
Blue
Please insert the
electric wire in the
interior.
Brown
Black
White
Blue
It is not necessary to
make a mistake in
the color order.
1-Brown, 2-Black
3-White, 4-Blue
[2] It is a pliers weldin
with pressure.
Please match this
number and the
color
.
Caution
!
Cut

- 3 -
[1]Names and Functions of Each Parts
[2] Installation
<Panel mount>
＜How to panel mount＞
[3] Wiring
1] How to wiring for sensor
Note1: The input si nal of the separation indicator is only for (1 to 5V). When
the sensor of other output specifications is connected, there is a possibility
of dama in it.
Note2: Please connect it by E-CON connector appended to this product.
Note3:In the case of wirin other than ＦＳＭ2 display separate model
(ＦＳＭ2-Ａ□）, please set the model with the manual before the
measurement of flow, because the automatic model settin function
cannot be used.
<How to wiring for FSM2 Separated indicator type.>
Please select the volta e output type of the FSM2 separation display type (1
to 5V output).
Because the model is reco nized automatically, the model settin is
unnecessary.
<How to wiring for FMS/FSM-H/FSM-V series analog output type.>
In this case, the automatic model settin function cannot be used. Please set
the model with the manual. [Please refer to pa e 8.]
<How to wiring for WFK3000 series Sensor Type>
Please select the volta e output type of the WFK3000 sensor type (A2:1 to 5V
output). Please do not connect a black line.
In this case, the automatic model settin function cannot be used. Please set
the model with the manual. [Please refer to pa e 8.]
2] Example of internal circuit and load connection
2]-1NPN output Model No.: FSM2-D-N[ ]-[ ]
<CH2 function selected switch output>
<CH2 function selected external input>
2]-2 PNP output Model No.: FSM2-P[ ]-[ ]
<CH2 function selected switch output>
<CH2 function selected external input>
① ② ③
The panel bessel is inserted
from the front side of the panel.
The panel Bessel is inserted
from the back side of the panel,
and holding with the screw.
The separation indicator is
inserted from the back side of
the panel.
④ ⑤
The panel holder is inserted
from the back side of the panel.
The bessel suppression is
pushed until the sensor is firmly
fixed, and connector is
connected.
Note:
・Please fix by the tightening
torque of 0.06N･m when you
fix the panel bessel
suppression.
Main circuit
Load
Load
Load
Brown (Power supply +)
Gray (Analo output)
Black (CH1)
Switch output 1
White (CH2)
Switch output 2
Blue (Power supply -)
+
-
2
3
4
5
1
Main circuit
Load
Load
White (CH2)
External input
+
-
2
3
4
5
1
Brown (Power supply +)
Black (CH1)
Switch outp
ut 1
Gray (Analo output)
Blue (Power supply -)
Pin No. Line color Content
[1] Brown Power supply (DC 12 to 24V, DC 24V)
[2] Black CH1(Switch output 1: max50mA)
[3] White CH2(Switch output 2: max50mA or External input）
[4] Gray
Analo volta e output : DC 1 to 5V
Connected load impedance 50kΩ and over)
Analo current output : DC 4 to 20mA
Connected load impedance 300Ω or less)
[5] Blue 0V (GND)
[1]
[2] [3] [4] [5]
(FSM2 side)
Main circuit
Load
Load
Load
Brown (Power supply +)
Gray (Analo output)
+
-
Black (CH1)
Switch output 1
White (CH2)
Switch output 2
2
3
4
5
1
Blue (Power supply -)
Mode key
●Press to enter each settin mode
●Press to advance settin mode
●Press to return to flow rate display
●Press to cancel peak hold operation
Up key
●When flow rate is displayed =
Displays the CH1 data
●Durin peak hold operation =
Displays the maximum value
●When selectin a mode =
Sets the mode
●When settin each data =
Increases the value, etc.
Down key
●When flow rate is displayed =
Displays the CH2 data
●Durin peak hold operation =
Displays the maximum value
●When settin each data =
Increases the value, etc.
Main display (Green/Red)
●Displays flow rate, various switch settin s.
●Indication color is selectable.
Sub-display (Green/Red)
●Displays flow direction, machine status.
●
Indication color
is selectable.
Unit display (Green)
●Displays flow rate unit
Switch output indicator (CH1)
●Li hts when switch output (CH1) turns on.
●Blinks when over current protection is operatin
Switch output indicator (CH2)
●Li hts when switch output (CH2) turns on.
●Blinks when over current protection is operatin
Panel bessel
Panel bessel suppression
Screw
Panel holder
Separation indicator
Panel holder
Panel bessel suppression
Screw
Separation indicator
Panel
Panel bessel
(Blue) Power supply -
FSM2-D-□
1
2
3
4
Sensor
FSM2-AV[]
(Separated indicator type)
(Brown) Power supply +
(Black) Analo output
（White）
e-con SUMITOMO 3M Wire Mount plu 37104-3122-000FL
e-con SUMITOMO 3M Mini・Clamp Board Mount Socket
Strai ht １line type 37204-62B3-004 PL
FSM2-D-[]
1
2
3
4
Sensor
FSM-A-[]
FSM-H-A-[]
FSM-V-A[]
(Analo output type)
(Brown) Power supply +
(Black) Analo output
N.C.
(Blue) Power supply -
Main circuit
Load
Load
Brown (Power supply +)
Gray (Analo output)
+
-
Black (CH1)
Switch output 1
White (CH2)
External input
2
3
4
5
1
Blue (Power supply -)
(Black)
FSM2-D-[]
1
Sensor
WFK30[]S-[]-A2
(Sensor type)
(Brown) Power supply +
(Oran e) Analo output
N.C.
(Blue) Power supply -
4
3
2
e-con SUMITOMO 3M Wire Mount plu 37104-3122-000FL
e-con SUMITOMO 3M Wire Mount plu 37104-3163-000FL
e-con SUMITOMO 3M Mini・Clamp Board Mount Socket
Strai ht １line type 37204-62B3-004 PL
e-con SUMITOMO 3M Mini・Clamp Board Mount Socket
Strai ht １line type 37204-62B3-004 PL

- 4 -
[4] Function
<Normal mode>
Item Description
Flow rate display Instantaneous flow rate is displayed.
Inte ratin function Inte rated flow rate is displayed.
Peak hold
function
Maximum and minimum flow rate values durin th
e specified
period can be read.
Set-point
verification
Switch data (set-
point value and operation mode) are
displayed to check.
Key lock Settin chan es are disabled to prevent incorrect operations.
Error display
function
The error state is displayed.
<Standard settin mode>
Item Description
Switch output
Havin 2 pieces of switch output, 7 operation patterns and stop
of operation can be set.
Forcible output
function
Switch output is turned on forcibly to check wirin connection
and initial operation of input unit.
0 point adjustment
Deviation of the display from o is corrected.
<Detailed settin mode>
Item Description
CH2 function
selection
Sets the CH2 function.
Selects “Switch output”, ”External input of auto reference”,
or ”External input of inte rated reset”.
Auto reference
function
When CH2 function selected external input of auto reference,
settin value of switch output can be taken by external input or
key operation.
Response time
settin
Sets the response time.
The response time can be selected from 20ms to 1280ms.
Display speed
selection
Chan e the speed of the displayed.
Sub-display
selection
Chan e the indication of the sub-display.
Selects “Flow direction”, ”Flow rate unit”, or “Workin fluid”.
Displayed color
selection
Displayed color can be chan ed.
Hysteresis fixed
value selection
Sets hysteresis of the window operation mode and the auto
reference mode. (8 steps)
Flow rate unit
selection
Flow rate unit can be chan ed.
Standard condition (ANR): Converted to volumetric flow at 20°C
and 1 atmospheric pressure (101kPa).
Reference condition (NOR): Converted to volumetric flow at 0°C
and 1 atmospheric pressure (101kPa).(calculation value)
Eco mode settin Current consumption can be lowered.
When the product is left for 1 min. without any operation, it’
s
shift to eco mode.
Reset settin Return to default settin s (factory settin s)
Model chan e Chan e flow rate, flow direction and as type.
[5]How to operate
5-1.Normal mode
< Displaying the integrated flow >
Note: Inte ration is reset with the external input. See auto reference function.
Note: Inte ration is also reset when power is turned OFF.
<Peak hold function>
<Set-point check method>
< Key lock function>
Key lock
Key unlock
Note: Keys are unlocked when the controller is shipped. Lock keys if necessary.
The key lock/unlock state is held even if power is turned OFF.
When this product is operated with “Key lock” settin , the display shows”Loc”.
ｍ
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ＬＬ
Ｌ
/
ｍｉｎ
ｍｉｎｍｉｎ
ｍｉｎ
ｍＬ
ｍＬｍＬ
ｍＬ
/
ｍｉｎ
ｍｉｎｍｉｎ
ｍｉｎ
ｍＬ
ｍＬｍＬ
ｍＬ
Display unit selection
Instantaneous flow rate display
(unit:: mL/min (or) L/min)
Inte rated flow display (unit: mL (or) L)
,<Instantaneous flow rate display>
Press once.
Press once
(determination).
ｍＬ
ｍＬｍＬ
ｍＬ
<Inte rated flow display>
Inte ration reset
Inte ration is reset when the and
keys are held down for 2 sec.
Press simultane-
ously for 2 sec.
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CH1 data display
<Instantaneous flow rate display>
Bein held down
To instantaneous flow rate display
Separate
CH2 data display
＜Lower limit＞
＜Upper limit＞ Operation waveform
Displays in turn
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ｍｉｎ １
１１
１
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ＬＬ
Ｌ
/
ｍｉｎ
ｍｉｎｍｉｎ
ｍｉｎ １
１１
１
When CH1 selected window operation[1] When CH2 selected external input of
inte rated reset.
Separate
Bein held down
<Instantaneous flow rate display>
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ｍｉｎ
Peak hold display
and press simultaneously
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ＬＬ
Ｌ / ｍｉｎ
ｍｉｎｍｉｎ
ｍｉｎ
ｍ
ｍｍ
ｍＬ
ＬＬ
Ｌ
/
ｍｉｎ
ｍｉｎｍｉｎ
ｍｉｎ ｍ
ｍｍ
ｍＬ
ＬＬ
Ｌ
/
ｍｉｎ
ｍｉｎｍｉｎ
ｍｉｎ
Bein held down Bein held down
<Peak value displayed>
<Bottom value displayed>
Press once.
Reset peak hold function. To instantaneous flow rate display
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<Instantaneous flow rate display (key unlock)>
and press simultaneously for 1 sec.
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ｍｉｎｍｉｎ
ｍｉｎ
<Instantaneous flow rate display (key lock)>
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ＬＬ
Ｌ
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ｍｉｎｍｉｎ
ｍｉｎ
<Instantaneous flow rate display (key lock)>
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ＬＬ
Ｌ
/
ｍｉｎ
ｍｉｎｍｉｎ
ｍｉｎ
<Instantaneous flow rate display (key unlock)>
and press simultaneously for 3 sec.

- 5 -
5-2.Standard setting mode
<How to enter to standard setting mode>
<Switch output>
Havin 2 pieces of switch output, 7 operation patterns and stop of
operation can be set.
<Data setting of switch output function>
<Switch output forcible ON mode>
<0 point adjustment mode>
0 point adjustment settin display.
To instantaneous flow rate display
Press once.
(determination)
Press once.
Caution Always adjust 0 point without flow.
Note: If fluid flows durin zero adjustment settin , “E 02” is indicated.
Press simultaneously
(adjusted value readin )
Adjustment value display
Operation pattern Description Operation waveform
Window
operation[1]
(Ran e inside ON)
The switch turns ON
when the level is
within the desi nated
flow rate ran e.
Window
operation[2]
(Ran e outside ON)
The switch turns ON
when the level is not
within the desi nated
flow rate ran e.
Hysteresis
operation[1]
(Flow rate small
side ON)
ON when lower than
set point. Hysteresis
can be arbitrarily set.
Hysteresis
operation[2]
(Flow rate lar e
side ON)
ON when hi her than
set point. Hysteresis
can be arbitrarily set.
Inte rated output[1]
（ON when hi her
than set
inte ration）
The switch turns ON
at the set inte rated
flow.
Inte rated output[2]
（OFF when hi her
than set
inte ration）
The switch turns OFF
at the set inte rated
flow.
Inte rated pulse
The inte rated pulse
is output durin
inte ration.
See
specifications for
details on the pulse
output rate.
Switch output OFF
Switch output OFF
Note: Hysteresis is provided on upper and lower limit of window operation automatically.
The hysteresis can be fixed in 8 steps. Refer to <Hysteresis fixed value selection>
in <Detailed settin mode>.
Inte rated flow rate
ON
OFF
Set point
Flow rate
ON
OFF
Lower limit
Upper limit
ON
OFF
Flow rate
Lower limit
Upper limit
ON
OFF
Flow rate
Lower limit
Upper limit
ON
OFF
Flow rate
Lower limit
Upper limit
ON
OFF
Inte rated flow rate
Set point
ON
OFF
Pulse rate
40msec
Inte rated flow rate
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Ｌ
/
ｍｉｎ
ｍｉｎｍｉｎ
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＜Instantaneous flow rate display＞
Press for 3 sec.
<Switch output >
Press once.
<Forcible output function>
Press once.
<0 point adjustment>
Press once.
To instantaneous flow rate display
To switch output
settin display
Press once. (determination)
To forcible output
settin display
Press once .(determination)
To 0 point adjustment
settin display.
Press once .(determination)
ｍＬ
ｍＬｍＬ
ｍＬ
/
ｍｉｎ
ｍｉｎｍｉｎ
ｍｉｎ
Flash
At instantaneous flow rate display,
press
key for 3 sec. to enter to standard
settin mode.
Forcible output settin display
To instantaneous flow rate display
Press once.
２
２２
２
１
１１
１
１
１１
１ ２
２２
２
Bein held down (CH1 output ON)
Bein held down (CH2 output ON)
Bein held down (CH1 and CH2 output ON)
Switch output settin display
<Switch output OFF> <Window operation [1]>
<Window operation [2]>
<Hysteresis operation [1]>
<Hysteresis operation [2]>
<Inte rated output [1]>
<Inte rated output [2]>
<Inte rated pulse>
CH1 operation mode chan e
Press once. (determination)
CH1 ON/OFF data settin
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<Lower limit data settin > <Upper limit data settin >
Count UP
Count down
Press once. (determination)
CH2 operation mode chan e (Set same as CH1)
CH2 ON/OFF data settin (Set same as CH1)
Press once. (determination)
Press once. (determination)
To instantaneous flow rate display
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Press key once to increase by one fi ure
and press it continuously to keep set fi ure increased.
Press or key to select operation mode.
Press key to set.
Press key once to decrease by one fi ure
and press it continuously to keep set fi ure decreased.

- 6 -
5-3.Detailed setting mode
<How to enter to detailed setting mode>
<Auto reference function>
When CH2 function selected external input of auto reference, settin
value of switch output can be taken by external input or key operation.
The set point takes the flow rate when external input is turned on (or
key operation). When auto reference is executed, the switch settin of
CH2 becomes invalid.
How to take set point by key operation
・1 point input : The set point takes the flow rate when press key for 2
sec.
・2 point input : The upper limit takes the flow rate when press key for 2
sec.
The lower limit takes the flow rate when press key for 2
sec.
・After takin , the set point is displayed.
How to take set point by external input
・1 point input : The set point takes the flow rate when external input is
turned on (keep approx. 40msec.).
・2 points input : The set point takes the flow rate when external input is
turned on (keep approx. 40msec.). The bi and small
relations between latest two points are compared, upper
limit and lower limit are distin uished automatically.
・After takin , the set point is displayed. Also the pulse is output from CH1
for the takin confirmation.
・The set point value is cleared if power is turned OFF.
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<Instantaneous flow rate display>
Press for 8 sec.
<Auto reference function (CH2 settin )>
To instantaneous flow rate display
Press once. (determination)
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/
ｍｉｎ
ｍｉｎｍｉｎ
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Press once.
<Response time settin > Press once. (determination)
Press once.
<Display speed selection> Press once. (determination)
Press once.
<Sub-display selection> Press once. (determination)
Press once.
<Displayed color selection> Press once. (determination)
Press once.
<Hysteresis fixed value selection> Press once. (determination)
Press once.
<Flow rate unit selection> Press once. (determination)
Press once.
<Eco mode settin > Press
Press once.
<Reset settin > Press once. (determination)
Press once.
＜Model number display＞ Press once. (determination)
Press once.
Settin value
。
Settin value
。
Settin value
。
Settin value
。
Settin value
。
Settin value
。
Settin value
。
Settin val
ue
。
At instantaneous flow rate display,
press
key for 8 sec. to enter to detailed
settin mode.
To auto reference
settin display
To response time
settin display
To display speed
settin display
To sub-display
settin display
To displayed color
settin display
To hysteresis fixed value
settin display
To flow rate unit
settin display
To eco mode
settin display
To reset
settin display
To model number
display
Input
point
Operation
mode
Description Operation waveform
1-point input
[1]
(Flow rate
lar e side
ON)
ON when hi her than input
point.
Set-point=input point
1
point
1-point input
[2]
(Flow rate
small side
ON)
OFF when hi her than input
point.
Set-point=input point
2-point input
[1]
(Flow rate
lar e side
ON)
ON when hi her than centre
value of two input points
Set-point=
(input point1+input point2)/2
2-point input
[2]
(Flow rate
small side
ON)
OFF when hi her than
centre value of two input
points
Set-point=
(input point1+input point2)/2
2-
point inside
(Ran e inside
ON)
ON when flow rate level is
within two input points.
Setpoint1=input point 1
Setpoint2=input point 2
2
point
2-point
outside
(Ran e
outside ON)
OFF when flow rate level is
within two input points.
Setpoint1=input point 1
Setpoint2=input point 2
Flow rate
ON
OFF
Input point
ON
OFF
Input point
Flow rate
ON
OFF
Input point 1
Input point 2
Flow rate
ON
OFF
Input point 1
Input point 2
Flow rate
ON
OFF
Input point 1
Input point 2
Flow rate
ON
OFF
Input point 2
Input point 1
Flow rate
Input point（mL/min） Upper limit（mL/min） Lower limit（mL/min）
Initial value 0 0
1st 123 0 123
2nd 234 123 234
3rd 45 45 234
4th 345 45 345
5th 456 345 456
ｍ
ｍｍ
ｍＬ
ＬＬ
Ｌ /
//
/ ｍｉｎ
ｍｉｎｍｉｎ
ｍｉｎ

- 7 -
Setting of auto reference
<Setting of response time>
<Setting of display speed>
<Setting of sub-display>
<Setting of display color>
<Hysteresis fixed value selection>
<Setting of flow rate unit.>
Sub-display settin display
<Flow direction> <Flow rate unit> <Workin fluid>
Settin of sub-display
To instantaneous flow rate display
Press once. (determination)
Press or key to select sub-display.
Press key to set.
To instantaneous flow rate display
Press once. (determination)
Main display shows the
state of CH1.
ｍ
ｍｍ
ｍＬ
ＬＬ
Ｌ
/
ｍｉｎ
ｍｉｎｍｉｎ
ｍｉｎ
Display color settin display
Settin of display color
Always red
Always reen
Red when ON
Green when OFF
Red when OFF
Green when ON
Press or key to select display color.
Press key to set.
Sub display shows the
state of CH2
Auto reference settin display
<Switch output>
<External input of
inte rated reset>
<Auto reference>
To instantaneous flow rate display
To settin of CH2 switch output
Press once.
(determination)
Settin of CH2 function
Reference method selection
(Key operation / External input)
<Key operation> <External input>
Press once.
(determination)
Input point selection (1-point / 2-point)
<1-point>> <2-point>
Press once. (determination) Press once. (determination)
Operation mode selection (1-point)
Operation mode selection (2-point)
Flow rate lar e side ON Flow rate small side ON Flow rate lar e side ON Flow rate small side ON
Ran e outside ON
Ran e inside ON
Press once.
(determination)
To instantaneous flow rate display
ｍ
ｍｍ
ｍＬ
ＬＬ
Ｌ
/
ｍｉｎ
ｍｉｎｍｉｎ
ｍｉｎ
Press once.
(determination)
Press once.
(determination)
Press or key to select CH2 function.
Press key to set.
Response time settin display
Settin of response time
…
Indication
Response time
SP 1 50msec
SP 2 80msec
SP 3 120msec
SP 4 200msec
SP 5 400msec
SP 6 800msec
SP 7 1500msec
To instantaneous flow rate display
Press once. (determination)
Press or key to select response time.
Press key to set.
Display speed settin display
Settin of display speed
<250msec> <500msec> <1000msec>
To instantaneous flow rate display
Press once. (determination)
Press or key to select display speed.
Press key to set.
Hysteresis fixed value settin display
Hysteresis fixed value selection
To instantaneous flow rate display
Press once. (determination)
…
<Approx. 1%F.S.> <Approx. 2%F.S.> <Approx. 8%F.S.>
When window operation or auto reference is
selected.
Press or key to select hysteresis fixed value.
Press key to set.
Flow rate unit settin display
Settin of flow rate unit
To instantaneous flow rate display
Press once. (determination)
<ANR: Standard condition> <NOR: Reference condition>
Note: NOR display is calculation value.
Press or key to select flow rate unit.
Press key to set.

- 8 -
<Setting of Eco mode>
<Reset to the initial setting>
＜
＜＜
＜How to model number settin ＞
＞＞
＞
Please carry out at the time of use start, and settin reset and model chan e.
<Model number display>
[6]Troubleshooting
●Error displays and corrective action
●Troubleshootin (Other than error displays)
Error indication Cause Corrective action
The supplied power volta e
is not within the ratin .
Check controller power
specifications, set power volta e
within the ratin ran e, and turn
power ON a ain.
If fluid flows durin zero
adjustment settin , “E 02” is
indicated.
Please check that fluid doesn’t
flow at the time of zero adjustment
settin .
An error occurred durin
EEPROM readin or writin .
Contact your nearest CKD Sales
Office or dealer.
An error occurred durin
memory readin or writin .
Contact your nearest CKD Sales
Office or dealer.
Readin exceeds the upper
limit of detection ran e.
Reduce the flow.
Sensor chip is broken. Replace FSM2.
Readin exceeds the lower
limit of detection ran e.
Reduce the flow.
Sensor chip is broken. Replace FSM2.
Switch output indicator
is blinkin
Switch output over current
protection circuit is activated.
Check whether load current
exceeds the ratin , correctly
connect the controller, and turn
power ON a ain.
Model number display
To instantaneous flow rate display
Press once.
ｍ
ｍｍ
ｍＬ
ＬＬ
Ｌ / ｍｉｎ
ｍｉｎｍｉｎ
ｍｉｎ
<Flow rate unit & flow direction>
<0 point adjustment value>
<Model number> Full scale flow rate
<Workin fluid>
Ai : Air,N2
Ar : Ar on
C2 : CO2
<Switch output>
N : NPN output
P : PNP output
Model number display
Trouble Cause Corrective action
Breaka e of wire. Replace FSM2.
Recheck/repair external wirin .
Wron connection of power
source.
Connect the rated power source
correctly.
Malfunction caused by noise. Keep FSM2 main body and cable
away from noise source.
Output circuit is broken. Replace FSM2.
No flow display
(No analo output)
FSM2 is broken. Replace FSM2.
Flow display remains
0. (Analo output
remains 1V or 3V)
Flow path clo ed by forei n
matter.
Remove forei n matter and install
filter at primary side of FSM2.
Leaka e Check and correct pipin .
Forei n matter stickin to
sensor chip. Replace FSM2.
Flow display does not
reach 0. (Analo
output does not make
1V or 3V) Malfunction caused by noise. Keep FSM2 main body and cable
away from the noise source.
Sensor chip is broken. Replace FSM2.
Forei n matter stickin to
sensor chip. Replace FSM2.
Poor precision
Malfunction caused by noise. Keep FSM2 main body and cable
away from the noise source.
Reduce pulsation by installin
tank, etc.
Chan e the response time.
Chan e the display speed.
Pulsation of air.
Fault in power source (not
enou h volta e/capacity)
Pulsation of air. Chan e the hysteresis.
Fault in power source (not
enou h volta e/capacity)
Supply rated volta e.
Provide power source with
enou h capacity.
Flow display is not
stable. (Analo output
is not stable. Output is
chatterin .)
Malfunction caused by noise. Keep FSM2 main body and cable
away from noise source.
Eco mode settin display
Settin of Eco mode
Press once. (determination)
ｍ
ｍｍ
ｍＬ
ＬＬ
Ｌ
/
ｍｉｎ
ｍｉｎｍｉｎ
ｍｉｎ
Ｌ
ＬＬ
Ｌ
Eco mode ON : If any key is not carried out for approx. 1 min., the display is turned off.
Press any key to show the indication.
<Eco mode OFF> <Eco mode ON>
Press or key to select eco mode.
Press key to set.
Reset settin
To instantaneous flow rate display
Press once. (determination)
Reset settin display
<Reset is not executed> <Reset is executed>
Setting at shipping out of factory
Item Settin at shippin out of factory
Model settin No-settin
Switch out put OFF
Zero adjustment value Zero
Inte ratin flow rate value Zero
Auto reference (CH2 settin ) Switch output
Response time 20msec
Display speed 250msec
Sub-display Flow direction display
Displayed color Red when ON. Green when OFF.
Hysteresis 1%FS
Flow rate unit ANR
Eco mode OFF
Press or key to select reset settin .
Press key to set.
Flow ran e settin
To instantaneous flow rate
Press once. (determination)
Model number display
m
L
m
in
L
m
in
L
m
in
Gas settin
Flow direction settin
＜500mL/min＞
Flow unit setting
Press once. (determination)
Press once. (determination)
Press once. (determination)
＜1L/min＞
＜32L/min＞
＜Air、N2＞
＜Ar＞
＜CO2＞
＜Bidirection type＞
＜unidirection type＞
＜ＡＮＲ＞
＜NOR＞

- 9 -
[7] Specifications
Separeted indicator type
Display range
Model no.
Descriptions
Separate indicator type
ＦＳＭ２－D-[※１][※２]－□－[※３]
Flow rate note1
500mL/min、1L/min、2L/min、5L/min、10L/min、20 L/min、50 L/min
100 L/min、200 L/min、500 L/min、1000 L/min、1.50m
3
/min
5mL/min、10mL/min、50mL/min、100mL/min、4Ｌ/min、12L/min、25L/min、32L/min
Ambient temperature / humidity 0 to 50°C and 90%RH or less
Type of display Dual (2×4-di it 7-se ment) Two-color LCD
In-put si nal Volta e input（1 to 5V）
N 2 points (NPN open collector output, 50mA or less, volta e drop 2.4V or less)
Switch output ※１ P 2 points (PNP open collector output, 50mA or less, volta e drop 2.4V or less)
V 1 point (1 to 5V volta e output and connected load impedance 50kΩ and over)
Output
Analo output ※２ A 1 point (4 to 20mA current output and connected load impedance 300Ω or less)
V DC12 to 24V (10.8 to 26.4V)
Power supply volta e
Note2 ※２ A DC24V (21.6 to 26.4V)
Current consumption Note3 40mA or less
Lead wire φ3.7 AWG26×5
Functions Flow rate display, flow rate display-peak hold, switch output and analo output
Protective structure IEC standards IP40
Protective circuit Note4
Power supply and switch output reverse connection protections, and switch output load
short-circuit protection
ＥＭＣ directive Conformin product
Accessory
Connector for sensor (e-con)1 pcs., applicable AWG24 to 26, isolator outer diameter φ1.0 to 1.2
Mass（body only） Approx. 40
Blank None
Clean specification
Note 5 ※ 3 P70 Particle eneration prevention
Note1: Only when the FSM2 display separation type is connected, the flowin ran e, the flow direction, and the as type are reco nized automatically.
（Default settin ）. It is also compatible with the flow ran e of FSM-H, FSM-V, WFK3000.
However, only FSM2 can be detected automatically so manually confi ure the flow ran e, flow direction and as type before use.
Refer to the “Display for each flow ran e” below to find out the flow ran e that can be connected.
Also, the previous settin for flow ran e, etc. will remain even if you chan e the sensor. Use after resettin if you chan e the sensor.
Note2: Power volta e specifications differ for the volta e output and current output.
Note3: Current for 24VDC connection with no load connected. Consumed current varies with the load connection.
Note4: This product’s protective circuit is effective only for specific incorrect connections and load short-circuits. It does not necessarily provide protection
for all incorrect connections.
Note5:<P70>Particle eneration prevention (product surface de reased and cleaned before packa in ). Heat seal into an antistatic ba in a clean
bench over class 1000.
Note6: One connector (e-con connector) for the sensor connection is appended by the standard.
A cable with a different thickness is required to connect to FSM-V or WFK3000 so an e-con connector with the appropriate size will be required
separately. Contact our sales office or distributor.
The included e-con connector is compatible with FSM and FSM-H.
Type No. 1 2 3 17 4 5 18 6 19 20 7 8
Unidirec
tional
0～
500
mL/min
0～
1000
mL/min
0～
2.00
L/min
0～
4.00
L/min
0～
5.00
L/min
0～
10.00
L/min
0～
12.0
L/min
0～
20.0
L/min
0～
25.0
L/min
0～
32.0
L/min
0～
50.0
L/min
0～
100.0
L/min
Display
ran e
Bidirecti
onal
-500
～
500
mL/min
-1000
～
1000
mL/min
-2.00
～
2.00
L/min
-5.00
～
5.00
L/min
-10.00
～
10.00
L/min
-20.0
～
20.0
L/min
-50.0
～
50.0
L/min
-100.0
～
100.0
L/min
Flow display
Display
resolution 1mL/min 0.01L/min 0.1mL/min
Display ran e 9999999mL 99999.99L 999999.9L
Display
resolution 1mL 0.01L 0.1mL
Inte ration
Pulse output rate 5mL 10mL 0.02L 0.04L 0.05L 0.1L 0.12L 0.2L 0.25L 0.32L 0.5L 1L
Type No. 9 10 11 12 13 14 15 16
Unidirec
tional
0～
200
L/min
0～
500
L/min
0～
1000
L/min
0～
1.50
m
3
/min
0～
5.00
mL/min
0～
10.00
mL/min
0～
50.0
mL/min
0～
100.0
mL/min
Display
ran e
Unidirec
tional
-200
～
200
L/min
-500
～
500
L/min
-1000
～
1000
L/min
-1.50
～
1.50
m
3
/min
-5.00
～
5.00
mL/min
-10.00
～
10.00
mL/min
-50.0
～
50.0
mL/min
-100.0
～
100.0
mL/min
Flow display
Display
resolution 1L/min 0.01m
3
/min 0.01mL/min 0.1L
Display ran e 9999999m
3
99999.99m
3
99999.99mL 999999.9mL
Display
resolution 1L 0.01m
3
0.01mL 0.1mL
Inte ration
Pulse output rate 2L 5L 10L 15L 0.05mL 0.1mL 0.5mL 1mL

- 10 -
[8] Dimensions
Separated indicator type
●FSM2-D-[]
How to panel mount
FSM2-KHS
Panel hold matchin Fi （Plate thickness t0.8 to 6）
＜Sin le mount＞ ＜Stickin mount＞
n: Number of stickin installations
[9]How to order
FSM2 - D - N V - 1 P - P70
[1] [2] [3] [4] [5]
[1]Output type [2]Analo output type [3] Cable [4] Bracket
V 1 to 5V Blank None Blank None A Separated indicator type
Analo output: 1point A 4 to 20mA 1 1m P Panel brackets
3 3m N Inte rated indicator type
Switch output(NPN): 2points
Analo output: 1point
[5]Clean
Blank Blank
P70 Particle occurrence prevention
P Inte rated indicator type
Switch output(PNP): 2points
Analo outpot: 1point
Discrete option model
FSM2 KHS －
－－
－ P70
[6] [7]
[6]Symbol [7]Clean
KHS Panel mount brackets Blank None
C51 1m (for Inte rated indicator type) P70 Particle occurrence prevention
C53 3m (for Inte rated indicator type)
CKD Corporation
2-250, Ouji, Komaki, Aichi 485-8551, Japan
http://www.ckd.co.jp
We reserve the ri ht to chan e dimensions, specifications and desi n without notice.
first edit 2008.5.15
revision 2008.9.16
revision 2011.5.11
57.5±0.5 57.5±0.5
22.5±0.5
22.5＋28（n-1）±0.5
e-con : Sumitomo3M
Mini clamp socket
37204-62B3-004PL
Connector : JST
BM05B-GHS-TBT