CKD Rapiflow FCM Series User manual

INSTRUCTION MANUAL
•Read this Instruction Manual before using the product.
•Read the safety notes carefully.
•Keep this Instruction Manual in a safe and convenient place for future reference.
Compact Flow Rate Controller
Rapiflow® FCM Series
SM-358642-A/7
SM-358642

SM-358642-A/7 PREFACE
i 2018-11-12
PREFACE
Thank you for purchasing CKD's "Rapiflow®FCM Series"compact flow rate controller.
This Instruction Manual contains basic matters such as installation and usage instructions in order to
ensure optimal performance of the product. Please read this Instruction Manual thoroughly and use the
product properly.
Keep this Instruction Manual in a safe place and be careful not to lose it.
Product specifications and appearances presented in this Instruction Manual are subject to change
without notice.
•The product is intended for users who have basic knowledge about materials, piping, electricity, and
mechanisms of pneumatic components. CKD shall not be responsible for accidents caused by
persons who selected or used the product without knowledge or sufficient training.
•Since there are a wide variety of customer applications, it is impossible for CKD to be aware of all of
them. Depending on the application or usage, the product may not be able to exercise its full
performance or an accident may occur due to fluid, piping, or other conditions. It is the responsibility
of the customer to check the product specifications and decide how the product shall be used in
accordance with the application and usage.

SM-358642-A/7 SAFETY INFORMATION
ii 2018-11-12
SAFETY INFORMATION
When designing and manufacturing any device incorporating the product, the manufacturer has an
obligation to ensure that the device is safe. To that end, make sure that the safety of the machine
mechanism of the device, the pneumatic or water control circuit, and the electric system that controls
such mechanism is ensured.
To ensure the safety of device design and control, observe organization standards, relevant laws and
regulations, which include the following:
ISO 4414, JIS B 8370, JFPS 2008 (the latest edition of each standard), the High Pressure Gas Safety
Act, the Industrial Safety and HealthAct, other safety rules, organization standards, relevant laws and
regulations.
In order to use our products safely, it is important to select, use, handle, and maintain the products
properly.
Observe the warnings and precautions described in this Instruction Manual to ensure device safety.
Although various safety measures have been adopted in the product, customer's improper handling may
lead to an accident. To avoid this:
Thoroughly read and understand this Instruction Manual
before using the product.
To explicitly indicate the severity and likelihood of a potential harm or damage, precautions are classified
into three categories: "DANGER", "WARNING", and "CAUTION".
DANGER
Indicates an imminent hazard. Improper handling will cause death or serious
injury to people.
WARNING
Indicates a potential hazard. Improper handling may cause death or serious
injury to people.
CAUTION
Indicates a potential hazard. Improper handling may cause injury to people or
damage to property.
Precautions classified as "CAUTION" may still lead to serious results depending on the situation.
All precautions are equally important and must be observed.
Other general precautions and tips on using the product are indicated by the following icon.
Indicates general precautions and tips on using the product.

SM-358642-A/7 SAFETY INFORMATION
iii 2018-11-12
Precautions on Product Use
WARNING
The product must be handled by a qualified person who has extensive knowledge and
experience.
The product is designed and manufactured as a device or part for general industrial machinery.
Use the product within the specifications.
The product must not be used beyond its specifications.Also, the product must not be modified
and additional work on the product must not be performed.
The product is intended for use in devices or parts for general industrial machinery. It is not
intended for use outdoors or in the conditions or environment listed below.
•In applications for nuclear power, railroad system, aviation, ship, vehicle, medical equipment,
and equipment that directly touches beverage or food.
•For special applications that require safety including amusement equipment, emergency
shut-off circuit, press machine, brake circuit, and safety measures.
•For applications where life or properties may be adversely affected and special safety measures
are required.
(Exception is made if the customer consults with CKD prior to use and understands the
specifications of the product. However, even in that case, safety measures must be taken to avoid
danger in case of a possible failure.)
Do not handle the product or remove pipes and devices until confirming safety.
•Inspect and service the machine and devices after confirming the safety of the entire system.
Also, turn off the energy source (air supply or water supply) and power to the relevant facility.
Release compressed air from the system and use extreme care to avoid water or electric
leakage.
•Since there may be hot or live parts even after operation has stopped, use extreme care when
handling the product or removing pipes and devices.
•When starting or restarting a machine or device that incorporates pneumatic components, make
sure that a safety measure (such as a pop-out prevention mechanism) is in place and system
safety is secured.
Precautions on Working Fluid
DANGER
Do not flow gas with a concentration that falls within the explosion limits.
There is a risk of explosion.
Purge gas inside the pipes with inert gases such as nitrogen or argon before flowing a
combustible gas.
There is a risk of explosion if the product is used without purging the pipes with inert gases.
Do not flow oxygen gas in models not designed for oxygen.
There is a risk of fire accident. Even if the product is an oxygen model, once the product is used
with gas other than oxygen gas, do not ever use that product with oxygen gas.

SM-358642-A/7 SAFETY INFORMATION
iv 2018-11-12
WARNING
Do not use the product as a meter for commercial transactions.
The product does not comply with the MeasurementAct (of Japan) or equivalent measurement
acts of any country and cannot be used for commercial transactions.
Use the product within the fluid temperature range of 0°C to 50°C.
Even if the temperature is within the specified range, do not use the product in places where
sudden changes in the temperature may cause condensation.
Use only applicable fluids.
The FCM Series is designed for the gas types specified in the model number. When used with
fluids other than the applicable fluids, performance such as accuracy and controllability are not
guaranteed. Especially, if hydrogen or helium gas flows into a product not designed for hydrogen
or helium gas, the product may not operate due to the safety circuit of the sensor. (Once the safety
circuit is activated, the flow rate cannot be measured or controlled until the power is turned off.)
Make sure that the cleanliness of fluid is sufficient.
•Use clean and dry gas that does not contain corrosive chemicals (such as chlorine, sulfur, or
acid), dusts, and oil mists.
•If a fluid is left in the product for a long period, the fluid quality may negatively affect the product
performance. Do not leave the fluid enclosed in the pipes for a long time.
•If foreign matters such as dusts, water drops, and oil mists in the pipes enter the product, the
accuracy and the controllability may deteriorate or the product may fail. If there is a possibility of
foreign matters entering the product, install a filter, an air dryer, or an oil mist filter (micro
alescer) on the primary side (upstream) of the product.
•When using compressed air, use clean air that is in accordance with JIS B 8392-1:2012 (ISO
8573-1:2010) [1:1:1 to 1:6:2].
•Compressed air from the compressor contains drainage such as water, oxidized oil, and foreign
matters. Install a filter, an air dryer, or an oil mist filter (micro alescer) on the primary side
(upstream) of the product.
Note that the mesh (metal) provided in the product is used to rectify the flow in the piping. It is not a
filter for removing foreign matters.
<Recommended circuit>
Use the product after checking that the fluid pressure is within the operating differential
pressure range.
•If the pressure exceeds the proof pressure or is outside the operating differential pressure
range, the product may fail.
•If the primary pressure is low or the secondary side pressure is high, the fluid will not flow due to
insufficient differential pressure.
Check the flow characteristics of the regulator on the primary side.
Depending on the flow characteristics of the regulator, the pressure may become unstable when a
certain amount of fluid flows and the output from the product may fluctuate.
Use a valve with an oil-prohibited specification and install a filter when using a valve on the
primary side of the product.
The product may malfunction or fail due to the grease or oil splattering or the abrasion powder
generated from the valve.
Vaporize liquefied gases such as propane gas before use.
Flowing liquefied gas into the product may cause failures.
Design the arrangement of the product and the piping so that the backfire is prevented and
the product is protected from damage even if a backfire occurs when using the product for
burner air-fuel ratio control.
A rise in the internal pressure in the pipes and a fire caused by a burner's backfire may cause
failures.
Filter
Oil mist filter
(micro alescer)
Regulator
Air
dryer
FCM Series
Pneumatic
pressure source

SM-358642-A/7 SAFETY INFORMATION
v 2018-11-12
WARNING
When using a mixture of hydrogen or helium gas and other gases, make sure not to let gases
used in each FCM Series controller to flow into other FCM Series controllers.
For use in a parallel circuit as shown in the figure below, if hydrogen or helium gas flows into a
product not designed for hydrogen or helium gas, the product may not operate due to the safety
circuit of the sensor. Take measures to prevent this inflow. (Once the safety circuit is activated, the
flow rate cannot be measured or controlled until the power is turned off.)When shutting off the gas,
install a shut-off valve for each product as shown in the figure below to prevent the backflow of
gas.
Precautions on Maintenance
CAUTION
Do not use materials such as solvents, alcohol, and detergents to remove dirt and stains.
The case is made of resin and resin can be damaged by these materials. Soak a waste cloth in a
diluted neutral detergent and wring it out well. Use this cloth to wipe off dirt.
Check the flow rate accuracy periodically.
It is recommended to check the flow rate accuracy periodically. The accuracy may change from the
initial state depending on the condition of use and the environment.Also, when the product is used
for a long period, the accuracy may change due to a deterioration of the sensor chip.
The flow rate displayed on the product is the volumetric flow converted from the mass flow.
The measured mass flow is converted to the volumetric flow rate at 20°C, 1 atmospheric
pressure (101 kPa), and 65% RH.

SM-358642-A/7 CONTENTS
vi 2018-11-12
CONTENTS
PREFACE........................................................................................................................... i
SAFETY INFORMATION.................................................................................................. ii
Precautions on Product Use..........................................................................................iii
Precautions on Working Fluid........................................................................................iii
Precautions on Maintenance......................................................................................... v
CONTENTS...................................................................................................................... vi
1. PRODUCT OVERVIEW............................................................................................. 1
1.1 Model Number Indication....................................................................................1
1.1.1 General gas model........................................................................................ 1
1.1.2 Hydrogen/helium model ................................................................................ 2
1.1.3 Optional parts................................................................................................3
1.2 Specifications...................................................................................................... 4
1.2.1 General gas model........................................................................................ 4
1.2.2 Hydrogen/helium model ................................................................................ 7
1.3 Dimensions......................................................................................................... 9
1.3.1 Resin body.....................................................................................................9
1.3.2 Stainless steel body ....................................................................................10
1.4 Functions........................................................................................................... 13
1.4.1 Names and Functions of Display and Operation Panel..............................15
2. INSTALLATION ....................................................................................................... 16
2.1 Environment......................................................................................................16
2.2 Mounting...........................................................................................................18
2.3 Piping................................................................................................................19
2.3.1 Pipe cleaning............................................................................................... 19
2.3.2 Seal material................................................................................................19
2.3.3 Piping direction............................................................................................19
2.3.4 Tightening.................................................................................................... 20
2.4 Wiring................................................................................................................21
2.4.1 D-sub connector..........................................................................................23
2.4.2 Cable connection......................................................................................... 24
2.4.3 Example of internal circuit and load connection .........................................25
3. USAGE..................................................................................................................... 29
3.1 Flow Rate Control.............................................................................................31
3.1.1 Controlling the flow rate with the direct memory function........................... 31
3.1.2 Controlling the flow rate with the preset input function
(analog input type only)...............................................................................33
3.1.3 Changing the settings with the shortcut keys
(only when using the direct memory or preset input functions)..................34
3.1.4 Controlling the flow rate with the analog input function
(analog input type only)...............................................................................35
3.1.5 Controlling the flow rate with the parallel input function
(parallel input type only)..............................................................................36
3.2 Flow Rate Integration........................................................................................38
3.2.1 Displaying the integrated flow rate..............................................................38
3.2.2 Closing the proportional solenoid valve at the set integrated flow rate......39
3.2.3 Outputting the integrated pulse (switch output type only)...........................40
3.2.4 Turning the switch ON with the set integrated flow rate
(switch output type only)..............................................................................41
3.3 Switch Output (Switch Output Type Only)........................................................42
3.3.1 Using the tolerance mode ........................................................................... 42

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3.3.2 Using the designated range mode.............................................................. 43
3.4 Operation Flow.................................................................................................. 44
4. TROUBLESHOOTING............................................................................................. 48
4.1 Problems, Causes, and Solutions .................................................................... 48
4.2 Error Code ........................................................................................................ 50
5. WARRANTY PROVISIONS..................................................................................... 51
5.1 Warranty Conditions .........................................................................................51
5.2 Warranty Period................................................................................................ 51

SM-358642-A/7 1. PRODUCT OVERVIEW
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1. PRODUCT OVERVIEW
1.1 Model Number Indication
1.1.1 General gas model
Option model number
FCM
9500
AI
-
H6
0
AN
６
R
1
T
-
Model
Symbol
Description
(a) Flow rate range
Applicable fluid
AI
AR
O2
LN
C1
C3
9500
Standard differential
pressure type
0 L/min to 0.5 L/min
●
●
●
●
●
●
0001
0 L/min to 1 L/min
●
●
●
●
●
●
0002
0 L/min to 2 L/min
●
●
●
●
●
●
0005
0 L/min to 5 L/min
●
●
●
●
●
●
0010
0 L/min to 10 L/min
●
●
●
●
●
●
0020
0 L/min to 20 L/min
●
●
0050
0 L/min to 50 L/min
●
●
0100
0 L/min to 100 L/min
(resin body only)
●
L9500
Low differential
pressure type
(stainless steel only)
0 L/min to 0.5 L/min
●
●
●
●
●
L0001
0 L/min to 1 L/min
●
●
●
●
●
L0001
0 L/min to 2 L/min
●
●
●
●
●
L0005
0 L/min to 5 L/min
●
●
●
●
●
L0010
0 L/min to 10 L/min
●
●
●
●
●
(b) Applicable fluid
AI
Compressed air, nitrogen
AR
Argon
O2
Oxygen (oil-prohibited specification)
LN
City gas (13A)
C1
Methane (CH4)
C3
Propane (C3H8)
(c) Port size/body material
Port size/body material
AI
AR
O2
LN
C1
C3
H6
Push-in ( ø6), resin body
(excluding flow rate
ranges 50 L/min and 100
L/min)
●
H8
Push-in ( ø8), resin body
●
8A
Rc1/4, stainless steel body
●
●
●
●
●
●
UF Note 1
9/16-18UNF, stainless steel
body
●
●
●
●
●
●
(d) Input signal
0
Analog 0 VDC to 10 VDC
1
Analog 0 VDC to 5 VDC
2
Analog 4 mADC to 20 mADC
P
Parallel 10-bit
(e) Output specification
AN
1 V to 5 V analog, error (NPN)
AP
1 V to 5 V analog, error (PNP)
SN
Switch (NPN), error (NPN)
SP
Switch (PNP), error (PNP)
(f) Display direction
Blank
Normal direction
R
Upside-down
(g) Cable Note 2
Blank
None
1
1 m
3
3 m
(h) Bracket Note 2
Blank
None
B
With bracket
(i) Traceability Note 2
Blank
None
T
Traceability certificate, system diagram, inspection report
K
Inspection report
(a) Flow rate
range
(b)Applicable
fluid
(c) Port size/body material
(d)Input signal
(e)Output
specification
(f) Display
direction
(g) Cable
((i) Traceability
(h) Bracket
FCM
AC1
-
Symbol
Description
AC1
Analog 9-conductor cable, 1 m
AC3
Analog 9-conductor cable, 3 m
PC1
Parallel 15-conductor cable, 1 m
PC3
Parallel 15-conductor cable, 3 m
LB1
Bracket
B
■Example of
model number indication
FCM-0001AI-H81ANR1BK
(a) Flow rate range : 0 L/min to 1 L/min
(b) Applicable fluid : Compressed air,
nitrogen
(c) Port size/
body material : Push-in (ø8),
resin body
(d) Input signal : Analog 0 VDC to 5 VDC
(e) Output
Specification : 1 V to 5 V analog,
error (NPN)
(f) Display
direction : Upside-down
(g) Cable : 1 m
(h) Bracket : With bracket
(i) Traceability : Inspection report
Note 1: Refer to "1.3 Dimensions" for the 9/16-18UNF screw shape.
Note 2: Items (g), (h), and (i) are delivered with the product when selected

SM-358642-A/7 1. PRODUCT OVERVIEW
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1.1.2 Hydrogen/helium model
■ Example of model number indication
FCM-0002H2-8A1ANR1BK
(a) Flow rate range : 0 L/min to 2 L/min
(b) Applicable fluid : Hydrogen
(c) Port size : Rc1/4
(d) Input signal : Analog 0 VDC to 5 VDC
(e) Output specification : 1 V to 5 V analog, error (NPN)
(f) Display direction : Upside-down
(g) Cable : 1 m
(h) Bracket : With bracket
(i) Traceability : Inspection report
Option model number
H2
-
-
Model
Symbol
Description
(a) Flow rate range
Applicable fluid
H2
HE
0002
0 L/min to 2 L/min
Y
Y
0005
0 L/min to 5 L/min
Y
Y
0010
0 L/min to 10 L/min
Y
Y
0020
0 L/min to 20 L/min
Y
Y
(b) Applicable fluid
H2
Hydrogen
HE
Helium
(c) Port size
Port size
H2
HE
8A
Rc1/4
Y
Y
UF Note 1
9/16-18UNF
Y
Y
4S
1/4-inch
double bite-type fitting
Y
Y
4RM
1/4-inch
JXR male fitting
Y
Y
(d) Input signal
0
Analog 0 VDC to 10 VDC
1
Analog 0 VDC to 5 VDC
2
Analog 4 mADC to 20 mADC
P
Parallel 10-bit
(e) Output specification
AN
1 V to 5 V analog, error (NPN)
AP
1 V to 5 V analog, error (PNP)
SN
Switch (NPN), error (NPN)
SP
Switch (PNP), error (PNP)
(f) Display direction
Blank
Normal direction
R
Upside-down
(g) Cable Note 2
Blank
None
1
1 m
3
3 m
(h) Bracket Note 2
Blank
None
B
With bracket
(i) Traceability Note 2
Blank
None
T
Traceability certificate, system diagram, inspection
report
K
Inspection report
Note 1: Refer to "1.3 Dimensions" for the 9/16-18UNF screw shape.
Note 2: Items (g), (h), and (i) are delivered with the product when selected.
(a) Flow rate
range
(b) Applicable
fluid
(c) Port size
(d) Input signal
(e) Output
specification
(f) Display
direction
(g) Cable
(i) Traceability
(h) Bracket
FCM
AC1
-
Symbol
Description
AC1
Analog 9-conductor cable, 1 m
AC3
Analog 9-conductor cable, 3 m
PC1
Parallel 15-conductor cable, 1 m
PC3
Parallel 15-conductor cable, 3 m
LB1
Bracket
0002
8A
0
AN
R
1
B
T
FCM

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1.1.3 Optional parts
Dedicated bracket
Model number: FCM-LB1
Optional cable (9-conductor cable for analog input type)
Model number: FCM-AC1,AC3
Optional cable (15-conductor cable for parallel input type)
Model number: FCM-PC1, PC3
Shielded wire
Shielded wire

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1.2 Specifications
1.2.1 General gas model
Model no.
Descriptions
FCM-[(a)] [(b)]-[(c)] [(d)] [(e)]
Valve actuation
Proportional solenoid valve: Closed when not energized
Full-scale flow rate
AI
(Air, nitrogen)
AR
(Argon)
O2
(Oxygen)
LN
(City gas)
C1
(Methane)
C3
(Propane)
Flow rate range
Note 1
(a)
Standard differential
pressure type
9500
500 mL/min
Y
Y
Y
Y
Y
Y
0001
1 L/min
Y
Y
Y
Y
Y
Y
0002
2 L/min
Y
Y
Y
Y
Y
Y
0005
5 L/min
Y
Y
Y
Y
Y
Y
0010
10 L/min
Y
Y
Y
Y
Y
Y
0020
20 L/min
Y
Y
0050
50 L/min
Y
Y
0100
100 L/min (resin body only)
Y
Low differential
pressure type
(Stainless steel only)
L9500
500 mL/min
Y
Y
Y
Y
Y
L0001
1 L/min
Y
Y
Y
Y
Y
L0002
2 L/min
Y
Y
Y
Y
Y
L0005
5 L/min
Y
Y
Y
Y
Y
L0010
10 L/min
Y
Y
Y
Y
Y
Applicable fluid
Note 2
(b)
AI
Compressed air,
nitrogen
Y
AR
Argon
Y
O2
Oxygen (oil-prohibited
specification)
Y
LN
City gas (13A) Note 3
Y
C1
Methane (CH4 100%)
Y
C3
Propane (C3H8 100%)
Y
Port size/
body material
(c)
H6
Push-in (ø6), resin body
(excluding flow rate
ranges 50 L/min and
100 L/min)
Y
H8
Push-in (ø8), resin body
Y
8A
RC1/4, stainless steel
body
Y
Y
Y
Y
Y
Y
UF
9/16-18UNF,
stainless steel body
Y
Y
Y
Y
Y
Y
Control
Control range
3%FS to 100%FS
Response
time
(a)
9500 to 0020
Within 0.5 sec at setting ± 5%FS (TYP)
0050 to 0100
Within 1 sec at setting ± 5%FS (TYP)
Accuracy
± 3%FS or less
Repeatability
± 1%FS or less
Temperature characteristics
± 0.2%FS/°C or less (reference temperature: 25°C)
Pressure characteristics
± 1%FS or less per 98 kPa (reference: standard differential pressure)
Pressure
specification
Standard differential pressure
Refer to the separate table.
Operating differential pressure
Refer to the separate table.
Max. working pressure
Refer to the separate table.
Proof
pressure
(c)
H6/H8
490 kPa
8A/UF
980 kPa
Operating ambient temperature, humidity
0°C to 50°C, 90% RH or less (no condensation)
Note 1: Converted to volumetric flow rate at 20°C, 1 atmospheric pressure (101 kPa), and 65% RH. Full-scale is the maximum value in
the flow rate range.
Note 2: Use clean and dry gas that does not contain corrosive chemicals (such as chlorine, sulfur, or acid), dusts, and oil mists.
When using compressed air, use clean air that is in accordance with JIS B 8392-1:2012 (ISO 8573-1:2010) [1:1:1 to 1:6:2].
Compressed air from the compressor contains drainage such as oxidized oil and foreign matters. Install a filter, an air dryer
(minimum pressure dew point 10°C or less), or an oil mist filter (maximum oil concentration 0.1 mg/m3) on the primary side
(upstream) of the product.
Note 3: City gas (13A) represents a gas that is 88% methane (CH4) generated from LNG.

SM-358642-A/7 1. PRODUCT OVERVIEW
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Model no.
Descriptions
FCM-[(a)] [(b)]-[(c)] [(d)] [(e)]
Input/output
Input
signal(input
impedance)/
preset
input
(d)
0
0 VDC to 10 VDC (6.7 kΩ)/4 points (2-bit)
1
0 VDC to 5 VDC (10 kΩ)/4 points (2-bit)
2
4 mADC to 20 mADC (250 Ω)/4 points (2-bit)
P
Parallel 10-bit/none
Output
specification
(e)
AN
Analog output: 1 V to 5 V (connected load impedance 500 kΩ or more) Note 4
Error output: NPN open collector output, 50 mA or less, voltage drop 2.4 V or less
AP
Analog output: 1 V to 5 V (connected load impedance 500 kΩ or more) Note 4
Error output: PNP open collector output, 50 mA or less, voltage drop 2.4 V or less
SN
Switch output: NPN open collector output, 50 mAor less, voltage drop 2.4 V or less
Error output: NPN open collector output, 50 mA or less, voltage drop 2.4 V or less
SP
Switch output: PNP open collector output, 50 mA or less, voltage drop 2.4 V or less
Error output: PNP open collector output, 50 mA or less, voltage drop 2.4 V or less
Flow rate
display
Display method
3-digit 7-segment LED, display accuracy: control accuracy ± 1 digit
Display range and
resolution
Refer to the separate table.
Integration
Refer to the separate table.
Power
Power supply voltage
24 VDC ± 10% (stabilized power supply with ripple rate 2% or less)
Current consumption Note 5
250 mA or less
Mounting orientation
No restriction
Wetted part material
(c)
H6/H8
Polyamide resin, fluoro rubber, stainless steel, alumina, semiconductor silicon, solder
8A/UF
Stainless steel, fluoro rubber, alumina, semiconductor silicon, solder
Weight
(c)
H6/H8
Approx. 200 g
8A/UF
Approx. 480 g
Degree of protection
Equivalent to IP40 (IEC standard)
Protection circuit Note 6
Power reverse connection protection, switch output reverse connection protection,
switch output load short-circuit protection
EMC directive
EN 55011, EN 61000-6-2, EN 61000-4-2/3/4/6/8
Note 4: Output impedance for the analog output voltage is approximately 1 kΩ. If the impedance of the connected load is low, the margin
of error with the output value will increase.
Check the margin of error with the impedance of the connected load before use.
Note 5: This is the current consumption at power supply voltage of 24 VDC with no load connected and at full-scale flow rate. The
current consumption varies depending on the load connected.
Note 6: The protection circuit is only effective against the specified reverse connections and load short-circuit, and not against all
incorrect connections.

SM-358642-A/7 1. PRODUCT OVERVIEW
6 2018-11-12
Standard differential pressure type: Pressure specifications Note 7, Note 8
Flow rate range (a)
9500
0001
0002
0005
0010
0020
0050
0100
Applicable fluid (b)
AI
Standard differential
pressure (kPa)
50
100
100
100
100
150
200
300
Operating differential
pressure (kPa)
20 to 150
50 to 200
50 to 250
50 to 250
50 to 250
100 to 300
150 to 300
250 to 350
Max. working
pressure (kPa)
150
200
250
250
250
300
300
350
AR
Standard differential
pressure (kPa)
50
100
100
100
100
150
200
Operating differential
pressure (kPa)
20 to 150
50 to 200
50 to 250
50 to 250
50 to 250
100 to 300
150 to 300
Max. working
pressure (kPa)
150
200
250
250
250
300
300
O2
Standard differential
pressure (kPa)
50
100
100
100
100
Operating differential
pressure (kPa)
20 to 150
50 to 200
50 to 250
50 to 250
50 to 250
Max. working
pressure (kPa)
150
200
250
250
250
LN/C1
Standard differential
pressure (kPa)
50
50
50
50
50
Operating differential
pressure (kPa)
20 to 150
20 to 150
20 to 150
20 to 150
30 to 150
Max. working
pressure (kPa)
150
150
150
150
150
C3
Standard differential
pressure (kPa)
50
50
50
50
50
Operating differential
pressure (kPa)
20 to 150
20 to 150
20 to 150
20 to 150
30 to 150
Max. working
pressure (kPa)
150
150
150
150
150
Note 7: The standard differential pressure is the differential pressure when the product is calibrated at the factory (with the secondary
side opened to the atmosphere).
Note 8: The operating differential pressureis required to operate the product normally. It varies depending on the flowrate range and the
applicable fluid.
The minimum operating differential pressure is required to flow the full-scale flow rate with the secondary side opened to the
atmosphere.
The maximum working pressure (the maximum value of the operating differential pressure) is the maximum value of the primary
side pressure. If larger pressure is applied, the control will become unstable or the maximum flow rate will become
uncontrollable.
Low differential pressure type: Pressure specifications
Flow rate range (a)
L9500
L0001
L0002
L0005
L0010
Applicable
fluid (b)
AI/O2
LN/C1
C3
Note 9
Standard differential
pressure (kPa)
20
20
20
20
20
Operating differential
pressure (kPa)
5 to 50
5 to 50
5 to 50
5 to 50
10 to 50
Max. working
pressure (kPa)
50
50
50
50
50
Note 9: For the low pressure line (1 kPa to 2.5 kPa) of city gas, the operating differential pressure will be outside the range.
Flow rate display and integration
Flow rate range (a)
9500
L9500
0001
L0001
0002
L0002
0005
L0005
0010
L0010
0020
0050
0100
Flow rate
display
Display range
0 to 500
mL/min
0.00 to 1.00
L/min
0.00 to 2.00
L/min
0.00 to 5.00
L/min
0.0 to 10.0
L/min
0.0 to 20.0
L/min
0.0 to 50.0
L/min
0 to 100
L/min
Display resolution
1 mL/min
0.01 L/min
0.01 L/min
0.01 L/min
0.1 L/min
0.1 L/min
0.1 L/min
1 L/min
Integration
Note 10
Display range
999999 mL
9999.99 L
9999.99 L
9999.99 L
99999.9 L
99999.9 L
99999.9 L
999999 L
Display resolution
1 mL
0.01 L
0.01 L
0.01 L
0.1 L
0.1 L
0.1 L
1 L
Pulse output rate
5 mL
0.01 L
0.02 L
0.05 L
0.1 L
0.2 L
0.5 L
1 L
Note 10:The integrated flow rate is a calculated (reference) value. The value is reset when the power is turned off.

SM-358642-A/7 1. PRODUCT OVERVIEW
7 2018-11-12
1.2.2 Hydrogen/helium model
Model no.
Descriptions
FCM-[(a)] [(b)]-[(c)] [(d)] [(e)]
Valve actuation
Proportional solenoid valve: Closed when not energized
Full-scale flow rate
Hydrogen (H2)
Helium (HE)
Flow rate range Note 1
(a)
0002
2 L/min
Y
Y
0005
5 L/min
Y
Y
0010
10 L/min
Y
Y
0020
20 L/min
Y
Y
Applicable fluid Note 2
(b)
H2
Hydrogen
Y
HE
Helium
Y
Port size
(c)
8A
Rc1/4
Y
Y
UF
9/16-18UNF
Y
Y
4S
1/4-inch double bite-type fitting
Y
Y
4RM
1/4-inch JXR male fitting
Y
Y
Control
Control range
3%FS to 100%FS
Response time
Within 0.5 sec at setting ± 5%FS (TYP)
Accuracy
± 3%FS or less
Repeatability
± 1%FS or less
Temperature characteristics
± 0.2%FS/°C or less (reference temperature: 25°C)
Pressure characteristics
± 1%FS or less per 98 kPa (reference: standard differential pressure)
Pressure
specification
Standard differential pressure
Refer to the separate table.
Operating differential pressure
range
Refer to the separate table.
Max. working pressure
Refer to the separate table.
Proof pressure
980 kPa
Operating ambient temperature, humidity
0°C to 50°C, 90% RH or less (no condensation)
External leakage Note 3
1 x 10-6 Pa·m3/s (helium leakage rate) or less
Input/
output
Input signal(input
impedance)/
preset
input
(d)
0
0 VDC to 10 VDC (6.7 kΩ)/4 points (2-bit)
1
0 VDC to 5 VDC (10 kΩ)/4 points (2-bit)
2
4 mADC to 20 mADC (250 Ω)/4 points (2-bit)
P
Parallel 10-bit/none
Output
specification
(e)
AN
Analog output: 1 V to 5 V (connected load impedance 500 kΩ or more) Note 4
Error output: NPN open collector output, 50 mA or less, voltage drop 2.4 V or less
AP
Analog output: 1 V to 5 V (connected load impedance 500 kΩ or more) Note 4
Error output: PNP open collector output, 50 mA or less, voltage drop 2.4 V or less
SN
Switch output: NPN open collector output, 50 mAor less, voltage drop 2.4 V or less
Error output: NPN open collector output, 50 mA or less, voltage drop 2.4 V or less
SP
Switch output: PNP open collector output, 50 mA or less, voltage drop 2.4 V or less
Error output: PNP open collector output, 50 mA or less, voltage drop 2.4 V or less
Flow rate
display
Display method
3-digit 7-segment LED, display accuracy: control accuracy ± 1 digit
Display range and resolution
Refer to the separate table.
Integration
Refer to the separate table.
Power
Power supply voltage
24 VDC ± 10% (stabilized power supply with ripple rate 2% or less)
Current consumption
Note 5
270 mA or less
Note 1: Converted to volumetric flow rate at 20°C, 1 atmospheric pressure (101 kPa). Full-scale is the maximum value in the flow rate
range.
Note 2: Use clean and dry gas that does not contain corrosive chemicals (such as chlorine, sulfur, or acid), dusts, and oil mists.
Note 3: The internal valve of the product cannot be used as a stop valve (a valve which does not allow leakage). Leakage is allowed to
some degree for the internal valve.
Note 4: Output impedance for the analog output voltage is approximately 1 kΩ. If the impedance of the connected load is low, the margin
of error with the output value will increase.
Check the margin of error with the impedance of the connected load before use.
Note 5: This is the current consumption at power supply voltage of 24 VDC with no load connected and at full-scale flow rate. The
current consumption varies depending on the load connected.

SM-358642-A/7 1. PRODUCT OVERVIEW
8 2018-11-12
Model no.
Descriptions
FCM-[(a)] [(b)]-[(c)] [(d)] [(e)]
Mounting orientation
No restriction
Wetted part material
Stainless steel, fluoro rubber, alumina, semiconductor silicon, solder
Weight
(c)
8A/UF
Approx. 480 g
4S/4RM
Approx. 560 g
Degree of protection
Equivalent to IP40 (IEC standard)
Protection circuit Note 6
Power reverse connection protection, switch output reverse connection protection,
switch output load short-circuit protection
EMC directive
EN 55011, EN 61000-6-2, EN 61000-4-2/3/4/6/8
Note 6: The protection circuit is only effective against the specified reverse connections and load short-circuit, and not against all
incorrect connections.
Pressure specifications Note 7, Note 8
Flow rate range (a)
0002
0005
0010
0020
Applicable fluid (b)
H2
Standard differential
pressure (kPa)
20
50
50
50
Operating differential
pressure (kPa)
10 to 50
30 to 80
30 to 80
30 to 80
Max. working pressure
(kPa)
50
80
80
80
HE
Standard differential
pressure (kPa)
50
100
100
100
Operating differential
pressure (kPa)
20 to 100
50 to 150
50 to 150
100 to 150
Max. working pressure
(kPa)
100
150
150
150
Note 7: The standard differential pressure is the differential pressure when the product is calibrated at the factory (with the secondary
side opened to the atmosphere).
Note 8: The operating differential pressureis required to operate the product normally. It varies depending on the flowrate range and the
applicable fluid.
The minimum operating differential pressure is required to flow the full-scale flow rate with the secondary side opened to the
atmosphere.
The maximum working pressure (the maximum value of the operating differential pressure) is the maximum value of the primary
side pressure. If larger pressure is applied, the control will become unstable or the maximum flow rate will become
uncontrollable.
Flow rate display and integration
Flow rate range (a)
0002
0005
0010
0020
Flow rate
display
Display range
0.00 L/min to
2.00 L/min
0.00 L/min to
5.00 L/min
0.0 L/min to
10.0 L/min
0.0 L/min to
20.0 L/min
Display resolution
0.01
L/min
0.01
L/min
0.1
L/min
0.1
L/min
Integration
Note 9
Display range
9999.99 L
9999.99 L
99999.9 L
99999.9 L
Display resolution
0.01 L
0.01 L
0.1 L
0.1 L
Pulse output rate
0.02 L
0.05 L
0.1 L
0.2 L
Note 9: The integrated flow rate is a calculated (reference) value. The value is reset when the power is turned off.

SM-358642-A/7 1. PRODUCT OVERVIEW
9 2018-11-12
1.3 Dimensions
1.3.1 Resin body
Model number: FCM-□-H8/H6□
Port size: Push-in (ø8) or (ø6)
ø6 push-in fitting
or
ø8 push-in fitting
2-M3, 5 deep
2-#4-40UNC
High-density D-sub connector 15-pin/plug (male)
The panel for FCM-□-□R□is upside-down.

SM-358642-A/7 1. PRODUCT OVERVIEW
10 2018-11-12
1.3.2 Stainless steel body
Model number: FCM-□-8A/UF□
Port size: Rc1/4 or 9/16-18UNF
Rc1/4
or
9/16-18UNF
2-M3, 5 deep
2-#4-40UNC
High-density D-sub connector 15-pin/plug (male)
9/16-18UNF
The panel for FCM-□-□R□is upside-down.
9/16-18UNF
11.5 deep (effective thread)
Mesh filter

SM-358642-A/7 1. PRODUCT OVERVIEW
11 2018-11-12
Model number: FCM-□-4S
Port size: 1/4-inch double bite-type fitting
High-density D-sub connector 15-pin/plug (male)
The panel for FCM-□-□R□is upside-down.
Port size: 2-1/4 inch
Double bite-type fitting
2-M3, 5 deep
2-#4-40UNC

SM-358642-A/7 1. PRODUCT OVERVIEW
12 2018-11-12
Model number: FCM-□-4RM
Port size: 1/4-inch JXR male fitting
2-M3, 5 deep
The panel for FCM-□-□R□is upside-down.
Port size: 2-1/4 inch
JXR male fitting
2-#4-40UNC
High-density D-sub connector 15-pin/plug (male)