Edwards A528-44-404 User manual

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Instruction Manual
iQ Interface Module
I'~ EOW"ARDS
Edwards High Vacuum International
Manor Royal, Crawley, West Sussex, RH10 2LW, UK
Telephone: +44 (0)
1293528844 Fax: [phone]
http://www.edwards.boc.com
A528-44-880
Issue B
~ ~
~.
1993 1996

Safety during maintenance
A528-44-BBO
Issue A
Amendmentl
Add the following warning to the start of Section 5 (Maintenance):
Amendment 1
WARNING
If you need to open the iQ Interface Module for maintenance, support the innermodule
before
you remove its retainingscrews. If you do not, the inner module will fall and may
injure you or be damaged.
1

P600-30-370
Issue B
Amendment to
AS28-44-880
iQ Interface Module -Item Number A528-44-404
1 Introduction
This Amendment describes the details of this iQ Interface Module
2 Cards fitted
The following Interface Card is fitted in this iQ Interface Module:
• AIC (Auxiliary Interface Card).
3 Connectors
The connectors in Table Al are fitted to the interface connector panel on thisiQInterfaceModule:
Connector name/number Connector type
Figure At reference
Tool CPC I7/I6-M
1
MCM
CPC I7/I6-M
2
Gate valve
CPC I3/9-M
3
Remote EMS
9-way D.-conn.-F 4
Table Al - Connector types
Amendment 1

4
Amendment
Use of connector pins
The signals available on the connectors are shown inTables A2 to AS. Refer to the appropriate
sectionsof
thisinstruction manual forelectrical data for thesignalsavailable on theToolInterface
Card and Auxiliary Interface Card connectors and for information on the use of the signals.
Pin
Signal
Destination!
numbers
Source
1
and 2 Loadlock
pump on 24 Va.c./d.c. control input AIC, CH8 PLlO
3and4 Loadlock pump running volt-free status output
AIC, CH6 PL7
7and8
Loadlock pump not in warning volt-free status output AIC,CHSPL7
9 and 10 Loadlock pump not in alarm volt-free status output AIC,CH4 PL8
Table A2 -Tool connector signals
Pin
Signal
Destination!
numbers
Source
3and4
Loadlock pump running volt-free control input AIC, CH7 PLl4
Sand6 Loadlock pump on volt-free status output AIC,CH3PL8
7and8
Loadlock pump not in warning volt-free status output
AIC, CH6 PUS
9 and 10 Loadlock pump not in alarm volt-free status output AIC, CHS PLlS
Table A3 -MCM connector signals
Pin
Signal
Destination!
numbers
Source
1
and 2 Valve closed volt-free status
input (from valve) AIC, CH1 PLl7
3and4
Valve open volt-free status intput (from valve) AIC, CH2 PLl7
7and9 Open valve 24 V a.c. control output (to valve) AIC,CH1
PL9
Table A4 -Gate valve connector signals
Pin
Signal
Destination!
numbers
Source
1
and 2 EMS input from tool (closed in normal operation) EMO pins 1
and 2
3
and 4
EMS output to tool (closed in normal operation) EMO pins 3
and 4
Table
AS -Remote EMS connector signals
2

1. Tool connector
2. MCM connector
3. Gate valve connector
4. Remote EMS connector
Figure Al -Interface connector panel
Amendment 3

)..
~
~
~
§
-
~
NETWORK '---I
I NTERF ACE MODULE I U;r~IC I
(NET""'" LON CllHMUNICATlIlNS> <TO NEXT ",IT) <J----jf~
(F"RIJM PREY IDUS UN InC>- - - ..J I I
2 OFT 4-f'IN XLR
IQ
AIC
INTERFACE MODULE
Cpt
17I16-M
I I
I I
I I
I I
_...J L
TO EITHER
NOTE'-
IF NETWORK MODUlE
IS TO BE FInED.
CONNECT AS SHOWN.
COMMUNICATIONS
4-9IN
XL.R
r-- ....... II--ELECTRICAL SUPPLY
COMMS.
-~-L=-
4-9IN
XL.R
IQ PUMPING
SYSTEM
0000
<lOt>
,q~~ I r-lfu
RD4DTE EMS
INPUT IDUTPIJT SIGNALS
(C~ No.A53208401)
CONTROl' POSN. SIGNALS
(CABL£ No.A53208403)
L_ (IIL.TE:RNIITIYE) J PUMP DISPLAY
---- MODULE
CPCLOO
11/~
cpc lClJofM:
CM
17/~'
LOADLOCK
Q PUMP SET
INPUT/OUTPUT SIGNALS ~ Til TOOL
GATE
VALVE
Notes
1.
The Pump Display Module can be used with the
iQ pumping system on its own without extemal
communication.
2. Vacant XLR-4 pin communications connectors
must have terminator plugs fitted.
41 ELECTRICAL SUPPLY
Figure A2 -Schematic diagram of the electrical connections

iQ Interface Module -Item Number A528-44-410
P600-30-040
Issue C
Amendment to
A528-44-880
1 Introduction
This Amendment describes the details of this iQ Interface Module
2 Cards fitted
The following Interface Card is fitted in this iQ Interface Module:
• TIC (Tool Interface Card).
3 Connectors
The connector in Table Al is fitted to the interface connector panel on this iQ Interface Module:
Connector
name/number
Connector type Figure
At reference
Tool EMS]I epe 11/4-M 1
Tool EMSP2 cpe 11/4-F 2
Tool CPC I7/16-M 3
EMS
XLR-6
4
Table Al -Connector types
4 Use of connector pins
Amendment
The signals available on the connectors are shown in Table A2 and Table A4. Refer to the
appropriatesections of this instruction manual for electrical
data for the signalsavailable on the
Tool Interface Card connectors
and for information on the use of the signals.
Pin
Signal Destination!
numbers Source
1
EMS output (closed in normal operation)
EMS chain
2and3
Internal link -
4 Internal link Tool EMS P2 pin 1
Table
A2 -Tool Tool EMS Jl connector signals
1

Pin
Signal
Destination!
numbers
Source
1 Internal link Tool
EMS Jl pin 4
2and3
Internal link -
4 EMS
output (closed in normal operation)
EMS chain
Table A3 -Tool EMS P2 connector signals
Pin
Signal Destination!
numbers Source
1 and 2
Pumps on 24 V control input ,.
TIC, CH3 PL12
3and4
Pumps running volt-free status output TIC,CH3PL8
7and8 Pumps not in warning volt-free status output
TIC, CH4PL8
9 and 10
Pumps not in alarm volt-free status output
TIC,CHSPL7
11 and 12
Gas flow not in alarm volt-free status output TIC,CH6PL7
13 and 14 Final valve volt-free status output
TIC,CH7PL6
15 and 16
Pumps on volHree control input ,.
TIC, CH3 PL16
Note:" Only one type oj'pumps on' control signal may be used
Table A4 -Tool connector signals
~ o.:s-o
--
1. Tool EMS J1 connector
2. Tool EMS P2 connector
3. Tool connector
4. EMS connector
Figure Al -Interface connector panel
Amendment 2

).
~
i
~
-
w
(NETWORK LON COMMUNICATIONS)
NETWORK INTERFACE MODULE
r----,
I Nit I
<TU NEXT ..... T) <l-----n-~ 2 orr
(fROM PREVIOUS UNIT> C>- - - _...J I I
I I
NDTE,-
4-PIN XLR
iQ INTERFACE MODULE
I I
I I
I I
[f NETWORK MODULE
[S TO BE rI TTED.
CONNECT AS SHOWN.
_..J L
TO EITHER
TIC
-..--
---"--L __ -i
EMS .. TO TOOL
EMS .... TO TOOL
I
...-- .... 4III--ELECTRICAL SUPPLY
IQ PUMPING
SYSTEM
L _ -...!..AL.!~~) __ _
0000
<3
0
1>
°
Notes
1. The Pump Display Module can be used with the
iQpumping system on its own without extemal
communication.
2. Vacant XLR-4 pin communications connectors
must have terminator plugs filted.
INPUTIOUTPUT SIGNALS .... TO TOOL
Figure A2 -Schematic diagram of the electrical connections
)
O~
PUMP DISPLAY
MODULE

iQ Interface Module -Item Number A528-44-413
P600-3()"'180
IssueC
Amendment to
A528-44-880
1 Introduction
This Amendment describes the details of this iQ Interface Module
2 Mechanical data
This iQ Interface Module is larger than the standard iQ Interface Module, and its depth is
166.4
mm, not 86.5 mm as specified in the instruction manual.
The actual mass of this iQ Interface Module is specified on a rating plate
on the iQ Interface
Module.
3 Cards fitted
The foll.owing Interface Cards are fitted in this iQ Interface Module:
• TIC (Tool Interface Card)
• AIC (Auxiliary Interface Card).
4 Connectors
TheconnectorsinTable A1 arefitted to the interfaceconnectorpanelonthisiQ Interface Module:
Connector name/number
Connector type Figure
Al reference
Gate valve CPC 13/9-M 1
MCMEMO
CPC 11/4-F 2
Tool EMSJ1 CPC 11/4-M 3
Tool EMSP2 CPC 11/4-F 4
MCM CPC 17/16-M 5
Loadlock CPC 17/16-M 6
Process CPC 17/16-M 7
EMS XLR-6-M 8
Table A1 -Connector types
Amendment 1

5
Amendment
1. Gate valve connector
5. MCM connector
2. MCM EMO connector
6. Loadlock connector
3. Tool EMS J1 connector
7. Process connector
4. Tool EMS P2 connector
8. EMS connector
Figure AI - Interface connector panel
Use of connector pins
The signals available on the connectors are shown inTables A2 to AS. Refer to the appropriate
sectionsofthisinstruction
manual forelectrical data for thesignalsavailable on theToolInterface
Card and Auxiliary Interface Card connectors and for information on the use of the signals.
Pin
Signal
Destination!
numbers Source
I and 2 Valve closed volt-free status Signal from valve TIC,
CHI PL17
3and4
Valve open volt-free status signal from valve TIC, CH2 PL17
7and9
Open valve 24 V a.c. control signal to valve TIC,
CHI PL9
Table A2 -Gate valve connector signals
2

Pin
Signal
Destination!
numbers
Source
1 and 2 EMO
input from MCM (closed in normaloperation) MCM
3
and 4
Not used -
Table A3 -MCM EMO connector signals
Pin
Signal Destination!
numbers Source
1
EMS output to tool (closed in normal operation) EMS pin 3
2and3
Internal link
-
4 Internal link Tool P2 pin 1
Table A4 -Tool
EMS Jl connector signals
Pin
Signal Destination!
numbers Source
1 Internal link Tool
II pin 4
2and3
Internal link -
4
EMS output to tool (closed in normal operation)
MCMEMO pin 2
Table
AS -Tool EMS P2 connector signals
Pin
Signal Destination!
numbers
Source
3and4
Loadlock pump running signal from pump
Ale, CH7 PU4
Sand6 Loadlock pump on volt-free control signal to pump
AIC,CH3 PL8
7and8 Loadlock pump not in warning volt-free status signal AIC, CH6
PUS
from pump
9 and 10 Loadlock pump not in alarm volt-free status signal AlC, CHS
PUS
from pump
Table A6 -MCM connector signals
Amendment 3

Pin
Signal Destination!
numbers Source
1 and 2 Loadlock
pump on 24 V a.c./ d.c. control signal from tool AIC, CH8
PLIO
3 and 4 Loadlock
pump running volt-free status signal to tool AIC,CH6PL7
7and8
Loadlock pump not in warningvolt-free status signal to AIC,CH5PL7
tool
9
and 10 Loadlock
pump not in alarm volt-free status signal AIC,CH4PLB
to tool .
Table A7 -Loadlock connectorsignals
Pin
Signal Destination!
numbers
Source
1 and 2 Pumps
on 24 V a.c./d.c. control signal II-
TIC, CH3 PL12
3and4 Pumps running volt-free status signal TIC, CH3
PL8
5and6 Open valve 24 V a.c./d.c. control signal TIC, CH5
PL11
7 and 8 Pumps not in warning volt-free status signal .TIC, CH4 PL8
9 and 10 Pumps not in alarm volt-free status signal TIC,CH5PL7
11 and 12 Gas flow not in warning volt-free status signal TIC, CH6
PL7
13 and 14 Final valve volt-free status signal TIC,CH7PL6
15 and 16
Pumps on volt-free control signal ..
TIC, CH3 PL16
.. Note: only one type of 'pumps on' control signal may be used.
Table A8 -Process connectorsignals
Amendment
4

)..
::I
~
l:l..
::I
"'
;:!
....
(JJ
---I
r NIC I 2
NETWORK INTEERFACE ~r- iljV
MODUL I, f'r
_-I I I I
OfT 4-PIN XLR
NIT) <J- - - ...J I I
(TO NEXT U S UNIT) C>- _ I I
<FROM PREVIOU I I
(NETWORK LON COMMUNICATIONS)
NOTE,-
.--- ...... ---ELECTRICAL SUPPLY
iQ INTERFACE MODULE
~ s-4-PIN
1--XLR
I I
..J L
TO EITHER
IF NETWORK MODULE
IS TO BE FITTED.
CONNECT AS SHOWN.
CDMHUN I tA TJ OMS
XLR CIMIS.
4_Pl
r
4-PIN
XLR IQ PUMPING
SYSTEM
TIC
-~--L~~-
(CABLE No.A53208402)
INPUT/OUTPUT SIGNALS
(CABLE No.A53208401)
CONTROL ~ POSITION
SIGNALS
(CABLE No.A5320840l1
VI'> ~ TO TDOL
~HS .ro TOOL
EMS
EHO
6-Pt] EMS
L-j XLII I I
L ___ (~~T.!Y~ ____ J
CPCl........t!n
11/~
MCM
CP~ COHMS.
17/16
0000
<l~!>
Os
PUMP DISPLAY
MODULE
LDADLOCK
Q PUMPSET
PROCESS PUMP
I INPUT/OUTPUT SIGNALS ~ TO TDOL
GATE
VALVE
'--- .... ~--ELECTRICAL SUPPLY
LOADLDCK PUMP
INPuT/OUTPUT SIGNALS ~ TO TOOL
Notes
t.
The Pump Display Module can be used with the
iQ pumping system on its own without external
communication.
2. Vacant XLR-4 pin communications connectors
must have terminator plugs filted. Figure A2 -Schematic
diagram of the electrical connections

P600-30-060
Issue B
Amendment to
AS28-44-880
iQ Interface Module -Item Number A528-44-420
1 Introduction
This Amendment describes the details of this iQ Interface Module
2 Cards fitted
The following Interface Card is fitted in this iQ Interface Module:
• TIC (Tool Interface Card).
3 Connectors
The connector in Table At is fitted to the interface connector panel on this iQ Interface Module:
Connector name/number
Connector type
Figure At reference
SK3Tool HANt6-F t
SK4 Tool STAF6-F 2
Table At -Connector types
$-(EMSTOOL(
1. SK3 Tool
2. SK4 Tool
Figure At -Interface connector panel
Amendment
1

4 Use of connector pins
Amendment
The signals available on the connectors are shown in Tables A2 and A3. Refer to the appropriate
sections of this instruction manual forelectrical data for the signalsavailable on the ToolInterface
Card connectors and for information on the use of the signals.
Pin
Signal
Destination!
numbers Source
1 and 2 EMS
output (closed in normal operation)
EMS connector
3 and 4 iQDP pump on volt-free control input
TIC, CHI PL17
5 and 6 iQDP pump running volt-free status output TIC,CHI PL9
7and8 iQMB pump on volt-free control input TIC, CH2 PL17
9 and 10 iQMB
pump running volt-free status output
TIC,CH2PL9
11 and 12 Pumps not in warning volt-free status output TIC,CH4PLB
13 and 14 Pumps not in alarm volt-free status output
TIC,CH5PL7
15 and 16 External EMS input ( closed in normal operation)
EMS connector
Table A2 -SK3 Tool connector signals
Pin
Signal
Destination!
numbers
Source
1 and 2 Gas flow not in warning volt-free status output
TIC,CH6PL7
3and4 24 V a.c. output
-
Table A3 -SK4 Tool connector signals
2

).
l
§
...
w
(NETWORK LON COHMUNICATIONS>
NETWORK INTERrACE MODULE
r----,
I Nit I
(TO NEXT UNIT> <J-----n-~ 2
OFF 4-PIN XLR
(FROM PREVIOUS UNIT> C>- - - _.J I I
I I
NOTE'- .. ELECTRICAL SUPPLY
IQ INTERFACE MODULE
rl:b I·-PIN
XLR
TIC
L-- .... --II~~e:~~A
Notes
1. The Pump Display Module can be used with the
iQ pumping system on its own without eKlemal
communication.
2.
I I
I I
I I
_...1 L
TO EITHER
IF NETWORK HODULE
IS TO BE F"I TTED,
CONNECT AS SHOWN.
----.--T--...--
L ___
j
INPUT/OUTPUT SIGNALS ~ TO TOOL
t
.-Pl
r
xu CIJIoItS •
.-PIN
XU IQ PUMP I NG
6-PrJ EMS
lIlR
SYSTEM
0000
INPUT /OUTPUT SIGNALS. TO TOOL
L ___ (_AL.!~~) __ _
<l~r>
O~
PUMP DISPLAY MODULE
Vacant XlR-4 pin communications connectors
must have terminator plugs lined. Figure A2 -Schematic
diagram of the electrical connections

P600~3()"()10
IssueC
Amendment to
A528-44-880
iQ Interface Module -Item Number A528-44-430
1 Inuoduction
This Amendment describes the details of this iQ Interface Module
2 Cards fitted
The following Interface Card is fitted in this iQ Interface Module:
• TIC (Tool Interface Card).
3 Connectors
The connector in Table A1 is fitted to the interface connector panel on this iQ Interface Module:
Connector name/number Connector type
Figure At reference
Tool
CPC 17/16-M
1
Tool EMS
CPC 1I/4-M
2
Table Al - Connector types
1. Tool
2. Tool EMS
Figure Al -Interface connector panel
Amendment 1

4 Use of connector pins
Amendment
The signals available on the connectors are shown in Table A2 and Table A3. Refer to the
appropriatesections
of thisinstructionmanualfor electricaldata for the signalsavailable on the
Tool Interface Card connectors
and for information on the use of the signals.
Pin
Signal Destination!
numbers
Source
1and2
Both pumps on 24 Vcontrol input TIC, CH3 PLl2
3and4
Pumps running volt~free status output TIC,CH3PLB
Sand6
Both pumps on volt-free control input
TIC, CH3 PL16
7 and 8 Pumps not in warning volt-free status
output TIC,CH4PLB
9 and 10 Pumps not in alarm volt-free status output TIC, CH5 PL7
11 and 12 Gas flow
not in warningvolt-free status output TIC,CH6PL7
Table A2 -Tool connector signals
Pin
Signal Destination!
numbers
Source
1 and 2 EMO output
(N/C)
Tool
3
and 4 Not connected -
Table A3 -Tool EMO connectorsignals
2