Inficon VGC083A User manual

Operating Manual
Incl. EU Declaration of Conformity
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Vacuum Gauge Controller
VGC083A, VGC083B

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In all communications with INFICON, please specify the information on the product
nameplate:
This document applies to products with part numbers:
399-700 (VGC083A, use with BAG050 or BAG055 and PGEG050)
399-701 (VGC083B, use with BAG051 or BAG052/053 and PEG050)
The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this document
correspond to the unit VGC083A.They apply to the VGC083B by analogy.
We reserve the right to make technical changes without prior notice.
All dimensions are indicated in mm.
There are operational characteristic differences between solid state equipment and
electromechanical equipment. Because of these differences, and because there
are a variety of uses for solid state equipment, all persons that apply this equip-
ment must take every precaution and satisfy themselves that the intended appli-
cation of this equipment is safe and used in an acceptable manner.
In no event will INFICON be responsible or liable for indirect or consequential
damages that result from the use or application of this equipment.
Any examples or diagrams included in this manual are provided solely for illustra-
tive purposes. Because of the many variables and requirements imposed on any
particular installation, INFICON cannot assume responsibility or liability for any
actual use based on the examples and diagrams.
No patent liability is assumed by INFICON with respect to use of information cir-
cuits, equipment, or software described in this manual.
Throughout this manual we use notes, notices and apply internationally recognized
symbols and safety messages to make you aware of safety considerations.
Identifies information about practices or circumstances that can cause electrical or
physical hazards which, if precautions are not taken, could result in death or
serious injury, property damage, or economic loss.
Identifies information about practices or circumstances that can cause electrical or
physical hazards which, if precautions are not taken, could result in minor or
moderate injury, property damage, or economic loss.
Product Identification
Validity
Important User Information
CAUTION

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Identifies information that is critical for successful application and understanding of
the product.
Labels may be located on or inside the device to alert people that dangerous
voltages may be present.
INFICON assumes no liability and the warranty is rendered null and void if the end-
user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of interventions (modifications, alterations etc.) on the product
•use the product with accessories not listed in the corresponding product docu-
mentation.
Liability and Warranty
NOTICE
SHOCK HAZARD

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Contents
Product Identification 2
Validity 2
Important User Information 2
Liability and Warranty 3
1Introduction / General Information 6
1.1 VGC083A 6
1.2 VGC083B 7
2Technical Data 8
3Important Safety Information 11
3.1 Safety Precautions - General 11
3.2 Safety Precautions - Service and Operation 11
3.3 Electrical Conditions 13
3.3.1 Proper Equipment Grounding 13
3.3.2 Electrical Interface and Control 13
3.4 Overpressure and use with hazardous gases 13
3.5 Gases other than Nitrogen / air 14
4Installation 15
4.1 Mechanical Installation - Controller 15
4.1.1 Panel Mount 15
4.1.2 Rack Mount 15
4.1.3 Mechanical Installation - Ionization Gauge 17
4.1.4 Mechanical Installation - Convection Gauge 17
4.2 Electrical Installation 18
4.2.1 Grounding 18
4.2.2 Installation 19
4.2.3 Connecting the Ionization Gauge Cable 19
4.2.3.1 Standard Nude, Glass and Mini IG Cables 20
4.2.3.2 Bakeable Nude IG Cable 21
4.2.3.3 Standard nude IG Cable Connector Pin Out 22
4.2.4 Connecting the PGE050 - connectors labeled "2" and "3" 23
4.2.5 Power Connection 24
4.2.6 Relay Connection 24
4.2.7 Analog Output Connection 24
4.2.8 Analog Input Connection (Capacitance Diaphragm Gauges, etc.) 24
4.2.9 Digital I/O Connection 25
4.2.10 RS232 / RS485 Serial Communications Connection 26
5Operation - IG and CG 28
5.1 IG Emission Current 28
5.2 IG Degas 28
5.3 IG Filament Material Selection / Venting the Chamber 28
5.4 IG Over Pressure Shut Down 29
5.5 IG Over Temperature Shut Down 30
5.6 Convection Gauge (CG) Initial Setup 30
6Setup and programming 31
6.1 Applying Power 31
6.2 Front Panel Display 31
6.3 User Interface Basics 32
6.4 Factory-Set Default Parameters 32
6.5 Programming 34
6.5.1 SETUP UNIT 35
6.5.2 ION GAUGE 36
6.5.3 CONVEC GAUGE 41
6.5.4 RELAYS 42
6.5.5 Analog Output 44
6.5.6 SERIAL COMM 49
6.5.7 DISPLAY 49

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7Analog Output Charts & Equations (Nitrogen/Air Only) 51
7.1 Analog Output wide range measurement for IG - CG1 0.5 - 7V
(Nitrogen / Air only) 51
7.2 Analog Output for IG LOG N - 10 (Nitrogen / Air only) 52
7.3 Analog Output for IG LOG N - 11 (Nitrogen / Air only) 53
7.4 Analog Output for IG LOG N - 12 (Nitrogen / Air only) 54
7.5 Analog Output for IG 1.8 - 8.7 V (Nitrogen / Air only) 55
7.6 Analog Output for IG LINEAR (Nitrogen / Air only) 56
7.7 Analog Output for CG1 or CG2 1 - 8 V (Nitrogen / Air only) 56
7.8 Analog Output for CG1 or CG2 0 - 7 V (Nitrogen / Air only) 58
7.9 Analog Output for CG1 or CG2 NON - LIN (Nitrogen / Air only) 59
7.10 Analog Output for CG1 or CG2 LINEAR (Nitrogen / Air only) 61
8Using the Gauge with Different Gases 62
8.1 Ion Gauge Display Correction Factors for Selected Gases 62
8.2 Effects of Different Gases on Convection Gauge Display 63
8.3 Effects of Different Gases on Analog Output 66
8.3.1 Ion Gauge Analog Output Correction Factors for Selected Gases 66
8.3.2 IG - CG1 0.5 - 7V Analog Output Correction Factors for Selected Gases 66
8.3.2.1 IG-CG1 0.5 - 7V Analog Output Correction Factors - Ion Gauge Range 66
8.3.2.2 IG-CG1 0.5 - 7V Analog Output Correction Factors - Convection
Gauge Range 68
8.3.3 Convection gauge analog output for selected gases 68
8.3.3.1 CG1 1 - 8 V or CG2 1 - 8 V Analog Output Correction Factors -
Convection Gauge 69
8.3.3.2 CG1 0 - 7 V or CG2 0 - 7 V Analog Output Correction Factors -
Convection Gauge 70
8.3.3.3 CG1 NON-LIN or CG2 NON-LIN Analog Output Correction Factors -
Convection Gauge 71
9Communication Protocol (Serial Interface) 72
9.1 Device Specific Serial Communication Info 72
9.2 INFICON RS232 / RS485 Command Protocol Summary 72
9.3 INFICON RS232 and RS485 Command Protocol Summary 73
9.4 RS232 GP 307 and 358 Protocol 77
9.5 RS485 GP 307 and 358 Protocol 78
9.6 RS232 and RS485 GP 350 Protocol 79
10 Service 81
10.1 Calibration 81
10.2 Troubleshooting - IG Operation 81
10.3 Troubleshooting - IG Error Messages 82
10.4 Clearing Error Messages - IG 82
10.5 Research Screen 82
10.5.1 Research Screen (Diagnostic Display - IG) 82
10.6 Maintenance 84
11 Repair 85
12 Accessories 85
13 Storage 86
14 Disposal 86
EU Declaration of Conformity 87
For cross-references within this document, the symbol (→XY) is used; for cross-
references to further documents listed under ‘Literature’, use is made of the symbol
(→[Z]).

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1 Introduction / General Information
The Vacuum Gauge Controller VGC083A is a vacuum pressure measurement
system which is comprised of the following:
•The VGC083A Vacuum Gauge Controller
•One INFICON BAG050 nude UHV EB-degas Bayard-Alpert hot cathode
ionization gauge (IG) or other brands of nude UHV EB-degas B-A gauges or
INFICON BA055 Bayard-Alpert hot cathode Mini IG
•One or two INFICON PGE050 convection enhanced pirani heads1)
•Cables to interconnect the VGC083A and point-of-use devices
1) The VGC083A will also operate the Granville-Phillips®Convectron®convection enhanced pirani
vacuum gauge head.
Typical components of the complete vacuum measurement system are shown in
the figure below. The VGC083A provides power and operating control for the
BAG050 / 055 hot ion gauge head (IG). Additionally, it provides power and
operating control for up to two enhanced convection gauges (CG).
VGC083A Vacuum Gauge
Controller
or
BAG050 Nude Ion Gauge
or
BAG055 Mini Ion Gauge
PGE050 Convection Gauges
1 & 2 (CVG 1 & 2)
The VGC083A, a controller unit capable of controlling multiple gauge heads, is
either rack or instrument panel mountable. Optional industry standard 19-inch, 2U
high rack-mount panels are available to mount the unit into rack enclosures. For
important information about the PGE050 convection gauge please refer to the
PGE050 Operating Manual. Read the Operating Manuals in their entirety for any
device you intend to connect to the VGC083A prior to connecting and using the
external devices and cables that the VGC083A is intended to be used with.
1.1 VGC083A
Typical Components of the
complete Vacuum Pressure
Measurement System

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The Vacuum Gauge Controller VGC083B is a vacuum pressure measurement
system which is comprised of the following:
•The VGC083B Vacuum Gauge Controller
•One INFICON BAG051 nude or BAG052 / 053 glass I2R Bayard-Alpert hot
cathode ionization gauge or other equivalent brands of I2R glass/nude B-A
gauges
•One or two INFICON PGE050 convection enhanced pirani heads1)
•Cables to interconnect the VGC083B and point-of-use devices
1) The VGC083B will also operate the Granville-Phillips®Convectron®convection enhanced pirani
vacuum gauge head.
Typical components of the complete vacuum measurement system are shown in
the figure below. The VGC083B provides power and operating control for either the
BAG051 or BAG052 / 053 ion gauge heads (IG). Additionally, it provides power
and operating control for up to two enhanced convection gauges (CG).
VGC083B Vacuum Gauge
Controller
or
BAG051 Nude Ion Gauge
or
BAG052 / 053 Glass Ion
Gauge
PGE050 Convection Gauges
1 & 2 (CVG 1 & 2)
The VGC083B, a controller unit capable of controlling multiple gauge heads, is
either rack or instrument panel mountable. Optional industry standard 19-inch, 2U
high rack-mount panels are available to mount the unit into rack enclosures. For
important information about the PGE050 convection gauge please refer to the
PGE050 Operating Manual. Read the Operating Manuals in their entirety for any
device you intend to connect to the VGC083B prior to connecting and using the
external devices and cables that the VGC083B is intended to be used with.
1.2 VGC083B
Typical Components of the
complete Vacuum Pressure
Measurement System

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2 Technical Data
VGC083A
with BAG050
with BAG055
with PGE050
2×10-11 … 1×10-3 Torr
1×10-9 … 5×10-2 Torr
1×10
-4
… 1000 Torr
VGC083B
with BAG051 or BAG052/053
with PGE050
4×10-10 … 1×10-3 Torr
1×10
-4
… 1000 Torr
Units of measurement
Torr, mbar, Pa (user selectable)
Pressure indication LED - 3 independent pressure display
channels, 3 digit plus 2 digit exponent per
channel
Set-up & programming screen OLED - displays state of all setpoint relays, IG
emission current, error messages for fault
conditions
VGC083A
(IG) powers & operates one INFICON BAG050
nude UHV EB-Degas B-A hot cathode or other
equivalent brands or INFICON BAG055 Mini IG
, (CG) powers & operates up to 2 INFICON PGE050
convection or Granville-Phillips®(GP)
Convectron
®
VGC083B
(IG) powers & operates one BAG051 or BAG052 /
053 or other equivalent brands of glass or nude
I
2
R B-A hot cathode
, (CG) powers & operates up to 2 INFICON PGE050
convection or Granville-Phillips®(GP)
Convectron
®
IG sensor on/off, degas on/off and emission current can all be controlled via front
panel soft-keys, remote input signals (digital I/O) or serial communications. IG sen-
sor can also be automatically turned on/off using measurements from one of the
user selectable convection or alternate gauges.
IG sensor on/off, degas on/off and emission current can also be set by applying
momentary continuity to ground. Also the 9-pin D-sub remote input DIGITAL I/O
connector provides pin-pin compatible signals with the GP 358 controller as well as
compatible signals with the GP 307.
Number 6
single-pole, double-throw (SPDT), user as-
signable to any of the gauges
Contact rating 5 A at 30 V (dc), 5 A at 250 V (ac), resistive
load
Measurement range
Display
Functionality
IG sensor control
IG remote input signals
(digital I/O)
Setpoint relays

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IG analog output
Log-linear 0 … 10 V (dc), 1 V/decade, or
1.7 … 9.3 V (dc) (nominal 1.8 … 8.7 V (dc)),
0.8 V/decade
Linear
0 … 10 V (dc) (useable over 3 decades)
Combination IG + CG analog
Log-linear
0.5 … 7 V (dc), 0.5 V/decade
CG analog output
Log-linear 1 … 8 V (dc), 1 V/decade, or
0 … 7 V (dc), 1 V/decade
Linear
0 … 10 V (dc) (useable over 3 decades)
Non-linear analog S-curve
0.375 … 5.659 V (dc)
CDG one 0 … 10 V (dc) analog input signal from a
CDG when used as an alternate gauge to CG2,
or analog input from one of the following
INFICON modules: PGE300, PGE500,
BAG302
Protocol
RS485 / RS232 - ASCII protocol
IG sensor on/off status message is displayed on the front panel, by serial commu-
nications and by SPDT relay (DIGITAL I/O Connector) rated at 1 A at 30 V (dc)
resistive, or 1 A at 30 V (ac) non-inductive.
IG degas on/off status or IG error conditions are displayed on the front panel, by
serial communications and by an open collector transistor output (ground emitter)
rated at 40 V max. VCE, 50 mA IC max.
IG filament switching User selectable between filament 1 or 2 using
the front panel soft-keys or RS232 / RS485
serial comm
IG emission current
BAG050 / 051 / 052 / 053 100 μA, 4 mA, 10 mA automatic switching of
emission current (auto ranging)
BAG055 100 μA, 4 mA or automatic switching of
emission current (auto ranging)
IG degas
VGC083A with BAG050
VGC083A with BAG055
VGC083B with BAG051 /
052 / 053
40 W, electron bombardment
3 W, electron bombardment
40 W, resistive
IG overpressure protection
BAG050 / 051 / 052 / 053
Ion gauge turns off at the following default
settings:
1 × 10-3 Torr at 100 μA emission current
5 × 10-4 Torr at 4 mA emission current
1 × 10
-4
Torr at 10 mA emission current
BAG055 Mini IG 5 × 10-2 Torr at 100 μA emission current
1 × 10
-3
Torr at 4 mA emission current
Analog output
Analog input
Serial communications
Status output
IG (Ionization Gauge)

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Temperature
Operation
Storage
0 … +40 °C
–40 … +50 °C
Relative humidity
0 … 95, non-condensing
Altitude
Operating
Storage
max. 2500 m (8200 ft.)
max. 12500 m (41000 ft.)
Pollution degree
II
Degree of protection
IP20
Housing
aluminum extrusion - black powder paint finish
Voltage
Used with BAG050 / 051,
BAG052 / 53 20 … 28 V (dc), 200 W protected against
power reversal and transient over-voltages
Used with BAG055 20 … 28 V (dc), 36 W protected against power
reversal and transient over-voltages
Connectors
IG & CG
Digital I/O
Serial communications
RS232
RS485
analog I/O, setpoint relays,
power
gauge cable assemblies provided by INFICON
9-pin D-sub male
9-pin D-sub female
9-pin D-sub male
pluggable terminal block (mating connectors
included)
mm (inch)
0.7 kg (1.7 lb.)
Ambience
Housing
Mains specifications
Dimensions
VGC083A, VGC083B
Weight
VGC083A, VGC083B

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3 Important Safety Information
INFICON has designed and tested this product to provide safe and reliable service,
provided it is installed and operated within the strict safety guidelines provided in
this manual. Please read and follow all warnings and instructions.
To avoid serious injury or death, follow the safety information in this docu-
ment. Failure to comply with these safety procedures could result in serious
bodily harm, including death, and or property damage.
Failure to comply with these warnings violates the safety standards of installation
and intended use of this instrument. INFICON disclaims all liability for the cus-
tomer's failure to comply with these instructions.
Although every attempt has been made to consider most possible installations,
INFICON cannot anticipate every contingency that arises from various installations,
operation, or maintenance of the instrument. If you have any questions about the
safe installation and use of this product, please contact INFICON.
This device meets FCC part 15 requirements for an unintentional radiator, class A.
Hazardous voltages are present with this product during normal operation. The
product should never be operated with the covers removed unless equivalent pro-
tection of the operator from accidental contact with hazardous internal voltages is
provided.
WARNING! There are no operator serviceable parts or adjustments inside
the product enclosure. Refer servicing to service trained personnel.
Do not modify this product or substitute any parts without authorization of qualified
INFICON service trained personnel. Return the product to an INFICON qualified
service and repair center to ensure that all safety features are maintained. Do not
use this product if unauthorized modifications have been made.
WARNING! Source power must be removed from the product prior to
performing any servicing.
After servicing this product, ensure that all safety checks are made by a qualified
service person. When replacement parts are required, ensure that the parts are
specified by INFICON Substitutions of non-qualified parts may result in fire, electric
shock or other hazards. Use of unauthorized parts or modifications made to this
product will void the warranty.
To reduce the risk of fire or electric shock, do not expose this product to rain or
moisture. These products are not waterproof and careful attention must be paid to
not spill any type of liquid onto these products. Do not use these products if they
have been damaged. Immediately contact INFICON to arrange return of the pro-
duct if it is damaged.
Due to the possibility of corrosion when used in certain environmental conditions, it
is possible that the product’s safety could be compromised over time. It is important
that the product be periodically inspected for sound electrical connections and
equipment grounding. Do not use if the equipment grounding or electrical insulation
has been compromised.
Ensure the enclosure of the unit is connected directly to a good quality earth
ground.
Ensure that the vacuum port on which the vacuum gauge sensors are mounted is
electrically grounded.
When using the BAG050 / 051 / 052 / 053 use a power source of 20 … 28 V (dc),
200 W or use INFIOCN series optional power supplies.
3.1 Safety Precautions -
General
3.2 Safety Precautions -
Service and Operation
WARNING

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When using the BAG055 Mini IG use a power source of 20 … 28 V (dc), 36 W or
use INFIOCN series optional power supplies.
Turn off power to the unit before attempting to service the controller.
Turn off power to the unit if a cable or plug is damaged or the product is not operat-
ing normally according to this instruction manual. Contact qualified INFICON ser-
vice personnel for any service or troubleshooting condition that may not be covered
by this operating manual.
It is important that the product be periodically inspected for sound electrical con-
nections and equipment grounding. Do not use if the equipment grounding or
electrical insulation has been compromised.
Do not use if the unit has been dropped or the enclosure has been damaged.
Contact INFICON for return authorization and instructions for returning the product
to INFICON for evaluation.
When using the BAG050 / 051 / 052 / 053 if measured pressure exceeds the
thresholds that are defined under the following conditions, the ion gauge will turn
off:
•The pressure exceeds 1.00 × 10-3 Torr at 100 μA emission current.
•The pressure exceeds 5.00 × 10-4 Torr at 4 mA emission current.
•The pressure exceeds 1.00 × 10-4 Torr at 10 mA emission current.
When using the BAG055 Mini IG if measured pressure exceeds the thresholds that
are defined under the following conditions, the ion gauge will turn off:
•The pressure exceeds 5.00 × 10-2 Torr at 100 μA emission current.
•The pressure exceeds 1.00 × 10-3 Torr at 4 mA emission current.
During the Degas cycle, if the measured pressure exceeds 1.00 × 10-4 Torr when
using the BAG050 / 051 / 052 / 053, or if the measured pressure exceeds
4.00 × 10-3 Torr when using the BAG055, Degas will turn off but the filament will
remain turned on.
Ensure vacuum level is less than 5.00 x 10-5 Torr before attempting to initiate
Degas of the BAG05x series ionization gauge heads.
Do not attempt to turn the IG on if the pressure is near the threshold limits defined
here.
Never use an auxiliary or convection gauge to automatically turn off the Ion Gauge
when the Ion Gauge filament in use is constructed of tungsten. The response time
of other gauges may not allow for timely turn off of the tungsten filament possibly
leading to filament damage. Always turn off the IG filament (tungsten) manually
before pressure is allowed to rise above 1.00E-03 (1.00 × 10-3) Torr.
If you are using dual filament IGs, it is highly recommended to periodically alternate
operating the ion gauge filaments 1 and 2. An inactive filament not operating for an
extended period of time may result in failure of that filament to establish and main-
tain emission current in applications where the filament coating may become conta-
minated by residual application or process related chemistries.
The most common cause of all vacuum gauge failures is contamination of the sen-
sor or head electrodes. Noisy or erratic readings and total gauge head failures are
all possible indications of gauge contamination. Contamination can generally be
characterized as either: A) a chemical reaction of process gases with head / sensor
electrodes, or B) an accumulation of material on the head (sensor) electrodes.
Sensors that fail due to contamination are not covered under warranty.
After servicing these products, ensure that all safety checks are made by a quali-
fied service person
NOTICE

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WARNING! When high voltage is present in any vacuum system, a life threat-
ening electrical shock hazard may exist unless all exposed electrical conductors
are maintained at earth ground potential. This applies to all products that come in
contact with the gas contained in vacuum chambers. An electrical discharge within
a gaseous environment may couple dangerous high voltage directly to any un-
grounded conductor of electricity. A person could be seriously injured or killed by
coming in contact with an exposed, ungrounded electrical conductor at high vol-
tage potential. This condition applies to all products that may come in contact with
the gas inside the vacuum chamber (vacuum/pressure containment vessel).
WARNING! Hazardous voltages that could seriously injure or cause death are
present in many vacuum processes. Verify that the vacuum connection ports on
which the ion gauge and the convection gauges are mounted are electrically
grounded. Consult a qualified Electrician if you are in doubt about your equipment
grounding. Proper grounding of your equipment is essential for safety as well as
intended operation of the equipment. The vacuum gauge heads and enclosure of
any control module must be connected directly to a good quality equipment
earthing conductor. Use a ground lug on the vacuum connection flange of the
pressure measurement devices if necessary.
WARNING! In order to protect personnel from electric shock and bodily
harm, shield all conductors which are subject to potential high voltage elec-
trical discharges in or around the vacuum system.
It is the user’s responsibility to ensure that the electrical signals from this product
and any connections made to external devices, for example, relays and solenoids,
are used in a safe manner. Always double check the system set-up before using
any signals to automate your process. Perform a hazardous operation analysis of
your system design and ensure safeguards and personnel safety measures are
taken to prevent injury and property damage.
WARNING! Install suitable protective devices that will limit the level of
pressure inside your vacuum chamber to less than what the vacuum chamber
system components are capable of withstanding.
In cases where an equipment failure could cause a hazardous condition, always
implement fail-safe system operation. For example, use a pressure relief device in
an automatic backfill operation where a malfunction could result in high internal
pressures if the pressure relief device was not installed on the chamber.
The vacuum gauge heads used with this product are not intended for use at
pressures above 20 psia (1000 Torr); DO NOT exceed 35 psig (< 2 ½ bars) pres-
sure inside the sensor. If your chamber goes to higher pressures, you should install
an isolation valve or pressure relief device to protect the gauge tube from overpres-
sure conditions. With some fittings, actual safe overpressure conditions may be
lower; for example, a quick-connect, O-ring compression fitting may forcibly release
the gauge tube from the vacuum chamber fitting with only a few psi over local un-
corrected barometric (atmospheric) pressure.
CAUTION! If the internal pressure of a vacuum gauge device is allowed
to increase above local uncorrected barometric pressure (atmospheric pres-
sure side), vacuum fittings may release and possible overpressure conditions
may cause leaks that would allow the gas inside the gauge tube to release
into the atmosphere of the surrounding environment. Toxic, pyrophoric and
flammable gases are examples of hazardous gases that if allowed to leak out
of the vacuum/pressure containment vessel into the atmospheric environ-
ment, could cause bodily injury and possible damage to equipment. Never
expose the gauge tube internal volume to pressure above local atmospheric
pressure when using hazardous gases.
3.3 Electrical Conditions
3.3.1 Proper Equipment
Grounding
3.3.2 Electrical Interface and
Control
3.4 Overpressure and use
with hazardous gases

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WARNING! Do not attempt to use with gases other than nitrogen (N2) or air
without referring to correction factor data tables.
INFICON gauges and modules are calibrated for direct readout of nitrogen or air.
Do not attempt to use with other gases such as argon (Ar) or carbon dioxide (CO2)
unless you have applied correction factors to both the displayed pressure and the
analog output to determine the true measured pressure. This is particularly critical
when using convection gauges to measure pressure of gases other than N2/Air.
WARNING! Do not use the IG in an explosive atmosphere or in the presence
of flammable gases, vapors or fumes. Do not use the IG to measure the pressure
of explosive or combustible gases or gas mixtures. The sensor filaments operate at
incandescent temperatures and could become an ignition source. This could cause
an explosion which could result in serious injury or death.
WARNING! Do not use the PGE050 in an explosive atmosphere or in the pre-
sence of flammable gases, vapors or fumes. Do not use the PGE050 to measure
the pressure of explosive or combustible gases or gas mixtures. The sensor wire in
the gauge normally operates at 125 °C, but if malfunction should occur, the wire
temperature could exceed the ignition temperature of certain combustible gases
and gas mixture. This could cause an explosion which could result in serious injury
or death.
3.5 Gases other than
Nitrogen / air

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4 Installation
The unit is intended for indoor use only. The unit is offered as a space saving half
rack design. It may also be used as a bench top device or easily installed in an
instrument panel. Optional EIA-standard rack mount panels are available for either
full rack or dual, side-by-side rack mount installation. When mounting multiple units
in your rack mount enclosure or mounting the unit below other electronic equip-
ment in your rack, allow at least 1U of space (1.75 in., 45 mm) between the units to
ensure adequate ventilation.
Make a cutout in your rack panel or instrument control panel as shown in
the drawing below. Be sure to allow clearance behind the panel for the in-
strument as well as connectors and cables at the back of the instrument.
Optional EIA-standard, 19-inch, 2U height rack mount panels are available
from INFICON. The optional rack mount panels are provided with panel cut-
outs and mounting holes to allow efficient mounting of your VGC083 unit.
Drill four guide holes on each side of the panel cut out (two on each side)
with dimensions as shown in the panel cut-out drawing above.
Slide the unit into the panel hole cut-out. Guide the four studs on the back of
the unit front panel face plate thru the four holes next to the panel cut-out.
Use four # 10-32 Hex Nut (provided with instrument) to tighten the unit to
the panel.
Optional EIA-standard 19-inch wide, 2U height rack mount panels available from
INFICON (→85):
4.1 Mechanical Installation -
Controller
4.1.1 Panel Mount
Procedure
4.1.2 Rack Mount

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All dimensions in inches.
All dimensions in inches.
The single cut-out and dual cut-out rack mountable panels shown above are availa-
ble from INFICON. Panel color matches the front panel of VGC083 units. Screws
for mounting to rack enclosure are included.
Single cut-out panel
Single cut-out panel

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or
The VGC083A can operate one INFICON BAG050
nude UHV EB-degas Bayard-Alpert hot cathode
ionization gauge or other brands of equivalent nude
UHV EB-degas B-A gauges or or INFICON BAG055
Mini IG.
or
BAG051 BAG052, BAG053
The VGC083B can operate
one INFICON BAG051 nude
or one BAG052/053 glass
enclosed I2R Bayard-Alpert
hot cathode ionization gauge
or other brands of equivalent
gauges.
Mount the ionization gauge as close as possible to the pressure you want to meas-
ure. Long or restricted, small diameter tubing will create a pressure difference bet-
ween your process chamber and the gauge. This may cause a delay in response to
pressure changes. Mounting the ionization gauge too close to a gas source inlet
may also cause measurement and control instability.
The ionization gauge can be mounted in any orientation, however, if possible,
mount the gauge with port down to help minimize the effect of any particles or
condensation collecting in the gauge.
Do not mount the ionization gauge where it will be subjected to excessive vibration.
Vibrations may cause unstable readings, measurement errors and possible me-
chanical stress to components in the ionization gauge.
Shield the ionization gauge near ion or electron sources such as an electron beam
or in a sputtering system.
For electrical safety purposes the housing of the gauge must be grounded to the
vacuum chamber. When using KF flanges, metal clamps must be used to ensure
proper grounding. Do not attempt to modify your flange in order to use non-metal-
lic-type flange clamps.
Fittings/Flanges - follow the fitting/flange manufacturer's recommendations for
installation and use.
Use all metal vacuum fittings with metal seals when operating pressures are ex-
pected to be below 1.00 × 10-7 Torr (1.33 × 10-7 mbar, 1.33 × 10-5 Pa).
For more detailed information about the PGE050 convection gauge, please refer to
the Operating Manual for the PGE050.
Mount the PGE050as close as possible to the pressure you want to measure. Long
or restricted, small diameter tubing will create a pressure difference between your
process chamber and the gauge. This may cause a delay in response to pressure
changes.
Mounting the PGE050too close to a gas source inlet may also cause measurement
and control instability. Do not mount the PGE050near a source of heating or
cooling, such as heaters or air conditioning vents.
Mount the PGE050with its main axis horizontal (see diagram below). Pressure
reading errors may occur above 1 Torr if the unit is not mounted horizontally. Below
1 Torr, mounting position has little to no effect.
4.1.3 Mechanical Installation -
Ionization Gauge
VGC083A
VGC083B
4.1.4 Mechanical Installation -
Convection Gauge
NOTICE

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Mount the PGE050 with port down, if possible, to help minimize the effect of any
particles or condensation from collecting in the gauge.
Do not mount the PGE050 where it will be subjected to excessive vibration. Vibra-
tions may cause unstable readings, measurement errors and possible mechanical
stress to components in the PGE050.
Flanges/ Fittings - follow the manufacturer's recommendations and note the
following:
- NPT fittings: When connecting the device using a NPT fitting, apply a thread seal-
ant compound or wrap the threaded portion of the tubing with one-and-a-half to two
wraps of pipe thread seal tape such as PTFE (Teflon®) tape and hand tighten the
gauge into the gauge port. Do not use a wrench or other tool which may damage
the gauge.
Be sure the vacuum gauges and the rest of your vacuum system are properly
grounded to protect personnel from shock and injury. Be aware that some vacuum
fittings, especially those with O-rings when not used with metal clamps, may not
produce a good electrical connection between the gauge and the chamber it is
connected to. Use a ground lug on the vacuum connection flange of the pressure
measurement device if necessary. The VGC083 control unit should be connected
to earth ground via a good quality equipment earthing conductor. It is encouraged
that you connect a separate 12-AWG earthing conductor between a known facility
earth ground connection and the location marked with the earth ground symbol (via
the green colored screw provided) on the back panel of the VGC083.
4.2 Electrical Installation
4.2.1 Grounding

tinb29e1-c (2019-10) VGC083A_B.om 19
A good, recommended practice is to remove power from any cable prior to con-
necting or disconnecting it. The electrical connections for the VGC083 are located
on the back panel of the device as shown below.
Good, recommended practice is to remove power from any cable prior to connect-
ing or disconnecting it. With INFICONs nude B-A ionization gauge head (or other
brands of equivalent gauges) or the BAG055 Mini IG connected to your vacuum
chamber, connect an appropriate length of ion gauge cable (see various IG cable
configurations shown below) from the ion gauge head on the vacuum chamber to
the back panel connector of the VGC083 labeled "1". The circular plastic connector
(CPC) is keyed to allow easy orientation of the mating connectors. The BNC con-
nector is for connecting the low-level ion current signal from the ion collector elec-
trode of the head. The coaxial cable with the BNC connector at the controller end
of your cable is connected at the BNC connector labeled "COL".
CAUTION! When changing or making cabling connections to any device con-
trolled by the VGC083, you must first turn power to the VGC083 OFF. Failure to
disconnect power to the VGC083before either changing cable connections from
options to devices or removing/installing option cards in the VGC083 may result in
equipment damage or possible injury to personnel.
4.2.2 Installation
4.2.3 Connecting the Ionization
Gauge Cable

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Part numbers →85.
BAG050 nude IG
bakable cable 200 °C
BAG050 nude IG
50 °C
BAG055 Mini IG cable
50 °C
Part numbers →85.
BAG051 nude IG
bakable cable 200 °C
BAG051 nude IG cable
50 °C
BAG052 / 053 glass IG cable
50 °C
IG Cables not manufactured by INFICON may differ in design. Cables from certain
manufacturers may be specifically constructed for the type of DEGAS used in
various versions of the B-A ionization gauge head. Contact [e-mail] if
you have any questions regarding the connections to be made to ionization gauge
heads using IG cables not manufactured by INFICON.
For the nude or Mini IG, connect the IG cable (PN →85) at the VGC083A
controller as described in the previous page. After installing the nude IG head on
your vacuum system, connect the head end of the IG cable as shown below.
BAG050 nude IG head cable
connection
BAG055 Mini IG head cable
connection
VGC083A: BAG050, BAG055
Cable
VGC083B: BAG051,
BAG052, BAG053 cable
NOTE
4.2.3.1 Standard Nude, Glass and
Mini IG Cables
VGC083A