Inficon VGC031 User manual

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Vacuum Gauge Controller
VGC031
Operating Manual
Incl. EU Declaration of Conformity

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Product Identification
In all communications with INFICON, please specify the infor-
mation given on the product nameplate. For convenient refer-
ence copy that information into the space provided below.
Validity
This document applies to products with part number
399-570
The part number (PN) can be taken from the product nameplate.
If your unit does not work as described in this document, please
check that it is equipped with the above firmware version
(→30).
We reserve the right to make technical changes without prior
notice.
Important User Information
There are operational characteristic differences between solid
state equipment and electromechanical equipment. Because of
these differences, and because there are a variety of uses for
solid state equipment, all persons that apply this equipment must
take every precaution and satisfy themselves that the intended
application of this equipment is safe and used in an acceptable
manner.
In no event will INFICON be responsible or liable for indirect or
consequential damages that result from the use or application of
this equipment.

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Any examples or diagrams included in this manual are provided
solely for illustrative purposes. Because of the many variables
and requirements imposed on any particular installation,
INFICON cannot assume responsibility or liability for any actual
use based on the examples and diagrams.
No patent liability is assumed by INFICON with respect to use of
information circuits, equipment, or software described in this
manual.
Throughout this manual we use notes, notices and apply inter-
nationally recognized symbols and safety messages to make
you aware of safety considerations.
Identifies information about practices or circumstances that can
cause electrical or physical hazards which, if precautions are not
taken, could result in death or serious injury, property damage,
or economic loss.
Identifies information about practices or circumstances that can
cause electrical or physical hazards which, if precautions are not
taken, could result in minor or moderate injury, property damage,
or economic loss.
CAUTION
NOTICE

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Identifies information that is critical for successful application and
understanding of the product.
Labels may be located on or inside the device to alert people
that dangerous voltages may be present.
SHOCK HAZARD

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General Safety Instructions
•Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of the process
media due to the heat generated by the product.
•Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
•Before beginning to work, find out whether any vacuum com-
ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contamin-
ated parts.
Communicate the safety instructions to all other users.
Liability and Warranty
INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of interventions (modifications, alterations etc.)
on the product
•use the product with accessories not listed in the product
documentation.

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Contents
Product Identification 2
Validity 2
Important User Information 2
General Safety Instructions 5
Liability and Warranty 5
1Introduction / General Information 8
1.1 Description 8
1.2 Specifications 9
1.3 Dimensions 11
1.4 Options & Accessories 12
2Important Safety Information 13
2.1 Safety Precautions - General 13
2.2 Safety Precautions - Service and Operation 14
2.3 Electrical Conditions 15
2.3.1 Proper Equipment Grounding 16
2.3.2 Electrical Interface and Control 16
2.4 Overpressure and use with hazardous gases 17
2.5 Gases other than Nitrogen / air 18
3Installation 19
3.1 Mechanical Installation - Controller 19
3.2 Electrical Installation 20
3.2.1 Grounding 20
3.2.2 Electrical Connections 20
4Setup and Operation 24
4.1 Initial Setup 24
4.2 User Interface Basics 25
4.3 Programming 26
4.4 Return to Factory Default Settings 31
5Using the Gauge with Different Gases 32
6Display 35
6.1 Display - Torr / mTorr 35
6.2 Display - mbar 39

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7Analog Output 44
7.1 Log 1-8; Log-Linear Analog Output Equation &
Table - Torr 48
7.2 Log 1-8; Log-Linear Analog Output Equation &
Table - mbar 52
7.3 Log 0-7; Log-Linear Analog Output Equation &
Table - Torr 57
7.4 Log 0-7; Log-Linear Analog Output Equation &
Table - mbar 61
7.5 NONLIN 6V; Non-Linear Analog Output Equations 66
7.6 NONLIN 6V; Non-Linear Analog Output Table - Torr 68
7.7 NONLIN 6V; Non-Linear Analog Output Table - mbar 72
7.8 NONLIN 9V; Non-Linear Analog Output Equations &
Table 76
7.9 LINEAR ANALOG OUTPUT 79
8RS485 / RS232 serial communications 81
8.1 Device Specific Serial Communication Info 81
8.2 RS485 / RS232 Command Protocol Summary 82
9Service 85
9.1 Calibration 85
9.1 Maintenance 85
9.3 Troubleshooting 86
10 Factory Service and Support 88
11 Storage 88
13 Disposal 89
EU Declaration of Conformity 90
For cross-references within this document, the symbol (→XY)
is used.

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1 Introduction / General Information
1.1 Description
The VGC031 vacuum gauge controller is a convenient and inex-
pensive power supply and readout instrument for the INFICON
PGE050 Pirani Gauge Enhanced or a Granville-Phillips® 275
Convectron®. The 1/8-DIN housing can be used as a bench top,
or mounted in a cutout in an instrument panel. The VGC031 is
powered by user supplied 12 to 28 V (dc), 2 W, or by the
INFICON power supply.
Thermal conductivity gauges measure pressure indirectly by
sensing the loss of heat from a sensor to the surrounding gases.
The higher the pressure of the surrounding gas, the more heat is
conducted away from the sensor. Pirani thermal conductivity
gauges maintain a sensor (usually a wire) at some constant tem-
perature, and measure the current or power required to maintain
that temperature. A standard Pirani gauge has a useful measur-
ing range of about 10-4 Torr to 10 Torr. By taking advantage of
convection currents that are generated above 1 Torr, convection-
enhanced Pirani gauges increase the measuring range to just
above atmosphere.
The VGC031 signals and relay functions are the same as found
on similar convection gauge controllers from other manufactur-
ers. The VGC031 Controller, PGE050 vacuum gauge tube and
gauge cable can be directly interchanged with MKS Instruments
/ Granville-Phillips® (GP) 375 or 475 controller, 275 Convec-
tron® gauge and gauge cable (Remote interface, relay and pow-
er connectors are different). Various analog output scaling pro-
vide signal compatibility with GP controller series 375, 475, the
original GP 1/4 DIN 275 Analog Convectron Gauge Controller as
well as the Mini-Convectron® module.

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1.2 Specifications
Supply voltage 12 … 28 V (dc), 2 W protected
against power reversal and tran-
sient over-voltages
Connection 2-pin pluggable terminal block
(mating connector included)
Permissible temperature
Operating
0 … +50 °C
Storage
–40 … +70 °C
Relative humidity
0 to 95%, non-condensing
Use
Operating
altitude up to 2500 m (8200 ft.)
Storage
altitude up to 12500 m (41000 ft.)
Housing 1/8-DIN panel-mount enclosure
(aluminum extrusion)
Connections
Gauge 9-pin D-sub female (mating
connector provided as part of the
gauge cable)
Analog output and serial
communications interface
9-pin D-sub male
Relay outputs 6-pin pluggable terminal block
(mating connector included)
Measurement range 1.3×10
-4
… 1333 mbar
1×10-4 … 1000 Torr
1.3×10
-2
Pa … 133 kPa
Display rate
0.5 s
Units
mbar, Torr or Pa
Display
bright OLED, 4 digits
1100 Torr … 1000 Torr
4 digits
999 Torr … 10.0 mTorr
3 digits
9.9 mTorr … 1.0 mTorr
2 digits
0.9 mTorr … 0.1 mTorr
1 digit

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Interface (digital)
RS232 and 2 wire/4 wire RS485
Protocol
ASCII
Analog output
Log-linear 0 to 7 V (dc) or
1 to 8 V (dc),
1 V/decade
Linear
0 to 10 V (dc)
Non-linear S-curve
0.375 to 5.659 V (dc)
Non-linear S-curve
0 to 9 V (dc)
Switching function relays two single-pole double-throw
relays (SPDT), 1 A at 30 V (dc)
resistive, or ac non-inductive

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1.3 Dimensions
mm (inch)
Weight
≈250 g (9 oz.)

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1.4 Options & Accessories
Ordering No.
Power supply for VGC031 399-575
Input
100 … 240 V (ac), 50 … 60 Hz
Output
24 V (dc)
Cable length
2 m (6 ft)
The conventional IEC60320 AC power entry receptacle allows
use with any user supplied AC mains power cord set available
worldwide.

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2 Important Safety Information
INFICON has designed and tested this product to provide safe
and reliable service, provided it is installed and operated within
the strict safety guidelines provided in this manual. Please read
and follow all warnings and instructions.
To avoid serious injury or death, follow the safety informa-
tion in this document. Failure to comply with these safety
procedures could result in serious bodily harm, including
death, and or property damage.
Failure to comply with these warnings violates the safety stand-
ards of installation and intended use of this instrument. INFICON
disclaims all liability for the customer’s failure to comply with
these instructions.
Although every attempt has been made to consider most possi-
ble installations, INFICON cannot anticipate every contingency
that arises from various installations, operation, or maintenance
of the module. If you have any questions about the safe installa-
tion and use of this product, please contact INFICON.
This device meets FCC part 15 requirements for an unintentional
radiator, class A.
2.1 Safety Precautions - General
Hazardous voltages are present with this product during normal
operation. The product should never be operated with the covers
removed unless equivalent protection of the operator from acci-
dental contact with hazardous internal voltages is provided.
WARNING

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WARNING! There are no operator serviceable parts or
adjustments inside the product enclosure. Refer servicing to
service trained personnel.
Do not modify this product or substitute any parts without au-
thorization of qualified INFICON service trained personnel. Re-
turn the product to an INFICON qualified service and repair cen-
ter to ensure that all safety features are maintained. Do not use
this product if unauthorized modifications have been made.
WARNING! Source power must be removed from the
product prior to performing any servicing.
After servicing this product, ensure that all safety checks are
made by a qualified service person. When replacement parts are
required, ensure that the parts are specified by INFICON Sub-
stitutions of non-qualified parts may result in fire, electric shock
or other hazards. Use of unauthorized parts or modifications
made to this product will void the warranty.
To reduce the risk of fire or electric shock, do not expose this
product to rain or moisture. These products are not waterproof
and careful attention must be paid to not spill any type of liquid
onto these products. Do not use these products if they have
been damaged. Immediately contact INFICON to arrange return
of the product if it is damaged.
Due to the possibility of corrosion when used in certain environ-
mental conditions, it is possible that the product’s safety could be
compromised over time. It is important that the product be peri-
odically inspected for sound electrical connections and equip-
ment grounding. Do not use if the equipment grounding or elec-
trical insulation has been compromised.
2.2 Safety Precautions - Service and Operation
Ensure the enclosure of the VGC031 is connected directly to a
good quality earth ground.
Ensure that the vacuum port on which the PGE050 vacuum
gauge tube is mounted is electrically grounded.

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Use an appropriate power source of 12 to 28 V (dc), 2 W or use
INFICON series optional power supplies.
Turn off power to the unit before attempting to service the con-
troller.
Turn off power to the unit if a cable or plug is damaged or the
product is not operating normally according to this instruction
manual. Contact qualified INFICON service personnel for any
service or troubleshooting condition that may not be covered by
this instruction manual.
It is important that the product be periodically inspected for
sound electrical connections and equipment grounding. Do not
use if the equipment grounding or electrical insulation has been
compromised.
Do not use if the unit has been dropped or the enclosure has
been damaged. Contact INFICON for return authorization and
instructions for returning the product to INFICON for evaluation.
2.3 Electrical Conditions
WARNING! When high voltage is present in any vacuum
system, a life threatening electrical shock hazard may exist un-
less all exposed electrical conductors are maintained at earth
ground potential. This applies to all products that come in con-
tact with the gas contained in vacuum chambers. An electrical
discharge within a gaseous environment may couple dangerous
high voltage directly to any ungrounded conductor of electricity.
A person could be seriously injured or killed by coming in contact
with an exposed, ungrounded electrical conductor at high volt-
age potential. This condition applies to all products that may
come in contact with the gas inside the vacuum chamber
(vacuum / pressure containment vessel).

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2.3.1 Proper Equipment Grounding
WARNING! Hazardous voltages that could seriously in-
jure or cause death are present in many vacuum processes. Ver-
ify that the vacuum port on which the PGE050 vacuum gauge
tube is mounted is electrically grounded. Consult a qualified
Electrician if you are in doubt about your equipment grounding.
Proper grounding of your equipment is essential for safety as
well as intended operation of the equipment. The PGE050
vacuum gauge tube and enclosure of the VGC031 controller
must be connected directly to a good quality earth ground. Use a
ground lug on the PGE050 gauge vacuum connection / flange if
necessary.
WARNING! In order to protect personnel from electric
shock and bodily harm, shield all conductors which are sub-
ject to potential high voltage electrical discharges in or
around the vacuum system.
2.3.2 Electrical Interface and Control
It is the user’s responsibility to ensure that the electrical signals
from this product and any connections made to external devices,
for example, relays and solenoids, are used in a safe manner.
Always double check the system set-up before using any signals
to automate your process. Perform a hazardous operation analy-
sis of your system design and ensure safeguards and personnel
safety measures are taken to prevent injury and property dam-
age.

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2.4 Overpressure and use with hazardous gases
WARNING! Install suitable protective devices that will
limit the level of pressure inside your vacuum chamber to less
than what the vacuum chamber system components are capable
of withstanding. INFICON gauges should not be used at pres-
sures exceeding 1000 Torr absolute pressure.
In cases where an equipment failure could cause a hazardous
condition, always implement fail-safe system operation. For ex-
ample, use a pressure relief device in an automatic backfill op-
eration where a malfunction could result in high internal pres-
sures if the pressure relief device was not installed on the
chamber.
The PGE050 vacuum gauge tube connected to the VGC031
controller is not intended for use at pressures above 20 psia
(1000 Torr); DO NOT exceed 35 psig (<2½ bars) pressure inside
the sensor. If your chamber goes to higher pressures, you
should install an isolation valve or pressure relief device to pro-
tect the gauge tube from overpressure conditions. With some fit-
tings, actual safe overpressure conditions may be lower; for ex-
ample, a quick-connect, O-ring compression fitting may forcibly
release the gauge tube from the vacuum chamber fitting with
only a few psi over local uncorrected barometric (atmospheric)
pressure.
CAUTION! If the internal pressure of a vacuum gauge
device is allowed to increase above local uncorrected baro-
metric pressure (atmospheric pressure side), vacuum fit-
tings may release and possible overpressure conditions
may cause leaks that would allow the gas inside the gauge
tube to release into the atmosphere of the surrounding en-
vironment. Toxic, pyrophoric and flammable gases are ex-
amples of hazardous gases that if allowed to leak out of the
vacuum/pressure containment vessel into the atmospheric
environment, could cause bodily injury and possible dam-
age to equipment. Never expose the gauge tube internal
volume to pressure above local atmospheric pressure when
using hazardous gases.

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2.5 Gases other than Nitrogen / air
WARNING! Do not attempt to use with gases other than
nitrogen (N2) or air without referring to correction factor data ta-
bles.
INFICON gauges and modules are calibrated for direct readout
of nitrogen or air. Do not attempt to use with other gases such as
argon (Ar) or carbon dioxide (CO2) unless accurate conversion
data for N2to other gas is properly used. Refer to sections titled
"Using the gauge with different gases", "Display" and "Analog
Output" for a more complete discussion.
WARNING! Do not use the convection gauge connected
to this device in an explosive atmosphere or in the presence of
flammable gases, vapors or fumes. Do not use this device to
measure the pressure of explosive or combustible gases or gas
mixtures. The sensor wire in the gauge normally operates at
125 °C, but if malfunction should occur, the wire temperature
could exceed the ignition temperature of certain combustible
gases and gas mixture. This could cause an explosion which
could result in serious injury or death.

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3 Installation
3.1 Mechanical Installation - Controller
The VGC031 is designed for use on a bench top, or it may be
mounted in an instrument control panel.
To mount the VGC031 in a panel:
1. Make a cutout in your instrument control panel as shown in
the drawing above. Be sure to allow clearance behind the
panel for the instrument as well as connectors and cables at
the rear of the instrument
2. Gently pry the front panel bezel loose and remove.
Bezel
Screw mounting
brackets on either
side

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3. Slide the VGC031 into the panel hole cutout.
4. On either side of the VGC031 are two screw-mounting brack-
ets. When the screws in the front of the instrument are turned
counterclockwise, the hold-down brackets recess out of the
way into the VGC031 housing. When these screws are turned
clockwise, the brackets rotate out 90° behind the panel.
Tighten these screws until the brackets hold the VGC031 in
place against the panel.
5. Press the front panel bezel back in place.
3.2 Electrical Installation
3.2.1 Grounding
Be sure the vacuum gauge and your vacuum system are
properly grounded to protect personnel from shock and injury.
Be aware that some vacuum fittings, especially those with O-
rings, may not produce a good electrical connection between the
gauge and the chamber it is connected to.
3.2.2 Electrical Connections
A good recommended practice is to remove power from any
cable prior to connecting or disconnecting it.
The INFICON VGC031 may replace similar controllers from
other manufacturers, such as the Granville-Phillips®375 control-
ler. Many of these other controllers employ the same 9-pin and
15-pin D connectors, but they do not all use the same signal /
pinout configurations. If you wish to use your existing cables, be
sure to check compatibility with the tables on the next page.
Rewire your cables as necessary.