Inficon XTC/3 User manual

OPERATING MANUAL
XTC/3
Thin Film Deposition Controller
PN 074-446-P1L
C
over
P
age

Trademarks
The trademarks of the products mentioned in this manual are held by the companies that
produce them.
Windows®, Windows 95®and Microsoft®are registered trademarks of Microsoft Corporation.
Viton®, Kalraz®and Teflon®are registered trademarks of DuPont Co.
ConFlat®is a registered trademark of Varian Corporation.
Chemraz®is a registered trademark of Greene, Tweed & Co., Inc.
Cajon®and VCR®are registered trademarks of Cajon Co., Macedonia, OH.
SWAGELOK®is a registered trademark of Swagelok Co.
Inconel®is a registered trademark of Inco Alloys International, Huntington, WV.
All other brand and product names are trademarks or registered trademarks of their respective companies.
Disclaimer
The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes
no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related
to the use of this product.
Due to our continuing program of product improvements, specifications are subject to change without notice.
Copyright
©2016 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.

Declaration Of Conformity
Page 1

Warranty
Standard INFICON One Year
Page 1
WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products
manufactured by it, or by an affiliated company and sold by it, and described on
the reverse hereof, to be, for the period of warranty coverage specified below, free
from defects of materials or workmanship under normal proper use and service.
The period of warranty coverage is specified for the respective products in the
respective Seller instruction manuals for those products but shall not be less than
one (1) year from the date of shipment thereof by Seller. Seller's liability under this
warranty is limited to such of the above products or parts thereof as are returned,
transportation prepaid, to Seller's plant, not later than thirty (30) days after the
expiration of the period of warranty coverage in respect thereof and are found by
Seller's examination to have failed to function properly because of defective
workmanship or materials and not because of improper installation or misuse and
is limited to, at Seller's election, either (a) repairing and returning the product or
part thereof, or (b) furnishing a replacement product or part thereof, transportation
prepaid by Seller in either case. In the event Buyer discovers or learns that a
product does not conform to warranty, Buyer shall immediately notify Seller in
writing of such non-conformity, specifying in reasonable detail the nature of such
non-conformity. If Seller is not provided with such written notification, Seller shall
not be liable for any further damages which could have been avoided if Seller had
been provided with immediate written notification.
THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER
WARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR
OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S
EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLD
HEREUNDER. All other obligations and liabilities of Seller, whether in contract or
tort (including negligence) or otherwise, are expressly EXCLUDED. In no event
shall Seller be liable for any costs, expenses or damages, whether direct or
indirect, special, incidental, consequential, or other, on any claim of any defective
product, in excess of the price paid by Buyer for the product plus return
transportation charges prepaid.
No warranty is made by Seller of any Seller product which has been installed,
used or operated contrary to Seller's written instruction manual or which has been
subjected to misuse, negligence or accident or has been repaired or altered by
anyone other than Seller or which has been used in a manner or for a purpose for
which the Seller product was not designed nor against any defects due to plans or
instructions supplied to Seller by or for Buyer.
This manual is intended for private use by INFICON® Inc. and its customers.
Contact INFICON before reproducing its contents.
NOTE: These instructions do not provide for every contingency that may arise in
connection with the installation, operation or maintenance of this equipment.
Should you require further assistance, please contact INFICON.
Warranty
www.inficon.com reac[email protected]

TOC - 1
XTC/3 Operating Manual
Table Of Contents
Cover Page
Trademarks
Disclaimer
Copyright
Declaration Of Conformity
Warranty
Chapter 1
Introduction and Specifications
1.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-1
1.1.1 Related Manuals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2
1.2 XTC/3 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2
1.2.1 Definition of Notes, Cautions and Warnings. . . . . . . . . . . . . . . . . . . . . . . . .1-2
1.2.2 General Safety Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
1.2.3 Earth Ground . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4
1.2.4 Main Power Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4
1.3 How to Contact INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5
1.3.1 Returning Sensor to INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5
1.4 XTC/3 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6
1.4.1 Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6
1.4.2 Screens and Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6
1.4.3 Process Recipe Storage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7
1.4.3.1 Film Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
1.4.4 Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-8
1.4.5 Source / Recorder Outputs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-9
1.4.6 Relays / Inputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-9
1.4.7 Remote Communications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-10
1.4.8 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
1.4.9 Power . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
1.4.10 Operating Environment. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11
1.4.11 Storage Temperature . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-11
1.4.12 Warm Up Period. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-11
1.4.13 Size. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-11
1.4.14 Connector Clearance Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-11
1.4.15 Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11
1.4.16 Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-11

TOC - 2
XTC/3 Operating Manual
1.5 Unpacking and Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12
1.6 Parts and Options Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12
1.6.1 Base Configurations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12
1.6.2 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13
1.6.3 Replacement Cables & Oscillators. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
1.6.4 Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
1.7 Initial Power On Verification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-16
Chapter 2
Installation and Interfaces
2.1 Location Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.1.1 Sensor Types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.1.2 Sensor Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
2.1.3 XTC/3 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
2.2 Avoiding Electrical Interference . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
2.2.1 Verifying/Establishing Earth Ground . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
2.2.2 Connections to Earth Ground. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5
2.2.3 Minimizing Noise Pickup From External Cabling . . . . . . . . . . . . . . . . . . . . . 2-6
2.3 Connecting the Controller. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7
2.3.1 Verifying the Correct Input Voltage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7
2.3.2 Routing Oscillator (XIU) Cables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7
2.3.3 Interface Cable Fabrication and Pin-Out . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7
2.3.3.1 Source Control Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7
2.3.3.2 Input and Output Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
2.3.3.2.1 System I/O Connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9
2.3.3.2.2 Aux I/O Connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10
2.3.3.2.3 Inputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10
2.3.4 RS-232C Communications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11
2.3.5 TCP/IP Communications Connection (Optional) . . . . . . . . . . . . . . . . . . . . 2-11
2.3.5.1 Network Connection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11
2.3.5.2 Change the IP Address in XTC/3 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11
2.3.5.3 PC Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11
Chapter 3
Operation
3.1 Front Panel Controls . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.2 Rear Panel Interfaces. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
3.3 Displays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
3.3.1 Menu Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5
3.3.2 Operate Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5

TOC - 3
XTC/3 Operating Manual
3.3.2.1 Crystal Life and Starting Frequency . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-8
3.3.2.2 Choosing The Right Crystal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
3.3.2.3 Percent Life Auto-Zero . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
3.3.3 Film Name Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-9
3.3.4 Process List Display (XTC/3M only) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10
3.3.5 General Parameter Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-11
3.3.6 I/O Map Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-12
3.3.7 Diagnostics Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-12
3.3.8 Sensor Information Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-13
3.4 Executing a Process. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-14
3.5 State Descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-17
3.5.1 Alarms and Stops . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-23
3.5.1.1 Alarms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-23
3.5.1.2 Stops . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-23
3.5.1.3 Recovering from STOP . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-24
3.6 Special Features. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-24
3.6.1 Automating a Process . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-24
3.6.2 Ion Assisted Deposition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-25
3.6.3 Control Delay . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-25
3.6.4 Shutter Delay . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-25
3.6.5 Rate Ramp Trigger of Final Thickness . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-25
3.6.6 Transfer Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-25
3.6.7 Crucible Switching . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-26
3.6.7.1 Bin mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-26
3.6.7.2 BCD mode (XTC/3M only) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-26
3.6.8 Crystal Switching . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-26
3.6.8.1 CrystalTwo . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-27
3.6.8.2 CrystalSix . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-28
3.6.8.3 Crystal12 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-28
3.6.8.4 Rotary Sensor Crystal Switching . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-29
3.6.8.5 Dual Head. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-29
3.6.8.6 XTC/3S Sensor Shutter / CrystalSwitch Output . . . . . . . . . . . . . . . . . . . . .3-30
3.6.9 Start Layer Without Backup Crystal Configuration . . . . . . . . . . . . . . . . . . .3-30
3.6.10 RateWatcher. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-31
3.6.11 Hand-held Controller (Option) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-31
3.6.12 Lock Code . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-32
3.6.13 Parameter Clear . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-32
3.6.14 Datalog . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-32
3.6.15 TCP/IP . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-33

TOC - 4
XTC/3 Operating Manual
Chapter 4
XTC/3 Programming
4.1 Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.2 Film Set Up Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
4.2.1 Film Set Up. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
4.2.2 Film Definition. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4
4.2.3 Film Definition Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
4.2.3.1 Pre/Post Deposition Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
4.2.3.2 Deposit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7
4.2.3.3 Sensor Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
4.2.3.3.1 Setting S&Q Parameters (Soft Crystal Failures) . . . . . . . . . . . . . . . . . . . . . 4-9
4.2.3.3.2 Stability. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9
4.2.3.3.3 Quality . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10
4.2.3.4 Source Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-11
4.2.3.5 Option. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-14
4.3 Process Set-Up Overview (XTC/3M only) . . . . . . . . . . . . . . . . . . . . . . . . . 4-16
4.3.1 Process Definition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-17
4.3.1.1 Process Number. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-17
4.3.1.2 Process Name . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-17
4.3.1.3 Building the Layer Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-17
4.4 General Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-18
4.4.1 Process Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-19
4.4.2 Hardware Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-21
4.4.2.1 XTC/3S Film Select Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-23
4.4.3 Comm Info . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-24
4.4.3.1 Remote Communication Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-25
4.5 I/O Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-26
4.5.1 XTC/3S Inputs and Outputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-27
4.5.2 XTC/3M Inputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-28
4.5.3 XTC/3M Outputs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-29
4.5.4 Clear Input or Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-31
Chapter 5
Remote Communications
5.1 Remote Communications Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
5.1.1 Message Protocols. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
5.1.2 Physical Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
5.1.3 RS-232C Serial Port. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
5.1.4 TCP/IP Ethernet Port . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2

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XTC/3 Operating Manual
5.1.4.1 Network Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-2
5.1.4.2 How to Set Up the Network Protocol on the PC. . . . . . . . . . . . . . . . . . . . . . 5-3
5.2 Standard Protocol Message Format. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-6
5.2.1 Standard Protocol. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6
5.2.1.1 Standard Command Packet (Host to XTC/3 Message) . . . . . . . . . . . . . . . .5-6
5.2.1.2 Standard Response Packet (XTC/3 to Host Message) . . . . . . . . . . . . . . . . 5-8
5.2.2 Standard Communication Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-10
5.2.2.1 Standard ECHO Command . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-10
5.2.2.2 Standard HELLO Command. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-10
5.2.2.3 Standard QUERY Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-11
5.2.2.3.1 Query Block . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-11
5.2.2.3.2 Standard Query Film Name (XTC3/M only) . . . . . . . . . . . . . . . . . . . . . . . .5-13
5.2.2.3.3 Standard Query Film Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-13
5.2.2.3.4 Standard Query General Parameter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-13
5.2.2.3.5 Standard Query Input Definition (XTC/3M Only) . . . . . . . . . . . . . . . . . . . . 5-14
5.2.2.3.6 Standard Query Output Definition (XTC/3M Only) . . . . . . . . . . . . . . . . . . . 5-15
5.2.2.3.7 Standard Query Output Type Definition (XTC/3M Only) . . . . . . . . . . . . . . 5-18
5.2.2.3.8 Standard Query Process Parameters (XTC/3M Only) . . . . . . . . . . . . . . . . 5-18
5.2.2.4 Standard UPDATE Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-19
5.2.2.4.1 Update Block . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-19
5.2.2.4.2 Standard Update Film Name (XTC/3M only) . . . . . . . . . . . . . . . . . . . . . . .5-20
5.2.2.4.3 Standard Update Film Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-21
5.2.2.4.4 Standard Update General Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . .5-25
5.2.2.4.5 Standard Update Input Definition (XTC/3M only) . . . . . . . . . . . . . . . . . . . .5-27
5.2.2.4.6 Standard Update Output Definition (XTC/3M only) . . . . . . . . . . . . . . . . . . 5-27
5.2.2.4.7 Standard Update Output Type Definition (XTC/3M Only). . . . . . . . . . . . . .5-28
5.2.2.4.8 Standard Update Process Parameters (XTC/3M only). . . . . . . . . . . . . . . . 5-28
5.2.2.5 Standard STATUS Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-29
5.2.2.6 Standard REMOTE Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-34
5.3 XTC/2 Protocols . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-36
5.3.1 Basic Command Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-36
5.3.2 XTC/2 Serial Communication with Checksum . . . . . . . . . . . . . . . . . . . . . .5-37
5.3.3 XTC/2 Serial Communications - No Checksum . . . . . . . . . . . . . . . . . . . . . 5-37
5.3.4 XTC/2 Error Codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-38
5.3.5 XTC/2 Message Strings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-39
5.3.5.1 XTC/2 ECHO Command . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-39
5.3.5.2 XTC/2 HELLO Command. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-39
5.3.5.3 XTC/2 QUERY Command . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-39

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XTC/3 Operating Manual
5.3.5.4 XTC/2 UPDATE Command . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-41
5.3.5.5 XTC/2 STATUS Command . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-42
5.3.5.6 XTC/2 REMOTE Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-46
5.3.5.7 XTC/2 Sample Host Programs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-48
5.3.5.7.1 XTC/2 Program Without Checksum . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-48
5.3.5.7.2 XTC/2 Program With Checksum . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-49
Chapter 6
Troubleshooting, Status and Error Messages
6.1 Status and Error Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1
6.2 XTC/3 Diagnostics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6
6.3 Troubleshooting Guide. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-8
6.3.1 Troubleshooting XTC/3 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9
6.3.2 Troubleshooting Transducers/Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-11
6.3.2.1 Verifying Crystal Switching and Rotation . . . . . . . . . . . . . . . . . . . . . . . . . . 6-11
6.3.2.2 Verifying Sensor Shutter Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-11
6.3.3 Troubleshooting Computer Communications. . . . . . . . . . . . . . . . . . . . . . . 6-17
6.3.3.1 TCP/IP Module LED Diagnostics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-17
6.4 Replacing the Crystal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-18
6.4.1 Front Load Single Sensors. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-18
6.4.2 Shuttered Front Load Single and Front Load Dual Sensors . . . . . . . . . . . 6-19
6.4.3 Cool Drawer Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-19
6.4.4 Bakeable Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-21
6.4.5 Sputtering Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-22
6.4.6 Crystal Snatcher. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-23
6.4.7 CrystalSix . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-23
6.4.8 Crystal12 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-23
6.5 Crystal Sensor Emulator PN 760-601-G2 . . . . . . . . . . . . . . . . . . . . . . . . . 6-24
6.5.1 Diagnostic Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-25
6.5.1.1 Measurement System Diagnostic Procedure. . . . . . . . . . . . . . . . . . . . . . . 6-25
6.5.1.2 Feed-Through Or In-Vacuum Cable
Diagnostic Procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-26
6.5.1.3 Sensor Head Or Monitor Crystal
Diagnostic Procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-27
6.5.1.4 System Diagnostics Pass But
Crystal Fail Message Remains. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-28
6.5.2 % XTAL Life . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-28
6.5.3 Sensor Cover Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-29
6.5.3.1 Compatible Sensor Heads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-29
6.5.3.2 Incompatible Sensor Heads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-29

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XTC/3 Operating Manual
6.5.4 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-30
Chapter 7
Calibration Procedures
7.1 Importance of Density, Tooling and Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . . .7-1
7.2 Determining Density . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-1
7.3 Determining Tooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-2
7.4 Laboratory Determination of Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-3
7.5 Estimating Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-4
Chapter 8
Measurement and Control Theory
8.1 Basics. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-1
8.1.1 Monitor Crystals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-2
8.1.2 Period Measurement Technique . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-4
8.1.3 Z-Match Technique. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-5
8.1.4 Active Oscillator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-6
8.1.5 ModeLock Oscillator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-7
8.1.6 Control Loop Theory. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-9
Chapter A
Material Table

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XTC/3 Operating Manual
Chapter 1
Introduction and Specifications
1.1 Introduction
XTC/3 is produced in two versions:
XTC/3M Multi-Layer Deposition Controller
XTC/3S Single Layer Deposition Controller
This manual covers both instruments, using the designation XTC/3 when the
subject matter applies to both instruments and XTC/3M or XTC/3S when the
subject matter applies to a specific instrument.
This operating manual provides user information for installing, programming, and
operating the XTC/3.
XTC/3 is a closed loop process controller designed for use primarily in physical
vapor deposition. XTC/3 monitors and/or controls the rate and thickness of thin film
depositions. Deposition rate and thickness are inferred from the frequency change
induced by mass added to a quartz crystal.
This technique positions sensors in the path between, or to the side of, the target
substrate and the source of vaporized material. The sensor incorporates an
exposed oscillating quartz crystal whose frequency decreases as material
accumulates. The change in frequency provides information to determine rate and
thickness and to continually control the evaporation power source.
With user-supplied time, thickness, and power limits and with desired rates and
material characteristics, XTC/3 is capable of automatically controlling the process
in a precise and repeatable manner. User interaction is accomplished through the
front panel or serial communications, and consists of selection or entry of
parameters to define the process.
The complete system consists of:
main control unit (XTC/3)
sensor or sensors
crystal interface unit (XIU) for each attached sensor
These items are generally bundled at the factory and are also sold separately.
When reading this XTC/3 Operating Manual, please pay particular attention to the
NOTES, CAUTIONS, and WARNINGS found throughout the text. The Notes,
Cautions, and Warnings are defined in section 1.2.1 on page 1-2.

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XTC/3 Operating Manual
1.1.1 Related Manuals
Sensors are covered in separate manuals. PDF files of these manuals are
contained in the Thin Flim Manuals CD (PN 074-5000-G1), included in the Ship Kit.
PN 074-154 - Bakeable
PN 074-155 - CrystalSix
PN 074-156 - Single/Dual
PN 074-157 - Sputtering
PN 074-398 - Crystal12
1.2 XTC/3 Safety
1.2.1 Definition of Notes, Cautions and Warnings
When using this manual, please pay attention to the NOTES, CAUTIONS and
WARNINGS found throughout. For the purposes of this manual they are defined
as follows:
NOTE: Pertinent information that is useful in achieving maximum XTC/3 efficiency
when followed.
CAUTION
Failure to heed these messages could result in damage
to XTC/3.
WARNING
Failure to heed these messages could result in
personal injury.
WARNING - Risk Of Electric Shock
Dangerous voltages are present which could result in
personal injury.

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XTC/3 Operating Manual
1.2.2 General Safety Information
WARNING - Risk Of Electric Shock
Do not open the XTC/3 case! There are no
user-serviceable components within the XTC/3 case.
Dangerous voltages may be present whenever the power
cord or external input/relay connectors are present.
Refer all maintenance to technically qualified personnel.
CAUTION
XTC/3 contains delicate circuitry which is susceptible to
transient power line voltages. Disconnect the line cord
whenever making any interface connections. Refer all
maintenance to qualified personnel.
WARNING
Failure to operate XTC/3 in the manner intended by
INFICON can circumvent the safety protection provided
by XTC/3 and may result in personal injury.

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XTC/3 Operating Manual
1.2.3 Earth Ground
XTC/3 is connected to earth ground through a sealed three-core (three-conductor)
power cable, which must be plugged into a socket outlet with a protective earth
terminal. Extension cables must always have three conductors including a
protective earth terminal.
WARNING - Risk Of Electric Shock
Never interrupt the protective earth circuit.
Any interruption of the protective earth circuit inside or
outside XTC/3, or disconnection of the protective earth
terminal is likely to make XTC/3 dangerous.
This symbol indicates where the protective earth ground
is connected inside XTC/3. Never unscrew or loosen
this connection.
1.2.4 Main Power Connection
WARNING - Risk Of Electric Shock
XTC/3 has line voltage present on the primary circuits
whenever it is plugged into a main power source.
Never remove the covers from XTC/3 during normal
operation.
There are no operator-serviceable items within XTC/3.
Removal of the top or bottom covers must be done only
by a technically qualified person.

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XTC/3 Operating Manual
1.3 How to Contact INFICON
Worldwide customer support information is available under Support >> Support
Worldwide at www.inficon.com:
Sales and Customer Service
Technical Support
Repair Service
When communicating with INFICON about a XTC/3, please have the following
information readily available:
The Sales Order or Purchase Order number of the XTC/3 purchase.
The firmware version and software version (displayed at XTC/3 power-up)
of the optional applications software.
A description of the problem.
The exact wording of any error messages that may have been received.
An explanation of any corrective action that may have already been attempted.
1.3.1 Returning Sensor to INFICON
Do not return any sensor component to INFICON before speaking with a Customer
Support Representative and obtaining a Return Material Authorization (RMA)
number. XTC/3 will not be serviced without an RMA number.
Packages delivered to INFICON without an RMA number will be held until the
customer is contacted. This will result in delays in servicing XTC/3.
Prior to being given an RMA number, a completed Declaration Of Contamination
(DoC) form will be required. DoC forms must be approved by INFICON before an
RMA number is issued. INFICON may require that the XTC/3 be sent to a
designated decontamination facility, not to the factory.
Before returning XTC/3, create a record of all user-entered parameters so they
may be re-entered, if required.

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XTC/3 Operating Manual
1.4 XTC/3 Specifications
1.4.1 Measurement
Measurement Frequency Range . . . 6.0 to 5.0 MHz (fixed)
Frequency Resolution . . . . . . . . . . . ± 0.028 Hz @ 6 MHz
Thickness and Rate
Resolution/Measurement . . . . . . . . . ± 0.034 Å @ tooling/density = 100/1
Fundamental frequency = 6 MHz
Measurement Interval. . . . . . . . . . . . 0.25 s
Thickness Accuracy . . . . . . . . . . . . . 0.5% typical, (dependent on process
conditions, especially sensor location,
material stress, temperature and density)
Frequency Accuracy. . . . . . . . . . . . . ± 2.5 ppm 0 to 50°C
Measurement Frequency . . . . . . . . . 4 Hz
Measurement Technique . . . . . . . . . ModeLock
User Interface. . . . . . . . . . . . . . . . . . TFT LCD and limited membrane keypad.
All parameters accessible through computer
communications. Multiple message areas for
indication of states and detailed indication of
abnormal and stop conditions.
1.4.2 Screens and Parameters
Navigation . . . . . . . . . . . . . . . . . . . . Menu key to go between screens.
Four cursor keys to go between
parameters on screens.
Structure . . . . . . . . . . . . . . . . . . . . . . Separate screens dedicated to:
1) Operate Data Display
2) Film Parameters
3) Process List (XTC/3M only)
4) General Parameters
5) I/O Map
6) Diagnostics
7) Sensor

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XTC/3 Operating Manual
1.4.3 Process Recipe Storage
1.4.3.1 Film Parameters
Pre/Post Deposit
Power Ramps. . . . . . . . . . . . . . . . . . 2 per film
Power Level . . . . . . . . . . . . . . . . 0.0 to 100%
Rise Time . . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:s
Soak Time . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:s
Idle Ramps . . . . . . . . . . . . . . . . . . . . 1 per film
Idle Power . . . . . . . . . . . . . . . . . 0.0 to 100.0%
Idle Ramp Time . . . . . . . . . . . . . 00:00 to 99:59 min:s
Deposit
Deposition Rate . . . . . . . . . . . . . . . . 0.0 to 999.9 Å/s (display shows three digits)
Final Thickness . . . . . . . . . . . . . . . . 0.0 to 999.9 kÅ
Thickness Set Point . . . . . . . . . . . . . 0.0 to 999.9 kÅ
Rate Ramp . . . . . . . . . . . . . . . . . . . . 1 per film
New Rate . . . . . . . . . . . . . . . . . . 0.0 to 999.9 Å/s (display shows three digits)
Ramp Time . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:s
RateWatcher®. . . . . . . . . . . . . . . . . Sample and Hold Feature
RateWatch Accuracy . . . . . . . . . 1 to 99%
RateWatch Hold . . . . . . . . . . . . . 00:00 to 99:59 min:s
Sensor
Sensor #. . . . . . . . . . . . . . . . . . . . . . 1 or 2
Tooling . . . . . . . . . . . . . . . . . . . . . . . 10.0 to 500.0%
Second Tooling . . . . . . . . . . . . . . . . 10.0 to 500.0%
Crystal Stability, Single. . . . . . . . . . . 0, 25 to 9999 Hz (1 to 24 are excluded)
XTC/3M XTC/3S
Process Programs 99 1
Film Programs 32 9
Process Layers 999
per
process
1

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XTC/3 Operating Manual
Crystal Stability, Total . . . . . . . . . . . . 0, 25 to 9999 Hz (1 to 24 are excluded)
Crystal Quality Percent. . . . . . . . . . . 0 to 99%
Crystal Quality Counts . . . . . . . . . . . 0 to 99
Source
Source # . . . . . . . . . . . . . . . . . . . . . . 1 or 2
Crucible Selection . . . . . . . . . . . . . . 0 to 8, each source (0=disabled)
Control Gain . . . . . . . . . . . . . . . . . . . 0.01 to 100 Å/s / %Power
Control Time Constant . . . . . . . . . . . 0.1 to 100.0 s
Control Dead Time . . . . . . . . . . . . . . 0.1 to 100.0 s
Maximum Source Power . . . . . . . . . 0.0 to 100%
Density . . . . . . . . . . . . . . . . . . . . . . . 0.50 to 99.99 g/cm3
Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . 0.100 to 9.999
Option
Time Power . . . . . . . . . . . . . . . . . . . Yes / No
Delay Option. . . . . . . . . . . . . . . . . . . None, Shutter, Control, Both
Transfer Sensor . . . . . . . . . . . . . Yes / No
Transfer Tooling . . . . . . . . . . . . . 10.0 to 500.0%
Control Delay Time. . . . . . . . . . . 00:00 to 99:59 min:s
Ion Assisted Deposit. . . . . . . . . . . . . Yes / No
Name (XTC/3M only) . . . . . . . . . . . . provision for 15 alpha numerics
1.4.4 Display
Type/Color/Size . . . . . . . . . . . . . . . . TFT LCD, 3.8 in. diagonal
Format . . . . . . . . . . . . . . . . . . . . . . . Quarter VGA
Resolution . . . . . . . . . . . . . . . . . . . . 320 H x 240 V
Thickness Display Range. . . . . . . . . 0.000 to 999.9 kÅ
Thickness Display Resolution . . . . . 1 Å for 0 to 9.999 kÅ
10 Å for 10.00 to 99.99 kÅ
100 Å for 100.0 to 999.9 kÅ
1 kÅ for 1000 kÅ to 9999 kÅ
Rate Display Range . . . . . . . . . . . . . 0.0 to 99.9 Å/s; 100 to 999 Å/s
Rate Display Resolution . . . . . . . . . . 0.1 Å for 0 to 99.9 Å/s
1 Å for 100 to 999 Å/s

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XTC/3 Operating Manual
Power Display Range. . . . . . . . . . . . 0.0 to 99.9%
Graphic Display Functions . . . . . . . . Rate Deviation at ± 5, 10, 20, or 40 Å/s or
Power at 0.0 to 100%
Display Data Update Rate . . . . . . . . 1 Hz
1.4.5 Source / Recorder Outputs
Quantity . . . . . . . . . . . . . . . . . . . . . . 3 BNC, Female
Configuration . . . . . . . . . . . . . . . . . . Source 1, Source 2, Recorder
Function Ranges
Source Control . . . . . . . . . . . . . . 0 to 10 V, 0 to -10 V, 0 to 5 V,
0 to -5 V, 0 to 2.5 V, 0 to -2.5 V
Recorder Output. . . . . . . . . . . . . 0 to +10 V
Current rating . . . . . . . . . . . . . . . . . . 25 mA max. per channel on Source 1 and
Source 2, 5 mA max. on Recorder
Resolution . . . . . . . . . . . . . . . . . . . . 15 bits over full range (10 V)
Update Rate . . . . . . . . . . . . . . . . . . . 4 Hz, maximum, (dependent on
source characteristics).
Recorder Output Functions . . . . . . . Rate or Thickness or Power or
Rate Deviation
Recorder Output Ranges
Power . . . . . . . . . . . . . . . . . . . . . 0 to 100%
Rate . . . . . . . . . . . . . . . . . . . . . . 0 to 100 Å/s, 0 to 1000 Å/s
Thickness . . . . . . . . . . . . . . . . . . 0 to 100 Å, 0 to 1000 Å (both ranges modulo)
Rate Deviation . . . . . . . . . . . . . . Desired rate ± 50 Å/s
Accuracy . . . . . . . . . . . . . . . . . . . . . 2% full scale
1.4.6 Relays / Inputs
Relays . . . . . . . . . . . . . . . . . . . . . . . SPST 2.5 A relays rated @ 30 V (dc) or
30 V (ac) RMS or 42 V (peak) maximum;
12 standard; D sub connector; relays are
normally open in the power off state, may be
programmed to normally open or normally
closed during operation on XTC/3M.
Relay Ratings. . . . . . . . . . . . . . . . . . 100 VA inductive; 2.5 A maximum.