Inficon SQC-310 User manual

OPERATING MANUAL
SQC-310
Deposition Controller
PN 074-550-P1D
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www.inficon.com [email protected]
©2015 INFICON
®
SQC-310
Deposition Controller
TM
OPERATING MANUAL
PN 074-550-P1D
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Trademarks
The trademarks of the products mentioned in this manual are held by the companies that
produce them.
SQC-310™ and INFICON® are trademarks of INFICON GmbH.
Visual Basic®, Windows®, and Microsoft® are registered trademarks of Microsoft Corporation.
Oracle® and Java® are registered trademarks of Oracle and/or its affiliates.
Inconel® is a registered trademark of Inco Alloys International, Huntington, WV.
All other brand and product names are trademarks or registered trademarks of their respective companies.
Disclaimer
The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes
no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related
to the use of this product.
Due to our continuing program of product improvements, specifications are subject to change without notice.
Copyright
©2015 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.

WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products
manufactured by it, or by an affiliated company and sold by it, and described on
the reverse hereof, to be, for the period of warranty coverage specified below, free
from defects of materials or workmanship under normal proper use and service.
The period of warranty coverage is specified for the respective products in the
respective Seller instruction manuals for those products but shall not be less than
two (2) years from the date of shipment thereof by Seller. Seller's liability under
this warranty is limited to such of the above products or parts thereof as are
returned, transportation prepaid, to Seller's plant, not later than thirty (30) days
after the expiration of the period of warranty coverage in respect thereof and are
found by Seller's examination to have failed to function properly because of
defective workmanship or materials and not because of improper installation or
misuse and is limited to, at Seller's election, either (a) repairing and returning the
product or part thereof, or (b) furnishing a replacement product or part thereof,
transportation prepaid by Seller in either case. In the event Buyer discovers or
learns that a product does not conform to warranty, Buyer shall immediately notify
Seller in writing of such non-conformity, specifying in reasonable detail the nature
of such non-conformity. If Seller is not provided with such written notification,
Seller shall not be liable for any further damages which could have been avoided if
Seller had been provided with immediate written notification.
THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER
WARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR
OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S
EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLD
HEREUNDER. All other obligations and liabilities of Seller, whether in contract or
tort (including negligence) or otherwise, are expressly EXCLUDED. In no event
shall Seller be liable for any costs, expenses or damages, whether direct or
indirect, special, incidental, consequential, or other, on any claim of any defective
product, in excess of the price paid by Buyer for the product plus return
transportation charges prepaid.
No warranty is made by Seller of any Seller product which has been installed,
used or operated contrary to Seller's written instruction manual or which has been
subjected to misuse, negligence or accident or has been repaired or altered by
anyone other than Seller or which has been used in a manner or for a purpose for
which the Seller product was not designed nor against any defects due to plans or
instructions supplied to Seller by or for Buyer.
This manual is intended for private use by INFICON® Inc. and its customers.
Contact INFICON before reproducing its contents.
NOTE: These instructions do not provide for every contingency that may arise in
connection with the installation, operation or maintenance of this equipment.
Should you require further assistance, please contact INFICON.
Warranty
www.inficon.com [email protected]

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PN 074-550-P1D
SQC-310 Operating Manual
Table Of Contents
Cover Page
Title Page
Trademarks
Disclaimer
Copyright
Declaration Of Conformity
Warranty
Chapter 1
Introduction
1.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-1
1.1.1 Related Operating Manuals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
1.2 SQC-310 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
1.2.1 Definition of Notes, Cautions and Warnings. . . . . . . . . . . . . . . . . . . . . . . . .1-2
1.2.2 General Safety Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
1.2.3 Earth Ground . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3
1.3 How to Contact INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5
1.3.1 Returning SQC-310 to INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5
1.4 SQC-310 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6
1.4.1 Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.4.2 Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.4.3 Source . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6
1.4.4 Digital I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.4.5 Power . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7
1.4.6 Operating Environment. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7
1.4.7 Dimensions & Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7
1.4.8 Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7
1.4.9 Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
1.4.10 Process Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-8
1.4.11 Layer Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-8
1.4.12 Film Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
1.5 Unpacking and Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
1.6 Configurations and Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-10
1.6.1 SQC-310 Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-10
1.6.2 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-11
1.6.2.1 Cables and Oscillator Kits . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11

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1.6.2.2 Handheld Remote Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12
1.6.2.3 Rack Mount Kits . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12
1.6.2.4 Crystal Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12
1.7 Initial Power-On Verification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13
Chapter 2
Installation
2.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.2 Front Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.3 Rear Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
2.4 System Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5
2.5 Ground Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6
2.5.1 Establishing Earth Ground . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7
2.6 Handheld Remote Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7
2.7 Rack Mount . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
2.7.1 Full Rack Extender . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
2.7.1.1 Inventory. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
2.7.1.2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9
2.7.2 Rack Adapter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10
2.7.2.1 Inventory. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10
2.7.2.2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11
2.8 I/O Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11
2.9 Interfacing SQC-310 to CI-100 Crucible Indexer . . . . . . . . . . . . . . . . . . . . 2-12
2.9.1 BCD I/O Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-12
2.9.2 Individual (Binary - as defined by CI-100) I/O Setup . . . . . . . . . . . . . . . . . 2-13
2.10 Interfacing SQC-310 to EBS-530 E-Beam Sweep Controller. . . . . . . . . . . 2-14
Chapter 3
Operation
3.1 Thin Film Deposition Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.1.1 Definitions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.1.2 Thin Film Deposition Phases . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
3.2 SQC-310 Menu Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
3.3 Main Screen, Menu 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5
3.4 Main Screen, Menu 2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
3.5 Main Screen, Menu 3 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
3.6 Quick Edit Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
3.7 Process Menus. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10
3.8 Process Menu - Edit Layer. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
3.9 Layer Copy, Insert, and Delete Menus. . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-15

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3.10 Film Menus. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17
3.11 Film Edit Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18
3.11.1 Film Conditioning Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-21
3.11.2 Film Deposit Controls Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-22
3.11.3 Film Configure Sensor Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-24
3.12 System Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-25
3.12.1 Input and Relay Menus. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-27
3.12.2 Logic Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-30
3.12.2.1 Creating a Logic Statement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-31
3.12.2.2 Logic Statement Conditions (IF). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-32
3.12.2.3 Logic Statement Actions (THEN) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-35
3.12.3 Sensors and Sources Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-36
3.12.3.1 Sensor Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-36
3.12.3.2 Source Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-39
Chapter 4
Communications
4.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-1
4.1.1 RS-232C Serial Port . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.1.2 USB Port. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
4.1.3 Ethernet (TCP/IP) Port . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
4.1.3.1 Ethernet Network Protocol . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
4.1.3.1.1 Accessing Network Settings in Windows XP . . . . . . . . . . . . . . . . . . . . . . . .4-3
4.1.3.1.2 Accessing Network Settings in Windows 7 and Windows 8. . . . . . . . . . . . . 4-6
4.1.3.2 How to change the SQC-310 IP address . . . . . . . . . . . . . . . . . . . . . . . . . . .4-8
4.2 SQC-310 Communications Protocol. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-9
4.2.1 Command Packet (Host to SQC-310 Message). . . . . . . . . . . . . . . . . . . . . 4-10
4.2.2 Response Packet (SQC-310 to Host Message) . . . . . . . . . . . . . . . . . . . . .4-11
4.2.3 Calculating the CRC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-12
4.3 SQC-310 Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-13
4.3.1 Hello Message . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-13
4.3.1.1 Hello Message Example. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-13
4.3.2 Get/Set Film Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-13
4.3.2.1 Get/Set Film Parameter Examples. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-15
4.3.3 Get/Set System Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-15
4.3.3.1 Get/Set System Parameter Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-16
4.3.4 Get/Set Process Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-16
4.3.4.1 Get/Set Process Parameter Examples. . . . . . . . . . . . . . . . . . . . . . . . . . . .4-17
4.3.5 Get/Set Layer Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-18

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4.3.5.1 Get/Set Layer Parameter Examples. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-19
4.3.6 Get/Set Material Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-19
4.3.6.1 Get/Set Material Parameter Examples. . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20
4.3.7 Get/Set Input and Relay Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20
4.3.7.1 Get/Set Input and Relay Parameter Examples . . . . . . . . . . . . . . . . . . . . . 4-22
4.3.8 Get/Set Sensor and Source Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . 4-23
4.3.8.1 Get/Set Sensor and Source Parameter Examples. . . . . . . . . . . . . . . . . . . 4-24
4.3.9 Get/Set Logic Statement Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-25
4.3.9.1 Get/Set Logic Statement Parameter Examples . . . . . . . . . . . . . . . . . . . . . 4-25
4.3.10 Get Num Channels. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-26
4.3.10.1 Get Num Channels Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-26
4.3.11 Get Readings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-26
4.3.11.1 Get Readings Examples. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-27
4.3.12 Get Sensor Rate. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-27
4.3.12.1 Get Sensor Rate Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-27
4.3.13 Get Output Rate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-27
4.3.13.1 Get Output Rate Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-28
4.3.14 Get Sensor Thickness . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-28
4.3.14.1 Get Sensor Thickness Example. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-28
4.3.15 Get Output Thickness. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-28
4.3.15.1 Get Output Thickness Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-28
4.3.16 Get Sensor Frequency/Crystal Life . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-29
4.3.16.1 Get Sensor Frequency/Crystal Life Example . . . . . . . . . . . . . . . . . . . . . . . 4-29
4.3.17 Get Output Deviation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-29
4.3.17.1 Get Output Deviation Example. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-29
4.3.18 Get/Set Output Power . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-30
4.3.18.1 Get/Set Output Power Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-30
4.3.19 Set Active Process . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-30
4.3.19.1 Set Active Process Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-31
4.3.20 Set Run State. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-31
4.3.20.1 Set Run State Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-31
4.3.21 Get Run State. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-32
4.3.21.1 Get Run State Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-33
4.3.22 Start/Stop Download/Upload Session . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-34
4.3.22.1 Start/Stop Download/Upload Session Example . . . . . . . . . . . . . . . . . . . . . 4-34
4.4 CRC Examples. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-34
4.4.1 Visual Basic®5/6 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-35
4.4.2 Java®. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-37
4.4.3 C++. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-38

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Chapter 5
SQC-310 Comm Software
5.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-1
5.2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-1
5.3 Main Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
5.4 Data Log Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4
5.5 Instrument Window. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6
5.5.1 Process Tree . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-8
5.5.2 Film Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9
5.5.3 Materials Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-10
5.5.4 Sensor Setup Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-11
5.5.5 Source Setup Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-12
5.5.6 Digital I/O Setup Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-13
5.5.7 Logic Statements Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-16
5.5.7.1 Creating Logic Statements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-18
5.5.8 System Setup Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-18
5.6 Graph Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-19
5.7 Communications Setup Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-20
5.8 View Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-22
5.9 Help Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-23
Chapter 6
Troubleshooting and Maintenance
6.1 Troubleshooting Guide . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-1
6.2 Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-14
6.3 Firmware Upgrades . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-14
6.4 Clearing the Memory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-14
6.5 Spare Parts. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-16
6.6 Persistent Crystal Fail Indication . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-17
Chapter 7
Calibration Procedures
7.1 Importance of Density, Tooling and Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . . .7-1
7.2 Determining Density . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-1
7.3 Determining Tooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-2
7.4 Laboratory Determination of Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-3
7.5 Control Loop. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-5
7.5.1 Identifying a Fast or Slow Source. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-7
7.6 Control Loop Tuning Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-8

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Chapter 8
Measurement Theory
8.1 Basics. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-1
8.1.1 Monitor Crystals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-2
8.1.2 Period Measurement Technique . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-4
8.1.3 Z-Match Technique . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-5
Appendix A
Material Table
A.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .A-1

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Chapter 1
Introduction
1.1 Introduction
INFICON SQC-310 and SQC-310C are quartz crystal microbalance technology
based deposition controllers, providing a unique combination of accuracy and
powerful features in a compact, low-cost controller.
Figure 1-1 SQC-310
The standard SQC-310 is a sequential layer thin film deposition controller that can
monitor two quartz crystal sensors and control one of two evaporation sources at
a time. Eight process control relays and eight digital inputs are included to support
a broad range of external devices. The number of sensors, outputs, and digital I/O
can be doubled with an optional expansion card. SQC-310C is a thin film controller
that is capable of codeposition by monitoring four quartz crystal sensors and
controlling four sources simultaneously. Sixteen process control relays and sixteen
digital inputs are included. Both controllers come standard with RS-232 and USB
communications with an option to replace USB with Ethernet communications.
NOTE: SQC-310 and SQC-310C are both referred to as SQC-310 in this manual.
If there is a reason to distinguish between the two models, the SQC-310 or
SQC-310C model number will be called out.
Please review the entire manual for detailed operational, programming, and
safety information.

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1.1.1 Related Operating Manuals
PN 074-154 . . . . . . . . . . . . . . . . . . . UHV Bakeable Sensor
PN 074-155 . . . . . . . . . . . . . . . . . . . CrystalSix Sensor
PN 074-398 . . . . . . . . . . . . . . . . . . . Crystal 12 Sensor
PN 074-156 . . . . . . . . . . . . . . . . . . . Front Load Single and Dual Sensors
PN 074-157 . . . . . . . . . . . . . . . . . . . Sputtering Crystal Sensor
PN 074-609 . . . . . . . . . . . . . . . . . . . Cool Drawer Single and Dual Sensors
PN 074-643 . . . . . . . . . . . . . . . . . . . ALD Sensor
PN 153800 . . . . . . . . . . . . . . . . . . . . RSH-600 Sensor
Sensor operating manuals are available on the Thin Film Instruments and Sensors
Manuals CD included with the SQC-310 ship kit. Other related documentation can
be downloaded from www.inficon.com.
1.2 SQC-310 Safety
1.2.1 Definition of Notes, Cautions and Warnings
When using this manual, please pay attention to the NOTES, HINTS, CAUTIONS,
and WARNINGS found throughout. For the purposes of this manual they are
defined as follows:
NOTE: Pertinent information that is useful in achieving maximum SQC-310
efficiency when followed.
HINT: Hints provide insight into SQC-310 usage.
CAUTION
Failure to heed these messages could result in damage
to SQC-310 or loss of data.
WARNING
Failure to heed these messages could result in personal
injury.
WARNING - Risk Of Electric Shock
Dangerous voltages are present which could result in
personal injury.

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1.2.2 General Safety Information
WARNING - Risk Of Electric Shock
SQC-310 does not have any user-serviceable
components.
WARNING - Risk Of Electric Shock
Dangerous voltages may be present whenever SQC-310
is turned on or external connections are present.
WARNING - Risk Of Electric Shock
SQC-310 must be connected to earth ground through a
sealed three-conductor power cable plugged into a
socket outlet with protective ground terminal.
Extension cables must have three conductors including
a protective earth ground.
WARNING
Failure to operate SQC-310 in the manner intended by
INFICON can circumvent the safety protection provided
by SQC-310 and may result in personal injury.
CAUTION - Static Sensitive Device
SQC-310 contains delicate circuitry, susceptible to
transient power line voltages or static.
1.2.3 Earth Ground
SQC-310 is connected to earth ground through a sealed three-core
(three-conductor) power cable, which must be plugged into a socket outlet with a
protective earth terminal. Extension cables must always have three conductors
including a protective earth terminal.

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WARNING
Never interrupt the protective earth circuit.
This symbol indicates where the protective earth ground
is connected inside SQC-310.
Never unscrew or loosen this connection.
Disconnecting the protective earth terminal or
interrupting the protective earth circuit, whether inside or
outside of SQC-310, may render SQC-310 dangerous.

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1.3 How to Contact INFICON
Worldwide customer support information is available under Support >> Support
Worldwide at www.inficon.com:
Sales and Customer Service
Technical Support
Repair Service
If experiencing a problem with SQC-310, please have the following information
readily available:
The Sales Order or PO number for the SQC-310 purchase.
The software version, if the issue is regarding the SQC-310 Comm software.
A description of the problem.
An explanation of any corrective action already attempted.
The exact wording of any error messages received.
1.3.1 Returning SQC-310 to INFICON
Do not return any component of SQC-310 to INFICON without first speaking with
a Customer Support Representative and obtaining a Return Material Authorization
(RMA) number.
Packages delivered to INFICON without an RMA number will be held until the
customer is contacted. This will result in delays in servicing SQC-310.
If returning a SQC-310 with a crystal sensor, or other component potentially
exposed to process materials, prior to being given an RMA number a completed
Declaration Of Contamination (DOC) form will be required. DOC forms must be
approved by INFICON before an RMA number is issued. INFICON may require
that the component be sent to a designated decontamination facility, not to the
factory.

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1.4 SQC-310 Specifications
1.4.1 Measurement
Crystal Frequency Range. . . . . . . . . 6.5 to 1.0 MHz (adjustable)
Frequency Resolution . . . . . . . . . . . .±0.012 Hz over 0.25 s measurement interval
Frequency Accuracy . . . . . . . . . . . . .0.001%
Measurement Rate. . . . . . . . . . . . . . 0.10 to 1.0 s (adjustable)
Thickness and Rate Resolution . . . . .±0.015 Å @ tooling/density/z-ratio =
100/1/1, fundamental frequency = 6 MHz,
0.25 s measurement interval
Thickness Accuracy . . . . . . . . . . . . . 0.5% typical
Rate Accuracy . . . . . . . . . . . . . . . . . 0.5% typical
1.4.2 Sensor
Sensor Inputs . . . . . . . . . . . . . . . . . . 2 (+2 optional), 4 (SQC-310C)
Measurement Technique . . . . . . . . . Conventional (Active) Oscillation
Sensor Type . . . . . . . . . . . . . . . . . . . Single, Dual, Rotary
1.4.3 Source
Number of Sources . . . . . . . . . . . . . 2 (+2 optional), 4 (SQC-310C)
Control Voltage. . . . . . . . . . . . . . . . . 0 to ±10 V into 2 kload
Resolution . . . . . . . . . . . . . . . . . . . . 15 bits
1.4.4 Digital I/O
Digital Inputs. . . . . . . . . . . . . . . . . . . 8 (+8 optional), 16 (SQC-310C)
Functions . . . . . . . . . . . . . . . . . . User-selected (see Chapter 3, Operation)
Input Rating . . . . . . . . . . . . . . . . 5 V (dc), non-isolated
Relay Outputs. . . . . . . . . . . . . . . . . . 8 (+8 optional), 16 (SQC-310C)
Functions . . . . . . . . . . . . . . . . . . User-selected (see Chapter 3, Operation)
Relay Rating. . . . . . . . . . . . . . . . 30 V (rms) or 30 V (dc), 2 A maximum