Inficon Cygnus 2 User manual

OPERATING MANUAL
Cygnus
®
2
Thin Film Deposition Controller
PN 074-545-P1H
C
over
P
age

Trademarks
The trademarks of the products mentioned in this Operating Manual are held by the companies that
produce them.
CAJON® is a registered trademark of Swagelok, Co.
INFICON®, RateWatcher™, and Cygnus® are trademarks of INFICON GmbH.
Kingston® is a registered trademark of Kingston Technology Corporation.
Lexar® is a registered trademark of Lexar Media, Inc.
Memorex® is a U.S. registered trademark of Memtek Corporation.
SanDisk® is a registered trademark of SanDisk Corporation.
Windows®, Windows 95® and Microsoft® are registered trademarks of Microsoft Corporation.
All other brand and product names are trademarks or registered trademarks of their respective companies.
Disclaimer
The information contained in this Operating Manual is believed to be accurate and reliable. However, INFICON
assumes no responsibility for its use and shall not be liable for any special, incidental, or consequential
damages related to the use of this product.
Due to our continuing program of product improvements, specifications are subject to change without notice.
Copyright
©2017 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.

Declaration Of Conformity
Page 1

Warranty
Standard INFICON One Year
Page 1
WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products
manufactured by it, or by an affiliated company and sold by it, and described on
the reverse hereof, to be, for the period of warranty coverage specified below, free
from defects of materials or workmanship under normal proper use and service.
The period of warranty coverage is specified for the respective products in the
respective Seller instruction manuals for those products but shall not be less than
two (2) years from the date of shipment thereof by Seller. Seller's liability under
this warranty is limited to such of the above products or parts thereof as are
returned, transportation prepaid, to Seller's plant, not later than thirty (30) days
after the expiration of the period of warranty coverage in respect thereof and are
found by Seller's examination to have failed to function properly because of
defective workmanship or materials and not because of improper installation or
misuse and is limited to, at Seller's election, either (a) repairing and returning the
product or part thereof, or (b) furnishing a replacement product or part thereof,
transportation prepaid by Seller in either case. In the event Buyer discovers or
learns that a product does not conform to warranty, Buyer shall immediately notify
Seller in writing of such non-conformity, specifying in reasonable detail the nature
of such non-conformity. If Seller is not provided with such written notification,
Seller shall not be liable for any further damages which could have been avoided if
Seller had been provided with immediate written notification.
THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER
WARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR
OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S
EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLD
HEREUNDER. All other obligations and liabilities of Seller, whether in contract or
tort (including negligence) or otherwise, are expressly EXCLUDED. In no event
shall Seller be liable for any costs, expenses or damages, whether direct or
indirect, special, incidental, consequential, or other, on any claim of any defective
product, in excess of the price paid by Buyer for the product plus return
transportation charges prepaid.
No warranty is made by Seller of any Seller product which has been installed,
used or operated contrary to Seller's written instruction manual or which has been
subjected to misuse, negligence or accident or has been repaired or altered by
anyone other than Seller or which has been used in a manner or for a purpose for
which the Seller product was not designed nor against any defects due to plans or
instructions supplied to Seller by or for Buyer.
This manual is intended for private use by INFICON® Inc. and its customers.
Contact INFICON before reproducing its contents.
NOTE: These instructions do not provide for every contingency that may arise in
connection with the installation, operation or maintenance of this equipment.
Should you require further assistance, please contact INFICON.
Warranty
www.inficon.com r[email protected]

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Cygnus 2 Operating Manual
Table Of Contents
Cover Page
Trademarks
Disclaimer
Copyright
Declaration Of Conformity
Warranty
Chapter 1
Introduction and Specifications
1.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-1
1.2 Cygnus 2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2
1.2.1 Definition of Notes, Cautions and Warnings. . . . . . . . . . . . . . . . . . . . . . . . .1-2
1.2.2 General Safety Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3
1.2.3 Earth Ground . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3
1.2.4 Main Power Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4
1.3 How To Contact INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
1.3.1 Returning Your Cygnus 2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5
1.4 Cygnus 2 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.4.1 Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6
1.4.2 Screens and Hierarchy. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6
1.4.3 Cygnus 2 Features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7
1.4.3.1 Recipe Storage and Datalogging . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7
1.4.3.2 Sensor Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7
1.4.3.3 Source Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7
1.4.3.4 Material Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
1.4.3.5 General Global Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-10
1.4.4 Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-11
1.4.5 DAC Outputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12
1.4.6 Logic Processing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13
1.4.7 Relays / Inputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-13
1.4.8 Remote Communications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
1.4.9 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-14
1.4.10 Power . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-14
1.4.11 Operating Environment. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-15
1.4.12 Storage Temperature . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15
1.4.13 Warm Up Period. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-15

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Cygnus 2 Operating Manual
1.4.14 Size . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15
1.4.15 Installation Clearance Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15
1.4.15.1 Connector Clearances:. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15
1.4.15.2 Cooling Clearances:. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15
1.4.16 Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-16
1.4.17 Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-16
1.5 Unpacking and Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-16
1.6 Parts and Options Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-16
1.6.1 Base Configurations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-16
1.6.2 Pre-installed Options or Spares . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-17
1.6.3 Optional Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-17
1.6.4 Oscillator Packages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-17
1.6.5 Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-17
1.6.6 Replacement Cables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-18
1.7 Initial Power-On Verification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-19
Chapter 2
Installation and Interfaces
2.1 Location Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.1.1 Sensor Types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.1.2 Sensor Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.1.3 Cygnus 2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
2.2 Avoiding Electrical Interference . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
2.2.1 Verifying/Establishing Earth Ground . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
2.2.2 Connections to Earth Ground. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5
2.2.3 Minimizing Noise Pickup from External Cabling. . . . . . . . . . . . . . . . . . . . . . 2-6
2.3 Connecting the Controller. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7
2.3.1 Routing XIU Cables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7
2.3.2 Interface Cable Fabrication and Pin-Out . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7
2.3.2.1 Source Control Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
2.3.2.2 Crucible Indexer Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
2.3.2.3 DAC Option Kit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
2.3.2.4 I/O Expansion Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9
2.3.2.5 RS-232C Communications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11
2.3.2.6 Isolated +24 V (dc) Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-12
Chapter 3
Operation
3.1 Front Panel Controls . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.2 Rear Panel Interfaces. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

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Cygnus 2 Operating Manual
3.3 Displays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-5
3.3.1 Main Menu Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-5
3.3.2 Operate. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-6
3.3.3 Sensor Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-8
3.3.3.1 Sensor Information Rate/Xtal Display Description . . . . . . . . . . . . . . . . . . . . 3-8
3.3.3.2 Crystal Life and Starting Frequency . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10
3.3.3.3 Function Key Selection Choices. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10
3.3.3.4 Sensor Information Type/Freq Display Description . . . . . . . . . . . . . . . . . . 3-11
3.3.3.4.1 TEST XIU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
3.3.4 Sensor Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-13
3.3.5 Source . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-14
3.3.6 Material. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-15
3.3.6.1 Overview Page . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-15
3.3.6.2 Source Page. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-15
3.3.6.3 Sensor Page. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-16
3.3.6.4 Pre/Post Page . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16
3.3.6.5 Deposit Page . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-16
3.3.6.6 Lib A-Hf, Lib Hf-Sc, Lib Sc-Z Sub-Displays . . . . . . . . . . . . . . . . . . . . . . . .3-17
3.3.7 General. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-17
3.3.7.1 Process Page . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-17
3.3.7.2 DACs Page. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-17
3.3.7.3 Comm Page . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18
3.3.7.4 Message Page . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18
3.3.7.5 Date/Time Page . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18
3.3.7.6 Test Page . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-18
3.3.7.7 Lock Page. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18
3.3.7.8 Audio/Visual Page . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-18
3.3.8 Digital I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-19
3.3.9 Logic . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-20
3.3.10 Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-20
3.3.11 Counter / Timer. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20
3.3.12 USB Storage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20
3.3.13 Programming Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-20
3.4 State Descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-23
3.5 Special Features. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-25
3.5.1 Crystal Switching . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-25
3.5.1.1 XtalTwo (CrystalTwo) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-26
3.5.1.2 XtalSix (CrystalSix). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-27
3.5.1.3 Xtal12 (Crystal12). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-27

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Cygnus 2 Operating Manual
3.5.1.4 Generic Sensor Crystal Switching . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-28
3.5.2 Source/Crucible Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-28
3.5.2.1 Example: Programming Turret Source Crucible Selection. . . . . . . . . . . . . 3-28
3.5.3 Auto-Z. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-29
3.5.4 Rate Watcher . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-31
3.5.5 Handheld Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-31
3.5.5.1 Determining Soak Power with the Handheld Controller . . . . . . . . . . . . . . . 3-32
3.5.6 Test Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-32
3.5.6.1 Standard or Time Compressed . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-32
3.5.6.2 Advanced Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-32
3.5.7 USB Storage Device . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-33
3.5.8 Lock and Access Codes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-34
3.5.9 Datalog . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-35
3.5.9.1 Datalog contents: . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-36
3.5.9.2 Page Format ASCII Example: . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-38
3.5.9.3 Comma Format ASCII Example to USB Storage Device: . . . . . . . . . . . . . 3-39
3.5.10 DAC Monitoring . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-40
3.5.11 Trend Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-40
3.5.11.1 Cygnus 2 Parameters Associated with the Trend Analysis Feature . . . . . 3-40
Chapter 4
Sensor and Source Set-Up
4.1 Sensor Set-Up Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.1.1 Sensor Display Navigation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.1.2 Sensor Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
4.2 Source Set-Up Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4
4.2.1 Source Navigation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4
4.2.2 Source Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
4.3 DAC Output Selection Rules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7
Chapter 5
Material Set-Up
5.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
5.1.1 Material Overview Page . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
5.1.2 Material Definition. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
5.1.3 Material Source Page Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3
5.1.4 Material Sensor Parameters Page . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7
5.1.5 Pre/Post Screen Deposit Page Parameters . . . . . . . . . . . . . . . . . . . . . . . . 5-10
5.1.6 Post Deposit Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-13
5.1.7 Deposit Page Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-14

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5.2 Special Material Parameter Features. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-17
5.2.1 Skip Deposit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-17
5.2.2 RateWatcher™ Sample and Hold Feature. . . . . . . . . . . . . . . . . . . . . . . . .5-17
Chapter 6
General Parameters
6.1 General Set-Up Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1
6.2 General Process Page . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1
6.3 DACs Page Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-2
6.4 COMM Page Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-3
6.5 MESSAGE Page Set-up. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-5
6.6 DATE / TIME Set Up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6
6.7 TEST Page Set Up. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-7
6.8 LOCK Page Code Set-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-8
6.9 AUDIO / VISUAL Page Set Up. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9
Chapter 7
Digital I/O
7.1 Digital I/O Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-1
7.2 All Input Page . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-1
7.3 All Output Page . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-2
7.4 I/O Board Page. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-3
7.4.1 Output Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-3
Chapter 8
Logic Statement Set-Up
8.1 Logic Statement Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-1
8.2 Editing the Logic Statements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-2
8.2.1 Logic Statement Groups. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-3
8.2.2 Logic Statement Editing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-4
8.2.3 AND/OR and ON Logic Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-6
8.2.3.1 ON Operator. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-6
8.3 IF Event Definitions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-7
8.4 THEN Action Definitions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-14
8.5 Logic Statement Example. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-17
Chapter 9
Remote Communications
9.1 Remote Communication Configuration Overview. . . . . . . . . . . . . . . . . . . . .9-1
9.2 Physical Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-1
9.2.1 RS-232C Serial Port . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9-1

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9.2.2 TCP/IP Ethernet Port . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-2
9.2.2.1 Network Connection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-2
9.2.2.2 How to Set Up the Network Protocol on the PC. . . . . . . . . . . . . . . . . . . . . . 9-2
9.3 Message Format . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-5
9.3.1 Protocol . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-5
9.3.1.1 Command Packet (Host to Cygnus 2 Message) . . . . . . . . . . . . . . . . . . . . . 9-5
9.3.1.2 Data Type Codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-7
9.3.1.3 Response Packet (Cygnus 2 to Host Message). . . . . . . . . . . . . . . . . . . . . . 9-8
9.3.1.4 Timeouts. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-10
9.4 Communication Commands. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-10
9.4.1 Query and Update Commands. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-10
9.4.2 Status Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-11
9.4.3 HELLO Command . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-11
9.4.4 Query General Parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-11
9.4.5 Update General Parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-12
9.4.6 Query Material Parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-17
9.4.7 Update Material Parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-17
9.4.8 Query Sensor Parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-22
9.4.9 Update Sensor Parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-22
9.4.10 Query Source Parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-23
9.4.11 Update Source Parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-23
9.4.12 Query Process Material Parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-25
9.4.13 Update Process Material Parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-25
9.4.14 Query Material Name . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-26
9.4.15 Update Material Name . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-26
9.4.16 Query Input Name . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-26
9.4.17 Update Input Name . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-26
9.4.18 Query Output Name . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-26
9.4.19 Update Output Name . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-27
9.4.20 Query Output Type. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-27
9.4.21 Update Output Type. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-27
9.4.22 Query User Message . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-27
9.4.23 Update User Message . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-28
9.4.24 Query Logic Statement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-28
9.4.25 Update Logic Statement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-30
9.4.26 Cygnus 2 Event List . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-30
9.4.27 Cygnus 2 Action List. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-34
9.4.28 Status General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-36
9.4.29 Status Material . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-39

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9.4.30 Status Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9-41
9.4.31 Remote General Action . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9-43
9.4.32 Remote Material Action . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-46
9.4.33 Cygnus 2 Communications Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . .9-48
9.4.33.1 General Command Packet Format. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9-48
9.4.33.2 General Response Packet Format . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-48
9.4.33.3 HELLO Command, ASCII name and version . . . . . . . . . . . . . . . . . . . . . . .9-48
9.4.33.4 Query Material Parameter, Z-Ratio (2), Material 1 . . . . . . . . . . . . . . . . . . . 9-49
9.4.33.5 Update Material Parameter, Control Loop (4), Material 1, PID (2) . . . . . . . 9-49
9.4.33.6 Query Sensor Parameter, Shutter Output (1), Sensor 1 . . . . . . . . . . . . . .9-49
9.4.33.7 Update Sensor Parameter, Sensor Type (2), Sensor 1, CrystalTwo (1) . . 9-49
9.4.33.8 Query Source Parameter, Shutter Output (2), Source 1 . . . . . . . . . . . . . .9-49
9.4.33.9 Update Source Parameter, Number of crucibles (3), Source 1, 4 crucibles (1)
9-49
9.4.33.10 Query Material Name, Material 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9-50
9.4.33.11 Update Material Name, Material 1, “SILVER”. . . . . . . . . . . . . . . . . . . . . . .9-50
9.4.33.12 Query Input Name, Input 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-50
9.4.33.13 Update Input Name, Input 1, “P1”. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9-50
9.4.33.14 Query Output Name, Output 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9-50
9.4.33.15 Update Output Name, Output 1, “SHUTTER” . . . . . . . . . . . . . . . . . . . . . . 9-50
9.4.33.16 Query Output Type, Output 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-51
9.4.33.17 Update Output Type, Output 1, Normally Closed (1) . . . . . . . . . . . . . . . . .9-51
9.4.33.18 Query User Message, Message 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-51
9.4.33.19 Update User Message, Message 1, “HELLO!”. . . . . . . . . . . . . . . . . . . . . . 9-51
9.4.33.20 Query Logic Statement, Statement 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9-51
9.4.33.21 Update Logic statement, Statement 1, “IF External Input 1 THEN Start 1” 9-52
9.4.33.22 Status Material, Thickness (4), Material 1 . . . . . . . . . . . . . . . . . . . . . . . . . 9-53
9.4.33.23 Status Sensor, Crystal Life (0), Sensor 1 . . . . . . . . . . . . . . . . . . . . . . . . . .9-53
9.4.33.24 Remote General Action, Stop All . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9-53
9.4.33.25 Remote Material Action, Open Source Shutter (8). . . . . . . . . . . . . . . . . . . 9-53
9.4.33.26 Example for Interpreting Float Responses . . . . . . . . . . . . . . . . . . . . . . . . .9-54
Chapter 10
Maintenance and Calibration Procedures
10.1 Importance of Density, Tooling and Z-Ratio. . . . . . . . . . . . . . . . . . . . . . . .10-1
10.2 Determining Density . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-1
10.3 Determining Tooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-2
10.4 Laboratory Determination of Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-3
10.5 Source Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-5

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10.5.1 Source Maintenance Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-6
10.5.1.1 Crucible Rotation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-6
10.5.1.2 Toggle Sensor and Source Shutter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-6
10.5.1.3 Start/Stop Manual Power . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-6
10.6 System Status . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-7
Chapter 11
Counters and Timers
11.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-1
Chapter 12
USB Storage
12.1 File Handling (USB) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-1
12.1.1 USB Storage Devices. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-1
12.2 Directory Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-1
12.3 Configuration Files . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-2
12.4 Data Logs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-3
12.5 Screen Captures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-4
Chapter 13
Troubleshooting, Status and Error Messages
13.1 Status Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-1
13.2 User Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-4
13.3 STOP messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-5
13.4 Transient Messages. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-6
13.5 Input Error Messages. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-10
13.6 Troubleshooting Guide. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-11
13.6.1 Troubleshooting Cygnus 2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-12
13.6.2 Troubleshooting Transducers/Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . 13-15
13.6.3 Troubleshooting Computer Communications. . . . . . . . . . . . . . . . . . . . . . 13-19
13.7 Replacing the Crystal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-20
13.7.1 Front Load . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-20
13.7.2 Cool Drawer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-21
13.7.3 Shuttered and Dual Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-23
13.7.4 Bakeable Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-23
13.7.5 Sputtering Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-24
13.7.6 Crystal Snatcher. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-25
13.7.7 CrystalSix (XtalSix). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-25
13.8 Crystal Sensor Emulator
IPN 760-601-G1 or 760-601-G2. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-26
13.8.1 Diagnostic Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-27

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13.8.1.1 Measurement System Diagnostic Procedure . . . . . . . . . . . . . . . . . . . . . .13-27
13.8.1.2 Feedthrough Or In-Vacuum Cable
Diagnostic Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-28
13.8.1.3 Sensor Head Or Monitor Crystal
Diagnostic Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-29
13.8.1.4 System Diagnostics Pass But
Crystal Fail Message Remains. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .13-30
13.8.2 % XTAL Life . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-30
13.8.3 Sensor Cover Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .13-31
13.8.3.1 Compatible Sensor Heads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .13-31
13.8.3.2 Incompatible Sensor Heads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .13-31
13.8.4 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-32
Chapter 14
Measurement and Control Theory
14.1 Basics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .14-1
14.1.1 Monitor Crystals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-2
14.1.2 Period Measurement Technique . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-4
14.1.3 Z-match Technique. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-5
14.1.4 Active Oscillator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .14-6
14.1.5 ModeLock Oscillator. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-7
14.1.6 Auto-Z Theory. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-9
14.1.7 Control Loop Theory. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .14-11
Appendix A
Material Table
A.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .A-1
Index

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Cygnus 2 Operating Manual
Chapter 1
Introduction and Specifications
1.1 Introduction
Cygnus 2 is a closed loop process controller designed for use primarily in physical
vapor deposition. Cygnus 2 monitors and/or controls the rate and thickness of the
deposition of thin films. Deposition rate and thickness are inferred from the
frequency change induced by mass added to a quartz crystal. This technique
positions sensors in the path between or to the side of the source of the vaporized
material and the target substrate. The sensor incorporates an exposed oscillating
quartz crystal whose frequency decreases as material accumulates. The change
in frequency provides information to determine rate and thickness and to
continually control the evaporation power source. With user programmed time,
thickness and power limits and with desired rates and material characteristics,
Cygnus 2 is capable of automatically controlling the process in a precise and
repeatable manner. User interaction is accomplished via Cygnus 2 front panel or
remote communication and consists of selection or entry of parameters to define
the process.
A complete system consists of a main electronics unit also called Cygnus 2, sensor
heads and a crystal interface unit (XIU) for each attached sensor. These items are
generally bundled at the factory and are also sold separately.
This Cygnus 2 Operating Manual provides user information for installing,
programming and operating the main electronics unit.
When reading Cygnus 2 Operating Manual, please pay particular attention to the
Notes, Cautions, and Warnings found throughout the text. The Notes, Cautions,
and Warnings are defined in section 1.2.1 on page 1-2.
You are invited to comment on the usefulness and accuracy of this manual by
visiting our website at www.inficon.com.

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Cygnus 2 Operating Manual
1.2 Cygnus 2 Safety
1.2.1 Definition of Notes, Cautions and Warnings
When using this manual, please pay attention to the Notes, Cautions, and
Warnings found throughout. For the purposes of this manual they are defined as
follows:
NOTE: Pertinent information that is useful in achieving maximum Cygnus 2
efficiency when followed.
CAUTION
Failure to heed these messages could result in damage
to Cygnus 2.
WARNING
Failure to heed these messages could result in personal
injury.
WARNING - Risk Of Electric Shock
Dangerous voltages are present which could result in
personal injury.

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Cygnus 2 Operating Manual
1.2.2 General Safety Information
WARNING - Risk Of Electric Shock
Do not open the Cygnus 2 case! There are no
user-serviceable components within the Cygnus 2 case.
Dangerous voltages may be present whenever the power
cord or external input/relay connectors are present.
Refer all maintenance to qualified personnel.
CAUTION
Cygnus 2 contains delicate circuitry which is susceptible
to transient power line voltages. Disconnect the line cord
whenever making any interface connections. Refer all
maintenance to qualified personnel.
1.2.3 Earth Ground
Cygnus 2 is connected to earth ground through a sealed three-core
(three-conductor) power cable, which must be plugged into a socket outlet with a
protective earth terminal. Extension cables must always have three conductors
including a protective earth terminal.
WARNING - Risk Of Electric Shock
Never interrupt the protective earth circuit.
Any interruption of the protective earth circuit inside or
outside Cygnus 2, or disconnection of the protective
earth terminal is likely to make Cygnus 2 dangerous.
This symbol indicates where the protective earth ground
is connected inside Cygnus 2. Never unscrew or loosen
this connection.

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Cygnus 2 Operating Manual
1.2.4 Main Power Connection
WARNING - Risk Of Electric Shock
This Cygnus 2 has line voltage present on the primary
circuits whenever it is plugged into a main power source.
Never remove the covers from Cygnus 2 during normal
operation.
There are no operator-serviceable items within Cygnus 2.
Removal of the top or bottom covers must be done only
by a technically qualified person.
In order to comply with accepted safety standards,
Cygnus 2 must be installed into a rack system which
contains a mains switch. This switch must break both
sides of the line when it is open and it must not
disconnect the safety ground.

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Cygnus 2 Operating Manual
1.3 How To Contact INFICON
Worldwide customer support information is available under Support at
www.inficon.com where you can contact:
a Technical Support Engineer with questions regarding applications for and
programming Cygnus 2.
a Service Engineer with questions regarding troubleshooting, diagnosing or
repairing a defective Cygnus 2.
Sales and Customer Service, to find the INFICON Sales office nearest to you.
Repair Service, to find the INFICON Service Center nearest to you.
If you are experiencing a problem with your Cygnus 2, please have the following
information readily available:
the serial number and firmware version for your Cygnus 2,
a description of your problem,
an explanation of any corrective action that you may have already attempted,
and the exact wording of any error messages that you may have received.
1.3.1 Returning Your Cygnus 2
Do not return any component of your Cygnus 2 to INFICON without first speaking
with a Customer Support Representative. You must obtain a Return Material
Authorization (RMA) number from the Customer Support Representative.
If you deliver a package to INFICON without an RMA number, your package will be
held and you will be contacted. This will result in delays in servicing your Cygnus 2.
Prior to being given an RMA number, you may be required to complete a
Declaration Of Contamination (DOC) form if your sensor has been exposed to
process materials. DOC forms must be approved by INFICON before an RMA
number is issued. INFICON may require that the sensor be sent to a designated
decontamination facility, not to the factory.

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Cygnus 2 Operating Manual
1.4 Cygnus 2 Specifications
1.4.1 Measurement
Crystal Frequency . . . . . . . . . . . . . . . . . . . . 6.0 MHz (new crystal) to 4.5 MHz
Internal Precision . . . . . . . . . . . . . . . . . . . . . ±0.0035 Hz over 100 ms sample for
fundamental and anharmonic
frequencies
Thickness & Rate Resolution . . . . . . . . . . . . 0.0042 Å (new crystal);
0.0076 Å (crystal @ 4.5 MHz) over
100 ms sample for material density =
1.0,
Z-Ratio = 1.0
Thickness Accuracy . . . . . . . . . . . . . . . . . . . 0.5% typical, (dependent on process
conditions, especially sensor
location, material stress, temperature
and density)
Frequency Accuracy. . . . . . . . . . . . . . . . . . . ±2 ppm 0-50°C
Measurement Frequency . . . . . . . . . . . . . . . 10 Hz
Measurement Technique . . . . . . . . . . . . . . . ModeLock with Auto-Z
User Interface. . . . . . . . . . . . . . . . . . . . . . . . LCD and limited membrane keypad.
All parameters accessible through
computer communications. Multiple
message areas for indication of
states and detailed indication of
abnormal and stop conditions.
1.4.2 Screens and Hierarchy
a) Navigation . . . . . . . . . . . . . . . . . . . . . . . . Menu driven, four soft keys
b) Structure. . . . . . . . . . . . . . . . . . . . . . . . . . Separate screens dedicated to
1) Operate
2 ) S e n s o r I n f o r m a t i o n
3) Se nso r Par am eter s
4) So urc e Par am eter s
5) Material Parameters
6) General Parameters
7) Digital I/O Display
8) Logic
9 ) M ain te nanc e
10) Counter/Timer
11) USB Storage

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Cygnus 2 Operating Manual
1.4.3 Cygnus 2 Features
1.4.3.1 Recipe Storage and Datalogging
USB Memory Device
1.4.3.2 Sensor Parameters
(Sensor) Shutter Output . . . . . . . . . . . . . . . . 0 to 38
Sensor Type . . . . . . . . . . . . . . . . . . . . . . . . . Single, XtalTwo, XtalSix, Xtal12,
Generic
(Sensor) Switch Output . . . . . . . . . . . . . . . . 0 to 38
Auto-Z . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Yes/No
# of Positions (for Generic Sensor type) . . . 1 to 12
# of Pulses (for Generic Sensor type) . . . . . 1 to 10
Pulse On (Time for Generic Sensor type) . . 0.1 to 9.9 s
Pulse Off (Time for Generic Sensor type) . . 0.1 to 9.9 s
Recorder Output. . . . . . . . . . . . . . . . . . . . . . 0 to 12
Recorder Function . . . . . . . . . . . . . . . . . . . . Rate, Thickness, RateDeviation
Recorder Range. . . . . . . . . . . . . . . . . . . . . . 0 to 99999
1.4.3.3 Source Parameters
Up to 6 Sources may be controlled at the same time
DAC Output . . . . . . . . . . . . . . . . . . . . . . . . . 0 to 12
(Source) Shutter Output . . . . . . . . . . . . . . . . 0 to 38
Crucible Selection . . . . . . . . . . . . . . . . . . . . Turret is indexed to selected position
on a Start. Turret feedback is checked
whenever a Source is started. Range
is from 1 to number of crucibles.
Number of Crucibles. . . . . . . . . . . . . . . . 1, 4, 8, 16, 32 or 64
Crucible Output . . . . . . . . . . . . . . . . . . . 0 to 38
Turret Feedback . . . . . . . . . . . . . . . . . . . Yes / No
Turret Input. . . . . . . . . . . . . . . . . . . . . . . 0 to 28
Turret Delay . . . . . . . . . . . . . . . . . . . . . . 2 to 180 s (Time-out period with
feedback, delay time without
feedback)