Omron D6FZ Series User manual

CSM_D6FZ_DS_E_3_1
1
Air Flow Sensor
D6FZ
Visualization of Compressed Air Flow
Rates, Pressures, and Leakage Rates on
Production Lines and Equipment
• Ideal for measuring compressed air in manufacturing lines and
equipment.
• Can be mounted behind curved pipes.
• The D6FZ-FGS1000 simultaneously measures the flow rate,
leakage rate, and pressure.
• The D6FZ-FGT200/500 provides easy-to-read 11-segment 8-
digit displays.
• Data can be easily logged at an air flow station.
• Many types of outputs (RS-485, analog, and pulse) to quickly
enable visualization on existing systems.
Features
For the most recent information on models that have been certified for
safety standards, refer to your OMRON website.
Consequently
Identify the waste that had previously been invisible to reduce the energy consumed for compressed air.
Compressed air on production line
Compressed air at machines
Data logging
Maintain production quality
Optimize usage quantities
Consumption side
Monitor and control supply quantities
Optimize supply quantities
Power supply side
D6FZ-FGS1000
(1000L type)
D6FZ-FGT200/500
(200L/500L type)
D6FZ-FGX21
Visualization is required on both the supply
side and consumption side. This leads to lower
power consumption while maintaining quality.
Visualize Air Flows, Pressures,
and Leakage to Save Energy
on Production Sites.

D6FZ
2
Main
Features
Feature
Comparison
Flow
measurement
Leakage
measurement
Pressure
measurement Temperature
measurement
Curved pipe
mounting
Resistant to oils and mist
Station
connection
Multi-sensor
connection
Threshold values
(peak, bottom, and leak)
Alarm hold
Two analog outputs
Two pulse outputs
RS-485 communications
IP64
Operation indicator
Leakage
1
Pressure
3
Usage
2
Accuracy R.S. [%]
Flowrate [L/min]
50
40
30
20
10
0
-10
-20
-30
-40
-50
050100150200 95000 1000
D6FZ-FGS (1000L/min max.)
Previous products (200L/min max.)
Previous products (1000L/min max.)
Measuring accuracy
R.S. ±2.0%
(at 50 L/min or less)
Measurement range
1,000 L/min max.
FlowRate Measuring Accuracy
* Data is based on comparison for OMRONconditions
(November 2012).
Check the actual application environment before using
a Sensor.
Easy installation
with a coupler.
Straight
pipe not
required.
Previous products D6FZ-FGS
D6FZ-FGS1000
Simultaneous Measurement of Flow,
Pressure, Leakage, and Temperature
The Sensor provides multiple sensing functions.
Youcan identify compressed air conditions with
just one Sensor.
Multi-sensing
Mountable to
Curved Pipes or Couplers
The built-in silencer eliminates ultrasonic noise
and turbulence. It eliminates the need for straight
pipes to make installation work easy.
Simple Setup
Highly Accurate FlowMeasurements
High measuring accuracy of ±2% R.S. (at 50 L/min or less) is achieved.
High Accuracy
FlowMeasurements
over a Wide Range
A wide measurement range of 1 to 1,000 L/min
is achieved.
Silencer
High accuracy
Resists Oils and Mist
A built-in ultrasonic sensor is used for flowmeasurements.
With high resistance to rusty pipes and oil flooded
compressors, youcan install the Sensor almost anywhere.
Ultrasonic sensor
Wide range
Temperature
measurement
Leakage
measurement
Pressure measurement
Flow
measurement
T
Pipe size: Rc1 (25A)
(A bushing can be used to convert down to 15A.)
A straight pipe with a
length that is 10 times
the opening diameter
is required.
Built-in suppressor to
suppress turbulence
and eliminate noise.
The Best Product to Measure
Compressed Air on Production Lines

3
D6FZ
One analog output
Two pulse outputs
RS-485 communications
IP65
Display

Threshold values (peak, bottom, and leak)

Peak/Bottom hold

Auto-tuning

Key lock
Main
Features
Feature
Comparison
Flow
measurement
Leakage
measurement
P
ressure
measuremen
t
Temperature
mea
sur
eme
n
t
Curved pipe
g
mounti
ng
Res
ist
ant
to
oi
ls
an
d
m
i
st
Station
connection
Multi-sensor
connection
Note: Omron survey (as of June 2013)
Specifications are the same as the 1000L type.
Ideal for Compressed Air Measurements
at Machines
Leakage Measurement
A high measurement accuracy of ±0.5% F.S. is achieved
at a low flow rate of less than 50 L/min.
This allows you to identify the air flow that is discarded
as leakage when machines are not operating to save money.
Zero Reset
You can use the zero reset to identify seasonal
or day/night variations in the flow rates.
Display Reversal
You can reverse the display direction to
match the installation direction.
Always use one of the specified installation
directions.
500L type
Pipe size: 15A (Rc1/2)
200L type
Pipe size: 8A (Rc1/4)
Note: According to OMRON investigation in June 2013.
Averaging count setting
ave
Clear total flow rate
clr
11-segment 8-digit
LCD
The characters are easy to read, and the total flow rate
can be checked in a glance.
Easy to Read
Flow Straightener with Honeycomb Structure
A honeycomb structure effectively straightens
the flow to keep pressure loss low.
Other Features
Highly Accurate Flow Measurements
An OMRON MEMS chip is used to achieve the highest
accuracy in the industry* of ±2% F.S. (at 50 L/min or less).
High Accuracy
First in the industry!
*
Honeycomb structure
Press and hold.
Leakage on non-working days
(Saturday and Sunday) was 36 m
3
!
Press and hold to reverse.
Tempe r ature
sensor
Heater
element
Tempe r ature
sensor Flow
With Flow Without Flow
Leakage
1
P
r
essu
re
3
Usage
2
D6FZ-FGT200/500

D6FZ
4
You can collect onsite data at an Air Flow Station data and use the Multi Data Viewer Light software to analyze
the data in your office to identify other locations for improvement on the production site.
On the
Production
Site:
Data monitoring and
storing by Air Flow
Station
Multi Data Viewer Light
Display period is easy to change.
Check boxes allow you to display only the required data.
Total flow rate (bar graph)
Pressure (dotted line graph)
This software displays data for specific time periods, such as by the minute,
hour, or day. The total flow rate is displayed as a bar graph and the
momentary flow rate and pressure are displayed with dotted lines, so you can
see the overall situation at a glance.
Free The PC Software
Download the PC Software Station Utility from the following OMRON website (http://www.fa.omron.co.jp/station-u-e).
Start data logging with a single
press of a button.
Save the data to
an SD memory card.
The Air Flow Station enables
easy data logging.
The PC Software Easily Analyzes Logged Data
You can use comparative displays with
previously logged data.
For example, side-by-side comparison of flow
rates by the day for different months is possible.
e
,
e
n
In the Office:
Data storing and
analyzing
on a computer
By stopping the supply of compressed air with a solenoid valve when there
is no workpiece, compressed air usage is reduced. At the same time, the
Flow Sensor monitors the quantity of supplied compressed air to ensure
that it is within the specified range. Therefore, the Sensor helps maintain
and improve quality.
By giving priority to the monitoring of molding machines and
other machines that use large quantities of compressed air,
energy is efficiently saved.
Set the leak threshold value to identify when
repairs for leaks are required.
Monitor consumption and pressure fluctuations for each
production line to identify bottleneck lines or machines to
implement onsite improvements and save energy.
During operation
ON
OFF
When operation is stopped
Upper limit
Lower limit
leak
Leak output
During operation
When the leak increases
ON
OFF
When operation is stopped
Upper limit
Lower limit
leak
Leak output
You can save energy in a variety of applications.
Stop Ionizer Idling
D6FZ-FGT Flow Management for
Molding Machines
D6FZ-FGT D6FZ-FGS
Leakage Management
for Machines
D6FZ-FGT D6FZ-FGS
Flow and Pressure
Management for Production Lines
D6FZ-FGS

5
D6FZ
Specifications
Units
Options (Sold Separately)
*When magnets are used, the maximum vibration resistance is 55 Hz.
Appearance Product name Model
200L-type Air Flow Sensor D6FZ-FGT200
500L-type Air Flow Sensor D6FZ-FGT500
1000L-type Air Flow Sensor
(cable length: 0.2 m) D6FZ-FGS1000
Air Flow Station
(cable length: 1.5 m, including T-branch
Connector cable)
D6FZ-FGX21
1000L-type Air Flow Sensor Set
• 1000L-type Air Flow Sensor
• Air Flow Station
• T-branch Connector
• Cable with Connector on One End (3 m)
D6FZ-FGS1000-S
Appearance Product name Model
T-branch Connector D6FZ-FC02
(D6FZ-FGT Air Flow Sensor only)
Mounting Bracket
• Mounting Bracket: 1
• Phillips screws (M3): 4
D6FZ-FC03
(D6FZ-FGX21 Air Flow Station only)
Mounting magnets *
• Mounting magnets: 2
• Phillips screws (M3): 2
ZN9-EM01-S
Cable with Connector
on One End
Cable length: 3 m
M12 connector
(8-pin)
D6FZ-JD3A
Cable length: 10 m D6FZ-JD10A
Cable length: 20 m D6FZ-JD20A
Cable with
Connectors on Both
Ends
Cable length: 3 m
M12 connector
(8-pin)
D6FZ-JD3B
Cable length: 5 m D6FZ-JD5B
Cable length: 10 m D6FZ-JD10B
Cable length: 20 m D6FZ-JD20B

D6FZ
6
Ratings
Air Flow Sensor
*1. Clean dry gas (Must not contain large particles, e.g. dust, oils, or mist.)
*2. The flow rates are converted for the following conditions. Standard flow rate (std): 1 atmospheric pressure (101.3 kPa) at 20°C (default setting)
Normal flow rate (nor): 1 atmospheric pressure (101.3 kPa) at 0°C
*3. To prevent chattering, a judgement output is made when the judgement continues for one minute or longer.
*4. The accuracy will depend on the length of the straight pipe section. Refer to Flow rate accuracy characteristics for a length of straight pipe on page
10 for details.
Item Model D6FZ-FGT200 D6FZ-FGT500
Applicable fluid Air or nitrogen (N2)*1
Maximum working pressure 0.75 MPa (withstand pressure: 1.5 MPa)
Measurement range *20 to 200 L/min 0 to 500 L/min
Measurement range for specified accuracy
*22 to 200 L/min 5 to 500 L/min
Display resolution *21 L/min
Accuracy *2±2.0% F.S. at 50 L/min or higher
±0.5% F.S. at less than 50 L/min
Temperature characteristic ±3% F.S.
Repeat accuracy ±1% F.S.
Operating temperature Operation: −10 to 60°C, Storage: −20 to 70°C (with no condensation or icing)
Operating humidity Operation: 25% to 90% RH, Storage: 0% to 90% RH (with no condensation or icing)
Shock resistance (destruction) 150 m/s23 times each in six directions (up/down, left/right, forward/backward)
Pressure loss 2 kPa max. 4 kPa max.
Power supply voltage 12 to 24 VDC ±10% ripple (p-p): 10% max.
Current consumption 120 mA max.
Functions Momentary flow, total flow, display reversal, zero point adjustment, peak and bottom hold, key
lock, eco mode, scaling (analog output), judgement hysteresis, and teaching
Indications 11-segment digital display (red); RUN, FUN, and THR (yellow); Out1 and Out2 (yellow); key lock
(yellow); flow unit (green); and flow unit on reversed display (yellow)
Outputs
Output
interfaces
Analog Current output: 4 to 20 mA (1 output), Maximum load resistance: 300 Ω
ON/OFF
Open-collector output (2 outputs): 26.4 VDC 50 mA max.
ON residual voltage: 2 V max. (Outputs can be selected from judgement output, pulse output,
and Sensor error output.)
RS-485
2-wire half-duplex communications with start-stop synchronization
Baud rate: 9.6, 19.2, 38.4, or 115.2 kbps, Data bit length: 7 or 8 bits, Stop bit length: 1 or 2 bits,
Parity: none, even, or odd, Terminating resistance (120 Ω): ON/OFF, Communications protocol:
Conforms to CompoWay/F.
Output values Momentary flow, total flow, judgement output *3, and Sensor error output
Degree of protection IP65
Installation Direction and Straight Pipe
Section
A straight pipe section must be provided during installation and piping if the Sensor is installed
horizontally and the display is on the top. *4
Connection pipe diameter Rc1/4 (8A) Rc1/2 (15A)
Materials Main unit: PBT, Flow channel: Zinc
Dimensions 30 × 77 × 63.7 mm (W×D×H)
Weight (in package) Approx. 400 g (500 g)
Accessories Instruction Sheet

7
D6FZ
*1. Flow rates are converted to 1 atmospheric pressure (101.3 kPa) at 20°C.
*2. Does not include pressure and temperature accuracy. Conversion accuracy to the standard flow is ±2.5% of reading (at 20°C, 0.5 MPa).
*3. Always ground the 0 V terminal, and do not ground the 24 V (+) terminal. There is a risk of malfunction.
*4. The analog output is the momentary standard flow rate and pressure.
*5. The total standard flow for the pulse output can be set to 1, 10 (default), 100, or 1,000 L (std) per pulse.
Item Model D6FZ-FGS1000
Applicable fluid Air or nitrogen (N2)
Working pressure 0.99MPa max.
Measure-
ments
Flow*1
Detection
range 1 to 1,000 L/min (std)
Resolution 0.1 L/min
Accuracy ±2.0% of reading at 50 L/min (std) or higher*2
±0.1% F.S. at less than 50 L/min *2
Pressure
Detection
range 0 to 0.99 MPa
Accuracy 2% F.S.
Temperature
Detection
range −10 to 60°C
Accuracy ±1.5% (absolute temperature)
Resistance
to
environment
Operating temperature −10 to 60°C (with no condensation or icing)
Operating humidity 35% to 85% RH (with no condensation or icing)
Vibration resistance
(destruction)
10 to 55 Hz with a 0.7-mm double amplitude or acceleration of 50 m/s2for 80 min each in X, Y,
and Z directions
Shock resistance (destruction) 150 m/s23 times each in six directions (up/down, left/right, forward/backward)
Pressure loss
Direct piping: 10 kPa max. (0.5 MPa, at maximum flow)
Using Coupler (TL model from Nagahori Industry Co., Ltd.): 10 kPa max. (0.5 MPa, at maximum
flow)
Power supply voltage For one Sensor: 16 to 24 VDC ±10%, ripple (p-p): 10% max.,
For multiple Sensors: 24 VDC ±10%, ripple (p-p): 10% max.*3
Power consumption 2 W max.
Measurement cycle Approx. 62.5 ms
Display Display method Status display with 2-color LED (lit or flashing)
Displayed contents Presence of power, air flow, and error alarm
Outputs
Output
interfaces
Analog Current output: 4 to 20 mA (2 outputs),*4Maximum load resistance: 270 Ω
ON/OFF Open-drain output (2 outputs),*524 VDC 50 mA max.
ON residual voltage: 1.5 V max., OFF leakage current: 50 μA max.
RS-485
2-wire half-duplex communications with start-stop synchronization
Baud rate: 115.2 kbps (fixed), Data bit length: 8 bits (fixed), Stop bit length: 1 bit (fixed), Parity:
even (fixed), Communications protocol: Conforms to CompoWay/F.
Output values Momentary standard flow, total standard flow, pressure, and Sensor error output
Degree of protection IP64 (Except when switch cover is removed.)
Wiring connection M12 connector (8-pin)
Connection pipe diameter Rc1 (25A) (Bushing enables conversion to 15A or 20A.)
Materials Cable: PVC (polyvinylchloride); Main unit: Aluminum die-cast; Display: Acrylic
Dimensions 64 × 93 × 195 mm (W×D×H) (excluding flange)
Weight (in package) Approx. 1.2 Kg (Approx. 1.7 Kg)
Accessories Instruction Sheet

D6FZ
8
Air Flow Station
*1. Up to 8 Sensors can be connected when the recording cycle is 2 seconds or longer; up to 4 Sensors can be connected when the recording
cycle is 1 second.
*2. Data is automatically written to the SD memory card when the internal memory reaches its capacity and recording continues until the SD
memory card capacity is reached. Recording stops if there is no SD memory card inserted, when the internal memory capacity is reached, or
when the SD memory card is write protected. (Recording can be resumed after inserting an SD memory card and outputting the data to it by
pressing a button.) The default is Continue Mode. Use the PC Software to change the recording mode.
*3. Recording of the latest measured values continues until the internal memory reaches its capacity. (If the internal memory capacity is exceeded,
data is overwritten from the oldest data in the memory.)
*4. An alarm is output when the upper or lower limit of the air flow that was set in threshold setting mode is exceeded.
*5. You can temporarily read and write data with an SD card that complies with SD/SDHC card standards and was made by another company,
but the SD card may suddenly not be recognized, preventing you from accessing the data.
*6. When mounting the Sensor with magnets, be sure to install it in a location where it will not be subjected to shock.
*7. A T-branch connector to connect to D6FZ-FC02.
*8. OMRON's XW4B-02B1-H1 Connector.
ItemModel D6FZ-FGX21
Connectable Sensors D6FZ-FGT200, D6FZ-FGT500, and D6FZ-FGS1000
Maximum number of connected Sensors 8*1
Indications 7-segment 5-digit 2-row LCD, auxiliary information indicators
Recording interval 1 s, 2 s, 5 s, 10 s, 20 s, 30 s, or 1 min
Displayed data Momentary flow rate, total flow rate, pressure, temperature, and billing amount/CO2conversion
Recorded data Momentary flow rate, total flow rate, volume flow rate, pressure, and temperature
Calculation functions Conversion of total flow rate to billing amount/CO2
Recording modes Continue Mode*2and Ring Mode*3
External output Alarm output (photocoupler output)*4
Communications interface Ethernet (10Base-T or 100Base-TX)
Internal storage device Internal memory: Approx. 4,200 data items when 1 Sensor is connected, Approx. 650 data items
when 8 Sensors are connected.
External storage device SD card (to save measured values and to save/read set values), Recommended SD card: HMC-
SD291 (manufactured by OMRON)*5
Power supply voltage DC input: 24 VDC ±10%, ripple (p-p): 10% max.
Current consumption 80 mA max.
Operating temperature Without Ethernet: −10 to 40°C (with no condensation or icing), with Ethernet: 0 to 40°C (with no
condensation or icing)
Operating humidity 35% to 85% RH (with no condensation or icing)
Storage humidity/temperature −15 to 60°C, 20% to 85% RH (with no condensation or icing)
Insulation resistance 20 MΩ(at 500 VDC)
Withstand voltage 1,000 VAC, 50/60 Hz for 1 min
Vibration resistance (destruction) 10 to 150 Hz with a 0.7-mm double amplitude or acceleration of 50 m/s2for 80 min each in X, Y,
and Z directions
Shock resistance (destruction) 150 m/s23 times each in six directions (up/down, left/right, forward/backward)*6
Material ABS
Degree of protection IP30
Mounting method Magnet mounting, screw mounting, or hooks
Dimensions 117.2 × 24.6 × 56.8 mm (W×D×H) (excluding protruding parts)
Weight (in package) Approx. 150 g (Approx. 500 g)
Accessories Instruction Sheet, Startup Guide, Connection Cable,*7Alarm Output Connector*8

9
D6FZ
Connections
Connection Diagrams
With One Sensor
Data Communications with Multiple Sensor Connections
Wireless Data Collection
ACable with Connector on One End
BCable with Connectors on Both Ends
24-V power supply
or
or
Sensor setup
Data display
Data logging
A
B
A
A
Air Flow Station Connections
24-V power supply
Terminal
block
Analog output
Pulse output
PLC
PLC Connections
8 max. 8 max.
Main pipe Main pipe
Sensor settings
Displayed data
Data logging
Ethernet
24-V power
supply
A
A
BB
B
BBB
B
B
B
Terminal block
RS-485
RS-485
PLC
24-V power
supply
RS-485 Connections to Air Flow Station RS-485 Connections to PLC
Refer to the user’s manuals for the Wireless Unit and Air Flow Sensors for
detailed information on connections.
Connects to
up to 2 Sensors.
Main pipe
Wireless Unit Master (LAN)
For detailed specifications, consult your OMRON sales representative.
WZ-MLAN01
Wireless Unit Slave (Pulse Count)
WZ-SP01
Ethernet
AA
The Triple Reliability of the 920 MHz Band
Compared
to the 2.4
GHz band:
The reliability of a
longer communications
distance.
The reliability of easier
bending of waves bend
around objects.
The reliability of less
interference from other
communications devices.

10
D6FZ
Engineering Data
Pressure Loss*(Typical)
D6FZ-FGS1000
D6FZ-FGT200
D6FZ-FGT500
Minimum and Maximum Flow Rate Conversion Table
(Typical)
D6FZ-FGS1000
Flow rate accuracy characteristics for a length of straight
pipe
D6FZ-FGT Only
The following graph shows the flow rate accuracy characteristics for
a length of straight pipe (reference information).
D6FZ-FGT200
D6FZ-FGT500
* Note: With direct piping.
00 200 400 600 800 1000
1
2
3
4
5
6
Pressure loss (kPa)
Flow rate (L/min (std))
Atmospheric pressure
0.3 MPa
0.5 MPa
1.0 MPa
max. usable flow rate
020010050 150
Pressure loss (kPa)
Flow rate (L/min (std))
atmospheric pressure
0.5MPa
0.75MPa
0
1
2
0500100 200 300 400
Pressure loss (kPa)
Flow rate (L/min (std))
atmospheric pressure
0.5MPa
0.75MPa
0
2
4
1
3
Temperature
[°C]
Pressure
[MPa]
Minimum flow
rate
[L/min (std)]
Maximum flow
rate
[L/min (std)]
20
0.3 3.96 667.37
0.5 5.93 999.94
0.7 7.91 1000.00
25
0.3 3.89 656.17
0.5 5.83 983.17
0.7 7.78 1000.00
30
0.3 3.83 645.35
0.5 5.74 966.96
0.7 7.65 1000.00
030025015010050 200
Precision F.S. [%]
Pipe length [mm]*2
±10%
±8%
±6%
±4%
±2%
±0%
12
10
8
6
Applied tube
diameter
*1
030025015010050 200
Precision F.S. [%]
±10%
±8%
±6%
±4%
±2%
±0%
20A
16
12
10
Applied steel pipe
/tube diameter
*1
Pipe length [mm]*2
Straight Steel Pipe with Same Opening Diameter as Sensor
Straight steel
pipe length*2
Straight steel
pipe length*2
Tube*1
Steel pipe with
different diameter*1
Tube*1
Steel pipe with
different
diameter*1

D6FZ
11
Safety Precautions
Read the warranty and limitations of liability information.
Air Flow Sensors
Air Flow Station
Warning
This product cannot be used to detect people either
directly or indirectly for the purpose of ensuring
safety.
Do not use the product as a detector for personal
safety.
The use of flammable gases may cause an
explosion.
Do not use the product in the presence of flammable
gases.
Electric shock may occur. Do not connect the
product to an AC power supply.
Caution
Do not use the product in an ambient atmosphere or
environment that exceeds the ratings.
Injury may occur due to an explosion.
Flow rates and pressures must be within the
specified working ranges.
<D6FZ-FGT only>
If water drops, oil, mist, or dust enters the product, it
may result in measurement error or damage. Use
clean gas. Dust and mist can affect the
characteristics of Sensor or damage the Sensor. Install a filter
and mist separator on the upstream tube. Also, install the
product after removing any dust in the pipes with an air blow or
other means.
Precautions for Correct Use
Precaution for piping
D6FZ-FGT Only
Applicable Opening Diameter: D6FZ-FGT200: 8A, D6FZ-
FGT500: 15A
Always use a steel straight or elbow pipe with the same
opening diameter. If a steel pipe with a different opening
diameter or an air tube joint is required, you can reduce
adverse influences by providing a section of straight pipe with
the same opening diameter just before and after the Sensor.
Refer to Flow rate accuracy characteristics for a length of
straight pipe on page 10 for the required straight pipe length
and measurement accuracy.
Precaution for mounting
Mounting position
• Be sure to mount the body horizontally, otherwise the
detection accuracy might be worse.
• Don't mount the body facing the control panel downward.
Otherwise, the mist and dust in the pipe accumulates and it
might cause breakdown.
<Correct mounting>
<Incorrect mounting>
Flowing direction
• An arrow in the side of the body indicates the direction
where air flows.
• Be sure to check the direction of the arrow before mounting.
• Mounting in the opposite direction causes mis-
measurement.
<The indication of the body>
<The relationship between flowing direction and mounting
direction>
Warning
The mounting magnets provided with the product
have strong magnetism. If the product is mounted
using these magnets, anyone wearing a heart
pacemaker must not operate the product. Also, the
product must not be brought into the proximity of such a
person.
This product contains lithium batteries. Serious
injury may occur due to fire or explosion. Do not
attempt to disassemble the product, deform it by
applying pressure, heat it to a high temperature
(100°C or higher), or incinerate it for disposal.
• Mounting the body horizontally
• Control panel Upward
• Mounting the body Vertically • Control panel Downward
DownstreamUpstream
Indication of flowing direction
Downstream
Upstream
Steel pipe
Indication of flowing direction
Flowing direction

D6FZ
12
Dimensions
Air Flow Sensor
(Unit: mm)
Unspecified dimensional tolerances: Tolerance class IT16
Mounting Hole Dimensions
63.7
30 33.7
77
12.65
70
(60)
89.65
Rc1/4,
Effective
depth: 10 mm
49.5 ±0.1
16 ±0.1
7
Four, M3;
Effective
depth: 5 mm
30 Rc1/4,
Effective
depth: 10 mm
15 47
15
Four, 3.2 dia. ±0.1 holes
16±0.1
49.5±0.1
D6FZ-FGT200
Mounting Hole Dimensions
63.7
30 33.7
77
12.65
70
(60)
89.65
Rc1/2,
Effective
depth: 10 mm
49.5 ±0.1
16 ±0.1
7
Four, M3;
Effective
depth: 5 mm
30 Rc1/2,
Effective
depth: 10 mm
15 47
15
Four, 3.2 dia. ±0.1 holes
16±0.1
49.5±0.1
D6FZ-FGT500
131.5
45.8 59.2
64
88
Switch cover
Ferrite core
195
28
93
200±50 43
14.9 dia.
M12
Rc1 (both sides)
DIP switch
Rotary switch
Switch Cover
Removed Status indicator
D6FZ-FGS1000

13
D6FZ
Air Flow Station
2-M3
2-4 dia.
56.8
24.60.7
117.2
Reset switch
40
40
60
49.4
48.6
60
Screw catch-holes
Screw catch-hole dimensions
Mounting screw hole
dimensions
Mounting screw holes, Two M3 holes; Hole depth: 4
Mode Key
LAN port
SD memory
card slot
Display T-branch
connector plug
Up Selection Key
Down Selection Key
SET/REC/STOP Key
Standard length: 1.5 m
8.7 16.7
21
Alarm output terminal
D6FZ-FGX21
T-branch Connection Cables
13.6 32.1
15
24.7 13.6 17.7
10
12
4.5-dia. through-hole
8 dia. (countersinking depth: 2)
M12 plug
CN0
CN1
CN2
14.9-dia.
18
14.9 dia.
14.9 dia.
4.5-dia. through-hole
8-dia. (Countersunk hole depth: 2)
Back
(56)
M12 socket
M12 socket
M12 socket
M12 socket
39.5
15-dia.
26.8 L
Plate
M12 socket
M12 socket
39.5
15-dia.
26.8
14.9-dia.
43
26.8 L
M12 plug
Plate
T-branch Connector
D6FZ-FC02
Cables with Connector on One End
D6FZ-JD3A (L = 3 m)
D6FZ-JD10A (L = 10 m)
D6FZ-JD20A (L = 20 m)
Cables with Connectors on Both Ends
D6FZ-JD3B (L = 3 m)
D6FZ-JD5B (L = 5 m)
D6FZ-JD10B (L = 10 m)
D6FZ-JD20B (L = 20 m)
48
60
40
1616
5.25 49.5
Four, 3.2-dia. holes
8.5
4-3
4
4-3.5
8-R1.75
40
1
5
25
Mounting Bracket
D6FZ-FC03

Terms and ConditionsAgreement
Read and understand this catalog.
Please read and understand this catalog before purchasing the products. Please consult your OMRON representative if you
have any questions or comments.
Warranties.
(a) Exclusive Warranty. Omron’s exclusive warranty is that the Products will be free from defects in materials and workmanship
for a period of twelve months from the date of sale by Omron (or such other period expressed in writing by Omron). Omron
disclaims all other warranties, express or implied.
(b) Limitations. OMRON MAKES NO WARRANTY OR REPRESENTATION, EXPRESS OR IMPLIED, ABOUT
NON-INFRINGEMENT, MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE OF THE PRODUCTS. BUYER
ACKNOWLEDGES THAT IT ALONE HAS DETERMINED THAT THE
PRODUCTS WILL SUITABLY MEET THE REQUIREMENTS OF THEIR INTENDED USE.
Omron further disclaims all warranties and responsibility of any type for claims or expenses based on infringement by the
Products or otherwise of any intellectual property right. (c) Buyer Remedy. Omron’s sole obligation hereunder shall be, at
Omron’s election, to (i) replace (in the form originally shipped with Buyer responsible for labor charges for removal or
replacement thereof) the non-complying Product, (ii) repair the non-complying Product, or (iii) repay or credit Buyer an amount
equal to the purchase price of the non-complying Product; provided that in no event shall Omron be responsible for warranty,
repair, indemnity or any other claims or expenses regarding the Products unless Omron’s analysis confirms that the Products
were properly handled, stored, installed and maintained and not subject to contamination, abuse, misuse or inappropriate
modification. Return of any Products by Buyer must be approved in writing by Omron before shipment. Omron Companies shall
not be liable for the suitability or unsuitability or the results from the use of Products in combination with any electrical or
electronic components, circuits, system assemblies or any other materials or substances or environments. Any advice,
recommendations or information given orally or in writing, are not to be construed as an amendment or addition to the above
warranty.
See http://www.omron.com/global/ or contact your Omron representative for published information.
Limitation on Liability; Etc.
OMRON COMPANIES SHALL NOT BE LIABLE FOR SPECIAL, INDIRECT, INCIDENTAL, OR CONSEQUENTIAL DAMAGES,
LOSS OF PROFITS OR PRODUCTION OR COMMERCIAL LOSS IN ANY WAY CONNECTED WITH THE PRODUCTS,
WHETHER SUCH CLAIM IS BASED IN CONTRACT, WARRANTY, NEGLIGENCE OR STRICT LIABILITY.
Further, in no event shall liability of Omron Companies exceed the individual price of the Product on which liability is asserted.
Suitability of Use.
Omron Companies shall not be responsible for conformity with any standards, codes or regulations which apply to the
combination of the Product in the Buyer’s application or use of the Product. At Buyer’s request, Omron will provide applicable
third party certification documents identifying ratings and limitations of use which apply to the Product. This information by itself
is not sufficient for a complete determination of the suitability of the Product in combination with the end product, machine,
system, or other application or use. Buyer shall be solely responsible for determining appropriateness of the particular Product
with respect to Buyer’s application, product or system. Buyer shall take application responsibility in all cases.
NEVER USE THE PRODUCT FOR AN APPLICATION INVOLVING SERIOUS RISK TO LIFE OR PROPERTY OR IN LARGE
QUANTITIES WITHOUT ENSURING THAT THE SYSTEM AS A WHOLE HAS BEEN DESIGNED TO ADDRESS THE RISKS,
AND THAT THE OMRON PRODUCT(S) IS PROPERLY RATED AND INSTALLED FOR THE INTENDED USE WITHIN THE
OVERALL EQUIPMENT OR SYSTEM.
Programmable Products.
Omron Companies shall not be responsible for the user’s programming of a programmable Product, or any consequence
thereof.
Performance Data.
Data presented in Omron Company websites, catalogs and other materials is provided as a guide for the user in determining
suitability and does not constitute a warranty. It may represent the result of Omron’s test conditions, and the user must correlate
it to actual application requirements. Actual performance is subject to the Omron’s Warranty and Limitations of Liability.
Change in Specifications.
Product specifications and accessories may be changed at any time based on improvements and other reasons. It is our
practice to change part numbers when published ratings or features are changed, or when significant construction changes are
made. However, some specifications of the Product may be changed without any notice. When in doubt, special part numbers
may be assigned to fix or establish key specifications for your application. Please consult with your Omron’s representative at
any time to confirm actual specifications of purchased Product.
Errors and Omissions.
Information presented by Omron Companies has been checked and is believed to be accurate; however, no responsibility is
assumed for clerical, typographical or proofreading errors or omissions.
2016
.
11
In the interest of product improvement, specifications are subject to change without notice.
OMRON Corporation
Industrial Automation Company
http://www.ia.omron.com/
(c)Copyright OMRON Corporation 2016 All Right Reserved.