Omron F3M-S Series User manual

R
2
Silicon Wafer Mapping Sensor F3M-S
Allows Simultaneous Mapping of up
to 25 Silicon Wafers
HEconomical, one sensor detects most
wafer types, including dummy wafers
HModels match wafer sizes of 300 mm,
200 mm and 150 mm
HAutomatic and remote teaching
capability
HSelf-diagnostic functions reduce
downtime
Orderin
g
Information
Applicable wafer size Number of cassette slots Function Remarks Part number
6 inches (4.76-mm pitch) 25 Self-diagnosis --- F3M-S625
6
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s
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4
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7
6
m
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)
26 --- --- F3M-S626
8 inches (6.35-mm pitch) 25 Self-diagnosis --- F3M-S825
8
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6
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3
5
m
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)
26 --- --- F3M-S826
12 inches (10-mm pitch) 13 Self-diagnosis CE marking F3M-S1213
1
2
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1
0
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25 Self-diagnosis CE marking F3M-S1225
Application Examples
Detects Transparent Glass Wafers
with a Transparency of 92%
(F3M-S6jand F3M-S8j)
The F3M-S allows the mapping of cassettes thathave both
silicon wafers and glass wafers.The F3M-S also accurately
detects dummy wafers in the carrier used to test coating or
processing tolerances.
Automatic Teaching Saves Setting Time
Remote Teaching Available
The F3M-S has an automatic teaching function thatensures easy
adjustments within a minimal time.The remote teaching function
allows quick, on-the-fly set up.
Answer-back Alarms for Setting Errors and
Self-diagnostic Alarms for Operation Errors
These alarms help reduce systemdowntime and shorten
troubleshooting time.
Note: The self-diagnostic output function is not incorporated by
the F3M-S826/-S626.
Static Electricity Protection
OMRON’s optical system, including an emitter and receiver,
prevents Sensor malfunction and damage by protecting the
Sensor fromstatic electricity that may be charged on
semiconductor wafers at the time of mapping.

F3M-S F3M-S
3
Specifications
JRATINGS/CHARACTERISTICS
Part number F3M-S625 F3M-S626 F3M-S825 F3M-S826 F3M-S1213 F3M-S1225
Sensing object 6-inch (5-inch) semiconductor
silicon wafers and transparent
wafers (with transparency of
92% max.) (See Note.)
8-inch semiconductor silicon
wafers and transparent wafers
(with transparency of 92% max.)
(See Note.)
12-inch semiconductor silicon
wafers and 12-inch SIC wafers
(with transparency of 30% max.)
Number of channels 25 26 25 26 13 25
Optical axis pitch 4.76 mm 6.35 mm 10 mm
Optical axis width 1.5 mm
Light source Infrared LED (940 nm)
Power supply voltage 12 to 24 VDC r10%, ripple (p-p): 10% max.
Current consumption 120 mA max.
Output Control
output Load power supply voltage:30 VDC Load current: 20 mA max. (residual voltage: 1 V max.)
Inflow current: 20 mA
Parallel output from all channels, NPN open collector
Dark-ON operation
Answer-back
output When remote teaching is ON, pin 28 will be used for this function.
Self-
diagnostic
output
Load power
supply voltage:
30 VDC max.
Load current:
20 mA max.
(Residual
voltage: 1 V
max.)
Inflow current:
20 mA
NPN open
collector
--- Load power
supply voltage:
30 VDC max.
Load current:
20 mA max.
(Residual
voltage: 1 V
max.)
Inflow current:
20 mA
NPN open
collector
--- Load power supply voltage:
30 VDC max.
Load current: 20 mA max.
(Residual voltage: 1 V max.)
Inflow current: 20 mA
NPN open collector
Indicators Power Green indicator is ON when power is being supplied.
Warning Red indicator is ON under the following conditions:
Teaching, no sensing object, insufficient light, or error.
Response time 10 ms max.
Control output interrupt input All outputs interrupted: GND and control output interrupt input terminals are short-circuited and 0-V
short-circuit current is 1 mA max.
Output interrupt reset: GND and control output interrupt input terminals are opened or the voltage is
between 9 V and the working power supply voltage.
Remote ON GND and remote input terminals are short-circuited and 0-V short-circuit currentis 1 mA max.
R
e
m
o
t
e
teaching
input OFF GND and remote input terminals are opened orthe voltage is between 9 V and the working power
supply voltage.
Teaching check function Orange LED indicator
Ambient
temperature Operating 0qCto40qC(32qF to 104qF) with no icing or condensation 0qCto55qC(32qF to 131qF) with no icing or condensation
p
Storage -- 2 5 qCto60qC(--13qF to 140qF) -- 2 5 qCto60qC(--13qF to 140qF)
Relative humidity 35% to 85% with no condensation
Ambientillumination Fluorescent lamp: 1,500 çxmax.
Noise resistance Power supply line: r480 V in normal mode with noise simulator
N
o
i
s
e
r
e
s
i
s
t
a
n
c
e
Static electrical noise: No malfunction or destruction at r8kV
Vibration resistance 10 to 55 Hz, 0.5-mm double amplitude for 2 hrs each in X, Y, and Z axes
Shock resistance 300 m/s2(30G) for 3 times each in X, Y, and Z axes
Degree ofprotection IEC60529 IP40
Connection Preleaded cable (standard cable length:100 mm) Connector
(This table continues on the nextpage.)

F3M-SF3M-S
4
Specifications Table -- continued from previous page
Part number F3M-S625 F3M-S626 F3M-S825 F3M-S826 F3M-S1213 F3M-S1225
Weight (packed state) Approx. 110 g Approx. 200 g Approx. 300 g
Material Optical axis Polycarbonate
M
a
t
e
r
i
a
l
Case ABS ABS, aluminum(alumite
treated/clear finish)
Cable Vinyl-insulated, bending type ---
Accessories Spacer and instruction manual Instruction manual
Note: Operating conditions are restricted forthe detection oftransparentwafers. Contactyour OMRON representatives fordetails.
JAUTOMATIC TEACHING FUNCTION
F3M-S6jand F3M-S8j
Power indicator Warning indicator
Teaching button RUN/TEACH mode selector Teaching indicator
F3M-S12j
Power indicator
Warning indicatorTeaching button
RUN/TEACH mode selector Teaching indicator
The remote ormanual automatic teaching of the F3M-S is
possible with the following two sensitivity settings:
1. Max. Sensitivity Setting: Detects semiconductor silicon
wafers, translucent dummy wafers, and SIC wafers.
2. Teaching with No Target Object: Detects transparent wafers
(except F3M-S12j).
The sensitivity is setto maximum before shipping. Refer to the
Instruction Manual when setting the sensitivity of the F3M-S.
JANSWER-BACK FUNCTION AND
SELF-DIAGNOSTIC FUNCTION
The F3M-S has an answer-back function to warn the user about
setting errors and a self-diagnostic function (except F3M-S626
and F3M-S826) to warn the userabout operational errors.
xAnswer-back Function: Normal or error teaching output turns
ON.
xSelf-diagnostic Function: Warning output turns ON for a
decrease in optical input.

F3M-S F3M-S
5
O
p
eration
JOUTPUT CIRCUIT DIAGRAM
+V
Output
(OUT1)
Output(see note)
(OUT26)
0V
Main circuit
Control output interrupt input
Remote teaching input
Note: When remote teaching is input,this outputwill be for
answer-back output. For Sensors other than
F3M-S626/F3M-S826, this output is for self-diagnostic
output. For F3M-S626/F3M-S826, this output is OUT26.
JI/O TERMINAL ARRANGEMENT
Pin assignment
Pin Assignment Pin Assignment
1GND (0 V) 16 OUT14
2 VCC (12to24V) 17 OUT15
3OUT1 18 OUT16
4OUT2 19 OUT17
5OUT3 20 OUT18
6OUT4 21 OUT19
7OUT5 22 OUT20
8OUT6 23 OUT21
9OUT7 24 OUT22
10 OUT8 25 OUT23
11 OUT9 26 OUT24
12 OUT10 27 OUT25
13 OUT11 28 Self-diagnostic output/OUT26
(see note 1)
14 OUT12 29 Control output interrupt input
15 OUT13 30 Remote teaching input
Note: 1. Pin 28 will have answer-back outputonly when remote
teaching input is turned ON. Otherwise, for Sensors
other than F3M-S626/F3M-S826, this output is for self-
diagnostic output. For F3M-S626/F3M-S826, this out-
put is OUT26.
2. For the F3M-S1213, terminals for pins 16 to 27 are not
used.

F3M-SF3M-S
6
Dimensions
Unit: mm(inch)
Two, R4
Two, M4
Thirty,(19/0.08 dia.)
vinyl-insulated,flat
bending cable
Width:38.1
Pitch:1.27
Optical axis
Side mark
Two,
4.2-dia.
mounting
holes
Teaching button
RUN/TEACH
mode selector
Warning indicator
Teaching indicator
Power indicator
Mounting Dimensions
Two, M4
OMRON XG4E-3031
Connector
Two,
4.2-dia.
mounting
holes
Thirty,(19/0.08 dia.)
vinyl-insulated,flat
bending cable
Width:38.1
Pitch:1.27
OMRON XG4E-3031
Connector
Optical axis
Side mark
Teaching button
RUN/TEACH
mode selector
Warning indicator
Teaching indicator
Power indicator
Mounting Dimensions
50
(1.97)
18.5 (0.71)
135(5.31)
14 (0.55)
(3.94)
(4.72)
50
(1.97)
18.5 (0.71)
135(5.31)
14 (0.55)
(3.94)
(4.72)
JF3M-S625 JF3M-S626
JF3M-S825 JF3M-S826
Optical axis
Side mark
Thirty,(19/0.08 dia.)
vinyl-insulated,flat
bending cable
Width:38.1
Pitch:1.27
Two,
4.2-dia.
mounting
holes
OMRON XG4E-3031
Connector
Teaching button
RUN/TEACH mode selector Warning indicator Teaching indicator
Power indicator
Mounting Dimensions
Two, R5
Two, M4
Optical axis
Side mark
Thirty,(19/0.08 dia.)
vinyl-insulated,flat
bending cable
Width:38.1
Pitch:1.27
Two,
4.2-dia.
mounting
holes
Teaching button
RUN/TEACH mode selector Warning indicator
Teaching indicator
Power indicator
Mounting Dimensions
Two, R5
Two, M4
OMRON XG4E-3031
Connector
50
(1.97)
18.5 (0.71)
170(6.69)
14 (0.55)
(3.94)
(6.30)
50
(1.97)
18.5 (0.71)
175(6.89)
14 (0.55)
(3.94)
(6.30)

F3M-S F3M-S
7
JF3M-S1213 JF3M-S1225
Optical axis
Two, M4,depth:8
(mounting holes)
OMRON XG4A-3034
Connector
Teaching button
RUN/TEACH mode selector Warning indicator
Teaching indicator
Power indicator
Optical axis
Optical axis
Two, M4,depth:8
(mounting holes)
OMRON XG4A-3034
Connector
Teaching button
RUN/TEACH mode selector Warning indicator
Teaching indicator
Power indicator
Optical axis
Optical axis
Optical axis
50
(1.97)
140 (5.51)
25 (0.98)
18 (0.71)
50
(1.97)
260 (10.24)
25 (0.98)
18 (0.71)
Precautions
JCORRECT USE
Avoid Damage to the F3M-S
xDo not use the F3M-S at a voltage that exceeds the rated
voltage range.
xDo not make mistakes in wiring, such as mistakes in polarity.
xDo not short-circuit the load.
xDo not connectAC to the F3M-S.
JINSTALLATION/ENVIRONMENT
Do NOT use the F3M-S in the following places:
xPlaces exposed to directsunlight.
xPlaces with high humidity that may cause condensation.
xPlaces with corrosive gas.
xPlaces with vibration or shock directly affecting the Sensor.
JCONNECTION AND MOUNTING
xA maximumof 24 VDC+10%can be imposed on the F3M-S.
Check thatthe voltage ofthe power supply is within the per-
missible range before turning on the F3M-S. The power sup-
ply mustbe constructed so thatthe secondary circuit is insu-
lated with an isolating transformer.
xDo not wire power lines or high-tension lines within the same
conduit with the lines of the F3M-S,or the F3M-S may be
damaged ormalfunction due to induction. You mustwire the
lines of the F3M-S separate from power lines or high-tension
lines or laid in an separate, shielded conduit.
xAvoid mechanical impactwhen mounting the F3M-S, orthe
water-resistant properties of the F3M-S will be reduced.
JCLEANING
Do not attempt to clean the F3M-S using paint thinner, to avoid
damaging the surface of the F3M-S.
JPOWER SUPPLY
If a standard switching power supply is connected to the F3M-S,
be sure to ground the FG (frame ground) and G(ground)
terminals of the power supply. The F3M-S may malfunction due
to switching noise that will be generated from the power supply if
these terminals are notgrounded.

F3M-S F3M-S
Cat. No. CEDSAX4 11/01 Specifications subject to change without notice. Printed in U.S.A.
OMRON ELECTRONICS LLC
OneEastCommerceDrive
Schaumburg, IL 60173
NOTE: DIMENSIONS SHOWN ARE IN MILLIMETERS. To convert millimeters to inches divide by 25.4.
1-800-55-OMRON
OMRON CANADA, INC.
885 Milner Avenue
Scarborough, Ontario M1B 5V8
416-286-6465
R
OMRON ON--LINE
Global -- http://www.omron.com
USA -- http://www.omron.com/oei
Canada -- http://www.omron.com/oci