Omron Z300 User manual

B-31Z300
Z300
High-precision Visual Displacement Measurement System
Z300
2-Dimensional CCD is Built in. A New Type of
Displacement Sensor Utilizing the Best and Most
Up-to-date Image Processing Technologies.
Features
OMRON's Z300 makes the notion that displacement sensors cannot perform stable measurement of a transparent object
or a glass a thing of the past. The newly-developed 2-dimensional CCD (S-CCD) incorporated in the Z300, combined with
upgraded performance of the controller, provides enhanced stability and accuracy in measurement of a transparent object.
The latest algorithm employed by the Z300 enables optimal sensitivity even if there is a big difference between the amount
of reflected light from the surface and that from the bottom of a glass.
Enhanced measurement area and a variety of high-resolution,
long-distance sensor heads greatly expand the range of
applications.
The Z300 is just another example of OMRON's ongoing
challenge to the limits of sensing possibilities.
Z300-S60
Super Long-range Model
Detection distance of 600 ± 350 mm
Z300-S10
Long-range Model
Detection distance of
100 ± 20 mm
Z300-S5T
High-precision Model
Detection distance of
50 ± 5 mm
Stable measurement of a transparent object or a glass.
A wide variety of sensor heads for enhanced detection possibilities.
Z300-S2T
Super-precision Model
Detection distance of
20 ± 1 mm
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B-32 Displacement sensors / Width-measuring Sensors
The innovative 2-dimensional CCD (S-CCD) is the key to the sensing performance.
A conventional displacement sensor using a 1-dimensional
CCD cannot deal with flutter influence to the output. There-
fore, the sensor requires increased number of measurements
for signal averaging, which leads to slow response time. The
S-CCD with a 2-dimensional CCD has solved this disadvan-
tage, by splitting the measurement point into 60 lines for mea-
surement in finer detail. The value per each pixel is then
averaged to produce a reliable output, free from flutter influ-
ence caused by the object's surface condition. Stable detec-
tion and high-speed processing is thus possible with the Z300.
The 2-dimensional CCD enables stable, high-speed
measurement.
CCD makes a difference in measurement of a
transparent object.
PSD sensor
A PSD sensor using dif-
fuse reflection is virtually
prevented from perform-
ing measurement due to
insufficient reflection dis-
tribution from the surface.
A sensor using the mirror
reflection method, on the
other hand, receives re-
flective light from the bot-
tom or background of the
object, which causes an
error in determining the
target position, impeding
accurate measurement.
CCD sensor
A CCD using the mirror re-
flection method is a solu-
tion. It can extract only the
light reflected off the sur-
face of the target. Accu-
rate measurement of a
transparent object is pos-
sible without being affect-
ed by reflected light from
the bottom or background
of the object.
PSD output
(position of the reflected
light output from PSD)
Reflected light from
the surface
Reflected light
from the bottom
PSD
Receiver lens
Transparent object
Position
Light gain
Reflected light from the surface Detecting reflect
light from the
surface
Reflected light
from the bottom
CCD
Receiver lens
Transparent object
Position
Light gain
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B-33Z300
Z300
Monitoring as the object is being measured.
Measurement data can be recorded and played back.
Easy-to-see color display is another great feature of the Z300 (when connected to a color monitor). Monitoring at each key stage
including test and adjustment, operation, or maintenance greatly facilitates efficient, error-free measurement.
Real-time monitoring
Digital monitor Image monitor Trend monitor
The measured value is displayed. The use of two
colors: green for "Pass" judgement, and red for
"High/Low," enhances visual recognition of the
measurement result.
Displays the position of measurement point as well as
intensity of the reflected light.
Conveniently checks whether optimum measurement
is taking place.
Continuous measurement values during a certain
period of time are shown in chronological order.
Changes in the measured values of a moving or
rotating object can be checked at a glance.
Monitoring during recording and playback
Test mode Conditions during Test mode can be
recorded and played back
NG (High/Low) judgement status is
recorded and played back.
Any desired number of measurement data can be
stored for testing with a workpiece. Test measurement data obtained off-line can be saved for reference for actual in-line measurement. Up to 20 in-line NG data (information including reflected light condition and measurement data) can
be recorded for workpiece analysis as well as for
troubleshooting.
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B-34 Displacement sensors / Width-measuring Sensors
Interactive menus provide a variety of measurement functions.
Application menu
Settings for measurement methods are easily performed using the menu.
Just follow the guidance of the monitor screen.
Expert menu
Expert menu is available for more advanced measurement. Detailed setting conditions can be conveniently programmed using
the menu.
Enhanced hold functions widen the scope of application.
With discrete hold functions equipped within the controller, the Z300 provides a variety of trigger (measurement timing) functions,
making otherwise difficult applications a reality — with ease.
Hold functions
Selectable trigger function
Surface displacement Spot displacement Maximum height
Level difference
Level difference (2 sensors) Thickness (2 sensors)
Groove/indentation
Transparent object thickness
Sampling hold
Direction/Time
Displacement
amount
Displacement amount
Displacement amount
Displacement amount
Peak hold (bottom)
Direction/Time
Peak value
Peak to peak hold
Direction/Time
Peak to peak
Displacement amount
Displacement amount
Average hold Length hold
Direction/
Time
Average value
Direction/Time
Length
Bottom value
Displacement
amount
Displacement
amount
Displacement
amount
Measurement
trigger
Measurement
trigger
Measurement
trigger
Measurement
trigger
Measurement
trigger
Average
displacement amount
Measurement trigger can be set to the controller for
desired measurement timing.
Peak to peakPeak
Sampling
Direction/
Time
Displacement amount
Displacement
amount
Measurement
trigger
Optional trigger
function
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B-35Z300
Z300
Application
Measuring the thickness of transparent film
Measuring the thickness of sheet
Inspecting the surface uniformity of a hard disk
Measuring tire or black rubber thickness
Measurement of electrode position in the display module
Measurement of warping in transparent plastic
Shape measurement for welding robot control
Grinding measurement of a whetstone
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B-36 Displacement sensors / Width-measuring Sensors
System configuration
Ordering Information
Note: Specify the required cable length when ordering.
Name Item Model Remarks
Sensor
Z300-S2T
Z300-S5T
Z300-S10
Z300-S60
Controller Z300-VC10EV3 NPN input/output
Z300-VC15EV3 PNP input/output
Console Z300-KP
Liquid Crystal Monitor F150-M05L
Sensor Extension Cable Z309-SC1R (See note) Cable length: 1.5 m, 3 m, 6 m, 8 m, 13 m or 18 m
Monitor Cable F150-VM
Monitor
Sensor Extension Cable
Z309-SC1R (cable length:
1.5 m, 3 m, 6 m, 8 m,
13 m or 18 m)
Monitor Cable
F150-VM (cable length: 2 m)
Liquid Crystal Monitor
F150-M05L (pin input)
BNC Jack
(Provided with F150-VM)
Synchronization Sensor
Linear Sensor Controller
K3AS
Controller
Z300-VC10EV3
Z300-VC15EV3
Sensor
Z300-S2T
Z300-S5T
Z300-S10
Z300-S60
(Up to 2 Sensors can be
connected.)
Console
Z300-KP
(cable length: 2 m)
Programmable Controller
Power Supply
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B-37Z300
Z300
Rating/performance
Sensor: Z300-S2T/Z300-S5T/Z300-S10/Z300-S60
Note: 1 .Defined at 1/e2(13.5 %) of the density at the light center. Light may, however, be present outside this range and if the reflection factor of the light around the
workpiece is high compared to the workpiece, measurement may be affected.
2 .Error with respect to the theoretical line representing the displacement output for measurement of OMRON standard SUS blocks. The linearity varies with the
type of workpiece.
Model Z300-S2T Z300-S5T Z300-S10 Z300-S60
Measurement mode
Diffuse reflection Mirror reflection Diffuse reflection Mirror reflection Diffuse reflection Mirror reflection Diffuse reflection only
Distance to
measurement center ±5.2 mm
20 mm
(with beam cover
attached: 16 mm)
±50 mm ±44 mm ±100 mm ±94 mm ±600 mm
Measurement range ±1 mm ±5 mm ±4 mm ±20 mm ±16 mm ±350 mm
(F.S.700 mm)
Light source
Visible-light
semiconductor laser
(Wavelength: 650 nm,
1 mW max., Class 2)
Visible-light semiconductor laser
(Wavelength: 670 nm, 1 mW max., Class 2)
Visible-light
semiconductor laser
(Wavelength: 658 nm,
15 mW max., Class 3B)
Beam dimensions
(See note 1.)
20 µm × 300 µm (200 µm*) TYP.
(distance to measurement center)
* Measurement region
30 µm × 400 µm TYP.
(distance to measurement
center)
60 µm × 1000 µm TYP.
(distance to measurement
center)
0.3 mm × 16 (10.3*)
mm (at 500 mm)
* Measurement region
Linearity ±0.05 %F.S.
(See note 2.)
±0.05 %F.S.
(See note 3.) ±0.1 %F.S. (See note 4.)
±0.07 %F.S.
(250 to 750 mm)
±0.1 %F.S.
(750 to 950 mm)
(See note 4.)
Resolution 0.4 µm
(See notes 5 and 6.)
0.4 µm
(See notes 7 and 9.)
1 µm
(See notes 7 and 8.)
8 µm (at 350 mm)
40 µm (at 600 mm)
(See notes 7 and 8.)
Sampling period
(See note 10.) 540 µs
LED indicators
NEAR indicator
Lights if the workpiece is close to the measurement center or is on the near side of the measurement center
and inside the measurement region.
Flashes if the workpiece is outside the measurement region or if the density is excessive or insufficient.
FAR indicator
Lights if the workpiece is close to the measurement center or is on the far side of the measurement center and
inside the measurement region.
Flashes if the workpiece is outside the measurement region or if the density is excessive or insufficient.
Temperature charac-
teristic (See note 11.) ±0.01 %F.S./°C
Environment resistance
Degree of
protection IEC IP64 IEC IP67 IEC IP66
Ambient operating
illumination
Illumination at light-receiving surface: 3,000 lx max., incandescent light
Ambient
temperature Operating: 0 to +50 °C, Storage: -15 to +60 °C (with no icing or condensation)
Ambient humidity Operating and storage: 35 % to 85 % (with no condensation)
Vibration
resistance 10 to 150 Hz (double amplitude: 0.35 mm) for 8 min. each in X, Y, and Z directions
Materials Unit: Die-cast aluminum; Cable sheathing: Heat-resistant chlorinated vinyl
Connector: Zinc alloy and brass
Cable length 2 m 50 cm
Minimum bending
radius 68 mm
Weight Approx. 600 g
(Unit: Approx. 350 g) Approx. 800 g (Unit: Approx. 600 g) Approx. 800 g
(Unit: Approx. 700 g)
Accessories 3 ferrite cores, laser warning labels (English)
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B-38 Displacement sensors / Width-measuring Sensors
3 . Error with respect to the theoretical line representing the displacement output for measurement of OMRON standard quartz glass. The linearity varies with
the type of workpiece.
4 . Error with respect to the theoretical line representing the displacement output for measurement of OMRON standard white alumina ceramics. The linearity
varies with the type of workpiece.
5 .Displacement conversion value for peak-to-peak of displacement output. These figures are for measurement of OMRON standard quartz glass (mirror reflec-
tion mode) or OMRON standard SUS blocks (diffuse reflection) at the measurement center.
In magnetic fields, it may not be possible to maintain resolution performance characteristics.
6 . These figures are for when the Sensor is connected to the Z300-VC10EV3/VC15EV3, the average number of measurements is 256, and M command RS-
232C output is used.
7 .Displacement conversion value for peak-to-peak of displacement output (for measurement of OMRON standard white alumina ceramic at the measurement
center).
In strong magnetic fields, it may not be possible to maintain resolution performance characteristics.
8 .With the Z300-VC10EV3/VC15EV3, at an average number of measurements of 64.
9 .With the Z300-VC10EV3/VC15EV3, at an average number of measurements of 512.
10.Value for measurement with 1 line (high speed) set in CCD Mode.
11.Value for measurement with the space between the Sensor and the workpiece (Z300-S5T/S10/S60: white alumina ceramic; Z300-S2T: quartz glass) secured
with an aluminum jig.
120 mm
ex. Z300-S10
80 mm
80 mm 120 mm
Digital output
±0.1 % max.
Distance
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B-39Z300
Z300
Controller: Z300-VC10EV3/Z300-VC15EV3
Note: For measurement at an average number of times of 64 with an OMRON K3AS Linear Sensor Controller connected.
Item mode VISUAL mode NON-VISUAL mode
Performance specifications
Number of Sensors
that can be mounted 21
Number of scenes 16 1
Image memory
function
NG images: 20 scenes max.; Surrounding images: 4
scenes max.; Workpiece display images: 4 scenes max. ——
Processing method Gray center of gravity, edge centering Edge centering
Pre-image processing Noise removal, smoothing None
Averaging/filtering Average number of times (12 stages, 1 to 4096 times),
HPF (high pass filter)
Average number of times
(SLOW: 64 times; FAST: 1 time)
Light intensity
tracking function
Automatic (The light intensity tracking range can be
specified.)
Fixed (Select from 32 stages.)
Automatic (The light intensity tracking range can
not be specified.)
Fixed (Select either HIGH or LOW.)
Applications
Select from the following 8 types:
Surface displacement, spot displacement, maximum
height, groove/indentation, level difference, transparent
workpiece thickness, level difference (2 Sensors), or
thickness (2 Sensors).
——
Region specification Region specification of line beam and displacement
direction is possible. ——
Two region
measurement modes Absolute coordinate mode and relative coordinate mode ——
Hold functions Sampling, peak, bottom, peak-to-peak, average, and length ——
Two Sensor
measurement modes
Simultaneous measurement and alternate
measurement ——
Measurement data 4 outputs per scene 1 output
Equations
The following operations are possible for outputs 0 to 3:
K+A, K-A, K+(A+B), K+(A-B), and K-(A+B)
A and B: Specified measurement points
K: Freed constant
——
Results output Analog output
Terminal block
11 input points: TRIGGER, HOLD-RESET, LD-OFF,
ALL-ZERO, ZERO0, ZERO1, RESET,
and DI 0 to DI 3
21 output points: DO0 to DO20
LD-OFF
Input/Output Type Z300-VC10EV3: NPN
Z300-VC15EV3: PNP
Monitor interface 1 channel (for pin jack or overscan monitor) ——
Analog output
resolution
The full scale for output can be divided into a maximum of 40000 gradations.
Resolution (See note.) * 0.25 mV (±5 V), 0.4 µA (4 to 20 mA)
Judgement output (HIGH, PASS, LOW, ERROR)
RS-232C output
Terminal block output
Measurement value output (measurement value)
RS-232C output
Terminal block output
Analog output
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B-40 Displacement sensors / Width-measuring Sensors
Monitor
Item mode VISUAL mode NON-VISUAL mode
General specifications
Supply voltage 21.6 to 26.4 VDC (including ripple)
Current consumption 1 A max. (with 2 Sensors connected)
Insulation resistance 20 MΩ min. between all DC external terminals and GR terminal
(100 VDC Megger, with internal surge absorber removed)
Dielectric strength 1000 VAC, 50/60 Hz between all DC external terminals and GR terminal
(with internal surge absorber removed)
Leakage current 10 mA max.
Noise resistance 1500 Vp-p; Pulse width: 0.1 µs/ 1 µs; Rising edge: 1-ns pulse
Vibration resistance 10 to 150 Hz (double amplitude: 0.1 mm) for 8 min. each in X, Y, and Z directions
Shock resistance 200 m/s2, 3 times each in 6 directions
Ambient temperature Operating: 0 to +50 °C, Storage: -15 to +60 °C (with no icing or condensation)
Ambient humidity Operating and storage: 35 % to 85 % (with no condensation)
Ambient environment No corrosive gases
Ground Ground the Z300’s ground terminal to less than 100 Ω
Degree of protection IEC60529 IP20 (in-panel)
Case material Controller: ABS
Weight (including packaging) Approx. 1300 g (Unit: Approx. 700 g)
Accessories 2 manuals, 1 resistor (250 Ω, 1/2 W)
Monitor Liquid Crystal Monitor
Item Model F150-M05L
Size 5.5 inches
Type TFT color liquid crystal
Resolution 320 ×240 dots
Input signal NTSC composite video (1.0 V / 75 Ω)
Supply voltage 20.4 to 26.4 VDC
Current consumption Approx. 700 mA
Ambient temperature Operating: 0 °C to +50 °C, Storage: -25 °C to +65 °C (with no icing or condensation)
Ambient humidity Operating and storage: 35 to 85 %RH (with no condensation)
Weight (including packaging) Approx. 870 g (Unit: Approx. 610 g)
Accessories Operation manual, 4 mounting brackets
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B-41Z300
Z300
Laser Safety
The Z300-S2T, Z300-Z5T and Z300-S10 Sensor Heads are
Class 2 Laser Products according to EN60825-1 (IEC60825-
1) and Class II Laser Product according to FDA (21
CFR1040.10) (see note). The Z300-S60 Sensor Head is a
Class 3B and Class IIIB Laser Product, respectively. The
Z300 Series is meant to be built into final system equipment.
Pay special attention to the following precautions for the safe
use of the product:
Note: Europe: Class 2 and Class 3B of EN60825-1: 1994 = IEC60825-1: 1993
U.S.A.: Class II and Class IIIB of FDA (21 CFR1040.10)
(1)Use this product as specified in the operation manual. Oth-
erwise, you may be exposed to hazardous laser
radiation.
(2)The Z300 series radiates laser beams in the visible light
range. Do not expose your eyes directly to the laser radi-
ation. Ensure that the laser beam path is terminated dur-
ing use. If a mirror or shiny surface is positioned in the
laser beam path, ensure that the reflected beam path is
also terminated.
If the Unit must be used without terminating the laser beam
path, position the laser beam path so that it is not at eye
level.
(3)To avoid exposure to hazardous laser radiation, do not dis-
place nor remove the protective housing during operation,
maintenance, and any other servicing.
(4)The user should return the product to OMRON for all repair
and servicing.
(5)As for countries other than those of Europe and the U.S.A.,
observe the regulations and standards specified by each
country.
Precautions
Warming up
After turning on the power, wait about 30 minutes before using
the equipment. The circuits are not stable after turning on the
power, and thus measured values tend to gradually drift.
Z300-S2T Z300-S5T Z300-S10 Z300-S60
Wavelength 650 nm 670 nm 658 nm
Peak power 1 mW max. 15 mW max.
Class 2 3B
Maximum
pulse duration
7 ms 17.5 ms
Period 0.5 to 10 ms 0.5 to 25
ms
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B-42 Displacement sensors / Width-measuring Sensors
Dimensions (Unit: mm)
Sensor
Z300-S2T
17 dia.
4
Operation indicators
Optical axis
Reference plane
Receiver
26.4
12
3
Emitter
Monitor
Light
Two, 4.5-dia. holes
Emission axis
Reference plane
Receiver axis
Connector
18.1 20
20
65
6.5 20
4
12
25˚
56.5
3.5
32
20
16
4
(4)
65
57
Vinyl-insulated round cable 6.8 dia.
Standard length: 2 m
Measurement center
25˚
Z300-S5T
Operation indicators
Connector
18
Reference plane
Optical
axis
80
50
70
Vinyl-insulated round cable 6.8 dia.
Standard length: 2 m
4
16.4
30˚
25
9.5
Emission axis
Receiver
axis
Reference plane
Measurement
center
Three, 4.5-dia. holes
8
36
69 25
100
4.5 dia.
(15)
Z300-S10
25˚
Optical
axis
4
Emission axis
Receiver
axis
Reference plane
Measurement center
18
36
Operation indicators
Connector
Reference plane
80
70
69 25
100
Vinyl-insulated round cable 6.8 dia.
Standard length: 2 m
9.5
Three, 4.5-dia. holes
84.5 dia.
(15)
100
16.4
25
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B-43Z300
Z300
Controller
Console LCD monitor
Z300-S60
600
5
R2
75
Reference plane
65
28 47 6-R1 Operation indicators
8
21 dia.
120 38
45 ±0.1
65 ±0.1
(0.5:1)
Three, M4 holes
19
4525
16.4
102
88.75 9.5
(5)
57
2
Measurement
center Emission
axis
Reference
plane
Vinyl insulated round cable 6.8 dia.
Standard length: 500 mm
Connector
Receiver
axis
Optical
axis
7˚
195
Indicators
10
10
185
Four, 4.5-dia.
holes
Connector
4.1
(66.5)
8
110 100
90
12.5 dia.
142.6
50
Z300-VC10EV3
Z300-VC15EV3
Z300-KP
ESC TRIG ENT
SHIFT
CONSOLE
Z300-KP
50
23
2000 510
131.5
87
12.5
12 dia.
POWER
SYNC
143
(145)
(155)
132
50 min.
(46 max.)
Mounting plate thickness:
1.6 to 4.8
(100)
185
(5.5)
174
Mounting bracket
Monitor cable (F150-VM)
Tolerance: ±1 mm
The dimensions in parentheses are reference values.
42.2
133.5
175.5
Panel opening dimensions
+0.5 mm
0
+0.5 mm
0
F150-M05L
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B-44 Displacement sensors / Width-measuring Sensors
In the interest of product improvement, specifications are subject to change without notice.
ALL DIMENSIONS SHOWN ARE IN MILLIMETERS.
To convert millimeters into inches, multiply by 0.03937. To convert grams into ounces, multiply by 0.03527.
Cat. No. Q01E-EN-02
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