Parker MSR Series Owner's manual

MANUAL NO. 102-6307-01
REV D
EFFECTIVE : 3/21/18
SUPERCEDES : 1/25/18
User Information Guide
mSR100

User Information Guide
2 WWW.PARKERMOTION.COM
PH: (724)-861-8200
For assistance contact:
Parker Hannifin Corporation
Electro Mechanical Division
1140 Sandy Hill Road
Irwin , PA 15642
Ph 724-861-8200
800-245-6903
E-mail : [email protected]
www.parkermotion.com

User Information Guide
3 WWW.PARKERMOTION.COM
PH: (724)-861-8200
MSR Series Product Manual
Introduction………………………………….………………………………………………………….5
General Information…………………………………………………………………….…5
Return….………………………………………………………………………………….5
Repair……………………………………………………………………………………..5
Unpacking and General Installation.………………………………….……………………………....6
Warnings and Precautions………….………………………………………………………………….7
Specification Conditions….………….…………………………………………………………………8
Environmental Specifications …….…………………………………………………...…8
Mounting Requirements ..….…………..……………….…………………………….…..8
Specifications………………. ……….………………………………………………………………….9
Part Number Nomenclature ……….…………………………………………………………………12
Electrical Specifications…………….……………..………………………………………………….13
Standard Cabling and Wiring Diagrams……………………………………………………………..14
Dimensional Drawings…………………………………………………………………………………15
Assembly Diagram……………………………………………………………………………………..16
Optical Encoder Limits………………………………………………………………………………..17
Magnetic Encoder Limits……………………………………………………………………………...18
Cable Carrier Mounting……………………………………………………………………………….19
Part and Serial Number Location…………………………………………………………………….21
Caution and Warning Label…………………………………………………………………………..21
Maintenance and Life Expectancy……………………………………………………………………22
Spare Parts……………………………………………………………………………………………..22
Compliance Documents………………………………………………………………………………..23
Restriction of Hazardous Substances………………………………………………...…..23
CE Declaration of Conformity…………………………………………………………...23
Notes…………………………………………………………………….………………………………24

User Information Guide
4 WWW.PARKERMOTION.COM
PH: (724)-861-8200
REVISON NOTES_____________________________________________________________________
REV - INITIAL RELEASE 4/30/15
REV A CHANGED TRANSPORT TEMPBERATURE ON PG 8 TO 0 TO +40 (WAS –20 TO +60)
REV B ADDED MOUNTING HOLE INFORMATION PAGE 15
REV C - p15 - Base Dowel Pin corrected to Slip Fit
REV D- UPDATE VALUES ON PGS 10-11

User Information Guide
5 WWW.PARKERMOTION.COM
PH: (724)-861-8200
Introduction
The mSR is a linear positioner that fits a miniature foot print but delivers large value for customers
looking to move a relatively light payload with high precision. All key components are integral to the
unit - residing within the body of the stage to provide a clean looking, reliable, unobstructed package.
At the heart of the mSR is an innovative, non-contact linear servo motors. This direct drive motor has
been optimized for force, speed, and acceleration, to deliver outstanding performance and response.
A variety of high precision non-contact linear encoders provides sub-micron resolution and repeatabil-
ity. Selectable resolutions range from 10 nanometers to 1 micron. Precision linear ‘square rails’ pro-
vide extremely smooth - precise linear translation. Travel limit and home sensors are conveniently de-
signed into the unit for easy adjustment over the entire travel of the stage. Each stage has been fitted
with hi-flex cabling to address cable flexing concerns associated with multi-axis systems.
The mSR is intended to be integrated as a component into a machine with separate power electron-
ics, and motion controller. As such the mSR is an incomplete machine, requiring proper power elec-
tronics to be added, as well as necessary machine guarding. The mSR is only rated for use in relative-
ly clean environments moving relatively light payloads (≤12 kg).
Return Information
Returns
All returns must reference a “Return Material Authorization” (RMA) number. Please call your local author-
ized distributor or Parker Customer Service Department at 800-245-6903 to obtain a “RMA” number.
Repair Information
Out-of-Warranty Repair
Our Customer Service Department repairs Out-of-Warranty products. All returns must reference a “RMA”
number. Please call your local authorized distributor or Parker Customer Service Department at 800-245-
6903 to obtain a “RMA” number. You will be notified of any cost prior to making the repair.
General Information
Thank you for your interest in the products and systems offered by Parker Hannifin Electromechanical
Automation Division. Our products and systems are recognized around the world for their functionality,
performance, and reliability. Our products can be combined to form single or multi-axis systems with a full
support of custom applications.
The intent of this guide is to provide general information for our MSR product line., including safety, basic
maintenance and features. Not all of this information may be applicable to your product.
If you have any questions or challenges please call our factory support team at 800-245-6903.
It is the responsibility of the end user to ensure that equipment is installed and operated in
accordance with both local and federal safety codes and guidelines.
The user must ensure that the attachment of work pieces/tools or other devices on the moving

User Information Guide
6 WWW.PARKERMOTION.COM
PH: (724)-861-8200
Unpacking and General Installation
Carefully remove the positioner from the packaging materials and inspect the unit for any evidence of shipping
damage. Report any damage immediately to your local authorized distributor. Please save the shipping contain-
er for damage inspection or future transportation.
Incorrect handling of the positioner may adversely affect the performance of the unit in its application. Standard
handling and lifting practices should be employed, product may be heavy.
Please observe the following guidelines for handling and mounting of your new positioner.
Proper mounting of the positioneris required to reduce risk of injury and provide optimal performance.
Positioners should be mounted to a flat, stable surface by using thru-holes , counter bored holes, or tapped
holes on the base of the unit.
Unless otherwise specified, the standard installation of the linear drive is horizontal.
DO NOT allow the positioner to drop onto any surface. Dropping the positioner can generate impact loads that
may result in flat spots on bearing surfaces or misalignment of drive components, drastically effecting the perfor-
mance of the product.
DO NOT drill holes into the positioner. Drilling holes into the positioner can generate particles and machining forc-
es that may effect the operation of the positioner. Parker will drill holes if necessary; contact your local authorized
distributor.
DO NOT subject the unit to impact loads such as hammering, riveting, etc. Impacts loads generated by hammer-
ing or riveting may result in flat spots on bearing surfaces or misalignment of drive components, drastically effect-
ing the performance of the product.
DO NOT lift the positioner by cables or cable management system. Lifting positioner by cables or cable manage-
ment system may effect electrical connections and/or cable management assembly. The unit should be lifted by
the base structure only.
DO NOT expose positioner to mist, spray or submersion in liquids.
DO NOT disassemble positioner. Unauthorized adjustments may alter the positioner’s specifications and will void
the product warranty.
DO NOT transport a long axis without proper support as excessive deflection may occur.

User Information Guide
7 WWW.PARKERMOTION.COM
PH: (724)-861-8200
Warnings and Precautions
Hot Surfaces
DO NOT touch motor coils located in the positioner after high duty operation. Motor temperature may
approach 60°C. The unit itself may become warm or hot to the touch.
Electrical Shock
DO NOT take apart or touch any internal components of the positioner while unit is plugged into an elec-
trical outlet. SHUT OFF power before replacing components to avoid electrical shock.
High Magnetic Field
Unit may be HAZARDOUS to people with Pace Makers or any other ‘magnetically-sensitive’ medical de-
vices. Unit may have an effect on ‘magnetically-sensitive’ applications.
Ferrous Materials
The positioner will NOT keep out small ferrous materials in applications with air born metallic particles.
The customer must take additional precautions in these applications to prevent intrusion of these ferrous
particles.
Vertical Operation
Depending upon your load and counter balance selection the carriage and load may drop when mounted
vertically in power loss situations potentially causing product damage or personal injury.
General Safety
Because linear motors can accelerate up to 3 g's and operate at high speeds, and sometimes positioners
move without warning, keep all personnel away from dynamic travel range of positioner. Product does
have pinch areas where moving elements relative to each other come together.
Moving Cables
If the cables are to be moving, the use of high flex cabling is recommended to ensure long life .
Strain Relieve Electrical Components
All electrical components (such as motor, halls, encoders and limit/home switches) must be strain re-
lieved. Failure to strain relieve electrical wires or cables may result in component failure and/or possible
personal injury.
Pinch Points
Unit may have a pinch point because the top extends over the base of the table as well as moving ele-
ments relative to stationary elements. Proper care should be exercised.

User Information Guide
8 WWW.PARKERMOTION.COM
PH: (724)-861-8200
Specification Conditions
Environmental Specicaons
Storage and Transport Temperature Range 0 to + 40 Degrees C.
Storage and Transport Humidity Range 10 - 95% Non Condensing
Operaon Temperature to Achieve Specicaons 20 Degrees C +/- 1 degree C
Operaon Temperature range for basic moon ¹ 5 to 40 Degrees C.
Operaonal Humidity Range 10 - 95% Non Condensing
Cleanliness
Operang area is to be clean and free of parculaon.
Normal room dust is acceptable but heavy parculaon
can cause malfuncons and damage.
¹ Minimum to maximum connuous operang temperature range (with NO guarantee of any specicaon except moon)
Mounng Surface Requirements
Proper mounng of the mSR is essenal to opmize product performance. All specicaons are based on the
following condions:
• The posioner must be bolted down to a at surface which supports the enre length of the base us-
ing all mounng holes provided
• At a minimum for basic moon the posioner must be mounted to a at, stable surface, with a at-
ness error less than or equal to 0.025mm/300mm, (specicaons will be greatly varied from published
specicaon with this atness).
• To meet catalog specicaons the surface must have a atness error less than or equal to
0.003mm/300mm for Standard grade and 0.001mm/300mm for Precision grade.

User Information Guide
9 WWW.PARKERMOTION.COM
PH: (724)-861-8200
Specifications
Specicaons Units 25 50 100 150 200 250
Travel mm LS LS LD LS LD LS LD LS LD LS LD
Size (WxH) mm 100 x 35 100 x 35 100 x 35 100 x 35 100 x 35 100 x 35
Normal Load kg 12 12 12 12 12 12
Connuous Thrust N11 11 16.7 11 16.7 11 16.7 11 16.7 11 16.7
Peak Thrust (Max) N33 33 50 33 50 33 50 33 50 33 50
Duty Cycle %100 100 100 100 100 100
Acceleraon (Max– no load) G333333
Rated Bus Voltage Volts DC 48 48 48 48 48 48
Straightness & Flatness¹ Standard grade μm±5 ±5 ±8 ±8 ±8 ±10
Precision grade ±3 ±3 ±4 ±4 ±5 ±5
Carriage Mass kg 0.34 0.34 0.46 0.34 0.46 0.34 0.46 0.34 0.46 0.34 0.46
Stage Mass kg 1.06 1.21 1.57 1.45 1.80 1.68 2.03 1.91 2.35 2.23 2.59
Units 300 350 400 450 500
Travel mm LS LD LS LD LS LD LS LD LS LD
Size (WxH) mm 100 x 35 100 x 35 100 x 35 100 x 35 100 x 35
Normal Load kg 12 12 12 12 12
Connuous Thrust N11 16.7 11 16.7 11 16.7 11 16.7 11 16.7
Peak Thrust (Max) N33 50 33 50 33 50 33 50 33 50
Duty Cycle %100 100 100 100 100
Acceleraon (Max– no load) G33333
Rated Bus Voltage Volts DC 48 48 48 48 48
Straightness & Flatness¹ Standard grade μm±10 ±12 ±16 ±20 ±20
Precision grade ±5 ±6 ±8 ±10 ±12
Carriage Mass kg 0.34 0.46 0.34 0.46 0.34 0.46 0.34 0.46 0.34 0.46
Stage Mass kg 2.47 2.82 2.70 3.05 2.93 3.37 3.25 3.60 3.48 3.84
1 Precision grade version stage mounted to granite surface, 0.01 micron opcal encoder
Connuous Power
Motor Power (Was)
LS Motor 57.6
LD motor 104.6

User Information Guide
10 WWW.PARKERMOTION.COM
PH: (724)-861-8200
mSR100 Specicaons (Travel & Encoder Dependent)
Travel (mm)
Specicaon Units 25 50 50 100 100 150 150 200 200 250 250
(LS) (LS) (LD) (LS) (LD) (LS) (LD) (LS) (LD) (LS) (LD)
Magnec Encoder -1 Micron Resoluon
Max. Speed mm/s 1100 1500 3000 3000 3000 3000 3000 3000 3000 3000 3000
Bi-direconal
Repeatability μm±5.0
Posional Accuracy μm40 40 60 80 100 100 100 100 100 100 100
Opcal Encoder- 1 Micron Resoluon
Max. Speed mm/s 1100 1500 3000 3000 3000 3000 3000 3000 3000 3000 3000
Bi-direconal
Repeatability μm±2.0
Posional Accuracy μm10 10 10 10 10 10 10 12 12 14 14
Posional Accuracy
(Slope Corrected) μm66666777788
Opcal Encoder- 0.1 Micron Resoluon
Max. Speed mm/s 300 300 300 300 300 300 300 300 300 300 300
Bi-direconal
Repeatability μm±0.4
Posional Accuracy μm999999911 11 13 13
Posional Accuracy
(Slope Corrected) μm55555666677
Opcal Encoder- 0.01 Micron Resoluon
Max. Speed mm/s 30 30 30 30 30 30 30 30 30 30 30
Bi-direconal
Repeatability μm±0.2
Posional Accuracy μm888888810 10 12 12
Posional Accuracy
(Slope Corrected) μm44444555566
BiSS-C Absolute Encoder - 0.05 Micron Resoluon
Max. Speed mm/s 1100 1500 3000 3000 3000 3000 3000 3000 3000 3000 3000
Bi-direconal
Repeatability μm±0.4
Posional Accuracy μm999999911 11 13 13
Posional Accuracy
(Slope Corrected) μm55555666677

User Information Guide
11 WWW.PARKERMOTION.COM
PH: (724)-861-8200
Travel (mm)
Specicaon Units 300 300 350 350 400 400 450 450 500 500
(LS) (LD) (LS) (LD) (LS) (LD) (LS) (LD) (LS) (LD)
Magnec Encoder -1 Micron Resoluon
Max. Speed mm/s 3000 3000 3000 3000 3000 3000 3000 3000 3000 3000
Bi-direconal
Repeatability μm±5.0
Posional Accuracy μm60 60 60 60 60 60 60 60 60 60
Opcal Encoder- 1 Micron Resoluon
Max. Speed mm/s 3000 3000 3000 3000 3000 3000 3000 3000 3000 3000
Bi-direconal
Repeatability μm±2.0
Posional Accuracy μm16 16 18 18 20 20 22 22 24 24
Posional Accuracy
(Slope Corrected) μm88999910 10 10 10
Opcal Encoder- 0.1 Micron Resoluon
Max. Speed mm/s 300 300 300 300 300 300 300 300 300 300
Bi-direconal
Repeatability μm±0.4
Posional Accuracy μm15 15 17 17 19 19 21 21 23 23
Posional Accuracy
(Slope Corrected) μm7788889999
Opcal Encoder- 0.01 Micron Resoluon
Max. Speed mm/s 30 30 30 30 30 30 30 30 30 30
Bi-direconal
Repeatability μm±0.2
Posional Accuracy μm14 14 16 16 18 18 20 20 22 22
Posional Accuracy
(Slope Corrected) μm6677778888
BiSS-C Absolute Encoder - 0.05 Micron Resoluon
Max. Speed mm/s 3000 3000 3000 3000 3000 3000 3000 3000 3000 3000
Bi-direconal
Repeatability μm±0.4
Posional Accuracy μm15 15 17 17 19 19 21 21 23 23
Posional Accuracy
(Slope Corrected) μm7788889999

User Information Guide
12 WWW.PARKERMOTION.COM
PH: (724)-861-8200
Part Number Nomenclature
mSR 100
Part
Number
Example:

User Information Guide
13 WWW.PARKERMOTION.COM
PH: (724)-861-8200
Electrical Specifications
Motor Specicaons Units 3 Pole 5 Pole
(LS Opon) (LD Opon)
Magnec Pitch mm 40 40
Connuous Force¹ N 11 16.7
Peak Force N 33 50
Connuous Current¹ A(rms) 1.2 2.18
Peak Current²˒³ A(rms) 3.5 6.5
Voltage Constant²˒³ Volts/m/s 7.7 6.3
Force Constant² N/A(rms) 9.4 7.65
Resistance² Ohms 6.3 2.82
Inductance⁴ mH 10.5
Max Bus Voltage VDC 48 48
Thermal Resistance C/Wa 5.5 3.56
Winding Thermal Time Constant Minutes 1.3 0.8
Motor Thermal Time Constant Minutes 15 10
1 @ 25° C ambient, and winding temperature at 125° C
2 Measured line to line
3 Value is measured peak of sine
4 ±30% Line-to-Line, inducon bridge measurement @ 1 Khz Funcon Color Pin #
Motor Phase U Red 1
Motor Phase V Brown 2
Motor Phase W Orange 3
PE Ground Green/Yellow 4
Hall Power (+5Volts DC) Black 5
Hall Ground White 6
Hall 1 Yellow 7
Hall 2 Blue 8
Hall 3 Green 9

User Information Guide
14 WWW.PARKERMOTION.COM
PH: (724)-861-8200
Opcal Encoder
Funcon Signal Pin #
Power 5 Volts DC 8
Ground 2,9
Incremental Signals
A+ 14
A- 6
B+ 13
B- 5
Reference Mark Z+ 12
Z- 4
Limits Posive Limit 11
Negave Limit 10
Setup (Used in installaon) 1
Error Output NPN 3
Sine Cosine Encoder
Funcon Signal Pin #
Power 5 Volts DC 4, 5
0 Volts DC 12, 13
Incremental Signals
Cosine + 9
Cosine - 1
Sine + 10
Sine - 2
Reference Mark Z+ 3
Z- 11
Limits Posive Limit 7
Negave Limit 8
Setup (Used in installaon) 6
Error Output NPN 14
Magnec Encoder
Funcon Signal Pin #
Power 5 Volts DC 8
Ground 9
Incremental Signals
A+ 14
A- 6
B+ 13
B- 5
Reference Mark Z+ 12
Z- 4
Limits Posive Limit 11
Negave Limit 10
Home NPN 2
Error Output NPN 3
BiSS-C Absolute Encoder
Funcon Signal Color
Power
5 Volts DC Brown
Ground
Green
White
Serial
Communicaons
MA+ Violet
MA- Yellow
SLO+ Grey
SLO- Pink
Shield Inner Inner Shield
Outer Case

User Information Guide
15 WWW.PARKERMOTION.COM
PH: (724)-861-8200
Dimensional Drawings - mSR100 - mm (in)
Dimensions - mm (in)
Travel (mm) ABC
(QTY)
LS Opon LD Opon
25 - 145 (5.71) 100 (3.94) 8
50 - 170 (6.69) 125 (4.92) 8
100 50 220 (8.66) 150 (5.91) 8
150 100 270 (10.63) 200 (7.87) 8
200 150 320 (12.60) 125 (4.92) 12
250 200 370 (14.57) 150 (5.91) 12
300 250 420 (16.54) 200 (7.87) 12
350 300 470 (18.50) 125 (4.92) 16
400 350 520 (20.47) 150 (5.91) 16
450 400 570 (22.44) 200 (7.87) 16
500 450 620 (24.41) 125 (4.92) 20
- 500 670 (26.38) 150 (5.91) 20
Mounng Requirements
Hardware SCH M3x10
Torque 12 in-lbs
Wrench Size 2.5mm Allen
The mSR part num-
bers mount directly
to one another. The
4 bolts go through
the center of the Y
axis base to the
carriage of the X axis.
Configuration Bolt size
mSR80—mSR100 M4 x 0.7 x 8
mSR100 –mSR100 M3 x 0.5 x10
4 mm Slip Fit of Dowel Pin
(1X Hole and 1X Slot)

User Information Guide
16 WWW.PARKERMOTION.COM
PH: (724)-861-8200
Assembly Diagram - mSR100

User Information Guide
17 WWW.PARKERMOTION.COM
PH: (724)-861-8200
Setting the Optical Encoder Limits
The mSR100 with the opcal encoder opon comes equipped with adjustable end of travel limit
sensors. The sensors are acvated by magnec targets located in a slot on the encoder scale
bracket as shown in Image #3 below. The factory seng locaon of the limit sensor targets provide
the full nominal travel of the stage with approximately 2mm of over travel before the stage en-
counters the hard stop.
To adjust travel, simple loosen the screw on the target ~1/4 turn using a 1.3mm hex wrench, slide
the target to the desired posion, and ghten the screws.
NOTE: The acve length of the target is approximately 9mm. If the target is moved greater than 9
mm from the stage hard stop, the stage can move beyond the acve area of the target and shut o
on the other side of the target. This can lead to having the stage behind a limit sensor. Cauon in
setup and programming should be taken to avoid this potenal issue.
Limit sensor hysteresis: Limit sensor can have up to 1.5 mm of hysteresis which means aer acva-
on the stage must move more than 1.5 mm away from the acvaon point to release the limit
sensor from being acve.
Image 3

User Information Guide
18 WWW.PARKERMOTION.COM
PH: (724)-861-8200
Setting the Magnetic Encoder Limits
The mSR100 with the magnec encoder opon comes equipped with adjustable end of travel
limit sensors and a home sensor. The sensors are acvated by magnec targets located in a slot
on the encoder scale bracket as shown in image #4 below. The factory seng locaon of the
limit sensor targets provide the full nominal travel of the stage with approximately 2mm of over
travel before the stage encounters the hard stop. The home sensor is set such that during a pos-
ive direcon move the home sensor trips approximately in the center of the travel of the stage.
To adjust travel, simple loosen the screw on the target ~1/4 turn using a 1.3mm hex wrench,
slide the target to the desired posion, and ghten the screws.
NOTE: The acve length of the target is approximately 9mm, if the target is moved greater than
9 mm from the stage hard stop, the stage can move beyond the acve area of the target and
shut o on the other side of the target. This can lead to having the stage behind a limit sensor.
Cauon in setup and programming should be taken to avoid this potenal issue.
Limit sensor hysteresis: Limit sensor can have up to 2 mm of hysteresis which means aer ac-
vaon the stage must move more than 2 mm away from the acvaon point to release the limit
sensor from being acve.
Home sensor hysteresis: Home sensor can have up to 0.6 mm of hysteresis which means aer
acvaon the stage must move more than 0.6 mm away from the acvaon point to release the
home sensor from being acve.
Image 4

User Information Guide
19 WWW.PARKERMOTION.COM
PH: (724)-861-8200
Cable Carrier
The mSR100 can be ed with cable carriers to transport the stage cables or user cables.
These cable carriers can be purchased as an opon assembled to the stage at the me of
order, or can be purchased as an accessory. Cable carriers are available in a single or du-
al version, (see image 5 and 6 below). If purchased as an accessory, mount the cable car-
riers as shown in accordance to the images below using the 4 athead screws provided
Image 5. Single Cable Carrier
Image 6. Double Cable Carrier

User Information Guide
20 WWW.PARKERMOTION.COM
PH: (724)-861-8200
Cable Carrier Mounting
* If mounng a longer unit as a Y axis, addional cable carrier supports are recommended.
Recommended # of Addional Supports
Base Length # of Bracket Kits
Up to 260 mm 1
261 -510 mm 2
511 - 660 mm 3