SMC Networks VQ1000 Series User manual

Doc. No.VQ1000V-OMM0002-B
Solenoid Valve
PRODUCT NAME
VQ1000/2000 Series
(PILOT VALVE : V100)
MODEL/ Series

Contents
Safety Instructions ----------------------------------------------------------------------------2,3
Precautions on Design ---------------------------------------------------------------------- 4,5
Selection ---------------------------------------------------------------------------------------- 4,5
Mounting ---------------------------------------------------------------------------------------- 5
Piping -------------------------------------------------------------------------------------------- 6
Wiring -------------------------------------------------------------------------------------------- 6
Lubrication -------------------------------------------------------------------------------------- 6
Air Supply --------------------------------------------------------------------------------------- 7
Operating Environment ---------------------------------------------------------------------- 7
Maintenance ------------------------------------------------------------------------------------ 7,8
Specific Product Precautions --------------------------------------------------------------- 9,10,11
Trouble shooting ------------------------------------------------------------------------------- 12,13
-1-
No.VQ1000V-OMM0002-B

Safety Instructions
These safety instructions are intended to prevent hazardous situations and/or equipment damage.
These instructions indicate the level of potential hazard with the labels of “Caution,” “Warning” or “Danger.”
They are all important notes for safety and must be followed in addition to International Standards
(ISO/IEC)*1) , and other safety regulations.
*1) ISO 4414: Pneumatic fluid power -- General rules relating to systems.
ISO 4413: Hydraulic fluid power -- General rules relating to systems.
IEC 60204-1: Safety of machinery -- Electrical equipment of machines .(Part 1: General requirements)
ISO 10218: Manipulating industrial robots -Safety.
etc.
Caution
Caution indicates a hazard with a low level of risk which, if not avoided, could result
in minor or moderate injury.
Warning
Warning
indicates a hazard with a medium level of risk which, if not avoided, could
result in death or serious injury.
Danger
Danger
indicates a hazard with a high level of risk which, if not avoided, will result
in death or serious injury.
Warning
1.
The compatibility of the product is the responsibility of the person who designs the equipment or
decides its specifications.
Since the product specified here is used under various operating conditions, its compatibility with specific
equipment must be decided by the person who designs the equipment or decides its specifications based on
necessary analysis and test results.
The expected performance and safety assurance of the equipment will be the responsibility of the person who
has determined its compatibility with the product.
This person should also continuously review all specifications of the product referring to its latest catalog
information, with a view to giving due consideration to any possibility of equipment failure when configuring the
equipment.
2. Only personnel with appropriate training should operate machinery and equipment.
The product specified here may become unsafe if handled incorrectly.
The assembly, operation and maintenance of machines or equipment including our products must be
performed by an operator who is appropriately trained and experienced.
3. Do not service or attempt to remove product and machinery/equipment until safety is confirmed.
1.The inspection and maintenance of machinery/equipment should only be performed after measures to
prevent falling or runaway of the driven objects have been confirmed.
2.When the product is to be removed, confirm that the safety measures as mentioned above are implemented
and the power from any appropriate source is cut, and read and understand the specific product precautions
of all relevant products carefully.
3. Before machinery/equipment is restarted, take measures to prevent unexpected operation and malfunction.
4. Contact SMC beforehand and take special consideration of safety measures if the product is to
be used in any of the following conditions.
1. Conditions and environments outside of the given specifications, or use outdoors or in a place exposed to
direct sunlight.
2. Installation on equipment in conjunction with atomic energy, railways, air navigation, space, shipping,
vehicles, military, medical treatment, combustion and recreation, or equipment in contact with food and
beverages, emergency stop circuits, clutch and brake circuits in press applications, safety equipment or
other applications unsuitable for the standard specifications described in the product catalog.
3. An application which could have negative effects on people, property, or animals requiring special safety
analysis.
4.Use in an interlock circuit, which requires the provision of double interlock for possible failure by using a
mechanical protective function, and periodical checks to confirm proper operation.
- 2 -No.VQ1000V-OMM0002-B

Safety Instructions
Caution
1. The product is provided for use in manufacturing industries.
The product herein described is basically provided for peaceful use in manufacturing industries.
If considering using the product in other industries, consult SMC
beforehand and exchange
specifications or a contract if necessary.
If anything is unclear, contact your nearest sales branch.
Limited warranty and Disclaimer/Compliance Requirements
The product used is subject to the following “Limited warranty and Disclaimer” and “Compliance
Requirements”.
Read and accept them before using the product.
Limited warranty and Disclaimer
1.The warranty period of the product is 1 year in service or 1.5 years after the product is
delivered,whichever is first.
∗
2)
Also, the product may have specified durability, running distance or replacement parts. Please
consult your nearest sales branch.
2. For any failure or damage reported within the warranty period which is clearly our responsibility,
a replacement product or necessary parts will be provided.
This limited warranty applies only to our product independently, and not to any other damage
incurred due to the failure of the product.
3. Prior to using SMC products, please read and understand the warranty terms and disclaimers
noted in the specified catalog for the particular products.
∗
2) Vacuum pads are excluded from this 1 year warranty.
A vacuum pad is a consumable part, so it is warranted for a year after it is delivered.
Also, even within the warranty period, the wear of a product due to the use of the vacuum
pad or failure due to the deterioration of rubber material are not covered by the limited
warranty.
Compliance Requirements
1.
The use of SMC products with production equipment for the manufacture of weapons of mass
destruction(WMD) or any other weapon is strictly prohibited.
2. The exports of SMC products or technology from one country to another are governed by the
relevant
security laws and regulation of the countries involved in the transaction. Prior to the
shipment of a SMC product to another country, assure that all local rules governing that export
are known and f
ollowed.
Caution
SMC products are not intended for use as instruments for legal metrology.
Measurement instruments that SMC manufactures or sells have not been qualified by type approval tests
relevant to the metrology (measurement) laws of each country.
Therefore, SMC products cannot be used for business or certification ordained by the metrology
(measurement) laws of each country.
- 3 -No.VQ1000V-OMM0002-B

Design / Selection
1. Confirm the specifications
Products represented in this instruction manual are
designed only for use in compressed air systems
( including vacuum).
Do not operate at pressures or temperatures, etc.,
beyond the range of specifications, as this can cause
damage or malfunction.
We do not guarantee against any damage if the
product is used outside of the specification range.
2. Actuator drive
When an actuator, such as a cylinder, is to be driven
using a valve, take appropriate measures (cover
installation or approach prohibition) to prevent potential
danger caused by actuator operation.
3. Intermediate stops
For 3-position closed center or double check valve type,
it is difficult to make a piston stop at the required
position accurately due to the compressibility of air.
Furthermore, since valves and cylinders are not
guaranteed for zero air leakage, it may not be possible
to hold a stopped position for an extended period of
time. Please contact SMC if it is necessary to hold a
stopped position for an extended period of time.
4. Effect of back pressure when using a
manifold.
Use caution when valves are used on a manifold,
because an actuator may malfunction due to
back-pressure. For 3-position exhaust center valve of
single acting cylinder, take appropriate measures to
prevent the malfunction by using it with an individual
exhaust manifold .
5. Holding pressure (including vacuum).
Since the valve are subject to air leakage, they cannot
be used for applications such as holding pressure
(including vacuum) in a pressure vessel.
6. Not suitable for use as an emergency
shut-off valve, etc.
The valves listed in this instruction manual are not
designed for safety applications such as an emergency
shutoff valve. If the valves are used for the mentioned
applications, additional safety measures should be
adopted.
7. Release of residual pressure
For maintenance purposes install a system for
releasing residual pressure. Especially in the case of
3-position closed center valve or double check valve
type, ensure that the residual pressure between the
valve and the cylinder is released.
8. Ventilation
Provide ventilation when using a valve in a confined
area, such as in a closed control panel. For example,
install a ventilation opening, etc. in order to prevent
pressure from increasing inside of the confined area
and to release the heat generated by the valve.
9.Regarding a vacuum switch valve
For maintenance purposes install a system for releasing
residual pressure.
10. Double solenoid type
When using the double solenoid type for the first time,
actuators may travel in an unexpected direction
depending on the switching position of the valve.
Implement measures to prevent any danger from
occurring when operating the actuator.
11. Ventilation
Provide ventilation when using a valve in a confined
area, such as in a closed control panel. For example,
install a ventilation opening, etc. in order to prevent
pressure from increasing inside of the confined area
and to release the heat generated by the valve.
12.Do not disassemble the product of
make any modifications, including
additional machining.
It may cause human injury and/or an accident.
1. Momentary energization
If a double solenoid valve is operated with momentary
energization, it should be energized for at least 0.1
second. However, depending on the condition of the
secondary load, it should be energized until the cylinder
reaches the stroke end position, since there is a
possibility of malfunction.
2. Leakage voltage
Take note that the leakage voltage will increase when a
resistor is used in parallel with switching element or a
C-R circuit (surge voltage suppressor) is used for
protecting a switching device because of the passing
leakage voltage through the C-R circuit.
The suppressor residual leakage voltage should be as
follows.
DC coil
Should be 3% or less of the rated voltage.
AC coil
Should be 8% or less of the rated voltage.
VQ1000/2000 Series
Precautions for 5 Port Solenoid Valve
①
Be sure to read before handling. Refer to main text for detailed precautions on every series.
Warning
Caution
- 4 -
No.VQ1000V-OMM0002-B

Design / Selection
3. Solenoid valve drive for AC with solid
state output (SSR, TRIAC output, etc.)
1) Current leakage
When using a snubber circuit (C-R element) for surge
protection of the output, a very small amount of
electrical current will continue to flow even during the
OFF state. This results in the valve not returning. In
the a situation where the tolerance is exceeded, as in
the above case, take measures to install a bleeder
resistor.
2) Minimum allowable load amount
(Min. load current)
When the consumption current of a valve is less than
the output’s minimum allowable load volume or the
margin is small, the output may not switch normally.
Please contact SMC.
4. Surge voltage suppressor
If a surge protection circuit contains nonstandard
diodes, such as Zener diodes or varistor, a residual
voltage that is in proportion to the protective circuit and
the rated voltage will remain. Therefore, take into
consideration the surge voltage protection of the
controller. In the case of diodes, the residual voltage is
approximately 1 V.
5. Operation in a low temperature
condition
It is possible to operate a valve in extreme
temperature, as low as -10 ℃. Take appropriate
measures to avoid freezing of drainage, moisture etc.
in low temperature.
6. Mounting orientation
Rubber seal : Mounting orientation is free.
Metal seal : Mounting orientation of a single solenoid
is universal.
No specific orientation is necessary.
When installing a double solenoid or a
3-position configuration, mount the valve
so that spool valve is horizontal.
Mounting
1. Operation manual
Install the products and operate them only after
reading the operation manual carefully and
understanding its contents. Also, keep the manual
where it can be referred to as necessary.
2. Ensure sufficient space for maintenance
activities.
When installing the products, allow access for
maintenance.
3. Tighten threads with the proper
tightening torque.
When installing the products, follow the listed torque
specifications.
4. If air leakage increases or equipment
does not operated properly, stop
operation.
Check mounting conditions when air and power
supplies are connected. Initial function and leakage
tests should be performed after installation.
5. Painting and coating
Warnings or specifications printed or affixed to the
product should not be erased, removed or covered up.
Please consult with SMC before applying paint to
resinous parts, as this may have an adverse effect due
to the solvent in the paint.
Warning
VQ1000/2000 Series
Precautions for 5 Port Solenoid Valve
②
Be sure to read before handling. Refer to main text for detailed precautions on every series.
Caution
- 5 -
No.VQ1000V-OMM0002-B

Piping
1. Refer to the Fittings and Tubing
Precautions for handling one-touch
fittings.
2. Preparation before piping
Before piping is connected, it should be thoroughly
blown out with air (flushing) or washed to remove chips,
cutting oil and other debris from inside the pipe.
3. Wrapping of pipe tape
When screwing piping or fittings into ports, ensure that
chips from the pipe threads or sealing material do not
enter the piping. Also, if pipe tape is used, leave 1
thread ridges exposed at the end of the threads.
4. Closed center
For closed center, check the piping to prevent air
leakage from the piping between the valve and the
cylinder.
5. Connection of fittings
When screwing fittings into valves, tighten as follows.
(1) Follow the procedures below when installing an
SMC fitting, etc.
1) M5 types
After tightening the fitting by hand, use a wrench to
tighten the fitting an additional approximately 1/6 to
1/4 turn. As a reference value, tightening torque is 1
to 1.5 N･m.
Note) If tightened excessively, the thread of the
product may break or the gasket may deform. If
tightened insufficiently, the thread of the product
may become loose. In either case, air leakage
can occur.
(2) Follow the procedure of the manufacture when
fittings other than SMC is used.
6. Piping to products
When piping to a product, avoid mistakes regarding the
supply port, etc.
Wiring
1. Polarity
When connecting power to a solenoid valve with a DC
specification and equipped with a light or surge voltage
suppressor, check for polarity. If there is polarity, take
note of the following.
No diode to protect polarity.
If a mistake is mode regarding the polarity, damage
may occur to the diode in the valve, the switching
element in a control device or power supply equipment,
etc.
With diode to protect polarity.
If polarity connection is wrong, the valve does not
operate.
2. Applied voltage
When electric power is connected to a solenoid valve,
be careful to apply the proper voltage. Improper
voltage may cause malfunction or coil damage.
3. Check the connections.
Check if the connections are correct after completing all
wiring.
Lubrication
1. Lubrication
[Rubber seal]
1) The valve has been lubricated for life by the factory
and does not require any further.
2) If a lubricant is used in the system, use class 1
turbine oil (no additive), ISO VG32.
Once a lubricant is used in the system, lubrication
must be continued because the original lubricant
applied during manufacturing will be washed away.
If turbine oil is used, refer to the Material Safety Data
Sheet (MSDS) of the oil.
[Rubber seal]
1) These valves can be used without lubrication.
2) If lubricant is used in the system, use class 1 turbine
oil (no additive), ISO VG32.
If turbine oil is used, refer to the Material Safety Date
Sheet (MSDS) of the oil.
Class 1 Turbine Oil (with no additive), ISO VG32
Lubricant manufacturer
Class 1 turbine oil (with no additive),
ISO VG32.
Idemitsu Kosan Co. Ltd.
Diana Fresia S32
Nippon Oil Corp.
Turbine Oil 32
Cosmo Oil Co. Ltd.
Cosmo Turbine 32
Jpan Energy Corp.
Turbine 32
Kygnus Oil Co.
Turbine Oil 32
Fuji Kosan Co., Ltd.
Fucoal Turbine 32
Please contact SMC regarding class 2 turbine oil (with
additives), ISO VG32.
Caution
Caution
Warning
VQ1000/2000 Series
Precautions for 5 Port Solenoid Valve
③
Be sure to read before handling. Refer to main text for detailed precautions on every series.
- 6 -
No.VQ1000V-OMM0002-B

Air Supply
1. Type of fluids
Please consult with SMC when using the product in
applications other than compressed air.
2. When there is a large amount of drainage.
Compressed air containing a large amount of drainage
can cause malfunction of pneumatic equipment. An air
dryer or water separator should be installed upstream
from filters.
3. Drain flushing
If condensation in the drain bowl is not emptied on a
regular basis, the bowl will overflow and allow the
condensation to enter the compressed air lines. It
causes malfunction of pneumatic equipment. If the
drain bowl is difficult to check and remove, installation
of a drain bowl with an auto drain option is
recommended.
For compressed air quality, refer to SMC’s Best
Pneumatics catalog.
4. Use clean air
Do not use compressed air that contains chemicals,
synthetic oils including organic solvents, salt or
corrosive gasses, etc., as it can cause damage or
malfunction.
1. When extremely dry air is used as the
fluid, degradation of the lubrication
properties in side the equipment may
occur, resulting in reduced reliability (or
reduced service life) of the equipment.
Please consult with SMC.
2. Install an air filter.
Install an air filter upstream near the valve. Select an
air filter with a filtration size of 5 μm or smaller.
3. Take measures to ensure air quality,
such as by installing an aftercooler, air
dryer, or water separator.
Compressed air that contains a large amount of
drainage can cause malfunction of pneumatic
equipment such as valves. Therefore, take
appropriate measures to ensure air quality, such as by
providing an aftercooler, air dryer, or water separator.
4. If excessive carbon powder is seen,
install a mist separator on the upstream
side of the valve.
If excessive carbon dust is generated by the
compressor, it may adhere to the inside of a valve and
cause it to malfunction.
For compressed air quality, refer to SMC’s Best
Pneumatics catalog.
Operating Environment
1. Do not use in an atmosphere having corrosive gases,
chemicals, sea water, water, water steam, or where
there is direct contact with any of these .
2. Products with IP65 enclosures (based on IEC60529)
are protected against dust and water, however, these
products cannot be used in water.
3. Products compliant to IP65 satisfy the specifications
through mounting. Be sure to read the Precautions for
each product.
4. Do not use in an environment where flammable gas or
explosive gas exists. Usage may cause a fire or
explosion. The products do not have an explosion
proof construction.
5. Do not use in a place subject to heavy vibration and/or
shock.
6. The valve should not be exposed to prolonged sunlight.
Use a protective cover.
7. Remove any sources of excessive heat.
8. If it is used in an environment where there is possible
contact with oil, weld spatter, etc., exercise preventive
measures.
9. When the valve is mounted in a control panel or its
energized for a long time, make sure ambient
temperatures is within the specification of the valve.
Maintenance
1. Perform maintenance inspection
according to the procedures indicated in
the operation manual.
If handled improperly, malfunction and damage of
machinery or equipment may occur.
2. Removal of equipment, and
supply/exhaust of compressed air
When components are removed, first confirm that
measures are in place to prevent workpieces from
dropping, run-away equipment, etc. Then, cut off the
supply pressure and electric power, and exhaust all
compressed air from the system using the residual
pressure release function.
For 3-position closed center type, exhaust the
residual pressure between the valve and the cylinder.
When the equipment is operated after remounting or
replacement, first confirm that measures are in place
to prevent lurching of actuators, etc. Then, confirm
that the equipment is operating normally.
3. Low frequency operation
Valves should be operated at least once every 30
days to prevent malfunction. (Use caution regarding
the air supply.)
4. Manual override operation
When the manual override is operated, connected
equipment will be actuated.
Operate after safety is confirmed.
Warning
Caution
VQ1000/2000 Series
Precautions for 5 Port Solenoid Valve
④
Be sure to read before handling. Refer to main text for detailed precautions on every series.
Warning
Warning
- 7 -
No.VQ1000V-OMM0002-B

1. Drain flushing
Remove drainage from the air filters regularly.
2. Lubrication
In the case of rubber seals, once lubrication has been
started, it must be continued.
Use class 1 turbine oil (with no additive), VG32
because if other lubricant oil is used, it may cause
malfunction. Please contact SMC for suggested class
2 turbine oil (with additive), VG32.
Caution
VQ1000/2000 Series
Precautions for 5 Port Solenoid Valve
⑤
Be sure to read before handling. Refer to main text for detailed precautions on every series.
- 8 -
No.VQ1000V-OMM0002-B

Light/Surge Voltage Suppressor
The lighting positions are concentrated on one side
for both single solenoid type and double solenoid
type. In the double solenoid type, A side and B side
energization are indicated by two colors which match
the colors of the manual overrides.
Manual Override
Without an electric signal for the solenoid valve the
manual override is used for switching the main valve.
Push type is standard. (Tool required) Locking type is
semi-standard. (Tool required/Manual)
Do not apply excessive torque when turning the locking type manual
override. (0.1 N·m or less)
The manual override is locked by sliding it all the way to the pilot
valve side (ON side) with a small flat head screwdriver or finger.
Slide it to the fitting side (OFF side) to release it. In addition, it
can also be used as a push type by using a screwdriver, etc., of
ø1.7 or less. (ø2 or less for VQ2000).
How to Mount/Remove Solenoid Valves
Removing
1. Loosen the clamp screw until it turns freely. (The screw is
captive.)
2. Lift the coil side of the valve body while pressing down slightly
on the screw head and remove it from the clamp bracket B.
When the screw head cannot be pressed easily, gently press
the area near the manual override of the valve.
VQ1000/2000 series
Specific Product Precautions 1
Be sure to read this before handling
No.VQ1000V-OMM0002-B
- 9 -

How to Mount/Remove Solenoid Valves
Mounting
1. Press down on the clamp screw. Clamp bracket A opens.
Diagonally
insert the hook on the valve end plate side into clamp B.
2. Press the valve body downward. (When the screw is
released,
it will be locked by clamp bracket A.)
3. Tighten the clamp screw. (Proper tightening torque:
VQ1000, 0.25 to 0.35 N·m; VQ2000, 0.5 to 0.7 N·m.
Dust on the sealing surface of the gasket or solenoid valve can
cause air leakage.
Replacement of Cylinder Port Fittings
The cylinder port fittings are a cassette for easy replacement.
The fittings are blocked by a clip. Take out
the clip with a flat head screwdrier, etc., then replace
the fittings.
For mounting, insert the fitting assembly until it
strikes against the inside wall and then insert the clip
to the specified position.
1. Use caution that O-rings must be free from scratches and
dust. Otherwise,air leakage may result.
2. After screwing in the fittings, mount the M5 fitting assembly
on the manifold base. (Tightening torque: 0.8 to 1.2 N·m)
3. Purchasing order is available in units of 10 pieces.
How to Mount/Remove DIN Rail
IP65 Enclosure
Wiring connection for models conforming to IP65 should
also have enclosures equivalent to or of stricter than IP65.
Built-in Silencer Element
A filter element is incorporated in the end plate on both sides of
the maifold base. A dirty and choked element may reduce
cylinder speed or cause malfunction. Clean or replace the dirty
element.
Element Part No.
Type
Element part no.
VQ1000
VQ2000
Built-in silencer,
direct exhaust
VVQ1000-82A-1 VVQ2000-82A-1
The minimum order quantity is 10 pcs.
VQ1000/2000 series
Specific Product Precautions 2
Be sure to read this before handling
No.VQ1000V-OMM0002-B
- 10 -

How to Calculate Flow Rate
Conversion with sonic conductance C:
S=5.0XC
Q :Air flow rate [dm3/min(ANR)]
S : Effective area [mm2]
P1: Upstream pressure [MPa]
P2: Downstream pressure [MPa]
t : Temperature [℃]
VQ1000/2000 series
Specific Product Precautions 3
Be sure to read this before handling
No.VQ1000V-OMM0002-B
- 11 -

Trouble
When the valve is failing, use this flow chart to
clarify the cause of the failure and take
countermeasures appropriate for the cause.
Possible cause Countermeasures
Operating
failure
The air
supply
does not
switch the
valve.
1) Sliding failure or stick of
main valve.
A foreign material
included in
supplied air is caught by main
valve and makes the main
valv
e unable to slide smoothly
or sticky.
•Replace with new valve.
•Clean the supplied air.
2) Pressure drop.
T
he pressure of supplied air
lowers the valve which can
operate the valve (min.
operating pressure).
Raise the pressure of supplied air up
to operating pressure of the valve.
1) Failure of electrical system
•Incorrect wiring
•Blow of fuse and breakage of
lead wire.
•Poor contact at contactor wire
or connection part
•Failure of sequencer
•Lack of supply voltage
Check these items and replace part
and re-wire positively.
1) Voltage drop
Even if the indicator light keeps
turning on, the valve can’t be
operated due to the voltage
drop.
•Check the voltage and if it is not
enough to
operate the valve, take
appropriate measures.
2) Leakage current
When the power turns off, the
valve can’t be switched due to
residual voltage.
•Confirm the residual voltage is
follows.
•
DC is 3% or AC is 8% or less of
rated voltage.
3) Failure of pilot valve
•Foreign matter caught in
core of pilot valve.
•Disconnection coil
wire of pilot valve
•Swelled out poppet
of pilot valve
•Burnt coil of pilot valve
(Higher voltage or wrong coil
used, Coil splashed by
water)
•Replace part or re-wire positively.
•Check voltage. Replace valve.
(Pilot valve)
•
Replace valve (pilot valve). Protect
the valve so that water does not
splash the coil.
Response
failure
The
operation
of the valve
is delay.
1) Current leakage
When the power turns off, the
valve can be switched late due
to residual voltage.
•Confirm the residual voltage is
follows.
•
DC is 3% or AC is 8% or less of
rated voltage.
2) Clogging of filter element of
manifold.
•Clean the element or replace with
new element.
3) Sliding failure or stick of
main valve.
A foreign material included in
supplied air is caught by main
valve and makes the main
valve unable to slide smoothly
or sticky.
•Replace with new valve.
•Clean the supplied air.
Can manual
override move the
valve
NO
YES
Does the indicator
light keep turning on
during
energization?
NO
YES
- 12 -
No.VQ1000V-OMM0002-B

Trouble
When the valve is failing, use this flow chart to
clarify the cause of the failure and take
countermeasures appropriate for the cause.
Possible cause Countermeasures
Air leakage
1. Between valve and base
1-1) Looseness of clamp screw
or mounting bolt.
Give more torque to clamp screw.
・VQ1000 : 0.25～0.35N・m
・VQ2000 : 0.5～0.7N・m
If the damage is seen on the gasket,
replace with new gasket.
1-2) Caught gasket
Replace with new gasket.
1-3) Intrusion of foreign matter
To remove foreign matter by air blow
of piping and when a gasket
damaged, replace with new gasket.
2. Air leaks through One-touch fitting
2-1) Tube is not inserted
enough deeply.
2-2) Tube has a flaw.
2-3) Tube is cut diagonally.
Check these items and replace part
and re-wire positively.
2-4) Packing of one touch
fitting is damaged.
Replace with one-touch fitting.
3. Air leaks through exhaust port (R port)
Note) The valve with metal seal allows air
leakage from main valve approx. 200Ncc for
each port ( at 0.5MPa). The air leakage within
the range should not be considered abnormal.
3-1) Looseness of clamp screw
or mounting bolt.
Give more torque to clamp screw.
Tightening torque
・VQ1000 : 0.25～0.35N・m
・VQ2000 : 0.5～0.7N・m
If the damage is seen on the gasket,
replace with new gasket.
3-2) Aforeign material included
into supplied air is caught by
the main valve and
increases internal air
leakage.
•Replace with new valve.
•Clean the supplied air.
4. Air leaks through manifold.
Insufficient bolt tightening
After stopping air and re-tighten the
bolts.
Confirm there is air leakage.
- 13 -
No.VQ1000V-OMM0002-B

S
Revision history
A Safety Instructions oY
B How to calculate flow rate: Correction of errata
VZ
1stprinting : MW
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