SMC Networks XLD Series User manual

Doc. no.XL*****-OMI0011-E
PRODUCT NAME
High Vacuum L Type Valve
MODEL/ Series
XLD Series

Doc. no.XL*****-OMI0011-E
Contents
Safety Instructions - - - - - - - - - - - - - - - - - - - - - - - - - - - - 2
1. Product Specific Precautions 1 - - - - - - - - - - - - - - - - - - - - - - - - - - - - 4
(Precautions on Design, Selection, Mounting, Piping, Wiring, Maintenance)
2. Product Specific Precautions 2 - - - - - - - - - - - - - - - - - - - - - - - - - - - - 6
(Maintenance parts)
3. Specifications - - - - - - - - - - - - - - - - - - - - - - - - - - - - 8
4. Construction - - - - - - - - - - - - -- - - -- - - - - - - - - - - - 10
5. Operation - - - - - - - - - - - - - - - - - - - - - - - - - - - - 11
6. Dimensions - - - - - - - - - - - - - - - - - - - - - - - - - - - - 12
7. Guaranteed term and guaranteed range - - - - - - - - - - - - - - - - - - - - - - - - - - - - 13
8. Parts replacement procedure - - - - - - - - - - - - - - - - - - - - - - - - - - - - 14

Safety Instructions
These safety instructions are intended to prevent hazardous situations and/or equipment damage.
These instructions indicate the level of potential hazard with the labels of “Caution,” “Warning” or
“Danger.”
They are all important notes for safety and must be followed in addition to International Standards
(ISO/IEC)*1), and other safety regulations.
*1) ISO 4414: Pneumatic fluid power -- General rules relating to systems
ISO 4413: Hydraulic fluid power -- General rules relating to systems
IEC 60204-1: Safety of machinery -- Electrical equipment of machines (Part 1: General requirements)
ISO 10218-1992: Manipulating industrial robots -- Safety
Caution
Caution indicates a hazard with a low level of risk which, if not avoided, could result
in minor or moderate injury.
Warning
Warning indicates a hazard with a medium level of risk which, if not avoided, could
result in death or serious injury.
Danger
Danger indicates a hazard with a high level of risk which, if not avoided, will result
in death or serious injury.
Warning
1. The compatibility of the product is the responsibility of the person who designs the
equipment or decides its specifications.
Since the product specified here is used under various operating conditions, its compatibility with specific
equipment must be decided by the person who designs the equipment or decides its specifications based on
necessary analysis and test results.
The expected performance and safety assurance of the equipment will be the responsibility of the person who
has determined its compatibility with the product.
This person should also continuously review all specifications of the product referring to its latest catalog
information, with a view to giving due consideration to any possibility of equipment failure when configuring the
equipment.
2. Only personnel with appropriate training should operate machinery and equipment.
The product specified here may become unsafe if handled incorrectly.
The assembly, operation and maintenance of machines or equipment including our products must be
performed by an operator who is appropriately trained and experienced.
3. Do not service or attempt to remove product and machinery/equipment until safety is
confirmed.
1.The inspection and maintenance of machinery/equipment should only be performed after measures to
prevent falling or runaway of the driven objects have been confirmed.
2.When the product is to be removed, confirm that the safety measures as mentioned above are implemented
and the power from any appropriate source is cut, and read and understand the specific product precautions
of all relevant products carefully.
3.Before machinery/equipment is restarted, take measures to prevent unexpected operation and malfunction.
4. Contact SMC beforehand and take special consideration of safety measures if the product is
to be used in any of the following conditions.
1. Conditions and environments outside of the given specifications, or use outdoors or in a place exposed to
direct sunlight.
2. Installation on equipment in conjunction with atomic energy, railways, air navigation, space, shipping,
vehicles, military, medical treatment, combustion and recreation, or equipment in contact with food and
beverages, emergency stop circuits, clutch and brake circuits in press applications, safety equipment or
other applications unsuitable for the standard specifications described in the product catalog.
3. An application which could have negative effects on people, property, or animals requiring special safety
analysis.
4. Use in an interlock circuit, which requires the provision of double interlock for possible failure by using a
mechanical protective function, and periodical checks to confirm proper operation.
- 1 -
XL*****-OMI0011-E

Safety Instructions
Caution
1.The product is provided for use in manufacturing industries.
The product herein described is basically provided for peaceful use in manufacturing industries.
If considering using the product in other industries, consult SMC beforehand and exchange
specifications or a contract if necessary.
If anything is unclear, contact your nearest sales branch.
Limited warranty and Disclaimer/Compliance Requirements
The product used is subject to the following “Limited warranty and Disclaimer” and “Compliance
Requirements”.
Read and accept them before using the product.
Limited warranty and Disclaimer
1.The warranty period of the product is 1 year in service or 1.5
years after the product is
delivered,whichever is first.*2)
Also, the product may have specified durability, running distance or replacement parts. Please consult
your nearest sales branch.
2.For any failure or damage reported within the warranty period
which is clearly our responsibility, a
replacement product or necessary parts will be provided.
This limited warranty applies only to our product independently, and not to any other damage incurred
due to the failure of the product.
3.Prior to using SMC products, please read and understand the warranty terms and disclaimers noted in
the specified catalog for the particular products.
*2) Vacuum pads are excluded from this 1 year warranty.
A vacuum pad is a consumable part, so it is warranted for a year after it is delivered.
Also, even within the warranty period, the wear of a product due to the use of the vacuum pad or
failure due to the deterioration of rubber material are not covered by the limited warranty.
Compliance Requirements
1.The use of SMC products with production equipment for the manufacture of weapons of mass
destruction(WMD) or any other weapon is strictly prohibited.
2.The exports of SMC products or technology from one country to another are govemed by the relevant
se
curity laws and regulation of the countries involved in the transaction. Prior to the shipment of a
SMC product to another country, assure that all local rules goveming that export are known and
followed.
- 2 -
XL*****-OMI0011-E

1. Product Specific Precautions 1
Precautions 1 Be sure to read before handling.
Design
Warning
●All models
1. The body material is A6063,the bellows is SUS316L, and other metal components of the
vacuum part are made of SUS304. The sealing material of the vacuum part is FKM as
standard, but this can be changed to other materials (refer to “How to Order”). Confirm
whether the fluid to be used is compatible with the materials before use.
Grease for vacuum is applied to the sliding part of the vacuum (Fluorine grease: Y-VAC2).
After confirming the type of material used, be sure to use compatible fluids.
2. Select materials for the pilot pressure piping and fittings whose heat resistance is suitable for
the applicable operating temperature.
●Models with auto switch
1.Keep the temperature of the switch below 60oC.
●With heater (thermistor)
1. When using a model with a heater, a mechanism to prevent overheating should be installed
2.If using gases that generate a large amount of deposits, it is recommended that the valve
body be heated to prevent deposits from sticking to the valve surfaces.
Selection
●All models
1. When controlling valve responsiveness, take note of the size and length of piping, as well
as the flow rate characteristics of the actuating solenoid valve.
2. Keep the pilot pressure within the specified range.
3. Operate within the specified operating pressure range.
4. Operate within the specified operating temperature range.
5. Please note, when selecting a product without an auto switch(es) (excluding those with
built-in magnet), it is not possible to mount an auto switch(es) following receipt of the product
from an SMC factory.
Mounting
● All models
1. In high humidity environments, keep the valve packed until the time of installation.
2. For models with switches, secure the lead wires so that they have sufficient slack, without
any unreasonable force applied to them.
3. Perform piping so that excessive force is not applied to the flange sections. When there is
vibration from heavy objects or attachments, etc., fix piping so that vibration will not apply
torque directly to the flange section.
4. Vibration resistance allows for normal operation of up to 30 m/s2(45 to 250Hz), but
continuous vibration may cause a decline in durability.
Arrange piping to avoid excessive vibration or impacts.
●High temperature type (temperature specification / H0 H4 H5)
1. In models with a heater (thermistor), take care not to damage the insulation components of
the lead wires and connector section.
2. The set temperature for models with a heater should be established without any drafts or heat
insulation. It will change depending on conditions such as heat insulation measures and the
Caution
Caution
- 3 -
XL*****-OMI0011-E

heating of other piping. Fine adjustment is not possible.
3. When installing heater accessories or mounting a heater, check insulation resistance at the
actual operating temperature. A current leakage breaker or fuse should be installed.
4. If the valve is to be insulated, only the body should be insulated, excluding the bonnet part.
5. In models with a heater, when the heater is in operation, the entire valve becomes hot.
Be careful not to touch the valve with bare hands, as burns will result.
6. The heater temperature will initially decrease several % after the heating starts and then
gradually becomes stable. (The heater temperature may decrease approximately 5 to 10%
due to individual differences.)
1. Before mounting, clean the surface of the flange seal and the O-ring with ethanol, etc.
2. There is an indentation of 0.1 to 0.2mm designed to protect the flange seal surface.
Be careful when handling the product to prevent any damage to the seal surface .
If the fluid or reaction product (deposit) may cause the valve to become unsafe, the valve
should be disassembled, cleaned and re-assembled by an operator who has sufficient
knowledge and experience (e.g. a specialist).
1.When removing deposits from the valve, take care not to damage any part of it.
2. Replace the bonnet assembly when the valve is approaching the end of its service life.
* For details regarding endurance cycles, please reference Section 7 of this Operation
manual titled Period and scope of warranty. (pages 13)
3.If potential damages are suspected prior to the end of the service life, perform maintenance
earlier than noted. If there are scratches, dents or cracks on the seals (bellows or valve) due
to handling or operating conditions, please replace the parts with new ones.
Refer to Chapter 2, “Product Specific Precautions 2” (P. 6) and Chapter 4, “Construction”
(P.9) for maintenance parts. Parts with the indication of "Maintenance part" can be replaced.
4.SMC specified parts should be used for service. Refer to the Construction / Maintenance
parts table.
5.When removing the valve seal and external seal, take care not to damage the sealing
surfaces. When installing the valve seal and external seal, be sure that the O-ring is not
twisted. (Refer to Section 8 Parts Replacement Procedure (pages 13 to 16) for details.)
Piping
Caution
Maintenance
Warning
Caution
- 4 -
XL*****-OMI0011-E

2. Product Specific Precautions 2
Precautions 2 Be sure to read before handling
Maintenance Parts
Caution
SMC specified parts should be used for service.Refer to the construction drawing.
1. Replace the bonnet assembly when changing the seal material. Due to the different materials
used, changing only the seal may prove inadequate.
Bonnet assembly/construction part number:1
Temperature
specifications
Valve size
25
40
50
General use
XLD25-30-1
XLD40-30-1
XLD50-30-1
High
temperature
XLD25-30-1H XLD40-30-1H XLD50-30-1H
Temperature
specifications
Valve size
63
80
100
160
General use
XLD63-30-1
XLD80-30-1
XLD100-30-1
XLD160-30-1
High
temperature
XLD63-30-1H XLD80-30-1H XLD100-30-1H XLD160-30-1H
Note1) The magnet for auto switch is not provided. When the magnet for auto switch is
necessary, add “-M9//” at the suffix of the part number.
Note2) An auto switch for high temperature is available with a different part number.
Note3) List the optional seal material symbol after the model number, except for the
standard sealant material (FKM: compound No. 1349-80).
e.g.) XLD25-30-1-M9//-XN1
Note4) The bonnet assembly contains the valve seal, S valve seal assembly and the initial
pumping valve seal.
Exterior seal, valve seal
Description
Constructions No.
Material
Valve size
25
40
50
Exterior seal (3)
Standard
AS568-030V
AS568-035V
AS568-039V
Specific
AS568-030 **
AS568-035 **
AS568-039 **
Valve seal (2)
Standard
B2401-V24V
B2401-P42V
AS568-227V
Specific
B2401-V24 **
B2401-P42 **
AS568-227 **
S Valve seal
Ass’y (4)
Standard
XLD40-2-9-1A
XLD50-2-9-1A
Specific
XLD40-2-9-1A **
XLD50-2-9-1A **
Initial pumping
valve seal (5).
Standard
AS568-009V
AS568-016V
AS568-016V
Specific
AS468-009 **
AS568-016 **
AS568-016 **
Description
Construction No.
Material
Valve size
63
80
100
160
Exterior seal (3)
Standard
AS568-043V
AS568-045V
AS568-050V
AS568-167V
Specific
AS568-043 **
AS568-045 **
AS568-050 **
AS568-167 **
Valve seal (2)
Standard
AS568-233V
B2401-V85V
AS568-349V
B2401-G155V
Specific
AS568-233 **
B2401-V85 **
AS568-349 **
B2401-G155 **
S Valve seal
Ass’y (4)
Standard
XLD63-2-9-1A
XLD80-2-9-1A
XLD100-2-9-1A
XLD160-2-9-1A
Specific
XLD63-2-9-1A **
XLD80-2-9-1A **
XLD100-2-9-1A **
XLD160-2-9-1A **
Initial pumping
valve seal (5).
Standard
AS568-020V
Specific
AS568-020 **
Note1) List the optional seal material symbol after the model number, except for the
standard sealant material (FKM: compound no. 1349-80).
e.g.) AS568-030-XN1
Note2) Refer to Chapter 4, “Construction and Dimensions" (P. 10) for the part indication
numbers.
Note3) We do not guarantee the quality if the seal material is changed by customer.
- 5 -
XL*****-OMI0011-E

Additional symbols of the seal materials
Seal material EPDM Barrel
Perfluoro
R
Kalrez
R
Chemraz
R
VMQ FKM for
PLASMA ULTIC
ARMOR
R
Combination No.
2101-80
70W
4079
SS592
SS630
SSE38
1232-70
3310-75
UA4640
Symbol
-XN1
-XP1
-XQ1
-XR1
-XR2
-XR3
-XS1
-XT1
-XU1
Note1) Due to the different materials used, changing only the seal may prove inadequate.
Barrel Perfluoro
R
is a registered trademark of MATSUMURA OIL Co.,Ltd.
Kalrez
R
is a registered trademark of E. I. du Pont de Nemours and Company.
Chemraz
R
is a registered trademark of Greene, Tweed & Co.,
ULTIC ARMOR
R
is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD.
- 6 -
XL*****-OMI0011-E

3. Specifications
See the figure on the right for the relation
between the numbers of revolution of adjustment
nut (pitch 1mm) and conductance of the initial
exhausting valve.
(The conductance is just a reference.)
Model
XLD-25
XLD-40
XLD-50
XLD-63
XLD-80
XLD-100
XLD-160
Flange (valve) size
25
40
50
63
80
100
160
Actuating type
Normally closed
Fluid
Vacuum of inert gas
Operating temperature oC
5 to 60 (5 to 150 for high temperature type)
Operating pressure Pa(abs)
Atmospheric pressure to 1 x 10-6
Conductance l/s
Note 1)
Main pumping
14
45
80
160
200
300
800
Initial pumping
0.5 to 3
2 to 8
2.5 to 11
4 to 18
4 to 18
6.5 to31.5
6.5 to 31.5
Leakage
Pa･m3/s
Internal
1.3 x 10-10 for the standard material (FKM)
at ambient temperatures , excluding gas permeation
External
1.3 x 10-11 for the standard material (FKM)
at ambient temperatures , excluding gas permeation
Flange type
KF (NW)
KF (NW) , K (DN)
Main material
Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM
(standard sealing material)
Note 2)
Surface treatment for body
Outside: hard anodized Inside: basis material
Actuation pressure MPa(G)
0.4 to 0.7
Air consumption
cm3for 0.5MPa
Note 3)
Main pumping 46 200 360 660 1350 3000 5150
Initial pumping 3.5 12 15.5 30 42 54 54
Port size
M5
Rc 1/8
Rc 1/4
Weight kg
0.5
1.2
1.8
3.4
5.6
11.5
20
Note1) Main pumping conductance is “molecular flow” measured with an elbow pipe which has the same
dimension as each applicable flange.
Initial pumping conductance is the value for "viscous flow".
Note2) A seal sliding part for vacuum use vacuum grease (Y-VAC2).
Note3) For one cycle of cylinder.
0
2
4
6
8
10
12
14
16
18
20
22
24
26
28
30
32
0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0
Adjustment nut rotations n
Initial exhaust valve condunctance l/s (Viscous
flow) Shows flow rate when ΔP=0.1MPa
XLD-25
XLD-40
XLD-50
XLD-63
XLD-80
XLD-100
XLD-160
Initial pumping conductance
- 7 -
XL*****-OMI0011-E

3-2. Heater specifications
Item XL□-25 XL□-40 XL□-50 XL□-63
Rated voltage of the heater 90 to 240 ACV
S
y
m
b
o
l
H
4
Heater assembly number - XLA25-60S-1 XLA25-60S-1 XLA25-60S-2
No. of heater assemblies - 1 pc. 1 pc. 1 pc.
Initial power /
Power
consumption (W)
100 VAC - 200/40 200/50 400/100
200 VAC - 800/40 800/50 800/100
H
5
Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3
No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc.
Initial power /
Power
consumption (W)
100 VAC 200/40 400/70 400/80 600/130
200 VAC 800/40 1600/80 1600/80 2400/130
Item XL□-80 XL□-100 XL□-160
Rated voltage of the heater 90 to 240 ACV
S
y
m
b
o
l
H
4
Heater assembly number XLA25-60S-3 XLA25-60S-2 XLA25-60S-2
No. of heater assemblies 1 pc. 2 pcs. 3 pcs.
Initial power/
Power
consumption (W)
100 VAC
600/150
800/220
1200/350
200 VAC 2400/150 3200/220 4800/350
H
5
Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2
No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.
Initial power/
Power
consumption (W)
100 VAC 800/180 1200/300 1600/400
200 VAC 3200/180 4800/300 6400/400
Note 1) Initial power and power consumption are nominal values.
Note 2) Heaters are not available for the size 16 models.
The heaters are PTC thermistor type design.
These thermistors self regulate their temperature
by switching the resistance at certain critical
temperatures, so a separate temperature
controller is unnecessary.
If the temperature of the PTC heaters fitted exceeds
200oC, then it may fail. The maximum operating
temperature for the valve is 150oC. If the heater
temperature is over 200oC or valve temperature is
over 150oC, please use thermostat to control the
heaters to prevent overheating.
With PTC type heaters, there is an initial surge of current (inrush current) after the power is supplied.
These inrush current will reduce overtime. If multiple heater assemblies are used, the inrush current to
the heaters will be magnified and care should be taken. When multiple heater assemblies or valves
are used, do not apply power to the heater assemblies simultaneously. Keep approximately 30
seconds between applications of power to each heater assembly. This will allow for incremental
spacing to prevent harmful large initial surge.
0 5 10 15 20 25 30
時間 (秒）
電流
Time (sec.)
Current
Duration of the inrush current flow (as a guide)
200V
100V
Time (sec.)
Duration of the inrush current flow (as a guide)
200V
100V
Current
- 8 -
XL*****-OMI0011-E

4. Construction
O-ring for sliding of S valve Note 2
(material:FKM)
Fixing ring
S valve
(material: SUS304)
S valve assembly (Maintenance part)
Note 1
(Material SUS304 + Seal material)
Initial pumping valve seal (Maintenance part)
4
5
6
9
10
Initial pumping valve (Enlarged view)
Note1) The O ring of the S valve seal assembly
cannot be replaced.It is necessary to replace
the whole assembly.
Note2) The material of the O ring for sliding of S valve
is FKM. This cannot be changed.
45
6 9
10
XLD-40,XLD-50,XLD-160
S valve seal O ring
4
6 9
10
XLD-63,XLD-80,XLD-100
S valve seal O ring
Auto switch (option)
Bonnet assembly
(maintenance part)
Pilot port S
(For initial pumping valve)
Pilot port M
(For main pumping valve)
External seal
(maintenance part)
Valve seal
(maintenance part)
Adjustment nut (knurled outside)
Adjusting the opening of the valve
for initial exhausting
Magnet (option)
Bellows holder
(material: SUS304)
Heater (option)
Bellows
(material: SUS316L)
Valve M
(material: SUS304)
Body
(material: A6063)
1
2
3
7
8 11
12
Initial pumping valve (Refer to enlarged
view)
Adjustment nut holding screw
Needle seat
(Material SUS304)
5
10 9
XLD-25
- 9 -
XL*****-OMI0011-E

5. Operation
5-1. Adjusting the opening of the valve for initial pumping
Adjust the initial pumping amount with no air pressure to the pilot port S before using. Initial flow
is reduced by turning the adjustment nut clockwise. It is increased by turning it counterclockwise.
The location where the nut gently stops during rotation clockwise and counterclockwise indicates
the initial flow zero and the maximum flow. If the nut is rotated too much, it may damage the nut.
The adjustment nut shall be operated by hand. Do not use any tool. If the rotation of the
adjustment nut feels heavy, please refer to the following items.
The adjustment nut is fully closed when the completed product is shipped. The nut is fully open
when the bonnet assembly (maintenance part) is shipped. Use caution.
5-2. Fixing adjustment nuts
The adjustment nut does not rotate during the operation of the valve. It can be fixed to prevent
incorrect operation, if required. If the adjustment nut is fixed after adjusting the initial flow,
tighten the adjustment nut set screw to the tightening torque shown in the table below. When
loosening the set screw, loosen until it stops gently. Do not remove the adjustment nut set screw.
The adjustment nut is not fixed when the product is shipped. If the rotation of the adjustment nut
feels heavy, loosen the adjustment nut set screw.
5-3. Opening the valve (s valve) for initial pumping
When the air pressure is applied to the pilot port S, the S valve will release from the S valve seal
assembly and open to the adjusted opening.
5-4. Opening the valve (valve M) for main pumping
When the air pressure is applied to the pilot port M, the valve will release from the body seat
and fully open. It operates even when air pressure is not applied to the pilot port S.
5-5. Closing the valve for initial pumping and main pumping
When the air pressure is released from the pilot port S and M, S and M valve will return and start
sealing.
Adjustment nut tightening torque
Model XLD-25 XLD-40
XLD-50
XLD-63
XLD-80
XLD-100
XLD-160
Tightening torque
0.08 N
・
m
or less
0.3 N
・
m
or less
- 10 -
XL*****-OMI0011-E

6. Dimensions
Model
A
B
C
D
E
Fn
Fd
G
H
J
K
XLD-25
50
123
48
1
12
40
-
26
41
16
7.5
XLD-40
65
170
66
2
11
55
-
41
63
20
15
XLD-50
70
183
79
2
11
75
-
52
68
20
17.5
XLD-63
88
217
100
3
11
87
95
70
72
20
20
XLD-80
90
256
117
3
11
114
110
83
98
20
26.5
XLD-100
108
321
154
3
11
134
130
102
133
20
38
XLD-160
138
335
200
3
11
190
180
153
114
30
40
Unit: mm
- 11 -
XL*****-OMI0011-E

7. Guaranteed term and guaranteed range
The guaranteed period covers the period which finishes the earliest among 2 million operating
cycles (for size 25 to 80) or 1 million operating cycles (for size 100 and 160) [with our durability test
conditions], 18 months after shipping from us, and 12 months after starting the use of the product at
your place or your customer’s place.
Note) The product durability is varied depending on the operating conditions (such as a use with
large flow rate).
If the specification is not kept, or any non-conformance derived from mounting or replace of a
device, an assembly, or an O-ring at your place occurs, the guarantee cannot be applied.
If any failure occurs due to our fault during the guaranteed period, we will guarantee the
non-conformance by delivering a substitute in the worst case. However, responsibility of any
damage which is led by the product failure is not taken by us.
Result of durability test (with the circuit
shown on the right)
Internal/ external leakage and operation
were checked by opening and closing a valve
in internally evacuated condition at ordinary
temperature (room temperature).
It was confirmed that XLD-25, XLD-40
XLD-50, XLD-63 and XLD-80 satisfied
the product specification up to 2 million cycles,
XLD-100 and XLD-160 did up to 1 million
cycles.
The test was performed with FKM,
the standard sealing material.
<Reference>
The pumping direction is not limited, but if the
pumping creates a flow stream, the durability of the
product could be impaired.
Therefore, the pumping direction shown on the
right figure (bellows side pumping) is recommended.
Also, the operating conditions should be checked
prior to use, as this affects the life of the product.
1～10 Pa 真空ポンプ
耐久試験条件
試験品姿勢:横向き
ブランクフランジ
Blank flange
Test piece posture: lateral
Vacuum pump
Durability test conditions
Chamber
Recommended
direction of air exhaust
Bellows side
Vacuum pump
Valve side
- 12 -
XL*****-OMI0011-E

8. Parts Replacement Procedure
8-1. Precautions
Be sure to follow [1. Precautions 1] when disassembling the product for maintenance. Along
with the precautions above, comply with the following precautions too.
Warning
•If it is expected that product materials may get stuck to the product, ensure safety is confirmed
before handling. It is recommended that the user wear gloves and a mask.
•Pay attention to the handling of components in accordance with the procedures outlined,
hereafter. Do not apply excessive force or impact. This may damage the product, as well as,
decrease its performance and life expectancy.
•The cylinder portion of this product cannot be disassembled. When the cylinder portion or the
bonnet assembly is damaged or is expected to have been damaged, replace the whole
product or the bonnet assembly.
•Do not disassemble the parts that are not explained in this operation manual. This may
decrease the performance and life expectancy of these parts. In addition, disassembly
may cause danger.
•Torque values specified in this manual must be followed. Not adhering to these
specifications, can result in damage to the product.
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XL*****-OMI0011-E

8-2. Disassembly procedure
Step 1 Step 2
The heater is removed by loosening bolt a. Bolt a is
behind the cover. Remove the cover using a
watchmaker's screwdriver.
Apply 0.2MPa of air pressure to the pilot port M. Loosen
bolt b in numerical order to disassemble the body and
the bonnet assembly.
Apply 0.3MPa of air pressure to the pilot port S. Loosen
bolt c to remove S valve seal assembly. Initial pumping
valve seal O ring is removed from 25, 40, 50, and 160.
Step 3 Step 4
Remove the O ring from the groove for discharging gas
using a tool (plastic) whose height is the same as the
groove for discharging gas. <Take care not to damage
the O ring groove>
Remove the outer seal O ring from the body
<Take care to prevent the mounting surface of O ring
from being damaged>
Pilot port S
Bolt c
S valve seal
assembly
O-ring
1
Bolt b
Bolt a
Heater
Cover
Pilot port M
Body
Bonnet assembly
2
3
4
O-ring
Bottom surface of
the groove to
discharge gas.
O ring
Mounting surface of
O ring
Body
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XL*****-OMI0011-E

8-3. Assembly Procedure
Step 1 Step 2 Step 3
Assemble parts eliminating dust.
Wipe off dust with a clean cloth
soaked with ethanol. Blow parts
with clean air if necessary. (Ensure
there is no fiber or dust)
Eliminate the dust of O ring groove
of pilot valve M.
Wipe off the dust on the valve seal
O ring surface. Place the O ring on
the O ring groove. Press the
O-ring into the groove in numerical
order (press diagonally) to fit the
O-ring into the groove. Take care
not to twist the O ring.
<Use dust-free gloves>
Step 4 Step 5
Wipe off the dust of the S valve and around it. Remove dust from the needle seat or S valve seal
assembly. For size 25, 40, 50, and 160, remove the dust
from the initial pumping valve seal O ring. Mount the
needle seat or S valve seal assembly.
Ethanol
Clean cloth
O ring
1
3
4
2
O ring
M valve
S valve
M valve
O ring
Needle
seat
(XLD-25)
S valve seal assembly
(XLD-40,50,160)
S valve seal
assembly
(XLD-63,80,100)
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XL*****-OMI0011-E

Step 6 Step 7
Apply 0.3MPa of air pressure to the pilot port S. Place
the needle seat or S valve seal assembly, and tighten
bolt c to fix them. When tightening bolt c, first tighten
manually until the O ring is compressed, then perform
extra tightening.
Wipe off the dust from the external seal O ring surface
and the mounting surface of the body O ring. Place the
O ring on the O ring mounting surface.
Step 8
Apply 0.2MPa of air pressure to the pilot port M (for main pumping). Tighten bolt b
in numerical order to assemble the body and the bonnet assembly. When
tightening bolt b, tighten manually until the O ring is compressed, then perform
extra tightening in diagonal order.
For models with heater, tighten bolt a to mount the heater to the body. Insert the
cover.
Pilot port S
Bolt C
S valve seal
Ass'y
or
Needle seat
Tightening torque of bolt C
N・m
Model
Tightening
torque
XLD-25
0.36±0.1
Other than
XLD-25
0.63±0.1
O ring
Mounting
surface of
O ring
Body
1
Bolt b
Bolt a
Heater
Cover
Pilot port M
Body
Bonnet
assembly
2
3
4
Tightening torque
of bolt b
N・m
Valve
Size
Tightening
Torque
XLD-25
1.5
-40
2.5
-50
6
-63
6
-80
15
-100
20
-160
102
Tightening torque of
bolt a
N・m
Valve
Size
Tightening
Torque
All size
0.3
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XL*****-OMI0011-E

Revision
E Precaution for mounting added. 2018.8
4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN
Tel: + 81 3 5207 8249 Fax: [phone]
URL http://www.smcworld.com
Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.
© 2012 SMC Corporation All Rights Reserved
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XL*****-OMI0011-E