SMC Networks EX260-VIL1 User manual

No.EX※※-OMZ0018
PRODUCT NAME
SI Unit for Vacuum Manifold
MODEL / Series / Product Number
EX260-VIL1
Operation Manual

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No.EX※※-OMZ0018
Contents
1. Product summary 10
2. Wiring 11
2.1. Communication/Power connector 11
2.2. FE terminal 11
3. Configuration 12
3.1. IODD file 12
3.2. Direct Parameter page 1 12
3.3. IO-Link defined parameters 13
3.4. Vendor defined parameters 15
4. Process data 22
4.1. Input process data 22
4.2 Output process data 26
5. Example of energy saving operation of ejector 28
6. LED indication 29
7. Event 30
8. Specification 31
8.1. Dimensions 31
8.2. Specifications 32
9. Accessories 33
10. Troubleshooting 38

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No.EX※※-OMZ0018
Safety Instructions
These safety instructions are intended to prevent hazardous situations and/or equipment damage.
These instructions indicate the level of potential hazard with the labels of "Caution", "Warning" or "Danger".
They are all important notes for safety and must be followed in addition to International Standards
(ISO/IEC) *1), and other safety regulations.
*1) ISO 4414: Pneumatic fluid power -- General rules relating to systems.
ISO 4413: Hydraulic fluid power -- General rules relating to systems.
IEC 60204-1: Safety of machinery -- Electrical equipment of machines .(Part 1: General requirements)
ISO 10218: Manipulating industrial robots -Safety.
etc.
Caution
Caution indicates a hazard with a low level of risk, which if not avoided
could result in minor or moderate injury.
Warning
Warning indicates a hazard with a medium level of risk, which if not
avoided could result in death or serious injury.
Danger
Danger indicates a hazard with a high level of risk, which if not avoided
will result in death or serious injury.
Warning
1. The compatibility of the product is the responsibility of the person who designs the
equipment or decides its specifications.
Since the product specified here is used under various operating conditions, its compatibility with specific
equipment must be decided by the person who designs the equipment or decides its specifications
based on necessary analysis and test results.
The expected performance and safety assurance of the equipment will be the responsibility of the person
who has determined its compatibility with the product.
This person should also continuously review all specifications of the product referring to its latest catalog
information, with a view to giving due consideration to any possibility of equipment failure when
configuring the equipment.
2. Only personnel with appropriate training should operate machinery and equipment.
The product specified here may become unsafe if handled incorrectly.
The assembly, operation and maintenance of machines or equipment including our products must be
performed by an operator who is appropriately trained and experienced.
3. Do not service or attempt to remove product and machinery/equipment until safety is
confirmed.
1. The inspection and maintenance of machinery/equipment should only be performed after measures to
prevent falling or runaway of the driven objects have been confirmed.
2. When the product is to be removed, confirm that the safety measures as mentioned above are
implemented and the power from any appropriate source is cut, and read and understand the specific
product precautions of all relevant products carefully.
3. Before machinery/equipment is restarted, take measures to prevent unexpected operation and malfunction.
4. Contact SMC beforehand and take special consideration of safety measures if the
product is to be used in any of the following conditions.
1. Conditions and environments outside of the given specifications, or use outdoors or in a place
exposed to direct sunlight.
2. Installation on equipment in conjunction with atomic energy, railways, air navigation, space, shipping,
vehicles, military, medical treatment, combustion and recreation, or equipment in contact with food and
beverages, emergency stop circuits, clutch and brake circuits in press applications, safety equipment or
other applications unsuitable for the standard specifications described in the product catalog.
3. An application which could have negative effects on people, property, or animals requiring special
safety analysis.
4. Use in an interlock circuit, which requires the provision of double interlock for possible failure by using
a mechanical protective function, and periodical checks to confirm proper operation.

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No.EX※※-OMZ0018
Safety Instructions
Caution
1.The product is provided for use in manufacturing industries.
The product herein described is basically provided for peaceful use in manufacturing industries.
If considering using the product in other industries, consult SMC beforehand and exchange
specifications or a contract if necessary.
If anything is unclear, contact your nearest sales branch.
Limited warranty and Disclaimer/Compliance Requirements
The product used is subject to the following "Limited warranty and Disclaimer" and "Compliance
Requirements".
Read and accept them before using the product.
Limited warranty and Disclaimer
1. The warranty period of the product is 1 year in service or 1.5 years after the product is
delivered,whichever is first.2)
Also, the product may have specified durability, running distance or replacement parts.
Please consult your nearest sales branch.
2. For any failure or damage reported within the warranty period which is clearly our
responsibility, a replacement product or necessary parts will be provided.
This limited warranty applies only to our product independently, and not to any other
damage incurred due to the failure of the product.
3. Prior to using SMC products, please read and understand the warranty terms and
disclaimers noted in the specified catalog for the particular products.
2) Vacuum pads are excluded from this 1 year warranty.
A vacuum pad is a consumable part, so it is warranted for a year after it is delivered.
Also, even within the warranty period, the wear of a product due to the use of the
vacuum pad or failure due to the deterioration of rubber material are not covered by the
limited warranty.
Compliance Requirements
1. The use of SMC products with production equipment for the manufacture of weapons of
mass destruction (WMD) or any other weapon is strictly prohibited.
2. The exports of SMC products or technology from one country to another are governed by
the relevant security laws and regulation of the countries involved in the transaction. Prior
to the shipment of a SMC product to another country, assure that all local rules governing
that export are known and followed.

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No.EX※※-OMZ0018
Operator
This operation manual is intended for those who have knowledge of machinery using pneumatic
equipment, and have sufficient knowledge of assembly, operation and maintenance of such
equipment. Only those persons are allowed to perform assembly, operation and maintenance.
Read and understand this operation manual carefully before assembling, operating or providing
maintenance to the product.
■Safety Instructions
Warning
■Do not disassemble, modify (including changing the printed circuit board) or repair.
An injury or failure can result.
■Do not operate or set up with wet hands.
An electric shock can result.
■Do not operate the product outside of the specifications.
Do not use for flammable or harmful fluids.
Fire, malfunction, or damage to the product can result.
Verify the specifications before use.
■Do not operate in an atmosphere containing flammable or explosive gases.
Fire or an explosion can result.
This product is not designed to be explosion proof.
■If using the product in an interlocking circuit:
•Provide a double interlocking system, for example a mechanical system.
•Check the product regularly for proper operation.
Otherwise, malfunction can result, causing an accident.
■The following instructions must be followed during maintenance:
•Turn off the power supply.
•Stop the air supply, exhaust the residual pressure and verify that the air is released before
performing maintenance.
Otherwise, an injury can result.

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No.EX※※-OMZ0018
Caution
■When handling or assembling or replacing the unit, pay attention to the following:
•Do not touch the sharp edges when handling the unit
•The unit joints are tightly bound with gaskets, so do not hit your hands when replacing the unit.
•Do not put your fingers between them when joining the units.
Otherwise, an injury can result.
■After maintenance is complete, perform appropriate functional inspections.
Stop operation if the equipment does not function properly.
Safety cannot be assured in the case of unexpected malfunction.
■Provide grounding to assure the noise resistance of the Serial System.
Individual grounding should be provided close to the product with a short cable.
NOTE
○Follow the instructions given below when designing, selecting and handling the product.
•The instructions on design and selection (installation, wiring, environment, adjustment, operation,
maintenance, etc.) described below must also be followed.
Product specifications
•Use the specified voltage.
Otherwise, failure or malfunction can result.
•Reserve a space for maintenance.
Allow sufficient space for maintenance when designing the system.
•Do not remove any nameplates or labels.
This can lead to incorrect maintenance, or misreading of the operation manual, which could cause damage or
malfunction to the product.
It may also result in non-conformity to safety standards.
•Pay attention to the inrush current at power-up.
Depending on the connected load, the initial charge current may cause the overcurrent protection and malfunction
can result.

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No.EX※※-OMZ0018
•Product handling
Installation
•Do not drop, hit or apply excessive shock to the fieldbus system.
Otherwise, damage to the product can result, causing malfunction.
•Tighten to the specified tightening torque.
If the tightening torque is exceeded the mounting screws may be broken.
IP65 protection cannot be guaranteed if the screws are not tightened to the specified torque.
• When carrying the vacuum manifold, make sure that the connections are not stressed.
Otherwise, the damage to connections can result. In addition, some combinations of the manifold may be very
heavy, so use more than one person to carry or install the unit.
•Never mount a product in a location that will be used as a foothold.
The product may be damaged if excessive force is applied by stepping or climbing onto it.
Wiring
•Avoid repeatedly bending or stretching the cables or placing heavy load on them.
Repetitive bending stress or tensile stress can cause breakage of the cable.
•Wire correctly.
Incorrect wiring can break the product.
•Do not perform wiring while the power is on.
Otherwise, damage to the fieldbus system and/or I/O device can result, causing malfunction.
•Do not route wires and cables together with power or high voltage cables.
Otherwise, the fieldbus system and/or I/O device can malfunction due to interference of noise and surge voltage
from power and high voltage cables to the signal line.
Route the wires (piping) of the fieldbus system and/or I/O device separately from power or high voltage cables.
•Confirm proper insulation of wiring.
Poor insulation (interference from another circuit, poor insulation between terminals, etc.) can lead to excess
voltage or current being applied to the product, causing damage.
•Take appropriate measures against noise, such as using a noise filter, when the fieldbus system is
incorporated into equipment.
Otherwise, noise can cause malfunction.
Environment
•Select the proper type of protection according to the environment of operation.
IP65 protection is achieved when the following conditions are met.
(1) The power/communication connector on the SI Unit is properly connected to the cable with M12 connector.
(2) Suitable mounting is carried out between the SI Unit and the vacuum manifold.
(3) Unused connector is fitted with a seal cap.
If using in an environment that is exposed to water splashes, please take measures such as using a cover.
•Do not use in a place where the product could be splashed by oil or chemicals.
If the product is to be used in an environment containing oils or chemicals such as coolant or cleaning solvent, even
for a short time, it may be adversely affected (damage, malfunction etc.).
•Do not use the product in an environment where corrosive gases or fluids could be splashed.
Otherwise, damage to the product and malfunction can result.
•Do not use in an area where surges are generated.
If there is equipment that generates a large amount of surge (solenoid type lifter, high frequency induction furnace,
motor, etc.) close to the fieldbus system, this may cause deterioration or breakage of the internal circuit of the
fieldbus system. Avoid sources of surge generation and crossed lines.
•When a surge-generating load such as a relay or solenoid is driven directly, use a fieldbus system
with a built-in surge-absorbing element.
Direct drive of a load generating surge voltage can damage the fieldbus system.
•The product is CE marked, but not immune to lightning strikes. Take measures against lightning
strikes in the system.
•Prevent foreign matter such as remnant of wires from entering the fieldbus system to avoid failure
and malfunction.

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No.EX※※-OMZ0018
•Mount the product in a place that is not exposed to vibration or impact.
Otherwise, failure or malfunction can result.
•Do not use the product in an environment that is exposed to temperature cycle.
Heat cycles other than ordinary changes in temperature can adversely affect the inside of the product.
•Do not expose the product to direct sunlight.
If using in a location directly exposed to sunlight, shade the product from the sunlight.
Otherwise, failure or malfunction can result.
•Keep within the specified ambient temperature range.
Otherwise, malfunction can result.
•Do not operate close to a heat source, or in a location exposed to radiant heat.
Otherwise, malfunction can result.
Adjustment and Operation
•Perform settings suitable for the operating conditions.
Incorrect setting can cause operation failure.
•Please refer to the PLC manufacturer's manual etc. for details of programming and addresses.
For the PLC protocol and programming refer to the relevant manufacturer's documentation.
Maintenance
•Turn off the power supply, stop the supplied air, exhaust the residual pressure and verify the
release of air before performing maintenance.
There is a risk of unexpected malfunction.
•Perform regular maintenance and inspections.
There is a risk of unexpected malfunction.
•After maintenance is complete, perform appropriate functional inspections.
Stop operation if the equipment does not function properly.
Otherwise, safety is not assured due to an unexpected malfunction or incorrect operation.
•Do not use solvents such as benzene, thinner etc. to clean each unit.
They could damage the surface of the body and erase the markings on the body.
Use a soft cloth to remove stains.
For heavy stains, use a cloth soaked with diluted neutral detergent and fully squeezed, then wipe up the stains
again with a dry cloth.

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No.EX※※-OMZ0018
Fieldbus System/
Industrial IoT Cybersecurity
In recent years, factories have introduced industrial IoT, building up complex networks of production
machines. These systems maybe subject to a new threat, cyberattack. To protect the industrial IoT from
cyberattacks, it is important to take multiple measures (multi-layer protection) for IoT devices, networks and
clouds.
For this purpose, SMC recommends that the following measures are always taken into consideration. For
further details of the following measures, please see security information published by your local country
security agencies.
1. Do not connect the devices via a public
network.
• If you unavoidably need to access the device or cloud
via a public network, ensure to use a secure, private
network such as VPN.
• Do not connect an office IT network and factory IoT
network.
2. Build a firewall to prevent a threat from
entering the device and system.
• Set up a router or firewall at network boundaries to
allow minimum required communications.
• Disconnect from the network or turn off the device if
no continuous connection is required.
3. Physically block an access to unused
communication ports or disable them.
• Inspect regularly each port if any unnecessary device
is connected to the network system.
• Operate necessary services (SSH, FTP, SFTP, etc.)
only.
• Set a transmission range of the device using a
wireless LAN or other radio system to the minimum
required and use only devices approved according to
the radio act in the country concerned.
• Install a device generating radio waves in such place
as there is no interference from indoor or outdoor.
4. Set up a secure communication method such
as data encryption.
• Encrypt data in every environment, including IoT
networks, secure gate-way connections, for secure
communications.
5. Grant access permissions by user accounts
and limit the number of users.
• Regularly review accounts and delete all unused
accounts or permissions.
• Establish an account lockout system to block an
access to the account for a certain period if log-in fails
more than the given threshold.
6. Protect passwords.
• Change the default password when you first use
the device or system.
• Choose a long password (minimum 8
characters) using a mix of different letters and
characters to make the password more secure
and harder to hack.
7. Use the latest security software.
• Install antivirus software on all computers to
detect and remove viruses.
• Keep the antivirus software up to date.
8. Use the latest version of the device and
system software.
• Apply patches to keep the OS and applications
up to date.
9. Monitor and detect abnormalities in the
network.
• Keep monitoring the network for any
abnormalities to take a prompt measure and
issue an alert if any abnormality is detected.
Install an intrusion detection system (IDS) and
intrusion prevention system (IPS).
10. Delete data from devices when disposed of.
• Before disposing of any IoT devices, delete
stored data or physically destruct media to
prevent any misuse of the data.
A 280-1

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No.EX※※-OMZ0018
1. Product summary
This document is an operation manual for a SI (Serial Interface) Unit which controls vacuum (ejector)
manifold (ZKJ series). The SI Unit is a IO-Link device. The SI Unit controls a vacuum manifold which
has 16 supply valves max., 16 release valves max. and 16 pressure sensors max..
No.
Item
Description
1
Communication/Power
connector
Connector for IO-Link communication and supplying power to the SI
Unit, pressure sensors and valves. (M12 5 pin plug A-coded)
Refer to Section 2.1.
2
FE terminal
Functional earth. (M3 screw)
Refer to Section 2.2.
3
LED display
LED display to indicate the status of the SI Unit.
Refer to Section 6.
4
Product information label
Information label to indicate SI Unit details such as serial No. etc..
5
Connector
Communication connection to vacuum manifold.
6
Mounting holes
Connects to vacuum manifold.
Fig 1-1. The SI Unit structure
For further details on mounting, installation, etc. of the vacuum manifold, refer to the vacuum manifold
operation manual.
Warning
The SI unit must be connected to a vacuum manifold before it is powered ON.

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No.EX※※-OMZ0018
2. Wiring
Select the appropriate cables to mate with the connectors mounted on the SI Unit, refer to Section 9.
2.1. Communication/Power connector (IO-Link Port Class B)
BUS IN : M12 5 pin plug A-coded
Pin No.
Designation
Content
1
L+
+24 V for logic/input
2
P24
+24 V for output
3
L-
0 V for logic/input
4
C/Q
IO-Link communication data
5
N24
0 V for output
Fig 2-1. Pin allocation of M12 5 pins plug A-coded connector
The power supply for logic/input and the power supply for output are isolated.
2.2. FE terminal
The SI Unit must be connected to FE (Functional Earth) to divert electromagnetic interference.
For maximum protection, the FE cable should be as thick and short as reasonably possible.
The FE terminal and the metal parts of the fieldbus interface/power supply connector are internally
connected.
FE terminal screw tightening torque : 0.3 Nm.
Fig 2-2. FE terminal

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No.EX※※-OMZ0018
3. Configuration
3.1. IODD file
An IODD (IO Device Description) file is a profile held by an IO-Link device, which contains device
specific information such as process data, parameter and default values, vendor name and product
name etc. The content of the IODD file description is defined as the IO-Link specification.
The IODD file is supplied with a set of image files e.g., vendor logo, device photo and device icon.
The IODD file of the SI Unit is as follows.
Table 3-1. IODD file
IODD file
Vacuum manifold
stations
Process data sizes
input
output
SMC-EX260-VIL1_4-yyyymmdd-IODD1.1
4
4 byte
2 byte
SMC-EX260-VIL1_8-yyyymmdd-IODD1.1
8
5 byte
3 byte
SMC-EX260-VIL1_12-yyyymmdd-IODD1.1
12
6 byte
4 byte
SMC-EX260-VIL1_16-yyyymmdd-IODD1.1
16
7 byte
5 byte
Note
"yyyymmdd" represents the date IODD file was created,
"yyyy" is the year, "mm" is the month and "dd" is the date.
3.2. Direct Parameter page 1
Table 3-2. Direct Parameter page 1
Address
Content
Access
Value/Description/Remark
0x00
MasterCommand
W
---
0x01
MasterCycleTime
R/W
Based on the MinCycleTime value, this value is set by
the IO-Link master when OPERATE state.
The default value is 0xBF (132.8ms).
0x02
MinCycleTime
R
Refer to Section 3.2.1.
0x03
M-SequenceCapability
R
Fixed at 0x29.
-PREOPERATE M-Sequence type : TYPE_1_V
-OPERATE M-Sequence type : TYPE_2_V
-ISDU supported
0x04
RevisionID
R
Fixed at 0x11.
0x05
ProcessDataIn
R
Refer to Section 3.2.1.
0x06
ProcessDataOut
R
0x07
VendorID 1 (MSB)
R
Fixed at 0x0083.
0x08
VendorID 2 (LSB)
0x09
DeviceID 1 (Octet 2, MSB)
R
Refer to Section 3.2.1.
0x0A
DeviceID 2 (Octet 1)
0x0B
DeviceID 3 (Octet 0, LSB)
0x0C
FunctionID 1 (MSB)
R
Fixed at 0x0000.
0x0D
FunctionID 2 (LSB)
0x0E
Reserved
R
Fixed at 0x00.
Note
For the access type, "R" means Read and "W" means Write.

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No.EX※※-OMZ0018
3.2.1. MinCycleTime, ProcessDataIn/Out, Device ID
Table 3-3. MinCycleTime, ProcessDataIn/Out, Device ID
Vacuum manifold
stations
MinCycleTime
(Address : 0x02)
ProcessDataIn
(Adress : 0x05)
ProcessDataOut
(Adress : 0x06)
Device ID
(Adress : 0x09...0x0B)
4
0x28 (4.0 ms)
0x83 (4 byte)
0x10 (2 byte)
0x000254
8
0x2E (4.6 ms)
0x84 (5 byte)
0x82 (3 byte)
0x000255
12
0x34 (5.2 ms)
0x85 (6 byte)
0x83 (4 byte)
0x000256
16
0x3A (5.8 ms)
0x86 (7 byte)
0x84 (5 byte)
0x000257
3.3. IO-Link defined parameters
Table 3-4. IO-Link defined parameters
Index(dec)
Parameter
Access
Value/Description/Remark
0x0002(2)
SystemCommand
W
Refer to Section 3.3.1.
0x0003(3)
DataStorageIndex
R/W
---
0x0010(16)
VendorName
R
SMC Corporation
0x0011(17)
VendorText
R
www.smcworld.com
0x0012(18)
ProductName
R
Vacuum manifold 4 stations : EX260-VIL1_4_ejectors
Vacuum manifold 8 stations : EX260-VIL1_8_ejectors
Vacuum manifold 12 stations : EX260-VIL1_12_ejectors
Vacuum manifold 16 stations : EX260-VIL1_16_ejectors
0x0013(19)
ProductID
R
EX260-VIL1
0x0014(20)
ProductText
R
Vacuum Manifold
0x0015(21)
SerialNumber
R
**...*(16 characters max.)
0x0016(22)
HardwareRevision
R
V*.*
0x0017(23)
FirmwareRevision
R
V*.*.*
0x0018(24)
ApplicationSpecificTag
R/W
Default value : **...*(32 characters)
Can be set to 16-32 characters.
0x0024(36)
DeviceStatus
R
Refer to Section 3.3.2.
0x0025(37)
DetailedDeviceStatus
R
Refer to Section 3.3.3.
3.3.1. SystemCommand (Index 2)
The various reset commands supported by the SI Unit are as follows.
Table 3-5. SystemCommand
Value
Command
Description/Remark
0x80
Device reset
The SI Unit restarts with the power on.
0x81
Application reset
Reset vendor defined parameter to default values while maintaining IO-Link
communication.
0x83
Back-to-box
Reset vendor defined parameter to default values and disable IO-Link
communication.
IO-Link communications can be restored by restarting the SI Unit.

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No.EX※※-OMZ0018
3.3.2. DeviceStatus (Index 36)
Table 3-6. DeviceStatus
Subindex
Value
Definition
Content
0
0
Device is operating
properly
Operating normally.
1
Maintenance-
Required
・Power supply for logic/input is low. (< approx. 16.8 VDC)
・The setting of Supply valve type parameter has a mismatch.
・The setting of Pressure/Hysteresis parameter has a failure.
・Valve protection function is operating.
2
Out-of-Specification
(Not applicable for this product.)
3
Functional-Check
(Not applicable for this product.)
4
Failure
・Valve has a short circuit.
・Pressure sensor has a short circuit.
・Pressure sensor has a failure or a disconnection.
・No connection or a disconnection between the SI Unit and
vacuum manifold.
・There is a firmware error.
3.3.3. DetailedDeviceStatus (Index 37)
Table 3-7. DetailedDeviceStatus
Sub
index
Size
Content
EventQualifier (byte 0)
Event
Code
(byte 1-2)
Value
MODE
bit 6-7
TYPE
bit 4-5
SOURCE
bit 3
INSTANCE
bit 0-2
1
3
byte
Device hardware failure
0xF4
11b
(3)
(Event
appears)
11b
(3)
(Error)
0
(Device)
100b
(4)
(Application)
0x5000
2
Non volatile memory failure
0x5011
3
Valve short circuit
0x1800
4
Pressure sensor short circuit
0x1801
5
Pressure sensor
failure/disconnection
0x1802
6
Vacuum manifold no
connection
0x1803
7
Vacuum manifold
disconnection
0x1804
8
Firmware error
0x1805
9
Voltage drop of power supply
for logic/input
0xE4
11b
(3)
(Event
appears)
10b
(2)
(Warning)
0
(Device)
100b
(4)
(Application)
0x5111
10
Supply valve type parameter
mismatch
0x1850
11
Pressure/Hysteresis
parameter setting failure
0x1851
12
Valve protection
0x1852
Note
DetailedDeviceStatus can only be accessed by Subindex 0,
which allows all diagnostic information to be read at once. (3 byte x 12 contents = 36 byte)

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No.EX※※-OMZ0018
3.4. Vendor defined parameters
Tale 3-8. Vendor defined parameters
Index(dec)
Subindex
Access
Parameter name
Size[byte]
Data Storage
Section
0x0040(64)
1...16
R/W
Pressure P1
2
Y
3.4.1
0x0041(65)
1...16
R/W
Hysteresis H1
2
Y
3.4.2
0x0042(66)
1...16
R/W
Pressure P2
2
Y
3.4.3
0x0043(67)
1...16
R/W
Hysteresis H2
2
Y
3.4.4
0x0044(68)
1...16
R/W
Pressure P3
2
Y
3.4.5
0x0045(69)
1...16
R/W
Hysteresis H3
2
Y
3.4.6
0x0046(70)
1...16
R/W
Pressure sensor use
1
Y
3.4.7
0x0047(71)
1...16
R/W
Supply valve type
1
Y
3.4.8
0x0048(72)
1...16
R/W
Energy saving function
1
Y
3.4.9
0x0049(73)
1...16
R/W
Pressure range
1
Y
3.4.10
0x004A(74)
1...16
R/W
Valve protection count
1
Y
3.4.11
0x0055(85)
1...16
R
Current pressure value
2
N
3.4.12
0x0056(86)
1...16
R
Valve short circuit status
1
N
3.4.13
0x0057(87)
1...16
R
Pressure sensor
failure/disconnection status
1
N
3.4.14
0x0058(88)
1...16
R
Valve protection status
1
N
3.4.15
0x0059(89)
1...16
R
Supply valve type status
1
N
3.4.16
0x005A(90)
1...16
R
Pressure/Hysteresis parameter
failure status
1
N
3.4.17
0x005B(91)
0
R
Receive error count
4
N
3.4.18
0x0091(145)
0
W
Zero clear
1
N
3.4.19
0x0092(146)
0
W
Valve protection release
1
N
3.4.20
Note
"Y" means included in DataStorage, "N" means not included in DataStorage.
Parameter settings should be carried out with all ejector CHs in the following state :
- Supply valves closed (vacuum instruction OFF)
- Release valves closed (release instruction OFF)
- Atmospheric open state with no pressure applied in the ejector
Refer to Section 4.2.2.
For parameters of Index 64...74, 85...90 :
Parameter for each ejector CHs can be access individually by specifying the relevant Subindex.
i.e., CH0 parameters are accessed via Subindex 1, CH1 via Subindex 2 etc.
Subindex 0 can be used to access all CH parameters at once.
i.e., disables the energy saving function for all CHs by writing 0 to Index 72 and Subindex 0.

-16-
No.EX※※-OMZ0018
3.4.1. Pressure P1 (Index 64)
Table 3-9. Pressure P1
Sub
index
Size
[byte]
Acc
ess
Default
(dec)
Content
Description
1
2
R/W
0x0258
(600)
Vacuum confirmation
threshold (P1) of CH0
Set vacuum confirmation threshold (P1) for each
CH. Refer to Section 5.
Settable range : 11...989 (-1.1 kPa...-98.9 kPa)
Combination conditions with other parameters :
H1+1 ≤ P1 ≤ P2-H2
...
...
...
...
...
16
2
R/W
0x0258
(600)
Vacuum confirmation
threshold (P1) of CH15
3.4.2. Hysteresis H1 (Index 65)
Table 3-10. Hysteresis H1
Sub
index
Size
[byte]
Acc
ess
Default
(dec)
Content
Description
1
2
R/W
0x0032
(50)
Vacuum confirmation
hysteresis (H1) of CH0
Set vacuum confirmation hysteresis (H1) for each
CH. Refer to Section 5.
Settable range : 10...988 (1.0 kPa...98.8 kPa)
Combination conditions with other parameters :
10 ≤ H1 ≤ P1-1
...
...
...
...
...
16
2
R/W
0x0032
(50)
Vacuum confirmation
hysteresis (H1) of CH15
3.4.3. Pressure P2 (Index 66)
Table 3-11. Pressure P2
Sub
index
Size
[byte]
Acc
ess
Default
(dec)
Content
Description
1
2
R/W
0x02EE
(750)
Energy saving operation
threshold (P2) of CH0
Set energy saving operation threshold (P2) for
each CH. Refer to Section 5.
Settable range : 21...999 (-2.1 kPa...-99.9 kPa)
Combination conditions with other parameters :
P1+H2 ≤ P1 ≤ 999
...
...
...
...
...
16
2
R/W
0x02EE
(750)
Energy saving operation
threshold (P2) of CH15
3.4.4. Hysteresis H2 (Index 67)
Table 3-12. Hysteresis H2
Sub
index
Size
[byte]
Acc
ess
Default
(dec)
Content
Description
1
2
R/W
0x0064
(100)
Energy saving operation
hysteresis (H2) of CH0
Set energy saving operation hysteresis (H2) for
each CH. Refer to Section 5.
Settable range : 10...988 (1.0 kPa...98.8 kPa)
Combination conditions with other parameters :
10 ≤ H2 ≤ P2-P1
...
...
...
...
...
16
2
R/W
0x0064
(100)
Energy saving operation
hysteresis (H2) of CH15

-17-
No.EX※※-OMZ0018
3.4.5. Pressure P3 (Index 68)
Table 3-13. Pressure P3
Sub
index
Size
[byte]
Acc
ess
Default
(dec)
Content
Description
1
2
R/W
0x0028
(40)
Release confirmation
threshold (P3) of CH0
Set release confirmation threshold (P3) for each
CH. Refer to Section 5.
Settable range : 31...2000 (3.1 kPa...200.0 kPa)
Combination conditions with other parameters :
H3+1 ≤ P3 ≤ 2000
...
...
...
...
...
16
2
R/W
0x0028
(40)
Release confirmation
threshold (P3) of CH15
3.4.6. Hysteresis H3 (Index 69)
Table 3-14. Hysteresis H3
Sub
index
Size
[byte]
Acc
ess
Default
(dec)
Content
Description
1
2
R/W
0x000A
(10)
Release confirmation
hysteresis (H3) of CH0
Set release confirmation hysteresis (H3) for each
CH. Refer to Section 5.
Settable range : 10...1999 (1.0 kPa...199.9 kPa)
Combination conditions with other parameters :
10 ≤ H3 ≤ P3-1
...
...
...
...
...
16
2
R/W
0x000A
(10)
Release confirmation
hysteresis (H3) of CH15
Note
At Pressure P1/P2, set the negative pressure (vacuum pressure) in units of -0.1 kPa.
At Pressure P3, set the positive pressure in units of -0.1 kPa.
If any of the combination conditions are not met after setting Pressure * or Hysteresis *
parameters, the vacuum/release instructions for all CHs will be disabled (valve power OFF) and
diagnostic information will be issued. Refer to Section 3.4.17 and Section 7.
3.4.7. Pressure sensor use (Index 70)
Table 3-15. Pressure sensor use
Sub
index
Size
[byte]
Acc
ess
Default
Content
Description
1
1
R/W
0x01
Pressure sensor
used/unused of CH0
Set pressure sensor used/unused for each CH.
When set to Unused :
- Pressure value of relevant CH is fixed at 0x8000
- Pressure sensor failure/disconnection status
(Section 3.4.14) of relevant CH is invalid
0x00 : Unused
0x01 : Used
...
...
...
...
...
16
1
R/W
0x01
Pressure sensor
used/unused of CH15
Note
If vacuum manifold contains blanking plate(s), set to Unused for relevant CH.

-18-
No.EX※※-OMZ0018
3.4.8. Supply valve type (Index 71)
Table 3-16. Supply valve type
Sub
index
Size
[byte]
Acc
ess
Default
Content
Description
1
1
R/W
0x01
Supply valve type of CH0
Set the N.O./N.C. of the supply valve type for
each CH.
0x00 : N.C.
0x01 : N.O.
...
...
...
...
...
16
1
R/W
0x01
Supply valve type of CH15
Note
The setting must match the supply valve type fitted in vacuum manifold.
Diagnostic information will be issued when a supply valve type mismatch is detected.
Refer to Section 3.4.16 and Section 7.
3.4.9. Energy saving function (Index 72)
Table 3-17. Energy saving function
Sub
index
Size
[byte]
Acc
ess
Default
Content
Description
1
1
R/W
0x01
Enable/Disable energy
saving function of CH0
Set Enable/Disable energy saving function for
each CH. Refer to Section 5.
0x00 : Disable
0x01 : Enable
...
...
...
...
...
16
1
R/W
0x01
Enable/Disable energy
saving function of CH15
3.4.10. Pressure range (Index 73)
Table 3-18. Pressure range
Sub
index
Size
[byte]
Acc
ess
Default
Content
Description
1
1
R/W
0x01
Rated pressure range of pressure
sensor of CH0
Set rated pressure range of pressure
sensor to be used in each CH.
0x00 : -100...200 kPa
0x01 : -100...100 kPa
...
...
...
...
...
16
1
R/W
0x01
Rated pressure range of pressure
sensor of CH15
Note
The setting must match the rated pressure range of sensor fitted in vacuum manifold.

-19-
No.EX※※-OMZ0018
3.4.11. Valve protection count (Index 74)
Table 3-19. Valve protection count
Sub
index
Size
[byte]
Acc
ess
Default
(dec)
Content
Description
1
1
R/W
0x0A
(10)
Number of settings for
valve protection of
CH0
Set Enable/Disable valve protection function and its
number of times for each CH.
The valve protection functions are described below.
During operation of energy saving function, if the
switching of vacuum generate/stop has reached set
number of times, stop subsequent energy saving
function and diagnostic information is issued.
If the value is set to 0, valve protection function is invalid
and energy saving function continues to operate.
Settable range : 0...100
...
...
...
...
...
16
1
R/W
0x0A
(10)
Number of settings for
valve protection of
CH15
Note
For diagnostic information, refer to Section 3.4.15 and Section 7.
The energy saving function is stopped when the protection count number is exceeded.
It can be restarted by either of the following methods :
- Restarting the SI Unit
- Turning power supply for output OFF/ON
- Using the Valve protection release command (Section 3.4.20).
3.4.12. Current pressure (Index 85)
Table 3-20. Current pressure
Sub
index
Size
[byte]
Acc
ess
Default
Content
Description
1
2
R
0x0000
Current pressure value of CH0
Read current pressure value for each CH.
The specification of the value is the same as
for PressureValueMonitoring of input
process data.
Refer to Section 4.1.1.
...
...
...
...
...
16
2
R
0x0000
Current pressure value of CH15
3.4.13. Valve short circuit status (Index 86)
Table 3-21. Valve short circuit status
Sub
index
Size
[byte]
Acc
ess
Default
Content
Description
1
1
R
0x00
Valve short circuit status of CH0
Read valve short circuit status for each CH.
0x00 : No short circuit
0x01 : Short circuit detected
...
...
...
...
...
16
1
R
0x00
Valve short circuit status of CH15

-20-
No.EX※※-OMZ0018
3.4.14. Pressure sensor failure/disconnection status (Index 87)
Table 3-22. Pressure sensor failure/disconnection status
Sub
index
Size
[byte]
Acc
ess
Default
Content
Description
1
1
R
0x00
Pressure sensor
failure/disconnection status of CH0
Read pressure sensor
failure/disconnection status for each CH.
0x00 : No failure/disconnection
0x01 : Failure/Disconnection detected
Fixed at 0x00 for CHs whose Pressure
sensor parameter is set to Unused.
...
...
...
...
...
16
1
R
0x00
Pressure sensor
failure/disconnection status of CH15
3.4.15. Valve protection status (Index 88)
Table 3-23. Valve protection status
Sub
index
Size
[byte]
Acc
ess
Default
Content
Description
1
1
R
0x00
Valve protection status of
CH0
Read valve protection function status of each CH.
0x00 : No valve protection operation
0x01 : Valve protection operating
Fixed at 0x00 for CHs whose parameter setting apply
following conditions :
- Pressure sensor use parameter is set to Unused
- Energy saving function parameter is set to Disable
...
...
...
...
...
16
1
R
0x00
Valve protection status of
CH15
3.4.16. Supply valve type status (Index 89)
Table 3-24. Supply valve type status
Sub
index
Size
[byte]
Acc
ess
Default
Content
Description
1
1
R
0x00
Supply valve type
mismatch status of CH0
Read supply valve type mismatch status for each CH.
0x00 : No mismatch
0x01 : Mismatch detected
Fixed at 0x00 for CHs whose Pressure sensor
parameter is set to Unused.
...
...
...
...
...
16
1
R
0x00
Supply valve type
mismatch status of CH15
3.4.17. Pressure/Hysteresis parameter failure status (Index 90)
Table 3-25. Pressure/Hysteresis parameter failure status
Sub
index
Size
[byte]
Acc
ess
Default
Content
Description
1
1
R
0x00
Pressure/Hysteresis parameter
failure status of CH0
Read Pressure/Hysteresis parameter setting
failure status for each CH.
0x00 : No setting failure
0x01 : Setting failure detected
Fixed at 0x00 for CHs whose Pressure sensor
parameter is set to Unused.
...
...
...
...
...
16
1
R
0x00
Pressure/Hysteresis parameter
failure status of CH15