SRS Labs UGA100 User manual

Operation Manual and
Programming Reference
Universal Gas Analyzers
UGA100, UGA200, UGA300
Stanford Research Systems
Revision 1.6 ·Feb., 2018

Stanford Research Systems
UGA Series Universal Gas Analyzers
Certication
Stanford Research Systems certies that this product met its published specications at the time
of shipment.
Warranty
This Stanford Research Systems product is warranted against defects in materials and workman-
ship for a period of one (1) year from the date of shipment.
Service
For warranty service or repair, this product must be returned to a Stanford Research Systems
authorized service facility. Some components may be serviceable directly from the supplier. Con-
tact Stanford Research Systems or an authorized representative before returning this product for
repair.
Trademarks
Ultra-Torr® and VCR® are registered trademarks of Swagelok Co.
Tygon® is a registered trademark of Norton Co.
All other brand and product names mentioned herein are used for identication purposes only,
and are trademarks or registered trademarks of the respective holders.
Contact Information
Stanford Research Systems, Inc.
1290-D Reamwood Avenue
Sunnyvale, CA 94089 USA
Phone: [phone]
Fax: [phone]
www.thinkSRS.com
[email protected]
Information in this document is subject to change without notice.
Copyright © Stanford Research Systems, Inc., 2007 – 2014. All rights reserved.
Printed in U.S.A.

i
Safety . . . . . . . . . . . . . . . . ii
Symbols . . . . . . . . . . . . . . iii
Checklist . . . . . . . . . . . . . . iv
Materials List . . . . . . . . . . . v
Specications . . . . . . . . . . . vi
Quick Start. . . . . . . . . . . . . ix
Chapter 1 UGA Basics
Introduction . . . . . . . . . . . . 1–2
Conguration . . . . . . . . . . . 1–6
Options and
Sample Heater Accessory . . . 1–13
Chapter 2 Guide to Operation
Introduction . . . . . . . . . . . . 2–3
Front Panel Operation . . . . . . 2–3
Remote Operation . . . . . . . . 2–17
Chapter 3 Remote Programming
Introduction . . . . . . . . . . . . 3–2
Commands . . . . . . . . . . . . 3–4
Chapter 4 UGA Error Messages
Introduction . . . . . . . . . . . . 4–2
Error Messages . . . . . . . . . . 4–3
Chapter 5 Calibration and Input Design
Mass Spectrometry Basics . . . . 5–2
Calibration of Partial Pressure. . 5–13
Pressure Reducing Inlet . . . . . 5–21
References . . . . . . . . . . . . . 5–33
Appendices
Appendix A UGA Menu Table A–1
Appendix B UGA State Diagram A–3
Appendix C Calibration Log A–4
Contents

Stanford Research Systems
UGA Series Universal Gas Analyzers
ii
Safety
Warning
Hazardous voltages, capable of causing injury or death, are present
in this instrument. Use extreme caution whenever the top back and
the boom covers of the instrument are removed. Always unplug
the unit while removing those covers.
Ventilation
The UGA system requires forced air cooling to operate at a reason-
able temperature. Do not block the air inlet or exhaust on the back
of the unit. Components will fail without this cooling.
Lifting
The UGA system is heavy; use care when lifting. Two people are
recommended for lifting the system. The handles provided are
used for lifting. Do not move when system is running.
Line Voltage
The UGA system is specied for line power of either 110 V / 60 Hz
or 220 V / 50 Hz. All the components inside the instrument will
only be operated on 24 VDC. Operating at other voltages will dam-
age the components. Two 3 A fuses must be used in the power
entry module.
Exhaust
As shipped, the UGA system exhausts to the atmosphere. If the
system is analyzing hazardous gases, the user must make provi-
sions to handle the exhaust from the system. A standard 1/4 inch
ID Tygon tube connection is provided for this purpose.
Elastomer Seals
Silicone has been reported to react adversely and irreversibly with
the glass contained in an electron multiplier. Since the UGA con-
tains an electron multiplier, do not use silicone greases or oils on
seals; use only hydrocarbon based materials.

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UGA Series Universal Gas Analyzers
iii
Symbol Description
Alternating current
Caution - risk of electric shock
Frame or chassis terminal
Caution - refer to accompanying documents
Earth (ground) terminal
Battery
Fuse
On (supply)
Off (supply)
Protective bonding terminal
Symbols on SRS products

Stanford Research Systems
UGA Series Universal Gas Analyzers
iv
Checklist
Open the box(es) and inspect all components of the UGA system.
Report any damage to Stanford Research Systems immediately.
Compare the contents of the shipping boxes against your original
order and the checklist below. Report any discrepancies to Stan-
ford Research Systems immediately.
UGA base unit
Power cord
15’ Ethernet cable
6’ 1/16” OD, 175 mm ID capillary, unheated, with the connector
UGA manual
RGA manual
1 CD (software and electronic manuals)
16 port Valve, installed
Valve base, installed
Valve controller, installed
Valve controller holder, installed
Control cord, installed
Power cord for the controller, installed
RS232 communication cord for the controller, installed
Accessory box
Channel plug, 2 pkg
2’ 1/16” OD, 175 mm ID capillary, unheated with connectors for the
Valve outlet and the UGA sample inlet
3’ 1/16” OD, 175 mm ID capillary, unheated with the connector for
the sampling, 2 ea
Top front cover for this option, installed
Vent valve, installed
Purging gas line connector, installed
Vent line tube, installed
TP & controller, installed
Other proper parts; TP power cord, TP control cord, TP commu-
nication cord, TP holder, the Elbow heater insulator box, and the
roughing connector are assembled together with TP & controller
inside the system.
Standard System
Option 1.
Multiple Inlet Valve
Option 2.
System Vent Valve
Option 3.
Hydrogen pumping
specied TP

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UGA Series Universal Gas Analyzers
v
Materials List
SRS receives many requests for information about corrosion compatibility. It is our policy not to
state the compatibility of our system with various corrosive environments. We simply cannot test
the myriad combinations of environments that our customers use.
We do provide a list of all the materials exposed to the gas being introduced into the system. Our
expectation is that users who need to measure corrosive environments already have some type of
system that creates, handles and contains the corrosive gases. Given that they have designed and
operate said system, they are the best people to decide the compatibility of the materials in our
system with the specific corrosive environment.
The UGA system contains the following materials:
Body
• 304 stainless steel - high vacuum tube
• 316 stainless steel - quarter inch tube and fittings
• molybdenum - electrical feedthrough
• ceramic - electrical feedthrough
• AgCuIn - braze material on feedthroughs
• alumina - contained in the RGA
• aluminum - body of diaphragm pump
Replaceable Components
• glass - if an electron multiplier is installed in the RGA
• chromium - surface of the electron multiplier
• IrO2•ThO2- filament of RGA
Seals
• copper - seals in the CF high vacuum flanges
• 316SS - major component of VCR® seals
• silver - a thin layer on the VCR® seals to prevent gauling
• Viton - o-ring seal in the KF flange
• buna-N - seal in the high conductivity valve
• neoprene - diaphragms in diaphragm pump
• nitrile butyl rubber(NBR) - diaphragm pump valves - backing line
• Tygon® - connections to diaphragm pump (can be substituted)

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UGA Series Universal Gas Analyzers
vi
Inlet
Type capillary: available in stainless steel, PEEK, and glass lined
plastic
Flowrate 1 to 10 milliliter per minute at atmospheric pressure
Response time <200 ms
Pressure selectable from 1 X 10-6 bar to 1 bar
Mass Spectrometer
Type quadrupole
Detector Faraday cup (FC) &
Electron multiplier (CDEM)
Range 1 to 300 atomic mass units (amu)
Resolution <0.5 amu at 10% of peak height
Detection limit <10 ppm with Faraday cup detector
<1 ppm with electron multiplier
Operating pressure 10-4 mbar for FC
10-6 mbar for CDEM
Connections
Inlet 1/8 inch Ultra-Torr® ing
Exhaust 1/4 inch Tygon tube adapter
Computer RS-232C, DB9 connector or Ethernet
Power 3 pin grounded cable
System
Pumps hybrid turbomolecular/drag pump, 81 liter/s,
ultimate pressure 2 x 10-9 mbar
diaphragm pump with ultimate pressure less than 1 mbar
protection class IP44
Materials (see full materials list for details)
construction: SS304 and SS316
insulators: alumina, ceramic
seals: Viton, buna-N, and nitrile butyl rubber
misc: aluminum, Tygon
Specications

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UGA Series Universal Gas Analyzers
vii
General
Startup time 5 minutes from full stop
Max. Ambient Operating 35 °C
Temperature
Power requirement either 110 V / 60 Hz or 220 V / 50 Hz (not eld
selectable) less than 600 W total
Dimensions 28 cm H x 30 cm W x 65 cm D ( 11 in H x 12 in W x
26 in D ) without Handles
33 cm H x 35 cm W x 67.5 cm D (13 in H x 14 in W x
27 in D) with Handles
Weight 41 kg (85 lb. )

Stanford Research Systems
UGA Series Universal Gas Analyzers
viii

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UGA Series Universal Gas Analyzers
Quick Start ix
Quick Start
Capillary connection
This section will describe a quick start procedure for operating the
UGA and geing air analysis data from a remote PC through Ether-
net connection. If you nd any damage to the UGA, do not proceed
and call SRS at the number below.
For detailed control procedures, please refer to Chapter 2, “Front
Panel Operation of UGA”.
(For UGA systems with O100HC – Sample Heater Accessory, see
the section of ‘Options and Sample Heater Accessory’ in the chap-
ter 1 of this manual.)
• Pop o the front upper panel by grasping both sides of the panel
and pulling up (see photo).

Stanford Research Systems
UGA Series Universal Gas Analyzers
Quick Startx
• Unscrew the Ultra-Torr ing and remove the pin (see photo).
• Use the pin holder to the right to store the pin.
• Insert your capillary into the Ultra-Torr ing and tighten.
• Replace the panel.
• Insert the UGA/RGA software CD into your PC and follow the
prompts to install the UGA and RGA control software.
• Power up the UGA if it is o.
• Setup Ethernet paramters (IP address, Subnet Mask, Gateway,
Username, and Password) properly at UGA. Please refer to the sec-
tion 2.3.3.1 of this manual for detailed information.
• Connect the provided Ethernet cable between the UGA and a
switch or a router which your PC is connected. If your PC is not
connected to Ethernet, then use Serial connection instead (refer to
the section 2.3.3.2 of this manual.)
UGA control through a remote PC
Please note!
You must install the software with administrator account privileges.
This is critical for Vista, Windows7 or higher. This program needs the
full privilege of writing data.

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UGA Series Universal Gas Analyzers
Quick Start xi
• Start the UGA software.
The startup window depends on the operating system of the PC.
If the software starts with the blank window as shown below, click
‘Main’ menu and select ‘New UGA’ item. (See the following pic-
ture.) Then the ‘UGA1’ window will appear.
• Click on the ‘Main’ tab, and select ‘Connection Seings’. The
‘Connection Seings’ dialog box will pop up as shown below.
In the ‘Connection Seings’ dialog box, choose the ‘TCP/IP’ tab. Be
sure that ‘Enable TCP/IP’ should be marked. Verify that the proper
IP resource is checked (as shown below). After the Ethernet param-
eters are set properly, the resource should be shown in the list.

Stanford Research Systems
UGA Series Universal Gas Analyzers
Quick Startxii
• Click ‘OK’ buon.
• Click on the ‘Main’ tab, and select ‘Connect’. The following ‘Con-
nectorDialog’ window will appear. If no instrument name or ID is
visible under the connector immediately, hit ‘Update’ buon sev-
eral times to see the available resource.
• The software will now show available resource(s). Select the ap-
propriate Ethernet port and click the ‘Connect’ buon. In the exam-
ple screenshot above, the UGA is found on the IP of 172.25.128.13.
The instrument is indicated as ‘UGA’ precisely.
• After the proper port changes status to ‘Connected’ (the icon
turns green), close the ‘ConnectorDialog’ window. The title bar of
the software indicates the present connection.
• In the UGA software (See screenshot on the next page), click the
green ‘Start’ buon (Top right window) to start UGA and wait until
the current status becomes the ready state. (Current Mode indica-
tor becomes solid green and the word of ‘Ready’ is shown.) It will
take about 5 minutes to reach this state. When ready, your screen
should look similar to the one illustrated below.
If wanted, click ‘Reading’ tap beside the ‘Operation’ tap in the right
boom sub-window. A user can see all kinds of UGA running data;
Pressure, TP, and Temperature.
If the system fails to reach at the Ready state, please refer to the sec-
tion of 2.2.2.4 of this manual.

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UGA Series Universal Gas Analyzers
Quick Start xiii
• When the Current Mode indicator shows the ready state, launch
RGA software by clicking the ‘Launch RGA’ buon. The RGA soft-
ware automatically connects to RGA through UGA.
• From the RGA software, click the lament buon on the toolbar
to activate the ionizer. (See the next gure.) Click the ‘GO’ buon
on the tool bar and an analog scan will start with the default scan
range from 1 to 65 amu. The mass spectrum will show a rough
background spectrum.
Start Analog Scan

Stanford Research Systems
UGA Series Universal Gas Analyzers
Quick Startxiv
• Stop the scan.
• If you plan to sample atmospheric pressure gas, be sure you fol-
lowed the directions under the previous section, “Capillary Con-
nection”.
• Next, return to the UGA control software and prepare for atmo-
spheric sampling. In order to open the sample valve, click on the
‘Sample Valve’ item in the operation window. After clicking on the
item, you will see a drop down control list. Select ‘OPEN’ and then
click ‘Apply’.
• The UGA will automatically increase the pumping speed of the
roughing pump and turn on the bypass pump. It will then open the
bypass valve rst and open the sample valve in sequence.

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UGA Series Universal Gas Analyzers
Quick Start xv
• The system will read approximately 1.5 Torr at the bypass line,
and 5 X 10-6 Torr for the mass spectrometer chamber if you use the
provided capillary.
• In the RGA software, start scan again by clicking the ‘GO’ but-
ton.
• The spectrum of air will be displayed, which can be compared to
the example below.

Stanford Research Systems
UGA Series Universal Gas Analyzers
Quick Startxvi

1 – 1
Chapter 1
UGA Basics
In This Chapter This chapter gives the fundamental information on
using the Universal Gas Analyzer (UGA) series.
1.1 Introduction . . . . . . . . . . . . . . . . 1–2
1.2 Conguration . . . . . . . . . . . . . . . 1–6
Front panel . . . . . . . . . . . . . . . 1–6
Rear panel . . . . . . . . . . . . . . . . 1–7
Top front components . . . . . . . . . 1–8
Top back components . . . . . . . . . 1–10
Boom components . . . . . . . . . . 1–10
Covers . . . . . . . . . . . . . . . . . . 1–12
Miscellaneous parts . . . . . . . . . . 1–12
1.3 Options & Sample Heater Accessory . . 1–13
Multiple inlet valve option . . . . . . 1–13
Vent valve option . . . . . . . . . . . . 1–13
Hydrogen pumping specied
Turbomolecular Pump option. . . . 1–14
Sample heater accessory . . . . . . . 1–14

Stanford Research Systems
UGA Series Universal Gas Analyzers
UGA Basics1 – 2
1.1 Introduction
Universal Gas Analyzer (UGA) series instruments are modern mass
spectrometers designed for the analysis of light gases. The three
systems, 100, 200 and 300, dier only in the mass range they can
detect. A quadrupole mass spectrometer (also called a residual gas
analyzer or RGA) performs the task of analyzing the gas.
The spectrometer operates at high vacuum and therefore, pumps
are required to draw the gas out of the instrument and maintain the
vacuum. A turbomolecular pump (TP) is commonly used to gen-
erate the high vacuum region (<10-5 Torr) required to operate the
ionizer and quadrupole of RGA. The inlet continuously samples
gases at low ow rates (several milliliters per minute) making the
instrument ideal for on-line analysis. Not only is data acquired
continuously (as opposed to batch sampling employed by gas chro-
matographs) but also very quickly. A change in composition at the
inlet can be detected in about 0.2 second. The system allows data
to be collected quickly - a complete spectrum can be acquired in
under one minute and individual masses can be measured at rates
up to 25 ms per point.
The SRS UGA systems enable many new applications where tradi-
tional mass spectrometers were too large and heavy. More recently,
a variety of applications for atmospheric sampling were developed
including fuel cell research, Freon detection, specialty gas produc-
tion monitoring, fermentation process monitoring, and catalysis
studies.
To accommodate atmospheric sampling, a pressure reduction
scheme is required. A two-stage pressure reducing inlet samples
gases at high pressure - from atmospheric pressure to a few Torr at
the rst stage and then to a mass spectrometer operating pressure
(about 10-6 Torr) at the second stage. In order to achieve this per-
formance, most commercially available systems employ a capillary
tube, pinhole, high vacuum pump (generally TP), and single back-
ing pump. The single backing pump performs double duty, evacu-
ating a bypass line (the rst stage) and backing the TP (the second
stage). The drawback to this architecture is that the bypass ow is
recombined with the sample ow at the backing pump, which al-
lows backstreaming through the TP. This backstreaming can cause
real problems for users measuring low molecular weight gases (e.g.
hydrogen, helium). When high concentrations of corrosive gases
are used, this backstreaming pathway also allows a higher fraction
of the corrosive gas to reach the RGA and TP. Exposure to corro-