Ulvac G-Tran Series User manual

No.SK00-9664-EI-003-00
I
Vacuum Gauge
Instruction Manual
G-TRAN series
Multi Ionization Gauge Sensor unit
Analog Output Type Model SH200-A
Serial Communication Type Model SH200-R
(Option)
(Option)
This manual is intended for products with serial numbers below or later.
SH200-A: S/N 00001～
SH200-R: S/N 00001～
Please read this manual before using this product and keep it in a
safe place so that you can use it at any time.
ULVAC,Inc. Components Division
https://www.ulvac.co.jp/en/

II
Before using this product
Thank you very much for purchasing our product.
When you receive the product, please check that the product you received is the
correct one, and check for any damages caused by transportation.
To ensure many years of use from the product, please read the instruction manual
and fully understand the safety precautions, specifications, and operating
instructions before installing, operating, inspecting, or servicing the product.
The copyright of the instruction manual belongs to ULVAC, Inc.
No part of the instruction manual may be copied without our permission.
Also, the instruction manual may not be disclosed or transferred to any third
party without our written consent.
Please note that the instruction manual contents are subject to change or
revision without any notice due to changes in specifications and improvement of
the product.
Safety symbol marks
This instruction manual uses the safety symbol marks as the warning indications for
the operator to understand the matters that must be observed. The terms of the
safety symbol marks are as follows:
*WARNING*
It indicates a hazardous situation that could cause death or serious
injury if the warning is ignored.
Ignoring this warning may cause serious damage to the operator's
life or the plant facilities (Also include this product).
*CAUTION*
It indicates a dangerous situation that could cause minor or
moderate injury when the caution is ignored.
Ignoring this caution may cause minor injury to the operator,
product damage, or situations that require product adjustment.

III
Safety precautions
To use the G-TRAN series sensor unit (hereinafter referred to as this unit) safely,
please be sure to read the instruction manual and the following safety precautions:
*WARNING*
Power shutoff
If this unit is damaged, shut off the power immediately. Failure to do so may
cause fire or electric shock.
*WARNING*
Power shutoff
If this unit generates abnormal heat, smoke, or unusual smells, shut off the
power immediately. Failure to do so may cause a fire.
*WARNING*
High-temperature warning
Do not touch the sensor unit during and immediately after the operation because
its surface is hot. Touching it may cause burns.
*WARNING*
Power supply voltage
Before turning on the power supply, make sure that this unit's operating voltage
and the power supply are correct. If the wrong power supply is connected, it may
damage this unit and the equipment connected to it or cause a fire. In particular,
do not apply a voltage exceeding DC28V. The overvoltage category is Category I.
*WARNING*
Power supply with lightning surge protection
Use a power supply with lightning surge protection.
If the power supply does not have lightning surge protection, it may damage this
unit and the equipment connected to it or cause a fire.
*WARNING*
Excess pressure in a vacuum chamber
Do not connect the sensor unit to a place where the pressure inside the sensor
unit exceeds the atmospheric pressure. If the pressure inside the sensor unit
exceeds the atmospheric pressure, the sensor unit may be damaged, or the sensor
unit may fly out from the connection, causing harm to the surrounding, including
the human. If the pressure inside the sensor unit exceeds the atmospheric
pressure, install an isolation valve to prevent the pressure inside the sensor
unit from exceeding the atmospheric pressure.
*WARNING*
Protective earth
This unit must be electrically connected to a grounded vacuum chamber. Use a
conductive metal clamp
for the NW flange. If failing to ground properly, it cannot
indicate the correct pressure. It may also damage this unit and the equipment
connected to it or cause a fire.
If insulation from the vacuum chamber is required, the case part (the shell part
of the D-sub connector) needs to be D-type-grounded (class 3).
*WARNING*
Operating environment (Condensation, Humidity)
Do not use this unit in a place where humidity is high, and condensation occurs
or where this unit is exposed to water. If water enters inside this unit, it may
cause a failure, electrical leakage, or fire.
Also, operating this unit outside the temperature range of the specification may
cause failure and fire.
*WARNING*
Turn off the power supply when replacing the sensor
Be sure to turn off the power supply when replacing the sensor unit. DC330V may
be applied to the grid, which may cause fire or electric shock.
*WARNING*
Disassembly is prohibited
Do not disassemble this unit. Disassembling this unite may cause fire or electric
shock. The operation is not guaranteed if the unit is disassembled.
*WARNING*
Modification is prohibited
Do not modify this unit. Modifying this unite may cause fire or electric shock.
The operation is not guaranteed if the unit is modified.

IV
*WARNING*
Check power supply polarity
Before turning on the power supply, ensure that the polarities of this unit's
operating voltage and the supply voltage are correct. If the wrong polarities are
connected, it may damage this unit and the equipment connected to it or cause a
fire.
*WARNING*
Turn on the power supply
Turn on the power supply after connecting all components, including the sensor
unit, displays, PLC(Programmable Logic Controller), cables. Failure to do so may
damage this unit and the equipment connected to it or cause a fire. Also, the
filament of the sensor unit may break.
*WARNING*
Condensation
Do not use this unit in a place where humidity is high, and condensation occurs
or where this unit is exposed to water. If water enters inside this unit, it may
cause a failure, electrical leakage, or fire.
*WARNING*
Foreign matters entering the sensor
Protect this unit from foreign matters such as metals and flammable materials
from entering through its opening. Foreign matters may damage this unit or cause a
fire.
*WARNING*
Check wiring
Make sure that the connection cable to each pin does not touch other pins or the
case. Also, be careful with the ping assignments. Incorrect wiring may damage this
unit and the equipment connected to it or may cause a fire.
*CAUTION*
Cable installation
Avoid installing cables close to or parallel to electric power lines, power
lines, high voltage lines, high-frequency lines. Doing so may cause malfunction.
*CAUTION*
Remote host with noise resistance
Use an isolation type with high noise resistance for remote hosts such as PCs
and PLCs. Otherwise, it may cause malfunction or failure.
*CAUTION*
Parts with life span
The electric circuit in this unit uses an aluminum electrolytic capacitor.
Generally, an aluminum electrolytic capacitor has a life span, and the higher the
ambient temperature, the shorter the life. To prevent damage to this unit, we
recommend that you have this unit serviced at our service site about once every
three years.

V
Revision history
Date
Number
Reason
2021/03/03 00 First edition

VI
Table of contents
BEFORE USING THIS PRODUCT .......................................II
SAFETY SYMBOL MARKS .............................................II
SAFETY PRECAUTIONS .............................................III
REVISION HISTORY .................................................V
TABLE OF CONTENTS ...............................................VI
1. DEDICATED APPLICATION ............... 1
2. SPECIFICATION ....................... 2
2.1. UNPACKING AND CHECKING ACCESSORIES..... 3
Accessories ................. 3
Items that need to be ordered
separately .......................... 3
2.2. SH200 STANDARD SPECIFICATIONS ........ 4
2.3. SH200 STAND-ALONE MODE STANDARD
SPECIFICATIONS ........................... 6
2.4. SWU COMBINATION MODE (SH200+SWU)
STANDARD SPECIFICATIONS .................... 6
2.5. SPU COMBINATION MODE (SH200+SPU)
STANDARD SPECIFICATIONS .................... 7
2.6. SAU COMBINATION MODE
(SH200+SWU/SPU+SAU) STANDARD SPECIFICATIONS 8
3. HANDLING PRECAUTIONS ................ 9
3.1. PRECAUTIONS ON OPERATING ENVIRONMENT ... 9
3.2. PRECAUTIONS ON POWER SUPPLY.......... 10
3.3. PRECAUTIONS ON INSTALLATION.......... 10
3.4. PRECAUTIONS ON OPERATION AND HANDLING.. 11
3.5. CHECK ITEMS IMMEDIATELY AFTER THE
OPERATION .............................. 11
4. NAME OF EACH PART AND ITS FUNCTION.. 12
4.1. CONTROLLER SECTION SH200-A/R ....... 12
4.2. PANEL SECTION SH200-A/R .......... 13
4.3. I/O CONNECTOR ANALOG OUTPUT TYPE SH200-
A ............................... 14
4.4. I/O CONNECTOR SERIAL COMMUNICATION TYPE
SH200-R .............................. 15
4.5. SWU/SPU I/O CONNECTOR............ 16
4.6. SAU I/O CONNECTOR .................17
5. POWER SUPPLY INTERNAL CIRCUIT ...... 18
6. EACH MODE SETTING（COMMON TO SH200-
A/R）.................................. 18
7. STATUS OF EACH LED ................. 19
7.1. POWER LED STATUS（COMMON FOR SH200-
A/R）................................19
7.2. SWU/SPU LED STATUS（COMMON FOR SH200-
A/R）................................19
7.3. SAU LED STATUS（COMMON FOR SH200-A/R）
................................19
7.4. POWER LED BLINKING STATUS（SH200-A
ONLY）................................19
8. CONTROL INPUT SIGNAL ............... 20
8.1. CONTROL INPUT SIGNAL (SH200-A ONLY) ..20
8.2. FIL ON/OFF SIGNAL.................21
8.3. FIL 1/2 SIGNAL....................21
8.4. DEGAS ON/OFF SIGNAL ...............22
9. MEASURED VALUE OUTPUT（COMMON TO SH200-
A/R）.................................. 23
9.1. PRESSURE CONVERSION FORMULA ..........23
9.2. SH200 STAND-ALONE MODE MEASURED VALUE
OUTPUT ................................23
9.3. SH200+SWU MEASURED VALUE OUTPUT......24
9.4. SH200+SPU MEASURED VALUE OUTPUT......25
9.5. SH200＋SWU(SPU)+SAU MEASURED VALUE
OUTPUT ................................26
9.6. SIMPLIFIED CONVERSION TABLE ..........27
9.7. BMR2 COMPATIBILITY OUTPUT（MODE SETTING

VII
9）............................... 28
Pressure conversion formula 28
10. CONTROL OUTPUT SIGNAL ............ 29
10.1. CONTROL OUTPUT SIGNAL (SH200-A
ONLY) ............................. 29
10.2. SERIAL COMMUNICATION OUTPUT SIGNAL
(SH200-R ONLY) ........................ 29
10.3. SENSOR ERROR SIGNAL (SH200-A ONLY) 30
SH200 stand-alone mode ... 30
SWU combination mode ..... 30
SPU combination mode ..... 30
SAU combination mode ..... 30
10.4. SETPOINT OPERATION SIGNAL (SH200-A
ONLY) ............................. 31
10.5. EMISSION VALID SIGNAL AND CONNECTION
CHECK SIGNAL (SH200-A ONLY) .............. 31
Emission valid signal
(SH200-A only) ..................... 31
Connection check signal
(SH200-A only) ..................... 31
Differences between mode
setting (SH200-A only) ............. 31
Filament power monitoring
signal (SH200-A only) .............. 31
11. SETPOINT SETTING (SH200-A ONLY) .. 32
11.1. OPERATING PRESSURE RANGE OF SETPOINT 32
11.2. SETPOINT ON/OFF PRESSURE......... 33
11.3. SETPOINT SETTING OF SH200-A ...... 33
12. FILAMENT POWER MONITORING SIGNAL . 33
12.1. HOW TO CHECK THE FILAMENT POWER
MONITORING SIGNAL ON SH200-R.............. 34
13. SAU ATMOSPHERIC PRESSURE ADJUSTMENT.
................................. 34
13.1. ATMOSPHERIC PRESSURE ADJUSTMENT OF
SH200-A ............................. 34
13.2. ZERO POINT ADJUSTMENT OF SH200-A.. 34
13.3. ADJUSTMENT OF SH200-R........... 34
14. SWU ATMOSPHERIC PRESSURE AND ZERO
POINT ADJUSTMENT........................ 35
14.1. ATMOSPHERIC PRESSURE ADJUSTMENT OF
SH200-A ..............................35
14.2. ZERO POINT ADJUSTMENT OF SH200-A ...35
14.3. ADJUSTMENT OF SH200-R............35
15. HOW TO USE SERIAL COMMUNICATION
（SH200-R）............................ 36
15.1. COMMUNICATION SPECIFICATIONS........36
15.2. SETTINGS .......................36
Connection Diagram ........36
Baud rate setting .........37
Address setting ...........37
Standard data format ......38
Command List ..............38
When the command is received
normally ..........................38
When the command is not
received normally ...................38
15.3. COMMAND ........................39
Reading measurement values
and status ..........................39
Writing status ............39
Reading status ............39
Checking errors ...........39
SAU/SWU/SPU atmospheric
pressure adjustment command .........39
SAU/SWU/SPU zero point
adjustment command ..................40
SAU/SWU atmospheric pressure
and zero point adjustment
initialization command ..............40
Checking the value of
filament power monitoring of SH200 ..40
Reading Software Version ..40
Reading Setpoint1 Value ...40
Reading Setpoint2 Value ...41
Writing setpoint1 value ...41

VIII
Writing setpoint2 value .. 41
Reading mode setting ..... 41
Writing mode setting ..... 41
Reading address setting .. 41
Writing address setting .. 42
Reading communication
speed ......................... 42
Writing communication
speed ......................... 42
Enabling checksum
confirmation ....................... 42
Disable checksum
confirmation ....................... 42
Checksum confirmation status
confirmation ....................... 42
Checksum ................. 43
15.4. STATUS SETTING LIST.............. 44
When writing status ...... 44
When reading status ...... 45
15.5. ASCII CODE TABLE ............... 47
16. REPLACEMENT OF SENSOR ............ 48
16.1. TOOL.......................... 48
16.2. REMOVING SENSOR ................. 48
16.3. INSTALLING SENSOR ............... 48
17. TROUBLESHOOTING .................. 49
17.1. TROUBLESHOOTING ................. 49
17.2. THE INTERNAL ELECTRODE DISCONNECTION
CHECK ............................. 53
17.3. INSULATION BETWEEN THE PIN AND THE CASE
OF THE SENSOR. .......................... 53
18. TECHNICAL REPORT ................. 54
18.1. MEASUREMENT PRINCIPLE ............ 54
18.2. TYPE OF MEASURING GAS AND SPECIFIC
SENSITIVITY COEFFICIENT ................... 54
19. WARRANTY ......................... 57
20. EC DECLARATION OF CONFORMITY ..... 59
21. CERTIFICATE OF CONTAMINATION ..... 60
22. DIAGRAMS ......................... 61
22.1. SH200-A/R AND SWU CONNECTION
DIAGRAM ..............................61
22.2. SH200-A/R,SWU AND SAU CONNECTION
DIAGRAM ..............................62
22.3. SH200-A/R DIMENSIONS ............63
22.4. SENSOR DIMENSIONS ................64
22.5. DISPLAY UNIT CABLE ...............65
22.6. UNIT CABLE GUC-200P .............66
22.7. UNIT CABLE GUC-200A .............67

1
1. Dedicated application
SH200 and ST200 series can check various settings and status using the dedicated
applications below.
Please refer to the application instruction manual for details.
・UL-MOBI_Windows (Supported OS: Windows 10 64bit or later)
・UL-MOBI_Andoroid (Supported OS: Android 6.0 or later)
Download: UL-MOBI_Android Google Play
UL-MOBI_Windows https://www.ulvac.co.jp/download/en/application/
UL-MOBI_Windows Instruction manual
https://www.ulvac.co.jp/download/en/application/
Function
Note
UL-MOBI
Windows
UL-MOBI
Android
DATA Check the pressure numerically and draw a
graph. △△
DATA LOG Pressure indication value LOG and CSV
output. ◎◎
SAMPLING Check and change the sampling cycle. ◎◎
FIL･DEGAS Display filament and DEGAS status. ◎◎
Pressure unit Change the pressure unit. ◎◎
SETPOINT 1/2/3 Check and change of setpoint. 〇〇
Baud rate Check and change of baud rate. ●●
Mode Check and change of mode. ●●
Address Check and Change of address. ●●
ATM point
adjust
Adjusts the atmospheric pressure of SAU
and SWU. ▲▲
Adjust clear Reset the zero point and atmospheric
pressure adjustment of SAU and SWU. ▲▲
Status Display errors. △△
New password Changes a password. ◎◎
◎：It can be checked and changed at any time
〇：It can be checked at any time. A password is required in order to change
when energized at 24V.
●：It can be checked at any time. It can be changed only when 24V is cut off.
△：It can be done only when energized at 24V.
▲：It can be done only when energized at 24V. A password is required.
※A password is required to change the settings, as careless setting change may cause
the failure of the vacuum system.
The password can be set to any four numbers.
※The software of this unit uses the pressure unit [Pa].
When changing the pressure unit on UL-MOBI, UL-MOBI converts the pressure unit to
[Pa] and writes it to this unit.
Please note that rounding errors may occur when converting units.

2
2. Specification
The Multi ionization gauge sensor unit SH200 is a vacuum gauge that can measure the
high vacuum pressure by connecting a dedicated sensor unit (B-A gauge type).
The following three types of interfaces are available. Users can select the
specification that best suits the communication protocol.
Analog output type : SH200-A (this manual)
Serial communication type : SH200-R (this manual)
EtherCAT communication type : SH200-E (separate manual)
(Hereinafter, SH200 refers to both SH200-A and SH200-R.)
By connecting an optional unit to SH200, SH200 can control each connected unit.
According to the unit connected, the three modes below are available to measure from
high vacuum to atmospheric pressure.
※SWU series is available in the Windows/Android-compatible【SWU10-U】and
RS-485 communication-compatible 【SWU10-R】. SWU written in this manual
is SWU10-R. SWU10-U cannot connect to SH200.
※SPU and SWU cannot operate at the same time.
※SAU cannot connect to SH200 without SPU or SWU.
10
-4
10
+3
10
+4
10
-8
10
-7
10
-6
10
-5
10
+5
SAUｺﾝﾋﾞﾈｰｼｮﾝﾓｰﾄﾞ
圧力ｾﾝｻﾕﾆｯﾄ(SAU)
＋SWU/SPU
＋SH200
10
-3
10
-2
10
-1
10
0
10
+1
10
+2
ﾓｰﾄﾞおよび構成
圧力(Pa)
SH200単体ﾓｰﾄﾞ
SH200のみ
SPU/SWUｺﾝﾋﾞﾈｰｼｮﾝﾓｰﾄﾞ
ﾋﾟﾗﾆｹﾞｰｼﾞ(SWU/SPU)
＋SH200
SH200
SAU
SH200
SPU
SWU
SH200
SPU
SWU
Mode and
configuration
SPU/SWU Combination
mode
Pirani gauge (SWU/SPU)
+ SH200
SAU Combination mode
Pressure sensor unit
(SAU)
+ SWU/SPU + SH200
Pressure (Pa)
S
H200 Stand-alone mode
SH200 only