Ulvac GP-1000G User manual

No. SK00-7011-EI-004-07
MODEL GP-1000G
(Pa/Torr)
PIRANI VACUUM GAUGE
INSTRUCTION MANUAL
This manual is for the following vacuum gauges.
Serial Nos.T7000G and higher
Read this manual before operation and
keep it at your hand for immediate reference.
ULVAC , Inc.

- i -
Prior to Use
Thank you for purchasing this ULVAC product.
Upon receipt of the product, verify that is the correct model ordered and that it has not been damaged
during transport.
Read this instruction manual before installing, operating, inspecting, or
maintaining the product and fully understand the safety precautions,
specifications and operating procedures regarding the product.
The copyright of this instruction manual is held by ULVAC, Inc.
You are prohibited from copying any portion of this instruction manual without
the consent of ULVAC Inc.
You are also prohibited from disclosing or transferring this instruction manual to
third parties without the express written consent of ULVAC Inc.
The contents described in this instruction manual are subject to change without
prior notice because of changes in specifications or because of product
improvements.
Safety Symbols
Safety symbols are used throughout this instruction manual to call the
operator's attention to safety. The terminology used in safety symbols is
classified below.
Indicate status of urgency of danger when failure to comply with DANGER
results in serious personal injury or death
The work ignoring this warning will lead to serious damage to human life or
factory facility (including this equipment) at a high probability.
Indicate status of danger when failure to comply with WARNING results in
serious worker’s injury or death.
The work ignoring this warning will cause possibility leading to serious
damage to human life or factory facility (including this equipment)
Indicate status of danger when failure to comply with WARNING results in
minor injury or moderate damage.
The work ignoring this warning will cause possibility leading to minor damage
to worker or breakage to equipment or necessary to adjust.
✔Note
Direct hazard is not existed, describe the necessity to know
from the viewpoint of worker’s safety or correct and safe operation of
equipment

- ii -
Safety Cautions
For safe use of this vacuum gauge, carefully read this manual and comply with the warnings and cautions
given in the manual.
Turn OFF power.
If the vacuum gauge fails, immediately turn OFF the power.
Use of a failed gauge may cause fire or electric shock. For repair, contact
your local ULVAC representative or ULVAC, Inc., JAPAN.
Turn OFF power.
If the vacuum gauge gets unusually hot or gives off smoke or unusual smell,
immediately turn OFF the power. Otherwise, fire can result. For safety,
contact your local ULVAC representative or ULVAC, Inc., JAPAN.
Turn OFF power.
Before touching any terminal on the control rear panel or if there is a
possibility of touching it, turn OFF the vacuum gauge power.
Turn OFF power.
Whenever mounting the gauge, unplug the power cable.
Check line voltage.
Prior to turning ON the power, make sure that the vacuum gauge operating
voltage and the supply voltage are in agreement. Connection of incorrect
power can cause damage to the vacuum gauge and fire.
Operating environment
Do not connect the sensor head to a test object of which pressure is in excess
of atmospheric pressure. If the pressure in the sensor head exceeds atmospheric
pressure, the sensor head will be damaged or it will pop out from the connector,
causing injury to the surrounding, including human body. If the pressure
exceeds atmospheric pressure, provide an isolation valve so that the pressure in
the sensor head does not exceed atmospheric pressure.
Don't use cables above rating.
The rating of the supplied power cable is 125 V 7 A. If the power exceeds
the rating, use another power cable. Use above the rating will damage the
gauge.
Don't disassemble.
Do not try to disassemble the vacuum gauge (controller, measuring unit,
sensor head cable and sensor head).
Don't modify.
Do not modify the vacuum gauge (controller, measuring unit, sensor head
cable and sensor head). If it is modified, its functions are not warranted.
Also fire or electric shock may result.
Check connection.
For safety reasons, ground the GND terminal of the controller.
Operating environment
Do not use the gauge in a place where it may be splashed with water. If it is
splashed with water, failure, earth leakage or fire can result.
Ventilation
Do not plug the air vents of the vacuum gauge controller. If the air vents are
plugged, heat will be contained inside and the gauge may be damaged. The
gauge will not indicate normal values either.
Keep out foreign matter.
If foreign matter like metal fragments or combustibles are admitted into the
vacuum gauge through the air vents or other openings, remove them.
Otherwise, the vacuum gauge may be damaged.

- iii -
Operating conditions
Operate the vacuum gauge under the environment set forth in the
specifications.
Beware of impact
Do not give an impact to the sensor head.
Repacking for transfer
If the vacuum gauge is to be shipped to other site, repack it in the same way as
on delivery. If the vacuum gauge is shipped bare, it may be damaged.
Discarding
When discarding the vacuum gauge, comply with your local regulations.
Please note that any product supplied by our company can be disused only at
the customer’s responsibility and expense. And, the product in the meaning of
this passage includes its appurtenances, annexed documents and / or media, etc.
attached to, as well as the product in itself.
Especially, a sensor head used in an atmosphere that can cause hazards to the
human body must be disposed of by a specialist in disposal.
Connection
The contact output capacity is 100VAC/0.5A, 24VDC/1A
(resistance load).
If power higher than this is opened/closed, do not use the contact of the vacuum
gauge, but use a large capacity switch in conjunction.
✔Note
Maintenance
Aluminum electrolytic capacitor and relays is used for the electric circuit in
the sensor controller
. Generally, the life expectancy of the aluminum
electrolytic capacity is limited and the higher the surrounding temperature, the
shorter the life. It is recommended to replace the aluminum electrolytic
capacitor and relays once every five years or at the time or repair or overhaul to
prevent components from being damaged.
✔Note
Lifetime of sensor head cable and connector
Female connector is used in the sensor head cable and detection unit. This
female connector has a lifetime. A large current load may cause a fire in the
connector connection area. Avoid the frequent insert/remove of connector to
prevent a heavy load and loosens of the connector connection.

- iv -
Contents
Page
Prior to Use.......................................................................................................................................... i
Safety Symbols..................................................................................................................................... i
Safety Cautions................................................................................................................................... ii
1. OVERVIEW............................................................................................................................... 1
1.1. Specifications....................................................................................................................... 1
1.2. Options................................................
エラー! ブックマークが定義されていません。
1.3. Description of Components.................................................................................................. 4
1.3.1. Front panel ................................................................................................................... 4
1.3.2. Rear panel..................................................................................................................... 5
1.3.3. LCD panel.................................................................................................................... 6
2. INSTALLING THE PIRANI VACUUM GAUGE.................................................................. 7
2.1. Preliminary Operation.......................................................................................................... 7
2.2. Installation............................................................................................................................ 7
2.2.1. Installing the controller ................................................................................................ 7
2.2.2. Installing the sensor head............................................................................................. 8
2.2.3. Electrical connection.................................................................................................... 9
2.2.4. A sensor head installation method to GP-H............................................................... 10
3. OPERATING PROCEDURE ................................................................................................. 11
3.1. Cautions in Handling.......................................................................................................... 11
3.2. How to Set the DIP Switch ................................................................................................ 12
3.3. Display of Pressure out of Measurement Pressure Range.................................................. 13
3.4. Relay Setpoint Output........................................................................................................ 14
4. EXTERNAL INPUTS/OUTPUTS.......................................................................................... 15
4.1. External Input/Output Connector Assignment................................................................... 15
4.2. BCD Output ....................................................................................................................... 16
4.3. Strobe Signal...................................................................................................................... 17
5. RECORDER OUTPUTS......................................................................................................... 18
5.1. Linear Output 1.0 ×10+3 Pa(1.0 ×10+1Torr)f.s.................................................................. 18
5.2. Linear Output 1.0 ×10+2 Paf.s. .......................................................................................... 19
5.3. Dummy Log Output Each Range 1V................................................................................. 20
5.4. Non-Linear Output............................................................................................................. 21
6. HOW TO USE COMMUNICATION (RS-232C).................................................................. 24
6.1. Specifications..................................................................................................................... 24
6.2. Connecting the Communication Cable .............................................................................. 24
6.3. Communication Commands............................................................................................... 25
6.4. Action................................................................................................................................. 25
7. APPENDIX............................................................................................................................... 26
7.1. Principles of Operation....................................................................................................... 26
7.2. Types of Gas Measured and Indication.............................................................................. 27
7.3. Change of Indication with Ambient Temperature.............................................................. 29
8. TROUBLESHOOTING........................................................................................................... 30
9. WARRANTY............................................................................................................................ 32
10. CE DECLATION OF CONFORMITY.............................................................................. 33
11. China RoHS Declaration ..................................................................................................... 34
12. Certificate of Decontamination........................................................................................... 35
13. RELATED DRAWINGS ..................................................................................................... 36

- 1 -
1. OVERVIEW
The Model GP-1000G is a constant temperature type Pirani vacuum gauge utilizing heat
conduction of gas. The measurable pressure range is 0.4 to 2700 Pa.
Pressure can be set at two points and its comparator output can be taken out as setpoint (transfer
type).
Also functional check of the sensor head can be made (the sensor head is not burnt out).
Digital output (BCD output) and RS232C are provided as standard.
The controller and measuring unit being separated from each other, it is not necessary to make
re-adjustment when the sensor head cable length is changed.
Changes in pressure indications due to change of the sensor head ambient temperature have been
reduced by incorporating a 2-point temperature compensation circuit.
1.1. Specifications
Name
Pirani vacuum gauge
Model
GP-1000G
Measurable range
4.0×10-1Pa
～
2.7×10+3Pa
（
3.0×10-3Torr
～
2.0×10+1Torr
）
Measurement point
One
Display
2 digits mantissa part, 1 digit exponent part
Display sampling time
200 msec
Measurement accuracy
4.0×10-1 Pa(3.0×10-3Torr)
～
1.0×10+1 Pa(7.6×10-2Torr) : ±50%
1.0×10+1 Pa(7.6×10-2Torr) ～5.1×10+1 Pa(3.8×10-1Torr) : ±30%
5.1×10+1 Pa(3.8×10-1Torr) ～7.6×10+2 Pa(5.7×10+0Torr) : ±15%
7.6×10+2 Pa(5.7×10+0Torr) ～1.0×10+3 Pa(7.6×10+0Torr) : ±30%
1.0×10
+3
Pa(7.6×10
+0
Torr)
～
2.7×10
+3
Pa(2.0×10
+1
Torr) : ±50%
Recorder output
(1) Linear output 1.0 ×10+3 Pa f.s. 0 to 10 V
(2) Linear output 1.0 ×10+2 Pa f.s. 0 to 10 V
(3) Dummy log output Each range 2 V
(4) Dummy log output Each range 1 V
(5) Non-linear output 0 to 10 V
BCD output
TTL level Open collector
Input signal
Ar/N2changeover input: TTL level
Output signal
Error signal, Setpoint signals(three)
Relay contact output (transfer type)
Relay load: 100VAC/0.5A, 24VDC/1A (resistance load)
Mechanical service life: 5million operations
Electrical service life: 100,000 operations
Communication
RS-232C
Sensor head inter-
changeability
Within ± 3% in filament resistance value
(sensor head of the same type)
Operating temperature
range
10°C to 40°C
Operating humidity range
15% to 80
％ （
No condensation
）
Power requirements
100 to 240 VAC
Power consumption
10 VA
Inrush Current AC100V: 25A or less / 2ms or less
AC200V: 20A or less / 2ms or less
Outside dimensions
50W ×238D ×99H (mm)
Weight
Controller : 1.0 kg
Measuring unit (GP-H) : 35g

- 2 -
CE standard
Tested Norms
EMC Emmission EN61000-6-4:2007
EN61326-1：2006
EN61000-3-2：2006
EN61000-3-3：1995 + A1: 2001 + A2:2005
Immunity EN61000-6-2:2005
EN61326-1：2006
Basic Standards
Electrostatic discharge immunity test (ESD)
EN61000-4-2：1995 + A1:1998 + A2:2001
Radiated, radio-frequency, electromagnetic field immunity test
EN61000-4-3：2006
Electrical fast transient / burst immunity test (BURST)
EN61000-4-4：2004
Surge immunity test (Surge) EN61000-4-5：2006
Immunity to conducted disturbances, induced by radio-frequency fields EN61000-4-6：
2007
Power frequency magnetic field immunity test
EN61000-4-8：1993 + A1:2001
Voltage dips, short interruptions and voltage variations immunity test
EN61000-4-11
：
2004
※
※During the test with 5000ms the EUT tune off and on automatically.
1.2. Standard Accessories
Power cable *1
This controller side：PLUG TYPE B
Outlet side
：
IEC60320-C13
3m long 1pc
Input/output connector
D-sub 37 socket (M2.6 screw)
1 pc
Quick manual
(This manual)
1 copy
Instruction manual
CD
1 pc
*1: The rating of the supplied power cable is 125 V 7 A. If the power exceeds the rating, use another
power cable. Use above the rating will damage the gauge.
1.3. Option
1.3.1. Sensor head
Sensor head
WP-01, WP-02, WP-03., WP-16
WPB-10, WPB-10-034
Connecting flange
WP-01:
φ
18 port, WP-02:
φ
15 port
WP-03:R3/8, WP-16(NW16)
WPB-10:UFC034
WPB-10-034:UFC034
Filament material
Pt
Pt
Other materials
BS/Ni-plating
Ni、Kovar、Glass、SnSbCu
SUS304
、
Cu(Gasket)
FeNiCo(Ni-plating)
、
Al2O3
Weight(g)
WP-01
：
about 26
、
WP-02
：
about 45
WP-03
：
about 63
、
WP-16
：
about 77
about 173
Internal volume(cm3)
WP-01
：
about 19
、
WP-02
：
about 17
WP-03
：
about 17
、
WP-16
：
about 22
about 18
Pressure max
※
1
< 2
×
10+5Pa(abs)
< 2
×
10+5Pa(abs)
Bakeout
※
2
80
℃
max
250
℃
max
*1:The breakdown pressure of the flange and clamp are to be considered otherwise.
*2:Bakeout temperature is a temperature of the sensor unit. Please remove the electronics(GP-H) or the
conversion cable(GP-BH).

- 3 -
1.3.2. Measuring unit
Measuring unit
GP-H
GP-BH
（
Conversion cable 2m
）
Sensor head
WP-01, WP-02, WP-03, WP-16
WPB-10, WPB-10-034
Weight 35g
GP-BH: 0.13kg
Conversion calbe: 0.2kg
*Because of its circuitry, the indication of this vacuum gauge varies with the type of sensor head.
Therefore, if the type of sensor head is changed after delivery, re-adjustment will be required. Before
operation, check the conditions at the time of shipment from the factory (type of sensor head) that
are indicated on the measuring unit.
1.3.3. Sensor head cable
Sensor head cable
2, 5, 10, 15, 20, 30, 50, 100m
Weight(kg)
0.2, 0.4, 0.7, 1.0, 1.3, 1.9, 3.9, 7.7
1.3.4. Others
Test results certificate
Calibration certificate
Calibration certificate, JCSS Calibration certificate

- 4 -
1.4. Description of Components
1.4.1. Front panel
Fig. 1-1 Front panel of controller
①LCD display panel
Pressure indicator.
Displays the indicated pressure value, unit of pressure, set pressure value of each setpoint and
relay status of each setpoint.
Refer to 1.3.3 "LCD panel" for more information.
②Setpoint ADJ.
Sets the pressure for pressure setting signal.
The setpoint relay action is described in 3.4 "Relay Setpoint Output".

- 5 -
1.4.2. Rear panel
Fig. 1-2 Rear panel of controller
③Sensor head cable connector
Connector for connecting the sensor head cable. Connect the supplied sensor head cable.
④Ground terminal
Ground terminal for this gauge. Attach M3 solderless terminal before use. Analog ground,
digital ground and frame ground are common.
⑤Power inlet connector
Connector for connecting 3-core power cord with grounding terminal.
Don't use cables above rating.
The rating of the supplied power cable is 125 V 7 A. If
the power exceeds the
rating, use another power cable. Use above the rating will damage the gauge.
Check line voltage.
Prior to turning ON the power, make sure that the vacuum gauge operating
voltage and the supply voltage are in agreement. Connection
of incorrect
power can cause damage to the vacuum gauge and fire.
Check connection.
For safety reasons, ground the GND terminal of the controller.
⑥Input/output signal connector
Recorder outputs, relay setpoint outputs (setpoint), BCD outputs and Ar/N2changeover inputs
are outputted from this connector.
Refer to Table. 4-1 "I/O Connectors" for more information.

- 6 -
1.4.3. LCD panel
⑥
②
⑤
N2Pa
SET 2
SET 3
SET 1
①
③
④
X10
Fig. 1-3 LCD panel
①Unit of pressure
Indicates the measured pressure in Pa or Torr.
②Pressure mantissa part
Indicates the mantissa part of the measured pressure.
③Pressure exponent part
Indicates the exponent part of the measured pressure.
④Setpoint pressure set value
Indicates the pressure set value of each setpoint.
⑤Setpoint relay status
Indicates the relay status of each setpoint.
When the setpoint relay is actuated, a frame will be displayed around "SET□".
⑥N2/Ar gas display
Indicates N2or Ar.
Refer to 3.2 "How to Set the DIP Switch" for changeover.

- 7 -
2. INSTALLING THE PIRANI VACUUM GAUGE
Turn OFF power.
Whenever mounting the vacuum gauge, unplug the power cable.
2.1. Preliminary Operation
• Unpack the vacuum gauge and check quantities.
• Check components for possible damage.
2.2. Installation
2.2.1. Installing the controller
Ventilation
Do not plug the air vents of the vacuum gauge controller. If the air vents are
plugged, heat will be contained inside
and the gauge may be damaged. The
vacuum gauge will not indicate a normal value either.
Keep out foreign matter.
If foreign matter like metal fragments or combustibles are admitted into the
vacuum gauge through the air vents or other openings, remove t
hem.
Otherwise, the vacuum gauge may be damaged.
Operating environment
Do not use the vacuum gauge in a place where it may be splashed with water.
If it is splashed with water, failure, earth leakage or fire can result.
Check connection.
For safety reasons, ground the GND terminal of the controller.
Fig. 13-1 shows the panel cut drawing.
If the controllers are mounted side by side, provide a spacing 30mm between controllers.
Secure a space for cable connection on the batch.

- 8 -
2.2.2. Installing the sensor head
Operating environment
Do not connect the sensor head to a test object of which pressure is in excess of
atmospheric pressure. If the pressure in the sensor head exceeds atmospheric
pressure, the sensor head will be damaged or it will pop out from
the connector,
causing injury to the surrounding, including human body. If the pressure
exceeds atmospheric pressure, provide an isolation valve so that the pressure in
the sensor head does not exceed atmospheric pressure.
Beware of impact
Do not give an impact to the sensor head.
Install the sensor head to the vacuum gauge port of a vacuum system.
(1) Measuring position
• This gauge measures the static pressure in the position where the sensor head is connected.
If there is gas flow or an outgas source or an intense electron or ion generating source, the
measurement value will be affected. So select the measuring position carefully.
Note that if the sensor head is subjected to vibration, heat radiation, high intensity
magnetic field or intense radiation, correct pressure measurement may not be made.
• Because of its principles of operation, the Pirani vacuum gauge indication is affected by
the ambient temperature of the sensor head. Be careful that the ambient temperature
deviates considerably from the calibrating temperature (about 25°C).
(2) Installing the sensor head
• Install the vacuum gauge in such a manner that the sensor head mounting opening plane is
parallel with gas flow. See to it that gas does not enter the sensor head in the form of
beam.
• The vacuum gauge filament is as thin as 25 microns in diameter. Avoid use in a place
where vibration is at a high level, if possible. Be careful in selecting the installation
place and handling the sensor because major cause of filament burnout is mechanical
impact.
Be careful in selecting the place of installation and in handling.
• To install the sensor head, use an O-ring that releases little outgas.
Use of a materiel that releases much outgas like rubber pipe or grease can be a cause of
error.

- 9 -
2.2.3. Electrical connection
Don't use cables above rating.
The rating of the supplied power cable is 125 V 7 A. If the power exceeds the
rating, use another power cable. Use above the rating will damage the vacuum
gauge.
Check line voltage.
Prior to
turning ON the power, make sure that the vacuum gauge operating
voltage and the supply voltage are in agreement. Connection of incorrect
power can cause damage to the vacuum gauge and fire.
Check connection.
For safety reasons, ground the GND terminal of the controller.
Operating conditions
Operate the vacuum gauge under the environment set forth in the
specifications.
Make electrical connection after installing components.
Fix the cable by taking care not to exert undue force to the connection between the sensor head and
sensor head cable and the connection between the controller and sensor head cable.
Lay the sensor head cable away from power lines, if possible. Noise may occur.
Moving the sensor head cable will generate frictional electricity between conductor and insulator,
which can cause an error at a low pressure.
Avoid installation of the vacuum gauge in a high temperature or high humidity place.
Securely fasten the connector fixing screw.
Plug the power cable to a 100 VAC outlet.
CONTROLLER GP-1000G
POWER CALBE
SENSER HEAD CALBE
MEASURING
UNIT
GP-H
SENSER
HEAD
(WP-01)
MEASURING UNIT
SETSCREW
MEASURING
UNIT
GP-BH
SENSER
HEAD
(WPB-10-
034)
CONVERSION
CABLE
GP-BH
Fig. 2-1 GP-1000G overall connection diagram

- 10 -
2.2.4. A sensor head installation method to GP-H
Screw for fixation
The installation methods of a screw for fixation are different by a sensor head.
①Install a screw for fixation that is
attached to GP-H to a sensor head.
By the kind of the sensor head,
installation methods are different
For sensor head WP-01, 02
For sensor head WP-03, 16
It is inserted a screw
for fixation by the
vent side of the
sensor head.
②
Tighten a screw for
fixation in the main body of
GP-H, and please fix it.
Insert a screw for fixation from the
connector side of the sensor head.
Please insert it diagonally like a figure.

- 11 -
3. OPERATING PROCEDURE
3.1. Cautions in Handling
(1) Start measurement more than one minute after power is turned ON and the indication is
stabilized.
(2) The relay set point sometimes actuated in a moment after three seconds when power is turned
ON.
(3) For precision measurement, wait for at least 10 minutes until temperature equilibrium of the
sensor head is established after power is turned ON. Do not turn OFF the power when a
sequence of measurements is being made.
(4) If the sensor head is exposed to a chemically active gas or highly adsorptive gas, its
characteristics may change.
In such a case, fill the chamber with nitrogen or inert gas, with the sensor head energized with
power, and then evacuate it. Repeat this purging operation. The sensor head may be
restored to the condition before the characteristics changed. At this time, do not blow gas
toward the opening plane of the sensor head even if the gas is inert or dry air.
If there is no prospect of the characteristics being restored by purging operation, replace the
sensor head.
(5) The Pirani vacuum gauge is sensitive to all types of gas, but its sensitivity varies with the
type of gas.
Refer to 7.2 "Types of Measured Gas and Indications".

- 12 -
3.2. How to Set the DIP Switch
JSW1
:
Sets the unit of pressure,Pa or Torr. The pressure display changes simultaneously
with the changeover, allowing direct reading of the pressure.
“ON”: Torr “OFF”: Pa
JSW2
:
N
2
/Ar gas setting switch.
"ON" : N2gas sensitivity "OFF": Ar gas sensitivity.
JSW3
:
Sets each range 2V or 1V of dummy log output.
"ON" : each range 2V "OFF": each range 1V
* This setting is not related in the linear output, the non-linear output.
JSW4
:
Sets the full scale of linear output, dummy log and non-Linear output
*Sets the full scale of linear output
"ON": 1.0 ×103Paf.s. "OFF": 1.0 ×102Paf.s.
*Sets dummy log output or non-linear output
"ON": dummy log output "OFF": non-linear output
JSW5
:
Sets dummy log output/non-linear output/linear output of recorder output.
"ON" : dummy log output or non-linear output "OFF": linear output
JSW6, 7
:
Sets the baud rate of RS-232C.
JSW8
:
Used in system setting. Used on OFF.
Table. 3-1 Setting dip switch
JSW
ON
OFF
1
Torr
Pa
2
N2
Ar
3
Each range 2V of dummy log
Each range 1V of dummy log
4
Linear output 1.0
×
10+3 Pa f.s.
Linear output 1.0
×
10+2Pa f.s.
Dummy log output
Non-Linear output
5
Dummy log output
or Non-Linear output
Linear output
6
7
See the table below
8
–
–
Table. 3-2 Setting recorder output
JSW
Each range 2V
Dummy LOG
output
Each range 2V
Dummy LOG
output
Non-Linear
output Linear output 1.0×10+3Pa f.s. Linear output
1.0×10+2Pa f.s.
3
ON
OFF
-
-
-
4
ON
ON
OFF
ON
OFF
5
ON
ON
ON
OFF
OFF
*: JSW3 is only dummy log output.
Table. 3-3 Setting baud rate for RS-232C
Baud rate(bps)
JSW
9600
4800
2400
1200
6
OFF
OFF
ON
ON
7
OFF
ON
OFF
ON

- 13 -
Table. 3-4 Factory set as shown above
ON
側
↑
1
2
3
4
5
6
7
8
3.3. Display of Pressure out of Measurement Pressure Range
(1) Pressure out of the measurement pressure range is displayed as follows.
1) When pressure is lower than 4.0 ×10-1 Pa : Displayed as 0.0 ×10-1 Pa
2) When pressure is higher than 2.7 ×03Pa : Blinks at 2.7 ×103Pa
(2) The following display appears if the sensor head filament burns out.
Pressure indicator corresponding to the burnt-out sensor head blinks at E.E ×10E.

- 14 -
3.4. Relay Setpoint Output
3.4.1. Setpoint
The setpoint relay output is actuated (reversed) when the measured pressure value is lower than
the set pressure value.
What is meant by "Pressure is higher or lower" is as follows.
2.0 ×101[Pa] is lower than, or
8.0 ×101[Pa] is higher than
5.0 ×101[Pa].
The table below gives the relay action.
Table. 3-5 Setpoint relay setpoint output table
Power Measured pressure(Pa) Set pressure(Pa)
Relay setpoint output
COM-NC
COM-NO
OFF
CLOSE
OPEN
ON
2.0 ×10+1
5.0 ×10+1
OPEN
CLOSE
ON
8.0 ×10+1
5.0 ×10+1
CLOSE
OPEN
When the setpoint relay is actuated, a frame is displayed around "SET" on the LCD display
panel.
Normally
When actuated
SET1 5.0 ×10+1 SET1 5.0 ×10+1
* The relay setpoint is not actuated for about three seconds after power is turned ON even if the
measured pressure is lower than the set pressure. But after three seconds, the relay setpoint is
actuated in a moment.
* The relay setpoint is not actuated under setpoint adjustment, and just after adjustment.
3.4.2. Error
The error relay setpoint output is actuated (reversed) when the sensor head filament has burnt
out.
The table below gives the relay action.
Table. 3-6 Error Relay Setpoint Outputs
Power Sensor head filament
Relay setpoint output
COM-NC
COM-NO
OFF
CLOSE
OPEN
ON
Burnout
OPEN
CLOSE
ON
Normal
CLOSE
OPEN
The relay setpoint is not actuated for about three seconds after power is turned ON even if the
sensor head filament has burnt out.

- 15 -
4. EXTERNAL INPUTS/OUTPUTS
4.1. External Input/Output Connector Assignment
Pa/Torr, N2/Ar can be changed over by external inputs.
Refer to Table. 4-1 "I/O Connectors" for the input terminals.
For changeover, input TTL level Lo/Hi or relay setpoint SHORT/OPEN.
For external changeover of Pa/Torr, turn OFF JSW1 of the DIP switch.
For external changeover of Ar/N2, turn OFF JSW2 of the DIP switch.
For exchange of external signals is used the OUTPUT connector on the rear panel.
Table. 4-1 I/O Connectors
Pin No.
Signal
PinNo.
Signal
1
REC OUT (+)
20
REC OUT (–)
* 2
Ar/N2(INPUT)
21
Mantissa part A 1 (OUTPUT)
• N2Lo/SHORT
22
Mantissa part A 2 (OUTPUT)
• N2Hi/OPEN
23
Mantissa part A 4 (OUTPUT)
3
24
Mantissa part A 8 (OUTPUT)
4
GND
25
Mantissa part B 1 (OUTPUT)
5
Symbol +/– (OUTPUT)
26
Mantissa part B 2 (OUTPUT)
• + Lo
27
Mantissa part B 4 (OUTPUT)
• – Hi
28
Mantissa part B 8 (OUTPUT)
6
Strobe
29
RS-232C SD
7
Exponent part C 1 (OUTPUT)
30
RS-232C RD
8
Exponent part C 2 (OUTPUT)
31
9
Exponent part C 4 (OUTPUT)
32
SETPOINT-1 NO
10
Exponent part C 8 (OUTPUT)
33
SETPOINT-1 COM
11
34
SETPOINT-1 NC
12
35
ERROR NO
* 13
Pa
／
Torr
・Torr Lo/SHORT
・
Pa Hi/OPEN
36
ERROR COM
14
SETPOINT-2
NO
37
ERROR NC
15
SETPOINT-2 COM
16
SETPOINT-2
NC
17
SETPOINT-3
NO
18
SETPOINT-3
COM
19
SETPOINT-3
NC
* Pa/Torr, Ar/N2changeover function is effective only when the DIP switch is OFF.
Refer to 3.2 "How to set the DIP Switch".