Ulvac SWU10-U User manual

SK00-9662-EI-103-00
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Vacuum Gauge
Instruction Manual
Smartphone-Direct Pirani Vacuum Gauge
SWU10-U
This instruction manual describes the serial numbers after
the following numbers.
SWU10-U：S/N 00001～
Please be sure to read this before using this product.
Also, please keep it in a safe place so that you can use it
at any time.
ULVAC, Inc. Components Division
https://www.ulvac.co.jp/en/

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Before using this product
Thank you for purchasing our product.
When you receive this product, first check that it is the same as your order and that
it is not damaged by transportation.
In order to use this product for a long time, please be sure to read this instruction
manual before installing, operating, inspecting, or servicing this product, and
matters related to safety precautions, specifications and operation methods of this
product. Please fully understand.
The copyright of the instruction manual belongs to ULVAC, Inc.
It is prohibited to copy any part of the instruction manual without our consent.
In addition, it is prohibited to disclose or transfer the instruction manual to a
third party without the written consent of our company.
Please note that the contents of the instruction manual are subject to change or
revision
without notice due to changes in product specifications or product
improvements.
Saftety symbol marks
The warning display in this instruction manual contains a symbol mark for safety so
that you can understand the matters to be observed. The words u
sed for the symbol mark
are used properly as follows.
*WARNING*
Failure to follow this warning indicates a dangerous situation that
could result in death or serious injury.
Work that ignores this warning part may cause serious damage to the
life of the worker or factory equipment (including this product).
*CAUTION*
Indicates a risk situation that could result in minor or moderate
injury if this caution is not followed.
If you ignore this caution, you may cause minor injuries to the
operator, or you may break the equipment or make adjustments.
Note
Although there is no direct danger, it describes what you need to know
for the safety of the operator or for the correct and safe use of the
device.

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Safety precautions
Please be sure to read the instruction manual and the following safety precautions in
order to use the Smartphone-direct pirani vacuum gauge SWU10-U (hereinafter referred
to as "this unit") safely.
*WARNING*
Repair
For repairs, etc., contact the place of purchase, our company, or the
network destination described in the instruction manual.
*WARNING*
Power cut off
If the instrument is damaged, turn off the power immediately.
Continued use may cause fire or electric shock.
*WARNING*
Power cut off
If this unit generates abnormal heat, emits smoke, or has a strange
odor, turn off the power immediately. Continued use may cause a fire.
*WARNING*
Power supply voltage
Before turning on the power, check that the working voltage of this
unit and the power supply are correct. Connecting the wrong power
supply may damage this unit and the devices connected to this unit, or
cause a fire. In particular, do not apply a voltage exceeding DC30V.
The overvoltage category is categoryI.
*WARNING*
Protective ground
Be sure to electrically connect this unit to a grounded vacuum
chamber. Use a conductive metal clamp for the NW flange. If it is not
grounded properly, not only will it not show the correct pressure, but
it may also damage this unit and the equipment connected to it, or
cause a fire.
If insulation with the vacuum chamber is required, ground the case
part (D-sub connector shell part) to D type (3types).
*WARNING*
Wiring confirmation
Make sure that the connection cable to each pin does not come into
contact with other pins or cases. Also, be careful not to make a
mistake in the pin sign. Incorrect connection may cause damage to this
unit and the devices connected to this unit, or cause a fire.
*WARNING*
Check power polarity
Before turning on the power, check that the polarities of the working
voltage and supply voltage of this unit match. Connecting the wrong
polarity may cause damage to this unit and the equipment connected to
this unit, or cause a fire.
*WARNING*
Excessive pressure in the vacuum chamber
Do not connect to a place where the pressure inside the sensor
exceeds atmospheric pressure. If the pressure inside the sensor
exceeds atmospheric pressure, the sensor will be damaged and the
sensor will pop out from the connection and cause harm to the
surroundings including the human body. When the pressure exceeds the
atmospheric pressure, install an isolation valve so that the pressure
inside the sensor does not exceed the atmospheric pressure.

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*WARNING*
Disassembly prohibited
Do not disassemble this unit. It may cause a fire or electric shock.
If disassembled, the operation cannot be guaranteed. For SWU10-U,
attaching and detaching the sensor is also disassembly.
*WARNING*
No modification
Do not modify this unit. It may cause a fire or electric shock. If
you modify it, we cannot guarantee its operation.
*WARNING*
Usage environment
Use this instrument within the environment specified in the
specifications.
*WARNING*
Usage environment (condensation, humidity, temperature)
Do not use it in a place where this unit is exposed to water or where
the humidity is high and condensation occurs. If water gets inside
this unit, it may cause a malfunction, electric leakage, or fire.
Also, using it outside the specified temperature range may cause a
malfunction or fire.
*CAUTION*
Precautions when laying cables
When laying a communication transmission line in a device, make sure
that the wiring is not close to or parallel to the power line, power
line, high voltage line, high frequency line, etc. It may cause a
malfunction.
*CAUTION*
Ensuring ventilation
Do not put the instrument in a closed container, and be sure to
install it in a well-ventilated place. If sealed, the temperature of
the electronic components inside the power supply will rise, which may
shorten the service life.
*CAUTION*
Usage environment
When exposed to chemically active gas such as halogens and halogen-
based gases, problems such as disconnection of filaments and changes
in pressure characteristics occur. When using in such an environment,
install an isolation valve between this unit and the vacuum chamber to
protect it from exposure to these gases as much as possible.
*CAUTION*
Usage environment
When exposed to accumulated gas such as rotary pump oil mist and CVD
(Chemical Vapor Deposition) raw material gas, problems such as
disconnection of filaments and changes in pressure characteristics
occur. When using in such an environment, install an isolation valve
between this unit and the vacuum chamber, and seal the isolation valve
so that it is not exposed to these gases as much as possible.
*CAUTION*
Moisture and deposits
If there are many deposits that gradually evaporate, such as water
and organic matter, in the sensor, it will affect the pressure
accuracy and response speed on the zero point side. Please consider
the installation location and method so that deposits do not adhere.
*CAUTION*
Influence of magnetic field
Due to the influence of a magnetic field of 0.01T (100G), the
pressure indication on the atmospheric pressure side is affected by
about 10%. If this unit is affected by a magnetic field, install a
magnetic shield.

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*CAUTION*
Temperature fluctuation
According to the measurement principle of pirani vacuum gauge, the
ambient temperature of the sensor affects the measured value. If the
ambient temperature deviates significantly from the temperature at the
time of calibration (about 25℃), adjust the atmospheric pressure and
zero point.
*CAUTION*
Foreign matter intrusion
Protect the inside of this unit and sensor from the openings of
foreign matters such as metals and flammable materials. It may damage
the equipment or cause a fire.
*CAUTION*
Gas species dependence
The pressure value and accuracy of this unit differ depending on the
type of gas to be measured. The accuracy of this unit is when
measuring nitrogen gas, so be careful not to exceed the pressure when
using gas other than nitrogen.
*CAUTION*
Check for pressure indication
Immediately after starting use, check the pressure indication,
especially the pressure on the atmospheric pressure side and the zero
point side. If necessary, adjust the atmospheric pressure and zero
point.
Due to the principle of pirani vacuum gauge, the pressure indication
is affected by the environmental temperature. In addition, there is a
possibility that the atmospheric pressure and zero point adjustment
will shift due to vibration during transportation.
*CAUTION*
Lifetime parts
An aluminum electrolytic capacitor is used for the electric circuit
inside this unit. Generally, aluminum electrolytic capacitors have a
limited life, and the higher the ambient temperature, the shorter the
life. To prevent damage to the equipment, we recommend that you
perform maintenance about once every three years.
*CAUTION*
Impact
Do not give a shock to this unit. The impact may cause the filament
to disconnection, the sensor to leak, or the mounting part to be
damaged.
*CAUTION*
Shipping packing
When transporting this unit, return it to the factory default state.
It may be damaged if shipped unpacked or attached to the device.
*CAUTION*
Waste
When disposing of this unit, dispose of it according to the
regulations of each local government. In particular, the sensor used
in an atmosphere that may pose a danger to the human body should be
processed through a professional processor.
Customers are responsible for the cost of disposal.

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Revision history
Date
Number
Reason
2022/12/14 00 First edition

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Contents
BEFORE USING THIS PRODUCTS........................................ II
SAFETY SYMBOL MARKS............................................... II
SAFETY PRECAUTIONS................................................III
REVSION HISTORY................................................... VI
CONTENTS..........................................................VII
1. SPECIFICATION ....................... 1
1.1. UNPACKING AND QUANTITY CHECK.......... 1
Included items .............. 1
Items that need to be ordered
separately .......................... 1
1.2. SWU10-U STANDARD SPECIFICATIONS ...... 2
2. HANDLING PRECAUTIONS ................ 4
2.1. PRECAUTIONS ON OPERATING ENVIRONMENT ... 4
2.2. PRECAUTIONS ON POWER SUPPLY........... 5
2.3. PRECAUTIONS ON INSTALLATION OF THIS UNIT 5
2.4. PRECAUTION ON USAGE ................. 7
2.5. CHECK ITEMS IMMEDIATELY AFTER THE START OF
USE ................................ 7
3. NAME OF EACH PART AND EXPLANATION OF
FUNCTION................................. 8
3.1. SWU10-U ......................... 8
4. ZERO POINT ADJUSTMENT AND ATMOSPHERIC
PRESSURE ADJUSTMENT...................... 9
4.1. ADJUSTING METHOD ................... 9
Zero point adjustment ....... 9
Atmospheric pressure
adjustment .......................... 9
4.2. ADJUSTMENT CLEAR .................. 10
4.3. MEMORY FUNCTION ................... 10
5. HOW TO USE UL-MOBI ................. 11
5.1. FUNCTION......................... 11
5.2. UL-MOBI FOR ANDROID .............. 12
Usage condition ............ 12
Download/install ........... 12
How to use ................. 13
5.3. UL-MOBI FOR WINDOWS .............. 15
Usage condition ............ 15
Download/install ........... 16
How to use ................. 16
5.4. STATUS COMMENT ................... 19
6. TROUBLESHOOTING .................... 20
6.1. TROUBLESHOOTING ................... 20
7. TECHNICAL REPORT ................... 22
7.1. GAS SPECIE/HUMIDITY DEPENDENCE ........22
7.2. ZERO POINT ADJUSTMENT AND ATMOSPHERIC
PRESSURE ADJUSTMENT .......................23
7.3. SCHEDULED ADJUSTMENT ................24
8. WARRANTY ............................25
9. EC DECLARATION OF CONFORMITY ........27
10. UK DECLARATION OF CONFORMITY ......28
11. CERTIFICATE OF DECONTAMINATION ....29
12. DRAWINGS ..........................30
12.1. SWU10-U DIMENSIONS ..............30
12.2. SWU10-U DIMENSIONS ..............31

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1. Specification
Pirani vacuum gauge SWU10-U is a vacuum gauge that can measure pressure in low vacuum.
The SWU10-U is a vacuum gauge that connects to an Android/Windows devices and uses
the Android/Windows application "UL-MOBI" for measurement.
The I/O connector of SWU10-U uses USB2.0 Micro-B, and it connects with
Android/Windows devices using USB cable. In addition to data communication, the USB
cable also supplies power, so low-vacuum pressure measurement is possible with only
the SWU10-U, Android/Windows devices, and USB cable.
※SWU10-U is not covered by the warranty if the sensor is attached or detached.
※Android/Windows devices and USB cables are not included.
※Some Android devices may not work properly.
※UL-MOBI for Windows requires a device driver installation.UL-MOBI can be started
if the device driver is not installed, but Windows cannot recognize the
connection even if the SW100 is connected to the Windows device with a USB
cable. (Unknown device is displayed in the device manager.) If UL-MOBI does not
work on a Windows device, check Section 5.3.2 3) and install the device driver.
1.1. Unpacking and quantity check
When the product arrives, immediately unpack it and check the product.
Please check if there is any damage during transportation and if the accessories are
attached in just proportion.
Included items
Pirani vacuum gauge SWU10-U 1pc.
Quick manual (regular paper) 1copy
Items that need to be ordered separately
① USB cable USB Type-C－Micro-B 2.0m
(MPA-CMB20NBK)
Calibration
certificate
General calibration test report
JCSS calibration certificate
Inspection report
Traceability
certificate
①

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1.2. SWU10-U standard specifications
Name Smartphone-Direct Pirani Vacuum Gauge
Type SWU10-U
Sensor part 1pc
Applicable flange NW16, NW25, R1/8, φ15tube, φ18tube, CF16, sanitary
Measurement
pressure range (N2)
5.0×10-2 Pa to 1.0×10+5 Pa
Measurement
accuracy（N2）
5×10
-2
Pa to 1×10
-1
Pa: ±20%
1×10-1 Pa to 1×10+4 Pa: ±10%
1×10+4 Pa to 1×10+5 Pa: ±20%
※The accuracy after atmospheric pressure and zero point
adjustment. Please carry out atmospheric pressure and zero
point adjustment before use especially. Moreover, since
calibration gas is N2, when other gas is measured, be
careful of an error of measurement.
Repeatability 1×10-1 Pa to 1×10+4 Pa: ±2%
Measuring gas type Indicated pressure as sensitivity to N2gas
Sampling time 5times in 60msec moving average
Adjustment Zero point/atmospheric pressure adjustment
adjustment clear
Measured value
output
Output by serial communication
※Dedicated application UL-MOBI (Android/Windows compatible)
is required.
Sensor part
material
Filament: Pt
Others : SUS304 (saintary: SUS316L/Ra<0.5), FeNiCo, Ni,
Au, Glass, Ceramic
Sensor part
breaking pressure
2.0×10+5Pa (absolute pressure)
※Please consider the breaking pressure of flanges and clamps
separately.
Operating
temperature range 10℃to 40℃
Operating humidity
range 15% to 80% (no condensation)
Storage
temperature -20℃to 65℃ (no energization, no condensation)
Mounting position Free
IP protection
class IP30
Power supply
voltage
DC5V±5% 350mAMAX
※Power is supplied from the Android/Windows devices via a
USB cable.
Corresponding
standard CE standard, UKCA standard

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I/O connector
USB2.0 Micro-B
※USB2.0 Micro-B can only be used for communication using UL-
MOBI.
USB cable
specification Data communication compatible, 5m or less
Dimension etc. NW16 NW25 R1/8 φ15tube φ18tube CF16 sanitary
Dimension φ46mm
H81mm
φ46mm
H83mm
φ46mm
H101mm
φ46mm
H100mm
φ46mm
H118mm
φ46mm
H100mm
φ50.4mm
H86mm
Weight(approx.) 87g 90g 86g 72g 85g 102g 137g
Sensor part
inner volume 7.3cm37.8cm37.6cm310.0cm313.9cm311.3cm3
8.2cm3