Ulvac SPU User manual

No.SK00-9657-EI-003-01
G-TRAN
Series
Pirani Vacuum gauge
Measuring Unit SPU
Instruction Manual
Components Division,
ULVAC, Inc.
http://www.ulvac.co.jp/
This manual is for this unit units of the
following serial numbers:
S/N:00001 and higher.
Read this manual before operation and keep it at
hand for immediate reference.

I
Prior to Use
Thank you for purchasing this ULVAC product.
Upon receipt of the product, verify that is the correct model ordered and that it has not been damaged
during transport.
Read this instruction manual before installing, operating, inspecting, or
maintaining the product and fully understand the safety precautions,
specifications and operating procedures regarding the product.
The copyright of this instruction manual is held by ULVAC, Inc.
You are prohibited from copying any portion of this instruction manual without
the consent of ULVAC Inc.
You are also prohibited from disclosing or transferring this instruction manual to
third parties without the express written consent of ULVAC Inc.
The contents described in this instruction manual are subject to change without
prior notice because of changes in specifications or because of product
improvements.
Safety Symbols
Safety symbols are used throughout this instruction manual to call the
operator's attention to safety. The terminology used in safety symbols is
classified below.
Indicate status of urgency of danger when failure to comply with DANGER
results in serious personal injury or death
The work ignoring this warning will lead to serious damage to human life or
factory facility (including this equipment) at a high probability.
Indicate status of danger when failure to comply with WARNING results in
serious worker’s injury or death.
The work ignoring this warning will cause possibility leading to serious
damage to human life or factory facility (including this equipment)
Indicate status of danger when failure to comply with WARNING results in
minor injury or moderate damage.
The work ignoring this warning will cause possibility leading to minor damage
to worker or breakage to equipment or necessary to adjust.
✔Note
Direct hazard is not existed, describe the necessity to know
from the viewpoint of worker’s safety or correct and safe operation of
equipment

II
Safety Precautions
In order to safely use the G-TRAN Series sensor unit (below, "this unit"), please read the instruction
manual and the safety precautions below.
Request repairs for this unit from the dealer where purchased, from ULVAC Inc., or
from the URL listed in this instruction manual.
Repair
If this unit is accidentally damaged, immediately turn off the power supply. There is
a risk of fire and electric shock from use in this state.
Power off
If this unit produces unusual heat, smoke, or a strange smell, immediately turn off the
power supply. There is a risk of fire from use in this state.
Power off
Before turning on the power supply, check that the operating voltage to the SH2
multi-ionization gauge and the supply voltage are the same. If the wrong power supply
is mistakenly connected, there is a risk of damage to the devices connected to the SH2
multi-ionization gauge and a risk of fire. The overvoltage category is category I.
Power supply voltage
Do not connect this unit in a location where the gauge head's internal pressure
exceeds atmospheric pressure. If the gauge head's internal pressure exceeds
atmospheric pressure, there is a risk of damage to the gauge head and it may pose a
hazard to its surroundings, including to people, by flying off its connector. When
exceeding atmospheric pressure, install an isolation valve to ensure that the gauge
head's internal pressure does not exceed atmospheric pressure.
Excessive vacuum chamber pressure
Always connect this unit electrically to a grounded vacuum chamber. Use a
conductive metal clamp on the NW flange. If this unit is not correctly connected, it will
not only show the wrong pressure, there is a risk of damage to this unit and the
equipment connected to this unit and a risk of fire.
Protective grounding
When isolated with the vacuum chamber, ground the NW flange metal clamp with a
class D (class 3) ground.
The pressure value and accuracy for this unit differ by the type of gas measured. The
accuracy for this unit is based on measuring nitrogen gas. Be careful of
overpressurization when using gases other than nitrogen.
Gas type dependency
Do not disassemble this unit. There is a risk of fire and electric shock. If
disassembled, sensor operation cannot be guaranteed.
Disassembly prohibited
Do not modify this unit. There is a risk of fire and electric shock. If modified, sensor
operation cannot be guaranteed.
Modification prohibited
Before turning on the power supply, check that this unit operating voltage and the
supply voltage polarity are the same. If the wrong power supply is connected, there is a
risk of damage to this unit and to devices connected to this unit and a risk of fire.
Check power supply voltage
Always connect this unit to a power supply and evaluation unit that conforms to
standards (EN61010 SELV-E) for safety extra low voltage protected by grounding.
Install a fuse in the connection.
Operating power supply
After connecting this unit and the SH2 with the unit cable, turn on the power supply to
the SH2. If the power is supplied before connecting them, there is a risk of damage to
this unit and the SH2 and a risk of fire. There is also a risk of breaking the filament in
the gauge head.
Power on

III
Use this unit within the environment range defined by the specifications.
Usage environment
Avoid using this unit in locations with high humidity and condensation or in
locations exposed to water. There is a risk of malfunction, ground leakage, and fire if
water penetrates inside this unit.
Condensation
Protect this unit so that metallic and flammable foreign objects cannot enter the
interior of this unit from the openings.
Foreign object insertion
Do not put this unit in a sealed chamber. Always install it in a location that ensures
ventilation. If sealed, there is a risk of loss of lifespan when the temperature of the
electronic components inside the power supply increases.
Ensure ventilation
If this unit is exposed to chemically active gases including corrosive gases and
halogen or halogenated gases, problems will occur such as filament breaks or pressure
characteristics changing. When using this unit in these types of environments, install an
isolation valve between this unit and the vacuum chamber and protect this unit so it is
not exposed to these gases.
Use in a corrosive gas atmosphere
If this unit is exposed to gases that deposit materials including CVD (Chemical
Vapor Deposition) material gases and rotary pump oil mist, problems will occur such as
filament breaks or pressure characteristics changing. When using this unit in these types
of environments, install an isolation valve between this unit and the vacuum chamber
and protect this unit so it is not exposed to these gases.
Use in a CVD gas atmosphere
If there is a large quantity of fouling in the gauge head from the gradual vaporization
of moisture or organic matter, pressure accuracy and response speed will be affected.
Review installation locations and methods so that fouling does not occur.
Moisture and fouling
The ambient temperature of the gauge head affects the measured value due to the
measurement principle of the Pirani vacuum gauge. Be careful with the attachment
location so the ambient temperature does not dramatically deviate from the temperature
during calibration (approx. 25°C).
Temperature fluctuations
The pressure measurement measures the static pressure at the location where the
gauge head is connected. Take care to attach this unit in a location that is unaffected by
gas flows and emitted gas in the measurement system.
Gas flow in the measurement system
If this unit is near a strong generation source of electrons or ions, this unit will not be
able to measure pressure correctly, and there is a risk of damage to this unit and a risk
of malfunction. Take care to attach this unit in a location that is unaffected by electrons
and ions.
Influence of electrons, ions, etc.
There is a risk the filament may break if a current of 2 mA or higher passes through
it. Take note of the current value for the measurement instrument.
Overcurrent to the filament
In a vacuum, the filament is heated and an accurate resistance value cannot be
measured, so always measure at atmospheric pressure.
Ensure that the connection cable to each pin does not contact other pins or the case.
Use caution not to mistake the pin assignments. If the wiring is wrong, there is a risk of
damage to this unit and to devices connected to this unit and a risk of fire.
Check wiring
Do not wire this unit cable in proximity or parallel to electrical lines, power lines,
high voltage lines, or high frequency lines. There is a risk of malfunction.
Laying down cables

IV
Do not expose this unit to impacts. There is a risk of breaking the filament and
damaging the attachment section by impacts.
Impacts
When transporting this unit, do so in the same state as when it was delivered from the
factory. There is a risk of damage if this unit is transported without packaging or
transported attached to the equipment.
Transportation packaging
When disposing of this unit, please follow all local laws and regulations.
Disposal
In particular, if the gauge head was used in an atmosphere that can cause harm to the
human body, dispose of it through specialized waste handler.
Customers are responsible for expenses related to disposal.

V
Contents
Prior to Use ................................................................................................................. I
Safety Symbols...........................................................................................................II
Safety Precautions.....................................................................................................III
Contents......................................................................................................................V
1. SPECIFICATIONS..................... 1
1.1. BASIC SPECIFICATIONS .............. 1
1.2. UNPACKING AND QUANTITY CHECK .... 1
2. PART NAMES AND FUNCTIONS ....... 2
2.1. SPU CONTROLLER SECTION .......... 2
2.2. SPU LED ........................ 3
2.3. SPU I/O CONNECTOR ............... 4
3. ATTACHING THE PRODUCT........... 5
3.1. ATTACHING THE GAUGE HEAD TO THIS UNIT5
3.2. LEAK TEST ....................... 6
4. HANDLING PRECAUTIONS............ 7
4.1. PRECAUTIONS RELATED TO THE USAGE
ENVIRONMENT........................... 7
4.2. PRECAUTIONS RELATED TO USAGE ..... 7
4.3. ATTACHING THIS UNIT .............. 7
4.3.1. This unit attachment environment . 7
4.3.2. Attaching this unit ..............8
5. TROUBLESHOOTING ..................9
5.1. TROUBLESHOOTING .................9
5.2. CHECKING FOR A FILAMENT BREAK ....10
6. TECHNICAL REPORT .................11
6.1. MEASUREMENT PRINCIPLE ...........11
6.2. MEASUREMENT GAS TYPE AND READING 11
7. WARRANTY.........................13
8. CHINA ROHS DECLARATION..........14
9. DIMENSIONS ........................15
9.1. SPU DIMENSIONS ..................15
9.2. GAUGE HEAD DIMENSIONS ...........16
9.3. UNIT CABLE SPU ..................17

1
1. Specifications
The SPU Pirani vacuum gauge measuring unit is a dedicated measuring unit for the SH2
multi-ionization gauge.
Please note that this unit cannot be used independently.
1.1. Basic specifications
Name
Pirani vacuum gauge measuring unit
Model
SPU
Measurement principle
Pirani vacuum gauge that uses thermal conduction by gas molecules
Number of gauge heads
1pc
Applicable gauge head
WP-16
Measurement pressure range
4x10-1 Pa to 3x10+3 Pa
Output pressure range
1x10-1 Pa 1x10+4 Pa
Accuracy (N
2
)
1.0x10-1 Pa to 4.0x10-1 Pa: no accuracy guarantee
4.0x10-1 Pa to 1.0x10+0 Pa: ±30%
1.0x10+0 Pa to 1.0x10+3 Pa: ±15%
1.0x10+3 Pa to 3.0x10+3 Pa: ±30%
3.0x10
+3
Pa to 1.0x10
+4
Pa: no accuracy guarantee
Repeatability
±10% (at a constant operating environment temperature)
Sampling time
50 ms, 5x moving average
Measurement value output
Output by serial communication
LED display
POWER/ERROR LED
Gauge head material
Filament: Pt
Other: CuZn/Ni plating, Kovar glass, Ni, SnSb
Gauge head withstand pressure
2x10+5 Pa (abs)
*Take the withstand pressure for flanges, clamps, and other
components into account separately.
Operating temperature range
10 to 50°C
Operating humidity range
15% to 85% RH (no condensation)
Storage temperature
-20 to 65℃(no condensation)
IP code
IP30
Power supply voltage
5 VDC
I/O connector
RJ-45 jack connector
Gauge head internal volume
Pirani vacuum gauge head (WP-16): 22 cm3
Weight
External dimensions
φ40x51 (controller section only)
1.2. Unpacking and quantity check
When the product is delivered, promptly unpack and check it.
Check that the product was not damaged during shipping. Check that the proper quantity of
accessories was included with the product.
SPU Pirani vacuum gauge measuring unit
1
Pirani vacuum gauge head (WP-16)
1
Instruction manual
(included with the SH2 multi-ionization gauge)
1

2
2. Part Names and Functions
2.1. SPU controller section
1
32
Figure 2-1 SPU controller section explanatory drawing
Name (symbol) Function
①I/O connector The I/O connector for the power supply and signals (RJ-45 jack
connector).
②Gauge head clamp The clamp to hold and lock the gauge head.
③Mating screws Mating screws (M3) for the clamp hood.

3
2.2. SPU LED
1
Figure 2-2 SPU LED explanatory drawing
Name (symbol) Function
①POWER/ERROR LED On : Operating normally
Flashing: Error such as a filament break, this unit is malfunctioning
Off : Power off, this unit or the SH2 is malfunctioning

4
2.3. SPU I/O connector
18
Figure 2-3 SPU I/O connector pin assignment diagram
Terminal
number This unit Signal direction Connection destination
1 Power supply +5 VDC
SH2
Multi-ionization gauge
2 GND
3 Power supply +5 VDC
4 Communication terminal
5 Communication terminal
6 GND
7 Power supply +5 VDC
8 GND

5
3. Attaching the Product
After entirely connecting the gauge head and the SH2 multi-ionization gauge to
this unit, turn on the power supply. If the power is supplied before connecting
them, there is a risk of damage to this unit and the SH2 multi-ionization gauge
and a risk of fire. There is also a risk of breaking the filament in the gauge head.
Power on
Perform a leak test when the gauge head is replaced and attached.
There is a possibility of leaking from impacts to the pin section.
Leak test
3.1. Attaching the gauge head to this unit
Loosen the clamp locking screws to loosen the clamp. Then attach the gauge head with the procedure
below.
(1) Align the pins for the gauge head and push it all the way in
(2) Clamp the gauge head with the clamp
(3) Tighten the locking screws to secure the gauge head
Figure 3-1 Attaching the gauge head

6
If the gauge head is not fully inserted as shown in the figure below, the gauge head may leak from
the constrictive clamp.
Insufficiently inserted ⇒Leak occurs
Fully inserted
3.2. Leak test
When the gauge head is attached, we recommend performing a leak test in this state.
Acceptable leak amount: 3.0x10-9Pa･m3/s or lower

7
4. Handling Precautions
Prior to use, read the safety warnings on pages I through IV and implement all necessary protective
measures for safety. Read this information together with the instruction manual for the SH2
multi-ionization gauge.
Safety warnings that you should pay particular attention to are listed in this chapter.
4.1. Precautions related to the usage environment
Do not connect this unit in a location where the gauge head's internal pressure
exceeds atmospheric pressure. It may pose a hazard to its surroundings, including
to people, if the gauge head is damaged or it flies off its connector. When
exceeding atmospheric pressure, install an isolation valve to ensure that the
gauge head's internal pressure does not exceed atmospheric pressure.
Excessive vacuum chamber pressure
If this unit is exposed to chemically active gases including corrosive gases and
halogen or halogenated gases, problems will occur such as filament breaks or
pressure characteristics changing. When using this unit in these types of
environments, install an isolation valve between this unit and the vacuum
chamber and protect this unit so it is not exposed to these gases as much as
possible.
Use in a corrosive gas atmosphere
If this unit is exposed to gases that deposit materials including CVD
(Chemical Vapor Deposition) material gases and rotary pump oil mist, problems
will occur such pressure characteristics changing. When using this unit in these
types of environments, install an isolation valve between this unit and the
vacuum chamber and protect this unit so it is not exposed to these gases as much
as possible by using this unit with the isolation valve closed.
Use in a CVD gas atmosphere
The ambient temperature of the gauge head affects the measured value due to
the measurement principle of the Pirani vacuum gauge. Be careful with the
attachment location so the ambient temperature does not dramatically deviate
from the temperature during calibration (approx. 25°C).
Temperature fluctuations
4.2. Precautions related to usage
・Secure cables as much as possible so that force is not applied to cable connectors.
・Firmly insert the RJ-45 connector.
・To perform accurate pressure measurements, allow the pressure sensor to age for 20 minutes or
longer before measuring.
4.3. Attaching this unit
4.3.1. This unit attachment environment
Always connect this unit electrically to a grounded vacuum chamber. Use a
conductive metal clamp on the NW flange. If this unit is not correctly connected,
it will not only show the wrong pressure, there is a risk of damage to this unit
and the equipment connected to this unit and a risk of fire.
Protective grounding
When isolated with the vacuum chamber, ground the NW flange metal clamp
section with a class D (class 3) ground.
The pressure value and accuracy for this unit differ by the type of gas
measured. The accuracy for this unit is based on measuring nitrogen gas. Be
careful of overpressurization when using gases other than nitrogen.
Gas type dependency
The pressure measurement measures the static pressure at the location where
the gauge head is connected. Take care to attach this unit in a location that is
unaffected by gas flows and emitted gas in the measurement system.
Gas flow in the measurement system

8
4.3.2. Attaching this unit
・Attach this unit so that the gauge head attachment opening surface is parallel to the gas flow. In
particular, ensure that gases do not enter the gauge head interior like a beam.
・As much as possible, attach the gauge head so the filament is vertical to the force of gravity. (See
Figure 4-2)
・The Pirani vacuum gauge head filament is thin at φ25 µm, so avoid use in a location with a large
amount of vibration as much as possible. The biggest cause of filament breaks is from mechanical
shock, so use caution regarding the installation location and handling.
・Use an O-ring to attach the gauge head that releases little gas. There is a risk of measurement
errors or the gauge head lifespan will decrease if materials that release a large quantity of gas, such
as rubber tubes or grease, are used in the gauge head connection.
Vertical direction
Gas flow direction
Figure 4-2 Attaching the SPU

9
5. Troubleshooting
5.1. Troubleshooting
Bad electrical wiring
is a major cause of this unit malfunctions. If this unit behaves in a manner
you find unusual, first check the wiring between this unit and the SH2. Refer to the SH2 instruction
manual as well.
●
The POWER/ERROR LED is off even though power is being supplied
Cause
Action
Miswired or broken cable
Repair the wiring and check continuity with a tester.
The power supply voltage to the SH2 is not within
the specified range
Check the power supply voltage with a tester.
This unit or the SH2 is malfunctioning
Requires inspection and repairs at ULVAC.
●
The POWER/ERROR LED is flashing or the SH2 keeps outputting the error signal
Cause
Action
Filament break or short circuit
Measure filament continuity and isolation between
each pin and the case.
⇒Replace the gauge head when there is a problem.
The gauge head is not attached
Attach the gauge head.
This unit or the SH2 is malfunctioning
Requires inspection and repairs at ULVAC.
●
No scale-over even in atmospheric pressure
Cause
Action
The measured gas is not nitrogen
This is normal. Measurements are dependent on the
type of gas.
The measured gas is nitrogen but it contains a lot of
moisture or oils
This is normal. Measurements are dependent on the
type of gas.
An environment with a large quantity of fouling
Assume internal gauge head contamination.
⇒Replace the gauge head
●
Pressure does not reach 0.4 Pa or lower even when pumping to vacuum
Cause
Action
The actual pressure is not 0.4 Pa or lower
Check the pressure with an ionization vacuum
gauge.
Room temperature, gas temperature is different
when measuring
This is normal. Measurements are temperature
dependent.
This unit or the SH2 is malfunctioning
Requires inspection and repairs at ULVAC.
●
The pressure reading does not show a steady value.
Cause
Action
The pressure is actually fluctuating
This is normal.
This unit is affected by pump vibrations and
fluctuating
Suppress vibrations as much as possible.
Measurements are affected by the principle of the
Pirani vacuum gauge.
Attached to a location with a gas flow
Attach this unit to a location with no gas flow.
Measurements are affected by the principle of the
Pirani vacuum gauge.
The environmental temperature is fluctuating
Wait for the environmental temperature to stabilize.
Measurements are affected by the principle of the
Pirani vacuum gauge.
High temperature and low temperature gases are
flowing in
Implement corrective action such as attaching the
gauge head to a location unaffected by gas
temperature.
Measurements are affected by the principle of the
Pirani vacuum gauge.
Dirty gauge head interior
Replace the gauge head

10
Affected by moisture and dirt
Attach the gauge head to a location as unaffected as
possible
Influenced by heat of vaporization by gradual
vaporization.
There is a leak in the gauge head or the area where
the gauge head is attached Gauge head leak ⇒Replace the gauge head
Other leaks
⇒
Stop the leak
Bad cable contact, increased wire resistance
Check the cable connection and resistance.
The cable is affected by electromagnetic induction.
(By external noise)
Change the cable installation location. Use this unit
with the device generating the noise turned off.
Review how the cables are installed
Examine separate measures for noise
●
The pressure is changing but the pressure reading is stable.
Cause
Action
The power supply voltage to the SH2 is not the
specified range
Check the power supply voltage with a tester.
The pressure is below the specified range
Normal
The pressure is above the specified range
Normal
Nearby noise source
The CPU may be frozen
⇒Cycle the power.
●
The expected pressure and measured pressure greatly differ
Cause
Action
The gauge head is dirty
Sensitivity has dramatically deviated
Replace the gauge head with another gauge head and
check the phenomena. If there is no problem with
the
other gauge head, the gauge head was the problem.
Measuring air at the nitrogen setting.
This is normal.
When air is measured at the nitrogen setting, a
pressure 60% higher is shown.
Environment with a large amount of moisture or oil
Attach the gauge head to a location as unaffected as
possible
Influenced by heat of vaporization by gradual
vaporization.
The actual pressure differs
Check with another pressure gauge.
5.2. Checking for a filament break
！
注意
There is a risk the filament may break if a current of 2 mA or higher passes through
it. Take note of the current value for the measurement instrument.
Overcurrent to the filament
In a vacuum, the filament is heated and an accurate resistance value cannot be
measured, so always measure at atmospheric pressure.
The Pirani vacuum gauge head filament is wired as shown in the figure below. Check continuity
referring to this figure. The filament's resistance is approximately 13 Ω at atmospheric pressure.
2 mA or lower
Approx. 13 Ω
(Under atmospheric pressure)
Figure 6-1 Gauge head filament wiring diagram

11
6. Technical Report
6.1. Measurement principle
When cool gas molecules collide with a high temperature solid, those molecules receive energy from
the solid, warm, and fly off. They return to their original state by colliding into a low temperature object.
The high temperature solid loses energy of only the amount obtained by the cool gas molecules. This is
the thermal conduction mechanism of gases, which is referred to as the energy transport phenomena by
gas molecules.
In a pressure region (molecular flow region) with few collisions between gas molecules, the amount of
energy carried by a gas is proportional to the collision frequency of gas molecules hitting the high
temperature area. Because of this, we can say there is a proportional relationship to pressure.
We can measure pressure using this principle.
Here, when T (K) and To (K) stand for the temperature of the gauge head filament and vessel wall, the
relationship below holds true for energy Q (J) carried off from the filament per unit time per unit area.
In this equation, Λis constant called free molecular thermal conductivity (m3･K-1), and this value
differs by gas type. α is a coefficient that corrects the incompleteness in the transfer of the amount of
energy during the gas molecule collision. It is called the accommodation coefficient and is defied as
shown next.
T is the filament temperature. To is the temperature of the gas molecule before the collision. Tg is the
temperature of the gas molecule after the collision. If the energy transfer on the filament surface was
complete, α = 1.
The value of α has complicated properties that change according to geometric roughness, the presence
of an adsorption layer, heat history, gas type, temperature, and other factors, and we cannot say these
properties are fully understood. The value of α directly influences the accuracy and stability of the
vacuum gauge.
Of Pirani vacuum gauges, those that replenish the energy lost from the heated filament in collisions
with gas molecules and maintain a constant filament temperature are called constant-temperature Pirani
vacuum gauges. ULVAC Pirani vacuum gauges are this type of Pirani vacuum gauge.
This type of Pirani vacuum gauge is said to have an advantage in stability and responsiveness with
little change in α compared to other types of Pirani vacuum gauges.
6.2. Measurement gas type and reading
As explained somewhat in the previous section, the Pirani vacuum gauge reading changes by the type
of measured gas. In the molecular flow region, Λ(free molecular thermal conductivity) has the equation
below.
Here, M is molecular weight, R is the gas constant, T' is the average temperature of T and To, and Cν
is specific heat at constant volume. If you look at this equation, you can see that it is dependent on Cν
and inversely proportional to . Though the number of molecules to transport heat energy
increase along with pressure in the high pressure region, the free path of the molecule shortens, so the
amount of energy transported per molecule effectively decreases. The change in reading by the type of
measured gas is complex.
（ １ ）
Ｑ＝αΛ（Ｔ－Ｔo）Ｐ
（ ２ ）
α＝ Ｔg－Ｔo
Ｔ－Ｔo

12
The Pirani vacuum gauge's measurement area is an intermediate area between molecular flow and
viscous flow, so the difference in reading by gas type is not simple and is difficult to express with an
equation.
The figure below shows the relationship between the reading and pressure when a typical gases are
measured.
10-1 100101102103104
10-1
100
101
102
103
104
H2
He
N2
O2
CO2
Ar
Pirani vacuum gauge reading [Pa]
Absolute pressure [Pa]
0.5 3.1E-1 9.7E-1 －5.3E-1 －5.3E-1 5.9E-1 3.7E-1 7.4E-1 2.0E-1 4.3E-1
1 1.0 1.9 7.8E-1 1.0 1.1 1.0 1.2 8.2E-1 1.1 6.0E-1 8.2E-1
2 1.8 3.3 1.7 1.8 2.5 1.8 2.3 1.7 2.0 1.2 1.6
5 5.3 7.7 5.1 4.3 6.7 4.3 5.3 4.7 4.1 2.9 3.7
10 9.3 1.5E+1 9.4 8.5 1.3E+1 8.0 1.1E+1 9.8 7.4 5.6 7.2
20 1.7E+1 2.7E+1 2.0E+1 1.9E+1 2.9E+1 1.7E+1 2.1E+1 2.1E+1 1.5E+1 1.2E+1 1.9E+1
50 3.5E+1 6.0E+1 5.1E+1 5.1E+1 8.5E+1 5.1E+1 5.2E+1 4.0E+1 4.0E+1 3.7E+1 4.5E+1
100 5.6E+1 1. 1E+2 1.0E+2 1.0E+2 1.9E+2 1.1E+2 1.1E+2 9.0E+1 9.6E+1 1.2E+2 8.0E+1
200 8.2E+1 1. 8E+2 2.0E+2 2.0E+2 3.7E+2 2.3E+2 2.1E+2 2.4E+2 3.3E+2 －1.3E+2
500 1.3E+2 3. 3E+2 5.0E+2 5.0E+2 1.3E+3 8.5E+2 5.3E+2 2.0E+3 － － 3.5E+2
1000 1.9E+2 4.4E+2 1.0E+3 1.0E+3 8.0E+3 8.0E+3 1.0E+3 － － － 5.9E+2
Note
Gauge head: WP-01, Control: GP-2T, absolute pressure was measured with a diaphragm vacuum gauge.
The Pirani vacuum gauge reading was being calibrated with dry air.
(CFC-12)
Pirani
vacuum gauge
reading (Pa)
Absolute pressure of gases (Pa)
H
2 H e N 2
O 2
Ar CO 2 CO SF 6 CCl 2 F
2 CCl 4 NH 3

13
7. Warranty
This product was shipped after rigid company inspection. However, in case any failure occurs under
ULVAC’s responsibility, such as defect in manufacturing and damage during transportation, Buyer
shall inform ULVAC, Inc. or the local ULVAC representatives. ULVAC will repair or exchange it at
free of charge.
Warrantable Items
1) This unit
2) Sensor head on delivery
Duration of guarantee
One (1) year after shipping date from ULVAC
Warrantee scope
1) Domestic business in Japan: Product, which has damage, caused by a failure on delivery.
2) Direct export transaction: Product, which has damage, caused by a failure on delivery. The
warrantee scope shall confirm to the new INCOTERMS.
3) Products not satisfying meet the standard specifications although the product is used under the
normal service conditions such as temperature range and power etc.
Response procedure
1) Domestic business in Japan: ULVAC send a replacement or Buyer return the defective items to
ULVAC, Inc. or to the local ULVAC representatives for repair. If field service is required,
Buyer shall ask ULVAC, Inc. or the local ULVAC representatives.
2) Direct export transaction: ULVAC send a replacement or Buyer return the defective items to
ULVAC, Inc. or to the local ULVAC representatives for repair. Return charge shall be paid by
Buyer.
Disclaimer
1) Failure occurred after expiration of warranty period
2) Failure caused by force majeure, such as fire, storm and flood damage, earthquake, lightning
strike, war etc
3) Failure occurred due to carelessness handling or faulty usage
4) Products remodeled, disassembled or repaired without ULVAC’s acceptance
5) Failure occurred under abnormal environment, such as intense electromagnetic field, radiation,
high-temperature, high-humidity, flammable gases, corrosive gases, dust etc.
6) Failure occurred by noise
7) Product deficiency or secondary damnification occurred to Buyer, from law suit to ULVAC by
third party for patent infringement.
8) Sensor head being used (expiration of life, measurement error, etc.)
9) Sensor head cable in use (cable burnout due to improper installation, poor contact, etc.)
Others 1) In case, special agreement or memorandum for specifications is made individually, the
descriptions are prior to this article “13 Product Warranty”.
2) Buyer shall inform ULVAC when this product is exported out of Japan. In the meantime,
Buyer shall take necessary procedures according to Foreign Exchange and Foreign Trade Law.
3) As for the question and consultation, Buyer shall check the model and serial number and ask the
local representative or ULVAC, Inc.
4) The content of this document is subject to change without notice in future.