Ulvac G-Tran Series User manual

i
YK06-0044-EI-003-18
G-TRAN Series
1-Channel Display Unit
Model ISG1
Instruction Manual
This manual is for the display units of the
following serial numbers:
Serial No. 09501 and higher.
Read this manual before operation and keep it at
hand for immediate reference.
Model
Serial numbers
Multi Ionization Gauge ST2-1
00901
～
Multi Ionization Gauge SH2-1
06001
～
Multi Ionization Gauge ST200-A
00001
～
Multi Ionization Gauge SH200-A
00001
～
Cold-Cathode Ion Gauge SC1
02300G
～
Pirani Vacuum Gauge SW1-1
00001
～
Pirani Vacuum Gauge SP1
00001
～
Ceramic Capacitance Manometer CCMT-D series
00001
～
Components Division,
ULVAC, Inc.

ii
Prior to Operation
Upon receipt of this detector, make sure that it is the correct model you ordered and that it is not
damaged in transit.
Read this instruction manual before installing, operating, inspecting, or
maintaining the product and fully understand the safety precautions,
specifications and operating procedures regarding the product.
The copyright of this instruction manual is held by ULVAC, Inc.
You are prohibited from copying any portion of this instr
uction manual
without the consent of ULVAC Inc. You are also prohibited from disclosing
or transferring this instruction manual to third parties without the express
written consent of ULVAC Inc.
The contents described in this instruction manual are subject to change
without prior notice because of changes in specifications or because of
product improvements.
Safety Notations
Safety symbols are used throughout this instruction manual to call the
operator's attention to safety. The terminology used in safety symbols is
classified below.
Indicate status of urgency of danger when failure to comply with DANGER
results in serious personal injury or death
The work ignoring this warning will lead to serious damage to human life or
factory facility (including this equipment) at a high probability.
Indicate status of danger when failure to comply with WARNING results in
serious worker’s injury or death.
The work ignoring this warning will cause possibility leading to serious
damage to human life or factory facility (including this equipment).
Indicate status of danger when failure to comply with WARNING results in
minor injury or moderate damage.
The work ignoring this warning will cause possibility leading to minor
damage to worker or breakage to equipment or necessary to adjust.
Direct hazard is not existed, describe the necessity to know
from the
viewpoint of worker’s safety or correct and safe operation of equipment
✔Note

iii
Safety Precautions
For safe operation of this unit, read this manual and the following safety precautions.
Servicing
For repair and servicing, contact your local ULVAC representative or
Components Division, ULVAC, Inc., Japan.
Turn OFF power.
If the unit fails, immediately turn off the power.
Use of a failed unit may cause a fire or electric shock.
Turn off power.
If the unit gets unusually hot or gives off smoke or unusual smell,
immediately turn off the power. Otherwise, fire can result.
Power supply
Before turning on the power to this instrument, make sure that the
operating voltage and supply power are in agreement. If incorrect power
is connected, this instrument and devices connected to this instrument may
fail or fire may result. The over-voltage comes under Category 1.
Protective grounding
Ground the sensor with class D (class 3) grounding. If the sensor is not
correctly connected, it will not only show the wrong pressure, there is a
risk of damage to the sensor and the equipment connected to the sensor
and a risk of fire.
Power supply
The unit may only be connected to supply and measurement units that
conform to the requirements of a grounded protective extra-low voltage
(SELV-E according to EN 61010). The connection to the gauge has to be
fused.
Power cable
The power cable is not packed in the same case. Use a cable having a
sufficient current capacity.
Installing an external switch in the power line
This unit has no power switch. Install an external switch, breaker and
over-current protector.
Check connection
See to it that the connection cables do not come into contact with other
conducting parts.
Do not disassemble
Do not disassemble this unit.
Do not modify
Do not modify this unit. If modified, its actions are not warranted. Also
fire or electric shock can result.
Be careful of operating environment.
Do not use the unit in a place where it may be splashed with water. If it
is wetted, trouble, electric leak or fire can result.
Laying cables
Before turning on power, install the display cable, sensor unit, sensor,
and others.
Keep out foreign objects
If any foreign objects, such as metals or combustibles, are admitted into
the unit through an opening, remove them. Also keep foreign objects away
from the terminals on the rear panel of the unit. Otherwise, the unit may
be damaged.
Discarding
If this unit is discarded, follow the regulations of your local government.
Incidentally, expenses for disposing of this unit are on the user’s account.

iv
Operating conditions
Use this
unit within the scope of the environment set forth in the
specification.
Maintenance
The electric circuit in this instrument uses aluminum electrolytic
capacitors. Generally speaking, the
life of the aluminum electrolytic
capacitor becomes short as the ambient temperature rises. To prevent
components from damage, it is recommended to conduct maintenance at
ULVAC about once every 3 years.
Cautions in shipping the unit
If the unit is to be shipped back to ULVAC, pack it in the original
condition. If it is shipped bare, it may be damaged.

v
Revision History
DATE
No.
Reason
Apr. 4, 2008
03
S/N:00001～first version
Aug. 25, 2009
04
・
Added CCMT-1000D/100D/10D/1D
・Section 2.1, added output impedance to specifications.
・Chapter 22, added EC DECLARATION OF CONFORMITY.
・
Chapter 18, added Interlock function.
July 27, 2011
05
・
Changed A5 version to B6 version.
・
Added multi-ionization gauge SH2
Mar. 1, 2012
06
S/N:01482～
Added SH2 (SPU combination mode), SH2 (SAU triple combination mode)
June 1, 2012
07
Corrected an error.
June 12, 2012
08
Corrected an error.
Sept. 10, 2013
09
・
BMR2 and BPR2 were discontinued.
・Chapter 10, added that in SC1 when it is lower than the measuring lower limit,
“HuF” is displayed and the output voltage is 10V.
Jun. 7, 2014
10
S/N:04050～
・Added connection check in combination mode of SH2.
Notice: SH2 before S/N:01000 does not output a set point.
・Chapter 5, displayed the sensor which is set in the program mode
・Chapter 6, added 『nc』which means that the sensor is not set and the setting is
factory default to the sensor unit selection.
July 7, 2014
11
Corrected an error.
Oct. 9, 2015
12
Added multi-ionization gauge ST2.
Nov. 21, 2017
13
Added the explanation of CALCULATION function to the pressure conversion
expression of each sensor.
Apr.20, 2018
14
Added the Measurement units function.
Jul.3, 2018
15
Added the Measurement display range function.
Oct.10, 2019
16
Added Pirani Vacuum gauge Measuring Unit SWU
Corrected an error.
Dec.25, 2020
17
Section 2.2, Delete the instruction manual CD from the standard accessories.
Section 2.1, Revised CE standard.
Section 26, Revised EC Declaration of Conformity.
Section 27, Revised certificate of Decontamination.
Mar.15,2021
18
Added multi ionization gauge SH200,ST200
Corrected an error

vi
Contents
Page
Prior to Operation.................................................................................................................... ii
Safety Notations ...................................................................................................................... ii
Safety Precautions..................................................................................................................iii
Revision History.......................................................................................................................v
Contents .................................................................................................................................vi
1. GETTING STARTED................................................................................................1
1.1. Overview of G-TRAN Series............................................................................................................1
1.2. Terminology .........................................................................................................................................1
1.3. Features of This Unit...........................................................................................................................2
2. SPECIFICATIONS AND COMPONENTS ................................................................3
2.1. Specifications........................................................................................................................................3
2.2. Standard Accessories..........................................................................................................................5
2.3. Options...................................................................................................................................................5
2.4. Dimensional Drawings DIN Panel Size..........................................................................................6
2.5. Installation DIN Panel.........................................................................................................................7
2.6. Dimensional Drawings JIS panel size..........................................................................................8
3. NAMES OF COMPONENTS AND DESCRIPTION OF FUNCTIONS .....................9
3.1. Front Panel Lights................................................................................................................................9
3.2. Front Panel Switch Program Mode...............................................................................................10
3.3. Front Panel Switch Measurement Mode......................................................................................11
3.4. Rear Panel ..........................................................................................................................................12
3.5. Sensor Connector (D-sub 15pin connector female, M2.6mm screw).................................... 13
3.6. I/O Connector (D-sub 15pin connector male, M2.6mm screw)..............................................14
3.7. Power Supply Connector (Phoenix model MSTB2.5/3-GF-5.08)..........................................15
4. INSTALLATION.....................................................................................................16
4.1. Preparations........................................................................................................................................16
4.2. Installation..........................................................................................................................................16
4.2.1. Installing the display unit...............................................................................................................................16
4.2.2. Circuit in the power supply...........................................................................................................................16
4.2.3. Installation........................................................................................................................................................17
5. FRONT PANEL OPERATION................................................................................18
5.1. Description of Front Panel Keys....................................................................................................18
5.1.1. Program mode.................................................................................................................................................18
5.1.2. Key operation in measurement ....................................................................................................................18
6. SELECTION OF SENSOR UNIT............................................................................19
6.1. Selection of Sensor Unit..................................................................................................................19
6.2. Reset The Unit to The Factory Default Settings.........................................................................20
6.3. Factory Set Values............................................................................................................................20

vii
7. SETPOINT ..............................................................................................................21
7.1. What is Setpoint?..............................................................................................................................21
7.2. Setpoint Setting Range.....................................................................................................................21
7.3. How to Set Setpoint.......................................................................................................................... 21
7.3.1. How to Set Setpoint from Front Panel........................................................................................................22
7.3.2. How to set setpoint from RS-485................................................................................................................23
8. CONNECTION WITH EXTERNAL DEVICES.......................................................24
8.1. Output Signal.....................................................................................................................................24
8.2. Input Signal........................................................................................................................................25
8.2.1. RS-485 communication.................................................................................................................................25
9. PIRANI GAUGE SW1.............................................................................................26
9.1. Sensor Unit Setting: “SP2”.............................................................................................................26
9.2. Front Panel.........................................................................................................................................26
9.2.1. Pressure display state......................................................................................................................................26
9.2.2. Description of front panel keys....................................................................................................................26
9.3. Setting Operation..............................................................................................................................26
9.3.1. RS-485 communication operation setting “L1”, “L2”............................................................................26
9.3.2. Front panel, external I/O operation setting: “AJ” .....................................................................................27
9.3.3. Method of setting............................................................................................................................................27
9.4. Connection with Sensor Unit..........................................................................................................28
9.5. Connection to External Device ......................................................................................................28
9.6. Various Signals .................................................................................................................................28
9.6.1. Output voltage.................................................................................................................................................28
9.6.2. Filament burnout signal.................................................................................................................................29
9.6.3. ADJ adjustment...............................................................................................................................................29
9.6.4. Setpoint.............................................................................................................................................................29
9.6.5. RS-485 communication.................................................................................................................................29
9.7. Zero Point Adjustment and Atmospheric Pressure Adjustment..............................................29
9.7.1. Adjusting method............................................................................................................................................29
10. COLD CATHODE GAUGE SC1.............................................................................30
10.1. Setting The Sensor Unit...................................................................................................................30
10.2. Front Panel.........................................................................................................................................30
10.2.1. Pressure display...............................................................................................................................................30
10.2.2. Front panel key description...........................................................................................................................30
10.3. Settings Operation ............................................................................................................................30
10.3.1. RS-485 communication operation setting “L1”, “L2”............................................................................30
10.3.2. Front panel, external I/O operation setting: “Hi”......................................................................................30
10.3.3. Operation setting method..............................................................................................................................31
10.4. Connection to The Sensor Unit: “SENSOR” Connector..........................................................32
10.5. Connection with External Devices: “I/O” Connector................................................................32

viii
10.6. Signals.................................................................................................................................................32
10.6.1. Output voltage.................................................................................................................................................32
10.6.2. HV ON signal: Pin 5......................................................................................................................................33
10.6.3. Discharge check signal: Pin 4.......................................................................................................................33
10.6.4. Setpoint: Pins 3, 7, 11.....................................................................................................................................33
10.6.5. RS485 communication: Pins 10, 12............................................................................................................33
11. PIRANI GAUGE BPR2/SP1 ....................................................................................34
11.1. Sensor Unit Setting: “SP1”............................................................................................................. 34
11.2. Front Panel.........................................................................................................................................34
11.2.1. Pressure display...............................................................................................................................................34
11.2.2. Description of front panel keys....................................................................................................................34
11.3. Setting Operation..............................................................................................................................34
11.3.1. RS-485 communication operation setting “L1”, “L2”............................................................................34
11.3.2. Operation setting method..............................................................................................................................35
11.4. Connecting to The Sensor Unit...................................................................................................... 35
11.5. Connection with External Devices................................................................................................36
11.6. External Input/Output Signal.......................................................................................................... 36
11.6.1. Output voltage.................................................................................................................................................36
Burnout signal...............................................................................................................................................................37
11.6.3. Setpoint.............................................................................................................................................................37
11.6.4. RS-485 communication.................................................................................................................................37
12. HOT CATHODE GAUGE BMR2............................................................................38
12.1. Sensor Unit Setting: “Sn1” .............................................................................................................38
12.2. Front Panel.........................................................................................................................................38
12.2.1. Pressure display...............................................................................................................................................38
12.2.2. Description of front panel keys....................................................................................................................38
12.3. Setting Operation..............................................................................................................................38
12.3.1. Setting overview .............................................................................................................................................38
12.3.2. RS-485 communication operation setting “L1”, “L2”............................................................................39
12.3.3. Front panel, external I/O operation setting.................................................................................................39
12.3.3.1. Filament operation setting “F1”.............................................................................................................39
12.3.3.2. Degas operation setting “dE”.................................................................................................................39
12.3.3.3. Filament changeover setting “FL” ........................................................................................................39
12.3.3.4. Operation setting method........................................................................................................................40
12.4. Connection with The Sensor Unit .................................................................................................41
12.5. Connection with External Devices................................................................................................ 41
12.6. Various Signals .................................................................................................................................42
12.6.1. Output voltage.................................................................................................................................................42
12.6.2. Filament on signal...........................................................................................................................................42
12.6.3. Degas on signal ...............................................................................................................................................42

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12.6.4. Filament1/2 changeover signal ....................................................................................................................42
12.6.5. Pressure protection signal..............................................................................................................................43
12.6.6. Emission valid signal .....................................................................................................................................43
12.6.7. Setpoint.............................................................................................................................................................43
12.6.8. RS485 communication..................................................................................................................................43
13. MULTI IONIZATION GAUGE SH2/ST2/SH200/ST200.........................................44
13.1. Sensor Unit Setting: “Sh2” .............................................................................................................44
13.2. Front Panel.........................................................................................................................................44
13.2.1. Pressure display...............................................................................................................................................44
13.2.2. Description of front panel keys....................................................................................................................44
13.3. Setting Operation..............................................................................................................................45
13.3.1. Setting overview .............................................................................................................................................45
13.3.2. RS-485 communication operation setting “L1”, “L2”............................................................................45
13.3.3. Front panel, external I/O operation setting.................................................................................................45
13.3.3.1. Filament operation setting “Fi”..............................................................................................................45
13.3.3.2. Degas operation setting “dE”.................................................................................................................45
13.3.3.3. Filament changeover setting “FL” ........................................................................................................45
13.3.3.4. Operation setting method........................................................................................................................46
13.4. Connection with The Sensor Unit .................................................................................................47
13.5. Connection with External Devices................................................................................................ 47
13.6. Various Signals .................................................................................................................................48
13.6.1. Output voltage.................................................................................................................................................48
13.6.2. Filament on signal...........................................................................................................................................48
13.6.3. Degas on signal ...............................................................................................................................................48
13.6.4. Filament1/2 changeover signal ....................................................................................................................49
13.6.5. Pressure protection signal..............................................................................................................................49
13.6.6. Emission valid signal .....................................................................................................................................49
13.6.7. Setpoint.............................................................................................................................................................49
13.6.8. RS-485 communication.................................................................................................................................49
14. MULTI-IONIZATION GAUGE SH2/ST2/SH200/ST200 (SPU COMBINATION
MODE)....................................................................................................................50
14.1. Sensor Unit Setting: “SPU”............................................................................................................50
14.2. Front Panel.........................................................................................................................................50
14.2.1. Pressure display...............................................................................................................................................50
14.2.2. Description of front panel keys....................................................................................................................50
14.3. Setting Operation..............................................................................................................................51
14.3.1. Setting Overview ............................................................................................................................................51
14.3.2. RS-485 communication operation setting “L1”, “L2”............................................................................51
14.3.3. Front panel, external I/O operation setting.................................................................................................51
14.3.3.1. Filament operation setting “Fi”..............................................................................................................51

x
14.3.3.2. Degas operation setting “dE”.................................................................................................................51
14.3.3.3. Filament changeover setting “FL” ........................................................................................................51
14.3.4. Operation setting method..............................................................................................................................52
14.4. Connection with The Sensor Unit .................................................................................................53
14.5. Connection with external devices.................................................................................................. 53
14.6. Various Signals .................................................................................................................................54
14.6.1. Output voltage.................................................................................................................................................54
14.6.2. Filament off signal..........................................................................................................................................54
14.6.3. Degas on signal ...............................................................................................................................................55
14.6.4. Filament1/2 changeover signal ....................................................................................................................55
14.6.5. Sensor error signal..........................................................................................................................................55
14.6.6. Emission valid signal .....................................................................................................................................55
14.6.7. Setpoint.............................................................................................................................................................55
14.6.8. RS-485 communication.................................................................................................................................55
15. Multi Ionization Gauge SH2/ST2/SH200/ST200 (SAU triple combination mode) ...56
15.1. Sensor Unit Setting: “SAU” ...........................................................................................................56
15.2. Front Panel.........................................................................................................................................56
15.2.1. Pressure display...............................................................................................................................................56
15.2.2. Description of front panel keys....................................................................................................................57
15.3. Setting Operation..............................................................................................................................57
15.3.1. Setting overview .............................................................................................................................................57
15.3.2. RS-485 communication operation setting “L1”, “L2”............................................................................57
15.3.3. Front panel, external I/O operation setting.................................................................................................57
15.3.3.1. Filament operation setting “Fi”..............................................................................................................57
15.3.3.2. Degas operation setting “dE”.................................................................................................................57
15.3.3.3. Filament changeover setting “FL” ........................................................................................................57
15.3.4. Operation setting method..............................................................................................................................58
15.4. Connection with The Sensor Unit .................................................................................................59
15.5. Connection with External Devices................................................................................................ 59
15.6. Various Signals .................................................................................................................................60
15.6.1. Output voltage.................................................................................................................................................60
15.6.2. Filament off signal..........................................................................................................................................61
15.6.3. Degas on signal ...............................................................................................................................................61
15.6.4. Filament1/2 changeover signal ....................................................................................................................61
15.6.5. Sensor error signal..........................................................................................................................................61
15.6.6. Emission valid signal .....................................................................................................................................61
15.6.7. Setpoint.............................................................................................................................................................61
15.6.8. RS-485 communication.................................................................................................................................61
16. MULTI IONIZATION GAUGE SH2/ST2/SH200/ST200 (SWU COMBINATION
MODE)....................................................................................................................62

xi
16.1. Sensor Unit Setting: “SAU” ...........................................................................................................62
16.2. Front Panel.........................................................................................................................................62
16.2.1. Pressure display...............................................................................................................................................62
16.2.2. Description of front panel keys....................................................................................................................62
16.3. Setting Operation..............................................................................................................................63
16.3.1. Setting overview .............................................................................................................................................63
16.3.2. RS-485 communication operation setting “L1”, “L2”............................................................................63
16.3.3. Front panel, external I/O operation setting.................................................................................................63
16.3.3.1. Filament operation setting “Fi”..............................................................................................................63
16.3.3.2. Degas operation setting “dE”.................................................................................................................63
16.3.3.3. Filament changeover setting “FL” ........................................................................................................63
16.3.4. Operation setting method..............................................................................................................................64
16.4. Connection with The Sensor Unit .................................................................................................65
16.5. Connection with External Devices................................................................................................65
16.6. Various Signals .................................................................................................................................66
16.6.1. Output voltage.................................................................................................................................................66
16.6.2. Filament off signal..........................................................................................................................................67
16.6.3. Degas on signal ...............................................................................................................................................67
16.6.4. Filament 1/2 changeover signal ...................................................................................................................67
16.6.5. Sensor error signal..........................................................................................................................................67
16.6.6. Emission valid signal.....................................................................................................................................67
16.6.7. Setpoint.............................................................................................................................................................67
16.6.8. RS-485 communication.................................................................................................................................67
17. CCM SERIES CERAMIC CAPASITANCE MANOMETER ...................................68
17.1. Sensor Unit Setting...........................................................................................................................68
17.2. Front Panel Display..........................................................................................................................68
17.2.1. Pressure display...............................................................................................................................................68
17.2.2. Front panel operation.....................................................................................................................................68
17.3. Operation setting...............................................................................................................................68
17.3.1. RS-485 communication operation setting “L1”, “L2”............................................................................68
17.3.2. Front panel and external I/O operation setting “AJ”................................................................................68
17.3.3. Setting method.................................................................................................................................................69
17.4. Connection to Sensor Unit..............................................................................................................70
17.5. Connection to external device ........................................................................................................70
17.6. Signals.................................................................................................................................................70
17.6.1. Output voltage.................................................................................................................................................70
17.6.2. Setpoint.............................................................................................................................................................71
17.6.3. RS-485 communication.................................................................................................................................71
17.7. ZERO Point Adjustment................................................................................................................. 71

xii
17.7.1. Operation front panel .....................................................................................................................................71
17.7.2. Operation external I/O ...................................................................................................................................71
17.7.3. RS-485 communication.................................................................................................................................71
18. CALCULATING FUNCTION.................................................................................72
18.1. Display Pressure Value in CAL Function.................................................................................... 72
Displayed pressure value = Actual measured pressure ×CAL set value.........................................................72
18.2. Output voltage in CAL function mode......................................................................................... 72
18.3. Setting CAL value............................................................................................................................72
18.4. Specific Sensitivity Value of Gas in Hot Cathode Ionization Gauge.....................................73
18.5. CAL Value of Measurement Unit.................................................................................................73
19. INTERLOCK FUNCTION.......................................................................................74
19.1. Interlock Setting................................................................................................................................74
20. MEASUREMENT UNITS FUNCTION...................................................................75
20.1. Measurement Units Setting............................................................................................................. 75
21. MEASUREMENT DISPLAY RANGE SETTING....................................................76
21.1. Measurement display Range rA Setting.......................................................................................76
22. RS-485.....................................................................................................................78
22.1. Communication Specifications......................................................................................................78
22.1.1. Standard specifications ..................................................................................................................................78
22.1.2. Communication setting..................................................................................................................................78
22.2. Setting.................................................................................................................................................78
22.2.1. RS-485 communication setting “L2”..........................................................................................................78
22.2.2. Baud rate setting..............................................................................................................................................78
22.2.3. Address setting................................................................................................................................................78
22.2.4. Setting the checksum collating function.....................................................................................................79
22.2.5. Setting the terminator.....................................................................................................................................79
22.2.6. Setting method.................................................................................................................................................80
22.3. Standard Data Format......................................................................................................................82
22.3.1. Command list ..................................................................................................................................................82
22.3.2. When received normally...............................................................................................................................82
22.3.3. When receiving is faulty................................................................................................................................82
22.4. Command...........................................................................................................................................83
22.4.1. Reading the measurement value/status.......................................................................................................83
22.4.2. Writing status...................................................................................................................................................83
22.4.3. Reading a status...............................................................................................................................................83
22.4.4. Reading the software version .......................................................................................................................83
22.4.5. Reading setpoint1 value.................................................................................................................................83
22.4.6. Reading the setpoint2 value..........................................................................................................................83
22.4.7. Reading the setpoint3 value..........................................................................................................................84
22.4.8. Writing the setpoint1 set value.....................................................................................................................84

xiii
22.4.9. Writing the setpoint2 set value.....................................................................................................................84
22.4.10. Writing the setpoint3 set value.....................................................................................................................84
22.4.11. SW1 ZERO point adjustment command...................................................................................................84
22.4.12. SW1 atmospheric pressure adjustment command ...................................................................................84
22.4.13. SW1 zero point, atmospheric pressure adjustment correction reset command...................................84
22.4.14. CCM zero point adjustment command ......................................................................................................85
22.4.15. Zero point, atmospheric pressure adjustment correction reset command............................................85
22.5. Checksum........................................................................................................................................... 85
22.5.1. Example: when reading the measurement value of address 11 and status ..........................................85
22.6. Status Setting List.............................................................................................................................86
22.6.1. When writing...................................................................................................................................................86
22.6.2. When reading ..................................................................................................................................................87
22.6.3. in reading...............................................................エラー! ブックマークが定義されていません。
22.7. ASCII Code Table............................................................................................................................88
23. TROUBLESHOOTING ...........................................................................................89
24. WARRANTY...........................................................................................................91
25. China RoHS Declaration..........................................................................................92
26. EC DECLARATION OF CONFORMITY................................................................93
27. Certificate of Decontamination................................................................................94

1
1. GETTING STARTED
1.1. Overview of G-TRAN Series
Units of the G-TRAN series vacuum gauges are varied in type and include the following types.
“Sensor Unit” indicates all models and types of box units and sensor units throughout this manual.
as of 2021
Unit
Major
classification
Unit
Minor
classification
Specification Type Model
Measurement
unit
Box unit Analog/communication
Pirani
BPR2*
Ionization
BMR2*
Sensor unit
Analog
Pirani
SP1
Analog
CCG
SC1
Analog/communication
Pirani
(atmospheric pressure)
SW1
Analog/communication
Ionization,
multi ionization
SH2/SH200
ST2/ST200
SH2/ST2/SH200/ST200
dedicated
Pirani SPU
SH2/ST2/SH200/ST200
dedicated
Pirani SWU
SH2/ST2/SH200/ST200
dedicated
Pressure sensor SAU
Analog
Diaphragm
CCMT-D
Display unit
1CH
Digital 24 VDC
Pirani/ionization/
CCG/diaphragm/
multi ionization
ISG1
4CH
Digital
24 VDC
Pirani/ionization/
CCG/multi ionization
IM1R1*
100 VAC
IM2R1*
*: End of sale
1.2. Terminology
The following terms have the same meanings throughout this manual.
Program
PROGRAM
PROG
Filament
FILAMENT
FIL
High voltage
HIGH VOLTAGE
HV
Degas
DEGAS
DEG
Zero
ZERO
ZERO
Setpoint
SETPOINT
ST
Error signal
ERROR
Err
Protection (pressure)
PROTECT
PRT
Emission valid
Emission Valid, Em.Valid
E.V.
Communication mode
Remote mode
RS-MODE
CAL function
CALCULATING FUNCTION
CAL
Pirani vacuum gauge
Pirani gauge
PG
Hot cathode ionization vacuum gauge
Hot cathode gauge
IG
Cold cathode ionization vacuum gauge
Cold cathode gauge
CCG
Diaphragm vacuum gauge
Ceramic capacitance manometer
CCM

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1.3. Features of This Unit
• This display unit is for exclusive use with G-TRAN series:
Pirani gauge
Sensor unit SP1
Sensor unit SW1
Box unit BPR2 (end of sale)
Cold cathode gauge
SC1
Hot cathode gauge
Box unit BMR2 (end of sale)
Multi ionization gauge
SH2/SH200
SH2/SH200: SWU Combination mode
(SH2/SH200+SWU)
SH2/SH200: SPU Combination mode
(SH2/SH200+SPU)
SH2/SH200: SAU Combination mode
(SH2/SH200+SPU+SAU)
ST2/ST200
ST2/ST200: SWU Combination mode
(ST2/ST200+SWU)
ST2/ST200: SPU Combination mode
(ST2/ST200+SPU)
ST2/ST200: SAU Combination mode
(ST2/ST200+SPU+SAU)
Ceramic capacitance manometer
CCM series
• By connecting the sensor unit, measured pressure can be easily displayed, setpoint and other
operations can be performed easily, and the operating state can be checked at a glance.
• Measurement can be made by remote operation via a display unit.
• Two independent pressure setpoints are available
• Compact size compatible with DIN standards (48 ×96)
• Serial communication RS-485 is included.
• CE marking
• Environment-friendly display compatible with RoHS directives.

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2. SPECIFICATIONS AND COMPONENTS
2.1. Specifications
Name
1-channel digital display unit ISG1
Number of sensor units
connected
1 pc.
Sensor unit
G-TRAN
series
Pirani sensor unit SP1
4.0 ×10-1 to 3.0 ×10+3 Pa
Pirani box unit BPR2
Pirani sensor unit SW1-1
5.0 ×10-2 to 1.2 ×10+5 Pa
Cold cathode ionization
gauge SC1
1.0 ×10-5 to 1.0 ×10+0 Pa
Hot cathode ionization
gauge BMR2
5.0 ×10-8 to 9.9 ×10+0 Pa
Multi ionization gauge
SH2-1/SH200-A
5.0 ×10-8 to 1.0 ×10+1 Pa
Multi ionization gauge
SH2-1/SH200-A
(SPU combination mode)
5.0 ×10-8 to 1.0 ×10+4 Pa
Multi ionization gauge
SH2-1/SH200-A
(SAU combination mode)
5.0 ×10-8 to 1.0 ×10+5 Pa
Multi ionization gauge
SH2-1/SH200-A
(SWU combination mode)
5.0 ×10-8 to 1.0 ×10+5 Pa
Multi ionization gauge
ST2-1/ST200-A
1.0 ×10-5 to 1.0 ×10+1 Pa
Multi ionization gauge
ST2-1/ST200-A
(SPU combination mode)
1.0 ×10-5 to 1.0 ×10+4 Pa
Multi ionization gauge
ST2-1/ST200-A
(SAU combination mode)
1.0 ×10-5 to 1.0 ×10+5 Pa
Multi ionization gauge
ST2-1/ST200-A
(SWU combination mode)
1.0 ×10-5 to 1.0 ×10+5 Pa
Ceramic
capacitance
manometer
CCMT-1000A/1000D
0.0×10+1～1.3×10+5 Pa *1
CCMH-1000A
CCMT-100A/100D
0.0×10+0～1.3×10+4 Pa *1
CCMH-100A
CCMT-10A/10D
0.0×10-1～1.3×10+3 Pa *1
CCMH-10A
CCMH-1A
0.0×10-2～1.3×10+2 Pa *1
CCMT-1D
Analog input Reading the analog signal (voltage) from the sensor
Update time
70msec
Internal
processing
5 times moving average
Resolution
0.2mV
Display
Digital display of mantissa part 2 digits, exponential part 1 digit
□.□ ×10
□
Unit
Pa, Torr, mbar
Pressure range
Pressure range of each sensor unit
Update time
200msec
Accuracy
±2% ±1 digit against the pressure value from the measurement unit
* CCM series: 1/10 or less of the full scale ±4 digits

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Analog output
0V to 10VDC pseudo-log. output, log, linear output
Note: The output differs with each unit.
Update time
70msec
Resolution
1mV
Output error
±10mV
Impedance
100Ω
Accuracy
±10mV against the voltage converted value of pressure display
Control input signal
Actuated by open collector input, negative logic.
Filament, etc. ON/OFF signal, zero point adjustment signal, etc.
Control output signal
Open collector output, negative logic.
[Rating: 40VMAX, 90mAMAX, 70mW]
Signal of error, filament and other on signal and others
Setpoints1, 2, 3
LED display
ERROR
ST-1
DGS
ST-2
ZERO
ST-3
Communication
RS-485
Baud rate
9600/19200/38400 bps
Number of nodes
32 (including host)
Distance
1200m (consider separately such as noise)
Memory function
Set value by communication is backed up by EEPROM.
CAL function
Arbitrary value [1.0 ×10-3 to 1.0 ×10+3] is multiplied by the
measurement value and displayed.
Line voltage
24VDC±1V Ripple and noise below 1%
Current consumption
2W (display unit alone)
Note: Power consumption by other interfaced units is to be added.
Maximum 30W (when BRM2 is used)
CE standard
Low voltage directive
2014/35/EU
EN61010-1:2010(3rd Edition),
A1:2019
EMC directive
2014/30/EU
EN61326-2-3:2013
Radiation field intensity
measurement
CISPR11:2009+A1:2010:Group 1
Class A
Static electricity test
IEC61000-4-2:2008
Radiation electromagnetic field
test
IEC61000-4-3:2006+A1:2007
+A2:2010
Transient burst test
IEC61000-4-4:2004+A1:2010
Lightening surge test
IEC61000-4-5:2005
Conduction test
IEC61000-4-6:2008
Commercial magnetic field test
IEC61000-4-8:2009
RoHS
2011/65/EU
EN50581:2012
Over-voltage category
Category I: Connected to a circuit that holds down transient over-
voltage at a sufficiently low level.
I/O connector
Sensor unit side
D-sub 15pin connector female, M2.6mm screw
Control host side
D-sub 15pin connector male, M2.6mm screw
Power supply
Phoenix model MSTB2.5/3-GF-5.08

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Connected cable length
Length of cable from this unit to the sensor unit, calculated with
24AWG.
Pirani sensor unit
SP1
up to 50m
Pirani box unit
BPR2
up to 100m
Pirani gauge
SW1
up to 100m
Cold cathode ion gauge
SC1
up to 100m
Hot cathode ion gauge
BMR2
up to 10m
Multi ionization gauge SH2-1/ST2-1/SH200-A/ST200-A
up to 20m
Multi ionization gauge SH2-1/ST2-1/SH200-A/ST200-A
(SPU /SWU combination)
up to 20m
Multi ionization gauge SH2-1/ST2-1/SH200-A/ST200-A
(SAU combination)
up to 20m
Ceramic capacitance manometer CCMT series
up to 100m
Ceramic capacitance manometer CCMH series
up to 15m
Operating temperature
range
10 to 40°C
Operating humidity range
15 to 80% (not condensing)
Storage
-20 to 65°C (non-operating, not condensing)
Weight
250g
Outside dimensions
DIN 48mm ×96 mm, basic unit 70mm deep
JIS rack size 50mm ×100mm is also available as option.
*1: Pressure display of CCM series: The minimum digit are 1.0, 2.0 … 9.0, the decimal point is not
displayed.
2.2. Standard Accessories
Power connector
MSTB 2.5/3-STF-5.08 made by PHOENIX
1 pc.
DIN panel fixing tools
fitting
2 pcs.
Quick manual
1 pc
2.3. Options
JIS rack size type
Display unit cable
2, 5, 10, 15, 20, 25, 30, 35, 40m long
(between ISG1 and sensor unit)
Sensor unit, sensor
See section 1.3
D-sub 15pin connector female
M2.6mm screw, for sensor connector
D-sub 15pin connector male
M2.6mm screw, for I/O connector
JCSS calibration certificate
Only combination with sensor unit
General proofreading test
Only combination with sensor unit
Inspection certificate
Calibration certificate

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2.4. Dimensional Drawings DIN Panel Size
91
92
45
PANEL CUT
48
96
83
44.5
70
10
ST1ST2ST3
ERROR
DEG
ZERO
ZERO DEG FILPRO
G
SENSOR
I / O
DC24VFG
-
+
10 11 12 14 15139
1 2 3 4 76 85
1 2 3 4 76 85
10 11 12 14 15139
(60) (100)
(R50)
(105)

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2.5. Installation DIN Panel
Panel thickness: <4mm