Ulvac G-Tran Series User manual

i
YK06-0044-EI-003-18
G-TRAN Series
1-Channel Display Unit
Model ISG1
Instruction Manual
This manual is for the display units of the
following serial numbers:
Serial No. 09501 and higher.
Read this manual before operation and keep it at
hand for immediate reference.
Model
Serial numbers
Multi Ionization Gauge ST2-1
00901
～
Multi Ionization Gauge SH2-1
06001
～
Multi Ionization Gauge ST200-A
00001
～
Multi Ionization Gauge SH200-A
00001
～
Cold-Cathode Ion Gauge SC1
02300G
～
Pirani Vacuum Gauge SW1-1
00001
～
Pirani Vacuum Gauge SP1
00001
～
Ceramic Capacitance Manometer CCMT-D series
00001
～
Components Division,
ULVAC, Inc.

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Prior to Operation
Upon receipt of this detector, make sure that it is the correct model you ordered and that it is not
damaged in transit.
Read this instruction manual before installing, operating, inspecting, or
maintaining the product and fully understand the safety precautions,
specifications and operating procedures regarding the product.
The copyright of this instruction manual is held by ULVAC, Inc.
You are prohibited from copying any portion of this instr
uction manual
without the consent of ULVAC Inc. You are also prohibited from disclosing
or transferring this instruction manual to third parties without the express
written consent of ULVAC Inc.
The contents described in this instruction manual are subject to change
without prior notice because of changes in specifications or because of
product improvements.
Safety Notations
Safety symbols are used throughout this instruction manual to call the
operator's attention to safety. The terminology used in safety symbols is
classified below.
Indicate status of urgency of danger when failure to comply with DANGER
results in serious personal injury or death
The work ignoring this warning will lead to serious damage to human life or
factory facility (including this equipment) at a high probability.
Indicate status of danger when failure to comply with WARNING results in
serious worker’s injury or death.
The work ignoring this warning will cause possibility leading to serious
damage to human life or factory facility (including this equipment).
Indicate status of danger when failure to comply with WARNING results in
minor injury or moderate damage.
The work ignoring this warning will cause possibility leading to minor
damage to worker or breakage to equipment or necessary to adjust.
Direct hazard is not existed, describe the necessity to know
from the
viewpoint of worker’s safety or correct and safe operation of equipment
✔Note

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Safety Precautions
For safe operation of this unit, read this manual and the following safety precautions.
Servicing
For repair and servicing, contact your local ULVAC representative or
Components Division, ULVAC, Inc., Japan.
Turn OFF power.
If the unit fails, immediately turn off the power.
Use of a failed unit may cause a fire or electric shock.
Turn off power.
If the unit gets unusually hot or gives off smoke or unusual smell,
immediately turn off the power. Otherwise, fire can result.
Power supply
Before turning on the power to this instrument, make sure that the
operating voltage and supply power are in agreement. If incorrect power
is connected, this instrument and devices connected to this instrument may
fail or fire may result. The over-voltage comes under Category 1.
Protective grounding
Ground the sensor with class D (class 3) grounding. If the sensor is not
correctly connected, it will not only show the wrong pressure, there is a
risk of damage to the sensor and the equipment connected to the sensor
and a risk of fire.
Power supply
The unit may only be connected to supply and measurement units that
conform to the requirements of a grounded protective extra-low voltage
(SELV-E according to EN 61010). The connection to the gauge has to be
fused.
Power cable
The power cable is not packed in the same case. Use a cable having a
sufficient current capacity.
Installing an external switch in the power line
This unit has no power switch. Install an external switch, breaker and
over-current protector.
Check connection
See to it that the connection cables do not come into contact with other
conducting parts.
Do not disassemble
Do not disassemble this unit.
Do not modify
Do not modify this unit. If modified, its actions are not warranted. Also
fire or electric shock can result.
Be careful of operating environment.
Do not use the unit in a place where it may be splashed with water. If it
is wetted, trouble, electric leak or fire can result.
Laying cables
Before turning on power, install the display cable, sensor unit, sensor,
and others.
Keep out foreign objects
If any foreign objects, such as metals or combustibles, are admitted into
the unit through an opening, remove them. Also keep foreign objects away
from the terminals on the rear panel of the unit. Otherwise, the unit may
be damaged.
Discarding
If this unit is discarded, follow the regulations of your local government.
Incidentally, expenses for disposing of this unit are on the user’s account.

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Operating conditions
Use this
unit within the scope of the environment set forth in the
specification.
Maintenance
The electric circuit in this instrument uses aluminum electrolytic
capacitors. Generally speaking, the
life of the aluminum electrolytic
capacitor becomes short as the ambient temperature rises. To prevent
components from damage, it is recommended to conduct maintenance at
ULVAC about once every 3 years.
Cautions in shipping the unit
If the unit is to be shipped back to ULVAC, pack it in the original
condition. If it is shipped bare, it may be damaged.

v
Revision History
DATE
No.
Reason
Apr. 4, 2008
03
S/N:00001～first version
Aug. 25, 2009
04
・
Added CCMT-1000D/100D/10D/1D
・Section 2.1, added output impedance to specifications.
・Chapter 22, added EC DECLARATION OF CONFORMITY.
・
Chapter 18, added Interlock function.
July 27, 2011
05
・
Changed A5 version to B6 version.
・
Added multi-ionization gauge SH2
Mar. 1, 2012
06
S/N:01482～
Added SH2 (SPU combination mode), SH2 (SAU triple combination mode)
June 1, 2012
07
Corrected an error.
June 12, 2012
08
Corrected an error.
Sept. 10, 2013
09
・
BMR2 and BPR2 were discontinued.
・Chapter 10, added that in SC1 when it is lower than the measuring lower limit,
“HuF” is displayed and the output voltage is 10V.
Jun. 7, 2014
10
S/N:04050～
・Added connection check in combination mode of SH2.
Notice: SH2 before S/N:01000 does not output a set point.
・Chapter 5, displayed the sensor which is set in the program mode
・Chapter 6, added 『nc』which means that the sensor is not set and the setting is
factory default to the sensor unit selection.
July 7, 2014
11
Corrected an error.
Oct. 9, 2015
12
Added multi-ionization gauge ST2.
Nov. 21, 2017
13
Added the explanation of CALCULATION function to the pressure conversion
expression of each sensor.
Apr.20, 2018
14
Added the Measurement units function.
Jul.3, 2018
15
Added the Measurement display range function.
Oct.10, 2019
16
Added Pirani Vacuum gauge Measuring Unit SWU
Corrected an error.
Dec.25, 2020
17
Section 2.2, Delete the instruction manual CD from the standard accessories.
Section 2.1, Revised CE standard.
Section 26, Revised EC Declaration of Conformity.
Section 27, Revised certificate of Decontamination.
Mar.15,2021
18
Added multi ionization gauge SH200,ST200
Corrected an error

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Contents
Page
Prior to Operation.................................................................................................................... ii
Safety Notations ...................................................................................................................... ii
Safety Precautions..................................................................................................................iii
Revision History.......................................................................................................................v
Contents .................................................................................................................................vi
1. GETTING STARTED................................................................................................1
1.1. Overview of G-TRAN Series............................................................................................................1
1.2. Terminology .........................................................................................................................................1
1.3. Features of This Unit...........................................................................................................................2
2. SPECIFICATIONS AND COMPONENTS ................................................................3
2.1. Specifications........................................................................................................................................3
2.2. Standard Accessories..........................................................................................................................5
2.3. Options...................................................................................................................................................5
2.4. Dimensional Drawings DIN Panel Size..........................................................................................6
2.5. Installation DIN Panel.........................................................................................................................7
2.6. Dimensional Drawings JIS panel size..........................................................................................8
3. NAMES OF COMPONENTS AND DESCRIPTION OF FUNCTIONS .....................9
3.1. Front Panel Lights................................................................................................................................9
3.2. Front Panel Switch Program Mode...............................................................................................10
3.3. Front Panel Switch Measurement Mode......................................................................................11
3.4. Rear Panel ..........................................................................................................................................12
3.5. Sensor Connector (D-sub 15pin connector female, M2.6mm screw).................................... 13
3.6. I/O Connector (D-sub 15pin connector male, M2.6mm screw)..............................................14
3.7. Power Supply Connector (Phoenix model MSTB2.5/3-GF-5.08)..........................................15
4. INSTALLATION.....................................................................................................16
4.1. Preparations........................................................................................................................................16
4.2. Installation..........................................................................................................................................16
4.2.1. Installing the display unit...............................................................................................................................16
4.2.2. Circuit in the power supply...........................................................................................................................16
4.2.3. Installation........................................................................................................................................................17
5. FRONT PANEL OPERATION................................................................................18
5.1. Description of Front Panel Keys....................................................................................................18
5.1.1. Program mode.................................................................................................................................................18
5.1.2. Key operation in measurement ....................................................................................................................18
6. SELECTION OF SENSOR UNIT............................................................................19
6.1. Selection of Sensor Unit..................................................................................................................19
6.2. Reset The Unit to The Factory Default Settings.........................................................................20
6.3. Factory Set Values............................................................................................................................20

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7. SETPOINT ..............................................................................................................21
7.1. What is Setpoint?..............................................................................................................................21
7.2. Setpoint Setting Range.....................................................................................................................21
7.3. How to Set Setpoint.......................................................................................................................... 21
7.3.1. How to Set Setpoint from Front Panel........................................................................................................22
7.3.2. How to set setpoint from RS-485................................................................................................................23
8. CONNECTION WITH EXTERNAL DEVICES.......................................................24
8.1. Output Signal.....................................................................................................................................24
8.2. Input Signal........................................................................................................................................25
8.2.1. RS-485 communication.................................................................................................................................25
9. PIRANI GAUGE SW1.............................................................................................26
9.1. Sensor Unit Setting: “SP2”.............................................................................................................26
9.2. Front Panel.........................................................................................................................................26
9.2.1. Pressure display state......................................................................................................................................26
9.2.2. Description of front panel keys....................................................................................................................26
9.3. Setting Operation..............................................................................................................................26
9.3.1. RS-485 communication operation setting “L1”, “L2”............................................................................26
9.3.2. Front panel, external I/O operation setting: “AJ” .....................................................................................27
9.3.3. Method of setting............................................................................................................................................27
9.4. Connection with Sensor Unit..........................................................................................................28
9.5. Connection to External Device ......................................................................................................28
9.6. Various Signals .................................................................................................................................28
9.6.1. Output voltage.................................................................................................................................................28
9.6.2. Filament burnout signal.................................................................................................................................29
9.6.3. ADJ adjustment...............................................................................................................................................29
9.6.4. Setpoint.............................................................................................................................................................29
9.6.5. RS-485 communication.................................................................................................................................29
9.7. Zero Point Adjustment and Atmospheric Pressure Adjustment..............................................29
9.7.1. Adjusting method............................................................................................................................................29
10. COLD CATHODE GAUGE SC1.............................................................................30
10.1. Setting The Sensor Unit...................................................................................................................30
10.2. Front Panel.........................................................................................................................................30
10.2.1. Pressure display...............................................................................................................................................30
10.2.2. Front panel key description...........................................................................................................................30
10.3. Settings Operation ............................................................................................................................30
10.3.1. RS-485 communication operation setting “L1”, “L2”............................................................................30
10.3.2. Front panel, external I/O operation setting: “Hi”......................................................................................30
10.3.3. Operation setting method..............................................................................................................................31
10.4. Connection to The Sensor Unit: “SENSOR” Connector..........................................................32
10.5. Connection with External Devices: “I/O” Connector................................................................32

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10.6. Signals.................................................................................................................................................32
10.6.1. Output voltage.................................................................................................................................................32
10.6.2. HV ON signal: Pin 5......................................................................................................................................33
10.6.3. Discharge check signal: Pin 4.......................................................................................................................33
10.6.4. Setpoint: Pins 3, 7, 11.....................................................................................................................................33
10.6.5. RS485 communication: Pins 10, 12............................................................................................................33
11. PIRANI GAUGE BPR2/SP1 ....................................................................................34
11.1. Sensor Unit Setting: “SP1”............................................................................................................. 34
11.2. Front Panel.........................................................................................................................................34
11.2.1. Pressure display...............................................................................................................................................34
11.2.2. Description of front panel keys....................................................................................................................34
11.3. Setting Operation..............................................................................................................................34
11.3.1. RS-485 communication operation setting “L1”, “L2”............................................................................34
11.3.2. Operation setting method..............................................................................................................................35
11.4. Connecting to The Sensor Unit...................................................................................................... 35
11.5. Connection with External Devices................................................................................................36
11.6. External Input/Output Signal.......................................................................................................... 36
11.6.1. Output voltage.................................................................................................................................................36
Burnout signal...............................................................................................................................................................37
11.6.3. Setpoint.............................................................................................................................................................37
11.6.4. RS-485 communication.................................................................................................................................37
12. HOT CATHODE GAUGE BMR2............................................................................38
12.1. Sensor Unit Setting: “Sn1” .............................................................................................................38
12.2. Front Panel.........................................................................................................................................38
12.2.1. Pressure display...............................................................................................................................................38
12.2.2. Description of front panel keys....................................................................................................................38
12.3. Setting Operation..............................................................................................................................38
12.3.1. Setting overview .............................................................................................................................................38
12.3.2. RS-485 communication operation setting “L1”, “L2”............................................................................39
12.3.3. Front panel, external I/O operation setting.................................................................................................39
12.3.3.1. Filament operation setting “F1”.............................................................................................................39
12.3.3.2. Degas operation setting “dE”.................................................................................................................39
12.3.3.3. Filament changeover setting “FL” ........................................................................................................39
12.3.3.4. Operation setting method........................................................................................................................40
12.4. Connection with The Sensor Unit .................................................................................................41
12.5. Connection with External Devices................................................................................................ 41
12.6. Various Signals .................................................................................................................................42
12.6.1. Output voltage.................................................................................................................................................42
12.6.2. Filament on signal...........................................................................................................................................42
12.6.3. Degas on signal ...............................................................................................................................................42

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12.6.4. Filament1/2 changeover signal ....................................................................................................................42
12.6.5. Pressure protection signal..............................................................................................................................43
12.6.6. Emission valid signal .....................................................................................................................................43
12.6.7. Setpoint.............................................................................................................................................................43
12.6.8. RS485 communication..................................................................................................................................43
13. MULTI IONIZATION GAUGE SH2/ST2/SH200/ST200.........................................44
13.1. Sensor Unit Setting: “Sh2” .............................................................................................................44
13.2. Front Panel.........................................................................................................................................44
13.2.1. Pressure display...............................................................................................................................................44
13.2.2. Description of front panel keys....................................................................................................................44
13.3. Setting Operation..............................................................................................................................45
13.3.1. Setting overview .............................................................................................................................................45
13.3.2. RS-485 communication operation setting “L1”, “L2”............................................................................45
13.3.3. Front panel, external I/O operation setting.................................................................................................45
13.3.3.1. Filament operation setting “Fi”..............................................................................................................45
13.3.3.2. Degas operation setting “dE”.................................................................................................................45
13.3.3.3. Filament changeover setting “FL” ........................................................................................................45
13.3.3.4. Operation setting method........................................................................................................................46
13.4. Connection with The Sensor Unit .................................................................................................47
13.5. Connection with External Devices................................................................................................ 47
13.6. Various Signals .................................................................................................................................48
13.6.1. Output voltage.................................................................................................................................................48
13.6.2. Filament on signal...........................................................................................................................................48
13.6.3. Degas on signal ...............................................................................................................................................48
13.6.4. Filament1/2 changeover signal ....................................................................................................................49
13.6.5. Pressure protection signal..............................................................................................................................49
13.6.6. Emission valid signal .....................................................................................................................................49
13.6.7. Setpoint.............................................................................................................................................................49
13.6.8. RS-485 communication.................................................................................................................................49
14. MULTI-IONIZATION GAUGE SH2/ST2/SH200/ST200 (SPU COMBINATION
MODE)....................................................................................................................50
14.1. Sensor Unit Setting: “SPU”............................................................................................................50
14.2. Front Panel.........................................................................................................................................50
14.2.1. Pressure display...............................................................................................................................................50
14.2.2. Description of front panel keys....................................................................................................................50
14.3. Setting Operation..............................................................................................................................51
14.3.1. Setting Overview ............................................................................................................................................51
14.3.2. RS-485 communication operation setting “L1”, “L2”............................................................................51
14.3.3. Front panel, external I/O operation setting.................................................................................................51
14.3.3.1. Filament operation setting “Fi”..............................................................................................................51

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14.3.3.2. Degas operation setting “dE”.................................................................................................................51
14.3.3.3. Filament changeover setting “FL” ........................................................................................................51
14.3.4. Operation setting method..............................................................................................................................52
14.4. Connection with The Sensor Unit .................................................................................................53
14.5. Connection with external devices.................................................................................................. 53
14.6. Various Signals .................................................................................................................................54
14.6.1. Output voltage.................................................................................................................................................54
14.6.2. Filament off signal..........................................................................................................................................54
14.6.3. Degas on signal ...............................................................................................................................................55
14.6.4. Filament1/2 changeover signal ....................................................................................................................55
14.6.5. Sensor error signal..........................................................................................................................................55
14.6.6. Emission valid signal .....................................................................................................................................55
14.6.7. Setpoint.............................................................................................................................................................55
14.6.8. RS-485 communication.................................................................................................................................55
15. Multi Ionization Gauge SH2/ST2/SH200/ST200 (SAU triple combination mode) ...56
15.1. Sensor Unit Setting: “SAU” ...........................................................................................................56
15.2. Front Panel.........................................................................................................................................56
15.2.1. Pressure display...............................................................................................................................................56
15.2.2. Description of front panel keys....................................................................................................................57
15.3. Setting Operation..............................................................................................................................57
15.3.1. Setting overview .............................................................................................................................................57
15.3.2. RS-485 communication operation setting “L1”, “L2”............................................................................57
15.3.3. Front panel, external I/O operation setting.................................................................................................57
15.3.3.1. Filament operation setting “Fi”..............................................................................................................57
15.3.3.2. Degas operation setting “dE”.................................................................................................................57
15.3.3.3. Filament changeover setting “FL” ........................................................................................................57
15.3.4. Operation setting method..............................................................................................................................58
15.4. Connection with The Sensor Unit .................................................................................................59
15.5. Connection with External Devices................................................................................................ 59
15.6. Various Signals .................................................................................................................................60
15.6.1. Output voltage.................................................................................................................................................60
15.6.2. Filament off signal..........................................................................................................................................61
15.6.3. Degas on signal ...............................................................................................................................................61
15.6.4. Filament1/2 changeover signal ....................................................................................................................61
15.6.5. Sensor error signal..........................................................................................................................................61
15.6.6. Emission valid signal .....................................................................................................................................61
15.6.7. Setpoint.............................................................................................................................................................61
15.6.8. RS-485 communication.................................................................................................................................61
16. MULTI IONIZATION GAUGE SH2/ST2/SH200/ST200 (SWU COMBINATION
MODE)....................................................................................................................62