Ulvac MBD Series User manual

CRYO-METER MBD series
MBD-S / MBD-T
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Instruction Manual
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Export Control Policy
We recommend that ALL customers be sure to follow all
rules and regulations such as Foreign Exchange and
Foreign Trade Law when exporting or reexporting our
products.
D/N.MGMBD01E,2018JE04 ULVAC CRYOGENICS INCORPORATED

MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED F-1
Introduction
Thank you for choosing our products. This instruction manual gives
information and precautions on handling, installation, operation, and
maintenance of the product.
This product is intended for use by qualified personnel who recognize shock
hazards and are familiar with the safety precautions required to avoid possible
injury. To ensure proper use of this product, read this instruction manual
carefully and keep this manual close at hand so that you can use for reference
during operation.
If you purchased our other products and/or optional devices with this product,
read relevant instruction manuals carefully.
1. About the personnel who are involved in handling our products
All personnel involved in handling our products should take a general safety
education and training that is officially accepted in the country where our product
is used. The personnel are also required to have specialized knowledge/skills and
qualification on the electricity, the machinery, the cargo handling, and the vacuum.
Especially, the personnel should be familiar with handling a cryopump in order to
use it safely. Since we offer a training session (which is subject to fees) as needed
for people who use cryopumps for the first time, please do not hesitate to contact
our Service Engineering Division to join the training session.
2. Warranty
2.1 Gratis warranty period and Warranty coverage
【Gratis warranty period】
Note that an installation period of less than one year after installation in your
company or your customer’s premises or a period of less than 18 months (counted
from the date of production) after shipment from our company, which is shorter, is
selected.
【Coverage】
(1) Failure diagnosis
As a general rule, diagnosis of failure should be done on site by customer.
However, ULVAC CRYOGENICS or our service network can perform this service
for an agreed fee upon the customer’s request. There will be no charge if the cause

F-2 ULVAC CRYOGENICS INCORPORATED
of the breakdown is found to be a fault of ULVAC CRYOGENICS.
(2) Damage during transportation
When damage by delivery/transportation is admitted, the product will be
repaired free of charge within the range of the guarantee expressed in the sales
contract.
(3) Breakdown repairs
There will be a charge for breakdown repairs, replacements and on-site visits
for the following seven conditions. In those cases the cost shall be your own
expense even though the product is within the warranty period.
①Breakdowns due to improper storage or handling, careless accident, software
or hardware design by the customer.
②Breakdowns due to modifications of the product without consent of the
manufacturer.
③Breakdowns due to maintenance of the product without authentic parts or
breakdowns resulting from using the product outside the specified
specifications of the product.
④Breakdowns due to contamination or corrosion caused by user’s use
conditions.
⑤Breakdowns due to natural disasters (such as fire, earthquake, flood,
lightning, salt damage, and so on) , environmental pollution, irregular voltage,
and /or usage of undesignated power source.
⑥Breakdowns that are outside the terms of warranty.
⑦Consumables and/or replacement service.
Since the above services are limited to within Japan, diagnosis of failures, etc are
not performed abroad. If you desire the after service abroad, please contact
ULVAC CRYOGENICS and consult us for details in advance.
2.2 Exclusion of opportunity loss from warranty liability
Regardless of the gratis warranty term, compensation to opportunity losses
incurred to your company or your customers by failures of ULVAC CRYOGENICS
products and compensation for damages to products other than ULVAC
CRYOGENICS products and other services are not covered under warranty.

MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED F-3
2.3 Repair period after production is discontinued
ULVAC CRYOGENICS shall accept product repairs for seven years after
production of the product is discontinued.
3. Service Form
After the products are delivered, please fill out the following information in the
blanks. If you have any questions or technical problems, please feel free to contact
the nearest Customer Support Center or headquarters. Please refer to “Service
Network”.
Cryopump／Super trap Model ：
Cryopump／Super trap Serial No. ：
Refrigerator Model ：
Refrigerator Serial No. ：
Compressor Model ：
Compressor Serial No. ：
Temperature controller／Thermal display Model ：
Temperature controller／Thermal display Serial No. ：
Option Part Model ：
Optional Part Serial No. ：
4. Notes for repair and maintenance requests
We may decline your request for the repair or the maintenance of our products if
you refuse to give us information about the presence of the hazardous substance
and/or contaminant.
Also, please be aware that we do not accept liability for damages by the
contaminant, which might be caused during transportation to our office or the
nearest customer support center. To avoid such accident, please pay careful
attention to packing of the product
5．In case of breakdown and accident
When breakdown or accident occurs, we may ask for keeping the product on site
as it is or retrieving the product to investigate its cause. Also we may ask for
reporting the detailed process and/or the operating condition. When unidentified
malfunction was generated, please contact our Service Engineering Division or

F-4 ULVAC CRYOGENICS INCORPORATED
the nearest customer support center with reference to the chapter of Service
Network. We ask for cooperation about the above.
6．General Precautions
(1) It is strictly prohibited to duplicate, open, and transfer this instruction
manual or any of its parts to a third person without written permission from
ULVAC CRYOGENICS.
(2) Information in this document might be revised without a previous notice for
the specification change and the improvement of the product.
(3) If you have any questions or comments on this document, please do not
hesitate to contact us. The phone numbers of local customer support centers
are listed at the end of this manual.

MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED F-5
Safety Considerations
Our products have been designed to provide extremely safe and dependable operation
when properly used. Following safety precautions must be observed during normal
operation and when servicing them.
CAUTION
WARNING
A warning describes safety hazards or unsafe practices
which could result in severe injury or loss of life.
Acaution describes safety hazards or unsafe practices which
could result in personal injury or equipment damage.
Toxic gas or chemicals used.
There is a risk of severe injury upon contact.
Corrosive chemicals used.
There is a risk of severe injury upon contact.
Flammable gas used.
There is a danger of fire or burn injury.
Explosive gas used.
There is a risk of fire or explosion.
Hazardous voltage .
Electric shock may cause severe injury or loss of life.
Hot heating part present.
There is a risk of burn injury.

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MZIW001E,2010.01 ULVACCRYOGENICSINCORPORATED IW-1
Disposal Consideration
Regulations and the ordinance concerning industrial waste treatment are provided in the
country and region to discard. When disposing our products, please process abandonment
according to relevant regulations and ordinance, etc.
When it seems that the cryopump or refrigerator has been used to evacuate a toxic or
dangerous material, you must contact a safety supervisor before discarding, and discard it
after removing the poisonous material according to directions of the safety supervisor.
We will offer you Material Safety Data Sheet (called MSDS) of our products upon your request.
If you have any questions, please contact our Service Engineering Division or the nearest
customer support center.
WARNING

IW-2 ULVAC CRYOGENICS INCORPORATED
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CRYO METER MBD series Instruction Manual
TABLE OF CONTENTS
1. Features and types··············································································1
2. Specifications ·····················································································2
3. Connector Specifications·······································································3
4. Installation ·························································································4
5. Operation ··························································································8
6. Troubleshooting ··················································································8
CRYO METER MBD-S / MBD-T Dimensions················································· 11
FIGURES
Figure 1-1 MBD-S Appearance ................................................................................1
Figure 1-2 MBD-T Appearance ................................................................................1
Figure 1-3 Types of MBD series...............................................................................1
Figure 2-1 MBD Front Panel ...................................................................................3
Figure 3-1 MBD Rear Panel.....................................................................................3
Figure 4-1 Wiring of MBD-S/MBD-T and MBS-C...................................................5
Figure 4-2 Wiring of MBD-S/MBD-T and MBS.......................................................6
Figure 4-3 MBD-S/MBD-T Power Supply Circuit...................................................7
Figure 5-1 CRYO METER MBD Display.................................................................8
TABLES
Table 2-1 Specifications..........................................................................................2
Table 3-1 Connectors Input/Output Pins...............................................................3
Table 6-1 Troubleshooting List .............................................................................9
ULVAC CRYOGENICS INCORPORATEDI

Table of contents
II ULVAC CRYOGENICS INCORPORATED
SHIPPING LIST
Our product has been fully inspected before shipment. However, please make
sure that there is no damage or shortage of delivered items by checking the
shipping list below and the external view of the products.
ITEM QUANTITY
CRYO METER MBD-S/MBD-T (with power cable)(*1) 1
Clamp kit (Holder & Set Screw×2) 1
Connector set (R03-PB3M, R03-PB2F)（See table.3-1）(*2) 1
Instruction Manual 1
(*1)The length of the power cable is 3m fixed.
(*2) Types of cables for connecting MBD-S/MBD-T to MBS-C or MBS are listed on page 2
(Table 1-2) in MBS-C instruction manual. Please refer the table and order
appropriate one. These cables are not included in MBD series.
Note: A connector set will be provided with MBD-S/MBD-T, not with those cables.
Inspection and Adjustment of CRYO METER MBD series
Please contact our technical service department when inspection and/or adjustment
of CRYO METER MBD series are needed. No circuit or any other parts of this
product may be changed and/or adjusted in any shape or form in any circumstances.
Note that any inspection, check, adjustment and repair caused by such change
and/or adjustment will be only accepted at your expense even if it is within the
warranty period .

CRYO METER MBD series Instruction Manual
1. Features and types
CRYO METER MBD series is an accessory device for cryogenic thermal display. It can
be used in combination with CRYO METER MBS-C or MBS, cryogenic thermocouple
thermometer connected to UCI cryopump. The MBD inputs the analog output signal
from MBS-C/MBS and displays cryopump 2nd stage temperature numerically. The
display range is from 10K to 350K.
Existing MBD has enhanced in application and has become two different CRYO
METER, MBD-S and MBD-T. The main difference between them is the power cables.
MBD-S is the equivalent product of existing MBD and has AC100V plug as a power
cable terminal whereas MBD-T has round terminals at the end of power cable and can
be used when input power source is AC200V.
Figure 1-1 and 1-2 show the appearances of MBD-S and MBD-T.
Figure 1-1 MBD-S Figure 1-2 MBD-T
(Types)
MBD -





Figure 1-3 Types of MBD series
(Names for ordering)
These products can be ordered by names as shown the table below.
Note that ordering “MBD” will be considered as ordering “MBD-S”
Names for ordering Product types
“MBD-S”, “MBD”, or “MBD (AC100V)” MBD-S
“MBD-T”, or “MBD (AC200V)” MBD-T
S = Power plug
T = Round terminals
(Crimping terminals with sleevesΦ3.5)
Type of power cable
ULVACCRYOGENICSINCORPORATED 1

CRYO METER MBD series Instruction Manual
Although just “MBD” means “MBD-S” at ordering, MBD is used as the name for
both MBD-S and MBD-T when there is no need to distinguish between them in
this instruction manual.
< Note>
2. Specifications Table 2-1 Specifications
Model MBD-S MBD-T
Dimensions 90(W)×43(H)×119(D) (mm)
(Refer dimension drawing for details)
Temperature Display Cryopump second stage temperature (3 digit number)
Measure Range 10K〜350K (-263℃〜+77℃)
Accuracy ±2.0% (Full Scale)
(±1K at temperature between 10K and 30K)
ANALOG Input 5V〜0V (10K〜350K)
Input impedance: Approx. 100KΩ
Input Power Source Voltage: 100 - 115VAC ±15%
Current: 0.15A typ. Voltage: 100 - 220VAC ±15% Current: 0.15A typ.
Input power source cable Two-pole plug with earth(*1)
3m
Round terminal ends
3m (Crimping terminals with
sleevesΦ3.5)
24V Output (Power out) Dedicated power source for CRYO METER MBS / MBS-C (*2)
Voltage: 23 - 25VDC Current: 120mAmax.
Operating Environment Ambient Temperature: 0 - 40℃(typ. 25°C)
Storage Temperature: -20 - 70℃(No freezing)
Ambient Humidity: 40%〜85% RH (No condensing)
Dielectric resistance AC Input - FG: >50MΩ(at DC500M)
Dielectric Strength Voltage AC Input - FG:AC2000V/1 min
24V Output - FG: AC500V/1 min
Noise Immunity
(Impulse method)
Power line: (50nS/1uS)
Common mode/Normal mode: 2000V
Input/Output line: (50nS/1uS)
Common mode/Normal mode: 500V
Weight Approx. 500g
Note
(*1) This power cable is according to Electrical Appliance and Material Safety Law of Japan and for
domestic use only. Do not use AC200V
(*2) The power source cannot be used for more than one CRYO METER or any other equipment.
2 ULVAC CRYOGENICS INCORPORATED

CRYO METER MBD series Instruction Manual
ULVACCRYOGENICSINCORPORATED 3
Figure 2-1 MBD Front Panel
3. Connector Specifications
Figure 3-1 MBD Rear Panel
Table 3-1 Connectors Input/Output Pins
Names ReceptaclePins Connectable plug
types Assignments Functions


POWEROUT
24V





R03-PB3M
or
R03-P3M
(Cableattached)
A +24V ForMBS/MBS-C
24VPowersupplyoutput

B NoConnection
C 0V
ANALOGIN




R03-PB2F
or
R03-P2F
(Cableattached)
A +INPUT ANALOGSignalInputfrom
MBS/MBS-C
+5–0V/10–350K
B - ACOM
A
B
A
B
C
Ｋ
Digital temperature display
3-digit
Power lamp

CRYO METER MBD series Instruction Manual
4. Installation
Follow the instruction below to install the MBD on your display panel with a clamp kit.
After installing the MBD, connect cables to the MBD.
A clamp kit and cables are provided with the MBD.
(1) Insert the MBD from the front through the rectangle hole of your panel as shown below.
(2) Fix the clamp holders on top and bottom or
left and right sides of the MBD.
(3) Tighten the set screws to mount the MBD firmly.
OR
Clamp holders mounting positions
(Left and right)
Clamp holders mounting positions
(Top and bottom)
92-0.0, +0.5
45 –0.0, +0.5
(Panel cut)
User’s cabinet panel
(1)
(2)
(2)
(3)
(3)
Ti
g
hten with a slotted screwdrive
r
(Inside of the user’s cabinet.)
(Front)
4 ULVAC CRYOGENICS INCORPORATED

CRYO METER MBD series Instruction Manual
ULVACCRYOGENICSINCORPORATED 5
◆Wiring
After the MBD has been installed to the panel, connect the MBD to the MBS-C. [MBD -
MBS-C connecting cable (MBD-HS30)] can be used for connecting MBD to MBS-C
POWER and ANALOG OUT (I/O connectors). In this case, wiring of MBS-C RELAY and
K(CA) needs to be done by users. (Refer to the dotted lines in the diagram below.)
To choose other cables, please refer to the Table 1-2 or appendix 2 in MBS-C instruction
manual. The [MBS-MBD connecting cable] will be required to connect the MBD-S/MBD-T
to existing MBS. Please specify the cable at time of order. The wiring of MBS and
MBD-S/MBD-T is shown in Figure 4-2.



Figure 4-1 Wiring of MBD-S/MBD-T and MBS-C
Conduit Requirements for MBD wiring
To prevent interference during the operation, there should be a separate conduit for each signal
line, control line and AC power line. Especially ANALOG signal line of MBS-C must be in
separate conduit from other equipments or AC power lines or control lines for other equipments.
Otherwise, MBS-C operation will be interfered.
If separate conduits cannot be supplied, keep enough distance (generally 300mm or more)
between different wirings. It is effective to prevent interference.
CAUTION
MBD-S: AC100V Plug
MBD-T: Terminal connection (AC100-200V)
A
B
MBS-C
PO ER
ANALOG
OUT
K(CA)
W
RELAY
A
B
C
A
B
MBD
POWER OUT
ANALOG IN
Twisted shielded cable
Twisted shielded cable
AWG#24,or0.3mm2max.
AWG#24,or0.3mm2max.
DIGITAL IN
K thermocouple IN
[Userʼscontrolpanel] 
User equipment side
User equipment side
+
-
+
-
< 20K
> 280K
(*1)
(*1)
(Signal cable)
(DC Power cable)
6
14
2
10
4
12
5
13
I/O
K(CA)
POWER
RELAY
ANALOG OUT
Power cable
(*1)MBD - MBS-Cconnecting cable (MBD-HS30/5m)

CRYO METER MBD series Instruction Manual

(Note:Wiringsindicatedwithdottedlineneedstobedonebyusers.)
Figure 4-2 Wiring of MBD-S/MBD-T and MBS
Conduit Requirements for MBD wiring
To prevent interference during the operation, there should be a separate conduit for each
signal line, control line and AC power line. Especially ANALOG signal line of MBS must be
in separate conduit from other equipments or AC power lines or control lines for other
equipments. Otherwise, MBS operation will be interfered.
If separate conduits cannot be supplied, keep enough distance (generally 300mm or more)
between different wirings. It is effective to prevent interference.
A
B
A
B
MBS
POWER
RELAY
ANALOG
K(CA)
OUT
A
B
MBD
POWER OUT
ANALOG IN
T
wisted shielded cable
Twisted shielded cable
AWG#24,or0.3mm2max.
AWG#2
DIGITAL IN
K thermocouple IN
[Userʼscontrolpanel]
Us e
User equipment side
(*2)
(*2)
4,or0.3mm2max.
er equipment sid
(*2) MBS-MBD connecting cable (5m)
A
B
C
A
B
C
A
B
C
D
+
-
+
-
< 20K
> 280K
MBD-S: AC100V Plug
BD-T: Terminal connection (AC100-200V)
Power cable
E
M
CAUTION
6 ULVAC CRYOGENICS INCORPORATED

CRYO METER MBD series Instruction Manual
ULVACCRYOGENICSINCORP RATED 7
◆Power connection and protection

Figure 4-3 is a MBD-S/MBD-T power supply examples and its connection.
It is recommended to calculate the capacities of the step-down transformer and of branch
circuit protector/fuse by formulas below.

(*1) Step-down transformer: Number of MBDs x 15 x 3 [VA]
(*2) Branch circuit protector/fuse: Number of MBDs x 0.15 x 4 [A]

For example, when using four MBDs, the capacity of the step-down transformer can be
calculated as 180[VA] by the formula, 4 x 15 x 3. Also the capacity of a protector/fuse should
be more than 2.4[A], 4 x 0.15 x 4. Thus, it is appropriate to choose a trans that capacity of
200VA and a protector/fuse of 3A.
(Note: MBD-S and MBD-T need less consumption current compared to that of existing MBD.)
When 200V power supply is used, such as MBD-T, the power line surge will be larger. It is
recommended to install varistor near the terminal block.
(*3) Recommended varistor type: ERZV10D471 Matsushita
(The wirings shown on the left side of the dotted line
MBD-S
MBDPowercable
Trans
200V
0VI
220V
R1
S1 0V
100V
115V
User’s power line
for Cryopump
ACoutletfor
MBD-Spowersupply
Protector or
a fuse
(*2)A
(*1)VA
PE
(Use jumper with
EN60204-1)
R1
S1 (White)
(Plug:PSE7A/125V)
L
N
E
N
N
(Green/Yellow)
Terminalblockfor
MBD-T
p
owersu
pp
l
y
Protector or
a fuse (*3)Varistor
(*2)A
MBD-T
need to be done by customers)
Figure 4-3 MBD-S/MBD-T Power Supply Circuit
O

MBD CRYO-METER Instruction Manual
8ULVAC CRYOGENICS INCORPORATED
5. OperationOperation

Turn on the powerTurn on the power
Turn on the input power of the MBD. If there is any sign of abnormal behavior and/or
hazard of the MBD, cut off the branch circuit power for MBD immediately. Then check the
wiring referring to “6. Troubleshooting” in this instruction manual.
Turn on the input power of the MBD. If there is any sign of abnormal behavior and/or
hazard of the MBD, cut off the branch circuit power for MBD immediately. Then check the
wiring referring to “6. Troubleshooting” in this instruction manual.
Afterturning on the power, ensure that the POWER lamp on the display panel lights on.Afterturning on the power, ensure that the POWER lamp on the display panel lights on.
Temperature monitoringTemperature monitoring
MBD displays the second stage temperature of cryopump with numeric numbers so that the
temperature can be checked with eyes easily.
MBD displays the second stage temperature of cryopump with numeric numbers so that the
temperature can be checked with eyes easily.








 Figure 5-1 CRYO METER MBD DisplayFigure 5-1 CRYO METER MBD Display

6. Troubleshooting6. Troubleshooting

Preventive maintenance and inspectionPreventive maintenance and inspection
Following points should be ensured at periodic inspections.Following points should be ensured at periodic inspections.
No damage on the housing and/or the cables.No damage on the housing and/or the cables.
No stress or force on the cables.No stress or force on the cables.
All plugs of the cables are tightened.All plugs of the cables are tightened.
If any problem is found at an inspection, follow the troubleshooting procedures in the
troubleshooting lists on page 13 and 14 or contact our customer support.
If any problem is found at an inspection, follow the troubleshooting procedures in the
troubleshooting lists on page 13 and 14 or contact our customer support.
POWER lamp
The second stage temperature
ofcryopump