Ulvac GI-M2 Installation guide

SK00-7723-EQ-003-01
Metal Ionization Vacuum Gauge
GI-M2
Ionization Vacuum Gauge GI-D7
Quick Manual
Introduction
This quick manual is for quick check of operation and display of the product.
Please refer to instruction manual attached in advance for detailed
information about operation, precautions and safety for proper use.
Available for download from ULVAC website.
https://showcase.ulvac.co.jp/en
This manual is for the following gauges. Serial Nos.
GI-M2：S/N32000G、GI-D7：S/N30030G and higher
1. Setting
1.1. Initial Setting
Mode
Set value
GI-M2
GI-D7
Sensor head setting
SEn
Not used
SnS 1
Sensitivity factor set value
SEn(1)
6.00 -2
8.00 -2
SETPOINT-1
SEt-1
1.00 -0
5.00 -3
SETPOINT-2
SEt-2
1.00 -1
5.00 -4
Range changeover set value
rAn(1)
-8
-7
Degas auto OFF set value
dGS(1)
01
01
Filament
FIL
FIL 1
FIL 1
Analog output
rEC
rEC 1
rEC 1
REC-HOLD set value
rEC
-8
-7
Activated filament setting
Act
Not used
Not used
Baud rate
bPS
9600
9600
1.2. Selection of Sensor Head（GI-D7 Only）
SnS:1 ⇒WIT SnS:2 ⇒WIB
1.3. Selecting the Sensitivity Factor Function
GI-M2
GI-D7
SEn:1
N2
N2
SEn:2
Ar
Ar
SEn:3
Any value
Any value
*: N2 and the Ar sensitivity are calculated by normal sensitivity
1.3.1. Details of Sensitivity Set Values
"Sensitivity" referred to here is the total sensitivity obtained by multiplying the
sensitivity constant (K) of the ULVAC sensor head (M type) for nitrogen by the
relative sensitivity (Srj) for various types of gases, where the sensitivity for nitrogen
is given as 1.
In case of M-11, intrinsic sensitivity 0.05 Pa-1 (normal sensitivity is 0.06 Pa-1)
N2: 0.05 Pa-1 ＝Srj(N2)
Ar：0.067 Pa-1 ≒Srj(N2) × Srj ＝0.05 Pa-1×1.34
1.4. Setting of SetPoint 1/2
GI-M2
GI-D7
Setiing
range
9.99×10-0 ～5.00×10-8
WIT : 6.79×10-1 ～1.00×10-5
WIB : 2.00×10-2 ～1.00×10-6
1.5. Selection of Range Changeover Function
rAn:1 ⇒AUTO RANGE MODE rAn:2 ⇒RANGE HOLD MODE
1.6. Setting of Range HOLD
GI-M2
GI-D7
Setting range
-0 ~ -8
-1 ~ -7
1.7. Selection of DEGAS Function
(1) dGS:1 ⇒MANUAL MODE
A single press on the DEGAS switch turns ON degassing and a second press
turns OFF degassing.
(2) dGS:2 ⇒AUTO MODE
A single press on the DEGAS switch turns ON degassing. It is automatically
turned OFF when an arbitrarily designated time elapses. If it is desired to turn it
OFF before the time elapses, press the DEGAS switch, and degassing will be
turned OFF.
1.7.1. Setting of DEGAS Function
Settable numeric values are 01 to 99 minutes.
1.8. Setting of Filament 1/2
FIL:1 ⇒Filament 1 FIL:2 ⇒Filament 2
1.9.Selection of Analog Function
GI-M2
GI-D7
rEC:1
Eeach-digit linear output mode
rEC:2
Pseudo-logarithmic mode
rEC:3
Range hold liniea mode
rEC:4
logarithmic mode
GI-D6 compatibility output mode
rEC:5
Not used
GI-TL3 compatibility output mode
Status
Measurement value output voltage
Filament OFF
0.00V
Filament ON [Em.Valid OK]
Voltage corresponding to measured pressure
Filament ON [Em.Valid NG]
0.00V
When pressure protection is
activated (Filament is OFF)
0.00V
1.9.1. LIN output in each status
Ｐ＝Ｖ×１０＾－Ｓ (Pa)
P: Pressure , V: Output voltage, S:Measured pressure range
1.9.2. GI-M2 Pseudo-LOG output
Ｐ＝１０（Ｖ－Ｅ）×１０＾（Ｅ－８） (Pa）
P: Pressure , V:Output voltage, E:V from which decimal point is rounded down
1.9.3.GI-D7 Pseudo-LOG output
Ｐ＝１０（Ｖ－Ｅ）×１０＾（Ｅ－７） (Pa）
P: Pressure, V:Output voltage, E:V from which decimal point is rounded down
1.9.4. Range Hold Linear Output (REC-HOLD) (by E-4)
1.9.5. Logarithmic Output (GI-M2)
Ｐ＝１０＾（Ｖ－８） ⇔ Ｖ＝ｌｏｇＰ＋８
P: Pressure, V: Output voltage
1.9.6.GI-D6 Compatibility output setting WIT （GI-D7 Only）
Ｐ＝１０×（Ｖ－Ｅ）×１０＾（Ｅ－５） (Pa)
P: Pressure, V: Output voltage, E: V from which decimal point is rounded down
1.9.7.GI-D6 Compatibility output setting WIB （GI-D7 Only）
Ｐ＝１０×（Ｖ－Ｅ）×１０＾（Ｅ－６） (Pa)
P: Pressure, V: Output voltage, E: V from which decimal point is rounded down
1.9.8.GI-TL3 Compatibility output （GI-D7 Only）
Ｐ＝１０＾（Ｖ／２－５） (Pa)
P: Pressure, V: Output voltage
2. Nomenclature and Functions of Components
Name (Inscription)
Function
①
POWER
Pressing the top of the POWER switch turns on power
and pressing the bottom turns it off. When the power is
on, the LED in the switch is lit.
②
FIL
Used to turn on/off the filament. The first press on the
key turns on the filament and a second press turns it off.
③
DEG
Used to turn on/off degassing. The first press on the key
turns on degassing and a second press turns it off.
Degassing is automatically turned off after a preset time
when used in the auto OFF mode.
④
F1
Not used
⑤
O PRG
Switch to change over to the setting mode.
Holding down the switch for 2 seconds or more changes
over the measurement mode/setting mode.
⑥

Each press on the switch increments a value by one.
⑦
Shifts a value to the right.
⑧
Used to store a set value in memory.
A set value cannot be changed unless this switch is
pressed because it is not stored in EEPROM.
Name
Function
①
SET1 lamp
Lit when set point 1 is activated.
②
SET2 lamp
Lit when set point 2 is activated.
③
PROTECT lamp
Lit when filament protection is activated by an external
input signal.
④
REMOTE lamp
Lit when the gauge is set in the REMOTE status by
external control (external I/O, RS-232C).
⑤
Em-Lo lamp
GI-M2: Lit when emission current is 10 A.
GI-D7: Not used.
⑥
Em-Hi lamp
GI-M2: Lit when emission current is 1 mA.
GI-N7: Not used.
0
1
2
3
4
5
6
7
8
9
10
1.0E-05 1.0E-04 1.0E-03
OutputVoltage (V)
Pressure (Pa)
Pressure increase
Pressure decrease
1.0E-(N)
1.0E-(N-1)
1.0E-(N-2)
0
1
2
3
4
5
6
7
8
9
10
1.0E-08 1.0E-07 1.0E-06 1.0E-05 1.0E-04 1.0E-03 1.0E-02 1.0E-01 1.0E+00 1.0E+01
Output Voltage (V)
Pressure(Pa)
0
1
2
3
4
5
6
7
8
1.0E-06 1.0E-05 1.0E-04 1.0E-03 1.0E-02 1.0E-01 1.0E+00
Output Voltage (V)
Pressure(Pa)
0.01
0.1
1
10
1.0E-07 1.0E-06 1.0E-05 1.0E-04 1.0E-03 1.0E-02 1.0E-01 1.0E+00
Output Voltage (V)
Pressure(Pa)
0
1
2
3
4
5
6
7
8
9
10
1.0E-08 1.0E-07 1.0E-06 1.0E-05 1.0E-04 1.0E-03 1.0E-02 1.0E-01 1.0E+00 1.0E+01
Output Voltage (V)
Pressure (Pa)
0
1
2
3
4
5
6
1.0E-05 1.0E-04 1.0E-03 1.0E-02 1.0E-01 1.0E+00
Output Voltage (V)
Pressure(Pa)
0
1
2
3
4
5
6
1.0E-06 1.0E-05 1.0E-04 1.0E-03 1.0E-02 1.0E-01 1.0E+00
Output Voltage (V)
Pressure(Pa)
0
1
2
3
4
5
6
7
8
9
10
1.0E-06 1.0E-05 1.0E-04 1.0E-03 1.0E-02 1.0E-01 1.0E+00
Output Voltage (V)
Pressure (Pa)
1 2 3 4 5 6 7 8
12 34 5 6
78910
Pa

⑦
FIL lamp
Lit: when the filament is ON and the emission current is
normal.
Blink: When the filament is ON and the emission current
is abnormal.
⑧
DEGAS lamp
Lit when degassing is ON.
⑨
F1 lamp
Not used
⑩
PRO lamp
Lit when in the program setting mode.
Name
Function
①
SENSOR
Connector for connecting the sensor head cable.
(multi-core/coaxial compound cable)
②
EXT-I/O
I/O connector for data and signals
③
RS-232C
Connector for communication (D-sub 9-pin pin connector)
④
Fan
Fan for radiating (blowing out) the heat in the gauge.
⑤
AC100V
Connector for connecting 3-core power cord with grounding
terminal.
⑥
FUSE
Fuse (2-ampere rapid action type) for protecting the gauge from
over-current.
⑦
GND
Ground terminal for this gauge. Attach M4 solder less terminal
before use. Analog ground, digital ground and frame ground
are common.
No.
Signal identification
No.
Signal identification
1
SET1 COM
26
SET2 COM
2
SET1 a contact
27
SET2 a contact
3
SET1 b contact
28
SET2 b contact
4
29
5
EXT-OUT COM
30
PRESSURE･DATA A-b0
6
POWER ON / OFF
31
PRESSURE･DATA A-b1
7
FILAMENT ON / OFF
32
PRESSURE･DATA A-b2
8
EMISSION ※1) Em-Hi / Em-Lo
33
PRESSURE･DATA A-b3
9
UNIT Pa
34
PRESSURE･DATA B-b0
10
DEGAS ON / OFF
35
PRESSURE･DATA B-b1
11
EMISSION･VALID OK / NG
36
PRESSURE･DATA B-b2
12
DATA･VALID Lo / Hi
37
PRESSURE･DATA B-b3
13
PRESSURE･DATA - / +
38
PRESSURE･DATA C-b0
14
PRESSURE･DATA C-b3
39
PRESSURE･DATA C-b1
15
PRESSURE･DATA D-b0
40
PRESSURE･DATA C-b2
16
41
17
DEGAS ON / OFF
42
LOCAL / REMOTE
18
EXT-PROTECT ON / OFF
43
FILAMENT ON / OFF
19
EXT- 5V INPUT-COM
44
EMISSION Em-Hi / Em-Lo
20
EXT-24V INPUT-COM
45
FILAMENT 2 / 1
21
46
REC-HOLD ON / OFF
22
47
23
GND
48
GND
24
GND (REC-OUT - )
49
GND
25
REC-OUT +
50
•A, B, C and D in PRESSURE DATA A-b0 and later correspond to «A. B 10 
DC» of the indicator. Refer to 10. EXTERNAL INNPUT/OUTPUTfor
more information.
•Digital output common is pin 5 by standard setting.
•The digital input power is the internal power by standard setting.
•Digital input common is 23, 24, 48, and 49.
• of signal identification (e.g. ON) indicates the LOW status (short, negative
logic).
※1) Em-Hi: 1mA(GI-M2), Em-Lo:10μA(GI-M2)
2.1. Set Point Output
AC: 125VMAX, 0.5AMAX DC: 24VMAX,1.0AMAX
2.2. External Digital Output
24VMAX,50mAMAX,saturation voltage 1V
2.3.Method of External Control
3.Specifications and Components
3.1.Standard Specifications
Name
GI-M2
GI-D7
Compatible
sensor head
1 pc
Pressure display
Mantissa part 3 digits, exponent part 2 digits digital display
□.□□ 10□□ ※1)
Compatible
sensor head
M-11,M-12,M-13,M-14,
M-15
WIT-G type, WIB-G type,
WIB-N3
Measurement
pressure range
5.00×10-8 ～9.99×100 (Pa)
WIT : 1.30×10-5-
6.70×10-1 (Pa)
WIB : 1.30×10-6-
1.30×10-2 (Pa)
Measurement
accuracy
Within ±15%
Operating
potential
Grid potential: 150(V), Filament potential: 25(V), Collector
potential:0(V)
Emission current
10μA,1.0mA ※2)
WIT: 0.595mA
WIB: 1.0mA
Sensor head
sensitivity
0.06 Pa-1
WIT: 0.139 Pa-1
WIB: 0.083 Pa-1
Pressure
protecting
function
9.99×10-0 Pa※3)
WIT: 9.99×10-1 Pa
WIB: 2.00×10-1 Pa
Degassing
function
Direct electrical heating of grid AC Power 1.5VA
Normal mode : Operates according to DEGAS ON/OFF signal.
Auto OFF mode : When this mode is set, degassing is
automatically turned off after a preset time by setting an
arbitrary time of 01 to 99 minutes
Function
Settiong of range hold､Selection of filament､Setting of
sensitivity
Sampling time
100msec
Analog output
Each digit mantissa part linear output,
All measurement ranges pseudo-log. Output,
Designated range hold linear output, LOG Output
Resolution : 10mV
Output impedance : Approx. 100 ohms
Setpoint
Two points can be set independently.
Relay contact output (COM, a contact, b contact for each
setting).
Contact capacity AC:125VMAX,0.5AMAX / DC: 24VMAX,1.0AMAX
Control input
signal
Control changeover, Filament ON/OFF, Filament 2/1, Degas
ON/OFF, Range hold, External protecting
Control output
signal
Analog output (0-10V), BDC output, Power condition,
Filament ON/OFF, Emission setting, Degas ON/OFF, Emission
valid OK/NG
RS-232C
9600/ 19200/ 38400 bps
Operating
temperature range
10 ~ 40 ℃
Operating
humidity range
15 ~ 80 % (No condensation)
Power
requirements
AC100±10V 50/60Hz
Power
consumption
60VA
120VA
Fuse
BS.SEMKO EWM 3.15A (Fuji Terminal Industry) (2 pc)
Outside
dimensions
240W 380D 99H (mm)
Weight
5.6kg
5.7kg
※1) Pressure display can set that mantissa part 2 digits, exponent part 2 digits
digital display (□.□□ 10□□).
※2) 10 A and 1.0 mA are automatically changed over depending on pressure,1.0
mA is available when the pressure measurement value is 0.79 10-2 Pa or less
※3) When use a tungsten filament, it is necessary to do pressure protection of a set
point of functioning in 9.9×10-3 Pa
3.2. Standard Accessories
External input/output connector
57-30500: DDK or equivalent
1 pc.
Power cable
125 V, 10 A, 3-pin cable, 3 m long
1 pc.
Quick manual
This paper
1copy
This gauge does not come with the RS-232C communication cable. Use a
commercially available RS-232C cable (cross type).
3.3. Options
Sensor head
Refer to 3.1 section
Sensor head cable
Refer to 3.1 section
4.Warranty
This product was shipped after rigid company inspection. However, in case any
failure occurs under ULVAC’s responsibility, such as defect in manufacturing and
damage during transportation, Buyer shall inform ULVAC, Inc. or the local
ULVAC representatives. ULVAC will repair or exchange it at free of charge.
Warrantable Items: This unit
Duration of guarantee: One (1) year after shipping date from ULVAC
Warrantee scope
1)Domestic business in Japan: Product, which has damage, caused by a failure
on delivery.
2)Direct export transaction: Product, which has damage, caused by a failure on
delivery. The warrantee scope shall confirm to the new INCOTERMS.
3)Products not satisfying meet the standard specifications although the product
is used under the normal service conditions such as temperature range and
power etc.
Response procedure
1)Domestic business in Japan: ULVAC send a replacement or Buyer return the
defective items to ULVAC, Inc. or to the local ULVAC representatives for
repair. If field service is required, Buyer shall ask ULVAC, Inc. or the local
ULVAC representatives.
2)Direct export transaction: ULVAC send a replacement or Buyer return the
defective items to ULVAC, Inc. or to the local ULVAC representatives for
repair. Return charge shall be paid by Buyer.
Disclaimer
1)Failure occurred after expiration of warranty period
2)Failure caused by force majeure, such as fire, storm and flood damage,
earthquake, lightning strike, war etc
3)Failure occurred due to carelessness handling or faulty usage
4)Products remodeled, disassembled or repaired without ULVAC’s acceptance
5)Failure occurred under abnormal environment, such as intense
electromagnetic field, radiation, high-temperature, high-humidity, flammable
gases, corrosive gases, dust etc.
6)Failure occurred by noise
7)Product deficiency or secondary damnification occurred to Buyer, from law
suit to ULVAC by third party for patent infringement.
8)Sensor head being used (expiration of life, measurement error, etc.)
9)Sensor head cable being used (cable burnout due to improper installation,
poor contact, etc.)
Others
1)In case, special agreement or memorandum for specifications is made
individually, the descriptions are prior to this article “13 Product Warranty”.
2)Buyer shall inform ULVAC when this product is exported out of Japan. In
the meantime, Buyer shall take necessary procedures according to Foreign
Exchange and Foreign Trade Law.
3)As for the question and consultation, Buyer shall check the model and serial
number and ask the local representative or ULVAC, Inc.
4)The content of this document is subject to change without notice in future.
5. Certificate of Contamination
Please enter the operating condition/trouble symptom of your vacuum gauge in
this form and submit it to your local ULVAC service station or sales office after
signing it. The form is available for download from ULVAC website.
6. Networks
ULVAC, Inc. http://www.ulvac.co.jp/eng/
Service Centers http://www.ulvac.co.jp/eng/support/service/index.html
Sales Office http://www.ulvac.co.jp/eng/support/sales_office/index.html
7. Related Drawings
ULVAC, Inc.
Components Division,
http://www.ulvac.co.jp/
１4５６
３ ２ ７
125
50 26
ａ接点
2(27)
COM
SET1
(SET2)
1(26)
3(28)
b接点
”HP4"
External digital
output (BCD etc.)
5：EXT-OUT COM
23,48：D-GND
（24,49：A-GND）
GND ISO
ＲＥＭＯＴＥ
ＦＩＬ－ＯＮ
ＤＥＧＡＳ－ＯＮ
ＬＯＣＡＬ
ＦＩＬ－ＯＦＦ
ＤＥＧＡＳ－ＯＦＦ
Ｈｉ
Ｌｏ
Ｈｉ
Ｌｏ
Ｈｉ
Ｌｏ
ＲＥＭＯＴＥ／ＬＯＣＡＬ
ＦＩＬ ＯＮ／ＯＦＦ
ＤＥＧＡＳ ＯＮ／ＯＦＦ
（Front panel）(Side panel)
（Panel cut）
(Rack-mount) (Fan)
or
（Rear panel）
（Max dimension)
（Main body)
（Main body)